EP1899248A2 - Procede d'individualisation d'elements empiles en forme de disque et dispositif d'individualisation - Google Patents

Procede d'individualisation d'elements empiles en forme de disque et dispositif d'individualisation

Info

Publication number
EP1899248A2
EP1899248A2 EP06753527A EP06753527A EP1899248A2 EP 1899248 A2 EP1899248 A2 EP 1899248A2 EP 06753527 A EP06753527 A EP 06753527A EP 06753527 A EP06753527 A EP 06753527A EP 1899248 A2 EP1899248 A2 EP 1899248A2
Authority
EP
European Patent Office
Prior art keywords
stack
peripheral edge
acceleration
conveying
accelerating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06753527A
Other languages
German (de)
English (en)
Inventor
Mathias Buhl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AMB Apparate und Maschinenbau GmbH
Original Assignee
Brain Bernhard
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brain Bernhard filed Critical Brain Bernhard
Publication of EP1899248A2 publication Critical patent/EP1899248A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G59/00—De-stacking of articles
    • B65G59/08—De-stacking after preliminary tilting of the stack
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position

Definitions

  • the invention relates to a method for separating stacked, disc-shaped elements, as well as a separating device.
  • the object is achieved by the method according to claim 1 and the separating device according to claim 11.
  • first of all a stack of disc-shaped elements is fed to an acceleration device.
  • the stack consists of stacked, disk-shaped elements.
  • the respective first element of the stack is lifted off the stack by increasing its conveying speed.
  • the element is accelerated at a part of its peripheral edge in the direction of the stack axis away from the stack by an accelerating device.
  • the thus lifted from the stack element is deposited on a transport device and then carried away by the transport device.
  • the separating device has, in addition to a feed device for feeding the stack, an accelerating device with which the respectively first element of the stack experiences an acceleration force at a part of its peripheral edge.
  • an accelerating device with which the respectively first element of the stack experiences an acceleration force at a part of its peripheral edge.
  • the accelerated element is removed and thus increasingly removed from the rest of the stack.
  • the acceleration at the part of the peripheral edge of the first element takes place in each case for the elements of the stack with a constant force, resulting in a constant separation both in terms of quality and the time interval of the separated elements.
  • the subclaims relate to advantageous developments of the separating device according to the invention and of the method according to the invention.
  • a conveying element moves at a speed which is increased with respect to the axial speed of the peripheral edge of the first element of the stack. Now meets the peripheral edge of the first element on the conveying element of the accelerator, this part of the peripheral edge is taken by the conveyor element and accelerated in the direction of the stack axis away from the stack.
  • the acceleration of the part of the peripheral edge of the first element takes place in at least two acceleration stages.
  • This has the advantage that the acceleration forces and the bending moments acting on the element by the unilaterally acting acceleration force are low.
  • the element to be separated is first unilaterally lifted a bit before in the second step, a further acceleration takes place on the same peripheral edge.
  • this affects the already solved element, so that effects, such as adhesion, between the individual elements of the stack no longer play a role at this point.
  • the acceleration of the element at a part of its peripheral edge further has the advantage that a rotational movement of the element to be separated is triggered by the unilateral acceleration. If the stack is fed, for example, with its stacking axis in the horizontal direction, the element to be separated is deposited in the horizontal due to the rotational movement. The rotational movement is initiated solely on the basis of the unilateral acceleration of the element, so that the accelerated lower peripheral edge opposite lying upper peripheral edge of the first element tracked by gravity and the singulated element is stored, for example on a conveyor belt.
