EP1927263B1 - Transducteur acoustique capacitif ayant un disque d'amortissement perfore - Google Patents
Transducteur acoustique capacitif ayant un disque d'amortissement perfore Download PDFInfo
- Publication number
- EP1927263B1 EP1927263B1 EP06805695A EP06805695A EP1927263B1 EP 1927263 B1 EP1927263 B1 EP 1927263B1 EP 06805695 A EP06805695 A EP 06805695A EP 06805695 A EP06805695 A EP 06805695A EP 1927263 B1 EP1927263 B1 EP 1927263B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- membrane
- perforations
- perforated
- sound transducer
- counterelectrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 241000264877 Hippospongia communis Species 0.000 claims description 3
- 230000010355 oscillation Effects 0.000 abstract description 10
- 239000003990 capacitor Substances 0.000 abstract description 2
- 210000004379 membrane Anatomy 0.000 description 88
- 239000012528 membrane Substances 0.000 description 85
- 238000013016 damping Methods 0.000 description 83
- 230000000694 effects Effects 0.000 description 13
- 230000005540 biological transmission Effects 0.000 description 9
- 230000008859 change Effects 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 210000003608 fece Anatomy 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 210000001519 tissue Anatomy 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
- H04R1/32—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only
- H04R1/34—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by using a single transducer with sound reflecting, diffracting, directing or guiding means
- H04R1/38—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by using a single transducer with sound reflecting, diffracting, directing or guiding means in which sound waves act upon both sides of a diaphragm and incorporating acoustic phase-shifting means, e.g. pressure-gradient microphone
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/01—Electrostatic transducers characterised by the use of electrets
- H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones
Definitions
- the invention relates to a capacitive transducer with a membrane and a short distance from the membrane arranged counter electrode which has a first perforation.
- the invention further relates to a condenser microphone with a capacitive transducer according to the invention.
- a capacitive transducer of a condenser microphone contains a planar membrane moved by the sound and parallel to it at a small distance a perforated counter electrode. Membrane and counter electrode are designed to be electrically conductive and form an electrical capacitor, whose capacity is dependent on the caused by the sound diaphragm displacement.
- a condenser microphone is for example from the DE 19715365 known.
- the air-filled narrow space between the membrane and the counter electrode acts as a frictional resistance due to the viscosity of the air, which inhibits the membrane movement. This effect is used to control membrane movement.
- the air gap resistance is not constant, but depends on the instantaneous distance between the membrane and the counter electrode. As the membrane moves towards the counter electrode, the air gap becomes narrower and therefore the frictional resistance becomes greater, otherwise smaller. Therefore, an overpressure in front of the membrane, which moves the membrane towards the counterelectrode, produces a smaller membrane deflection than an equal negative pressure, which moves the membrane away from the counterelectrode.
- the membrane movement and the resulting capacitance change is therefore not a linear image of the sound signal, but it is non-linearly distorted.
- a more advantageous way to reduce the nonlinearity of the diaphragm deflection offers the so-called balanced push-pull converter, as it is for example in the DE 43 07 825 A1 is described. It contains a second counterelectrode with identical properties as the first counterelectrode, which is arranged in front of the membrane in such a way that air gaps form uniformly on both sides of the membrane.
- the membrane movement in this case causes opposing changes in resistance in both air gaps, which compensate each other. As a result, the membrane movement is linearized and the transducer distortions are minimized.
- a further disadvantage of the capacitive sound transducers used in known condenser microphones is that the membrane in the areas opposite the perforated areas of the counter electrode carries out partial natural oscillations at high frequencies, which lead to undesirable frequency-dependent changes in the transmission characteristics of the condenser microphone.
- the frequencies at which partial natural oscillations occur depend on the mechanical stress of the membrane and on the size and shape of the perforation of the counterelectrode. They are often still within the transmission range, ie the specified operating frequency range, and lead to undesirable frequency-dependent changes in the transmission characteristics of the condenser microphone.
- US 4,817,168 discloses a directional microphone in the form of a condenser microphone, in which a membrane is arranged at a small distance from a counter electrode with a perforation. Further, there is an intermediate wall 25 provided with openings, separated by an air chamber of the counter electrode.
