EP2163763A1 - Oscillating displacement vacuum pump - Google Patents

Oscillating displacement vacuum pump Download PDF

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Publication number
EP2163763A1
EP2163763A1 EP09009702A EP09009702A EP2163763A1 EP 2163763 A1 EP2163763 A1 EP 2163763A1 EP 09009702 A EP09009702 A EP 09009702A EP 09009702 A EP09009702 A EP 09009702A EP 2163763 A1 EP2163763 A1 EP 2163763A1
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Prior art keywords
pressure
space
drive
vacuum pump
pressure sensor
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EP09009702A
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German (de)
French (fr)
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EP2163763B1 (en
EP2163763B2 (en
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Jürgen Dr. Dirscherl
Frank Dr. Gitmans
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Vacuubrand GmbH and Co KG
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Vacuubrand GmbH and Co KG
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • F04B49/022—Stopping, starting, unloading or idling control by means of pressure

Definitions

  • the invention relates to an oscillating positive displacement vacuum pump having the features of the preamble of claim 1 and 2, respectively.
  • Oscillating positive displacement vacuum pumps such as diaphragm or piston vacuum pumps or combined diaphragm / piston vacuum pumps are known.
  • at least one pumping chamber is periodically reduced and enlarged by (one) an oscillating element.
  • the medium to be pumped gas or vapors
  • shrinking the pump chamber the medium in the pump chamber is compressed and ejected through at least one outlet opening.
  • the oscillating element not only serves to reduce and enlarge the pumping chamber, but must also seal the pumping chamber against the drive space underneath with elements for moving the oscillating element. This seal must be as good as possible. Leakages from the pumping chamber into the drive chamber and vice versa would reduce the efficiency of the pumping process, and also lead to a deterioration of the achievable vacuum level with vacuum pumps. With such reciprocating positive displacement pumps, and in particular with diaphragm pumps, chemically aggressive gases and vapors are often conveyed which, in the event of leakage from the (in this case, chemically resistant) pumping space into the drive space, corrode the mechanical components such as bearings, connecting rods and shafts would lead in the drive room.
  • a failure of the seal is the most common cause of failure of such pumps, since the sealing member such as the membrane is exposed in a diaphragm pump or the piston seal on a piston pump a very high mechanical, thermal and possibly chemical stress. So for the membrane in a diaphragm pump typically lives of 3,000-20,000 hours are given, in continuous operation is thus expected to such a failure within a few months or years. Accordingly, such membrane vacuum pumps are generally designed so that replacement of the typical wear part "membrane" can be performed by the customer himself without much effort.
  • the invention is based on the problem of reliably and promptly detecting the failure of the sealing element in an oscillating positive displacement vacuum pump.
  • the drive space is relatively dense in many types of reciprocating positive displacement vacuum pumps to dampen noise from the back of the oscillating element as a result of its rapid movement.
  • the drive space - except for special sealing measures such as O-rings - but hardly so gas-tight that it does not without failure of the sealing element - at least over a longer period - the ambient pressure.
  • the drive space is sufficiently gas tight to detect a drop in pressure in the drive space due to failure of the sealing element during operation.
  • a further synchronously oscillating element are mounted, which closes the gap between them and the sealing element gas-tight. In this case, the pressure drop due to leakage of the sealing member in this space can be detected.
  • this attached under the sealing element second element may also be arranged fixed, with sliding seal to the moving connecting rod.
  • the inventive principle can be advantageously transferred to oscillating positive displacement vacuum pumps with multiple pump stages with a common drive space and with a common pressure drop detector on the drive space.
  • the spaces between the sealing and the underlying second element can be connected to gas lines and so also with only one pressure drop sensor all pumping stages are detected.
  • relative pressure sensors are used, which measure the pressure below the sealing element relative to the ambient pressure.
  • influences can be excluded by variations in ambient pressure due to weather or altitude.
  • the drive space or, in the case of an insufficiently gas-tight drive space, the gap between the sealing element and the underlying element is sufficiently gastight to provide a clearly measurable pressure drop in the event of leakage of the sealing element on the other hand, but not so gas-tight that without this leak does not come to a pressure equalization with the environment. Therefore, the pressure loss due to leakage of the sealing member with a relative pressure sensor relative to the ambient pressure can be easily and inexpensively detected.
  • the signal of the pressure sensor can be compared, for example, in a downstream electronics with a default value and at a pressure drop greater than a predetermined limit, a warning signal o. ⁇ . Be triggered.
  • This warning signal can also be used in a downstream control for process control or shutdown, so as to avoid consequential damage from the failure of the sealed element.
  • the pressure sensor can be designed as a pressure-controlled switching relay to turn off the pump.
  • the rapid oscillation of the oscillating element of the positive displacement pump is then uncritical for the evaluation of the signal of the pressure sensor, if the pressure sensor itself has such a response that pressure fluctuations in the drive chamber or in the gap with the operationally occurring oscillation frequency of the oscillating element metrology not only dissolved, but only the resulting average value of the pressure is determined by the pressure sensor.
  • Fig. 1 shows a first embodiment of an oscillating positive displacement vacuum pump 1, which may be a piston vacuum pump or, preferably, a diaphragm vacuum pump.
  • the illustrated embodiment shows for simplicity a piston vacuum pump.
  • the illustrated positive displacement vacuum pump 1 has a housing 2 and a motor drive unit 3, which is preferably arranged in the housing 2.
  • the housing 2 forms an interior.
  • oscillating element 4 is arranged in the interior.
  • the sealing, oscillating element 4 is a pump piston.
  • a membrane vacuum pump is the circumferentially clamped elastic membrane.
  • the interior in the housing 2 is sealingly divided by the oscillating element 4 into a suction space 7 provided with inlet and outlet openings 5, 6 above / in front of the element 4 and a drive space 8 below / behind the element 4.
  • the drive chamber 8 is even at least largely sealed to the ambient atmosphere.
  • a pressure sensor 9 is arranged at the drive chamber 8. With this, the pressure in the drive chamber 8 can be measured.
  • the pressure sensor 9 is generated by an evaluation circuit 10 to which the pressure sensor 9 is connected, a corresponding warning signal, control signal or shutdown signal.
  • a user is either warned or, for safety's sake, the drive unit 3 of the displacement vacuum pump is switched off immediately in order to avoid major consequential damage.
  • Fig. 1 shows connecting lines between the drive unit 3 and the evaluation circuit 10, which is designed in the form of a typical electronic control, preferably with a microprocessor.
  • a first line is provided to supply the evaluation circuit 10 with a signal showing the respective position of the drive unit 3, which can close the normally operationally expected pressure in the drive chamber 8.
  • the second line is provided to transmit a switch-off signal from the evaluation circuit 10 to the drive unit 3.
  • Fig. 2 shows another embodiment of an oscillating positive displacement vacuum pump 1, in which the drive chamber 8 is not even or little sealed to the ambient atmosphere.
  • oscillating element 4 by far a further sealing element 11 is arranged.
  • the drive space 8 a pressure sensor 9 is arranged in the space 12 between the elements 4, 11, with which the pressure in the space 12 is measured.
  • an appropriate warning signal, control signal or switch-off signal is generated by an evaluation circuit 10.
  • the further sealing member 11 is a member 11 which oscillates synchronously with the first member 4, so that the gap 12 normally maintains substantially unchanged volume in operation.
  • the pressure in the gap 12 remains operationally substantially constant.
  • the measurement of a pressure drop through the pressure sensor 9 is very simple in terms of evaluation.
  • the expander vacuum pump 1 is expediently switched off by the evaluation circuit 10 following a switch-off signal in order to avoid consequential damage.
  • the pressure sensor 9 is designed as a relative pressure sensor which detects the pressure in the drive space or in the space 12 relative to the ambient pressure.
  • a suitable pressure sensor 9 as a relative pressure sensor and thereby achieve that in the evaluation circuit 10, a preferably adjustable limit value for the differential pressure is stored, that the pressure sensor 9 has such a response that pressure fluctuations in the drive chamber 8 and in the space 12th are not resolved with the oscillating frequency of the oscillating element 4 occurring operationally, but only the resulting mean value of the pressure in the drive chamber 8 or in the space 12 is determined, and that, if the limit is exceeded, from the evaluation circuit 10, a corresponding warning signal, control signal or Shutdown signal is generated.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The oscillating positive displacement vacuum pump (1) has a drive chamber (8), which is sealed automatically for surrounding atmosphere extensively, such that a pressure sensor (9) is arranged at the drive chamber. The pressure is measured in the drive chamber. A control signal or switch-off signal is generated by the pressure sensor, while measuring a low pressure in the drive chamber corresponding to a warning signal from an evaluating circuit (10).