  • a braking device with the at least the adjacent element of the first element to be lifted is subjected to a holding force directed counter to the acceleration force.
  • Significant adhesion forces can occur between the individual elements of the stack. These can lead to the force applied to the peripheral edge of the first element not being sufficient to lift off the first element.
  • a fluid jet is started to be injected or injected into the region of a contact surface between the first element to be lifted and its adjacent element.
  • one or more nozzles arranged around the stack are provided, each of which directs at least one fluid jet onto the stack, wherein the fluid jet strikes the stack at the contact surface between the first element and its adjacent element at least immediately before the acceleration of the peripheral edge of the first element ,
  • a fluid jet can be directed by one or more nozzles also from different directions on the stack, wherein the rays with a stacking axis can also have a deviating from 90 ° angle.
  • a fluid cushion is generated between the already slightly lifted first element and the stack by at least one fluid jet through which the fluid cushion in The space between the first element and the stack is formed on which slides off the first element. In this way, a contact between the peripheral edge of the first element opposite the accelerated peripheral edge and the adjacent element of the stack is prevented or minimized.
  • FIG. 1 shows a perspective view of an inventive dicing device at a first time
  • FIG. 2 is a perspective view of the separating device according to the invention at a second time
  • FIG. 3 shows a perspective view of the separating device according to the invention at a third point in time
  • FIG. 4 is a perspective view of the separating device according to the invention at a fourth time
  • FIG. 6 shows a section of an exemplary embodiment with a braking device
  • Fig. 8 further embodiments of the embodiment of the transfer area
  • Fig. 9 is an illustration of an alternative feeding device.
  • FIG. 1 a separating device 1 according to the invention is shown in a perspective view.
  • the illustration of FIG. 1 shows the separating device 1 according to the invention at a first time, too from a stack 2 already a first element 3 has been slightly lifted.
  • the stack 2 consists of a plurality of elements 3, 3 ', ..., each having the same dimensions. It can also be used stack with elements having different sizes, the separation can be combined with a sorting process.
  • Such elements 3, 3 ', 3 ", ... can be, for example, silicon wafers for the production of photovoltaic systems. Silicon wafers typically have a thickness of about 50 ⁇ m to 300 ⁇ m.
  • the singulating device 1 according to the invention and the corresponding method for singling are not limited to such thin elements 3, 3 ", 3", ...
  • the singling device is also, for example, for the singling of stacked printed circuit boards or other elements to be singulated used.
  • the feeding device 4 In order to lift the respective first element 3 from the stack 2, first the stack 2 is transported by a feeding device 4 in the direction of an acceleration device 5.
  • the feeding device 4 has in the illustrated embodiment a first pair of conveyor belts consisting of a first conveyor belt 6a and a second conveyor belt 6b.
  • the first and second conveyor belts 6a and 6b together form a conveying element of the feeding device 4.
  • the first conveyor belt 6a and the second conveyor belt 6b are guided over a first pair of rollers 7a, 7b and a second pair of rollers 8a, 8b, wherein in FIG. 1 only the roller 8b of the second pair of rollers 8a, 8b can be seen.
  • the drive of the conveyor belts 6a and 6b for example via a between the rollers 7a, 7b shown, fixedly connected to the rollers 7a, 7b drive axle.
  • the disk-shaped elements 3 forming the stack 2 have a peripheral edge 9, which in the exemplary embodiment illustrated is identical for all elements 3, 3 ',... Of the stack 2 and these are illustrated in FIG Embodiment rectangular limited.
