EP2163763B1 - Oscillating displacement vacuum pump - Google Patents

Oscillating displacement vacuum pump Download PDF

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Publication number
EP2163763B1
EP2163763B1 EP09009702A EP09009702A EP2163763B1 EP 2163763 B1 EP2163763 B1 EP 2163763B1 EP 09009702 A EP09009702 A EP 09009702A EP 09009702 A EP09009702 A EP 09009702A EP 2163763 B1 EP2163763 B1 EP 2163763B1
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Prior art keywords
pressure
vacuum pump
drive chamber
oscillating
positive
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EP09009702A
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German (de)
French (fr)
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EP2163763A1 (en
EP2163763B2 (en
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Jürgen Dr. Dirscherl
Frank Dr. Gitmans
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Vacuubrand GmbH and Co KG
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Vacuubrand GmbH and Co KG
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • F04B49/022—Stopping, starting, unloading or idling control by means of pressure

Definitions

  • the invention relates to an oscillating positive displacement vacuum pump having the features of the preamble of claim 1 and claim 2, respectively.
  • an oscillating positive displacement pump namely a diaphragm pump ( US 2007/0177985 A1 ), which is intended for the conveyance of liquids.
  • This positive displacement pump has a housing and a drive unit arranged in the housing.
  • the housing forms an interior space with an oscillating element, namely the diaphragm, which is arranged in relation to the housing and driven by the drive unit.
  • the interior is sealingly divided into a provided with inlet and outlet orifices in front of the membrane and a drive space behind the membrane sealing.
  • a pressure sensor is arranged in the inlet region or in the outlet region of the suction chamber. This is connected to an evaluation circuit. If a pressure is measured by means of the pressure sensor at the affected point, which indicates that the positive displacement pump is running dry or another flow error, then the drive unit of the positive displacement pump is switched off by an evaluation circuit connected to the pressure sensor and, if necessary, a warning signal is generated.
  • the subject matter of the invention is not a general oscillating positive displacement pump, but an oscillating positive displacement vacuum pump.
  • the medium to be pumped is gas or steam.
  • Oscillating positive displacement vacuum pumps such as diaphragm or piston vacuum pumps or combined diaphragm / piston vacuum pumps are known.
  • at least one pumping chamber is periodically reduced and enlarged by (one) an oscillating element.
  • the medium to be pumped gas or vapor
  • shrinking the pump chamber the medium in the pump chamber is compressed and ejected through at least one outlet opening (see, eg DE 199 04 350 C2 ).
  • the oscillating element not only serves to reduce and enlarge the pumping chamber, but must also seal the pumping chamber against the drive space underneath with elements for moving the oscillating element. This seal must be as good as possible. Leakages from the pumping chamber into the drive chamber and vice versa would reduce the efficiency of the pumping process, and also lead to a deterioration of the achievable vacuum level with vacuum pumps. With such reciprocating positive displacement pumps, and in particular with diaphragm pumps, chemically aggressive gases and vapors are often conveyed which, in the event of leakage from the (in this case chemically resistant) pumped space into the drive space, corrode the mechanical components such as bearings, connecting rods and shafts would lead in the drive room.
  • a failure of the seal is the most common cause of failure of such pumps, since the sealing member such as the membrane is exposed in a diaphragm pump or the piston seal on a piston pump a very high mechanical, thermal and possibly chemical stress. So for the membrane in a diaphragm pump typically lives of 3,000-20,000 hours specified in continuous operation so to expect such a failure within a few months or years. Accordingly, such diaphragm vacuum pumps are generally designed so that replacement of the typical wear part "membrane" can be performed by the customer without much effort.
  • the known oscillating positive displacement vacuum pump from which the present invention is based ( DE 199 04 350 C2 ), has a drive space which is sealed to the ambient atmosphere. This seal is comparatively good here. There are also other constructions in which the drive space is less well sealed to the ambient atmosphere or in which the drive space is not sealed to the ambient atmosphere, so it is open.
  • the drive space is relatively dense in many types of reciprocating positive displacement vacuum pumps to dampen noise from the back of the oscillating element as a result of its rapid movement.
  • the drive space - except for special sealing measures such as O-rings - but hardly so gas-tight that it does not without failure of the sealing element - at least over a longer period - the ambient pressure.
  • the drive space is sufficiently gas tight to detect a drop in pressure in the drive space due to failure of the sealing element during operation.
  • this attached behind the sealing element second element may also be arranged stationary, with sliding seal to the moving connecting rod.
  • the principle according to the invention can also be advantageously applied to oscillating positive displacement vacuum pumps having a plurality of pump stages with a common one Drive space and transmitted to the drive space with a common pressure drop detector.
  • the spaces between the sealing and the underlying second element can be connected to grass lines and so also with only one pressure drop sensor all pump stages are detected.
  • relative pressure sensors are used, which measure the pressure below the sealing element relative to the ambient pressure.
  • influences can be excluded by variations in ambient pressure due to weather or altitude.
  • the drive space or, in the case of an insufficiently gas-tight drive space, the gap between the sealing element and the element behind it is sufficiently gastight to provide a clearly measurable pressure drop in the event of leakage of the sealing element on the other hand, but not so gas-tight that without this leak does not come to a pressure equalization with the environment. Therefore, the pressure loss due to leakage of the sealing member with a relative pressure sensor relative to the ambient pressure can be easily and inexpensively detected.
  • the signal of the pressure sensor can be compared, for example, in a downstream electronics with a default value and at a pressure drop greater than a predetermined limit, a warning signal o. ⁇ . Be triggered.
  • This warning signal can also be used in a downstream control for process control or shutdown, so as to avoid consequential damage from the failure of the sealed element.
  • the pressure sensor can be designed as a pressure-controlled switching relay to turn off the pump.
  • the rapid oscillation of the oscillating element of the positive displacement pump is not critical for the evaluation of the signal of the pressure sensor when the pressure sensor itself has such a response that pressure fluctuations in the drive chamber or in the space with the operationally occurring oscillation frequency of the oscillating element by measurement not be dissolved at all, but only the resulting mean value of the pressure is determined by the pressure sensor.
  • Fig. 1 shows a first embodiment of an oscillating Verdrängervakuumpumpe 1, which may be a piston vacuum pump or, preferably, a diaphragm vacuum pump.
  • the illustrated embodiment shows for simplicity a piston vacuum pump.
  • the illustrated positive displacement vacuum pump 1 has a housing 2 and a motor drive unit 3, which is preferably arranged in the housing 2.
  • the housing 2 forms an interior.
  • a relative to the housing 2 sealing, oscillating element 4 is arranged.
  • the sealing, oscillating element 4 is a pump piston.
  • a Membrane vacuum pump is the circumferentially clamped elastic membrane (see DE 199 04 350 C2 ).
  • the interior of the housing 2 is sealingly divided by the oscillating element 4 into a suction chamber 7 provided with inlet and outlet openings 5, 6 in front of the element 4 and a drive space 8 behind the element 4.
  • the drive chamber 8 is even at least largely sealed to the ambient atmosphere.
  • a pressure sensor 9 is arranged at the drive chamber 8. With this, the pressure in the drive chamber 8 can be measured.
  • the pressure sensor 9 is generated by an evaluation circuit 10 to which the pressure sensor 9 is connected, a corresponding warning signal, control signal or shutdown signal.
  • a user is either warned or, for safety's sake, the drive unit 3 of the displacement vacuum pump is switched off immediately in order to avoid major consequential damage.
  • Fig. 1 shows connecting lines between the drive unit 3 and the evaluation circuit 10, which is designed in the form of a typical electronic control, preferably with a microprocessor.
  • a first line is provided to supply the evaluation circuit 10 with a signal showing the respective position of the drive unit 3, which can close the normally operationally expected pressure in the drive chamber 8.
  • the second line is provided to transmit a switch-off signal from the evaluation circuit 10 to the drive unit 3.
  • Fig. 2 shows another embodiment of an oscillating positive displacement vacuum pump 1, in which the drive chamber 8 is not even or little sealed to the ambient atmosphere.
  • the drive chamber 8 behind the sealing, oscillating element 4 by far a further sealing element 11 is arranged.
  • a pressure sensor 9 is arranged in the intermediate space 12 between the elements 4, 11, with the pressure in the space 12 is measured.
  • an appropriate warning signal, control signal or switch-off signal is generated by an evaluation circuit 10.
  • the further sealing member 11 is a member 11 which oscillates synchronously with the first member 4, so that the gap 12 normally maintains a substantially unchanged volume in operation.
  • the pressure in the gap 12 remains operationally substantially constant.
  • the measurement of a pressure drop through the pressure sensor 9 is very simple in terms of evaluation.
  • the positive displacement vacuum pump 1 is switched off following a shutdown signal to avoid consequential damage.
  • the pressure sensor 9 is designed as a relative pressure sensor which detects the pressure in the drive space or in the space 12 relative to the ambient pressure.
  • a preferably adjustable limit value for the differential pressure is that the pressure sensor 9 has such a response that pressure fluctuations in the drive chamber 8 or in the space 12 with the operationally occurring oscillation frequency of the oscillating element 4 are not resolved, but only determines the resulting mean value of the pressure in the drive chamber 8 and in the space 12 is, and that when the limit is exceeded, the evaluation circuit 10, a corresponding warning signal, control signal or shutdown signal is generated.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The oscillating positive displacement vacuum pump (1) has a drive chamber (8), which is sealed automatically for surrounding atmosphere extensively, such that a pressure sensor (9) is arranged at the drive chamber. The pressure is measured in the drive chamber. A control signal or switch-off signal is generated by the pressure sensor, while measuring a low pressure in the drive chamber corresponding to a warning signal from an evaluating circuit (10).

