EP2163763B1 - Pompe sous vide de refouleur oscillante - Google Patents

Pompe sous vide de refouleur oscillante Download PDF

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Publication number
EP2163763B1
EP2163763B1 EP09009702A EP09009702A EP2163763B1 EP 2163763 B1 EP2163763 B1 EP 2163763B1 EP 09009702 A EP09009702 A EP 09009702A EP 09009702 A EP09009702 A EP 09009702A EP 2163763 B1 EP2163763 B1 EP 2163763B1
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EP
European Patent Office
Prior art keywords
pressure
vacuum pump
drive chamber
oscillating
positive
Prior art date
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Application number
EP09009702A
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German (de)
English (en)
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EP2163763B2 (fr
EP2163763A1 (fr
Inventor
Jürgen Dr. Dirscherl
Frank Dr. Gitmans
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vacuubrand GmbH and Co KG
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Vacuubrand GmbH and Co KG
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Application filed by Vacuubrand GmbH and Co KG filed Critical Vacuubrand GmbH and Co KG
Publication of EP2163763A1 publication Critical patent/EP2163763A1/fr
Publication of EP2163763B1 publication Critical patent/EP2163763B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • F04B49/022—Stopping, starting, unloading or idling control by means of pressure

Definitions

  • the invention relates to an oscillating positive displacement vacuum pump having the features of the preamble of claim 1 and claim 2, respectively.
  • an oscillating positive displacement pump namely a diaphragm pump ( US 2007/0177985 A1 ), which is intended for the conveyance of liquids.
  • This positive displacement pump has a housing and a drive unit arranged in the housing.
  • the housing forms an interior space with an oscillating element, namely the diaphragm, which is arranged in relation to the housing and driven by the drive unit.
  • the interior is sealingly divided into a provided with inlet and outlet orifices in front of the membrane and a drive space behind the membrane sealing.
  • a pressure sensor is arranged in the inlet region or in the outlet region of the suction chamber. This is connected to an evaluation circuit. If a pressure is measured by means of the pressure sensor at the affected point, which indicates that the positive displacement pump is running dry or another flow error, then the drive unit of the positive displacement pump is switched off by an evaluation circuit connected to the pressure sensor and, if necessary, a warning signal is generated.
  • the subject matter of the invention is not a general oscillating positive displacement pump, but an oscillating positive displacement vacuum pump.
  • the medium to be pumped is gas or steam.
  • Oscillating positive displacement vacuum pumps such as diaphragm or piston vacuum pumps or combined diaphragm / piston vacuum pumps are known.
  • at least one pumping chamber is periodically reduced and enlarged by (one) an oscillating element.
  • the medium to be pumped gas or vapor
  • shrinking the pump chamber the medium in the pump chamber is compressed and ejected through at least one outlet opening (see, eg DE 199 04 350 C2 ).
  • the oscillating element not only serves to reduce and enlarge the pumping chamber, but must also seal the pumping chamber against the drive space underneath with elements for moving the oscillating element. This seal must be as good as possible. Leakages from the pumping chamber into the drive chamber and vice versa would reduce the efficiency of the pumping process, and also lead to a deterioration of the achievable vacuum level with vacuum pumps. With such reciprocating positive displacement pumps, and in particular with diaphragm pumps, chemically aggressive gases and vapors are often conveyed which, in the event of leakage from the (in this case chemically resistant) pumped space into the drive space, corrode the mechanical components such as bearings, connecting rods and shafts would lead in the drive room.
  • a failure of the seal is the most common cause of failure of such pumps, since the sealing member such as the membrane is exposed in a diaphragm pump or the piston seal on a piston pump a very high mechanical, thermal and possibly chemical stress. So for the membrane in a diaphragm pump typically lives of 3,000-20,000 hours specified in continuous operation so to expect such a failure within a few months or years. Accordingly, such diaphragm vacuum pumps are generally designed so that replacement of the typical wear part "membrane" can be performed by the customer without much effort.
  • the known oscillating positive displacement vacuum pump from which the present invention is based ( DE 199 04 350 C2 ), has a drive space which is sealed to the ambient atmosphere. This seal is comparatively good here. There are also other constructions in which the drive space is less well sealed to the ambient atmosphere or in which the drive space is not sealed to the ambient atmosphere, so it is open.
  • the drive space is relatively dense in many types of reciprocating positive displacement vacuum pumps to dampen noise from the back of the oscillating element as a result of its rapid movement.
  • the drive space - except for special sealing measures such as O-rings - but hardly so gas-tight that it does not without failure of the sealing element - at least over a longer period - the ambient pressure.
  • the drive space is sufficiently gas tight to detect a drop in pressure in the drive space due to failure of the sealing element during operation.
  • this attached behind the sealing element second element may also be arranged stationary, with sliding seal to the moving connecting rod.
