EP1783901A2 - Akustisches Oberflächenwellenbauelement - Google Patents

Akustisches Oberflächenwellenbauelement Download PDF

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Publication number
EP1783901A2
EP1783901A2 EP06251897A EP06251897A EP1783901A2 EP 1783901 A2 EP1783901 A2 EP 1783901A2 EP 06251897 A EP06251897 A EP 06251897A EP 06251897 A EP06251897 A EP 06251897A EP 1783901 A2 EP1783901 A2 EP 1783901A2
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EP
European Patent Office
Prior art keywords
acoustic wave
surface acoustic
electrode
comb
input
Prior art date
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Granted
Application number
EP06251897A
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English (en)
French (fr)
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EP1783901B1 (de
EP1783901A3 (de
Inventor
Toshio c/o Fujitsu Media Devices Ltd. Nishizawa
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Taiyo Yuden Co Ltd
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Fujitsu Media Devices Ltd
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Publication date
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Publication of EP1783901A2 publication Critical patent/EP1783901A2/de
Publication of EP1783901A3 publication Critical patent/EP1783901A3/de
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Publication of EP1783901B1 publication Critical patent/EP1783901B1/de
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
    • H03H9/1071—Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the SAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/0023—Balance-unbalance or balance-balance networks
    • H03H9/0028—Balance-unbalance or balance-balance networks using surface acoustic wave devices
    • H03H9/0047—Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks
    • H03H9/0052—Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks being electrically cascaded
    • H03H9/0057—Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks being electrically cascaded the balanced terminals being on the same side of the tracks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02874—Means for compensation or elimination of undesirable effects of direct coupling between input and output transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6436—Coupled resonator filters having one acoustic track only
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/644—Coupled resonator filters having two acoustic tracks
    • H03H9/6456—Coupled resonator filters having two acoustic tracks being electrically coupled
    • H03H9/6459—Coupled resonator filters having two acoustic tracks being electrically coupled via one connecting electrode
    • H03H9/6463—Coupled resonator filters having two acoustic tracks being electrically coupled via one connecting electrode the tracks being electrically cascaded

Definitions

  • the present invention relates to a flip-chip-mounted surface acoustic wave device capable of downsizing.
  • a transmission (Tx) filter and a reception (Rx) filter constituting the function of an antenna duplexer having a role of isolating a transmission (Tx: 1,850 to 1,910MHz) signal and a reception (Rx: 1,930 to 1, 990MHz) signal from each other, are constituted of SAW devices.
  • the above transmission (Tx) filter and the reception (Rx) filter are band-pass filters and are constituted of, for example, as described in Japanese Patent Application Laid-Open Publication No. 2004-194269 , a combination of multiple (double) -mode SAW filters (DMS) having a plurality of (two) resonance modes by utilizing a plurality of (two) standing waves generated between reflecting electrodes.
  • DMS multiple (double) -mode SAW filters
  • an IDT (interdigital transducer) pattern as described in Japanese Patent Application Laid-Open Publication No. 2004-194269 as an example and shown in Fig. 1 is formed on a piezoelectric element (piezoelectric substrate) not shown such as LiTaO 3 , LiNbO 3 , Li 2 B 4 O 7 or crystal.
  • the IDT pattern formed on a piezoelectric element has 1 (one) input (output) IDT1 and 2 (two) outputs (inputs) IDT2a and 2b arranged alternately, and grating-type reflectors 3a and 3b positioned in the propagation direction of the surface acoustic wave on both sides sandwiching those input and outputs.
  • a characteristic of the IDT pattern shown in Fig. 1 is that the terminal IN (OUT) of the input (output) IDT1 and the terminal OUT (IN) connected commonly with the 2 (two) outputs (inputs) IDT2a and 2b are arranged on the same side.
  • the filter is constituted by connecting a plurality of IDT patterns in parallel or in series (in a cascade) in response to a desired filter performance that is aimed at.
  • Fig. 2 is a plan view of a double-mode SAW filter (DMS) which includes 3 (three) parallel-cascade-connected units, employing the IDT pattern shown in Fig. 1 as a unit, and 3 (three) unit IDT patterns are connected in parallel cascades on a piezoelectric element 10.