- a condenser microphone which has a dual arrangement of a conventional membrane counterelectrode system separated by a solid body having a connection channel.
- a condenser microphone is known in which behind the membrane two spaced perforated plates with mutually offset perforation and a damping layer are arranged.
- the object of the invention is to provide a capacitive sound transducer which effectively suppresses the nonlinear distortions and the disturbing partial natural oscillations of the membrane in a simple manner.
- a capacitive transducer of the aforementioned type according to the invention by a sound-transmitting damping disk having a second perforation, wherein the first perforation and the second perforation are arranged offset from each other, the membrane between the counter electrode and the damping disk is arranged and the distance between the damper disc and the diaphragm is substantially equal to the distance between the counter electrode and the diaphragm.
- the invention is based on the finding that at a small distance between the damping disk and the membrane, the undesired partial membrane vibrations even in the areas opposite to the perforated areas, so the holes, the counter electrode, by the viscosity of the between the membrane and the additional Damping disc trapped air effectively suppressed.
- the second perforation is staggered such that perforated areas of the first and second perforations do not or only partially overlap.
- the perforations of the counter electrode and damping disk can be designed as desired. This concerns both the arrangement of the perforated areas, so the holes, as well as their size, number and shape.
- each membrane has modes.
- the frequencies of the modes in which the membrane as a whole oscillates are so low that the associated wavelengths are so large compared to the perforation structure of the counter electrode, that here the interruptions of the air gap in the perforated areas cause only a gradual reduction of the total attenuation.
- the ratios are fundamentally different at the high frequencies of the partial modes.
- the regions of the membrane opposite the perforated regions of the counterelectrode are comparable to partial membranes, those at the perforation edge are clamped.
- the partial membranes can vibrate freely and relatively undamped in the hole area. All that remains is the internal damping of the membrane material and the influence of the surrounding air gap area, which, however, can scarcely influence the hole area via the only slight bending stiffness of the membrane.
- the partial membrane in the middle vibrates the strongest. Therefore, the dampening influence must be greatest here. According to the invention this is achieved by at least the middle region of the partial membrane is damped by at least one air gap. In the edge region of the partial membrane, the perforations of the counter electrode and the damping disk can partially overlap, without thereby significantly impairing the damping effect. As a guideline for sufficient damping, it can be considered that at least half of the partial membrane area is covered by at least one air gap.
- the remaining acoustic properties of the capacitive transducer are only minimally affected, but effectively suppresses the natural vibrations of the membrane and distortion of the membrane movement, which leads to a significantly improved transmission quality of the transducer, especially at high frequencies.
- damping is achieved, which acts locally and directly in the areas of the membrane, which tend to partial natural oscillations. The local and immediate effect is achieved by the viscosity of the air between the membrane and the damping disk is used directly, ie without additional mechanical or acoustic coupling elements, for damping.
- damping disc provides for any diaphragm deflection for an opposite change in the acoustic impedance in the two air gaps, so that the total acoustic impedance of the capacitive transducer according to the invention less than conventional capacitive sound transducers depends on the diaphragm deflection.
- the natural vibrations of the membrane and the non-linear distortions are weakened in a simple manner, without affecting the other properties of the capacitive transducer.
- the inventive capacitive transducer allows a smooth course of the frequency response at high frequencies.
- the frequency response is one of the most important documentable transducer properties.
- An improvement is immediately apparent to the user of a capacitive transducer according to the invention and is reflected immediately positive in the transmission quality.
- the damping disk according to the invention requires only a small structural change of a capacitive transducer, whereby the attenuation of disturbing influences in a simple and cost-effective manner is possible.
- the first perforation and the second perforation are offset from one another in such a way that perforated regions, that is to say the holes, of the counterelectrode are in each case opposite imperforate regions of the damping disk.
- each region of the membrane faces at least one damping air gap, which dampens the disturbing natural oscillations.
- first perforation and the second perforation are offset relative to one another such that perforated regions of the counterelectrode are each opposite a part of a perforated region of the damping disk.