Description

Die Erfindung betrifft eine oszillierende Verdrängervakuumpumpe mit den Merkmalen des Oberbegriffs von Anspruch 1 bzw. 2.The invention relates to an oscillating positive displacement vacuum pump having the features of the preamble of claim 1 and 2, respectively.

Oszillierende Verdrängervakuumpumpen wie beispielsweise Membran- oder Kolbenvakuumpumpen oder kombinierte Membran-/Kolbenvakuumpumpen sind bekannt. Bei diesen Pumpentypen wird mindestens ein Schöpfraum durch (jeweils) ein oszillierendes Element periodisch verkleinert und vergrößert. Beim Vergrößern des Schöpfraums wird das zu fördernde Medium (Gas oder Dämpfe) durch mindestens eine Einlaßöffnung in den Schöpfraum hineingesaugt. Beim Verkleinern des Schöpfraums wird das im Schöpfraum befindliche Medium verdichtet und durch mindestens eine Auslaßöffnung ausgestoßen.Oscillating positive displacement vacuum pumps such as diaphragm or piston vacuum pumps or combined diaphragm / piston vacuum pumps are known. In these types of pumps, at least one pumping chamber is periodically reduced and enlarged by (one) an oscillating element. When enlarging the pumping chamber, the medium to be pumped (gas or vapors) is sucked through at least one inlet opening into the pumping chamber. When shrinking the pump chamber, the medium in the pump chamber is compressed and ejected through at least one outlet opening.

Das oszillierende Element dient dabei nicht nur zum Verkleinern und Vergrößern des Schöpfraums, sondern muß auch den Schöpfraum gegen den darunter befindlichen Antriebsraum mit Elementen zur Bewegung des oszillierenden Elements abdichten. Diese Abdichtung muß möglichst gut sein. Leckagen aus dem Schöpfraum in den Antriebsraum und umgekehrt würden die Effizienz des Pumpvorgangs verringern, und bei Vakuumpumpen auch zur Verschlechterung des erreichbaren Vakuumniveaus führen. Mit solchen oszillierenden Verdrängerpumpen, und hierbei besonders mit Membranpumpen, werden oft chemisch aggressive Gase und Dämpfe gefördert, die bei einer Leckage aus dem (in diesem Falle chemisch beständig gestalteten) Schöpfraum in den Antriebsraum zu Korrosionsangriff auf die mechanischen Komponenten wie Lager, Pleuel und Wellen im Antriebsraum führen würden.The oscillating element not only serves to reduce and enlarge the pumping chamber, but must also seal the pumping chamber against the drive space underneath with elements for moving the oscillating element. This seal must be as good as possible. Leakages from the pumping chamber into the drive chamber and vice versa would reduce the efficiency of the pumping process, and also lead to a deterioration of the achievable vacuum level with vacuum pumps. With such reciprocating positive displacement pumps, and in particular with diaphragm pumps, chemically aggressive gases and vapors are often conveyed which, in the event of leakage from the (in this case, chemically resistant) pumping space into the drive space, corrode the mechanical components such as bearings, connecting rods and shafts would lead in the drive room.

Aus den zuvor aufgeführten Gründen wird sehr hoher konstruktiver Aufwand für eine möglichst gute und dauerhafte Abdichtung des Schöpfraums vom Antriebsraum betrieben. Bei Membranvakuumpumpen erfolgt diese Abdichtung durch eine gasdichte Einspannung der Membran am Außenumfang und - falls aufgrund einer Öffnung dort erforderlich - auch im Innenbereich. Bei Kolbenpumpen erfolgt die Abdichtung durch eine gleitende Dichtung des Kolbens in der Kolbenführung oder durch vergleichbare Mittel. In allen Fällen führt ein Versagen der Abdichtung, beispielsweise durch einen Riß in der Membran oder durch Verschleiß an der Kolbengleitdichtung, zu einem Funktionsausfall der Pumpe. Falls durch solchen Verschleiß aggressive Stoffe aus dem Schöpfraum in den Antriebsraum gelangen, kann dies zu einem Totalausfall der Pumpe mit erheblichen Folgekosten führen.For the reasons listed above very high design effort for the best possible and permanent sealing of the pump chamber is operated by the drive compartment. In membrane vacuum pumps, this sealing is carried out by a gas-tight clamping of the membrane on the outer circumference and - if required there due to an opening - also in the interior. Piston pumps are sealed by a sliding seal of the piston in the piston guide or by comparable means. In all cases, a failure of the seal, for example by a crack in the membrane or by wear on the Kolbengleitdichtung, leading to a malfunction of the pump. If aggressive substances escape from the pump chamber into the drive chamber as a result of such wear, this can lead to total failure of the pump with considerable consequential costs.