  • DMS double-mode SAW filter
  • Fig. 3 is a sectional view of a surface acoustic wave (SAW) device formed with a double-mode SAW filter (DMS) having the IDT pattern shown in Fig. 2, housed in a package.
  • SAW surface acoustic wave
  • DMS double-mode SAW filter
  • the IDT patterns are formed on the piezoelectric element 10 and the input terminal IN and the output terminal OUT and GND are connected with terminals on the ceramic package 11 side with bonding wires 13.
  • a metal cap 14 is adhered over the interior of the ceramic package 11 leaving a spacing or gap larger than a predetermined spacing between the IDT pattern and the cap 14 itself.
  • the surface acoustic wave device has a limitation on its downsizing because the bonding wires 13 need a spacing larger than a predetermined spacing between the metal cap 14 and the IDT patterns. Therefore, instead of a configuration where the double-mode SAW filter (DMS) is connected with the terminals on the ceramic package side with the bonding wires 13, a configuration can be envisaged, where the double-mode SAW filter (DMS) is connected with the terminals on the ceramic package side via a flip-chip connection.
  • DMS double-mode SAW filter
  • Fig. 4 is a sectional view of an exemplary configuration envisaged when the double-mode SAW filter having the IDT patterns shown in Fig. 2 is mounted on a ceramic package with flip-chip connection.
  • Grounded terminals GND, an input terminal IN and an output terminal OUT are formed on the ceramic package 11 side.
  • the grounded terminals GND, the input terminal IN and the output terminal OUT of the IDT pattern on the IDT pattern side are each connected to the grounded terminals GND, the input terminal IN and the output terminal OUT on the ceramic package side such that each of those terminals corresponds to its own counterpart, with the side of the IDT patterns formed on the piezoelectric element 10 of the double-mode SAW filter (DMS) being set facing downward.
  • DMS double-mode SAW filter
  • FIGs. 5A and 5B are graphs showing and comparing the electrical characteristics of the double-mode SAW filter having the same configuration, that is, the double-mode SAW filter having the terminal IN (OUT) of the input (output) IDT1 and the terminal OUT (IN) connected commonly with the 2 (two) outputs (inputs) IDT2a and 2b arranged on the same side, accommodated in the ceramic package with wire bonding, with the electrical characteristics of the double-mode SAW filter accommodated in another ceramic package with flip-chip bonding.
  • Fig. 5A shows the pass-band characteristics of a receiving filter for guiding a received signal in a duplexer from an antenna to a receiving circuit.
  • the graph, Fig. 5B shows the isolation of the duplexer from the transmitting side to the receiving side.
  • an amount of attenuation equal to or more than 50dB in a transmission band is required. 55dB is required as the standard value for isolation in a transmission band.
  • a attenuation characteristics II outside the pass-bands from antenna to receiving side of the duplexer obtained when the filter is accommodated in a ceramic package with flip-chip bonding is degraded compared to an attenuation characteristics I in the case where the filter is accommodated with wire bonding, and has a region which does not satisfy the amount of attenuation equal to or more than 50dB.
  • an isolation II from the transmission side to the receiving side of the duplexer obtained when the filter is accommodated in a ceramic package with flip-chip bonding has, compared to the case I with wire bonding, a region which does not satisfy the standard value of 55dB for isolation.
  • the cause of the degradation of the electrical characteristics of the double-mode SAW filter in the case of flip-chip bonding is considered to be that the spacing between the input terminal and the output terminal in the ceramic package is too narrow when the double-mode SAW filter is accommodated in the ceramic package with flip-chip bonding and, thereby, capacitance between the input terminal and the output terminal becomes large.
  • the inventors measured the pass band characteristics of a double-mode SAW filter which has, as shown in Fig. 6, a wider spacing between the IN (OUT) terminal and the OUT (IN) terminal, and a GND pattern 4 formed in an area not limited to the surface layer and the internal layer of the ceramic package such that the GND pattern 4 corresponds to an area between the IN (OUT) terminal and the OUT (IN) terminal of the IDT pattern, compared to the IDT pattern in Fig. 1.
  • Fig. 7 is a diagram showing a terminal pattern on the ceramic package side corresponding to the IDT pattern of Fig. 6.
