EP1955404B1 - Procédé de fabrication de corps creux pour des résonateurs - Google Patents

Procédé de fabrication de corps creux pour des résonateurs Download PDF

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Publication number
EP1955404B1
EP1955404B1 EP06818910A EP06818910A EP1955404B1 EP 1955404 B1 EP1955404 B1 EP 1955404B1 EP 06818910 A EP06818910 A EP 06818910A EP 06818910 A EP06818910 A EP 06818910A EP 1955404 B1 EP1955404 B1 EP 1955404B1
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Prior art keywords
joining
discs
faces
cells
substrate
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EP06818910A
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German (de)
English (en)
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EP1955404A1 (fr
Inventor
Xenia Singer
Waldemar Singer
Johannes Schwellenbach
Michael Pekeler
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Deutsches Elektronen Synchrotron DESY
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Deutsches Elektronen Synchrotron DESY
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/14—Vacuum chambers
    • H05H7/18—Cavities; Resonators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H01P11/008—Manufacturing resonators

Definitions

  • the present invention relates to a process for producing hollow bodies, in particular for high-frequency resonators.
  • High frequency resonators comprising a plurality of hollow bodies are particularly used in particle accelerators which use electric fields to accelerate charged particles to high energies.
  • high-frequency resonators also called cavity resonators
  • an electromagnetic wave is excited, which accelerates charged particles along the resonator axis.
  • the thus accelerated particle experiences a maximum possible energy gain when it passes through the resonator with respect to the phase and the high-frequency field so that it is located in the middle of a cavity cell just when the electric field strength reaches its maximum there.
  • the cavity cell length and the frequency are adjusted so that the particles in each cell experience the same energy gain.
  • superconducting resonators for the provision of large field strengths have the advantage that far less energy has to be expended due to the very low high-frequency resistance.
  • the sheets used in the prior art methods are coated with or consist entirely of a suitable superconducting material.
  • a preferred material in this case is the superconducting niobium, since it can be processed very well on the one hand and on the other a high critical temperature T C ⁇ 9.2 K and a high critical magnetic field H C ⁇ 200 mT (temperature or magnetic field above that the superconductivity breaks down).
  • the material is further treated in a conventional manner in order to obtain a surface with the lowest possible roughness, since roughening of the surface generally occurs when forming a polycrystalline material.
  • the inner surface should be free of impurities and foreign particles. This is because surface defects are responsible, inter alia, for the superconductivity breaking down, since the currents circulating in the surface layer of the superconductor, which prevent an external magnetic field from penetrating into the interior (M formulatener-Ochsenfeld effect), are interrupted. Finally, a rough surface causes locally very high field strengths occur, which is also undesirable.
  • a common method of surface treatment is a chemical (pickling) process with an acid mixture called BCP (Buffered Chemical Polishing), wherein HF (48%), HNO 3 (65%) and H 3 PO 4 (85%) in a ratio of 1: 1: 2.
  • BCP Bitered Chemical Polishing
  • HF 48%
  • HNO 3 65%
  • H 3 PO 4 85%
  • EP electropolishing
  • By electropolishing a very smooth surface is achieved even with polycrystalline material, so that in the case of hollow bodies made of polycrystalline niobium by means of electropolishing a roughness of 250 nm can be achieved.
  • a substrate having a monocrystalline region is provided in a first step, which is in a preferred embodiment of superconducting material.
  • a preferred material in this case is superconducting niobium, since it is very readily moldable and also has a high critical temperature T C ⁇ 9.2 K and a high critical magnetic field H C ⁇ 200 mT.
  • superconductive is understood as meaning a material which, under suitable ambient conditions and below a critical temperature, has superconducting properties, that is, it suddenly loses its electrical resistance and displaces subcritical magnetic fields from its interior.
