EP1783809A3 - Tube à rayons X aux foyer nanometrique - Google Patents

Tube à rayons X aux foyer nanometrique Download PDF

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Publication number
EP1783809A3
EP1783809A3 EP06022475A EP06022475A EP1783809A3 EP 1783809 A3 EP1783809 A3 EP 1783809A3 EP 06022475 A EP06022475 A EP 06022475A EP 06022475 A EP06022475 A EP 06022475A EP 1783809 A3 EP1783809 A3 EP 1783809A3
Authority
EP
European Patent Office
Prior art keywords
target
ray tube
nanofocus
electron beam
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06022475A
Other languages
German (de)
English (en)
Other versions
EP1783809A2 (fr
Inventor
Alfred Reinhold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Comet GmbH
Original Assignee
Comet GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Comet GmbH filed Critical Comet GmbH
Publication of EP1783809A2 publication Critical patent/EP1783809A2/fr
Publication of EP1783809A3 publication Critical patent/EP1783809A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/083—Bonding or fixing with the support or substrate

Landscapes

  • X-Ray Techniques (AREA)
EP06022475A 2005-11-07 2006-10-27 Tube à rayons X aux foyer nanometrique Withdrawn EP1783809A3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005053386A DE102005053386A1 (de) 2005-11-07 2005-11-07 Nanofocus-Röntgenröhre

Publications (2)

Publication Number Publication Date
EP1783809A2 EP1783809A2 (fr) 2007-05-09
EP1783809A3 true EP1783809A3 (fr) 2008-06-18

Family

ID=37670694

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06022475A Withdrawn EP1783809A3 (fr) 2005-11-07 2006-10-27 Tube à rayons X aux foyer nanometrique

Country Status (6)

Country Link
US (1) US20080089484A1 (fr)
EP (1) EP1783809A3 (fr)
JP (1) JP2007134325A (fr)
KR (1) KR20070049071A (fr)
CN (1) CN1971834A (fr)
DE (1) DE102005053386A1 (fr)

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JP5687001B2 (ja) * 2009-08-31 2015-03-18 浜松ホトニクス株式会社 Ｘ線発生装置
WO2012077445A1 (fr) * 2010-12-10 2012-06-14 Canon Kabushiki Kaisha Appareil de génération de rayonnement et appareil d'imagerie à rayonnement
JP5455880B2 (ja) * 2010-12-10 2014-03-26 キヤノン株式会社 放射線発生管、放射線発生装置ならびに放射線撮影装置
US8831179B2 (en) 2011-04-21 2014-09-09 Carl Zeiss X-ray Microscopy, Inc. X-ray source with selective beam repositioning
JP5871529B2 (ja) 2011-08-31 2016-03-01 キヤノン株式会社 透過型ｘ線発生装置及びそれを用いたｘ線撮影装置
JP5901180B2 (ja) * 2011-08-31 2016-04-06 キヤノン株式会社 透過型ｘ線発生装置及びそれを用いたｘ線撮影装置
US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
CN102610474B (zh) * 2012-03-23 2015-02-25 邓敏 用于x射线管的聚焦型阴极及其x射线源和制备方法
EP2849202A4 (fr) * 2012-05-11 2015-12-30 Hamamatsu Photonics Kk Dispositif et procédé de génération de rayons x
CN104350572B (zh) * 2012-06-14 2016-10-19 西门子公司 X射线辐射源和用于产生x射线辐射的方法
JP6246724B2 (ja) * 2012-09-26 2017-12-13 株式会社ニコン Ｘ線装置、及び構造物の製造方法
CN103413744B (zh) * 2013-07-22 2016-03-09 西北核技术研究所 一种串级式电子束二极管
US10297359B2 (en) 2013-09-19 2019-05-21 Sigray, Inc. X-ray illumination system with multiple target microstructures
US9448190B2 (en) 2014-06-06 2016-09-20 Sigray, Inc. High brightness X-ray absorption spectroscopy system
US9570265B1 (en) 2013-12-05 2017-02-14 Sigray, Inc. X-ray fluorescence system with high flux and high flux density
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US10269528B2 (en) 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
US9449781B2 (en) 2013-12-05 2016-09-20 Sigray, Inc. X-ray illuminators with high flux and high flux density
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
US9823203B2 (en) 2014-02-28 2017-11-21 Sigray, Inc. X-ray surface analysis and measurement apparatus
US9594036B2 (en) 2014-02-28 2017-03-14 Sigray, Inc. X-ray surface analysis and measurement apparatus
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
CN104409304B (zh) * 2014-11-17 2017-01-11 中国科学院电工研究所 一种工业ct机x射线管用透射靶及其制备方法
US10352880B2 (en) 2015-04-29 2019-07-16 Sigray, Inc. Method and apparatus for x-ray microscopy
US10295486B2 (en) 2015-08-18 2019-05-21 Sigray, Inc. Detector for X-rays with high spatial and high spectral resolution
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
JP6937380B2 (ja) 2017-03-22 2021-09-22 シグレイ、インコーポレイテッド Ｘ線分光を実施するための方法およびｘ線吸収分光システム
CN109243947B (zh) * 2017-07-11 2023-05-02 Fei 公司 用于x射线生成的薄片状靶
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
US10989822B2 (en) 2018-06-04 2021-04-27 Sigray, Inc. Wavelength dispersive x-ray spectrometer
GB2591630B (en) 2018-07-26 2023-05-24 Sigray Inc High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
US10962491B2 (en) 2018-09-04 2021-03-30 Sigray, Inc. System and method for x-ray fluorescence with filtering
DE112019004478T5 (de) 2018-09-07 2021-07-08 Sigray, Inc. System und verfahren zur röntgenanalyse mit wählbarer tiefe
CN109585244B (zh) * 2018-10-23 2021-09-14 中国科学院电工研究所 高功率密度的电子束聚焦装置
WO2020122257A1 (fr) * 2018-12-14 2020-06-18 株式会社堀場製作所 Tube à rayons x et détecteur de rayons x
WO2021011209A1 (fr) 2019-07-15 2021-01-21 Sigray, Inc. Source de rayons x avec anode tournante à pression atmosphérique

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000057449A1 (fr) * 1999-03-23 2000-09-28 Medtronic Ave Inc. Dispositif a rayons x et son procede de fabrication
WO2003081631A1 (fr) * 2002-03-26 2003-10-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Source de rayons x ayant un foyer de petite taille

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5148462A (en) * 1991-04-08 1992-09-15 Moltech Corporation High efficiency X-ray anode sources
US5509046A (en) * 1994-09-06 1996-04-16 Regents Of The University Of California Cooled window for X-rays or charged particles
DE19509516C1 (de) * 1995-03-20 1996-09-26 Medixtec Gmbh Medizinische Ger Mikrofokus-Röntgeneinrichtung
JP2001035428A (ja) * 1999-07-22 2001-02-09 Shimadzu Corp Ｘ線発生装置
GB2385708B (en) * 2000-09-07 2004-11-17 Radi Medical Technologies Ab X-ray tube electrodes

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000057449A1 (fr) * 1999-03-23 2000-09-28 Medtronic Ave Inc. Dispositif a rayons x et son procede de fabrication
WO2003081631A1 (fr) * 2002-03-26 2003-10-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Source de rayons x ayant un foyer de petite taille

Also Published As

Publication number Publication date
KR20070049071A (ko) 2007-05-10
JP2007134325A (ja) 2007-05-31
EP1783809A2 (fr) 2007-05-09
CN1971834A (zh) 2007-05-30
US20080089484A1 (en) 2008-04-17
DE102005053386A1 (de) 2007-05-16

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