  • the spacing between the IN (OUT) terminal and the OUT (IN) terminal is widened such that a grounding GND line (Line) can be formed in the spacing.
  • the IN (OUT) terminal and the OUT (IN) terminal are separated by the GND pattern 4 and, therefore, the corresponding coupling capacity formed between the input terminal and the output terminal can be reduced.
  • Fig. 8 is a graph of the pass band characteristics showing the effect of the reduction of the coupling capacity formed between the input terminal and the output terminal due to the above GND pattern 4.
  • an amount of attenuation out of the pass band can be made larger in the direction of the arrows due to the reduction of the coupling capacity formed between the input terminal and the output terminal.
  • Embodiments of the present invention can provide a surface acoustic wave device having a characteristic layout of the arrangement of the input terminal and the output terminal, that avoids the above problems in order to obtain excellent filter performance and prevents the device configuration from becoming large in area
  • a surface acoustic wave device comprising a surface acoustic wave filter having a comb-shaped electrode pattern formed on a piezoelectric element, with electrode terminals for input and output of the surface acoustic wave filter connected with corresponding electrode patterns of a package through bumps, wherein the comb-shaped electrode pattern has a pair of reflective electrodes, and an input comb-shaped electrode and an outputcomb-shapedelectrode disposed between the pair of reflective electrodes, and wherein an electrode terminal of one of the input comb-shaped electrode and the output comb-shaped electrode is positioned opposite to an electrode terminal of the other comb-shaped electrode with a ground electrode disposed therebetween using a routing pattern.
  • the surface acoustic wave filter may be a multi-mode surface acoustic wave filter that uses a surface acoustic wave excited between the reflective electrodes and utilizes a plurality of standing waves generated between the reflective electrodes.
  • a surface acoustic wave device comprising first and second surface acoustic wave filters each having a comb-shaped electrode pattern formed on a piezoelectric element, the first and the second acoustic wave filters connected with each other in a cascade, with electrode terminals for input and output of the surface acoustic wave filters connected with corresponding electrode patterns of a package through bumps, wherein the comb-shaped electrode patterns of the first and the second surface acoustic wave filters each have a pair of reflective electrodes, and an input comb-shaped electrode and an output comb-shaped electrode disposed between the pair of reflective electrodes, wherein electrode terminals of the input and the output comb-shaped electrodes are drawn out from the same side for each of the first and the second surface acoustic wave filters, and wherein the electrode terminal of the output (or input) comb-shaped electrode of the first surface acoustic wave filter is connected with the electrode terminal of the input (or output) comb-
  • a surface acoustic wave device comprising first and second surface acoustic wave filters connected with each other in a cascade, with electrode terminals for input and output of the surface acoustic wave filters connected with corresponding electrode patterns of a package through bumps, wherein the comb-shaped electrode patterns of the first and the second surface acoustic wave filters each have a pair of reflective electrodes, and an input comb-shaped electrode and an output comb-shaped electrode disposed between the pair of reflective electrodes, wherein electrode terminals of the input and the output comb-shaped electrodes are drawn from the same side for each of the first and the second surface acoustic wave filters, and wherein the electrode terminal of the output (or input) comb-shaped electrode of the first surface acoustic wave filter is connected with the electrode terminal of the input (or output) comb-shaped electrode of the second surface acoustic wave filter using a routing pattern, with a grounded terminal of the first surface acoustic
  • the comb-shaped electrode pattern may be arranged to connect in series filters that are formed by dividing a filter into two such that a desired impedance can be obtained.
  • the electrode pattern of at least one surface acoustic wave filter of the first and the second surface acoustic wave filter may be arranged to connect in series filters that are formed by dividing a filter into two such that a desired impedance can be obtained.
  • the surface acoustic wave device may further comprise a plurality of the surface acoustic wave filters connected in parallel.
  • the input (or output) terminal of the surface acoustic wave filter may be a balancing input (or output).
  • An electrode pattern of the package may be an inductance component constituting the filter.
  • the grounding pattern may be formed between an electrode pattern for transmission (Tx) signal connected with the transmission filter and an electrode pattern for reception (Rx) signal connected with the reception filter in the package.