Ein Ausfall der Abdichtung ist die häufigste Ausfallursache an solchen Pumpen, da das abdichtende Element wie beispielsweise die Membran bei einer Membranpumpe oder die Kolbendichtung an einer Kolbenpumpe einer sehr hohen mechanischen, thermischen und ggf. chemischen Belastung ausgesetzt ist. So werden für die Membrane in einer Membranpumpe typischerweise Standzeiten von 3.000-20.000 Stunden angegeben, bei Dauerbetrieb ist also mit einem solchen Ausfall innerhalb weniger Monate bzw. Jahre zu rechnen. Dementsprechend sind solche Membranvakuumpumpen im allgemeinen so konstruiert, daß ein Austausch des typischen Verschleißteils "Membran" ohne großen Aufwand vom Kunden selbst durchgeführt werden kann.A failure of the seal is the most common cause of failure of such pumps, since the sealing member such as the membrane is exposed in a diaphragm pump or the piston seal on a piston pump a very high mechanical, thermal and possibly chemical stress. So for the membrane in a diaphragm pump typically lives of 3,000-20,000 hours are given, in continuous operation is thus expected to such a failure within a few months or years. Accordingly, such membrane vacuum pumps are generally designed so that replacement of the typical wear part "membrane" can be performed by the customer himself without much effort.

Um die oben geschilderten erheblichen Folgeschäden durch einen Ausfall des Abdichtungselements zu vermeiden, wird in der Praxis eine vorbeugende Wartung mit einem Wartungsintervall nach Erfahrungswerten des Anwenders oder Empfehlungen des Herstellers vorgenommen. Dies kann - bei zu frühzeitigem Wechsel - zu unnötig hohen regelmäßigen Kosten führen. Bei vorzeitigem Verschleiß, beispielsweise durch das Fördern von abrasiven oder zu Ablagerungen neigenden Medien, kann die Wartung eventuell nicht früh genug erfolgen und damit sind Folgeschäden nicht zuverlässig zu vermeiden.In order to avoid the above-described significant consequential damage by failure of the sealing element, in practice, a preventive maintenance with a maintenance interval based on experience of the user or manufacturer's recommendations made. This can lead to unnecessarily high regular costs if you change too soon. In the event of premature wear, for example due to the pumping of abrasive or deposit-prone media, the maintenance may not be carried out early enough and consequential damage can not be reliably prevented.

Der Erfindung liegt das Problem zugrunde, das Versagen des abdichtenden Elements in einer oszillierenden Verdrängervakuumpumpe zuverlässig und zeitnah zu erkennen.The invention is based on the problem of reliably and promptly detecting the failure of the sealing element in an oscillating positive displacement vacuum pump.

Die Problemlösung erfolgt erfindungsgemäß durch eine Vorrichtung, die den Druckabfall im Raum hinter dem oszillierenden Element in Folge einer Lekkage an dessen Abdichtung detektiert. Diese ist in einer ersten Variante in Anspruch 1, in einer zweiten Variante in Anspruch 2 beschrieben. Bevorzugte Ausgestaltungen sind Gegenstand der Unteransprüche.The problem is solved according to the invention by a device which detects the pressure drop in the space behind the oscillating element as a result of a Lekkage at the seal. This is described in a first variant in claim 1, in a second variant in claim 2. Preferred embodiments are the subject of the dependent claims.

Bei einer Leckage am abdichtenden Element erfolgt ein Gasaustausch aus dem Schöpfraum mit dem unter dem abdichtenden Element liegenden Bereich. Im Falle eines Unterdrucks im Schöpfraum, wie dies bei nahezu allen Betriebszuständen einer als Vakuumpumpe eingesetzten oszillierenden Verdrängerpumpe der Fall ist, wird Gas aus dem unter dem abdichtenden Element liegenden Bereich in den Schöpfraum gesaugt, der Druck im unter dem abdichtenden Element liegenden Bereich also abnehmen. Dies ist nicht im Widerspruch zu obiger Feststellung, daß es bei aggressiven Medien im Schöpfraum durch eine Leckage im abdichtenden Element zu Korrosionsangriff im Antriebsraum kommen kann, da in gewissem Maße stets ein Gasaustausch in beiden Richtungen erfolgt.In the case of a leakage at the sealing element, a gas exchange takes place from the pump chamber to the region located below the sealing element. In the case of a negative pressure in the pumping chamber, as is the case in almost all operating states of an oscillating positive displacement pump used as a vacuum pump, gas is sucked from the area below the sealing element into the pumping chamber, thus reducing the pressure in the area below the sealing element. This is not in contradiction to the above statement that aggressive media in the suction chamber can cause corrosive attack in the drive chamber due to leakage in the sealing element, since gas exchange in both directions always takes place to a certain extent.

Der Antriebsraum wird bei vielen Bauarten oszillierender Verdrängervakuumpumpen relativ dicht aufgebaut, um Geräusche von der Rückseite des oszillierenden Elements in Folge von dessen schneller Bewegung zu dämpfen. Gleichzeitig ist der Antriebsraum - außer bei speziellen Abdichtungsmaßnahmen wie O-Ringen - aber kaum so gasdicht, daß er ohne Ausfall des abdichtenden Elements nicht - zumindest über einen längeren Zeitraum - den Umgebungsdruck annimmt. Überraschenderweise stellt man fest, daß bei vielen Bauarten von oszillierenden Verdrängervakuumpumpen der Antriebsraum jedoch hinreichend gasdicht ist, um einen Abfall des Drucks im Antriebsraum in Folge eines Ausfalls des abdichtenden Elements im Betrieb erkennen zu können.The drive space is relatively dense in many types of reciprocating positive displacement vacuum pumps to dampen noise from the back of the oscillating element as a result of its rapid movement. At the same time the drive space - except for special sealing measures such as O-rings - but hardly so gas-tight that it does not without failure of the sealing element - at least over a longer period - the ambient pressure. Surprisingly, it is noted that in many types of reciprocating positive displacement vacuum pumps, the drive space is sufficiently gas tight to detect a drop in pressure in the drive space due to failure of the sealing element during operation.