  • the separation of the elements is also feasible for elements that are limited by deviating from each other in their geometry peripheral edges. With their respective lower peripheral edges 9 'are the elements 3, 3 1 , 3' 1 of the stack 2 on the conveyor belts 6a, 6b of the feeder 4 and thus by the feeding device 4 in the in Fig. 1 by an arrow promoted direction.
  • the first element 3 of the stack 2 in the figure 1 is promoted so far to the right at a certain time that its lower peripheral edge 9 'loses contact with the conveyor belts 6a, 6b.
  • the conveyor belts 6a, 6b of the feeding device 4 and the further conveyor belts in the illustrated embodiment have different levels for this purpose. In a simpler version, the levels can also be identical.
  • the acceleration of the first element 3 is effected by a further conveying element.
  • the further conveying element consists of a third conveyor belt IIa and a fourth conveyor belt IIb, which cooperate as a third pair of conveyor belts.
  • the third and the fourth conveyor belt IIa, IIb move at the lower peripheral edge 9 'of the first element 3 contacting side with a speed in the direction of arrow, which is greater than the feed rate of the stack 2 and which is greater than the axial speed of the elements 3, 3 ', 3 ⁇ ', ... of the stack 2 in direction of the stacking axis 10.
  • the lower peripheral edge 9 'of the first member 3 is accelerated by the second pair of conveyor belts IIa, IIb in the arrow direction and moves away increasingly adjacent ones of the Element 3 'of the stack 2.
  • the second pair of conveyor belts IIa, IIb forms a first conveying element of the accelerating device 5.
  • the second pair of conveyor belts IIa, IIb is located substantially in axial extension to the first pair of conveyor belts 6a, ⁇ b. Due to the higher conveying speed, the lower peripheral edge 9 'of the first element 3 is accelerated relative to the lower peripheral edges of the remaining elements of the stack 2 in a first acceleration stage.
  • a third pair of conveyor belts 12a, 12b as a further conveyor element, which again have a relation to the second pair of conveyor belts IIa, IIb increased conveying speed. Due to this second acceleration stage, the lower peripheral edge 9 'of the first element 3 is further accelerated.
  • the second pair of conveyor belts IIa, IIb and the third pair of conveyor belts 12a, 12b run like the first pair of conveyor belts 6a, 6b via corresponding pairs of rollers 14 to 17, wherein corresponding letter suffixes a, b to the reference numerals denote the respective side membership, wherein a Part of the roles is hidden in the figures.
  • the first pair of rollers 14a, 14b of the second pair of conveyor belts IIa, IIb and the second pair of rollers 8a, 8b of the first pair of conveyor belts 6a, 6b are arranged in pairs on a common axis.
  • the rollers are in each case rotatably mounted to one another.
  • the second pair of rollers 15a, 15b of the second pair of conveyor belts IIa, IIb and the first pair of rollers 16a, 16b of the third pair of conveyor belts 12a, 12b are also arranged in pairs on a common axis.
  • the first element 3 now turned horizontally, lies with its original one Stack 2 facing surface flat on the conveyor belts.
  • a transport device 32 which consists of a fourth pair of conveyor belts 13a, 13b.
  • the conveyor belts 13a and 13b are again guided by two pairs of rollers 18a, 18b and 19a, 19b.
  • the singulated element 3 can be stored, for example in the case of silicon wafers, either individually in a cassette, or fed directly into another processing process.
  • the second acceleration stage can also be designed as a transport device at the same time.
  • the stack 2 is held on at least two sides of the feeding device 4 by guide elements extending in the axial direction.
  • the guide elements are not shown for better illustration in the figures.
  • the separating device 1 shown is particularly suitable for separating silicon wafers.
  • Such silicon wafers are available in different designs.
  • singling a distinction must be made here primarily between two types of wafers.
  • drawn wafers whose surface is slightly wavy is.
  • further measures are therefore necessary or possible in addition to the acceleration of the lower peripheral edges 9 1 of the respective first element 3.