  • the monocrystalline region is preferably cylindrically shaped to be easily accessible.
  • At least one cut surface is defined by the substrate, and in a subsequent third step markings are applied to both sides of the cut surface.
  • these markers are stamped or embossed because superconducting materials are metals that have a hard surface.
  • the markings are designed such that adjacent areas in the substrate can be identified again after a separation and their original orientation can be restored to one another.
  • the markings are preferably mounted on the outer surface or on the peripheral surface of the discs.
  • two slices are made by cutting along the cut surface, and the slices are further cut out of the substrate so as to have only single crystalline material.
  • the discs are about 5 mm thick and have a diameter or extension in the plane of the cut surface of 200 mm.
  • the disks are transformed into half-cells, wherein the half-cells have a joining surface.
  • These joining surfaces serve to be able to join two half cells together.
  • the half-cells furthermore have a termination surface running parallel to the joining surface, which makes it possible for the half-cell also to be connected to a further half-cell on the side opposite the joining surface.
  • the forming is preferably carried out by pressing, deep drawing and optionally rolling, which are known metal processing techniques.
  • the area of the disc may have previously been enlarged in this regard, which is also possible with the aid of the already mentioned techniques.
  • a preferred embodiment involves creating a hollow truncated cone having two parallel open end surfaces. Furthermore, the half-cells are preferably shaped rotationally symmetrical, so that half-cells can be connected as easily as possible.
  • the forming can also take place in such a way that the production of a hollow cone by deep drawing or pressing against a mold is included, wherein in a further preferred embodiment, the largest diameter of the hollow cone is greater than or equal to the outer diameter of the half-cell. This makes it possible to bring the cone later with the least possible number of processing steps to the desired shape and size of the half-cell, without the single-crystal structure is lost.
  • a disk before, for example, a hollow cone or a truncated cone to be formed, to be converted into a disk by means of rolling or pressing, which faces the original disk has enlarged diameter. This makes it possible to form monocrystalline half-cells of the desired size even from slices derived from a small-diameter ingot.
  • the half-cells are joined together to form hollow bodies, wherein the joining surfaces lie against one another and the markings on both sides of the joining surface are oriented relative to each other, as on both sides of the cut surfaces.
  • the surfaces to be joined can be cleaned shortly before joining, which is preferably done with a chemical pickling treatment (with BCP).
  • the joining is preferably carried out by electron beam welding in a high vacuum ( ⁇ 10 -4 mbar) and optionally at a defined residual gas composition.
  • This technique has a high power density so that components can be welded with a smooth seam that is 5 to 7 mm wide, as it results in a localized energy input.
  • the joining and / or closing surfaces are chemically treated. This is preferably carried out by a pickling treatment, in particular with BCP (1: 1: 2). This avoids that foreign material is introduced into the material in the region of the weld.
  • the hollow body is subsequently heat treated. As a result, remaining defects and the joints are annealed, the hydrogen contained in the material is expelled and the RRR value, which describes the purity of the niobium preferably used, is thus increased.
  • a preferred embodiment of the heat treatment in the case of a niobium-containing hollow body comprises a first heating step of 400 ° C to 500 ° C for 2 to 6 hours and a second heating step of 750 ° C to 850 ° C, preferably 750 ° C to 800 ° C ,
  • the aim of the first heating step is to reduce the stresses created by the transformations and to eliminate newly formed nuclei.
  • the second heating step serves to remove existing hydrogen from the material and to relax the entire hollow body.
  • the single crystal is retained since nucleation nuclei have been previously eliminated, so that grain growth by the heat treatment can not occur.
