EP1737758B1 - Flüssigkeitsabgabeverfahren und system mit entfernung von gas aus dem gasraum - Google Patents

Flüssigkeitsabgabeverfahren und system mit entfernung von gas aus dem gasraum Download PDF

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Publication number
EP1737758B1
EP1737758B1 EP05734931A EP05734931A EP1737758B1 EP 1737758 B1 EP1737758 B1 EP 1737758B1 EP 05734931 A EP05734931 A EP 05734931A EP 05734931 A EP05734931 A EP 05734931A EP 1737758 B1 EP1737758 B1 EP 1737758B1
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European Patent Office
Prior art keywords
gas
liquid
inner container
container
headspace
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English (en)
French (fr)
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EP1737758A4 (de
EP1737758A2 (de
Inventor
Kevin T. O'dougherty
Russell F. Oberg
Joseph P. Menning
Gregory B. Eiden
Donald C. Grant
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Advanced Technology Materials Inc
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Advanced Technology Materials Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0255—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers squeezing collapsible or flexible storage containers
    • B67D7/0261—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers squeezing collapsible or flexible storage containers specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D83/00—Containers or packages with special means for dispensing contents

Definitions

  • the present invention relates to a storage and dispensing system for the storage and dispensing of liquids.
  • the present invention relates to a method and system for dispensing liquid to a manufacturing process from a container including a headspace gas.
  • Certain manufacturing processes require the use of liquid chemicals such as acids, solvents, bases, photoresists, dopants, inorganic solutions, organic solutions, biological solutions, pharmaceuticals, and radioactive chemicals.
  • Storage and dispensing systems allow alternative containers to be used to deliver liquid chemicals to a manufacturing process at a specified time. These process liquids are usually dispensed from pressurized storage and dispensing containers by special dispensing pumps.
  • the containers After filling these containers at a filling facility, the containers are typically shipped to a location for use in a manufacturing process. Once at the manufacturing process facility, these containers may be stored for an extended period of time before being connected to a manufacturing process.
  • the purity of some of the above-listed chemicals has a tendency to decay when stored for an extended period of time.
  • the color filter chemical used tends to decay as free radicals in the color filter chemical are released during shipment and storage as a result of temperature fluctuations.
  • an empty portion of the container referred to as the headspace
  • the headspace gas prevents the decay of the liquid chemical by inhibiting chemical reactions from occurring in the liquid during storage.
  • a headspace gas including oxygen is introduced into the container at the filling facility, since oxygen has a tendency to scavenge free radicals in the chemical as they are released, thereby preventing the decay of the color filter chemical.
  • U.S. Patent No. 3,756,367 discloses a hydraulic brake bleeder including a pressure tank housing containing a resilient bladder having a fill inlet port and an outlet port through the housing.
  • the bleeder is pressurized by supplying compressed air to a space in the housing surrounding the bladder.
  • An automatic pressure relief valve and manual thumbscrew operated valve are connected to the chamber within the pressure tank external to the bladder. No sensors are disclosed.
  • brake fluid contained in the bladder is supplied under pressure to a hydraulic brake system connected to the brake bleeder.
  • the present invention is a method and system for dispensing liquid chemical to a manufacturing process from a container including an outer container and an inner container, a portion of the inner container occupied by the liquid chemical, a remainder of the inner container occupied by a headspace gas.
  • the system includes a probe having a flow passage therein insertable into an interior of the inner container, and a gas passage communicating between the interior of the inner container and an exterior of the outer container.
  • the system further includes means in fluid communication with a space between inner walls of the outer container and the inner container for permitting fluid under pressure to flow into the space between the inner walls of the outer container and the inner container to force the headspace gas out of the inner container via the gas passage to a headspace gas drain and to force liquid out of the inner container through the flow passage in the probe to the manufacturing process.
  • the system further includes a drain valve connected between the headspace gas drain and the gas passage.
  • the drain valve has an open position selectable to allow the headspace gas to evacuate to the headspace gas drain via the gas passage.
  • the drain valve also has a closed position selectable when the headspace gas has been, exhausted from the interior of the inner container.
  • the system according to the invention also includes a liquid sensor connected between the gas passage and the headspace gas drain to sense when liquid chemical begins to flow in the gas passage to indicate that the headspace gas has been exhausted from the interior of the inner container.