  • the detachment of the first element 3 from the stack 2 is brought about by arranging a plurality of fluid nozzles 27a, 27b, 27c laterally in a transfer region from the supply device 4 to the accelerating device 5, with the aid of which a plurality of fluid jets 21a, 21b and 21c are applied to the Stack 2 will be addressed.
  • the first element 3 with its peripheral edge 9 has passed the fluid steels 21a, 21b and 21c.
  • the fluid is injected through the fluid nozzles 27a, 27b, and 27c into the area of a contact surface between the first member 3 and the adjacent member 3 ", thus causing easy lifting of the adhered wafers.
  • the fluid nozzles 27a, 27b and 27c are preferably arranged to be movable.
  • the movable arrangement allows either a linear movement in and opposite to the transport direction of the stack 2 or a rotation of the fluid nozzles 27a, 27b, and 27c.
  • the angle at which the fluid impinges on the elements 3 to be separated of the stack 2 changes.
  • the fluid nozzles 27a, 27b and 27c are moved together oscillating, so that a gradual fanning of the elements of the stack 2 takes place.
  • either the fluid can be continuously supplied by the fluid nozzles 27a, 27b and 27c or clocked, wherein in the case of a pulsed supply of fluid, the fluid flow is preferably for a Movement of the fluid nozzles 27 a, 27 b and 27 c counter to the conveying direction of the stack 2 is exposed.
  • the fluid used in the simplest case is air.
  • a fluid tuned to a machining process is possible by using a cleaning fluid as the fluid.
  • the injection or injection of the fluid can also be started before the entry of the stack 2 in the transfer area.
  • the stack 2 is ideally already loosened during the feeding continuously.
  • both on both sides of the stack 2 and at the bottom of the stack 2 each have a fluid nozzle 27a, 27b, 27c is provided, each with a sharp beam 21a, 21b, 21c the Lift off the first element 3 effect.
  • the geometry of the beams 21a, 21b, 21c substantially corresponds in each case to a circle segment, the extent being sharply delimited in the direction of the stack axis 10. Good results can also be achieved with a cylindrical jet, which is preferably sharply defined.
  • the beam direction is approximately perpendicular to the stacking axis 10. However, it may also be advantageous to guide the fluid jets 21a, b, c slightly in the direction of the conveying direction in order to promote the lifting of the first element 3 by the fluid jets 21a to 21c.
  • the singulating device 1 is shown at a later point in time. While the first element 3 is already almost completely deposited on the third pair of conveyor belts 12a, 12b, the adjacent element 3 1 has already been accelerated at its lower peripheral edge and initiated its rotational movement. The other element 3 1 1 , however, still has contact with the first pair of conveyor belts 6a, 6b, so that its lower peripheral edge does not experience any accelerating force. For the sake of clarity, the further elements of the stack 2 are no longer shown in FIG.
  • a particularly gentle method of singling results, in which in particular the surface of the respectively adjacent element, in the illustrated example, the surfaces of the adjacent elements 3 ', 3 1 1 is not damaged by the upper peripheral edge 9 " in that the rotational movement of the first element 3 is carried out with the assistance of a fluid cushion.
  • further fluid nozzles 23 to 26 are provided with which on the stack 2 facing side of the rotating elements 3, 3 ', a fluid cushion is provided. This supports the rotating elements 3, 3 ', so that the respective upper peripheral edge of the rotating elements 3, 3' does not come into contact with the surface of the subsequent element 3 'or 3' 1 of the stack 2.
  • the individual fluid nozzles 23 to 27 can also be operated with different fluid media.
  • a mixture of different fluid media may also be used on a part or all of the fluid nozzles 23 to 27.
  • a cleaning liquid may be sprayed as a spray along with air through the fluid nozzles 23 to 27.
  • the first fluid nozzle 23 of the fluid cushion is already arranged shortly after or in the transfer region from the supply device 4 to the acceleration device 5 in the region of the first pair of conveyor belts IIa, IIb.
  • the injected from the first fluid nozzle 23 for generating the fluid cushion or fluid flows into the forming in the region of the lower peripheral edge 9 'of the first element 3 gap between the first element 3 and the adjacent element 3' or at the time of FIG. 2 between the adjacent element 3 'and the further element 3''.
