EP1927263A1 - Transducteur acoustique capacitif ayant un disque d'amortissement perfore - Google Patents

Transducteur acoustique capacitif ayant un disque d'amortissement perfore

Info

Publication number
EP1927263A1
EP1927263A1 EP06805695A EP06805695A EP1927263A1 EP 1927263 A1 EP1927263 A1 EP 1927263A1 EP 06805695 A EP06805695 A EP 06805695A EP 06805695 A EP06805695 A EP 06805695A EP 1927263 A1 EP1927263 A1 EP 1927263A1
Authority
EP
European Patent Office
Prior art keywords
perforation
membrane
perforated
counter electrode
damping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06805695A
Other languages
German (de)
English (en)
Other versions
EP1927263B1 (fr
Inventor
Manfred Hibbing
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sennheiser Electronic GmbH and Co KG
Original Assignee
Sennheiser Electronic GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sennheiser Electronic GmbH and Co KG filed Critical Sennheiser Electronic GmbH and Co KG
Publication of EP1927263A1 publication Critical patent/EP1927263A1/fr
Application granted granted Critical
Publication of EP1927263B1 publication Critical patent/EP1927263B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/32—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only
    • H04R1/34—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by using a single transducer with sound reflecting, diffracting, directing or guiding means
    • H04R1/38—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by using a single transducer with sound reflecting, diffracting, directing or guiding means in which sound waves act upon both sides of a diaphragm and incorporating acoustic phase-shifting means, e.g. pressure-gradient microphone
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/01—Electrostatic transducers characterised by the use of electrets
    • H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones

Definitions

  • the invention relates to a capacitive transducer with a membrane and a short distance from the membrane arranged counter electrode which has a first perforation.
  • the invention further relates to a condenser microphone with a capacitive transducer according to the invention.
  • a capacitive transducer of a condenser microphone contains a planar membrane moved by the sound and parallel to it at a small distance a perforated counter electrode. Membrane and counter electrode are designed to be electrically conductive and form an electrical capacitor, whose capacity is dependent on the caused by the sound diaphragm displacement.
  • Such a condenser microphone is known for example from DE 19715365.
  • the air-filled narrow space between the membrane and the counter electrode acts as a frictional resistance due to the viscosity of the air, which inhibits the membrane movement. This effect is used to control membrane movement.
  • the air gap resistance is not constant, but depends on the instantaneous distance between the membrane and the counter electrode. As the membrane moves towards the counter electrode, the air gap becomes narrower and therefore the frictional resistance becomes greater, otherwise smaller. Therefore, an overpressure in front of the membrane, which moves the membrane towards the counterelectrode, produces a smaller membrane deflection than an equal negative pressure, which moves the membrane away from the counterelectrode.
  • the membrane movement and the resulting capacitance change is therefore not a linear image of the sound signal, but it is non-linearly distorted.
  • the extent of the non-linearity can be reduced by reducing the membrane deflection by suitable measures, for example by a stronger air gap damping.
  • suitable measures for example by a stronger air gap damping.
  • a more advantageous possibility to reduce the nonlinearity of the diaphragm deflection offers the so-called balanced push-pull converter, as described for example in DE 43 07 825 A1. It contains a second counterelectrode with identical properties as the first counterelectrode, which is arranged in front of the membrane in such a way that similar air gaps form on both sides of the membrane.
  • the membrane movement in this case causes opposing changes in resistance in both air gaps, which compensate each other. As a result, the membrane movement is linearized and the transducer distortions are minimized.
  • a further disadvantage of the capacitive sound transducers used in known condenser microphones is that the membrane in the areas facing the perforated areas of the counter electrode carries out partial natural oscillations at high frequencies, which lead to undesirable frequency-dependent changes in the transmission characteristics of the condenser microphone.
  • the frequencies at which partial natural oscillations occur depend on the mechanical stress of the membrane and on the size and shape of the perforation of the counterelectrode. They are often still within the transmission range, ie the specified operating frequency range, and lead to undesirable frequency-dependent changes in the transmission characteristics of the condenser microphone.
  • the object of the invention is to provide a capacitive sound transducer which effectively suppresses the nonlinear distortions and the disturbing partial natural oscillations of the membrane in a simple manner.
  • a capacitive transducer of the aforementioned type according to the invention that at a short distance from the membrane of the counter electrode opposite a sound-transmitting damping disc is arranged, which has a second perforation, and that the first perforation and the second perforation are arranged offset from each other ,
  • the invention is based on the finding that at a small distance between the damping disk and the membrane, the unwanted partial membrane vibrations even in the areas opposite to the perforated areas, so the holes, the counter electrode, by the Viskosi- fact between the membrane and the additional damper disc trapped air are effectively suppressed.
  • the second perforation is staggered such that perforated areas of the first and second perforations do not or only partially overlap.
  • the perforations of the counter electrode and damping disk can be designed as desired. This concerns both the arrangement of the perforated areas, so the holes, as well as their size, number and shape.
  • each membrane has modes.
  • the frequencies of the modes in which the membrane as a whole oscillates are so low that the associated wavelengths are so large compared to the perforation structure of the counter electrode, that here the interruptions of the air gap in the perforated areas cause only a gradual reduction of the total attenuation.
  • the ratios are fundamentally different at the high frequencies of the partial modes.
  • the regions of the membrane opposite the perforated regions of the counterelectrode are comparable to partial membranes which are located at the perforation. are clamped.
  • the partial membranes can vibrate freely and relatively undamped in the hole area. All that remains is the internal damping of the membrane material and the influence of the surrounding air gap area, which, however, can scarcely influence the hole area via the only slight bending stiffness of the membrane.
  • the partial membrane vibrates most strongly in the middle. Therefore, the dampening influence must be greatest here. According to the invention this is achieved by at least the middle region of the partial membrane is damped by at least one air gap. In the edge region of the partial membrane, the perforations of the counter electrode and the damping disk can partially overlap, without thereby significantly impairing the damping effect. As a guideline for sufficient damping, it can be considered that at least half of the partial membrane area is covered by at least one air gap.