Description

Die Erfindung betrifft eine oszillierende Verdrängervakuumpumpe mit den Merkmalen des Oberbegriffs von Anspruch 1 bzw. Anspruch 2.The invention relates to an oscillating positive displacement vacuum pump having the features of the preamble of claim 1 and claim 2, respectively.

Generell bekannt ist eine oszillierende Verdrängerpumpe, nämlich eine Membranpumpe ( US 2007/0177985 A1 ), die für das Fördern von Flüssigkeiten bestimmt ist. Diese Verdrängerpumpe hat ein Gehäuse und eine im Gehäuse angeordnete Antriebseinheit. Das Gehäuse bildet einen Innenraum mit einem darin angeordneten, gegenüber dem Gehäuse abdichtenden, von der Antriebseinheit angetriebenen oszillierenden Element, nämlich der Membran. Durch diese Membran ist der Innenraum in einen mit Einlass- und Auslassöffnungen versehenen Schöpfraum vor der Membran und einen Antriebsraum hinter der Membran abdichtend unterteilt.Generally known is an oscillating positive displacement pump, namely a diaphragm pump ( US 2007/0177985 A1 ), which is intended for the conveyance of liquids. This positive displacement pump has a housing and a drive unit arranged in the housing. The housing forms an interior space with an oscillating element, namely the diaphragm, which is arranged in relation to the housing and driven by the drive unit. Through this membrane, the interior is sealingly divided into a provided with inlet and outlet orifices in front of the membrane and a drive space behind the membrane sealing.

Um die Verdrängerpumpe gegen ein Trockenlaufen zu schützen ist im Einlassbereich oder im Auslassbereich des Schöpfraums ein Drucksensor angeordnet. Dieser ist mit einer Auswerteschaltung verbunden. Wird mittels des Drucksensors an der betroffenen Stelle ein Druck gemessen, der auf ein Trockenlaufen der Verdrängerpumpe oder einen sonstigen Strömungsfehler schließen lässt, so wird von einer mit dem Drucksensor verbundenen Auswerteschaltung die Antriebseinheit der Verdrängerpumpe sicherheitshalber abgeschaltet und ggf. ein Warnsignal generiert.In order to protect the positive displacement pump against dry running, a pressure sensor is arranged in the inlet region or in the outlet region of the suction chamber. This is connected to an evaluation circuit. If a pressure is measured by means of the pressure sensor at the affected point, which indicates that the positive displacement pump is running dry or another flow error, then the drive unit of the positive displacement pump is switched off by an evaluation circuit connected to the pressure sensor and, if necessary, a warning signal is generated.

Gegenstand der Erfindung ist nicht eine allgemeine oszillierende Verdrängerpumpe, sondern eine oszillierende Verdrängervakuumpumpe. Dabei ist das zu fördernde Medium Gas oder Dampf.The subject matter of the invention is not a general oscillating positive displacement pump, but an oscillating positive displacement vacuum pump. The medium to be pumped is gas or steam.