Falls bauartbedingt eine hinreichende Gasdichtigkeit des Antriebsraums nicht gegeben oder erreichbar ist, so kann in einer weiteren erfindungsgemäßen Ausführung unterhalb des oszillierenden Elements ein weiteres synchron oszillierendes Element angebracht werden, das den Zwischenraum zwischen sich und dem abdichtenden Element gasdicht abschließt. In diesem Fall läßt sich der Druckabfall infolge einer Leckage des abdichtenden Elements in diesem Zwischenraum detektieren.If due to the design sufficient gas-tightness of the drive space is not given or achievable, so in another embodiment of the invention below the oscillating element, a further synchronously oscillating element are mounted, which closes the gap between them and the sealing element gas-tight. In this case, the pressure drop due to leakage of the sealing member in this space can be detected.

Bei Kolbenpumpen mit gerade laufendem Pleuel kann dieses unter dem abdichtenden Element angebrachte zweite Element auch feststehend angeordnet sein, mit gleitender Dichtung zum sich bewegenden Pleuel.In piston pumps with straight connecting rod, this attached under the sealing element second element may also be arranged fixed, with sliding seal to the moving connecting rod.

Das erfindungsgemäße Prinzip läßt sich vorteilhaft auch auf oszillierende Verdrängervakuumpumpen mit mehreren Pumpstufen mit einem gemeinsamen Antriebsraum und mit einem gemeinsamen Druckabfalldetektor am Antriebsraum übertragen. Im Falle eines nicht hinreichend gasdichten Antriebsraums können die Zwischenräume zwischen dem abdichtenden und dem darunter liegenden zweiten Element mit Gasleitungen verbunden werden und so ebenfalls mit nur einem Druckabfallsensor alle Pumpstufen erfaßt werden.The inventive principle can be advantageously transferred to oscillating positive displacement vacuum pumps with multiple pump stages with a common drive space and with a common pressure drop detector on the drive space. In the case of a not sufficiently gas-tight drive space, the spaces between the sealing and the underlying second element can be connected to gas lines and so also with only one pressure drop sensor all pumping stages are detected.

Für die Detektion des Druckabfalls kommen praktischerweise Relativdrucksensoren zum Einsatz, die den Druck unterhalb des abdichtenden Elements relativ zum Umgebungsdruck messen. Damit lassen sich Einflüsse durch Variationen des Umgebungsdrucks durch Wetter oder Höhenlage ausschließen.For the detection of the pressure drop, conveniently, relative pressure sensors are used, which measure the pressure below the sealing element relative to the ambient pressure. Thus, influences can be excluded by variations in ambient pressure due to weather or altitude.

Wie oben erwähnt, ist bei vielen Bauarten von Verdrängervakuumpumpen der Antriebsraum bzw. - im Falle eines nicht hinreichend gasdichten Antriebsraums - der Zwischenraum zwischen dem abdichtenden Element und dem darunter liegenden Element zwar hinreichend gasdicht, um einen eindeutig meßbaren Druckabfall im Falle einer Undichtigkeit des abdichtenden Elements zu ergeben, andererseits aber nicht so gasdicht, daß es ohne diese Undichtigkeit nicht zu einer Druckangleichung mit der Umgebung kommt. Daher läßt sich der Druckabfall in Folge einer Undichtigkeit des abdichtenden Elements mit einem Relativdrucksensor bezogen auf den Umgebungsdruck einfach und preisgünstig detektieren.As mentioned above, in many types of positive displacement vacuum pumps, the drive space or, in the case of an insufficiently gas-tight drive space, the gap between the sealing element and the underlying element is sufficiently gastight to provide a clearly measurable pressure drop in the event of leakage of the sealing element on the other hand, but not so gas-tight that without this leak does not come to a pressure equalization with the environment. Therefore, the pressure loss due to leakage of the sealing member with a relative pressure sensor relative to the ambient pressure can be easily and inexpensively detected.

Das Signal des Drucksensors kann beispielsweise in einer nachgeschalteten Elektronik mit einem Vorgabewert verglichen und bei einem Druckabfall größer als ein vorgegebener Grenzwert ein Warnsignal o. ä. ausgelöst werden. Dieses Warnsignal kann in einer nachgeordneten Steuerung auch zur Prozeßsteuerung bzw. -abschaltung verwendet werden, um so Folgeschäden durch den Ausfall des abdichteten Elements zu vermeiden. Im einfachsten Fall kann der Drucksensor als druckgesteuert schaltendes Relais ausgelegt sein, um die Pumpe abzuschalten.The signal of the pressure sensor can be compared, for example, in a downstream electronics with a default value and at a pressure drop greater than a predetermined limit, a warning signal o. Ä. Be triggered. This warning signal can also be used in a downstream control for process control or shutdown, so as to avoid consequential damage from the failure of the sealed element. In the simplest case, the pressure sensor can be designed as a pressure-controlled switching relay to turn off the pump.

Die schnelle Oszillation des oszillierenden Elements der Verdrängervakuumpumpe ist für die Auswertung des Signals des Drucksensors dann unkritisch, wenn der Drucksensor selbst ein solches Ansprechverhalten hat, daß Druckschwankungen im Antriebsraum bzw. im Zwischenraum mit der betriebsmäßig auftretenden Oszillationsfrequenz des oszillierenden Elements meßtechnisch garnicht erst aufgelöst werden, sondern nur der resultierende Mittelwert des Druckes vom Drucksensor ermittelt wird.The rapid oscillation of the oscillating element of the positive displacement pump is then uncritical for the evaluation of the signal of the pressure sensor, if the pressure sensor itself has such a response that pressure fluctuations in the drive chamber or in the gap with the operationally occurring oscillation frequency of the oscillating element metrology not only dissolved, but only the resulting average value of the pressure is determined by the pressure sensor.

Bei mehreren Pumpstufen, die in einem gemeinsamen Antriebsraum arbeiten, kann sich auch eine solche Konstellation ergeben (insbesondere bei Boxeranordnung), daß sich das Gesamtvolumen des Antriebsraums bei Bewegung der oszillierenden Elemente nicht ändert und damit der Druck ohnehin hier normalerweise betriebsmäßig konstant ist.In the case of several pump stages which operate in a common drive space, such a constellation can also result (in particular in the case of a boxer arrangement) that the total volume of the drive space does not change during movement of the oscillating elements and thus the pressure here is normally constant in operation.