  • the remaining acoustic properties of the capacitive transducer are only minimally affected, but effectively suppresses the natural vibrations of the membrane and distortion of the membrane movement, which leads to a significantly improved transmission quality of the transducer, especially at high frequencies.
  • damping is achieved, which acts locally and directly in the areas of the membrane, which tend to partial natural oscillations. The local and immediate effect is achieved by the viscosity of the air between the membrane and the damping disk is used directly, ie without additional mechanical or acoustic coupling elements, for damping.
  • damping disc provides for any diaphragm deflection for an opposite change in the acoustic impedance in the two air gaps, so that the entire acoustic impedance of the capacitive transducer according to the invention less than conventional capacitive Schallwandlem depends on the diaphragm deflection.
  • the natural vibrations of the membrane and the non-linear distortions are weakened in a simple manner, without affecting the other properties of the capacitive transducer.
  • the inventive capacitive transducer allows a smooth course of the frequency response at high frequencies.
  • the frequency response is one of the most important documentable transducer properties.
  • An improvement is immediately apparent to the user of a capacitive transducer according to the invention and is reflected immediately positive in the transmission quality.
  • the damping disk according to the invention requires only a small structural change of a capacitive transducer, whereby the attenuation of disturbing influences in a simple and cost-effective manner is possible.
  • the first perforation and the second perforation are offset from one another in such a way that perforated regions, that is to say the holes, of the counterelectrode are in each case opposite imperforate regions of the damping disk.
  • each region of the membrane faces at least one damping air gap, which dampens the disturbing natural oscillations.
  • first perforation and the second perforation are offset relative to one another such that perforated regions of the counterelectrode are each opposite a part of a perforated region of the damping disk.
  • the perforated portions of the counter electrode and the damping disk partially overlap. There are thus regions of the membrane which are not faced by an unperforated region. This is particularly advantageous, since then the perforated regions of the first and second perforations can be arranged closer together and in larger numbers. This is advantageous because it increases the sound transmissivity of the counter electrode and the damper disc and thus improves the converter efficiency at the high frequencies.
  • the first perforation and the second perforation are staggered relative to one another such that perforated regions of the counterelectrode are respectively opposite a part of a first perforated region of the damping disk and at least a part of a second perforated region of the damping disk.
  • a perforated region of the counter electrode is overlapped by at least two perforated regions of the damping disk. This enables damping according to the invention even in the case in which a large number of perforated regions of the first perforation is provided, to which a likewise large number of perforated regions of the second perforation is offset.
  • the part of a perforated region of the damping disk which is arranged opposite at least one perforated region of the counter electrode, is an edge region of the perforated region of the damping disk.
  • the holes of the counter electrode and the damping disk partially overlap slightly in the edge regions.
  • a middle In the region of a partial membrane at least one nonperforated region always faces.
  • the second perforation has substantially similar perforated areas as the first perforation.
  • the acoustic properties of the damping disk are matched to those of the counter electrode.
  • the size, shape, number and arrangement of the perforated regions, ie the holes are identical, so that by a corresponding offset angle between the counter electrode and the damping disk, ie by a rotation of the damping disk about its perpendicular to the damping disk rotation axis relative to the counter electrode, an effective attenuation of the membrane on the one hand and on the other hand achieve a favorable symmetry for a low-distortion diaphragm movement.
  • the perforations can be arranged particularly advantageously rotationally symmetrical, circular, in rows or honeycombs.
  • a rotational symmetry of circular hole arrangements facilitates the symmetrical design of the two perforated disks and thus makes it possible in a simple manner to acoustically sym- find metric solutions with the same number of holes in acoustically equivalent areas of the counter electrode and the damping disk.
  • This arrangement is particularly advantageous for the realization of a balanced push-pull converter.
  • the arrangement of the perforations in rows or honeycomb shape particularly advantageously allows a more uniform and narrower structure of the perforated areas. This allows a higher acoustic permeability, which has a favorable effect, especially at high frequencies.
  • the damping disk is designed as a second counterelectrode. If an additional counterelectrode is used as the damping disk, it assumes the damping function of the damping disk in the arrangement of its perforation according to the invention. In this way, the advantages of a push-pull converter can be combined with those of the damping disk according to the invention. With the staggered arrangement of the second perforation of the second counterelectrode with respect to the first perforation of the first counterelectrode according to the invention, it is possible to suppress interfering influences due to non-linearities of the membrane movement and natural oscillations of the membrane in a push-pull converter, so that it significantly improves transmission in high frequency ranges.