- the perforated portions of the counter electrode and the damping disk partially overlap. There are thus regions of the membrane which are not faced by an unperforated region. This is particularly advantageous, since then the perforated regions of the first and second perforations can be arranged closer together and in larger numbers. This is advantageous because it increases the sound transmissivity of the counter electrode and the damper disc and thus improves the converter efficiency at the high frequencies.
- the first perforation and the second perforation are staggered relative to one another such that perforated regions of the counterelectrode are respectively opposite a part of a first perforated region of the damping disk and at least a part of a second perforated region of the damping disk.
- a perforated region of the counter electrode is overlapped by at least two perforated regions of the damping disk. This enables damping according to the invention even in the case in which a large number of perforated regions of the first perforation is provided, to which a likewise large number of perforated regions of the second perforation is offset.
- the part of a perforated region of the damping disk which is arranged opposite at least one perforated region of the counter electrode, is an edge region of the perforated region of the damping disk.
- the holes of the counter electrode and the damping disk partially overlap slightly in the edge regions. This way is a mean Area of a partial membrane always at least one non-perforated area opposite.
- the second perforation has substantially similar perforated areas as the first perforation.
- the acoustic properties of the damping disk are matched to those of the counter electrode.
- the size, shape, number and arrangement of the perforated regions, ie the holes are identical, such that a corresponding offset angle between the counterelectrode and the damping disk, ie by a rotation of the damping disk about its axis of rotation perpendicular to the damping disk relative to the counterelectrode, an effective attenuation of the membrane on the one hand and on the other hand achieve a favorable symmetry for a low-distortion diaphragm movement.
- the perforations can be arranged particularly advantageously rotationally symmetrical, circular, in rows or honeycombs.
- a rotational symmetry of circular hole arrangements facilitates the symmetrical design of the two perforated disks and thus makes it possible in a simple manner to achieve acoustically symmetrical perforations Find solutions with the same number of holes in acoustically equivalent areas of the counter electrode and the damping disk.
- This arrangement is particularly advantageous for the realization of a balanced push-pull converter.
- the arrangement of the perforations in rows or honeycomb shape particularly advantageously allows a more uniform and narrower structure of the perforated areas. This allows a higher acoustic permeability, which has a favorable effect, especially at high frequencies.
- the damping disk is designed as a second counterelectrode. If an additional counterelectrode is used as the damping disk, it assumes the damping function of the damping disk in the arrangement of its perforation according to the invention. In this way, the advantages of a push-pull converter can be combined with those of the damping disk according to the invention.
- the damping disk is not electrically coupled to the sound transducer and there is no electrical evaluation. In this way, a very simple construction of a sound transducer is made possible, which is supplemented only by the damping disk according to the invention, without having to make changes to the electrical construction of the transducer.
- the distance between the counter electrode and the membrane is equal to the distance between the damping disk and the membrane.
- the invention relates to a condenser microphone with a sound transducer, as defined in claims 1 to 11.
- Fig. 1 shows a cross section through a known condenser microphone (Elektretmikrophon) with a capacitive transducer, which is often produced in identical or similar manner.
- the following elements are provided within the microphone housing 13 provided with a sound inlet opening 11: a membrane ring 12, a membrane 3 bonded to the membrane ring 12, a spacer 4, an electret film 15, a counterelectrode 1 connected thereto, a contact ring 17, an insulating part 18 and a circuit board 19 with a circuit arrangement 20 mounted thereon (in particular with a field effect transistor) and with connection contacts 21.
- the air gap 5 between the membrane 3 and the electret foil 15 or the counter electrode 1 is defined by the spacer 4.
- Fig. 2a shows a schematic representation of a plan view of a membrane of a capacitive transducer in a conventional. Condenser microphone; Fig. 2b shows a cross section of the actual capacitive transducer.
- the membrane 3 is arranged in front of the counter electrode 1 with the perforation 2 (dashed lines).