  • the heat treatment is dependent on the degree of deformation ⁇ of the material, which in the preferred embodiment with niobium is about 40%.
  • the degree of deformation ⁇ of a material is understood in this context to mean the percentage of the deformation.
  • a monocrystalline resonator comprising monocrystalline hollow bodies or half-cells.
  • Such single-crystal resonators have excellent electrical properties.
  • the monocrystalline surface layer of the superconductor (niobium) there are circulating currents preventing an external magnetic field from penetrating inside, whereby superconductivity is not disturbed.
  • significantly lower roughnesses, in particular of the inner surface, which in the case of a final BCP treatment are at 25 nm, can be achieved. This means an improvement by a factor of 10 compared to comparable polycrystalline material after a more expensive after-treatment.
  • the hollow bodies are always connected to hollow bodies produced from adjacent slices of the raw material, wherein the markings adjacent to the end surfaces are associated with one another as on both sides of the cut surface. This ensures that the monocrystalline structure is maintained even between adjacent hollow bodies.
  • the surface of the resonator is treated. This is preferred by a chemical Procedure made with BCP (1: 1: 2). In principle, the chemical process can be carried out before or after the joining. It is very important to prepare an inner surface of the resonator hollow body so that it is free of impurities and foreign particles to produce high electric fields without losses. This occurs subsequent to or even without a prior heat treatment with a standard chemical or electrical process.
  • a substrate 1 with a monocrystalline region which is provided for the production of hollow bodies for resonators, is shown.
  • the monocrystalline region is preferably cylindrical in shape, and the material of the substrate is preferably niobium because it can be processed well and has a high critical temperature T C ⁇ 9.2 K and a high critical magnetic field H C ⁇ 200 mT.
  • three adjacent cut surfaces 2, 2 ', 2'' which run through the substrate 1, set.
  • On both sides of the cut surface 2 'markings 3 and 3' are mounted on the surface of the substrate 1, which is preferably realized by stamping or embossing.
  • the markings 3, 3 ' are designed so that they are still visible after forming.
  • One of the cut surfaces 2, 2 ', 2 can also form one end of the substrate 1, so that only two of the cut surfaces have to be fixed.
  • slices 4 and 4 'are produced by cutting along the defined cut surfaces 2, 2' and 2 "(see FIG Fig. 2 ), wherein the discs 4, 4 'are completely removed from the monocrystalline region.
  • the latter means that the discs 4, 4 'comprise only monocrystalline material and possibly existing polycrystalline or amorphous regions are separated.
  • the markers 3, 3 'are stamped or embossed because the material is preferably a metal having a hard surface.
  • the Markers 3, 3 'are designed such that adjacent areas in the substrate 1 can be identified again after a separation and their original orientation can be restored to one another.
  • Both disks 4 and 4 'in this preferred embodiment are about 5 mm thick and, since they preferably come from a cylindrical single crystal, have a diameter of 200 mm. In the case of a non-cylindrical single-crystal region, the disks 4 and 4 'have an extension in the plane of the cutting surfaces 2, 2', 2 "of 200 mm.
  • Fig. 3 a first possibility for the following step of forming the disc 4 to a half-cell 5 is shown.
  • the forming of the disc 4 is preferably carried out by pressing, deep drawing and optionally rolling, wherein the in Fig. 3 Half-cell 5 shown in cross section and one in Fig. 5 half-cell 5 'shown in cross-section are formed accordingly.
  • a forming intermediate step in which the surface of the disc is first increased and / or the creation of a hollow truncated cone with two parallel open end faces, is possible.
  • the half-cell 5 also has a joining surface 6 and a closing surface 7. In this case, the joining surface 6 and the end surface 7 preferably run parallel to one another.
  • the marker 3 is mounted on the disc 4 so that it is still visible after forming a disc 4 to a half-cell 5.
  • a second possibility for the forming of the discs 4, 4 ' is shown.
