EP2068444B1 - Acoustic wave filter - Google Patents

Acoustic wave filter Download PDF

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Publication number
EP2068444B1
EP2068444B1 EP07792891.9A EP07792891A EP2068444B1 EP 2068444 B1 EP2068444 B1 EP 2068444B1 EP 07792891 A EP07792891 A EP 07792891A EP 2068444 B1 EP2068444 B1 EP 2068444B1
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EP
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Prior art keywords
acoustic wave
idt
idts
overlap width
wave filter
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EP07792891.9A
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German (de)
English (en)
French (fr)
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EP2068444A4 (en
EP2068444A1 (en
Inventor
Yasuhisa Fujii
Masaru Yata
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6436—Coupled resonator filters having one acoustic track only
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517—Means for weighting
    • H03H9/1452—Means for weighting by finger overlap length, apodisation
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material

Definitions

  • the present invention relates to an acoustic wave filter device used as, for example, an RF band-pass filter of a cellular phone, and, more particularly, to a longitudinally coupled resonator acoustic wave filter device that utilizes a boundary acoustic wave or a surface acoustic wave.
  • Surface acoustic wave filter devices are widely used as an RF band-pass filter of a cellular phone, or the like.
  • Patent Document 1 describes a surface acoustic wave filter device used for application of this type.
  • an electrode structure schematically shown in FIG. 9 is formed on a piezoelectric substrate 502. That is, a pair of input IDTs 503 are arranged in parallel on the piezoelectric substrate 502. Output IDTs 504 are arranged respectively to the IDTs 503 in a surface acoustic wave propagating direction in which a surface acoustic wave propagates.
  • Reflectors 505 are respectively arranged on both sides of the portion, at which one pair of input IDT 503 and output IDT 504 are provided, in the surface acoustic wave propagating direction. Similarly, other reflectors 505 are arranged respectively on both sides of the region, in which the other pair of input IDT 503 and output IDT 504 are provided, in the surface acoustic wave propagating direction. Then, one ends of the pair of input IDTs 503 are connected in common to an input terminal 506 and the other ends are connected to a ground. One ends of the pair of output IDTs 504 are connected in common to an output terminal 507, and the other ends are connected to a ground.
  • the apodization weights are assigned in the input IDTs 503 and output IDTs 504.
  • the electrode finger overlap width does not vary along both sides in the surface acoustic wave propagating direction.
  • assigning apodization weights is a method of assigning weights so that the electrode finger overlap width of an IDT is varied to vary the overlap width in the surface acoustic wave propagating direction.
  • the apodization weights are assigned in the IDTs as described above, so that a higher transverse mode is reduced.
  • a surface acoustic wave filter device may include narrow pitch electrode finger portions that are located at portions at which IDTs are located adjacent to each other. The interval of electrode fingers of each narrow pitch electrode finger portion is shorter than that of the remaining portion.
  • the above transverse mode spurious response is not problematic. This is because the confinement effect as a waveguide is small.
  • boundary acoustic wave filter devices that utilize a boundary acoustic wave have also been developed.
  • the boundary acoustic wave filter devices have a problem that, in comparison with the surface acoustic wave filter devices, the confinement effect as a waveguide is large and, therefore, a spurious response due to a transverse mode tends to be large.
  • a spurious response due to a transverse mode tends to be large.
  • EP 1394940 discloses a SAW balun filter having a first, second and third IDT in which the first IDT only or the first and third IDT are weighted such as to improve the degree of balance of balanced signals and to reduce the insertion loss.
  • the invention is made to satisfy the above requests. It is an object of the invention to provide a longitudinally coupled resonator acoustic wave filter device that utilizes an inter-IDT resonance mode with a further low loss.
  • the identified problem is solved by the features of claim 1.