In anderen Fällen bzw. mit empfindlicheren Drucksensoren kann man aber auch einen betriebsmäßig zu erwartenden Druckverlauf im Antriebsraum bzw. im Zwischenraum abspeichern und den tatsächlichen, vom Drucksensor dann gemessenen Druck mit dem abgespeicherten Druckverlauf vergleichen.In other cases or with more sensitive pressure sensors, however, one can also store an operationally expected pressure profile in the drive space or in the intermediate space and compare the actual pressure, which is then measured by the pressure sensor, with the stored pressure profile.

Im folgenden wird die Erfindung anhand einer lediglich Ausführungsbeispiele darstellenden Zeichnung näher erläutert. In der Zeichnung zeigt

Fig. 1
eine schematische Darstellung einer oszillierenden Verdrängervakuumpumpe mit einem hinreichend abgedichteten Antriebsraum,
Fig. 2
eine schematische Darstellung einer oszillierenden Verdrängervakuumpumpe mit einem nicht hinreichend dichten Antriebsraum.
In the following the invention will be explained in more detail with reference to a drawing illustrating only embodiments. In the drawing shows
Fig. 1
1 is a schematic representation of an oscillating positive displacement vacuum pump with a sufficiently sealed drive space,
Fig. 2
a schematic representation of an oscillating positive displacement vacuum pump with a not sufficiently dense drive space.

Fig. 1 zeigt ein erstes Ausführungsbeispiel einer oszillierenden Verdrängervakuumpumpe 1, bei der es sich um eine Kolbenvakuumpumpe oder, vorzugsweise, eine Membranvakuumpumpe handeln kann. Das dargestellte Ausführungsbeispiel zeigt der Einfachheit halber eine Kolbenvakuumpumpe. Fig. 1 shows a first embodiment of an oscillating positive displacement vacuum pump 1, which may be a piston vacuum pump or, preferably, a diaphragm vacuum pump. The illustrated embodiment shows for simplicity a piston vacuum pump.

Die dargestellte Verdrängervakuumpumpe 1 weist ein Gehäuse 2 und eine vorzugsweise im Gehäuse 2 angeordnete motorische Antriebseinheit 3 auf. Das Gehäuse 2 bildet einen Innenraum. Im Innenraum ist ein gegenüber dem Gehäuse 2 abdichtendes, oszillierendes Element 4 angeordnet. Im dargestellten Ausführungsbeispiel einer Kolbenvakuumpumpe handelt es sich bei dem abdichtenden, oszillierenden Element 4 um einen Pumpenkolben. Bei einer Membranvakuumpumpe handelt es sich um die umfangseitig eingespannte elastische Membran.The illustrated positive displacement vacuum pump 1 has a housing 2 and a motor drive unit 3, which is preferably arranged in the housing 2. The housing 2 forms an interior. In the interior is opposite to the Housing 2 sealing, oscillating element 4 is arranged. In the illustrated embodiment of a piston vacuum pump, the sealing, oscillating element 4 is a pump piston. A membrane vacuum pump is the circumferentially clamped elastic membrane.

Der Innenraum im Gehäuse 2 wird von dem oszillierenden Element 4 in einen mit Einlaß- und Auslaßöffnungen 5, 6 versehenen Schöpfraum 7 über/vor dem Element 4 und einen Antriebsraum 8 unter/hinter dem Element 4 abdichtend unterteilt.The interior in the housing 2 is sealingly divided by the oscillating element 4 into a suction space 7 provided with inlet and outlet openings 5, 6 above / in front of the element 4 and a drive space 8 below / behind the element 4.

In dem in Fig. 1 dargestellten ersten Ausführungsbeispiel ist der Antriebsraum 8 selbst zur Umgebungsatmosphäre hin zumindest weitgehend abgedichtet. Am Antriebsraum 8 ist ein Drucksensor 9 angeordnet. Mit diesem kann der Druck im Antriebsraum 8 gemessen werden. Bei Messung eines gegenüber dem normalerweise betriebsmäßig zu erwartenden Druckes im Antriebsraum 8 wesentlich niedrigeren Druck im Antriebsraum 8 durch den Drucksensor 9 wird von einer Auswerteschaltung 10, an die der Drucksensor 9 angeschlossen ist, ein entsprechendes Warnsignal, Steuersignal oder Abschaltsignal generiert. Ein Benutzer wird also entweder gewarnt oder es wird sicherheitshalber sogleich die Antriebseinheit 3 der Verdrängervakuumpumpe abgeschaltet, um größere Folgeschäden zu vermeiden.In the in Fig. 1 illustrated first embodiment, the drive chamber 8 is even at least largely sealed to the ambient atmosphere. At the drive chamber 8, a pressure sensor 9 is arranged. With this, the pressure in the drive chamber 8 can be measured. When measuring a relation to the normally operationally expected pressure in the drive chamber 8 much lower pressure in the drive chamber 8 by the pressure sensor 9 is generated by an evaluation circuit 10 to which the pressure sensor 9 is connected, a corresponding warning signal, control signal or shutdown signal. Thus, a user is either warned or, for safety's sake, the drive unit 3 of the displacement vacuum pump is switched off immediately in order to avoid major consequential damage.

Fig. 1 zeigt Verbindungsleitungen zwischen der Antriebseinheit 3 und der Auswerteschaltung 10, die in Form einer typischen elektronischen Steuerung, vorzugsweise mit einem Mikroprozessor, ausgeführt ist. Im dargestellten Ausführungsbeispiel ist eine erste Leitung vorgesehen, um die Auswerteschaltung 10 mit einem Signal zu versorgen, das die jeweilige Position der Antriebseinheit 3 zeigt, die auf den normalerweise betriebsmäßig zu erwartenden Druck im Antriebsraum 8 schließen läßt. Die zweite Leitung ist vorgesehen, um ein Abschaltsignal von der Auswerteschaltung 10 an die Antriebseinheit 3 zu übermitteln. Fig. 1 shows connecting lines between the drive unit 3 and the evaluation circuit 10, which is designed in the form of a typical electronic control, preferably with a microprocessor. In the illustrated embodiment, a first line is provided to supply the evaluation circuit 10 with a signal showing the respective position of the drive unit 3, which can close the normally operationally expected pressure in the drive chamber 8. The second line is provided to transmit a switch-off signal from the evaluation circuit 10 to the drive unit 3.

