EP2195664A2 - Capteur d'accélération - Google Patents

Capteur d'accélération

Info

Publication number
EP2195664A2
EP2195664A2 EP08804670A EP08804670A EP2195664A2 EP 2195664 A2 EP2195664 A2 EP 2195664A2 EP 08804670 A EP08804670 A EP 08804670A EP 08804670 A EP08804670 A EP 08804670A EP 2195664 A2 EP2195664 A2 EP 2195664A2
Authority
EP
European Patent Office
Prior art keywords
web
substrate
seismic mass
acceleration sensor
seismic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08804670A
Other languages
German (de)
English (en)
Inventor
Dirk Rehle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP2195664A2 publication Critical patent/EP2195664A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details

Definitions

  • the invention is based on an acceleration sensor with a substrate, at least one web and a seismic mass, wherein the web and the seismic mass are arranged above a plane of the substrate.
  • the seismic mass is arranged at least on two sides of the web, and suspended resiliently on the web.
  • the web is anchored to the substrate by means of at least one anchoring.
  • the substrate is made of a different material than the at least one web, mechanical stresses between the substrate and the
  • Gluing or capping are caused. Since the web and the seismic mass are the much weaker compared to the substrate elements, these stresses are reduced by the fact that deform the web and the seismic mass. This alters the placement of the seismic mass relative to the substrate and other solid elements attached to the substrate. For example, in capacitively operating acceleration sensors as a result of a change in the distance of mobile electrodes to fixed electrodes, a zero error for the measured capacitance results.
  • the patent DE 196 39 946 shows a micromechanical acceleration sensor having a surface micromechanical structure with two closely spaced suspension points between which a movable seismic mass extends, which is suspended at the two suspension points by means of suspension springs.
  • the patent application DE 19523895 A1 shows a micromechanical rotation rate sensor with a surface micromechanical structure with a central suspension (a central suspension point) with a seismic mass arranged around it, which by means of suspension springs on the
  • FIGS. 5 and 6 show in FIGS. 5 and 6 a micromechanical sensor with a central suspension and two seismic masses arranged opposite one another, which are connected to one another by means of connecting webs and suspended from the central suspension.
  • European Patent Application EP 1083144 A1 shows a micromechanical device with a central suspension and two seismic masses arranged opposite one another, which are connected to one another by means of connecting webs and suspended from the central suspension by means of a connecting beam.
  • the central suspension is located at the center (at the center axis of the area or center of mass) of the entire movable structure.
  • EP 1626283 A shows a micromechanical device with a central suspension and two oppositely disposed seismic masses, which are interconnected by means of connecting webs and at the central suspension by means of a
  • the central suspension is located in the center (on the central axis) of the entire movable structure. Furthermore, a plurality of movable electrodes and, in addition, a plurality of fixed electrodes are disclosed on the movable structure. The plurality of fixed electrodes has a common suspension, which in the vicinity the central suspension is arranged.
  • the non-prepublished patent application DE 10 2006 033 636 shows a similar subject.
  • the present invention has for its object to provide an acceleration sensor which is designed so that a zero error for the measured capacitance is avoided.
  • the invention is based on an acceleration sensor with a substrate, at least one web and a seismic mass, wherein the web and the seismic mass are arranged above a plane of the substrate.
  • the seismic mass is arranged at least on two sides of the web, and suspended resiliently on the web.
  • the web is anchored to the substrate by means of at least one anchoring.
  • the essence of the invention is that the at least one anchorage is located outside the center of gravity of the seismic mass.
  • the at least one anchorage is in the immediate vicinity of the center of gravity, so that bending of the substrate and / or the seismic mass may affect the relative orientation of the web and the seismic mass to the substrate as little as possible.
  • such acceleration sensors can be designed to save space on the substrate.
  • An advantageous embodiment of the invention provides that at least two anchors are provided.
  • the at least two anchors are in close proximity to one another, so that bending of the substrate can hardly influence the relative orientation of the web to the substrate.
  • a particularly advantageous embodiment of the invention provides that the center of mass between the two anchors is arranged.
  • the seismic mass is arranged annularly around the web.
  • An advantageous embodiment of the invention provides that at least two webs are provided, on which the seismic mass is suspended resiliently.
  • anchoring the seismic mass in one point or in a relatively small area is advantageous. This point need not be in the center of gravity of the seismic mass. Due to the load distribution, however, it has advantages if the point is close to the center of mass. If several anchors are provided, it is advantageous to have these anchors within a small area, i. in relation to the extent of the structure to be anchored relatively close to each other to arrange. For the load distribution, it is advantageous if the center of gravity is arranged between the anchors. At a capacitive