  • the coupling capacity formed between the input terminal and the output terminal of the package can be reduced, that is, the coupling capacity formed between the input terminal and the output terminal of the surface acoustic wave device itself can be reduced.
  • Figs. 9A and 9B are diagrams showing a first embodiment of a basic IDT pattern of a double-mode SAW filter according to the present invention. As described above, such an IDT pattern is formed on a piezoelectric element and a filter is constituted. The filter is accommodated in a ceramic package and a surface acoustic wave device is formed.
  • Fig. 9A shows an IDT pattern of the first embodiment and Fig. 9B shows the arrangement of the electrodes on the ceramic package side for flip-chip mounting.
  • a characteristic of the basic IDT pattern of a double-mode SAW filter shown in Fig. 9A is that, compared to the IDT pattern of Fig. 1, the input IN (or the output OUT) terminal and the output OUT (or input) terminal are disposed opposite to each other sandwiching the grounding GND terminal.
  • a terminal arrangement on the ceramic package side corresponding to the above arrangement is shown in Fig. 9B.
  • the input IN terminal and the output OUT terminal are separated from each other using the grounding GND terminal, due to the reduction of the coupling capacity formed between the input terminal and the output terminal as shown in Fig. 8 above, improvement of the attenuation outside the pass band is enabled. Because the grounding GND terminal which separates the input IN terminal and output OUT terminal from each other is the GND terminal of the basic IDT pattern itself, no space for providing any additional GND terminal is necessary. Therefore, the device configuration can be prevented from spreading out in a plane.
  • forming a routing pattern 5 is necessary in order to dispose the input IN terminal on the opposite side to the output OUT terminal sandwiching the grounding GND terminal.
  • reducing the value of resistance by forming the pattern 5 at least with a thick film is desirable.
  • Figs. 10A and 10B show a second embodiment.
  • Fig. 10A shows an IDT pattern and
  • Fig. 10B shows an electrode arrangement on the side of a ceramic package for flip-chip mounting.
  • a multi-mode SAW filter (F1) in the former stage and another multi-mode SAW filter (F2) in the latter stage are connected in a cascade.
  • An output terminal of the former-stage multi-mode SAW filter (F1) is connected with an input terminal of the latter-stage multi-mode SAW filter (F2) using the routing pattern 5.
  • the arrangement of the input terminal and the output terminal is inversed compared to the first embodiment of Fig. 9A.
  • a grounding GND terminal of the latter-stage multi-mode SAW filter (F2) is disposed between the input IN terminal of the former-stage multi-mode SAW filter (F1) and the output OUT terminal of the latter-stage multi-mode SAW filter (F2). Therefore, disposing the grounding GND terminal between the input and the output terminals in a surface acoustic wave device is enabled without expanding the space in a plane (area of the device).
  • Figs. 11A and 11B show a third embodiment.
  • Fig. 11A shows an IDT pattern and
  • Fig. 11B shows an electrode arrangement on the side of a ceramic package for flip-chip mounting.
  • IDT patterns of a former-stage multi-mode SAW filter (F1) and a latter-stage multi-mode SAW filter (F2) are the same as the pattern of the embodiment of Fig. 9, one of the patterns is inversed and the patterns are connected in a cascade using the routing pattern 5 with grounded terminals GND1 and GND2 disposed back to back.
  • the input IN terminal of the former-stage multi-mode SAW filter (F1) and the output OUT terminal of the latter-stage multi-mode SAW filter (F2) are strictly separated from each other by the first grounded terminal GND1 and the second grounded terminal GND2. Therefore, the degradation of the filter performance due to the capacitance formed between the input terminal and the output terminal can be fully avoided.
  • Figs. 12A and 12B show a fourth embodiment.
  • Fig. 12A shows an IDT pattern and
  • Fig. 12B shows an electrode arrangement on the side of a ceramic package for flip-chip mounting.
  • This embodiment is arranged to connect a first and a second multi-mode SAW filters Fa and Fb in series such that the combined impedance of the impedances of the first and the second filters Fa and Fb is a desired impedance (for example, 50 ⁇ ).
  • an output OUT terminal is disposed oppositely to an input IN terminal using the routing pattern 5.
