EP1783809A3 - Nanofocus x-ray tube - Google Patents

Nanofocus x-ray tube Download PDF

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Publication number
EP1783809A3
EP1783809A3 EP06022475A EP06022475A EP1783809A3 EP 1783809 A3 EP1783809 A3 EP 1783809A3 EP 06022475 A EP06022475 A EP 06022475A EP 06022475 A EP06022475 A EP 06022475A EP 1783809 A3 EP1783809 A3 EP 1783809A3
Authority
EP
European Patent Office
Prior art keywords
target
ray tube
nanofocus
electron beam
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06022475A
Other languages
German (de)
French (fr)
Other versions
EP1783809A2 (en
Inventor
Alfred Reinhold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Comet GmbH
Original Assignee
Comet GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Comet GmbH filed Critical Comet GmbH
Publication of EP1783809A2 publication Critical patent/EP1783809A2/en
Publication of EP1783809A3 publication Critical patent/EP1783809A3/en
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/083—Bonding or fixing with the support or substrate

Abstract

Eine erfindungsgemäße Nanofocus-Röntgenröhre (20) weist ein Target (4) und Mittel zum Richten eines Elektronenstrahles (28) auf das Target (4) auf. Erfindungsgemäß weist das Target (4) wenigstens ein aus einem Targetmaterial bestehendes Targetelement (22,24,26) zur Emission von Röntgenstrahlung auf, das durch eine mittels eines Mikrostrukturierungsverfahrens auf einem aus einem Trägermaterial bestehenden Trägerelement (4) gebildete Nanostruktur mit einem Durchmesser ≤ etwa 1.000 nm gebildet ist, wobei das Targetelement (6,22,24,26) das Trägerelement (4) nur teilweise bedeckt und wobei bei Betrieb der Röntgenröhre (20) der Querschnitt des Elektronenstrahles derart größer als der Querschnitt des Targetelementes (6 bzw. 22 bzw. 24 bzw. 26) gewählt ist, daß der Elektronenstrahl (28) das Targetelement (6 bzw. 22 bzw. 24 bzw. 26) stets vollflächig bestrahlt. Erfindungsgemäß ist oder enthält das Trägermaterial Diamant, der zur Erhöhung der elektrischen Leitfähigkeit dotiert ist.

Figure imgaf001
A nanofocus X-ray tube (20) according to the invention has a target (4) and means for directing an electron beam (28) onto the target (4). According to the invention, the target (4) has at least one target element (22, 24, 26) consisting of a target material for emitting X-radiation, which is formed by a nanostructure with a diameter ≦ approximately by means of a microstructuring method on a carrier element (4) made of a carrier material 1000 nm, wherein the target element (6, 22, 24, 26) only partially covers the carrier element (4) and wherein, during operation of the x-ray tube (20), the cross section of the electron beam is greater than the cross section of the target element (6, 22) or 24 or 26) is selected, that the electron beam (28) always irradiates the target element (6 or 22 or 24 or 26) over the entire surface. According to the invention, the carrier material is or contains diamond, which is doped to increase the electrical conductivity.
Figure imgaf001
EP06022475A 2005-11-07 2006-10-27 Nanofocus x-ray tube Withdrawn EP1783809A3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005053386A DE102005053386A1 (en) 2005-11-07 2005-11-07 NanoFocus X-ray tube

Publications (2)

Publication Number Publication Date
EP1783809A2 EP1783809A2 (en) 2007-05-09
EP1783809A3 true EP1783809A3 (en) 2008-06-18

Family

ID=37670694

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06022475A Withdrawn EP1783809A3 (en) 2005-11-07 2006-10-27 Nanofocus x-ray tube

Country Status (6)

Country Link
US (1) US20080089484A1 (en)
EP (1) EP1783809A3 (en)
JP (1) JP2007134325A (en)
KR (1) KR20070049071A (en)
CN (1) CN1971834A (en)
DE (1) DE102005053386A1 (en)