  • the forming includes the creation of a hollow cone by deep drawing or pressing, wherein the pressing takes place against a negative mold.
  • the discs 4, 4 ' which initially have a diameter a, before forming, for example, a cone or a truncated cone are first converted by means of rolling or pressing to discs 4, which have a diameter b which is greater than a.
  • the largest diameter c of the hollow cone after forming is greater than or equal to the outer diameter of the half-cell 5. This makes it possible to bring the hollow cone with the smallest possible number of processing steps to the desired shape and size of the later half-cell 5, without the monocrystalline properties the material is lost.
  • Fig. 5 a cross-sectional view of a hollow body 8 is shown, which has been assembled from two half-cells 5 and 5 'with markings 3 and 3' along the two joining surfaces 6 and 6 ', which is preferably by electron beam welding in a high vacuum ( ⁇ 10 -4 mbar) and further preferred happens at a defined residual gas composition.
  • the half cells 5 and 5 ' can be welded with a smooth seam that is 5 to 7 mm wide, resulting in only a localized energy input.
  • this technique ensures that the weld is absolutely tight.
  • the joining surfaces 6 and 6 'of two half-cells 5 and 5' have been joined together so that the half-cells 5 and 5 'are arranged adjacent to each other from originally in the substrate 1 adjacent discs 4 and 4', with the joining surfaces 6 and 6 'adjacent Markers 3 and 3 'are arranged to each other, as was the case on both sides of the cut surface 2 between the discs 4 and 4'.
  • the consisting of the composite half-cells 5 and 5 'hollow body 8 has two mutually substantially parallel end surfaces 7 and 7'.
  • the hollow body 8 produced from the half-cells 5, 5 ' exists over the entire volume, also in the region of the earlier joining surfaces 6, 6', of monocrystalline material Material so that it has good electrical properties and flow in the surface layer of the superconductor (niobium) circulating currents, which prevent an external magnetic field from penetrating into the interior, whereby the superconductivity is disturbed.
  • the superconductor niobium
  • the joining surfaces 6 and 6 'and / or end surfaces 7 and 7' are cleaned prior to joining. These surfaces are first rinsed and treated in an ultrasonic bath, then preferably by a chemical process with BCP (1: 1: 2) pickled to remove contaminants in this area, rinsed again with ultrapure water and finally dried in a clean room.
  • a special heat treatment of the hollow body 8 can take place, which can be heated at 400 ° C. to 500 ° C. for a period of two to six hours and then heated up to 750 ° over a period of one to three hours C to 850 ° C, preferably 750 ° to 800 ° C comprises.
  • the aim of the first heating step is to reduce the stresses created by the transformations and to eliminate newly formed nuclei.
  • the second heating step serves to remove existing hydrogen from the material and to relax the entire hollow body.
  • the monocrystalline hollow bodies 8 thus produced have excellent electrical properties, in which circulating currents are present in the monocrystalline surface layer of the superconductor (niobium), which prevent an external magnetic field from penetrating into the interior, whereby a superconductivity is not disturbed.
  • the monocrystalline material significantly lower roughness in particular the inner Surface at 25 nm in the case of a final BCP treatment.
  • Fig. 6 shows a plurality of hollow bodies 8, 8 ', 8'', which have been prepared according to the method described above and analogous to the joining of two half-cells 5 and 5' to a hollow body 8 at their end faces 7 ', 7'',7'' , 7 '''' have been joined together, preferably also by electron beam welding.
  • the resonator 9 produced by assembling a plurality of hollow bodies 8, 8 ', 8 can be polished, preferably by a chemical process with BCP (1: 1: 2).
  • dumbbell-shaped hollow bodies are first formed, which are then joined together to form the resonator 9.
  • a single-crystal resonator 9 having improved electrical properties can be produced. These have the effect of significantly improving the quality of superconductivity under suitable environmental conditions, such as a suitable temperature. Furthermore, the advantage lies in the use of a monocrystalline resonator 9 The fact that a much better surface quality (smoothness) can be achieved even by the simple chemical pickling process, even compared to electropolishing.