  • Acceleration sensor are provided movable electrodes on the seismic mass and opposite stationary electrodes on the substrate. If a common anchoring of the stationary electrodes is provided, it is advantageous for achieving the lowest possible zero error to provide this joint anchoring in the vicinity of the anchoring of the seismic mass.
  • Figure 1 shows an acceleration sensor with central suspension in the prior art.
  • FIG. 2 shows a first embodiment of a device according to the invention
  • FIG. 3 shows a second embodiment of a device according to the invention
  • FIG. 4 shows a third embodiment of a device according to the invention
  • FIG. 1 shows an acceleration sensor in the prior art as described in the non-prepublished patent application DE 10 2006 033 636.
  • FIG. 1 shows an acceleration sensor made, for example, by depositing a polysilicon layer on an oxide layer, which in turn is provided on a silicon substrate. In the oxide layer recesses are formed so that in these recesses connections of the polysilicon layer are formed to the silicon substrate. The structures shown in FIG. 1 are then defined and the oxide layer removed in an etching process. The polysilicon layer remains connected to the silicon substrate.
  • the acceleration sensor comprises a central web 1, a right web 2 and a left web 3, while the right web 2 and the left web 3 extend parallel to the central web 1 on the right or left side thereof.
  • the central web 1, the right web 2 and the left web 3 are arranged above a substrate which runs in the plane of the paper and connected to the substrate in each case at a central anchoring area 4, a right anchoring area 5 and a left anchoring area 6.
  • the anchors 4, 5, 6 with the substrate are located under the webs 1, 2, 3 and are not actually visible from this perspective and therefore shown in phantom.
  • Each of the anchors 4, 5, 6 is centrally located, i. the anchors 4, 5, 6 are as close as possible or even just below the centers of gravity of the respective webs
  • the anchors 4, 5, 6 are also located as close to each other as possible. They are therefore on a line that crosses the central web 1, the right web 2 and the left web 3 transversely.
  • tines 7 of a right-hand electrode On the right side of the right web 2, which faces away from the central web 1, tines 7 of a right-hand electrode are formed. The tines 7 of the right-hand electrode engage in the tines 8 of a right seismic electrode. On the left side of the left web 3, which faces away from the central web 1, tines 7 of a left-hand electrode are formed. The tines 7 of the left stem electrode engage in the tines 8 of a left seismic
  • the tines 8 of the left seismic electrode and the right seismic electrode are attached to a closed frame 9.
  • the frame 9 and the tines 8 of the seismic electrodes are perforated, ie have a regular arrangement of through holes.
  • the perforation allows an etching medium to penetrate to an underlying layer during the etching process so that the frame 9 and prongs 8 can be safely separated from the substrate.
  • the tines 7 and the webs 1, 2, 3 may be perforated.
  • the frame 9 is suspended on springs 10 at opposite ends of the central web 1.
  • Each spring 10 consists of a plurality of elongated thin rods which are arranged parallel to each other. Two adjoining bars are spaced apart either at their ends or at their center.
  • the springs 10 can therefore be easily deformed perpendicular to the parallel bars, but not parallel to it.
  • the springs 10 are also arranged so that the frame, in particular along the three parallel webs 1, 2, 3 is displaceable. At the two ends of the web 1 in each case a transverse strut 11 is formed, which protects the fine prongs 7, 8 of the seismic electrodes against an action by the deformed springs 10.
  • the pair of the left and left seismic electrodes and the pair of right and left seismic electrodes together form a differential capacitor.
  • a left side capacitance between the left stator electrode and the left seismic electrode is subtracted from a right side capacitance between the right stator electrode and the right seismic electrode. Without an acceleration this difference is zero because of the distance from neighboring ones
  • Tine pairs 7, 8 on both sides of the central web 1 is the same. If, due to an acceleration, a prong 7 of the left-hand stalk electrode moves away from an adjacent prong 8 of the left seismic electrode, a prong 7 of the right-hand stub of an adjacent prong 8 of the right seismic electrode feeds simultaneously. This takes the left-sided
  • FIG. 2 shows a first embodiment of an acceleration sensor according to the invention with a center-near suspension.
  • the middle web 1 is anchored to the underlying substrate by means of two anchors 41 and 42.
  • the center of gravity 10 also often referred to as the centroid or the central axis
  • the two anchors 41 and 42 are anchored to the underlying substrate by means of two anchors 41 and 42.
  • the center of gravity 10 also often referred to as the centroid or the central axis
  • FIG. 3 shows a second embodiment of an acceleration sensor according to the invention with a suspension close to the center.
  • the central web 1 is divided into two parts, such that two webs 12 and 13 are provided, which are anchored with one anchorage 41 and 42 to the substrate.
  • the center of mass 10 of the seismic mass 9 in this case passes through none of the webs 12, 13.
  • the anchors 41 and 42 are not arranged at the center of gravity 10, but at a small distance next to it.
  • the center of gravity 10 is also between the anchors 41 and 42nd
  • FIG. 4 shows a third embodiment of an acceleration sensor according to the invention with a center-near suspension.
  • the webs 2 and 3 of the left and right stem electrode are also anchored to the substrate with a plurality of anchors 51 and 52 or 61 and 62.
  • the left and right hand electrode do not each have a common web 2, 3, but that the tines 7 are anchored individually or in small groups on the substrate.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