Oszillierende Verdrängervakuumpumpen wie beispielsweise Membran- oder Kolbenvakuumpumpen oder kombinierte Membran-/Kolbenvakuumpumpen sind bekannt. Bei diesen Pumpentypen wird mindestens ein Schöpfraum durch (jeweils) ein oszillierendes Element periodisch verkleinert und vergrößerte Beim Vergrößern des Schöpfraums wird das zu fördernde Medium (Gas oder Dämpfe) durch mindestens eine Einlaßöffnung in den Schöpfraum hineiungesaugt. Beim Verkleinern des Schöpfraums wird das im Schöpfraum befindliche Medium verdichtet und durch mindestens eine Auslaßöffnung ausgestoßen (siehe z.B. DE 199 04 350 C2 ).Oscillating positive displacement vacuum pumps such as diaphragm or piston vacuum pumps or combined diaphragm / piston vacuum pumps are known. In these pump types, at least one pumping chamber is periodically reduced and enlarged by (one) an oscillating element. As the pumping space is increased, the medium to be pumped (gas or vapor) is sucked into the pumping chamber through at least one inlet port. When shrinking the pump chamber, the medium in the pump chamber is compressed and ejected through at least one outlet opening (see, eg DE 199 04 350 C2 ).

Das oszillierende Element dient dabei nicht nur zum Verkleinern und Vergrößern des Schöpfraums, sondern muß auch den Schöpfraum gegen den darunter befindlichen Antriebsraum mit Elementen zur Bewegung des oszillierenden Elements abdichten. Diese Abdichtung muß möglichst gut sein. Leckagen aus dem Schöpfraum in den Antriebsraum und umgekehrt würden die Effizienz des Pumpvorgangs verringern, und bei Vakuumpumpen auch zur Verschlechterung des erreichbaren Vakuumniveaus führen. Mit solchen oszillierenden Verdrängerpumpen, und hierbei besonders mit Membranpumpen, werden oft chemisch aggressive Gase und Dämpfe gefördert, die bei einer Leckage aus dem (in diesem Falle chemisch beständig gestalteten) Schöpfraum in den Antriebsraum zu Korrosionsangriff auf die mechanischen Komponenten wie Lager, Pleuel und Wellen im Antriebsraum führen würden.The oscillating element not only serves to reduce and enlarge the pumping chamber, but must also seal the pumping chamber against the drive space underneath with elements for moving the oscillating element. This seal must be as good as possible. Leakages from the pumping chamber into the drive chamber and vice versa would reduce the efficiency of the pumping process, and also lead to a deterioration of the achievable vacuum level with vacuum pumps. With such reciprocating positive displacement pumps, and in particular with diaphragm pumps, chemically aggressive gases and vapors are often conveyed which, in the event of leakage from the (in this case chemically resistant) pumped space into the drive space, corrode the mechanical components such as bearings, connecting rods and shafts would lead in the drive room.

Aus den zuvor aufgeführten Gründen wird sehr hoher konstruktiver Aufwand für eine möglichst gute und dauerhafte Abdichtung des Schöpfraums vom Antriebsraum betrieben. Bei Membranvakuumpumpen erfolgt diese Abdichtung durch eine gasdichte Einspannung der Membran am Außenumfang und - falls aufgrund einer Öffnung dort erforderlich - auch im Innenbereich. Bei Kolbenpumpen erfolgt die Abdichtung durch eine gleitende Dichtung des Kolbens in der Kolbenführung oder durch vergleichbare Mittel. In allen Fällen führt ein Versagen der Abdichtung, beispielsweise durch einen Riß in der Membran oder durch Verschleiß an der Kolbengleitdichtung, zu einem Funktionsausfall der Pumpe. Falls durch solchen Verschleiß aggressive Stoffe aus dem Schöpfraum in den Antriebsraum gelangen, kann dies zu einem Totalausfall der Pumpe mit erheblichen Folgekosten führen.For the reasons listed above very high design effort for the best possible and permanent sealing of the pump chamber is operated by the drive compartment. In membrane vacuum pumps, this sealing is carried out by a gas-tight clamping of the membrane on the outer circumference and - if required there due to an opening - also in the interior. For piston pumps, the seal is made by a sliding seal of the piston in the piston guide or by similar means. In all cases, a failure of the seal, for example by a crack in the membrane or by wear on the Kolbengleitdichtung, leading to a malfunction of the pump. If aggressive substances escape from the pump chamber into the drive chamber as a result of such wear, this can lead to total failure of the pump with considerable consequential costs.

Ein Ausfall der Abdichtung ist die häufigste Ausfallursache an solchen Pumpen, da das abdichtende Element wie beispielsweise die Membran bei einer Membranpumpe oder die Kolbendichtung an einer Kolbenpumpe einer sehr hohen mechanischen, thermischen und ggf. chemischen Belastung ausgesetzt ist. So werden für die Membrane in einer Membranpumpe typischerweise Standzeiten von 3.000-20.000 Stunden angegeben, bei Dauerbetrieb ist also mit einem solchen Ausfall innerhalb weniger Monate bzw. Jahre zu rechnen. Dementsprechend sind solche Membranvakuumpumpen im allgemeinen so konstruiert, daß ein Austausch des typischen Verschleißteils "membran" ohne großen Aufwand vom Kunden selbst durchgeführt werden kann.A failure of the seal is the most common cause of failure of such pumps, since the sealing member such as the membrane is exposed in a diaphragm pump or the piston seal on a piston pump a very high mechanical, thermal and possibly chemical stress. So for the membrane in a diaphragm pump typically lives of 3,000-20,000 hours specified in continuous operation so to expect such a failure within a few months or years. Accordingly, such diaphragm vacuum pumps are generally designed so that replacement of the typical wear part "membrane" can be performed by the customer without much effort.