- the trapped in the air gap 5 between the membrane 3 and the counter electrode 1 air attenuates the membrane movement due to their viscosity. In the area of the perforation, however, the membrane 3 is not adequately damped, so that disturbing natural oscillations 6 can form here.
- Fig. 3a and Fig. 3b by analogy Fig. 2a and Fig. 2b the substantially changed elements of a capacitive transducer according to a first embodiment of the invention.
- an additional damping disc 7 with a perforation 8 (not dashed) arranged in front of the diaphragm 3 .
- the perforations 2, 8 are offset from one another so that they do not overlap.
- a spacers 9 designed similarly to the spacer 4 determines the distance between the damping disk 7 and the membrane 3.
- a second air gap 10 is formed.
- the membrane 3 is attenuated on its entire surface by an air gap 5 and / or an air gap 10, that is, by at least one non-perforated region.
- the natural vibrations 6 of the diaphragm 3 are effectively suppressed.
- first perforation 2 and the second perforation 8 are arranged offset relative to one another in such a way that perforated regions of the counterelectrode 1 are respectively opposite non-perforated regions of the damping disk 7.
- the perforated regions of the damping disk 7 and the counter electrode 1 are of the same size and shape, but of different number and arrangement in rows.
- Fig. 4 shows by way of example a second embodiment according to the invention, in which the perforation 8 of the damping disk 7 partially overlaps the perforation 2 of the counter electrode 1 and in which the perforations 2, 8 are arranged in rows.
- the first perforation 2 and the second perforation 8 are arranged offset from one another in such a way that perforated regions of the counterelectrode 1 are respectively opposite a part of a first perforated region of the damping disk 7 and a part of a second perforated region of the damping disk 7.
- an effective damping of the membrane 3 can be achieved if the overlapping takes place primarily in the edge regions of the perforations, so that the membrane also in the perforated regions of the holes 2 and 8 sufficiently large damping surfaces of the counter electrode 1 and Damping disc 7, in particular in the central regions of the partial membranes, opposite.
- Fig. 5 shows by way of example a third possible embodiment with rotationally symmetrically arranged perforations, in which the perforation 8 of the damping disk 7 and the perforation 2 of the counter electrode 1 overlap only slightly in the edge regions.
- the number of holes in the counterelectrode 1 and in the damping disk 7 is the same in the three zones exemplified here and the acoustic effect of the counter electrode 1 and the damping disk 7 is therefore similar.
- This embodiment is particularly suitable for the realization of a balanced push-pull converter, which combines the advantages of the damping disk according to the invention and a balanced push-pull converter in itself.
- the perforations were represented by circular holes with uniform hole sizes, but the perforations can be realized with any other shapes and sizes of perforated areas. Furthermore, the perforations of the two discs can be arranged differently and / or differ in number and shape from each other.
- the damping disk according to the invention can be arranged both in a capacitive recording transducer as well as in a capacitive reproduction converter.
- a damper disc according to the invention acts damping and distortion-reducing and thus increases the signal quality.
- a maximum damping effect of the partial vibrations is achieved if a perforated region of the counterelectrode faces a non-perforated region of the damping disk. If the perforated areas of the counter electrode and the damping disk overlap, the damping effect of the Although lower partial modes, but more perforated areas can be accommodated on the counter electrode and / or damping disc, which leads to an increase in the sound transmission of the counter electrode and / or the damping disk. For a special capacitive transducer so a compromise in the number and arrangements of the perforations can be selected to each other.
