Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
  • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
  • B23Q11/10—Arrangements for cooling or lubricating tools or work
  • B23Q11/1069—Filtration systems specially adapted for cutting liquids
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
  • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
  • B23Q11/10—Arrangements for cooling or lubricating tools or work
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • B01D—SEPARATION
  • B01D21/00—Separation of suspended solid particles from liquids by sedimentation
  • B01D21/0012—Settling tanks making use of filters, e.g. by floating layers of particulate material
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • B01D—SEPARATION
  • B01D21/00—Separation of suspended solid particles from liquids by sedimentation
  • B01D21/26—Separation of sediment aided by centrifugal force or centripetal force
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
  • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
  • B23Q11/0042—Devices for removing chips
  • B23Q11/0057—Devices for removing chips outside the working area
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B24—GRINDING; POLISHING
  • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
  • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
  • B24B55/12—Devices for exhausting mist of oil or coolant; Devices for collecting or recovering materials resulting from grinding or polishing, e.g. of precious metals, precious stones, diamonds or the like
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B24—GRINDING; POLISHING
  • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
  • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B28—WORKING CEMENT, CLAY, OR STONE
  • B28D—WORKING STONE OR STONE-LIKE MATERIALS
  • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B28—WORKING CEMENT, CLAY, OR STONE
  • B28D—WORKING STONE OR STONE-LIKE MATERIALS
  • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
  • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
  • B28D5/007—Use, recovery or regeneration of abrasive mediums
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M175/00—Working-up used lubricants to recover useful products ; Cleaning
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M175/00—Working-up used lubricants to recover useful products ; Cleaning
  • C10M175/0025—Working-up used lubricants to recover useful products ; Cleaning by thermal processes
  • C10M175/0033—Working-up used lubricants to recover useful products ; Cleaning by thermal processes using distillation processes; devices therefor
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M175/00—Working-up used lubricants to recover useful products ; Cleaning
  • C10M175/0058—Working-up used lubricants to recover useful products ; Cleaning by filtration and centrifugation processes; apparatus therefor
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • B01D—SEPARATION
  • B01D21/00—Separation of suspended solid particles from liquids by sedimentation
  • B01D21/26—Separation of sediment aided by centrifugal force or centripetal force
  • B01D21/262—Separation of sediment aided by centrifugal force or centripetal force by using a centrifuge
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • B01D—SEPARATION
  • B01D2221/00—Applications of separation devices
  • B01D2221/14—Separation devices for workshops, car or semiconductor industry, e.g. for separating chips and other machining residues
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
  • C10N2040/00—Specified use or application for which the lubricating composition is intended
  • C10N2040/20—Metal working
  • C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
  • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
  • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
  • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Definitions