  • the principle according to the invention can also be advantageously applied to oscillating positive displacement vacuum pumps having a plurality of pump stages with a common one Drive space and transmitted to the drive space with a common pressure drop detector.
  • the spaces between the sealing and the underlying second element can be connected to grass lines and so also with only one pressure drop sensor all pump stages are detected.
  • relative pressure sensors are used, which measure the pressure below the sealing element relative to the ambient pressure.
  • influences can be excluded by variations in ambient pressure due to weather or altitude.
  • the drive space or, in the case of an insufficiently gas-tight drive space, the gap between the sealing element and the element behind it is sufficiently gastight to provide a clearly measurable pressure drop in the event of leakage of the sealing element on the other hand, but not so gas-tight that without this leak does not come to a pressure equalization with the environment. Therefore, the pressure loss due to leakage of the sealing member with a relative pressure sensor relative to the ambient pressure can be easily and inexpensively detected.
  • the signal of the pressure sensor can be compared, for example, in a downstream electronics with a default value and at a pressure drop greater than a predetermined limit, a warning signal o. ⁇ . Be triggered.
  • This warning signal can also be used in a downstream control for process control or shutdown, so as to avoid consequential damage from the failure of the sealed element.
  • the pressure sensor can be designed as a pressure-controlled switching relay to turn off the pump.
  • the rapid oscillation of the oscillating element of the positive displacement pump is not critical for the evaluation of the signal of the pressure sensor when the pressure sensor itself has such a response that pressure fluctuations in the drive chamber or in the space with the operationally occurring oscillation frequency of the oscillating element by measurement not be dissolved at all, but only the resulting mean value of the pressure is determined by the pressure sensor.
  • Fig. 1 shows a first embodiment of an oscillating Verdrängervakuumpumpe 1, which may be a piston vacuum pump or, preferably, a diaphragm vacuum pump.
  • the illustrated embodiment shows for simplicity a piston vacuum pump.
  • the illustrated positive displacement vacuum pump 1 has a housing 2 and a motor drive unit 3, which is preferably arranged in the housing 2.
  • the housing 2 forms an interior.
  • a relative to the housing 2 sealing, oscillating element 4 is arranged.
  • the sealing, oscillating element 4 is a pump piston.
  • a Membrane vacuum pump is the circumferentially clamped elastic membrane (see DE 199 04 350 C2 ).
  • the interior of the housing 2 is sealingly divided by the oscillating element 4 into a suction chamber 7 provided with inlet and outlet openings 5, 6 in front of the element 4 and a drive space 8 behind the element 4.
  • the drive chamber 8 is even at least largely sealed to the ambient atmosphere.
  • a pressure sensor 9 is arranged at the drive chamber 8. With this, the pressure in the drive chamber 8 can be measured.
  • the pressure sensor 9 is generated by an evaluation circuit 10 to which the pressure sensor 9 is connected, a corresponding warning signal, control signal or shutdown signal.
  • a user is either warned or, for safety's sake, the drive unit 3 of the displacement vacuum pump is switched off immediately in order to avoid major consequential damage.
  • Fig. 1 shows connecting lines between the drive unit 3 and the evaluation circuit 10, which is designed in the form of a typical electronic control, preferably with a microprocessor.
  • a first line is provided to supply the evaluation circuit 10 with a signal showing the respective position of the drive unit 3, which can close the normally operationally expected pressure in the drive chamber 8.
  • the second line is provided to transmit a switch-off signal from the evaluation circuit 10 to the drive unit 3.
  • Fig. 2 shows another embodiment of an oscillating positive displacement vacuum pump 1, in which the drive chamber 8 is not even or little sealed to the ambient atmosphere.
  • the drive chamber 8 behind the sealing, oscillating element 4 by far a further sealing element 11 is arranged.
  • a pressure sensor 9 is arranged in the intermediate space 12 between the elements 4, 11, with the pressure in the space 12 is measured.
  • an appropriate warning signal, control signal or switch-off signal is generated by an evaluation circuit 10.
  • the further sealing member 11 is a member 11 which oscillates synchronously with the first member 4, so that the gap 12 normally maintains a substantially unchanged volume in operation.
  • the pressure in the gap 12 remains operationally substantially constant.
  • the measurement of a pressure drop through the pressure sensor 9 is very simple in terms of evaluation.
  • the positive displacement vacuum pump 1 is switched off following a shutdown signal to avoid consequential damage.
  • the pressure sensor 9 is designed as a relative pressure sensor which detects the pressure in the drive space or in the space 12 relative to the ambient pressure.
  • a preferably adjustable limit value for the differential pressure is that the pressure sensor 9 has such a response that pressure fluctuations in the drive chamber 8 or in the space 12 with the operationally occurring oscillation frequency of the oscillating element 4 are not resolved, but only determines the resulting mean value of the pressure in the drive chamber 8 and in the space 12 is, and that when the limit is exceeded, the evaluation circuit 10, a corresponding warning signal, control signal or shutdown signal is generated.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)