Um die oben geschilderten erheblichen Folgeschäden durch einen Ausfall des Abdichtungselements zu vermeiden, wird in der Praxis eine vorbeugende Wartung mit einem Wartungsintervall nach Erfahrungswerten des Anwenders oder Empfehlungen des Herstellers vorgenommen. Dies kann - bei zu frühzeitigem Wechsel - zu unnötig hohen regelmäßigen Kosten führen. Bei vorzeitigem Verschleiß, beispielsweise durch das Fördern von abrasiven oder zu Ablagerungen neigenden Medien, kann die Wartung eventuell nicht früh genug erfolgen und damit sind Folgeschäden nicht zuverlässig zu vermeiden.In order to avoid the above-described significant consequential damage by failure of the sealing element, in practice, a preventive maintenance with a maintenance interval based on experience of the user or manufacturer's recommendations made. This can lead to unnecessarily high regular costs if you change too soon. In the event of premature wear, for example due to the pumping of abrasive or deposit-prone media, the maintenance may not be carried out early enough and consequential damage can not be reliably prevented.

Die bekannte oszillierende Verdrängervakuumpumpe, von der die vorliegende Erfindung ausgeht ( DE 199 04 350 C2 ), hat einen Antriebsraum, der zur Umgebungsatmosphäre hin abgedichtet ist. Diese Abdichtung ist hier vergleichsweise gut. Es gibt auch andere Konstruktionen, bei denen der Antriebsraum zur Umgebungsatmosphäre weniger gut abgedichtet ist oder bei denen der Antriebsraum zur Umgebungsatmosphäre hin gar nicht abgedichtet, also offen ist.The known oscillating positive displacement vacuum pump from which the present invention is based ( DE 199 04 350 C2 ), has a drive space which is sealed to the ambient atmosphere. This seal is comparatively good here. There are also other constructions in which the drive space is less well sealed to the ambient atmosphere or in which the drive space is not sealed to the ambient atmosphere, so it is open.

Für beide Varianten einer oszillierenden Verdrängervakuumpumpe wäre es erstrebenswert, das Versagen des abdichtenden Elementes zuverlässig und zeitnah erkennen zu können. Hier eine Lösung vorzuschlagen, ist Aufgabe der vorliegenden Erfindung.For both variants of an oscillating positive displacement vacuum pump, it would be desirable to be able to reliably and promptly detect the failure of the sealing element. Here to propose a solution is the object of the present invention.

Die Problemlösung erfolgt in einer ersten Variante, die einen zur Umgebungsatmosphäre hin abgedichteten Antriebsraum voraussetzt, durch die Merkmale des kennzeichnenden Teils von Anspruch 1.The problem solution takes place in a first variant, which requires a drive space sealed to the ambient atmosphere, by the features of the characterizing part of claim 1.

Bei einer Leckage am abdichtenden Element erfolgt ein Gasaustausch aus dem Schöpfraum mit dem hinter dem abdichtenden Element liegenden Bereich, Im Falle eines Unterdrucks im Schöpfraum, wie dies bei nahezu allen Betriebszuständen einer als Vakuumpumpe eingesetzten oszillierenden Verdrängerpumpe der Fall ist, wird Gas aus dem hinter dem abdichtenden Element liegenden Bereich in den Schöpfraum gesaugt, der Druck im hinter dem abdichtenden Element liegenden Bereich also abnehmen. Dies ist nicht im Widerspruch zu obiger Feststellung, daß es bei aggressiven Medien im Schöpfraum durch eine Leckage im abdichtenden Element zu Korrosionsangriff im Antriebsraum kommen kann, da in gewissem Maße stets ein Gasaustausch in beiden Richtungen erfolgt.In the case of a leakage at the sealing element, a gas exchange takes place from the pump chamber with the region behind the sealing element. In the case of a negative pressure in the pump chamber, as is the case with almost all operating states of an oscillating positive displacement pump used as a vacuum pump, gas is emitted from behind the sealing element sealing element sucked lying area in the suction chamber, the pressure in the region behind the sealing element thus decrease. This is not in contradiction to the above statement that aggressive media in the suction chamber can cause corrosive attack in the drive chamber due to leakage in the sealing element, since gas exchange in both directions always takes place to a certain extent.

Der Antriebsraum wird bei vielen Bauarten oszillierender Verdrängervakuumpumpen relativ dicht aufgebaut, um Geräusche von der Rückseite des oszillierenden Elements in Folge von dessen schneller Bewegung zu dämpfen. Gleichzeitig ist der Antriebsraum - außer bei speziellen Abdichtungsmaßnahmen wie O-Ringen - aber kaum so gasdicht, daß er ohne Ausfall des abdichtenden Elements nicht - zumindest über einen längeren Zeitraum - den Umgebungsdruck annimmt. Überraschenderweise stellt man fest, daß bei vielen Bauarten von oszillierenden Verdrängervakuumpumpen der Antriebsraum jedoch hinreichend gasdicht ist, um einen Abfall des Drucks im Antriebsraum in Folge eines Ausfalls des abdichtenden Elements im Betrieb erkennen zu können.The drive space is relatively dense in many types of reciprocating positive displacement vacuum pumps to dampen noise from the back of the oscillating element as a result of its rapid movement. At the same time the drive space - except for special sealing measures such as O-rings - but hardly so gas-tight that it does not without failure of the sealing element - at least over a longer period - the ambient pressure. Surprisingly, it is noted that in many types of reciprocating positive displacement vacuum pumps, the drive space is sufficiently gas tight to detect a drop in pressure in the drive space due to failure of the sealing element during operation.

Falls bauartbedingt eine hinreichende Gasdichtigkeit des Antriebsraums nicht gegeben oder erreichbar ist, so wird in der erfindungsgemäßen Ausführung gemäß Anspruch 2 hinter dem oszillierenden Element ein weiteres synchron oszillierendes Element angebracht, das den Zwischenraum zwischen sich und dem abdichtenden Element gasdicht abschließt. In diesem Fall läßt sich der Druckabfall infolge einer Leckage des abdichtenden Elements in diesem Zwischenraum detektieren.If due to the design sufficient gas-tightness of the drive space is not given or achievable, so in the inventive embodiment according to claim 2 behind the oscillating element another synchronously oscillating element attached, which closes the gap between them and the sealing element gas-tight. In this case, the pressure drop due to leakage of the sealing member in this space can be detected.

Bei Kolbenpumpen mit gerade laufendem Pleuel kann dieses hinter dem abdichtenden Element angebrachte zweite Element auch feststehend angeordnet sein, mit gleitender Dichtung zum sich bewegenden Pleuel.In piston pumps with straight connecting rod, this attached behind the sealing element second element may also be arranged stationary, with sliding seal to the moving connecting rod.