  • the damping disk is not electrically coupled to the sound transducer and there is no electrical evaluation.
  • the distance between the counter electrode and the membrane is equal to the distance between the damping disk and the membrane.
  • the invention relates to a condenser microphone with a sound transducer as defined in claims 1 to 11.
  • FIG. 1 is a schematic view of a known condenser microphone with a capacitive transducer
  • Fig. 2a is a plan view of a membrane in a known capacitive transducer
  • FIG. 2b shows a cross section through a membrane and a counter electrode in a known capacitive transducer
  • FIG. 3a shows a plan view of a damping disk in a capacitive sound transducer according to the invention in accordance with a first embodiment
  • 3b shows a cross section through a damping disk, membrane and counter electrode in a capacitive transducer according to the invention according to a first embodiment of the invention RPg,
  • Fig. 4 shows a second embodiment in a plan view of a damping disk in a capacitive transducer according to the invention
  • Fig. 5 shows a third embodiment in a plan view of a damping disk in a capacitive transducer according to the invention.
  • Fig. 1 shows a cross section through a known condenser microphone (electret microphone) with a capacitive transducer, which is often produced in identical or similar manner.
  • the following elements are provided within the microphone housing 13 provided with a sound inlet opening 11: a membrane ring 12, a membrane 3 bonded to the membrane ring 12, a spacer 4, an electret film 15, a counterelectrode 1 connected thereto, a contact ring 17, an insulating part 18 and a circuit board 19 with a circuit arrangement 20 mounted thereon (in particular with a field effect transistor) and with connection contacts 21.
  • the air gap 5 between the membrane 3 and the electret foil 15 or the counter electrode 1 is defined by the spacer 4.
  • FIG. 2a shows a schematic representation of a plan view of a membrane of a capacitive transducer in a conventional condenser microphone
  • Fig. 2b shows a cross section of the actual capacitive transducer.
  • the membrane 3 is arranged in front of the counterelectrode 1 with the perforation 2 (dashed).
  • the trapped in the air gap 5 between the membrane 3 and the counter electrode 1 air attenuates the membrane movement due to their viscosity. In the area of the perforation, however, the membrane 3 is not adequately damped, so that disturbing natural oscillations 6 can form here.
  • FIGS. 3a and 3b in analogy to FIGS.
  • the first perforation 2 and the second perforation 8 are arranged offset from one another in such a way that perforated regions of the counterelectrode 1 are respectively opposite non-perforated regions of the damping disk 7.
  • the perforated regions of the damping disk 7 and the counter electrode 1 are of the same size and shape, but of different number and arrangement in rows.
  • FIG 4 shows, by way of example, a second embodiment according to the invention, in which the perforation 8 of the damping disk 7 partially overlaps the perforation 2 of the counterelectrode 1 and in which the perforations 2, 8 are arranged in rows.
  • the first perforation 2 and the second perforation 8 are arranged offset from one another in such a way that perforated regions of the counterelectrode 1 are each opposite a part of a first perforated region of the damping disk 7 and a part of a second perforated region of the damping disk 7.
  • an effective damping of the membrane 3 can be achieved if the overlapping takes place primarily in the edge regions of the perforations, so that the diaphragm also has sufficiently large damping surfaces of the counterelectrode 1 or 2 in the perforated regions of the holes 2 and 8 .
  • the damping disk 7, in particular in the central regions of the partial membranes, opposite. 5 shows by way of example a third possible embodiment with rotationally symmetrically arranged perforations, in which the perforation 8 of the damping disk 7 and the perforation 2 of the counter electrode 1 overlap only slightly in the edge regions.
  • the number of holes in the counterelectrode 1 and in the damping disk 7 is the same in the three zones exemplified here and the acoustic effect of the counter electrode 1 and the damping disk 7 is therefore similar.
  • This embodiment is particularly suitable for the realization of a balanced push-pull converter, which combines the advantages of the damping disk according to the invention and a symmetrical counter clock converter in itself.
  • the perforations have been represented by circular holes with uniform hole sizes, but the perforations can be realized with any other shapes and sizes of perforated areas. Furthermore, the perforations of the two discs can be arranged differently and / or differ in number and shape from each other.
  • the damping disk according to the invention can be arranged both in a capacitive recording transducer as well as in a capacitive reproduction converter.
  • a damper disc according to the invention acts damping and distortion-reducing and thus increases the signal quality.
  • a maximum damping effect of the partial vibrations is achieved if a perforated region of the counterelectrode faces a non-perforated region of the damping disk. If the perforated areas of the counter electrode and the damping disk overlap, the damping effect of the Although lower partial modes, but more perforated areas can be accommodated on the counter electrode and / or damping disc, which leads to an increase in the sound transmission of the counter electrode and / or the damping disk. For a special capacitive transducer so a compromise in the number and arrangements of the perforations can be selected to each other.