  • the singling device 1 can be easily adjusted to different stacked elements 3, 3 ', 3 ",... In particular, this makes it possible to adjust the separating device 1 in a simple manner to, for example, different wafer thicknesses.
  • the fluid jets 28 to 31 generated by the fluid nozzles 23 to 26 are preferably arranged in a space formed between the respective conveyor belt pairs gap.
  • the separating device 1 is shown at a later point in time.
  • the further adjacent element 3 '' has been accelerated at its lower peripheral edge and the first element 3 is already in a horizontal plane on the conveyor belts 13a, 13b of the transport device 32.
  • a device for controlling the correct separation can be integrated. It is conceivable, for example, a weight detection or an optical thickness control.
  • the integration may also involve automatic sorting of the elements or other devices. If the separation is not correct, the element (s) not correctly separated is taken from the further transport and returned to the singulation process. In the adjacent element 3 'whose rotational movement is almost complete.
  • such a clocked supply device 4 can be dispensed with, for example, if the elements to be separated are comparatively thick elements.
  • Such thicker elements are, for example, stacked printed circuit boards. Due to its own thickness, the contact with the conveyor belts 6a, 6b of the feeding device 4 remains at a correspondingly selected, constant feed speed before an acceleration occurs until the lower peripheral edge 9 'of the preceding first element 3 has already been transported sufficiently far.
  • FIG. 5 again shows an enlarged view of the transfer region from the delivery device 4 to the accelerator device 5. It can be seen that the stack 2 with the lower peripheral edges 9 'of the elements 3, 3 ", 3' 1 etc. rests on the pair of conveyor belts 6a, 6b, wherein in the side view only the second conveyor belt 6b of the feeding device 4 can be seen Peripheral edge 9 'of the individual elements 3, 3 1 , 3 1 1 of the stack 2 on the pair of conveyor belts 6a, 6b results in a first distance d x of the conveyor belt 6b from the stack axis 10. In contrast, a second distance d 2 of the conveyor belts IIa, IIb of the second pair conveyors IIa, IIb d opposite the first distance x increases.
  • An increase of the distance of the second pair of conveyor belts IIa, IIb may be achieved, for example, that the diameter of the rollers 14a, 14b relative to the diameter of the rollers 8a , 8b, of the first pair of conveyor belts 6a, 6b, which are arranged on the same pair of axles 20, is reduced.
  • FIG. 5 shows a particularly advantageous embodiment in which the second distance d 2 is increased in relation to the first distance d x .
  • the stack 2 is moved with the first element 3 against the second pair of conveyor belts IIa, IIb, whereupon the lower peripheral edge 9 'of the first element 3 also at a defined time in contact with the faster moving conveyor belts IIa, IIb has.
  • FIG. 6 again shows a section of the separating device according to the invention.
  • a braking device 33 is shown in the transfer region between the delivery device 4 and the acceleration device 5.
  • a transported through the conveyor belts 6a, 6b of the feeder 4 in the direction of arrow stack 2 reaches it with its first elements, the braking device 33.
  • the brake device 33 has, on its side facing the stack 2 to be transported, a one-sided elevation 34 arranged in the conveying direction, against which the stack 2 to be transported is conveyed by the feed device 4.
  • a one-sided elevation 34 arranged in the conveying direction, against which the stack 2 to be transported is conveyed by the feed device 4.
  • the curved contour shown in FIG. 6 of the stack 2 facing side of the braking device 33 may alternatively z. B.
  • a wedge-shaped geometry of the braking device 33 can be selected.
  • the distance of the braking device 33 with respect to the stacking axis 10 decreases.
  • the braking device 33 is arranged so that a rear edge 35 is reached by the first element 3 of the stack 2 at a time in which another Contact with the conveyor belts 6a, 6b of the feeder 4 no longer occurs. Instead, the respective first element 3 of the stack 2 slides at a defined time when the trailing edge 35 of the braking device 33 is exceeded and is accelerated at its lower peripheral edge 9 'by the conveyor belt IIa of the accelerating device 5.