Landscapes
- Health & Medical Sciences (AREA)
- Otolaryngology (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
Claims (12)
- Transducteur acoustique capacitif avec une membrane (3) et une contre-électrode (1) qui présente une première perforation (2),
caractérisé par un disque d'amortissement (7) perméable au son qui présente une seconde perforation (8), la première perforation (2) et la seconde perforation (8) étant disposées en décalage l'une par rapport à l'autre, la membrane (3) étant disposée entre la contre-électrode (1) et le disque d'amortissement (7) et la distance entre le disque d'amortissement (7) et la membrane (3) étant essentiellement identique à la distance entre la contre-électrode (1) et la membrane (3). - Transducteur acoustique capacitif selon la revendication 1,
caractérisé en ce que la première perforation (2) et la seconde perforation (8) sont disposées en décalage de telle manière qu'aux zones perforées de la contre-électrode (1) font face respectivement des zones non perforées du disque d'amortissement (7). - Transducteur acoustique capacitif selon la revendication 1,
caractérisé en ce que la première perforation (2) et la seconde perforation (8) sont disposées en décalage de telle manière qu'aux zones perforées de la contra-électrode (1) fait face respectivement une partie d'une zone perforée du disque d'amortissement (7). - Transducteur acoustique capacitif selon la revendication 1,
caractérisé en ce que la première perforation (2) et la seconde perforation (8) sont disposées en décalage de telle manière qu'aux zones perforées de la contre-électrode (1) font face respectivement une partie d'une première zone perforée du disque d'amortissement (7) et au moins une partie d'une seconde zone perforée du disque d'amortissement (7). - Transducteur acoustique capacitif selon l'une quelconque des revendications 3 et 4,
caractérisé en ce que la partie d'une zone perforée du disque d'amortissement (7) est une zone de bord de la zone perforée du disque d'amortissement (7). - Transducteur acoustique capacitif selon l'une quelconque des revendications précédentes, caractérisé en ce que la seconde perforation (8) présente des zones perforées essentiellement de manière identique, en particulier en forme, taille, nombre et disposition, à la première perforation (2).
- Transducteur acoustique capacitif selon l'une quelconque des revendications précédentes, caractérisé en ce que des zones perforées de taille différente sont disposées dans la première perforation (2) et/ou la seconde perforation (8).
- Transducteur acoustique capacitif selon l'une quelconque des revendications précédentes, caractérisé en ce que les zones perforées au moins d'une perforation (2, 8) sont disposées dans une symétrie de révolution, en ligne ou en nids d'abeilles.
- Transducteur acoustique capacitif selon l'une quelconque des revendications précédentes, caractérisé en ce que le disque d'amortissement (7) est réalisé en tant que contre-électrode supplémentaire.
- Transducteur acoustique capacitif selon l'une quelconque des revendications précédentes, caractérisé en ce que le disque d'amortissement (7) n'est pas couplé électriquement au transducteur acoustique.
- Transducteur acoustique capacitif selon l'une quelconque des revendications précédentes, caractérisé en ce que la distance entre la contre-électrode (1) et la membrane (3) est essentiellement identique à la distance entre le disque d'amortissement (7) et la membrane (3).
- Microphone électrostatique avec un transducteur acoustique capacitif selon l'une quelconque des revendications précédentes.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005043664A DE102005043664B4 (de) | 2005-09-14 | 2005-09-14 | Kondensatormikrofon |
PCT/EP2006/008865 WO2007031270A1 (fr) | 2005-09-14 | 2006-09-12 | Transducteur acoustique capacitif ayant un disque d'amortissement perfore |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1927263A1 EP1927263A1 (fr) | 2008-06-04 |