Claims (22)

  1. Procédé de fabrication de corps creux pour résonateurs, comprenant les étapes suivantes :
    - préparer un substrat (1) avec une zone monocristalline,
    - définir une surface de coupe (2) à travers le substrat (1),
    - placer des repères (3, 3') des deux côtés de la surface de coupe (2),
    - réaliser deux disques (4, 4') par découpe le long de la surface de coupe (2), les disques (4, 4') étant prélevés entièrement de la zone monocristalline,
    - déformer les disques (4, 4') en demi-cellules (5, 5'), les demi-cellules (5, 5') présentant une surface d'assemblage (6, 6'),
    - assembler les demi-cellules (5, 5') en un corps creux (8), les surfaces d'assemblage (6, 6') s'appliquant l'une contre l'autre et les repères (3, 3') sur les demi-cellules (5, 5'), des deux côtés de la surface d'assemblage (6, 6'), étant orientés l'un vers l'autre de la même manière que sur les deux côtés des surfaces de coupe (2, 2').
  2. Procédé selon la revendication 1, dans lequel les demi-cellules (5, 5') présentent une surface de terminaison qui s'étend parallèlement aux surfaces d'assemblage (6, 6').
  3. Procédé selon l'une quelconque des revendications 1 ou 2, dans lequel le substrat (1) comporte un matériau supraconducteur.
  4. Procédé selon l'une quelconque des revendications 1 3, dans lequel le substrat (1) comporte du Niobium.
  5. Procédé selon l'une quelconque des revendications 1 à 4, dans lequel la zone monocristalline est cylindrique.
  6. Procédé selon l'une quelconque des revendications 1 à 5, dans lequel les repères (3, 3') sont estampés ou gaufrés.
  7. Procédé selon l'une quelconque des revendications 1 à 6, dans lequel les disques (4, 4') présentent une épaisseur d'environ 5 mm et s'étendent sur 200 mm dans le plan de la surface de coupe (2, 2').
  8. Procédé selon l'une quelconque des revendications 1 à 7, dans lequel la surface des disques (4, 4') est agrandie après la coupe.
  9. Procédé selon l'une quelconque des revendications 1 à 8, dans lequel la déformation s'effectue par repoussage, emboutissage profond et le cas échéant par laminage.
  10. Procédé selon la revendication 9, dans lequel la déformation comprend la réalisation d'un tronc de cône creux avec deux surfaces de terminaison ouvertes parallèles.
  11. Procédé selon l'une quelconque des revendications 1 à 9, dans lequel la déformation comprend la réalisation d'un cône creux.
  12. Procédé selon la revendication 11, dans lequel le plus grand diamètre du cône creux est supérieur ou égal au diamètre extérieur des demi-cellules (5, 5').
  13. Procédé selon l'une quelconque des revendications 1 à 12, dans lequel les demi-cellules (5, 5') présentent une symétrie de révolution.
  14. Procédé selon l'une quelconque des revendications 1 à 13, dans lequel l'assemblage s'effectue par soudage à faisceau d'électrons.
  15. Procédé selon l'une quelconque des revendications 1 à 14, dans lequel les surfaces d'assemblage (6, 6') et/ou les surfaces de terminaison (7, 7') sont nettoyées avant l'assemblage.
  16. Procédé selon la revendication 15, dans lequel les surfaces d'assemblage (6, 6') et/ou les surfaces de terminaison (7, 7') sont décapées chimiquement.
  17. Procédé selon l'une quelconque des revendications 1 à 16, dans lequel il est procédé à un traitement thermique du corps creux (8).
  18. Procédé selon la revendication 17, dans lequel le traitement thermique consiste à chauffer pendant un intervalle de temps de deux à six heures à une température comprise entre 400°C et 500°C, puis à chauffer pendant un intervalle de temps de une à trois heures à une température comprise entre 750°C et 850°C.
  19. Procédé selon la revendication 17, dans lequel le traitement thermique consiste à chauffer pendant un intervalle de temps de deux à six heures à une température comprise entre 400°C et 500°C, puis à chauffer pendant un intervalle de temps de une à trois heures à une température comprise entre 700°C et 800°C.
  20. Procédé de fabrication d'un résonateur (9), comprenant les étapes suivantes:
    - fabriquer un grand nombre de corps creux (8, 8', 8"...) selon l'une quelconque des revendications 2 à 19,
    - assembler les corps creux (8, 8', 8") le long des surfaces de terminaison (7, 7', 7", 7"', 7""), des demi-cellules (5', 5", 5"', 5"") de disques initialement voisins dans le substrat (1) sont reliées, et les repères, voisins aux surfaces de terminaison (7, 7', 7", 7"', 7"", 7""') sont associés les uns aux autres comme sur les deux côtés de la surface de coupe (2, 2') entre les disques (4, 4').
  21. Procédé selon la revendication 20, dans lequel le résonateur (9) est nettoyé.
  22. Procédé selon la revendication 21, dans lequel le résonateur (9) est décapé chimiquement.
EP06818910A 2005-12-02 2006-11-29 Procédé de fabrication de corps creux pour des résonateurs Active EP1955404B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005058398 2005-12-02
DE102006021111A DE102006021111B3 (de) 2005-12-02 2006-05-05 Verfahren zur Herstellung von Hohlkörpern von Resonatoren
PCT/EP2006/011464 WO2007062829A1 (fr) 2005-12-02 2006-11-29 Procédé de fabrication de corps creux pour des résonateurs