  • an acoustic wave filter device includes: a piezoelectric body; a first IDT arranged on the piezoelectric body; second and third IDTs arranged respectively on both sides of the first IDT in an acoustic wave propagating direction in which an acoustic wave propagates; and first and second reflectors arranged respectively on both side of the region, in which the first to third IDTs are provided, in the acoustic wave propagating direction, wherein narrow pitch electrode finger portions are provided in the first to third IDTs, at portions at which two IDTs are located adjacent to each other in the acoustic wave propagating direction, each narrow pitch electrode finger portion being a portion of the end of the respective IDT, of which the interval of electrode fingers is smaller than the interval of electrode fingers of the other portions of the respective IDT, wherein the acoustic wave filter device is a longitudinally coupled resonator acoustic wave filter device, and wherein apodization weights are assigned in a portion, other
  • the apodization weights are assigned so that, in the first IDT, the overlap width of the first IDT in the middle in the acoustic wave propagating direction is minimal and maximum overlap width portions are located at ends of the first IDT having the apodization weights, adjacent to the second IDT and adjacent to the third IDT, whereby a portion surrounded by a single pair of envelopes formed due to the apodization weights has a waisted-drum shape. In this case, it is possible to further reduce an insertion loss within the band.
  • the apodization weights are assigned in such a manner that a maximum overlap width portion is located at an end of the portion of the second IDT having the apodization weights, adjacent to the first IDT, a minimum overlap width portion is located at an end of the portion of the second IDT having the apodization weights, adjacent to the first reflector, and the overlap width sequentially reduces from the maximum overlap width to the minimum overlap width; and a maximum overlap width portion is located at an end of the portion of the third IDT having the apodization weights, adjacent to the first IDT, a minimum overlap width portion is located at an end of the portion of the third IDT having the apodization weights, adjacent to the second reflector, and the overlap width sequentially reduces from the maximum overlap width portion to the minimum overlap width portion.
  • a maximum overlap width portion is located at an end of the portion of the second IDT having the apodization weights, adjacent to the first IDT
  • a minimum overlap width portion is located at an end of the portion of the third IDT having
  • the apodization weights are assigned so that the overlap widths of electrode fingers of the respective first and second IDTs, located equidistantly from the middle between the first and second IDTs, are substantially equal, and wherein at a portion at which the first and third IDTs are located adjacent to each other, the overlap widths of electrode fingers of the respective first and third IDTs, located equidistantly from the middle between the first and third IDTs, are substantially equal.
  • fourth and fifth IDTs are arranged respectively on both sides of the region, in which the first to third IDTs are provided, in the acoustic wave propagating direction, and the first and second reflectors are arranged respectively on both sides of the region, in which the first to fifth IDTs are provided, in the acoustic wave propagating direction.
  • the first and second reflectors are arranged respectively on both sides of the region, in which the first to fifth IDTs are provided, in the acoustic wave propagating direction.
  • the apodization weights are assigned in the second IDT so that the overlap width of the middle of the second IDT in the acoustic wave propagating direction is minimal and maximum overlap width portions are located at ends of the portion of the second IDT having the apodization weights, adjacent to the fourth IDT and adjacent to the first IDT, whereby a portion surrounded by a single pair of envelopes formed due to the apodization weights has a waisted-drum shape. In this case, it is possible to further reduce an insertion loss within the pass band.
  • the apodization weights are assigned in the third IDT so that the overlap width of the middle of the third IDT in the acoustic wave propagating direction is minimal and maximum overlap width portions are located at ends of the portion of the third IDT having the apodization weights, adjacent to the first IDT and adjacent to the fifth IDT, whereby a portion surrounded by a single pair of envelopes formed due to the apodization weights has a waisted-drum shape. In this case as well, it is possible to further reduce an insertion loss within the pass band.