  • the system also preferably includes an empty detect means for detecting when the liquid chemical has been exhausted from the inner container.
  • the empty detect means is an empty detect gas sensor. In use, a small amount of empty detect gas is introduced to an interior of the inner container immediately prior to dispensing of the liquid chemical to the manufacturing process. The empty detect gas sensor senses this empty detect gas when the liquid chemical has been exhausted from the container. When the empty detect gas is sensed by the empty detect gas sensor, dispensing of liquid to the manufacturing process is terminated.
  • the empty detect means includes a scale for weighing the fluid container while the liquid is dispensed to the manufacturing process such that dispensing of the liquid is terminated when the fluid container reaches a predetermined empty weight as measured by the scale.
  • FIG. 1 is a schematic of system 10 according to a preferred embodiment of the present invention for dispensing liquid 12 to manufacturing process 13 from container 14 including headspace 16 filled with headspace gas 18.
  • Container 16 includes flexible inner container 20 and rigid outer container 22.
  • System 10 further includes compression air or nitrogen supply 30, compression air passage 32, headspace gas passage 34, drain valve 36, liquid sensor 38, headspace gas drain 40, flow passage 42, container scale 44, and system control 46.
  • Compression air supply 30 is connected to compression space 31 (i.e., the space between inner walls of outer container 22 and outer surfaces of the inner container 20) via compression air passage 32.
  • compression space 31 i.e., the space between inner walls of outer container 22 and outer surfaces of the inner container 20
  • compression air passage 32 The interior of inner container 20 is connected to headspace gas drain 40 via gas passage 34. Drain valve 36 and liquid sensor 38 are connected along gas passage 34 between the interior of inner container 20 and headspace gas drain 40. Finally, the interior of inner container 20 is in fluid communication with manufacturing process 13 via flow passage 42.
  • Gas passage 34 and flow passage 42 are preferably combined in a single connector package such that the interior of inner container 20 comes into fluid communication with headspace gas drain 40 and manufacturing process 13 with one connection.
  • Flow passage 42 is typically provided in a probe that is insertable through a port of the container and into inner container 20 to provide fluid communication between liquid 12 and manufacturing process 13.
  • Outer container 22 provides the mechanical support and protection required by flexible inner container 20 (e.g., a flexible polymeric bag) during filling, transport, handling, and dispensing.
  • Outer container 22 is typically constructed of metal, although other materials, including plastic materials, may also be used, depending upon government regulatory specifications for handling of the particular liquid to be contained within container 14.
  • container 14 is a container as shown in U.S. Pat. No. 5,335,821 to Osgar issued on August 9, 1994 , which is herein incorporated by reference.
  • System control 46 which is preferably a microprocessor-based control system, is connected to compression air supply 30, drain valve 36, liquid sensor 38, and container scale 44. System control 46 controls operation of system 10 based upon signals received from the various components of system 10.
  • container 14 Prior to attachment to manufacturing process 13, container 14 is filled at a filling facility. During filling, inner container 20 is first inflated with a gas such as nitrogen. Liquid 12 is then introduced through a port in container 14 to fill inner container 20 within outer container 22.
  • a gas such as nitrogen
  • the purity of some chemicals has a tendency to decay when stored for an extended period of time, especially when subjected to temperature fluctuations.
  • the color filter chemical used tends to decay or cross-link as free radicals in the color filter chemical are released during shipment and storage.
  • headspace 16 is filled with headspace gas 18.
  • Headspace gas 18 prevents the decay of liquid 12 by inhibiting chemical reactions from occurring in liquid 12 during shipment and storage of container 14.
  • a headspace gas 18 including oxygen is introduced into inner container 20 at the filling facility, since oxygen has a tendency to scavenge free radicals in the chemical as they are released, thereby preventing the decay or cross-linking of the color filter chemical.
  • compression air passage 32, gas passage 34, and flow passage 42 are connected to container 14.
  • a signal is then sent by system control 46, which is preferably a microprocessor-based system, to open drain valve 36. This produces a fluidic connection between the interior of inner container 20 and headspace gas drain 40.