Claims (10)

  1. Pompe volumétrique à vide oscillante, comprenant un boîtier (2) et une unité d'entraînement (3) disposée dans le boîtier (2), le boîtier (2) formant un espace interne, un élément oscillant (4) disposé dans l'espace interne, réalisant l'étanchéité vis-à-vis du boîtier (2), entraîné par l'unité d'entraînement (3), l'espace interne étant divisé de manière hermétique par l'élément oscillant (4) en un espace de déplacement (7) pourvu d'ouvertures d'entrée et de sortie (5, 6) avant l'élément (4) et un espace d'entraînement (8) après l'élément (4), l'espace d'entraînement (8) étant étanché vis-à-vis de l'atmosphère environnante,
    caractérisée en ce
    qu'un capteur de pression (9) est disposé sur l'espace d'entraînement (8) et permet de mesurer la pression dans l'espace d'entraînement (8),
    en ce qu'un circuit d'analyse (10) est prévu et
    en ce que, lorsqu'une chute de pression est détectée dans l'espace d'entraînement (8) suite à un défaut d'étanchéité de l'élément oscillant (4) réalisant l'étanchéité par le circuit d'analyse (10), un signal d'avertissement, un signal de commande ou un signal de coupure correspondant est généré.
  2. Pompe volumétrique à vide oscillante, comprenant un boîtier (2) et une unité d'entraînement (3) disposée dans le boîtier (2), le boîtier (2) formant un espace interne, un élément oscillant (4) disposé dans l'espace interne, réalisant l'étanchéité vis-à-vis du boîtier (2), entraîné par l'unité d'entraînement (3), l'espace interne étant divisé de manière hermétique par l'élément oscillant (4) en un espace de déplacement (7) pourvu d'ouvertures d'entrée et de sortie (5, 6) avant l'élément (4) et un espace d'entraînement (8) après l'élément (4), l'espace d'entraînement (8) n'étant pas étanché vis-à-vis de l'atmosphère environnante,
    caractérisée en ce
    qu'un autre élément d'étanchéité (11) est disposé dans l'espace d'entraînement (8) derrière l'élément oscillant (4) réalisant l'étanchéité, à distance de celui-ci, de sorte qu'un espace intermédiaire (12) soit formé entre les éléments (4, 11),
    en ce qu'un capteur de pression (9) est disposé sur l'espace d'entraînement (8) dans l'espace intermédiaire (12) entre les éléments (4, 11) et permet de mesurer la pression dans l'espace intermédiaire (12),
    en ce qu'un circuit d'analyse (10) est prévu et
    en ce que, lorsqu'une chute de pression est détectée dans l'espace intermédiaire (12) suite à un défaut d'étanchéité de l'élément oscillant (4) réalisant l'étanchéité par le circuit d'analyse (10), un signal d'avertissement, un signal de commande ou un signal de coupure correspondant est généré.
  3. Pompe volumétrique à vide selon la revendication 2, caractérisée en ce que l'autre élément d'étanchéité est réalisé sous forme d'un élément (11) oscillant de manière synchronisée avec élément oscillant (4) réalisant l'étanchéité.
  4. Pompe volumétrique à vide selon l'une quelconque des revendications 1 à 3, caractérisée en ce que, suite à un signal de coupure, la pompe volumétrique à vide (1) est coupée par le circuit d'analyse (10).
  5. Pompe volumétrique à vide selon l'une quelconque des revendications 1 à 4, caractérisée en ce que le capteur de pression (9) est réalisé sous forme de capteur de pression relative, qui mesure la pression par rapport à la pression atmosphérique.
  6. Pompe volumétrique à vide selon l'une quelconque des revendications 1 à 5, caractérisée en ce que le capteur de pression (9) est réalisé sous forme de relais commutant sous commande de la pression.
  7. Pompe volumétrique à vide selon la revendication 5 ou la revendication 6, caractérisée en ce qu'une valeur limite pour la pression différentielle est mémorisée dans le circuit d'analyse (10),
    en ce que le capteur de pression (9) a un comportement de réaction tel que des variations de pression dans l'espace d'entraînement (8) ou dans l'espace intermédiaire (12) ne soient pas déclenchées avec la fréquence d'oscillation de l'élément oscillant (4) se produisant pendant le fonctionnement, mais que seulement la valeur moyenne résultante de la pression soit déterminée dans l'espace d'entraînement (8) ou dans l'espace intermédiaire (12), et
    en ce que, lorsque la valeur limite est dépassée, un signal d'avertissement, un signal de commande ou un signal de coupure correspondant est généré par le circuit d'analyse (10).
  8. Pompe volumétrique à vide selon la revendication 7, caractérisée en ce que la valeur limite pour la pression différentielle peut être réglée.
  9. Pompe volumétrique à vide selon l'une quelconque des revendications 1 à 6, caractérisée en ce que l'allure de la pression produite normalement pendant le fonctionnement dans l'espace d'entraînement (8) ou dans l'espace intermédiaire (12) est mémorisée dans le circuit d'analyse (10), en ce que la pression effectivement mesurée par le capteur de pression (9) dans l'espace d'entraînement (8) ou l'espace intermédiaire (12) est comparée à la pression correspondante de l'allure de la pression mémorisée, et
    en ce que, lorsque la pression mesurée s'écarte de la pression mémorisée de plus d'une valeur limite déterminée, un signal d'avertissement, un signal de commande ou un signal de coupure correspondant est généré par le circuit d'analyse (10).
  10. Pompe volumétrique à vide selon l'une quelconque des revendications 1 à 9, caractérisée en ce que le circuit d'analyse (10) est connecté à l'unité d'entraînement (3) par une technologie de mesure et une technologie de commande.
EP09009702.3A 2008-09-05 2009-07-28 Pompe sous vide de refouleur oscillante Active EP2163763B2 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE202008011817U DE202008011817U1 (de) 2008-09-05 2008-09-05 Oszillierende Verdrängervakuumpumpe