  • the second and fourth IDTs respectively include narrow pitch electrode finger portions at a portion at which the second IDT and the fourth IDT are located adjacent to each other
  • the third and fifth IDTs respectively include narrow pitch electrode finger portions at a portion at which the third and fifth IDTs are located adjacent to each other
  • apodization weights are assigned in the fourth and fifth IDTs, other than the narrow pitch electrode finger portions, so that the electrode finger overlap width sequentially varies in the acoustic wave propagating direction
  • the electrode fingers of ends of the portions of the fourth and fifth IDTs having the apodization weights, respectively adjacent to the second and third IDTs have a maximum overlap width.
  • the acoustic wave filter device may further include a dielectric body layer laminated on the piezoelectric body.
  • a boundary acoustic wave as an acoustic wave to provide a boundary acoustic wave filter device.
  • a surface acoustic wave may also be used as an acoustic wave, and in this case, it is possible to provide a surface acoustic wave filter device.
  • the acoustic wave filter device utilizes an inter-IDT resonance mode and includes IDTs having narrow pitch electrode finger portions.
  • the apodization weights are assigned in the first to third IDTs, other than the narrow pitch electrode finger portions, in such a manner that ends of the IDTs, adjacent to the narrow pitch electrode finger portions, have a maximum electrode finger overlap width.
  • an acoustic wave filter device that includes narrow pitch electrode finger portions, that utilizes an inter-IDT resonance mode and further that is hardly influenced by a transverse mode spurious response with a low loss.
  • FIG. 1 is a schematic plan view that shows the electrode structure of a boundary acoustic wave filter device according to an embodiment of the invention.
  • FIG. 2 is a schematic front cross-sectional view of the boundary acoustic wave filter device.
  • the boundary acoustic wave filter device 100 includes a piezoelectric body 104 and a dielectric body 105 laminated on the piezoelectric body 104.
  • An electrode film 106 is formed between the piezoelectric body 104 and the dielectric body 105.
  • the electrode film 106 forms the electrode structure shown in FIG. 1 . Therefore, the boundary acoustic wave filter device that utilizes a boundary acoustic wave propagating along a boundary between the piezoelectric body 104 and the dielectric body 105 is formed.
  • the piezoelectric body 104 is formed of a monocrystal substrate made of 15 degrees rotated Y-cut X-propagating LiNbO 3 .
  • the dielectric body 105 is made of SiO 2 .
  • the electrode film 106 is formed in such a manner that a Au thin film having a thickness of 90 nm is deposited and patterned.
  • the dielectric body 105 has a plurality of openings 105a and 105b.
  • Conductive patterns 107a and 107b are formed in the openings 105a and 105b. Portions that are electrically connected to the outside of the electrode film 106 are exposed to the openings 105a and 105b.
  • the conductive patterns 107a and 107b are electrically connected to the portions that are electrically connected to the outside of the electrode film 106.
  • the conductive patterns 107a and 107b are provided so as to extend onto the upper surface of the dielectric body 105 and are electrically connected to external terminals 108a and 108b.
  • the electrode film 106 forms the electrode structure shown in FIG. 1 . That is, a longitudinally coupled resonator boundary acoustic wave filter portion shown in the drawing is formed between an input terminal 101 and an output terminal 102.
  • a first IDT 111 is arranged in the middle, and second and third IDTs 112 and 113 are arranged respectively on both sides of the IDT 111 in a boundary acoustic wave propagating direction in which a boundary acoustic wave propagates.
  • reflectors 114 and 115 are arranged respectively on both sides of the region, in which the IDTs 111 to 113 are provided, in the boundary acoustic wave propagating direction.
  • Narrow pitch electrode finger portions are provided in the IDTs 111 to 113, at portions at which two IDTs are located adjacent to each other.
  • narrow pitch electrode finger portions 112A and 111A are provided at portions at which the IDT 112 and the IDT 111 are located adjacent to each other.
  • the narrow pitch electrode finger portion is a portion of an end of the IDT, of which the interval of electrode fingers is smaller than the interval of electrode fingers of the other portion.
  • a narrow pitch electrode finger portion 111B is provided in the IDT 111
  • a narrow pitch electrode finger portion 113A is provided in the IDT 113.