  • pressurized fluid preferably compressed air or nitrogen, is supplied to compression space 31 by compression air supply 30 to force headspace gas 18 through gas passage 34, through liquid sensor 38, and to headspace gas drain 40.
  • any means capable of collapsing inner container 20 to force headspace gas 18 through gas passage 34 may be used, including hydraulic or mechanical based devices.
  • a pump connected to gas passage 34 can withdraw headspace gas 18 from container 14.
  • liquid 12 begins to flow in gas passage 34 as compressed air supply 30 continues to supply air to compression space 31.
  • liquid sensor 38 a signal is sent to system control 46 to close drain valve 36. This terminates the connection between the interior of inner container 20 and headspace gas drain 40.
  • a user of system 10 may visually determine when liquid 12 begins to flow in gas passage 34 and manually turn off drain valve 36 to terminate the connection to headspace gas drain 40.
  • liquid 12 is forced up through flow passage 42 as compressed air continues to be supplied to compression space 31 by compressed air supply 30.
  • compressed air supply 30 As liquid 12 is withdrawn from flexible inner container 20 of container 14, air is permitted to enter compression space 31, thereby collapsing inner container 20.
  • inner container 20 is preferably collapsed with pressurized air, any means capable of collapsing inner container 20 to force liquid through flow passage 42 may be used, including hydraulic or mechanical based devices.
  • a pump or venturi connected to flow passage 42 can withdraw liquid 12 from container 14.
  • headspace gas 18 would begin to dissolve into solution pursuant to Henry's law.
  • Henry's law states that, at a constant temperature, the amount of gas dissolved in a solution is directly proportional to the pressure of the gas above the solution.
  • inner container 20 is collapsed by compressed air supply 30 to force liquid 12 out of inner container 20, the pressure of headspace gas 18 would increase during this process. This would cause headspace gas 18 to dissolve into liquid 12, thereby resulting in deleterious bubble formation when liquid 12 is del ivered to process 13.
  • Container scale 44 continually weighs container 14 as liquid 12 is dispensed to manufacturing process 13 to determine when container 14 reaches a predetermined empty weight.
  • the empty weight of container 14 is the weight of outer container 22 with an empty inner container 20 inside. The determination of the empty weight by container scale 44 assures that all of liquid 12 is dispensed from inner container 20.
  • system control 46 sends a signal to turn off compression air supply 30. Subsequently, compression air passage 32, gas passage 34, and flow passage 42 are disconnected from empty container 14, empty container 14 is removed from system 10, and a new container 14 containing liquid 12 and headspace gas 18 is connected to system 10. Dispensing of liquid 12 from container 14 then recommences.
  • FIG. 2 is a schematic of system 50 according to another preferred embodiment of the present invention for dispensing liquid 12 to manufacturing process 13 from container 14.
  • Container 14 includes headspace gas 18 provided to stabilize liquid 12 during shipment and storage of container 14.
  • Container 16 includes flexible inner container 20 and rigid outer container 22.
  • system 50 includes compression air supply 30, compression air passage 32, headspace gas passage 34, liquid sensor 38, headspace gas drain 40, flow passage 42, and system control 46.
  • system 50 includes empty detect gas supply 52, regulator gauge 54, first block valve 55, gas quantity controller 56, second block valve 58, select valve 60, and empty detect gas sensor 62.
  • Compression air supply 30 is connected to compression space 31 via compression air passage 32.
  • Select valve 60 is a three-port valve connecting the interior of inner container 20 (via gas passage 34) to the devices connected to select valve port 60a or select valve port 60b, depending on the position state of select valve 60. More specifically, in a first position select valve 60 provides a fluidic connection between the interior of inner container 20 and the devices connected to port 60a (i.e., liquid sensor 38 and headspace gas drain 40). Liquid sensor 38 is connected between select valve 60 and headspace gas drain 40.
  • select valve 60 provides a fluidic connection between the interior of inner container 20 and the devices connected to port 60b (i.e., empty detect gas supply 52, regulator gauge 54, first block valve 55, gas quantity controller 56, and second block valve 58).
  • Regulator gauge 54, first block valve 55, gas quantity controller 56, and second block valve 58 are connected between empty detect gas supply 52 and select valve 60.