Weitere bevorzugte Ausgestaltungen sind Gegenstand der weiteren Unteransprüche.Further preferred embodiments are the subject of the further subclaims.

Das erfindungsgemäße Prinzip läßt sich vorteilhaft auch auf oszillierende Verdrängervakuumpumpen mit mehreren Pumpstufen mit einem gemeinsamen Antriebsraum und mit einem gemeinsamen Druckabfalldetektor am Antriebsraum übertragen. Im Falle eines nicht hinreichend gasdichten Antriebsraums können die Zwischenräume zwischen dem abdichtenden und dem dahinter liegenden zweiten Element mit Grasleitungen verbunden werden und so ebenfalls mit nur einem Druckabfallsensor alle Pumpstufen erfaßt werden.The principle according to the invention can also be advantageously applied to oscillating positive displacement vacuum pumps having a plurality of pump stages with a common one Drive space and transmitted to the drive space with a common pressure drop detector. In the case of a not sufficiently gas-tight drive space, the spaces between the sealing and the underlying second element can be connected to grass lines and so also with only one pressure drop sensor all pump stages are detected.

Für die Detektion des Druckabfalls kommen praktischerweise Relativdrucksensoren zum Einsatz, die den Druck unterhalb des abdichtenden Elements relativ zum Umgebungsdruck messen. Damit lassen sich Einflüsse durch Variationen des Umgebungsdrucks durch Wetter oder Höhenlage ausschließen.For the detection of the pressure drop, conveniently, relative pressure sensors are used, which measure the pressure below the sealing element relative to the ambient pressure. Thus, influences can be excluded by variations in ambient pressure due to weather or altitude.

Wie oben erwähnt, ist bei vielen Bauarten von Verdrängervakuumpumpen der Antriebsraum bzw. - im Falle eines nicht hinreichend gasdichten Antriebsraums - der Zwischenraum zwischen dem abdichtenden Element und dem dahinter liegenden Element zwar hinreichend gasdicht, um einen eindeutig meßbaren Druckabfall im Falle einer Undichtigkeit des abdichtenden Elements zu ergeben, andererseits aber nicht so gasdicht, daß es ohne diese Undichtigkeit nicht zu einer Druckangleichung mit der Umgebung kommt. Daher läßt sich der Druckabfall in Folge einer Undichtigkeit des abdichtenden Elements mit einem Relativdrucksensor bezogen auf den Umgebungsdruck einfach und preisgünstig detektieren.As mentioned above, in many types of positive displacement vacuum pumps, the drive space or, in the case of an insufficiently gas-tight drive space, the gap between the sealing element and the element behind it is sufficiently gastight to provide a clearly measurable pressure drop in the event of leakage of the sealing element on the other hand, but not so gas-tight that without this leak does not come to a pressure equalization with the environment. Therefore, the pressure loss due to leakage of the sealing member with a relative pressure sensor relative to the ambient pressure can be easily and inexpensively detected.

Das Signal des Drucksensors kann beispielsweise in einer nachgeschalteten Elektronik mit einem Vorgabewert verglichen und bei einem Druckabfall größer als ein vorgegebener Grenzwert ein Warnsignal o. ä. ausgelöst werden. Dieses Warnsignal kann in einer nachgeordneten Steuerung auch zur Prozeßsteuerung bzw. -abschaltung verwendet werden, um so Folgeschäden durch den Ausfall des abdichteten Elements zu vermeiden. Im einfachsten Fall kann der Drucksensor als druckgesteuert schaltendes Relais ausgelegt sein, um die Pumpe abzuschalten.The signal of the pressure sensor can be compared, for example, in a downstream electronics with a default value and at a pressure drop greater than a predetermined limit, a warning signal o. Ä. Be triggered. This warning signal can also be used in a downstream control for process control or shutdown, so as to avoid consequential damage from the failure of the sealed element. In the simplest case, the pressure sensor can be designed as a pressure-controlled switching relay to turn off the pump.

Die schnelle Oszillation des oszillierenden Elements der Verdrängervakuumpumpe ist für die Auswertung des Signals des Drucksensors dann unkritisch, wenn der Drucksensor selbst ein solches Ansprechverhalten hat, daß Druckschwankungen im Antriebsraum bzw. im Zwischenraum mit der betriebsmäßig auftretenden Oszillationsfrequenz des oszillierenden Elements meßtechnisch gar nicht erst aufgelöst werden, sondern nur der resultierende Mittelwert des Druckes vom Drucksensor ermittelt wird.The rapid oscillation of the oscillating element of the positive displacement pump is not critical for the evaluation of the signal of the pressure sensor when the pressure sensor itself has such a response that pressure fluctuations in the drive chamber or in the space with the operationally occurring oscillation frequency of the oscillating element by measurement not be dissolved at all, but only the resulting mean value of the pressure is determined by the pressure sensor.

Bei mehreren Pumpstufen, die in einem gemeinsamen Antriebsraum arbeiten, kann sich auch eine solche Konstellation ergeben (insbesondere bei Boxeranordnung), daß sich das Gesamtvolumen des Antriebsraums bei Bewegung der oszillierenden Elemente nicht ändert und damit der Druck ohnehin hier normalerweise betriebsmäßig konstant ist.In the case of several pump stages which operate in a common drive space, such a constellation can also result (in particular in the case of a boxer arrangement) that the total volume of the drive space does not change during movement of the oscillating elements and thus the pressure here is normally constant in operation.

In anderen Fällen bzw, mit empfindlicheren Drucksensoren kann man aber auch einen betriebsmäßig zu erwartenden Druckverlauf im Antriebsraum bzw. im Zwischenraum abspeichern und den tatsächlichen, vom Drucksensor dann gemessenen Druck mit dem abgespeicherten Druckverlauf vergleichen.In other cases, or with more sensitive pressure sensors but you can also store an operationally expected pressure curve in the drive space or in the space and compare the actual, then measured by the pressure sensor pressure with the stored pressure profile.