  • this surface acoustic wave device when this surface acoustic wave device is applied as a receiving filter of a duplexer or an antenna filter, as described in Japanese Patent Application Publication Nos. 2004-252644 and 2005-130988 , because the voltage applied to the IDTs is dispersed due to the serial connection of a plurality of stages and the excitation intensity of the surface acoustic wave per unit area is decreased due to the expansion of the area of the IDT, cross modulation can be suppressed. Due to the dispersion of the voltage applied to the IDT, electrostatic discharge (ESD) and power durability can be improved.
  • ESD electrostatic discharge
  • Figs. 13A and 13B show a fifth embodiment.
  • Fig. 13A shows an IDT pattern and
  • Fig. 13B shows an electrode arrangement on the side of a ceramic package for flip-chip mounting.
  • the fourth embodiment is applied as the former-stage multi-mode SAW filter in the second embodiment.
  • the output of the former-stage multi-mode SAW filter (F1) is connected with the routing pattern 5 of the latter-stage multi-mode SAW filter (F2).
  • the coupling capacity formed between the input terminal and the output terminal can be reduced by disposing the grounding GND terminal of the latter-stage multi-mode SAW filter (F2) between the input IN terminal and the output OUT terminal. Since the former-stage multi-mode SAW filter (F1) is same as that of the fourth embodiment, the excitation intensity of the surface acoustic wave per unit area is decreased due to the expansion of the area of the IDT and, therefore, an effect that the level of cross modulation is suppressed can be obtained.
  • Figs. 14A and 14B show a sixth embodiment.
  • Fig. 14A shows an IDT pattern and
  • Fig. 14B shows an electrode arrangement on the side of a ceramic package for flip-chip mounting.
  • This embodiment is arranged to connect a plurality of structures shown in the fifth embodiment in parallel.
  • an electric current can be dispersed by parallel connection.
  • improvement of the power durability can be expected.
  • Fig. 14A as the embodiment, four (4) former-stage multi-mode SAW filters (F1) are arranged to be parallel and three latter-stage multi-mode SAW filter (F2) are arranged to be parallel such that the number of the filters at the former stage and that of the latter stage differ from each other. However, the numbers may be equal.
  • Fig. 14B showing the electrode arrangement on the ceramic package side is same as Fig. 13B showing the electrode arrangement on the ceramic package side in the fifth embodiment.
  • Figs. 15A and 15B show a seventh embodiment.
  • Fig. 15A shows an IDT pattern and
  • Fig. 15B shows an electrode arrangement on the side of a ceramic package for flip-chip mounting.
  • This embodiment is an example of a configuration arranged to connect the multi-mode SAW filters (F1, F2) in a cascade.
  • a grounding GND pattern GND2
  • the insertion loss and the steepness (shape factor) of the rises between the transmission Tx band and the receiving Rx band are significantly degraded.
  • an input and output IDTs are arranged to be drawn out from the same side as the former-stage multi-mode SAW filter (F1). Thereby, the degradation of the insertion loss and the shape factor can be prevented and the coupling capacity formed between the input terminal and the output terminal of the surface acoustic wave device can be reduced.
  • Figs. 16A and 16B show a eighth embodiment.
  • Fig. 16A shows an IDT pattern and
  • Fig. 16B shows an electrode arrangement on the side of a ceramic package for flip-chip mounting.
  • FIG. 17A and 17B corresponds to the sixth embodiment shown in Figs. 14A and 14B and is an exemplary conventional configuration with a latter-stage multi-mode SAW filter (F2) not employing the present invention.
  • Fig. 17A shows an IDT pattern and
  • Fig. 17B shows an electrode arrangement on the side of a ceramic package for flip-chip mounting.
  • Fig. 18A shows an exemplary configuration of a duplexer.
  • Fig. 18B shows the characteristics of isolation between a transmission signal and a reception signal of the sixth embodiment according to the present invention and of an example which employs the comparative example as a receiving (Rx) filter of a PCS duplexer.
  • a duplexer arranged to have the transmitting Tx and receiving Rx filters 20 and 30 in a same package, in addition to the suppressing of C AR , suppressing of C TR is effective on the transmission (Tx) band isolation characteristics. Therefore, providing a grounding GND pattern between a transmission Tx and reception Rx in a package is desirable.