  • the interior of inner container 20 is in fluid communication with manufacturing process 13 via flow passage 42.
  • Empty detect gas sensor 62 is connected along flow passage 42.
  • Gas passage 34, flow passage 42, and select valve 60 are preferably combined in a single connector package such that the interior of inner container 20 is connected to headspace gas drain 40, empty detect gas supply 52, and manufacturing process 13 with one connection.
  • Flow passage 42 is typically provided in a probe that is insertable through a port of the container and into inner container 20 to provide fluid communication between liquid 12 and manufacturing process 13.
  • system control 46 is connected to compression air supply 30, liquid sensor 38, regulator gauge 54, first block valve 55, second block valve 58, select valve 60, and empty detect gas sensor 62.
  • System control 46 controls operation of system 50 based upon signals received from the various components of system 50.
  • headspace gas 18 is no longer needed or desired. Thus, headspace gas 18 must be removed prior to dispensing liquid 12 to manufacturing process 13.
  • the procedure of removing headspace gas 18 from container 14 in system 50 is similar to the same process in system 10.
  • compression air passage 32, gas passage 34, and flow passage 42 are connected to container 14.
  • System control 46 then sends a signal select valve 60 to turn to its first position to produce a fluidic connection between the interior of inner container 20 and headspace gas drain 40 (via select valve port 60a).
  • select valve port 60a select valve port 60a
  • pressurized fluid preferably compressed air or nitrogen
  • compressed air supply 30 to compression space 31 to force headspace gas 18 through gas passage 34, through liquid sensor 38, and to headspace gas drain 40.
  • pressurized fluid preferably compressed air or nitrogen
  • compressed air supply 30 to compress space 31 to force headspace gas 18 through gas passage 34, through liquid sensor 38, and to headspace gas drain 40.
  • pressurized fluid preferably compressed air or nitrogen
  • gas passage 34 As headspace gas 18 is withdrawn from inner container 20 of container 14, air is permitted to enter compression space 31, thereby collapsing flexible inner container 20.
  • any means capable of collapsing inner container 20 to force headspace gas 18 through gas passage 34 may be used, including hydraulic or mechanical based devices.
  • a pump or venturi connected to gas passage 34 can withdraw headspace gas 18 from container 14.
  • liquid 12 begins to flow in gas passage 34 as compressed air supply 30 continues to supply air to compression space 31.
  • system control 46 responds by turning select valve 60 to the second position. This terminates the connection between the interior of inner container 20 and headspace gas drain 40, and opens the connection between the interior of inner container 20 and select valve port 60b.
  • a user of system 50 may visually determine when liquid 12 begins to flow in gas passage 34 and manually turn select valve 60 to the second position to terminate the connection to headspace gas drain 40.
  • headspace gas 18 would begin to dissolve into solution pursuant to Henry's law. Because inner container 20 is collapsed by compressed air supply 30 to force liquid 12 out of inner container 20, the pressure of headspace gas 18 would increase during this process. This would cause headspace gas 18 to dissolve into liquid 12, thereby resulting in deleterious bubble formation in liquid 12 as it is delivered to process 13.
  • empty detect gas In many liquid dispense systems, it is desirable to leave a small amount of gas in container 14 after removal of headspace gas 18. When all of liquid 12 has been dispensed from container 14, this small amount of gas, referred to as empty detect gas, is detected by a sensor (for example, empty detect gas sensor 62 in FIG. 2 ) to indicate that the container is empty. In conventional systems, the amount of empty detect gas remaining in container 14 is not easily controllable, since the amount of gas being exhausted to headspace gas drain 40 is not easily measurable.
  • empty detect gas supply 52 In system 50, the addition of empty detect gas into inner container 20 is controlled by empty detect gas supply 52, regulator gauge 54, first block valve 55, gas quantity controller 56, and second block valve 58.
  • system control 46 opens first block valve 55 to produce a fluidic connection between empty detect gas supply 52 and gas quantity controller 56.
  • Empty detect gas then begins to flow into gas quantity controller 56 from empty detect gas supply 52.
  • the pressure is regulated by regulator gauge 54 and may be measured by a pressure transducer integrated into gas quantity controller 56.