Fig. 2 zeigt ein anderes Ausführungsbeispiel einer oszillierenden Verdrängervakuumpumpe 1, bei der der Antriebsraum 8 selbst zur Umgebungsatmosphäre hin nicht oder wenig abgedichtet ist. Hier ist vorgesehen, daß im Antriebsraum 8 unter/hinter dem abdichtenden, oszillierenden Element 4 mit Abstand ein weiteres abdichtendes Element 11 angeordnet ist. Am Antriebsraum 8 ist im Zwischenraum 12 zwischen den Elementen 4, 11 ein Drucksensor 9 angeordnet, mit dem der Druck im Zwischenraum 12 gemessen wird. Bei Messung eines gegenüber dem normalerweise betriebsmäßig zu erwartenden Druck im Zwischenraum 12 wesentlich niedrigeren Druck im Zwischenraum 12 durch den Drucksensor 9 wird von einer Auswerteschaltung 10 ein entsprechendes Warnsignal, Steuersignal oder Abschaltsignal generiert. Fig. 2 shows another embodiment of an oscillating positive displacement vacuum pump 1, in which the drive chamber 8 is not even or little sealed to the ambient atmosphere. Here it is provided that in the drive room 8 under / beyond the sealing, oscillating element 4 by far a further sealing element 11 is arranged. The drive space 8, a pressure sensor 9 is arranged in the space 12 between the elements 4, 11, with which the pressure in the space 12 is measured. When measuring a pressure in the intermediate space 12 which is much lower than in the intermediate space 12 as a function of the pressure normally expected by the pressure sensor 9, an appropriate warning signal, control signal or switch-off signal is generated by an evaluation circuit 10.

Nach bevorzugter Konstruktion des Ausführungsbeispiels von Fig. 2 ist das weitere abdichtende Element 11 ein mit dem ersten Element 4 synchron oszillierendes Element 11, so daß der Zwischenraum 12 normalerweise betriebsmäßig im wesentlichen ein unverändertes Volumen beibehält. Damit bleibt der Druck im Zwischenraum 12 betriebsmäßig im wesentlichen konstant. Die Messung eines Druckabfalls durch den Drucksensor 9 ist auswertungstechnisch sehr einfach.According to a preferred construction of the embodiment of Fig. 2 the further sealing member 11 is a member 11 which oscillates synchronously with the first member 4, so that the gap 12 normally maintains substantially unchanged volume in operation. Thus, the pressure in the gap 12 remains operationally substantially constant. The measurement of a pressure drop through the pressure sensor 9 is very simple in terms of evaluation.

Bei einem gerade laufenden Pleuel einer Kolbenpumpe kann das unter dem abdichtenden, oszillierenden Element 4 angebrachte weitere abdichtende Element 11 auch feststehend angeordnet sein, mit gleitender Dichtung zum hin- und hergehenden Pleuel. Dann ist die Drucksituation im Zwischenraum 12 etwas komplexer und muß über die Auswerteschaltung 10 berücksichtigt werden.In a straight connecting rod of a piston pump which is mounted under the sealing, oscillating element 4 further sealing member 11 may also be arranged fixed, with sliding seal to the reciprocating connecting rod. Then the pressure situation in the intermediate space 12 is somewhat more complex and has to be taken into account via the evaluation circuit 10.

Für beide Ausführungsvarianten gilt, daß zweckmäßigerweise von der Auswerteschaltung 10 die Verdrängervakuumpumpe 1 einem Abschaltsignal folgend abgeschaltet wird, um Folgeschäden zu vermeiden.Applicable for both variants is that the expander vacuum pump 1 is expediently switched off by the evaluation circuit 10 following a switch-off signal in order to avoid consequential damage.

Besonders interessant ist es, wenn, wie bereits im allgemeinen Teil der Beschreibung erläutert worden ist, der Drucksensor 9 als Relativdrucksensor ausgebildet ist, der den Druck im Antriebsraum bzw. im Zwischenraum 12 relativ zum Umgebungsdruck erfaßt.It is particularly interesting if, as has already been explained in the general part of the description, the pressure sensor 9 is designed as a relative pressure sensor which detects the pressure in the drive space or in the space 12 relative to the ambient pressure.

Nach weiter bevorzugter Lehre der Erfindung kann man von vorneherein den Drucksensor 9 als druckgesteuert schaltendes Relais ausführen.According to a further preferred teaching of the invention can be carried out from the outset the pressure sensor 9 as a pressure-controlled switching relay.

Im Normalfall wird man mit einem passenden Drucksensor 9 als Relativdrucksensor arbeiten und dabei erreichen, daß in der Auswerteschaltung 10 ein vorzugsweise verstellbarer Grenzwert für den Differenzdruck gespeichert ist, daß der Drucksensor 9 ein solches Ansprechverhalten hat, daß Druckschwankungen im Antriebsraum 8 bzw. im Zwischenraum 12 mit der betriebsmäßig auftretenden Oszillationsfrequenz des oszillierenden Elements 4 nicht aufgelöst werden, sondern nur der resultierende Mittelwert des Druckes im Antriebsraum 8 bzw. im Zwischenraum 12 ermittelt wird, und daß, wenn der Grenzwert überschritten wird, von der Auswerteschaltung 10 ein entsprechendes Warnsignal, Steuersignal oder Abschaltsignal generiert wird.Normally, one will work with a suitable pressure sensor 9 as a relative pressure sensor and thereby achieve that in the evaluation circuit 10, a preferably adjustable limit value for the differential pressure is stored, that the pressure sensor 9 has such a response that pressure fluctuations in the drive chamber 8 and in the space 12th are not resolved with the oscillating frequency of the oscillating element 4 occurring operationally, but only the resulting mean value of the pressure in the drive chamber 8 or in the space 12 is determined, and that, if the limit is exceeded, from the evaluation circuit 10, a corresponding warning signal, control signal or Shutdown signal is generated.

Ist ein empfindlicherer Drucksensor 9 eingesetzt, so empfiehlt es sich, daß in der Auswerteschaltung 10 der normalerweise betriebsmäßig auftretende Druckverlauf im Antriebsraum 8 bzw. im Zwischenraum 12 gespeichert ist, der tatsächliche Druck im Antriebsraum 8 bzw. Zwischenraum 12 mit dem jeweils gespeicherten Druck verglichen wird und bei einer einen bestimmten Grenzwert überschreitenden Abweichung des gemessenen Druckes vom gespeicherten Druck ein entsprechendes Warnsignal, Steuersignal oder Abschaltsignal generiert wird.If a more sensitive pressure sensor 9 is used, then it is recommended that the normally occurring pressure curve is stored in the drive chamber 8 or in the intermediate space 12 in the evaluation circuit 10, the actual pressure in the drive chamber 8 or gap 12 is compared with the respectively stored pressure and when a deviation of the measured pressure from the stored pressure exceeds a certain limit value, a corresponding warning signal, control signal or switch-off signal is generated.