  • the narrow pitch electrode finger portions 111A, 111B, 112A and 113A are provided in the three-IDT type longitudinally coupled resonator boundary acoustic wave filter portion, whereby, an insertion loss is reduced in the longitudinally coupled resonator boundary acoustic wave filter portion that utilizes an inter-IDT resonance mode.
  • the apodization weights are assigned in the IDTs 111 to 113, other than the narrow pitch electrode finger portions, so that portions located at ends of thus apodized portions adjacent to the narrow pitch electrode finger portions have a maximum electrode finger overlap width.
  • apodization weights are assigned in the first IDT 111 so that the overlap width in the middle in the boundary acoustic wave propagating direction is minimal and portions having a maximum overlap width are located at ends of the weighted portion, adjacent to the second IDT 112 and to the third IDT 113.
  • the shape surrounded by envelope is drum-shaped.
  • a maximum-overlap width portion is located at an end of the weighted portion of the second IDT 112, adjacent to the first IDT 111, and the overlap width of the weighted portion at an end adjacent to the first reflector 114 is set to have a minimum overlap width. Then, the overlap width is sequentially reduced from the maximum overlap width to the minimum overlap width.
  • a maximum overlap width portion of the weighted portion is located at an end adjacent to the first IDT 111
  • a minimum overlap width portion of the weighted portion is located at an end adjacent to the second reflector 115. Then, the overlap width is sequentially reduced from the maximum overlap width portion to the minimum overlap width portion.
  • the apodization weights are assigned so that, at portions at which the first IDT 111 and the second IDT 112 are located adjacent to each other, the overlap widths of electrode fingers located equidistantly from the middle between the first and second IDTs 111 and 112 are substantially equal.
  • the apodization weights are assigned so that the overlap widths of electrode fingers of the first and third IDTs 111 and 113, located equidistantly from the middle between the first and third IDTs 111 and 113, are substantially equal.
  • the boundary acoustic wave filter device 100 of the present embodiment having the electrode structure shown in FIG. 1 was manufactured in the following specifications.
  • First IDT 111 The total number of electrode fingers including the narrow pitch electrode finger portions was 35, the overlap width of the minimum overlap width portion was 28 ⁇ m, and the overlap width of each maximum overlap width portion was 40 ⁇ m.
  • Second and third IDTs 112 and 113 The total number of electrode fingers including the narrow pitch electrode finger portion was 19, the overlap width of the minimum overlap width portion was 28 ⁇ m, and the overlap width of the maximum overlap width portion was 40 ⁇ m.
  • First and second reflectors 114 and 115 The number of electrode fingers was 25.
  • the interval of electrode fingers, other than the narrow pitch electrode finger portions was 0.804 ⁇ m, and the interval of electrode fingers of each of the narrow pitch electrode finger portions 111A, 111B, 112A and 113A was 0.739 ⁇ m.
  • the number of electrode fingers of each narrow pitch electrode finger portion was three.
  • the interval of electrode fingers of each of the reflectors 114 and 115 was 0.797 ⁇ m.
  • the overlap width of each of IDTs 611 to 613 was 40 ⁇ m.
  • apodization weights are not assigned to the narrow pitch electrode finger portions 111A, 111B, 112A and 113A. That is, in each narrow pitch electrode finger portion, the overlap width is set to the maximum overlap width.
  • FIG. 4 is a schematic plan view that shows the electrode structure of the existing boundary acoustic wave filter device prepared for comparison.
  • the electrode structure shown in the drawing is formed between an input terminal 601 and an output terminal 602. That is, except that the above described apodization weights are not assigned, the electrode structure, which is similar to that of the boundary acoustic wave filter device 100, is formed.
  • Second and third IDTs 612 and 613 are arranged respectively on both sides of a first IDT 611, and reflectors 614 and 615 are provided respectively on both sides of the portion, in which the IDTs 611 to 613 are provided, in the boundary acoustic wave propagating direction.