  • the grounding GND pattern effective on the reduction of C AR is used as the grounding GND pattern for the receiving (Rx) filter 30.
  • This pattern surely can also be used as a pattern for the transmission (Tx) filter 20, however, is not used commonly.
  • the grounding GND pattern provided between the pattern for the transmitting (Tx) filter 20 and the pattern for the receiving (Rx) filter 30, that is effective on the reduction of C TR is provided with a grounding GND pattern for the receiving (Rx) filter 30 and a grounding GND pattern for the transmitting (Tx) filter 20, and these patterns are also not used commonly.
  • Fig. 19A shows a block diagram of an exemplary configuration of a PCS receiving filter.
  • Fig. 19B shows a electrical characteristics obtained when the values of ground GND inductances L 1 to L 5 (Korean PCS receiving filter) of the ceramic package 10 in the sixth embodiment shown in Figs. 14A and 14B are varied. Because the rejection band can be drifted by varying the ground GND inductances, an amount of attenuation can be secured even when the width of transition between the transmission Tx band and the reception Rx band is varied (even when the system is changed).

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
EP06251897.2A 2005-10-26 2006-04-04 Akustisches Oberflächenwellenbauelement Not-in-force EP1783901B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005310901A JP4294632B2 (ja) 2005-10-26 2005-10-26 弾性表面波装置

Publications (3)

Publication Number Publication Date
EP1783901A2 true EP1783901A2 (de) 2007-05-09
EP1783901A3 EP1783901A3 (de) 2008-01-23
EP1783901B1 EP1783901B1 (de) 2016-06-08

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EP06251897.2A Not-in-force EP1783901B1 (de) 2005-10-26 2006-04-04 Akustisches Oberflächenwellenbauelement

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US (1) US7515017B2 (de)
EP (1) EP1783901B1 (de)
JP (1) JP4294632B2 (de)
CN (1) CN1956325B (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5865718B2 (ja) * 2012-01-26 2016-02-17 太陽誘電株式会社 フィルタ回路
JP5673897B2 (ja) 2012-08-02 2015-02-18 株式会社村田製作所 弾性波装置及び分波装置
US9246533B2 (en) 2012-10-18 2016-01-26 Skyworks Panasonic Filter Solutions Japan Co., Ltd. Electronic device including filter
US10515910B2 (en) 2014-11-07 2019-12-24 Infineon Technologies Ag Semiconductor device having a porous metal layer and an electronic device having the same
KR102443568B1 (ko) * 2015-08-05 2022-09-16 가부시키가이샤 와이솔재팬 탄성 표면파 장치
KR102432680B1 (ko) * 2015-08-05 2022-08-16 가부시키가이샤 와이솔재팬 탄성 표면파 장치
JP6668213B2 (ja) 2015-10-01 2020-03-18 スカイワークスフィルターソリューションズジャパン株式会社 分波器と通信機器
US10404234B2 (en) 2016-09-02 2019-09-03 Skyworks Filter Solutions Japan Co., Ltd. Filter device with phase compensation, and electronic devices including same
US10476482B2 (en) 2016-11-29 2019-11-12 Skyworks Solutions, Inc. Filters including loop circuits for phase cancellation
US11038487B2 (en) 2018-07-18 2021-06-15 Skyworks Solutions, Inc. FBAR filter with integrated cancelation circuit
DE102020122065B4 (de) * 2020-08-24 2022-12-01 Te Connectivity Germany Gmbh Kontaktanordnung mit einer Messvorrichtung zum Erfassen eines Kontaktierungszustands der Kontaktanordnung mittels eines akustischen Signals