EP1927263B1 true EP1927263B1 (fr) | 2010-11-03 |
Family
ID=37436901
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06805695A Active EP1927263B1 (fr) | 2005-09-14 | 2006-09-12 | Transducteur acoustique capacitif ayant un disque d'amortissement perfore |
Country Status (6)
Country | Link |
---|---|
US (1) | US8126168B2 (fr) |
EP (1) | EP1927263B1 (fr) |
JP (1) | JP4966309B2 (fr) |
CA (1) | CA2622035C (fr) |
DE (2) | DE102005043664B4 (fr) |
WO (1) | WO2007031270A1 (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN200947673Y (zh) * | 2006-09-13 | 2007-09-12 | 山西太微电声科技有限公司 | 一种肤触式电容振动拾音器 |
JP2009071346A (ja) * | 2007-09-10 | 2009-04-02 | Hosiden Corp | コンデンサマイクロホン |
EP2422531A2 (fr) * | 2009-04-23 | 2012-02-29 | Knowles Electronics, LLC | Microphone équipé d'une bague de diaphragme avec une meilleure stabilité |
DE102009019446B4 (de) | 2009-04-29 | 2014-11-13 | Epcos Ag | MEMS Mikrofon |
WO2011123552A1 (fr) * | 2010-03-30 | 2011-10-06 | Otologics, Llc | Microphone à électret à faible bruit |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE856615C (de) * | 1948-10-02 | 1952-11-24 | Julius Dipl-Ing Lorenz | System zur Umwandlung von Schwingungen |
DE821217C (de) * | 1949-07-29 | 1951-11-15 | Siemens & Halske A G | Kondensatormikrophon, bei dem eine elektrisch wirksame Membran von beiden Seiten mit Schall beaufschlagt wird |
AT180313B (de) * | 1953-04-30 | 1954-11-25 | Akg Akustische Kino Geraete | Kondensatormikrophon |
AT211394B (de) | 1959-10-09 | 1960-10-10 | Goerike Rudolf | Kondensatormikrophon |
DE1437420C3 (de) | 1964-07-21 | 1978-06-22 | Elly 1000 Berlin Neumann Geb. Kosak | Kondensator-Richtmikrophonkapsel |
AU470994B2 (en) * | 1972-05-08 | 1976-03-19 | Amalgamated Wireless (Australasia) Limited | Improvements in electrostatic transducers |
JPS5011516A (fr) | 1973-05-31 | 1975-02-06 | ||
JPS50115516A (fr) * | 1974-02-20 | 1975-09-10 | ||
NL8004351A (nl) * | 1980-07-30 | 1982-03-01 | Philips Nv | Elektreetomzetter. |
JPS59174693A (ja) * | 1983-03-24 | 1984-10-03 | Dai Ichi Kogyo Seiyaku Co Ltd | 微粉炭−油混合物用添加剤 |
ATA74486A (de) * | 1986-03-20 | 1987-04-15 | Akg Akustische Kino Geraete | Richtmikrophon nach dem elektrostatischen oder elektrodynamischen wandlerprinzip |
DE4307825C2 (de) * | 1993-03-12 | 1997-10-23 | Sennheiser Electronic | Doppelwandler für Kondensatormikrofone mit variabler Richtcharakteristik |
DE4441903C1 (de) * | 1994-11-24 | 1996-03-21 | Siemens Ag | Drucksensor |
DE19715365C2 (de) * | 1997-04-11 | 1999-03-25 | Sennheiser Electronic | Kondensatormikrofon |
DE10160830A1 (de) * | 2001-12-11 | 2003-06-26 | Infineon Technologies Ag | Mikromechanische Sensoren und Verfahren zur Herstellung derselben |
JP4697047B2 (ja) * | 2006-05-24 | 2011-06-08 | ヤマハ株式会社 | 静電型スピーカ |
-
2005
- 2005-09-14 DE DE102005043664A patent/DE102005043664B4/de not_active Expired - Fee Related
-
2006
- 2006-09-12 CA CA2622035A patent/CA2622035C/fr active Active
- 2006-09-12 JP JP2008530404A patent/JP4966309B2/ja active Active
- 2006-09-12 US US11/992,025 patent/US8126168B2/en active Active
- 2006-09-12 DE DE502006008246T patent/DE502006008246D1/de active Active
- 2006-09-12 WO PCT/EP2006/008865 patent/WO2007031270A1/fr active Application Filing
- 2006-09-12 EP EP06805695A patent/EP1927263B1/fr active Active
Also Published As
Publication number | Publication date |
---|---|
DE502006008246D1 (de) | 2010-12-16 |
JP4966309B2 (ja) | 2012-07-04 |
DE102005043664A1 (de) | 2007-04-26 |
EP1927263A1 (fr) | 2008-06-04 |
WO2007031270A1 (fr) | 2007-03-22 |
JP2009508419A (ja) | 2009-02-26 |
DE102005043664B4 (de) | 2011-06-22 |
CA2622035C (fr) | 2014-01-14 |
US20100061572A1 (en) | 2010-03-11 |
CA2622035A1 (fr) | 2007-03-22 |
US8126168B2 (en) | 2012-02-28 |
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