L'invention concerne un capteur d'accélération comprenant un substrat, au moins une entretoise (1, 12, 13) et une masse sismique (9), l'entretoise (1, 12, 13) et la masse sismique (9) étant disposées au-dessus d'un plan du substrat. La masse sismique (9) est disposée au moins des deux côtés de l'entretoise (1, 12, 13) et suspendue élastiquement à l'entretoise (1, 12, 13). L'entretoise (1, 12, 13) est fixée au moyen d'au moins un ancrage (41, 42) au substrat. L'invention est caractérisée en ce que l'ancrage (41, 42) est disposé à l'extérieur du centre de gravité (10) de la masse sismique (9).
EP08804670A 2007-10-05 2008-09-24 Capteur d'accélération Withdrawn EP2195664A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007047592.8A DE102007047592B4 (de) 2007-10-05 2007-10-05 Beschleunigungssensor
PCT/EP2008/062765 WO2009047120A2 (fr) 2007-10-05 2008-09-24 Capteur d'accélération

Publications (1)

Publication Number Publication Date
EP2195664A2 true EP2195664A2 (fr) 2010-06-16

Family

ID=40418107

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08804670A Withdrawn EP2195664A2 (fr) 2007-10-05 2008-09-24 Capteur d'accélération

Country Status (6)

Country Link
US (1) US8516890B2 (fr)
EP (1) EP2195664A2 (fr)
CN (1) CN101903778B (fr)
DE (1) DE102007047592B4 (fr)
TW (1) TWI438431B (fr)
WO (1) WO2009047120A2 (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008001863A1 (de) 2008-05-19 2009-11-26 Robert Bosch Gmbh Beschleunigungssensor mit umgreifender seismischer Masse
DE102009026476A1 (de) * 2009-05-26 2010-12-02 Robert Bosch Gmbh Mikromechanische Struktur
US8138007B2 (en) * 2009-08-26 2012-03-20 Freescale Semiconductor, Inc. MEMS device with stress isolation and method of fabrication
GB201020722D0 (en) 2010-12-07 2011-01-19 Atlantic Inertial Systems Ltd Accelerometer
GB2523320A (en) * 2014-02-19 2015-08-26 Atlantic Inertial Systems Ltd Accelerometers
WO2015166771A1 (fr) * 2014-04-28 2015-11-05 日立オートモティブシステムズ株式会社 Dispositif de détection d'accélération
JP6558110B2 (ja) * 2015-07-10 2019-08-14 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP6657626B2 (ja) * 2015-07-10 2020-03-04 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
CN107782916B (zh) * 2016-08-27 2021-07-09 深迪半导体(绍兴)有限公司 一种三轴加速计
JP6866624B2 (ja) 2016-12-07 2021-04-28 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器および移動体
JP6866623B2 (ja) * 2016-12-07 2021-04-28 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器および移動体
JP6822200B2 (ja) * 2017-02-17 2021-01-27 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器および移動体
JP6816603B2 (ja) * 2017-03-27 2021-01-20 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
JP2018179575A (ja) * 2017-04-05 2018-11-15 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
GB2565295A (en) * 2017-08-07 2019-02-13 Atlantic Inertial Systems Ltd Accelerometer
JP6922552B2 (ja) 2017-08-25 2021-08-18 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器、携帯型電子機器および移動体
JP6922562B2 (ja) 2017-08-31 2021-08-18 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、携帯型電子機器、電子機器および移動体
JP6922594B2 (ja) * 2017-09-22 2021-08-18 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器、携帯型電子機器および移動体
JP7188311B2 (ja) 2019-07-31 2022-12-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19500800A1 (de) 1994-06-16 1995-12-21 Bosch Gmbh Robert Beschleunigungssensor
DE4432837B4 (de) * 1994-09-15 2004-05-13 Robert Bosch Gmbh Beschleunigungssensor und Meßverfahren
US5635640A (en) 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
DE19523895A1 (de) 1995-06-30 1997-01-02 Bosch Gmbh Robert Beschleunigungssensor
DE19539946C2 (de) 1995-10-26 2002-03-28 Linde Gas Ag Verfahren und Vorrichtung zur integrierten Entsorgung von Filterstäuben in thermischen Behandlungsanlagen
DE19639946B4 (de) * 1996-09-27 2006-09-21 Robert Bosch Gmbh Mikromechanisches Bauelement
US6070464A (en) * 1997-09-05 2000-06-06 Motorola, Inc. Sensing structure comprising a movable mass and a self-test structure
US6230567B1 (en) 1999-08-03 2001-05-15 The Charles Stark Draper Laboratory, Inc. Low thermal strain flexure support for a micromechanical device
DE69938658D1 (de) 1999-09-10 2008-06-19 St Microelectronics Srl Gegen mechanische Spannungen unempfindliche mikroelektromechanische Struktur
US6393913B1 (en) * 2000-02-08 2002-05-28 Sandia Corporation Microelectromechanical dual-mass resonator structure
US6401536B1 (en) * 2000-02-11 2002-06-11 Motorola, Inc. Acceleration sensor and method of manufacture
US6845670B1 (en) * 2003-07-08 2005-01-25 Freescale Semiconductor, Inc. Single proof mass, 3 axis MEMS transducer
US20050235751A1 (en) * 2004-04-27 2005-10-27 Zarabadi Seyed R Dual-axis accelerometer
EP1626283B1 (fr) * 2004-08-13 2011-03-23 STMicroelectronics Srl Structure micro-electromechanique, en particulier accéléromètre, avec sensitivité reduite aux contraintes thermiques et mechaniques
DE602004023082D1 (de) * 2004-09-22 2009-10-22 St Microelectronics Srl Mikro-Elektromechanische Struktur mit Selbstkompensation von durch thermomechanische Spannungen hervorgerufenen thermischen Driften
US7121141B2 (en) * 2005-01-28 2006-10-17 Freescale Semiconductor, Inc. Z-axis accelerometer with at least two gap sizes and travel stops disposed outside an active capacitor area
DE102006033636B4 (de) 2006-07-20 2022-08-11 Robert Bosch Gmbh Beschleunigungssensor
DE102006059928A1 (de) * 2006-12-19 2008-08-21 Robert Bosch Gmbh Beschleunigungssensor mit Kammelektroden
DE102008001863A1 (de) * 2008-05-19 2009-11-26 Robert Bosch Gmbh Beschleunigungssensor mit umgreifender seismischer Masse