  • an enlarged transfer region can also be formed, in which the respective axes 20 of the rollers 14a and 20 'of the roller 8a are offset relative to one another in the conveying direction are.
  • FIG. 5 also in the embodiment of FIG Conveyor pair IIa, IIb arranged with respect to the first distance d x of the first conveyor belt pair 6a, 6b of the stacking axis 10 enlarged second distance d 2 .
  • two conveyor belts together form a conveying element of the feeding device 4, the accelerating device 5 and the transport device 32.
  • the use of other conveying elements is also possible.
  • Fig. 7 is an enlarged view of a transfer area between the feeding device 4 and the acceleration device 5 is shown.
  • the level with respect to the stacking axis in the feeding device 4 and in the accelerating device 5 is different.
  • a toothed wheel 36 is additionally provided.
  • the toothed wheel 36 is designed as a toothed wheel.
  • deviating flank geometries may be required to adapt the toothed wheel 36 to the thickness of the elements 3 to be singulated.
  • the toothed wheel 36 preferably has an outer diameter greater than the diameter of the rollers of the second pair of rollers 8a, 8b plus twice the thickness of the first and second conveyor belts 6a, 6b, respectively. As can be seen in Fig. 7, this has the consequence that movement of the stack 2 in the direction of the arrow before reaching the end of the feeder 4 brings the first element 3 of the stack 2 into contact with the rotating toothed wheel 36. As a result of the toothed wheel 36, the respective first element 3 of the stack 2 is thus grasped at the respectively lower peripheral edge 9 'and lifted off the stack. Due to the slightly larger diameter of the toothed wheel 36 while a lifting movement is performed with the element 3.
  • the geometry of the teeth of the toothed wheel 36 is tuned to the thickness of the elements 3 to be separated so that one element 3 is safely transported through two successive teeth of the toothed wheel 36 towards the accelerator 5.
  • the respective lower peripheral edge 9 ' is transported by the toothed wheel 36 until the lower peripheral edge 9 1 of the transported element 3 comes into contact with the third and fourth conveyor belt IIa, IIb.
  • the third and fourth conveyor belt IIa, IIb takes over the further transport of the lower peripheral edge 9 ', whereby it comes in a manner already described to a storage of successively isolated elements of the stack 2.
  • the toothed wheel 36 preferably rotates at the same angular velocity as the first pair of rollers 14a, 14b of the second pair of conveyor belts IIa, IIb, thereby achieving acceleration of the lower peripheral edge 9 '.
  • the toothed wheel 36 can also have its own drive, whereby in particular the first pair of rollers 14a, 14b of the second pair of conveyor belts IIa, IIb can be rotatably mounted on a separate axis.
  • plastic gears are preferably used as the toothed wheels 36.
  • Another possibility is to use aluminum gears, wherein at least the surfaces of the aluminum elements in contact with the elements 3 to be separated are gears are coated. As the coating of the contact surfaces of the aluminum gears an anodization is preferably used.
  • Fig. 8 the transfer area from the feeder 4 to the accelerator 5 is shown again for three alternative embodiments in which the arrangement of the toothed wheels 36, 36a and 36b is different.
  • a single toothed wheel 36 is used, which is arranged centrally between the first rollers 14a, 14b of the second pair of conveyor belts IIa, IIb.
  • the toothed wheel 36 is disposed on a drive shaft 20 "which is disposed between the rollers 14a, 14b of the first pair of rollers of the second pair of conveyor belts IIa, IIb
  • This drive shaft 20 ' is non-rotatably connected to at least one of the two rollers 14a, 14b and thus transmits a drive torque to the toothed wheel 36.
  • the arrangement shown in Fig. 8a) makes it possible to retrofit an additional toothed wheel 36 already in place To integrate systems, since the distance and the course of the first pair of conveyor belts 6a, 6b and the second pair of conveyor belts IIa, IIb remains unchanged.