  • FIG. 3 shows the filter characteristic of the longitudinally coupled resonator boundary acoustic wave filter device of the present embodiment manufactured as described above.
  • FIG. 5 shows the filter characteristic of the boundary acoustic wave filter device of the comparative example.
  • FIG. 6 is a schematic plan view that shows the electrode structure of a longitudinally coupled resonator boundary acoustic wave filter device according to a second comparative example.
  • FIG. 7 is a view that shows the filter characteristic of the boundary acoustic wave filter device according to the second comparative example.
  • the boundary acoustic wave filter device 200 of the second comparative example is formed in a similar manner to the boundary acoustic wave filter device 100 except that apodization weights are assigned differently from the boundary acoustic wave filter device 100.
  • apodization weights are assigned in the IDTs 211 to 213 so that the overlap width of electrode fingers located in the middle is maximal and the overlap width reduces toward an end of each IDT.
  • Reflectors 214 and 215 are arranged on both sides of the portion in which the IDTs 211 to 213 are provided. The sizes of the maximum overlap width and minimum overlap width are equal to those of the boundary acoustic wave filter device 100. As shown in FIG. 7 , in the boundary acoustic wave filter device 200, as shown in FIG.
  • apodization weights are assigned so that ends adjacent to the narrow pitch electrode finger portions have a maximum overlap width.
  • the weights assigned in the adjacent IDTs are symmetrical with respect to the middle between the adjacent IDTs.
  • the apodization weights of the IDT 111 are assigned so that the overlap width weights of the half of the IDT 111 adjacent to the IDT 112 and the overlap width weights of the IDT 112 are formed symmetrically with respect to the middle between the IDTs 111 and 112.
  • the apodization weights of the half of the IDT 111 adjacent to the IDT 113 and the apodization weights of the IDT 113 are symmetrical with respect to the middle between the IDTs 111 and 113.
  • the three-IDT type longitudinally coupled resonator boundary acoustic wave filter device is described; instead, it may be a five-IDT type longitudinally coupled resonator boundary acoustic wave filter device in which fourth and fifth IDTs are arranged respectively on both sides of the portion, in which the first to third IDTs are provided, in the boundary acoustic wave propagating direction.
  • the first and second reflectors will be provided respectively on both sides of the portion, in which the first to fifth IDTs are provided, in the boundary acoustic wave propagating direction.
  • the second and fourth IDTs and the third and fifth IDTs respectively have narrow pitch electrode finger portions at portions at which the second and fourth IDTs are located adjacent to each other and at portions at which the third and fifth IDTs are located adjacent to each other, the apodization weights are assigned in the fourth and fifth IDTs so that the electrode finger overlap width sequentially varies in the boundary acoustic wave propagating direction, and the apodization weights are assigned in the fourth and fifth IDTs, so that the electrode fingers located adjacent to the second and third IDTs have a maximum overlap width.
  • the apodization weights are assigned so that the maximum overlap width portions of the second and third IDTs are located at ends adjacent to the fourth and fifth IDTs. That is, the apodization weights similar to the first IDT 111 shown in FIG. 1 are assigned in the second and third IDTs.
  • the invention is not limited to the single three-IDT type longitudinally coupled resonator boundary acoustic wave filter device 100 shown in FIG. 1 .
  • the invention may also be applied to a boundary acoustic wave filter device that has a balance-unbalance converter function and that includes a plurality of three-IDT type longitudinally coupled resonator boundary acoustic wave filter devices connected to each other.
  • the structures of IDTs are schematically shown by symbols that X is placed inside the rectangular portions.
  • first to third IDTs have narrow pitch electrode finger portions and apodization weights are assigned as in the case of the first to third IDTs 111 to 113.
  • the electrode structure shown in the drawing is connected between an unbalanced terminal 121 and first and second balanced terminals 122 and 123. That is, three three-IDT type longitudinally coupled resonator boundary acoustic wave filter portions 125 to 127 are connected to the unbalanced terminal 121 via a one-port boundary acoustic wave resonator 124.