Von besonderer Bedeutung ist die erfindungsgemäße Lehre bei einer Membranvakuumpumpe zur Detektion eines eventuellen Membranrisses. Hier ist der Druckabfall besonders deutlich und tritt auch schlagartig auf, so daß eine schnell Reaktion der Auswerteschaltung 10 von großer Bedeutung ist.Of particular importance is the teaching of the invention in a membrane vacuum pump for detecting a possible membrane crack. Here, the pressure drop is particularly clear and also occurs abruptly, so that a fast response of the evaluation circuit 10 is of great importance.

Die Erweiterung der zuvor erläuterten Anordnungen auf Pumpen mit mehreren oszillierenden Pumpstufen ergibt sich aus der Beschreibung und den Abbildungen.The extension of the arrangements explained above to pumps with several oscillating pumping stages is evident from the description and the figures.

Claims (9)

Oszillierende Verdrängervakuumpumpe
mit einem Gehäuse (2) und einer vorzugsweise im Gehäuse (2) angeordneten Antriebseinheit (3), wobei das Gehäuse (2) einen Innenraum bildet,
mit einem im Innenraum angeordneten, gegenüber dem Gehäuse (2) abdichtenden, oszillierenden Element (4),
wobei der Innenraum vom oszillierenden Element (4) in einen mit Einlaß- und Auslaßöffnungen (5, 6) versehenen Schöpfraum (7) über/vor dem Element (4) und einen Antriebsraum (8) unter/hinter dem Element (4) abdichtend unterteilt ist,
dadurch gekennzeichnet,
daß der Antriebsraum (8) selbst zur Umgebungsatmosphäre hin zumindest weitgehend abgedichtet ist,
daß am Antriebsraum (8) ein Drucksensor (9) angeordnet ist, mit dem der Druck im Antriebsraum (8) gemessen wird und
daß bei Messung eines gegenüber dem normalerweise betriebsmäßig zu erwartenden Druckes im Antriebsraum (8) wesentlich niedrigeren Druck im Antriebsraum (8) durch den Drucksensor (9) von einer Auswerteschaltung (10) ein entsprechendes Warnsignal, Steuersignal oder Abschaltsignal generiert wird.Oscillating positive displacement vacuum pump
with a housing (2) and a preferably in the housing (2) arranged drive unit (3), wherein the housing (2) forms an interior,
with an oscillating element (4) arranged in the interior and sealing against the housing (2),
the interior being sealingly divided by the oscillating element (4) into a scoop space (7) provided with inlet and outlet openings (5, 6) above / in front of the element (4) and a drive space (8) below / behind the element (4) is
characterized,
that the drive space (8) is at least largely sealed even to the ambient atmosphere,
that a pressure sensor (9) is arranged at the drive chamber (8), with which the pressure in the drive chamber (8) is measured and
in that a corresponding warning signal, control signal or switch-off signal is generated by the pressure sensor (9) from an evaluation circuit (10) when measuring a pressure in the drive chamber (8) which is substantially lower than that normally expected in the drive chamber (8). Oszillierende Verdrängervakuumpumpe
mit einem Gehäuse (2) und einer vorzugsweise im Gehäuse (2) angeordneten Antriebseinheit (3), wobei das Gehäuse (2) einen Innenraum bildet,
mit einem im Innenraum angeordneten, gegenüber dem Gehäuse (2) abdichtenden, oszillierenden Element (4),
wobei der Innenraum vom oszillierenden Element (4) in einen mit Einlaß- und Auslaßöffnungen (5, 6) versehenen Schöpfraum (7) über/vor dem Element (4) und einen Antriebsraum (8) unter/hinter dem Element (4) abdichtend unterteilt ist,
dadurch gekennzeichnet,
daß der Antriebsraum (8) selbst zur Umgebungsatmosphäre hin nicht oder wenig abgedichtet ist,
daß im Antriebsraum (8) unter/hinter dem abdichtenden, oszillierenden Element (4) mit Abstand davon ein weiteres abdichtendes Element (11) angeordnet ist,
daß am Antriebsraum (8) im Zwischenraum (12) zwischen den Elementen (4, 11) ein Drucksensor (9) angeordnet ist, mit dem der Druck im Zwischenraum (12) gemessen wird und
daß bei Messung eines gegenüber dem normalerweise betriebsmäßig zu erwartenden Druckes im Zwischenraum (12) wesentlich niedrigeren Druck im Zwischenraum (12) durch den Drucksensor (9) von einer Auswerteschaltung (10) ein entsprechendes Warnsignal, Steuersignal oder Abschaltsignal generiert wird.Oscillating positive displacement vacuum pump
with a housing (2) and a preferably in the housing (2) arranged drive unit (3), wherein the housing (2) forms an interior,
with an oscillating element (4) arranged in the interior and sealing against the housing (2),
the interior being sealingly divided by the oscillating element (4) into a scoop space (7) provided with inlet and outlet openings (5, 6) above / in front of the element (4) and a drive space (8) below / behind the element (4) is
characterized,
that the drive space (8) is not or little sealed even to the ambient atmosphere,
that in the drive chamber (8) in / behind the sealing, oscillating element (4) at a distance therefrom a further sealing element (11) is arranged,
that on the drive space (8) in the intermediate space (12) between the elements (4, 11), a pressure sensor (9) is arranged, with which the pressure in the intermediate space (12) is measured and
in that a corresponding warning signal, control signal or switch-off signal is generated by an evaluation circuit (10) when measuring a substantially lower pressure in the intermediate space (12) than the normally operationally expected pressure in the intermediate space (12) by the pressure sensor (9). Verdrängervakuumpumpe nach Anspruch 2, dadurch gekennzeichnet,
daß das weitere abdichtende Element als mit dem abdichtenden, oszillierenden Element (4) synchron oszillierendes Element (11) ausgeführt ist.Displacement vacuum pump according to claim 2, characterized in that
in that the further sealing element is designed as an element (11) synchronously oscillating with the sealing, oscillating element (4). Verdrängervakuumpumpe nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet,
daß von der Auswerteschaltung (10) die Verdrängervakuumpumpe (1) einem Abschaltsignal folgend abgeschaltet wird.Displacement vacuum pump according to one of claims 1 to 3, characterized
that from the evaluation circuit (10) the positive displacement vacuum pump (1) is switched off following a shutdown signal. Verdrängervakuumpumpe nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet,
daß der Drucksensor (9) als Relativdrucksensor ausgebildet ist, der den Druck relativ zum Umgebungsdruck mißt.Positive displacement pump according to one of claims 1 to 4, characterized in that
that the pressure sensor (9) is designed as a relative pressure sensor which measures the pressure relative to the ambient pressure. Verdrängervakuumpumpe nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, daß der Drucksensor (9) als druckgesteuert schaltendes Relais ausgeführt ist.Displacement vacuum pump according to one of claims 1 to 5, characterized in that the pressure sensor (9) is designed as a pressure-controlled switching relay. Verdrängervakuumpumpe nach Anspruch 5 und ggf. Anspruch 6, dadurch gekennzeichnet,
daß in der Auswerteschaltung (10) ein vorzugsweise verstellbarer Grenzwert für den Differenzdruck gespeichert ist,
daß der Drucksensor (9) ein solches Ansprechverhalten hat, daß Druckschwankungen im Antriebsraum (8) bzw. im Zwischenraum (12) mit der betriebsmäßig auftretenden Oszillationsfrequenz des oszillierenden Elements (4) nicht aufgelöst werden, sondern nur der resultierende Mittelwert des Druckes im Antriebsraum (8) bzw. im Zwischenraum (12) ermittelt wird, und
daß, wenn der Grenzwert überschritten wird, von der Auswerteschaltung (10) ein entsprechendes Warnsignal, Steuersignal oder Abschaltsignal generiert wird.Displacement vacuum pump according to claim 5 and optionally claim 6, characterized
that in the evaluation circuit (10) a preferably adjustable threshold value is stored for the differential pressure,
that the pressure sensor (9) has such a response that pressure fluctuations in the drive chamber (8) and in the intermediate space (12) with the operationally occurring oscillation frequency of the oscillating element (4) are not resolved, but only the resulting mean value of the pressure in the drive chamber (8) or in the intermediate space (12) is determined, and
that when the limit value is exceeded by the evaluation circuit (10) a corresponding warning signal, control signal or shut-off signal is generated. Verdrängervakuumpumpe nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet,
daß in der Auswerteschaltung (10) der normalerweise betriebsmäßig auftretende Druckverlauf im Antriebsraum (8) bzw. im Zwischenraum (12) gespeichert ist,
daß der tatsächliche, vom Drucksensor (9) gemessene Druck im Antriebsraum (8) bzw. Zwischenraum (12) mit dem entsprechenden Druck des gespeicherten Druckverlaufs verglichen wird und
daß, wenn der gemessene Druck vom gespeicherten Druck um mehr als einen bestimmten Grenzwert abweicht, von der Auswerteschaltung (10) ein entsprechendes Warnsignal, Steuersignal oder Abschaltsignal generiert wird.Displacement vacuum pump according to one of claims 1 to 6, characterized
that in the evaluation circuit (10) of the normally operationally occurring pressure profile in the drive chamber (8) or in the intermediate space (12) is stored,
that the actual, measured by the pressure sensor (9) pressure in the drive space (8) or space (12) with the corresponding pressure of the stored pressure profile is compared and
that , when the measured pressure deviates from the stored pressure by more than a certain limit value, the evaluation circuit (10) generates a corresponding warning signal, control signal or switch-off signal. Verdrängervakuumpumpe nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet,
daß die Auswerteschaltung (10) mit der Antriebseinheit (3) meßtechnisch und steuerungstechnisch verbunden ist.Displacement vacuum pump according to one of claims 1 to 8, characterized
that the evaluation circuit (10) with the drive unit (3), by measurement and control technology connected.
EP09009702.3A 2008-09-05 2009-07-28 Oscillating displacement vacuum pump Active EP2163763B2 (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000061437A1 (en) * 1999-04-13 2000-10-19 Tilia, Inc. Volumetric vacuum control
DE10338876A1 (en) * 2002-08-26 2004-03-18 Iakov Fridmann Non-destructive leakage testing method for freight container involves performing a initial test to see if container is gas-tight and if so performing optical test to locate leak
US20070177985A1 (en) * 2005-07-21 2007-08-02 Walls James C Integral sensor and control for dry run and flow fault protection of a pump