Im folgenden wird die Erfindung anhand einer lediglich Ausführungsbeispiele darstellenden Zeichnung näher erläutert. In der Zeichnung zeigt

Fig. 1
eine schematische Darstellung einer oszillierenden Verdränger- vakuumpumpe mit einem hinreichend abgedichteten Antriebs- raum,
Fig. 2
eine schematische Darstellung einer oszillierenden Verdränger- vakuumpumpe mit einem nicht hinreichend dichten Antriebs- raum.
In the following the invention will be explained in more detail with reference to a drawing illustrating only embodiments. In the drawing shows
Fig. 1
1 a schematic representation of an oscillating positive displacement vacuum pump with a sufficiently sealed drive chamber,
Fig. 2
a schematic representation of an oscillating positive displacement vacuum pump with a not sufficiently dense drive space.

Fig. 1 zeigt ein erstes Ausführungsbeispiel einer oszillierenden Verdrängervakuumpumpe 1, bei der es sich um eine Kolbenvakuumpumpe oder, vorzugsweise, eine Membranvakuumpumpe handeln kann. Das dargestellte Ausführungsbeispiel zeigt der Einfachheit halber eine Kolbenvakuumpumpe. Fig. 1 shows a first embodiment of an oscillating Verdrängervakuumpumpe 1, which may be a piston vacuum pump or, preferably, a diaphragm vacuum pump. The illustrated embodiment shows for simplicity a piston vacuum pump.

Die dargestellte Verdrängervakuumpumpe 1 weist ein Gehäuse 2 und eine vorzugsweise im Gehäuse 2 angeordnete motorische Antriebseinheit 3 auf. Das Gehäuse 2 bildet einen Innenraum. Im Innenraum ist ein gegenüber dem Gehäuse 2 abdichtendes, oszillierendes Element 4 angeordnet. Im dargestellten Ausführungsbeispiel einer Kolbenvakuumpumpe handelt es sich bei dem abdichtenden, oszillierenden Element 4 um einen Pumpenkolben. Bei einer Membranvakuumpumpe handelt es sich um die umfangseitig eingespannte elastische Membran (siehe DE 199 04 350 C2 ).The illustrated positive displacement vacuum pump 1 has a housing 2 and a motor drive unit 3, which is preferably arranged in the housing 2. The housing 2 forms an interior. In the interior, a relative to the housing 2 sealing, oscillating element 4 is arranged. In the illustrated embodiment of a piston vacuum pump, the sealing, oscillating element 4 is a pump piston. At a Membrane vacuum pump is the circumferentially clamped elastic membrane (see DE 199 04 350 C2 ).

Der Innenraum im Gehäuse 2 wird von dem oszillierenden Element 4 in einen mit Einlaß- und Auslaßöffnungen 5, 6 versehenen Schöpfraum 7 vor dem Element 4 und einen Antriebsraum 8 hinter dem Element 4 abdichtend unterteilt.The interior of the housing 2 is sealingly divided by the oscillating element 4 into a suction chamber 7 provided with inlet and outlet openings 5, 6 in front of the element 4 and a drive space 8 behind the element 4.

In dem in Fig. 1 dargestellten ersten Ausführungsbeispiel ist der Antriebsraum 8 selbst zur Umgebungsatmosphäre hin zumindest weitgehend abgedichtet. Am Antriebsraum 8 ist ein Drucksensor 9 angeordnet. Mit diesem kann der Druck im Antriebsraum 8 gemessen werden. Bei Messung eines gegenüber dem normalerweise betriebsmäßig zu erwartenden Druckes im Antriebsraum 8 wesentlich niedrigeren Druck im Antriebsraum 8 durch den Drucksensor 9 wird von einer Auswerteschaltung 10, an die der Drucksensor 9 angeschlossen ist, ein entsprechendes Warnsignal, Steuersignal oder Abschaltsignal generiert. Ein Benutzer wird also entweder gewarnt oder es wird sicherheitshalber sogleich die Antriebseinheit 3 der Verdrängervakuumpumpe abgeschaltet, um größere Folgeschäden zu vermeiden.In the in Fig. 1 illustrated first embodiment, the drive chamber 8 is even at least largely sealed to the ambient atmosphere. At the drive chamber 8, a pressure sensor 9 is arranged. With this, the pressure in the drive chamber 8 can be measured. When measuring a relation to the normally operationally expected pressure in the drive chamber 8 much lower pressure in the drive chamber 8 by the pressure sensor 9 is generated by an evaluation circuit 10 to which the pressure sensor 9 is connected, a corresponding warning signal, control signal or shutdown signal. Thus, a user is either warned or, for safety's sake, the drive unit 3 of the displacement vacuum pump is switched off immediately in order to avoid major consequential damage.

Fig. 1 zeigt Verbindungsleitungen zwischen der Antriebseinheit 3 und der Auswerteschaltung 10, die in Form einer typischen elektronischen Steuerung, vorzugsweise mit einem Mikroprozessor, ausgeführt ist. Im dargestellten Ausführungsbeispiel ist eine erste Leitung vorgesehen, um die Auswerteschaltung 10 mit einem Signal zu versorgen, das die jeweilige Position der Antriebseinheit 3 zeigt, die auf den normalerweise betriebsmäßig zu erwartenden Druck im Antriebsraum 8 schließen läßt. Die zweite Leitung ist vorgesehen, um ein Abschaltsignal von der Auswerteschaltung 10 an die Antriebseinheit 3 zu übermitteln. Fig. 1 shows connecting lines between the drive unit 3 and the evaluation circuit 10, which is designed in the form of a typical electronic control, preferably with a microprocessor. In the illustrated embodiment, a first line is provided to supply the evaluation circuit 10 with a signal showing the respective position of the drive unit 3, which can close the normally operationally expected pressure in the drive chamber 8. The second line is provided to transmit a switch-off signal from the evaluation circuit 10 to the drive unit 3.