  • the amount of empty detect gas that flows into gas quantity controller 56 depends on the capacity volume of gas quantity controller 56 and the pressure of the empty detect gas in gas quantity controller 56. Based on these factors, empty detect gas supply 52 continues to flow until gas quantity controller 56 is filled with the desired amount of gas (e.g., 100 pounds per square inch gauge).
  • system control 46 closes first block valve 55 to terminate the connection between empty detect gas supply 52 and gas quantity controller 56. Subsequently or simultaneously, system control 46 opens second block valve 58 to produce a fluidic connection between gas quantity controller 56 and the interior of inner container 20. This allows the empty detect gas contained in gas quantity controller 56 to flow into the interior of inner container 20. If compression air supply 30 is turned off while empty detect gas flows from gas quantity controller 56 into inner container 20, the empty detect gas contained in gas quantity controller 56 will flow into inner container 20. If compression air supply 30 remains active while empty detect gas flows from gas quantity controller 56 into inner container 20, empty detect gas will flow from gas quantity controller 56 into inner container 20 until an equilibrium pressure is reached between compression air supply 30 and the pressure in gas quantity controller 56.
  • compression air supply 30 is active is controlled by a two-way or a three-way valve connected between compression air supply 30 and compression space 31.
  • the amount of empty detect gas that flows from gas quantity controller 56 into inner container 20 is based on the size of gas quantity controller 56, the difference in pressure between gas quantity controller 56, and the pressure in compression space 31.
  • system control 46 closes second block valve 58 to terminate the connection from gas quantity controller 56 to inner container 20.
  • second block valve 58 is closed, liquid 12 is forced up through flow passage 42 as compressed air is supplied to compression space 31 by compressed air supply 30.
  • compressed air supply 30 As liquid 12 is withdrawn from flexible inner container 20 of container 14, air is permitted to enter compression space 31, thereby collapsing inner container 20.
  • inner container 20 is preferably collapsed with pressurized air, any means capable of collapsing inner container 20 to force liquid through flow passage 42 may be used, including hydraulic or mechanical based devices.
  • a pump or venturi connected to flow passage 42 can withdraw liquid 12 from container 14.
  • the purity of some chemicals has a tendency to decay or cross-link when stored for an extended period of time, especially when subjected to temperature fluctuations.
  • an empty portion of the container referred to as the headspace
  • the headspace gas prevents the decay of the liquid chemical by inhibiting chemical reactions from occurring in the liquid during storage.
  • the container is to be connected to a manufacturing process, the headspace gas is no longer needed or desired.
  • Conventional dispensing systems do not allow for the easy removal of the headspace gas prior to dispensing the liquid chemical.
  • the present invention is a method and system for dispensing liquid chemical to a manufacturing process from a container including an outer container, an inner container, and a port which communicates with an interior of the inner container, a portion of the inner container occupied by the liquid chemical, a remainder of the inner container occupied by a headspace gas for preventing decay of the liquid chemical until the container is connected to a manufacturing process.
  • the system includes a probe having a flow passage therein and a gas passage communicating between the interior of the inner container and an exterior of the outer container.
  • the system further includes means in fluid communication with a compression space between inner walls of the outer container and the inner container for permitting fluid under pressure to flow into the space between the inner walls of the outer container and the inner container to force the headspace gas out of the inner container via the gas passage to a headspace gas drain and to force liquid out of the inner container through the flow passage in the probe to the manufacturing process.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Packages (AREA)

Claims (19)

  1. Verfahren zum Abgeben einer Flüssigkeit aus einem zusammenfaltbaren inneren Behälter (20), der in einem äußeren Behälter (22) angeordnet ist, wobei der innere Behälter (20) zunächst Flüssigkeit (12) und Kopfraumgas (18) enthält, wobei das Verfahren Folgendes umfasst:
    Evakuieren des Kopfraumgases (18) aus dem inneren Behälter (20) über einen Gasdurchlass (34) in Verbindung mit einem Kopfraumgasablass (40);
    Nutzen eines Flüssigkeitssensors (38), um zu erfassen, wenn Flüssigkeit (12) in dem Gasdurchlass (34) zu fließen beginnt, indem das Vorliegen von Flüssigkeit (12) in dem Gasdurchlass (34) erkannt wird; und
    Zuführen von Druck zu einem Kompressionsraum (31) zwischen dem inneren Behälter (20) und dem äußeren Behälter (22), um Flüssigkeit (12) aus dem inneren Behälter (20) in einen Herstellungsvorgang (13) abzugeben.