Landscapes

  • Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

L'invention concerne un transducteur acoustique capacitif et un microphone à condensateur doté d'un tel transducteur acoustique. Le transducteur acoustique comprend une membrane (3) et une contre-électrode (1) placée à une faible distance de la membrane (3) et présentant une première perforation (2). Pour amortir les vibrations propres de la membrane (3) pour des fréquences élevées, on utilise un transducteur acoustique capacitif dans lequel un disque d'amortissement (7) perméable au son est placé à une faible distance de la membrane (3) à l'opposé de la contre-électrode (1) et présente la deuxième perforation (8). Selon l'invention, la première perforation (2) et la deuxième perforation sont décalées.
EP06805695A 2005-09-14 2006-09-12 Transducteur acoustique capacitif ayant un disque d'amortissement perfore Active EP1927263B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005043664A DE102005043664B4 (de) 2005-09-14 2005-09-14 Kondensatormikrofon
PCT/EP2006/008865 WO2007031270A1 (fr) 2005-09-14 2006-09-12 Transducteur acoustique capacitif ayant un disque d'amortissement perfore

Publications (2)

Publication Number Publication Date
EP1927263A1 true EP1927263A1 (fr) 2008-06-04
EP1927263B1 EP1927263B1 (fr) 2010-11-03

Family

ID=37436901

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06805695A Active EP1927263B1 (fr) 2005-09-14 2006-09-12 Transducteur acoustique capacitif ayant un disque d'amortissement perfore

Country Status (6)

Country Link
US (1) US8126168B2 (fr)
EP (1) EP1927263B1 (fr)
JP (1) JP4966309B2 (fr)
CA (1) CA2622035C (fr)
DE (2) DE102005043664B4 (fr)
WO (1) WO2007031270A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN200947673Y (zh) * 2006-09-13 2007-09-12 山西太微电声科技有限公司 一种肤触式电容振动拾音器
JP2009071346A (ja) * 2007-09-10 2009-04-02 Hosiden Corp コンデンサマイクロホン
EP2422531A2 (fr) * 2009-04-23 2012-02-29 Knowles Electronics, LLC Microphone équipé d'une bague de diaphragme avec une meilleure stabilité
DE102009019446B4 (de) 2009-04-29 2014-11-13 Epcos Ag MEMS Mikrofon
WO2011123552A1 (fr) * 2010-03-30 2011-10-06 Otologics, Llc Microphone à électret à faible bruit

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DE821217C (de) * 1949-07-29 1951-11-15 Siemens & Halske A G Kondensatormikrophon, bei dem eine elektrisch wirksame Membran von beiden Seiten mit Schall beaufschlagt wird
AT180313B (de) * 1953-04-30 1954-11-25 Akg Akustische Kino Geraete Kondensatormikrophon
AT211394B (de) * 1959-10-09 1960-10-10 Goerike Rudolf Kondensatormikrophon
DE1437420C3 (de) * 1964-07-21 1978-06-22 Elly 1000 Berlin Neumann Geb. Kosak Kondensator-Richtmikrophonkapsel
AU470994B2 (en) * 1972-05-08 1976-03-19 Amalgamated Wireless (Australasia) Limited Improvements in electrostatic transducers
JPS5011516A (fr) 1973-05-31 1975-02-06
JPS50115516A (fr) * 1974-02-20 1975-09-10
NL8004351A (nl) * 1980-07-30 1982-03-01 Philips Nv Elektreetomzetter.
JPS59174693A (ja) * 1983-03-24 1984-10-03 Dai Ichi Kogyo Seiyaku Co Ltd 微粉炭−油混合物用添加剤
ATA74486A (de) * 1986-03-20 1987-04-15 Akg Akustische Kino Geraete Richtmikrophon nach dem elektrostatischen oder elektrodynamischen wandlerprinzip
DE4307825C2 (de) * 1993-03-12 1997-10-23 Sennheiser Electronic Doppelwandler für Kondensatormikrofone mit variabler Richtcharakteristik
DE4441903C1 (de) * 1994-11-24 1996-03-21 Siemens Ag Drucksensor
DE19715365C2 (de) * 1997-04-11 1999-03-25 Sennheiser Electronic Kondensatormikrofon
DE10160830A1 (de) * 2001-12-11 2003-06-26 Infineon Technologies Ag Mikromechanische Sensoren und Verfahren zur Herstellung derselben
JP4697047B2 (ja) * 2006-05-24 2011-06-08 ヤマハ株式会社 静電型スピーカ

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Also Published As

Publication number Publication date
US20100061572A1 (en) 2010-03-11
DE102005043664A1 (de) 2007-04-26
JP2009508419A (ja) 2009-02-26
US8126168B2 (en) 2012-02-28
CA2622035A1 (fr) 2007-03-22
WO2007031270A1 (fr) 2007-03-22
DE502006008246D1 (de) 2010-12-16
JP4966309B2 (ja) 2012-07-04
DE102005043664B4 (de) 2011-06-22
CA2622035C (fr) 2014-01-14
EP1927263B1 (fr) 2010-11-03

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