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2009047120A2 *

Also Published As

Publication number Publication date
WO2009047120A2 (fr) 2009-04-16
US20100212423A1 (en) 2010-08-26
WO2009047120A3 (fr) 2009-06-25
DE102007047592B4 (de) 2022-01-05
TWI438431B (zh) 2014-05-21
CN101903778B (zh) 2013-01-09
US8516890B2 (en) 2013-08-27
CN101903778A (zh) 2010-12-01
DE102007047592A1 (de) 2009-04-09
TW200925606A (en) 2009-06-16

Similar Documents

Publication Publication Date Title
WO2009047120A2 (fr) Capteur d'accélération
EP2102666B1 (fr) Detecteur d'acceleration avec electrodes a dents
EP2100151B1 (fr) Capteur z micromécanique
EP1379884B1 (fr) Detecteur
DE102008002606B4 (de) Mikromechanischer Beschleunigungssensor mit offener seismischer Masse
DE102008043524B4 (de) Beschleunigungssensor und Verfahren zu seiner Herstellung
DE19930779A1 (de) Mikromechanisches Bauelement
DE102008001863A1 (de) Beschleunigungssensor mit umgreifender seismischer Masse
EP2394177B1 (fr) Capteur d'accélération et procédé pour faire fonctionner un capteur d'accélération
DE102012223016B4 (de) Inertialsensor mit verringerter Querempfindlichkeit
DE69309008T2 (de) Kapazitiver Messaufnehmer für Beschleunigungen in allen Richtungen in einer Ebene
DE102011076551A1 (de) Inertialsensor
EP2435786A1 (fr) Structure micromécanique
DE102011057110A1 (de) MEMS-Beschleunigungssensor
EP0651371A2 (fr) Amortisseur de vibration pour atténuer le son structurel
DE202009007836U1 (de) MEMS-Sensor
DE102006033636B4 (de) Beschleunigungssensor
EP3377856B1 (fr) Capteur de vitesse de lacet micromécanique et son procédé de fonctionnement
DE102009045645B4 (de) Sensorvorrichtung und Herstellungsverfahren für eine Sensorvorrichtung
DE102020204767A1 (de) Mikromechanische Vorrichtung mit Anschlagsfederstruktur
DE102006051329A1 (de) Z-Beschleunigungssensor mit verringerter Störempfindlichkeit
DE102015222532A1 (de) Mikromechanische Struktur für einen Beschleunigungssensor
DE102009045393B4 (de) Mikromechanisches Bauelement
DE4226430C2 (de) Kapazitiver Beschleunigungssensor
EP3665438B1 (fr) Capteur de vitesse de rotation, procédé de fabrication d'un capteur de vitesse de rotation

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20100506

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA MK RS

17Q First examination report despatched

Effective date: 20110525

DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20170401