Fig. 2 zeigt ein anderes Ausführungsbeispiel einer oszillierenden Verdrängervakuumpumpe 1, bei der der Antriebsraum 8 selbst zur Umgebungsatmosphäre hin nicht oder wenig abgedichtet ist. Hier ist vorgesehen, daß im Antriebsraum 8 hinter dem abdichtenden, oszillierenden Element 4 mit Abstand ein weiteres abdichtendes Element 11 angeordnet ist. Am Antriebsraum 8 ist im Zwischenraum 12 zwischen den Elementen 4, 11 ein Drucksensor 9 angeordnet, mit dem der Druck im Zwischenraum 12 gemessen wird. Bei Messung eines gegenüber dem normalerweise betriebsmäßig zu erwartenden Druck im Zwischenraum 12 wesentlich niedrigeren Druck im Zwischenraum 12 durch den Drucksensor 9 wird von einer Auswerteschaltung 10 ein entsprechendes Warnsignal, Steuersignal oder Abschaltsignal generiert. Fig. 2 shows another embodiment of an oscillating positive displacement vacuum pump 1, in which the drive chamber 8 is not even or little sealed to the ambient atmosphere. Here it is provided that in the drive chamber 8 behind the sealing, oscillating element 4 by far a further sealing element 11 is arranged. At the drive space 8, a pressure sensor 9 is arranged in the intermediate space 12 between the elements 4, 11, with the pressure in the space 12 is measured. When measuring a pressure in the intermediate space 12 which is much lower than in the intermediate space 12 as a function of the pressure normally expected by the pressure sensor 9, an appropriate warning signal, control signal or switch-off signal is generated by an evaluation circuit 10.

Nach bevorzugter Konstruktion des Ausführungsbeispiels von Fig. 2 ist das weitere abdichtende Element 11 ein mit dem ersten Element 4 synchron oszillierendes Element 11, so daß der Zwischenraum 12 normalerweise betriebsmäßig im wesentlichen ein unverändertes Volumen beibehält. Damit bleibt der Druck im Zwischenraum 12 betriebsmäßig im wesentlichen konstant. Die Messung eines Druckabfalls durch den Drucksensor 9 ist auswertungstechnisch sehr einfach.According to a preferred construction of the embodiment of Fig. 2 the further sealing member 11 is a member 11 which oscillates synchronously with the first member 4, so that the gap 12 normally maintains a substantially unchanged volume in operation. Thus, the pressure in the gap 12 remains operationally substantially constant. The measurement of a pressure drop through the pressure sensor 9 is very simple in terms of evaluation.

Bei einem gerade laufenden Pleuel einer Kolbenpumpe kann das hinter dem abdichtenden, oszillierenden Element 4 angebrachte weitere abdichtende Element 11 auch feststehend angeordnet sein, mit gleitender Dichtung zum hin-und hergehenden Pleuel. Dann ist die Drücksituation im Zwischenraum 12 etwas komplexer und muß über die Auswerteschaltung 10 berücksichtigt werden.In a straight connecting rod of a piston pump mounted behind the sealing, oscillating element 4 further sealing member 11 may also be arranged fixed, with sliding seal to the reciprocating connecting rod. Then the pressure situation in the intermediate space 12 is somewhat more complex and must be taken into account via the evaluation circuit 10.

Für beide Ausführungsvarianten gilt, daß zweckmäßigerweise von der Ausweiteschaltung 10 die Verdrängervakuumpumpe 1 einem Abschaltsignal folgend abgeschaltet wird, um Folgeschäden zu vermeiden.Applies to both embodiments that expediently of the expansion circuit 10, the positive displacement vacuum pump 1 is switched off following a shutdown signal to avoid consequential damage.

Besonders interessant ist es, wenn, wie bereits im allgemeinen Teil der Beschreibung erläutert worden ist, der Drucksensor 9 als Relativdrucksensor ausgebildet ist, der den Druck im Antriebsraum bzw. im Zwischenraum 12 relativ zum Umgebungsdruck erfaßt.It is particularly interesting if, as has already been explained in the general part of the description, the pressure sensor 9 is designed as a relative pressure sensor which detects the pressure in the drive space or in the space 12 relative to the ambient pressure.

Nach weiter bevorzugter Modifikation kann man von vorneherein den Drucksensor 9 als druckgesteuert schaltendes Relais ausführen.According to a further preferred modification, one can execute the pressure sensor 9 as a pressure-controlled relay from the outset.

Im Normalfall wird man mit einem passenden Drucksensor 9 als Relativdrucksensor arbeiten und dabei erreichen, daß in der Auswerteschaltung 10 ein vorzugsweise verstellbarer Grenzwert für den Differenzdruck gespeichert ist, daß der Drucksensor 9 ein solches Ansprechverhalten hat, daß Druckschwankungen im Antriebsraum 8 bzw. im Zwischenraum 12 mit der betriebsmäßig auftretenden Oszillationsfrequenz des oszillierenden Elements 4 nicht aufgelöst werden, sondern nur der resultierende Mittelwert des Druckes im Antriebsraum 8 bzw. im Zwischenraum 12 ermittelt wird, und daß, wenn der Grenzwert überschritten wird, von der Auswerteschaltung 10 ein entsprechendes Warnsignal, Steuersignal oder Abschaltsignal generiert wird.Normally, you will work with a suitable pressure sensor 9 as a relative pressure sensor and thereby achieve that stored in the evaluation circuit 10, a preferably adjustable limit value for the differential pressure is that the pressure sensor 9 has such a response that pressure fluctuations in the drive chamber 8 or in the space 12 with the operationally occurring oscillation frequency of the oscillating element 4 are not resolved, but only determines the resulting mean value of the pressure in the drive chamber 8 and in the space 12 is, and that when the limit is exceeded, the evaluation circuit 10, a corresponding warning signal, control signal or shutdown signal is generated.

Ist ein empfindlicherer Drucksensor 9 eingesetzt, so empfiehlt es sich, daß in der Auswerteschaltung 10 der normalerweise betriebsmäßig auftretende Druckverlauf im Antriebsraum 8 bzw. im Zwischenraum 12 gespeichert ist, der tatsächliche Druck im Antriebsraum 8 bzw. Zwischenraum 12 mit dem jeweils gespeicherten Druck verglichen wird und bei einer einen bestimmten Grenzwert überschreitenden Abweichung des gemessenen Druckes vom gespeicherten Druck ein entsprechendes Warnsignal, Steuersignal oder Abschaltsignal generiert wird.If a more sensitive pressure sensor 9 is used, then it is recommended that the normally occurring pressure curve is stored in the drive chamber 8 or in the intermediate space 12 in the evaluation circuit 10, the actual pressure in the drive chamber 8 or gap 12 is compared with the respectively stored pressure and when a deviation of the measured pressure from the stored pressure exceeds a certain limit value, a corresponding warning signal, control signal or switch-off signal is generated.