WO2023021949A1 (ja) * 2021-08-19 2023-02-23 株式会社村田製作所 弾性波フィルタ装置及び複合フィルタ装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002231849A (ja) 2001-01-30 2002-08-16 Nec Corp 高周波装置
EP1237275A2 (de) 2001-03-01 2002-09-04 Murata Manufacturing Co., Ltd. Akustische Oberflächenwellen- und Kommunikationsvorrichtung
EP1289136A2 (de) 2001-08-09 2003-03-05 Murata Manufacturing Co., Ltd. Akustisches Oberflächenwellenfilter und Kommunikationsvorrichtung
JP2003078385A (ja) 2001-08-31 2003-03-14 Kyocera Corp 弾性表面波装置
US20040251776A1 (en) 2002-04-10 2004-12-16 Maurata Manufacturing Co., Ltd. Surface acoustic wave device and communication device incorporating same

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57119509A (en) * 1981-01-19 1982-07-26 Toshiba Corp Surface acoustic wave resonator
JPH09205342A (ja) * 1996-01-26 1997-08-05 Matsushita Electric Ind Co Ltd 弾性表面波フィルタ
JP2892993B2 (ja) 1996-09-30 1999-05-17 株式会社日立製作所 弾性表面波装置
DE19724259C2 (de) 1997-06-09 2002-11-14 Epcos Ag Dualmode-Oberflächenwellenfilter
JPH11122072A (ja) 1997-10-14 1999-04-30 Fujitsu Ltd 弾性表面波装置
JP3266846B2 (ja) * 1998-01-20 2002-03-18 東洋通信機株式会社 反射反転型弾性表面波変換器及びフィルタ
JP2001267881A (ja) * 2000-03-17 2001-09-28 Fujitsu Media Device Kk 弾性表面波デバイス及びこれを用いた通信装置、並びにアンテナデュプレクサ
JP2002141771A (ja) 2000-08-21 2002-05-17 Murata Mfg Co Ltd 弾性表面波フィルタ装置
JP3478260B2 (ja) * 2000-10-27 2003-12-15 株式会社村田製作所 弾性表面波フィルタおよび通信機装置
US6828879B2 (en) * 2001-02-16 2004-12-07 Sanyo Electric Co., Ltd. Longitudinal coupled multiple mode surface acoustic wave filter
EP1263137B1 (de) * 2001-05-31 2017-07-26 Skyworks Filter Solutions Japan Co., Ltd. Akustisches Oberflächenwellenfilter, symmetrisches Filter und Kommunikationsgerät
JP4049612B2 (ja) 2002-04-19 2008-02-20 富士通メディアデバイス株式会社 弾性表面波装置
JP3764731B2 (ja) * 2002-10-18 2006-04-12 富士通メディアデバイス株式会社 多重モード弾性表面波フィルタ及び分波器
JP2004251776A (ja) 2003-02-20 2004-09-09 Inax Corp 光測距式センサ
JP2004304513A (ja) * 2003-03-31 2004-10-28 Matsushita Electric Ind Co Ltd 弾性表面波装置
DE10325798B4 (de) * 2003-06-06 2015-06-18 Epcos Ag SAW-Filter mit verbesserter Selektion oder Isolation
JP4291115B2 (ja) * 2003-11-21 2009-07-08 富士通メディアデバイス株式会社 弾性表面波フィルタ及びそれを用いた無線装置
JP2005277522A (ja) 2004-03-23 2005-10-06 Tdk Corp 電子部品
JP3993579B2 (ja) * 2004-04-28 2007-10-17 富士通メディアデバイス株式会社 バランス出力型フィルタ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002231849A (ja) 2001-01-30 2002-08-16 Nec Corp 高周波装置
EP1237275A2 (de) 2001-03-01 2002-09-04 Murata Manufacturing Co., Ltd. Akustische Oberflächenwellen- und Kommunikationsvorrichtung
EP1289136A2 (de) 2001-08-09 2003-03-05 Murata Manufacturing Co., Ltd. Akustisches Oberflächenwellenfilter und Kommunikationsvorrichtung
JP2003078385A (ja) 2001-08-31 2003-03-14 Kyocera Corp 弾性表面波装置
US20040251776A1 (en) 2002-04-10 2004-12-16 Maurata Manufacturing Co., Ltd. Surface acoustic wave device and communication device incorporating same

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EP1783901B1 (de) 2016-06-08
JP2007124085A (ja) 2007-05-17
CN1956325B (zh) 2010-05-12
EP1783901A3 (de) 2008-01-23
US20070090895A1 (en) 2007-04-26
JP4294632B2 (ja) 2009-07-15
CN1956325A (zh) 2007-05-02
US7515017B2 (en) 2009-04-07

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