Publications (3)

Publication Number Publication Date
EP2163763A1 EP2163763A1 (fr) 2010-03-17
EP2163763B1 true EP2163763B1 (fr) 2011-02-23
EP2163763B2 EP2163763B2 (fr) 2014-08-06

Family

ID=41589164

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09009702.3A Active EP2163763B2 (fr) 2008-09-05 2009-07-28 Pompe sous vide de refouleur oscillante

Country Status (3)

Country Link
EP (1) EP2163763B2 (fr)
AT (1) ATE499529T1 (fr)
DE (2) DE202008011817U1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2146016A1 (de) * 1971-09-15 1973-03-22 Erich Becker Vorrichtung zum sichern und ggfs. verbessern einer membranpumpe
DE2502566A1 (de) * 1975-01-23 1976-07-29 Erich Becker Membran-pumpe
DE19904350A1 (de) * 1999-02-03 2000-08-31 Vacuubrand Gmbh & Co Kg Membran- oder Kolbenpumpe oder kombinierte Membran-/Kolbenpumpe

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19738844A1 (de) * 1997-09-05 1999-04-22 Dosier Und Prozestechnik Salzw Verfahren zur kontinuierlichen elektronischen Überwachung aller Funktionen innerhalb der Dosierpumpe
DE19826610A1 (de) * 1998-06-16 1999-12-23 Bran & Luebbe Membranpumpe und Vorrichtung zur Steuerung derselben
US6256968B1 (en) * 1999-04-13 2001-07-10 Tilia International Volumetric vacuum control
DE10129695A1 (de) * 2001-06-22 2003-01-30 Bosch Gmbh Robert Verfahren und Vorrichtung zur Tankleckdiagnose mittels einer Referenzmessmethode
DE10338876A1 (de) * 2002-08-26 2004-03-18 Iakov Fridmann Verfahren und Prüfsystem zur zerstörungsfreien Dichtigkeitsprüfung eines Behälters, insbesondere eines Frachtcontainers
JP4322799B2 (ja) * 2004-03-25 2009-09-02 株式会社日本自動車部品総合研究所 内燃機関の蒸発燃料処理装置
DE102005017240A1 (de) * 2005-04-14 2006-10-19 Alldos Eichler Gmbh Verfahren und Vorrichtung zur Überwachung eines mittels einer Pumpe geförderten Fluidstromes
US20070177985A1 (en) * 2005-07-21 2007-08-02 Walls James C Integral sensor and control for dry run and flow fault protection of a pump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2146016A1 (de) * 1971-09-15 1973-03-22 Erich Becker Vorrichtung zum sichern und ggfs. verbessern einer membranpumpe
DE2502566A1 (de) * 1975-01-23 1976-07-29 Erich Becker Membran-pumpe
US4049366A (en) * 1975-01-23 1977-09-20 Erich Becker Diaphragm pump
DE19904350A1 (de) * 1999-02-03 2000-08-31 Vacuubrand Gmbh & Co Kg Membran- oder Kolbenpumpe oder kombinierte Membran-/Kolbenpumpe

Also Published As

Publication number Publication date
DE502009000394D1 (de) 2011-04-07
EP2163763B2 (fr) 2014-08-06
EP2163763A1 (fr) 2010-03-17
DE202008011817U1 (de) 2010-02-11
ATE499529T1 (de) 2011-03-15

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