Von besonderer Bedeutung ist die erfindungsgemäße Lehre bei einer Membranvakuumpumpe zur Detektion eines eventuellen Membranrisses. Hier ist der Druckabfall besonders deutlich und tritt auch schlagartig auf, so daß eine schnell Reaktion der Auswerteschaltung 10 von großer Bedeutung ist.Of particular importance is the teaching of the invention in a membrane vacuum pump for detecting a possible membrane crack. Here, the pressure drop is particularly clear and also occurs abruptly, so that a fast response of the evaluation circuit 10 is of great importance.

Die Erweiterung der zuvor erläuterten Anordnungen auf Pumpen mit mehreren oszillierenden Pumpstufen ergibt sich aus der Beschreibung und den Abbildungen. The extension of the arrangements explained above to pumps with several oscillating pumping stages is evident from the description and the figures.

Claims (10)

  1. Oscillating positive-displacement vacuum pump with a housing (2) and a drive unit (3) arranged in the housing (2), the housing (2) forming an inner space,
    with an oscillating element (4), which is arranged in the inner space, is sealed off with respect to the housing (2) and is driven by the drive unit (3), the inner space being divided in a sealing manner by the oscillating element (4) into a suction chamber (7), provided with inlet and outlet openings (5, 6), ahead of the element (4) and a drive chamber (8) behind the element (4), the drive chamber (8) being sealed off from the surrounding atmosphere,
    characterized
    in that a pressure sensor (9) is arranged at the drive chamber (8) and is used to measure the pressure in the drive chamber (8),
    in that an evaluation circuit (10) is provided and in that, whenever a fall in pressure is detected in the drive chamber (8) as a result of a leakage of the sealing oscillating element (4), a corresponding warning signal, control signal or shut-off signal is generated by the evaluation circuit (10).
  2. Oscillating positive-displacement vacuum pump with a housing (2) and a drive unit (3) arranged in the housing (2), the housing (2) forming an inner space,
    with an oscillating element (4), which is arranged in the inner space, is sealed off with respect to the housing (2) and is driven by the drive unit (3), the inner space being divided in a sealing manner by the oscillating element (4) into a suction chamber (7), provided with inlet and outlet openings (5, 6), ahead of the element (4) and a drive chamber (8) behind the element (4), the drive chamber (8) not being sealed off from the surrounding atmosphere,
    characterized
    in that behind the sealing, oscillating element (4) in the drive chamber (8) a further sealing element (11) is arranged at a distance from it, so that an intermediate space (12) is formed between the elements (4, 11),
    in that at the drive chamber (8) a pressure sensor (9) is arranged in the intermediate space (12) between the elements (4, 11) and is used to measure the pressure in the intermediate space (12),
    in that an evaluation circuit (10) is provided and in that, whenever a fall in pressure is detected in the intermediate space (12) as a result of a leakage of the sealing oscillating element (4), a corresponding warning signal, control signal or shut-off signal is generated by the evaluation circuit (10).
  3. Positive-displacement vacuum pump according to Claim 2, characterized in that the further sealing element is designed as an element (11) oscillating synchronously with the sealing, oscillating element (4).
  4. Positive-displacement vacuum pump according to one of Claims 1 to 3, characterized in that the positive-displacement vacuum pump (1) is shut off by the evaluation circuit (10) following a shut-off signal.
  5. Positive-displacement vacuum pump according to one of Claims 1 to 4, characterized in that the pressure sensor (9) is formed as a relative pressure sensor, which measures the pressure in relation to the ambient pressure.
  6. Positive-displacement vacuum pump according to one of Claims 1 to 5, characterized in that the pressure sensor (9) is designed as a relay that switches under pressure control.
  7. Positive-displacement vacuum pump according to Claim 5 or Claim 6, characterized
    in that a limit value for the differential pressure is stored in the evaluation circuit (10),
    in that the pressure sensor (9) has such a response that pressure fluctuations in the drive chamber (8) or in the intermediate space (12) are not resolved with the operationally occurring oscillation frequency of the oscillating element (4), but only the resultant mean value of the pressure in the drive chamber (8) or in the intermediate space (12) is determined, and
    in that, whenever the limit value is exceeded, a corresponding warning signal, control signal or shut-off signal is generated by the evaluation circuit (10).
  8. Positive-displacement vacuum pump according to Claim 7, characterized in that the limit value for the differential pressure is adjustable.
  9. Positive-displacement vacuum pump according to one of Claims 1 to 6, characterized
    in that the normally operationally occurring pressure profile in the drive chamber (8) or in the intermediate space (12) is stored in the evaluation circuit (10),
    in that the actual pressure in the drive chamber (8) or the intermediate chamber (12) that is measured by the pressure sensor (9) is compared with the corresponding pressure of the stored pressure profile and
    in that, whenever the measured pressure deviates from the stored pressure by more than a specific limit value, a corresponding warning signal, control signal or shut-off signal is generated by the evaluation circuit (10).
  10. Positive-displacement vacuum pump according to one of Claims 1 to 9, characterized in that the evaluation circuit (10) is connected in terms of measuring and control technology to the drive unit (3).
EP09009702.3A 2008-09-05 2009-07-28 Oscillating displacement vacuum pump Active EP2163763B2 (en)

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DE202008011817U DE202008011817U1 (en) 2008-09-05 2008-09-05 Oscillating positive displacement vacuum pump

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DE2146016A1 (en) * 1971-09-15 1973-03-22 Erich Becker DEVICE FOR SECURING AND GGFS. IMPROVING A DIAPHRAGM PUMP
DE2502566A1 (en) * 1975-01-23 1976-07-29 Erich Becker DIAPHRAGM PUMP
US4049366A (en) * 1975-01-23 1977-09-20 Erich Becker Diaphragm pump
DE19904350A1 (en) * 1999-02-03 2000-08-31 Vacuubrand Gmbh & Co Kg Membrane or piston pump or combined membrane/piston pump e.g. vacuum pump, has shaft protruding out of pump housing, carrying electric motor rotor

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DE202008011817U1 (en) 2010-02-11
ATE499529T1 (en) 2011-03-15
EP2163763B2 (en) 2014-08-06
DE502009000394D1 (en) 2011-04-07

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