Publications (2)

Publication Number Publication Date
EP1955404A1 EP1955404A1 (fr) 2008-08-13
EP1955404B1 true EP1955404B1 (fr) 2009-03-18

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US (1) US8088714B2 (fr)
EP (1) EP1955404B1 (fr)
JP (1) JP5320068B2 (fr)
AT (1) ATE426255T1 (fr)
DE (2) DE102006021111B3 (fr)
WO (1) WO2007062829A1 (fr)

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US9352416B2 (en) * 2009-11-03 2016-05-31 The Secretary, Department Of Atomic Energy, Govt. Of India Niobium based superconducting radio frequency(SCRF) cavities comprising niobium components joined by laser welding, method and apparatus for manufacturing such cavities
JP5804840B2 (ja) * 2011-08-11 2015-11-04 三菱重工業株式会社 加工装置及び加工方法
US11071194B2 (en) 2016-07-21 2021-07-20 Fermi Research Alliance, Llc Longitudinally joined superconducting resonating cavities
EP3346017B1 (fr) * 2017-01-10 2021-09-15 Heraeus Deutschland GmbH & Co. KG Procédé de coupe de métaux réfractaires
US10847860B2 (en) 2018-05-18 2020-11-24 Ii-Vi Delaware, Inc. Superconducting resonating cavity and method of production thereof
US10856402B2 (en) 2018-05-18 2020-12-01 Ii-Vi Delaware, Inc. Superconducting resonating cavity with laser welded seam and method of formation thereof
US11464102B2 (en) * 2018-10-06 2022-10-04 Fermi Research Alliance, Llc Methods and systems for treatment of superconducting materials to improve low field performance
CN109462932B (zh) * 2018-12-28 2021-04-06 上海联影医疗科技股份有限公司 一种驻波加速管
CN113355671B (zh) * 2021-06-10 2022-12-13 兰州荣翔轨道交通科技有限公司 基于数控车床的纯铌超导腔表面铜铌改性层制备方法

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DE3608160A1 (de) * 1986-03-12 1987-09-24 Kernforschungsz Karlsruhe Verfahren zur herstellung supraleitender hohlraumresonatoren
DE3722745A1 (de) * 1987-07-09 1989-01-19 Interatom Herstellungsverfahren fuer hohlkoerper aus beschichteten blechen und apparat, insbesondere supraleitender hochfrequenz-resonator
JPH03135000A (ja) 1989-10-20 1991-06-07 Furukawa Electric Co Ltd:The 超伝導加速管
JPH03147299A (ja) 1989-11-01 1991-06-24 Furukawa Electric Co Ltd:The 超伝導加速空洞の製造方法
US5239157A (en) 1990-10-31 1993-08-24 The Furukawa Electric Co., Ltd. Superconducting accelerating tube and a method for manufacturing the same
WO1992013434A1 (fr) * 1991-01-24 1992-08-06 The Furukawa Electric Co., Ltd. Conduit d'acceleration supraconducteur
JP3089085B2 (ja) 1992-03-23 2000-09-18 三菱重工業株式会社 電子ビーム用超伝導加速空洞の製造方法
DE69310722T2 (de) * 1993-06-14 1997-09-11 Ist Nazionale Fisica Nucleare Herstellungsverfahren von nahtloser Radiofrequenz-Resonanzholräumen und dadurch erhaltenes Produkt
US7746192B2 (en) * 2005-06-20 2010-06-29 The Texas A&M University System Polyhedral contoured microwave cavities

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DE102006021111B3 (de) 2007-08-02
ATE426255T1 (de) 2009-04-15
WO2007062829A1 (fr) 2007-06-07
EP1955404A1 (fr) 2008-08-13
JP2009517817A (ja) 2009-04-30
US20090215631A1 (en) 2009-08-27
US8088714B2 (en) 2012-01-03
JP5320068B2 (ja) 2013-10-23
DE502006003219D1 (de) 2009-04-30

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