  • the longitudinally coupled resonator boundary acoustic wave filter portions 125 to 127 are three-IDT type longitudinally coupled resonator boundary acoustic wave filters that are formed similarly to the longitudinally coupled resonator boundary acoustic wave filter device 100.
  • the longitudinally coupled resonator boundary acoustic wave filter portions 125 to 127 are connected to the first balanced terminal 122 via one-port boundary acoustic wave resonators 128 and 129 that are connected in parallel with each other.
  • three three-IDT longitudinally coupled resonator boundary acoustic wave filter portions 132 to 134 are connected to the unbalanced terminal 121 via a one-port boundary acoustic wave resonator 131. Then, the three three-IDT type longitudinally coupled resonator boundary acoustic wave filter portions 132 to 134 are connected to the second balanced terminal 123 via one-port boundary acoustic wave resonators 135 and 136 that are connected in parallel with each other.
  • phase of the first to third IDTs of each of the longitudinally coupled resonator boundary acoustic wave filter portions 132 to 134 and the phase of the first to third IDTs of each of the longitudinally coupled resonator boundary acoustic wave filter portions 125 to 127 are adjusted so that, when the unbalanced terminal 121 is used as an input terminal, the phase of an output signal extracted from the second balanced terminal 123 is different by 180 degrees from the phase of an output signal extracted from the first balanced terminal 122.
  • the balance-unbalance converter function is implemented, and, in accordance with the invention, the narrow pitch electrode finger portions are provided at portions at which IDTs are located adjacent to each other and the apodization weights are assigned in the first to third IDTs as in the similar manner to the boundary acoustic wave filter device 100.
  • the narrow pitch electrode finger portions are provided at portions at which IDTs are located adjacent to each other and the apodization weights are assigned in the first to third IDTs as in the similar manner to the boundary acoustic wave filter device 100.
  • the piezoelectric body is not limited to LiNbO 3 .
  • the piezoelectric body may employ various piezoelectric monocrystals or piezoelectric ceramics, such as LiTaO 3 or quartz.
  • the dielectric body may be made of silicon oxide other than SiO 2 or other dielectric bodies such as SiN.
  • the electrode material is not specifically limited.
  • An electrode film that includes IDTs may be formed of a metal film by laminating a plurality of metal layers.
  • application of the invention is not limited to the boundary acoustic wave filter device; the invention may also be applied to a surface acoustic wave filter device that is formed so that an electrode structure including IDTs are formed on the upper surface of the piezoelectric body.
  • the transverse mode ripple tends to appear largely in the boundary acoustic wave filter device as compared with the surface acoustic wave filter device, so that the invention is more effective in the boundary acoustic wave filter device.

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
EP07792891.9A 2006-09-28 2007-08-22 Acoustic wave filter Active EP2068444B1 (en)

Applications Claiming Priority (2)