  • each of the rollers of the first pair of rollers 14a, 14b of the second pair is conveyor belts IIa, IIb associated with a toothed wheel 36a and 36b.
  • the toothed wheels 36a and 36b can be directly connected to the first pair of rollers 14a and 14b, respectively, so that a drive takes place indirectly via the second pair of conveyor belts IIa, IIb.
  • the common axle 20 may be fixed, with the second pair of rollers 8a, 8b of the first pair of conveyor belts 6a, 6b and the first pair of rollers 14a, 14b being connected to the pair of toothed wheels 36a, 36b independently of each other on the common axis 20 rotate .
  • a further embodiment is shown, in which the elements to be separated 3 at its respective lower peripheral edge 9 'still further to the outer edge through the toothed wheels 36a, 36b gripped and lifted.
  • the toothed wheels 36a, 36b are in turn connected to the first pair of rollers 14a, 14b of the second pair of conveyor belts IIa, IIb.
  • the toothed wheels 36a, 36b are now sandwiched between the second pair of rollers 8a, 8b of the first pair of conveyor belts 6a, 6b and the first pair of rollers 14a, 14b of the second pair of conveyor belts IIa, IIb arranged. In this way, the conveyor belts of the second pair IIa, IIb continue to be offset to the center.
  • FIG. 9 shows an alternative delivery device 4 'in a side view.
  • the alternative feeding device 4 ' has, instead of the first conveyor belts 6a, 6b, a stack holder 37 with the aid of which a stack 2 is conveyed in the direction of the accelerating device 5.
  • the stack holder 37 is slidably mounted on a running rail 38 and can be moved by means of a drive element 39 in the arrow direction on the running rail 38.
  • the stack holder 37 has a support element 40, on which a contact surface 41 is formed. At the contact surface 41 is the last element of a stack 2, which rests on a support surface 42 of the stack holder 35.
  • the transport of the stack 2 is thus carried out not via the first pair of conveyor belts as in the previous embodiments, but with the help of the stack holder 37th
  • the support element 40 preferably consists of two components arranged parallel to one another, whose end faces together form the contact surface 41.
  • the support surface 42 In extension of the contact surface 41 in approximately horizontal direction to the accelerator 5 towards the contact surface 41 is in the support surface 42, which also consists of two parallel components. Due to the fork-shaped arrangement of the support surface 42, the support surface 42 engages far enough in the region of the acceleration device 5 that the last elements of the stack 2 can be detected by the accelerator 5 at its respective lower peripheral edge 9 '.
  • the fork-shaped bearing surface 42 is in this case positioned in the intermediate spaces of the conveyor belts 111, IIb and 12a, 12b of the acceleration device 5.
  • a retaining nozzle 43 is provided which acts on the respective foremost element 3 of the stack 2 in the direction of the contact surface 41 with a fluid jet.
  • the individual elements of the stack 2 are held in contact with the contact surface 41 with a force that can be adjusted by the fluid jet and tilting of the elements 3 during movement of the stack holder 37 is prevented.
  • the fluid nozzles 27a, 27b, 27c are not shown for reasons of clarity.
  • the nozzles may also be fixed, wherein a relative movement between the fluid jet and the stack 2 is generated by an oscillating movement of the stack holder 37. In this case, a pulsed supply of fluid can again take place via the fluid nozzles 27a to 27c.
  • the lateral alignment of the stack 2 on the stack holder 37 is effected by a stop surface 48 which is fixedly mounted on a support 49.
  • a guide element 45 can also be seen, which on both sides of the Acceleration device 5 is arranged and causes with its vertical walls an exact alignment of the individual elements 3 on the conveyor belts of the accelerator 5.
  • the distance between the two walls of engineersselernents 45 decreases in the transport direction.
  • two bearing blocks 46, 47 are shown in the side view, in which the axes or shafts for receiving the rollers of the acceleration device 5 are provided.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Pile Receivers (AREA)