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CN103250225B (en) * 2010-12-10 2016-05-25 佳能株式会社 Radioactive ray generation device and radiation imaging apparatus
JP5455880B2 (en) * 2010-12-10 2014-03-26 キヤノン株式会社 Radiation generating tube, radiation generating apparatus and radiographic apparatus
US8831179B2 (en) 2011-04-21 2014-09-09 Carl Zeiss X-ray Microscopy, Inc. X-ray source with selective beam repositioning
JP5901180B2 (en) 2011-08-31 2016-04-06 キヤノン株式会社 Transmission X-ray generator and X-ray imaging apparatus using the same
JP5871529B2 (en) 2011-08-31 2016-03-01 キヤノン株式会社 Transmission X-ray generator and X-ray imaging apparatus using the same
US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
CN102610474B (en) * 2012-03-23 2015-02-25 邓敏 Focusing cathode for X-ray tube, X-ray source of focusing cathode and preparation method
JP6224580B2 (en) * 2012-05-11 2017-11-01 浜松ホトニクス株式会社 X-ray generator and X-ray generation method
CN104350572B (en) * 2012-06-14 2016-10-19 西门子公司 X-ray radiation source and the method being used for producing X-radiation
EP4295970A3 (en) * 2012-09-26 2024-03-27 Nikon Corporation X-ray device and structure manufacturing method
CN103413744B (en) * 2013-07-22 2016-03-09 西北核技术研究所 A kind of Cascade-stage-type electron beam diode
US9449781B2 (en) 2013-12-05 2016-09-20 Sigray, Inc. X-ray illuminators with high flux and high flux density
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US9570265B1 (en) 2013-12-05 2017-02-14 Sigray, Inc. X-ray fluorescence system with high flux and high flux density
US10269528B2 (en) 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
US9448190B2 (en) 2014-06-06 2016-09-20 Sigray, Inc. High brightness X-ray absorption spectroscopy system
US10297359B2 (en) 2013-09-19 2019-05-21 Sigray, Inc. X-ray illumination system with multiple target microstructures
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US9823203B2 (en) 2014-02-28 2017-11-21 Sigray, Inc. X-ray surface analysis and measurement apparatus
US9594036B2 (en) 2014-02-28 2017-03-14 Sigray, Inc. X-ray surface analysis and measurement apparatus
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
CN104409304B (en) * 2014-11-17 2017-01-11 中国科学院电工研究所 Transmission target for X-ray tube of industrial CT (Computed Tomography) machine and preparation method thereof
US10352880B2 (en) 2015-04-29 2019-07-16 Sigray, Inc. Method and apparatus for x-ray microscopy
US10295486B2 (en) 2015-08-18 2019-05-21 Sigray, Inc. Detector for X-rays with high spatial and high spectral resolution
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
WO2018175570A1 (en) 2017-03-22 2018-09-27 Sigray, Inc. Method of performing x-ray spectroscopy and x-ray absorption spectrometer system
EP3428928A1 (en) * 2017-07-11 2019-01-16 FEI Company Lamella-shaped targets for x-ray generation
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
WO2019236384A1 (en) 2018-06-04 2019-12-12 Sigray, Inc. Wavelength dispersive x-ray spectrometer
US10658145B2 (en) 2018-07-26 2020-05-19 Sigray, Inc. High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
DE112019004433T5 (en) 2018-09-04 2021-05-20 Sigray, Inc. SYSTEM AND PROCEDURE FOR X-RAY FLUORESCENCE WITH FILTERING
CN112823280A (en) 2018-09-07 2021-05-18 斯格瑞公司 System and method for depth-selectable X-ray analysis
CN109585244B (en) * 2018-10-23 2021-09-14 中国科学院电工研究所 High power density electron beam focusing device
WO2020122257A1 (en) * 2018-12-14 2020-06-18 株式会社堀場製作所 X-ray tube and x-ray detector
US11152183B2 (en) 2019-07-15 2021-10-19 Sigray, Inc. X-ray source with rotating anode at atmospheric pressure

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WO2000057449A1 (en) * 1999-03-23 2000-09-28 Medtronic Ave Inc. X-ray device and process for manufacture
WO2003081631A1 (en) * 2002-03-26 2003-10-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. X-ray source having a small focal spot

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Patent Citations (2)

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WO2000057449A1 (en) * 1999-03-23 2000-09-28 Medtronic Ave Inc. X-ray device and process for manufacture
WO2003081631A1 (en) * 2002-03-26 2003-10-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. X-ray source having a small focal spot

Also Published As

Publication number Publication date
JP2007134325A (en) 2007-05-31
KR20070049071A (en) 2007-05-10
EP1783809A2 (en) 2007-05-09
CN1971834A (en) 2007-05-30
US20080089484A1 (en) 2008-04-17
DE102005053386A1 (en) 2007-05-16

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