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JP2006265610 2006-09-28
PCT/JP2007/066305 WO2008038481A1 (fr) 2006-09-28 2007-08-22 Filtre d'onde acoustique

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EP2068444A1 EP2068444A1 (en) 2009-06-10
EP2068444A4 EP2068444A4 (en) 2012-01-25
EP2068444B1 true EP2068444B1 (en) 2013-06-26

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US (1) US7728699B2 (ko)
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JP (1) JP4631972B2 (ko)
KR (1) KR101024189B1 (ko)
CN (1) CN101517894B (ko)
WO (1) WO2008038481A1 (ko)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2963818B1 (en) * 2006-11-08 2023-06-28 Skyworks Filter Solutions Japan Co., Ltd. Surface acoustic wave resonator
TWI393340B (zh) * 2009-02-13 2013-04-11 中原大學 球形旋轉式壓電馬達
CN102405596B (zh) * 2009-04-23 2014-07-30 松下电器产业株式会社 天线共用器
JP4900420B2 (ja) * 2009-05-27 2012-03-21 株式会社村田製作所 弾性波装置
WO2011052218A1 (ja) * 2009-11-02 2011-05-05 パナソニック株式会社 弾性波素子と、これを用いたデュプレクサおよび電子機器
JP2011135244A (ja) * 2009-12-24 2011-07-07 Panasonic Corp 弾性波デバイス及びこれを用いたフィルタ、デュプレクサ
DE102010034121A1 (de) * 2010-08-12 2012-02-16 Epcos Ag Mit akustischen Wellen arbeitendes Bauelement mit reduziertem Temperaturgang der Frequenzlage und Verfahren zur Herstellung
JP2013229641A (ja) * 2010-08-27 2013-11-07 Murata Mfg Co Ltd 弾性波フィルタ
JP2015073207A (ja) * 2013-10-03 2015-04-16 スカイワークス・パナソニック フィルターソリューションズ ジャパン株式会社 弾性波共振器
WO2015182522A1 (ja) * 2014-05-26 2015-12-03 株式会社村田製作所 弾性波装置
CN104677518B (zh) * 2015-02-05 2018-02-13 中国科学院微电子研究所 声表面波温度传感器
WO2018123657A1 (ja) * 2016-12-28 2018-07-05 株式会社村田製作所 縦結合共振子型弾性波フィルタ
JP7231007B2 (ja) * 2019-03-06 2023-03-01 株式会社村田製作所 フィルタ、マルチプレクサ、高周波フロントエンド回路及び通信装置
CN116633307B (zh) * 2023-05-23 2024-09-10 无锡市好达电子股份有限公司 弹性波装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330848A (en) * 1976-09-03 1978-03-23 Murata Manufacturing Co Surface acoustic wave device
JPS596612A (ja) * 1982-07-05 1984-01-13 Hitachi Ltd 弾性表面波装置
JPH05121997A (ja) * 1991-10-30 1993-05-18 Sanyo Electric Co Ltd 弾性表面波フイルタ
JP3075124B2 (ja) * 1995-03-08 2000-08-07 株式会社村田製作所 表面波共振子
US5635883A (en) * 1995-08-28 1997-06-03 Motorola, Inc. Acoustic wave filter with filter-shaping element and method
JPH09205342A (ja) * 1996-01-26 1997-08-05 Matsushita Electric Ind Co Ltd 弾性表面波フィルタ
JPH09214281A (ja) * 1996-01-31 1997-08-15 Mitsumi Electric Co Ltd 弾性表面波フィルタ
JPH10261936A (ja) 1997-03-19 1998-09-29 Mitsubishi Electric Corp 弾性表面波フィルタ
EP1249934B1 (en) * 2001-04-09 2013-07-31 Murata Manufacturing Co., Ltd. Surface acoustic wave apparatus and communications unit
JP4049034B2 (ja) * 2002-08-22 2008-02-20 株式会社村田製作所 弾性表面波フィルタ、通信装置
CN100452650C (zh) * 2003-07-02 2009-01-14 京瓷株式会社 弹性表面波装置及使用该装置的通信装置
JP4480490B2 (ja) * 2003-07-02 2010-06-16 京セラ株式会社 弾性表面波装置およびそれを用いた通信装置
EP1729415B1 (en) * 2004-08-23 2014-04-16 Murata Manufacturing Co., Ltd. Balanced surface acoustic wave filter

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US20090121810A1 (en) 2009-05-14
EP2068444A4 (en) 2012-01-25
WO2008038481A1 (fr) 2008-04-03
EP2068444A1 (en) 2009-06-10
CN101517894A (zh) 2009-08-26
CN101517894B (zh) 2011-12-28
JP4631972B2 (ja) 2011-02-16
KR101024189B1 (ko) 2011-03-22
US7728699B2 (en) 2010-06-01
KR20090026280A (ko) 2009-03-12
JPWO2008038481A1 (ja) 2010-01-28

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