• the invention relates to a process for the preparation of a suspension from a separation process, wherein the suspension of a particulate
• the separation of cylindrical silicon ingots, so-called ingots in wafers, is carried out for example with a wire saw, wherein usually an additional abrasive is used.
• an abrasive may be, for example, silicon carbide slurried in a suitable medium.
• the abrasive, the slurry and silicon particles separated by the cutting process are waste products.
• a wet powder agglomerate consisting of silicon carbide particles and silicon powder is first diluted by adding water. This is followed by the separation of a water slurry of the available abrasive particles and a water slurry containing the silicon particles. Subsequently, the slurry of the abrasive particles is dried in an oven for their recovery and reuse. Further, the water slurry of Silicon powder is filtered to recover the silicon powder for subsequent drying.
• the spent abrasive liquid is heated prior to the water thinning step to reduce its viscosity.
• Another aspect of the teaching there is to filter the spent heated liquid of low viscosity in order to recover on the one hand the wet powder agglomerate and on the other hand the slurry containing silicon particles.
• the suspension consists of a particulate abrasive and a liquid slurry, the following steps being carried out to prepare this suspension:
• the suspension is diluted in a tank with additional slurry.
• this dilution is explicitly dispensed with an additional addition of water.
• a constant volume ratio is established between the particulate abrasive and the liquid slurry.
• the volume ratio between the particulate abrasive and the slurry is, after dilution, between 1: 1 and 1:10. Preferably, the volume ratio is 1: 5.
• the diluted suspension is then placed in a separator, in particular a centrifugal separator, which effects separation of the diluted suspension into a liquid and a solid fraction.
• a separator in particular a centrifugal separator, which effects separation of the diluted suspension into a liquid and a solid fraction.
• the separated liquid and solid fractions can either be further refined in subsequent processing cycles or are already available as reusable materials after this process step.
• the particulate abrasive is silicon carbide (SiC).
• the slurry may be polyethylene glycol (PEG).
• the inventive method also provides that the suspension provided with additional slurry in the tank for reduction the viscosity is heated.
• This heating step may for example be carried out at a temperature of about 90 0 C.
• the solid fraction separated in the centrifugal separator can already be used in this state for reuse in a separation process as a so-called slurry ryanate. This is not possible with previously known centrifugal processes, since in these cases an after-treatment of the separated solid fraction is absolutely necessary.
• the separated liquid fraction however, subjected to a post-purification.
• a post-purification can be done for example by means of filtration.
• the use of a filter press with possible filtration aids is conceivable.
• the thus purified liquid fraction can be used as Aufschlämmffen use and fed in a cycle of the suspension to be prepared for dilution in the tank.
• residual material particles are also deposited, which may be, for example, silicon (Si) and / or silicon carbide.
• the residual material particles deposited in this way can be used as semi-finished products. Thus, a recycling of difficult to obtain and therefore expensive silicon is possible.
• a further aspect of the invention provides for subjecting at least a portion of the post-purified liquid fraction, which corresponds to the liquid fraction of the feed suspension, to distillation.
• the post-purified liquid fraction which corresponds to the liquid fraction of the feed suspension
• distillation By means of such distillation, it is possible to remove volatile and nonvolatile fractions.
• the distillation is preferably carried out under vacuum, in particular at a pressure of approx. lO "2 mbar.
• the recovered distillate is bottled in a tank and is ready for further use in this form.
• the recovered distillate in which it is z. B. is a PEG product, sold or added to the Slurryansatz obtained by the separation in the centrifugal separator. This slurrieset can then be used in a subsequent sawing process.
• the method according to the invention finds application in the production of silicon wafers, that is to say when cutting into individual wafers of cylindrical silicon ingots.
• a plant for carrying out the method according to the invention essentially comprises a tank for dilution, a centrifugal separator, a filter system and a distiller. These individual components are preferably housed in separate containers, so that they can be easily transported to different locations and built.
• the solids fraction separated by the centrifugal separator contains less fines compared to known centrifugal processes, allowing longer use of the solid fraction than conventional centrifugal processes. Furthermore, the separated liquid fraction does not have to be thoroughly cleaned in a centrifuge, as has hitherto been the case in known centrifuge processes.
• the arrangement and process scheme for the preparation of a suspension shown in the figure relates in the present case to the treatment of a suspension resulting from the production of silicon wafers, which consists of particulate abrasives and a liquid slurry.
• the particulate abrasives are silicon carbides and the slurry is polyethylene glycol.
• the suspension is first placed in a tank 1, where it is diluted with additional slurry, but not with water.
• the additional slurry is again polyethylene glycol.
• a nearly constant volume ratio of 1: 5 is produced.
• the suspension provided with additional slurry can be heated in the tank 1. Since the used suspension can be present in different mixing ratios with respect to the proportions of particulate abrasive in the liquid slurry, a control is attached to the inlet of the slurry to be introduced into the tank, so that only so much liquid slurry is fed to the tank until a predetermined Volume ratio between the particulate abrasive and the liquid slurry is made.
• the dilute suspension in the tank 1 and heated for the purpose of viscosity reduction is then placed in a centrifugal separator 2 where the suspension is separated into a liquid and a solid fraction.
• the separated solid fraction contains u .a. Silicon carbide and a small proportion of the PEGs and can thus form a Slurryansatz, as used in the sawing of silicon ingots, by the addition of purified PEG, the corresponding use mixture is restored.
• the liquid fraction separated in the centrifugal separator 2 is subsequently subjected to purification, which is carried out, for example, by use of filters 4.
• Part of the post-purified liquid fraction (PEG) can then be used as a diluent of the suspension in tank 1.
• Through the filter 4 residue particles are collected, which u. a. Silicon and silicon carbide particles included.
• the silicon thus obtained can be used as a finished or semi-finished product.
• the PEG purified by the filter unit 4 can also be fed to a distiller 5, whereby removal of low-volatile and low-volatility fractions takes place at very low pressures.
• the distillation takes place under vacuum, in the present case at a pressure of approx. 10 ⁇ 2 mbar.
• the distillation throughput of the purified PEG is, for example, at approx. 250 l / h.
• the recovered distillate is high-quality PEG, which is preferably filled into a tank 6.
• the PEG stored in this way can either be resold or used to refine the Slurryansatzes 3 formed by the Zentrifugalseparator 2.
• the process described represents processes for the preparation of a suspension from a separation process, which are carried out without additional addition and consequently contamination of water.
• the individual components of the treated suspension can be reused to a very high proportion, which ultimately only a very small proportion of waste products.
• a significantly better quality of the recovered solid and liquid components is achieved.

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• Chemical & Material Sciences (AREA)
• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Oil, Petroleum & Natural Gas (AREA)
• Organic Chemistry (AREA)
• Combustion & Propulsion (AREA)
• General Chemical & Material Sciences (AREA)
• Physics & Mathematics (AREA)
• Thermal Sciences (AREA)
• Grinding-Machine Dressing And Accessory Apparatuses (AREA)
• Carbon And Carbon Compounds (AREA)
• Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
• Auxiliary Devices For Machine Tools (AREA)
• Silicon Compounds (AREA)
• Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
• Mechanical Treatment Of Semiconductor (AREA)
• Separation Of Solids By Using Liquids Or Pneumatic Power (AREA)
• Physical Water Treatments (AREA)

Applications Claiming Priority (3)

Publications (1)

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Family Applications (1)

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• 2009
  • 2009-07-28 DE DE102009034949A patent/DE102009034949A1/de not_active Ceased
• 2010
  • 2010-06-30 US US13/382,799 patent/US20120110789A1/en not_active Abandoned
  • 2010-06-30 EP EP10732680A patent/EP2451610A1/de not_active Withdrawn
  • 2010-06-30 CN CN2010800308991A patent/CN102470501A/zh active Pending
  • 2010-06-30 KR KR1020127003352A patent/KR20120083277A/ko not_active Application Discontinuation
  • 2010-06-30 SG SG2011096518A patent/SG176990A1/en unknown
  • 2010-06-30 WO PCT/EP2010/059259 patent/WO2011003782A1/de active Application Filing
  • 2010-06-30 JP JP2012518894A patent/JP2012532762A/ja active Pending
  • 2010-06-30 RU RU2012104794/02A patent/RU2012104794A/ru not_active Application Discontinuation
  • 2010-06-30 CA CA2767415A patent/CA2767415A1/en not_active Abandoned
  • 2010-06-30 IN IN1122DEN2012 patent/IN2012DN01122A/en unknown

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