Abstract

L'invention concerne un procédé d'individualisation d'éléments empilés en forme de disque (3, 3', 3'') dans une pile (2), et un dispositif d'individualisation. Le dispositif d'individualisation (1) présente un dispositif d'alimentation (4) destiné à acheminer une pile (2) d'éléments en forme de disque (3, 3', 3'') vers un dispositif d'accélération (5). Le dispositif d'accélération (5) accélère une partie de l'arête périphérique (9) d'un premier élément (3) de la pile (2) et augmente ainsi la vitesse de transport du premier élément (3) de la pile (2). L'élément (3) ainsi accéléré unilatéralement sur son arête périphérique (9) est déposé sur un dispositif de transport (32). Le dispositif de transport (32) évacue l'élément (3) ainsi déposé.
EP06753527A 2005-05-20 2006-05-09 Procede d'individualisation d'elements empiles en forme de disque et dispositif d'individualisation Withdrawn EP1899248A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005023424 2005-05-20
DE102005045583A DE102005045583A1 (de) 2005-05-20 2005-09-23 Verfahren zur Vereinzelung von gestapelten, scheibenförmigen Elementen und Vereinzelungsvorrichtung
PCT/EP2006/004327 WO2006122677A2 (fr) 2005-05-20 2006-05-09 Procede d'individualisation d'elements empiles en forme de disque et dispositif d'individualisation

Publications (1)

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EP1899248A2 true EP1899248A2 (fr) 2008-03-19

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EP06753527A Withdrawn EP1899248A2 (fr) 2005-05-20 2006-05-09 Procede d'individualisation d'elements empiles en forme de disque et dispositif d'individualisation

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EP (1) EP1899248A2 (fr)
DE (1) DE102005045583A1 (fr)
WO (1) WO2006122677A2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080213079A1 (en) * 2006-07-06 2008-09-04 Richard Herter Apparatus and Method for Separating and Transporting Substrates
DE502006001352D1 (de) * 2006-12-15 2008-09-25 Rena Sondermaschinen Gmbh Vorrichtung und Verfahren zum Vereinzeln und Transportieren von Substraten
WO2011063987A1 (fr) * 2009-11-30 2011-06-03 Amb Apparate + Maschinenbau Gmbh Procédé et dispositif pour séparer des éléments en forme de plaquettes adhérant l'un à l'autre
DE102010052987A1 (de) * 2009-11-30 2011-06-01 Amb Apparate + Maschinenbau Gmbh Vereinzelungsvorrichtung

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Publication number Priority date Publication date Assignee Title
DE589202C (de) * 1932-11-23 1933-12-07 Laube Kurt Maschf Stapel und Anlegevorrichtung fuer Werkstuecke an Kartonnagenmaschinen
CA1046095A (fr) * 1976-06-18 1979-01-09 Rengo Kabushiki Kaisha (Rengo Co., Ltd.) Dispositif d'inclinaison et d'avance pour la manutention automatique d'ebauches
DE3001620A1 (de) * 1980-01-17 1981-09-10 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zum vereinzeln aus haeufungen plattenfoermiger werkstuecke
JPS5922824A (ja) * 1982-07-28 1984-02-06 Natl House Ind Co Ltd 解裁装置
DD238027B1 (de) * 1985-06-03 1991-03-28 Inst Fuer Grafische Technik Vorrichtung zum vereinzeln steifer unebener platten
CH677778A5 (fr) * 1988-03-14 1991-06-28 Ferag Ag
WO1991015416A1 (fr) * 1990-04-07 1991-10-17 David Sarnoff Research Center, Inc. Appareil de separation individuelle de courrier de forme aplatie
US5297785A (en) * 1992-08-28 1994-03-29 Bell & Howell Phillipsburg Company Pre-feed shingling device for flat-article feeder
DE4334129A1 (de) * 1993-10-07 1995-04-13 Hoechst Ceram Tec Ag Vorrichtung zum Vereinzeln gestapelter, flacher, ebener, keramischer Körper
SI9800005A (sl) * 1998-01-13 1999-08-31 Trimo D.D. Postopek in naprava za podajanje polnil iz mineralne volne ali drugih izolacijskih materialov v obliki plošč

Non-Patent Citations (1)

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See references of WO2006122677A3 *

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DE102005045583A1 (de) 2006-11-23
WO2006122677A2 (fr) 2006-11-23

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