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2146016A1 (en) * 1971-09-15 1973-03-22 Erich Becker DEVICE FOR SECURING AND GGFS. IMPROVING A DIAPHRAGM PUMP
DE2502566C3 (en) * 1975-01-23 1980-03-13 Erich 7812 Bad Krozingen Becker Diaphragm pump
DE19738844A1 (en) * 1997-09-05 1999-04-22 Dosier Und Prozestechnik Salzw Electronic function monitoring method for dosing pump
DE19826610A1 (en) * 1998-06-16 1999-12-23 Bran & Luebbe Diaphragm pump and device for controlling the same
DE19904350C2 (en) * 1999-02-03 2002-07-25 Vacuubrand Gmbh & Co Kg Diaphragm or piston pump or combined diaphragm / piston pump
DE10129695A1 (en) * 2001-06-22 2003-01-30 Bosch Gmbh Robert Method and device for tank leak diagnosis using a reference measurement method
JP4322799B2 (en) * 2004-03-25 2009-09-02 株式会社日本自動車部品総合研究所 Evaporative fuel processing device for internal combustion engine
DE102005017240A1 (en) * 2005-04-14 2006-10-19 Alldos Eichler Gmbh Method and device for monitoring a pumped by a pump fluid flow

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000061437A1 (en) * 1999-04-13 2000-10-19 Tilia, Inc. Volumetric vacuum control
DE10338876A1 (en) * 2002-08-26 2004-03-18 Iakov Fridmann Non-destructive leakage testing method for freight container involves performing a initial test to see if container is gas-tight and if so performing optical test to locate leak
US20070177985A1 (en) * 2005-07-21 2007-08-02 Walls James C Integral sensor and control for dry run and flow fault protection of a pump

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DE502009000394D1 (en) 2011-04-07
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DE202008011817U1 (en) 2010-02-11
ATE499529T1 (en) 2011-03-15

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