  2. Verfahren nach Anspruch 1, wobei das Zuführen von Druck zu dem Kompressionsraum (31) das Zuführen von unter Druck stehendem Fluid aus einer Quelle für druckbeaufschlagtes Fluid (30) zu dem Kompressionsraum (31) zwischen dem inneren Behälter (20) und dem äußeren Behälter (22) umfasst.
  3. Verfahren nach einem der Ansprüche 1 oder 2, wobei der innere Behälter (20) und der äußere Behälter (22) einen Fluidbehälter (16) darstellen und das Verfahren vor dem Evakuieren des Kopfraumgases (18) weiterhin Folgendes umfasst: Anbringen eines Anschlusselements an den Fluidbehälter (16), wobei das Anschlusselement eine Sonde mit einem Flüssigkeitsflussdurchlass (42) darin zum Abgeben von Flüssigkeit (12) aus dem inneren Behälter (20) enthält, wobei das Anschlusselement weiterhin den Gasdurchlass (34) enthält.
  4. Verfahren nach einem der Ansprüche 1 bis 3, wobei das Evakuieren des Kopfraumgases das Öffnen eines Ablassventils (36), das zwischen dem Gasdurchlass (34) und dem Kopfraumgasablass (40) angeschlossen ist, um das Evakuieren des Kopfraumgases (18) zu dem Kopfraumgasablass (40) über den Gasdurchlass (34) zu ermöglichen; und das Schließen des Ablassventils (36) als Reaktion auf das Erkennen durch den Flüssigkeitssensor (38), wenn Flüssigkeit (12) in dem Gasdurchlass (34) zu fließen beginnt, umfasst.
  5. Verfahren nach Anspruch 4, wobei das Verfahren vor dem Schließen des Ablassventils (36) weiterhin das Zuführen von unter Druck stehendem Fluid zu einem Kompressionsraum (31) zwischen dem inneren Behälter (20) und dem äußeren Behälter (22) umfasst, um das Kopfraumgas (18) aus dem inneren Behälter (20) über den Gasdurchlass (34) und den Kopfraumgasablass (40) zu evakuieren.
  6. Verfahren nach Anspruch 1, wobei das Abgeben von Flüssigkeit (12) aus dem inneren Behälter (20) weiterhin die Verwendung einer Pumpe oder Venturidüse zum Abziehen von Flüssigkeit (12) aus dem inneren Behälter (20) umfasst.
  7. Verfahren nach Anspruch 1, wobei das Verfahren vor dem Abgeben von Flüssigkeit (12) aus dem inneren Behälter (20) weiterhin das Einbringen einer Leerdetektionsgasmenge in den inneren Behälter (20) umfasst.
  8. Verfahren nach Anspruch 7, wobei das Einbringen einer Menge von Leerdetektionsgas in den inneren Behälter (20) Folgendes umfasst: Anschließen eines ersten Absperrventils (55), einer Gasmengenkontrolleinheit (56) und eines zweiten Absperrventils (58) zwischen einer Leerdetektionsgaszufuhr (52) und dem Gasdurchlass (34); Öffnen des ersten Absperrventils (55), um das Strömen des Leerdetektionsgases von der Leerdetektionsgaszufuhr (52) in die Gasmengenkontrolleinheit (56) zu ermöglichen; Schließen des ersten Absperrventils (55), wenn eine gemessene Leerdetektionsgasmenge die Gasmengenkontrolleinheit (56) gefüllt hat; und Öffnen des zweiten Absperrventils (58), um das Strömen des Leerdetektionsgases von der Gasmengenkontrolleinheit (56) in das Innere des inneren Behälters (20) über den Gasdurchlass (34) zu ermöglichen.
  9. Verfahren nach Anspruch 8, wobei das Schließen des ersten Absperrventils (55), wenn eine gemessene Leerdetektionsgasmenge die Gasmengenkontrolleinheit (56) gefüllt hat, Folgendes umfasst: Anschließen eines Druckregelmessgeräts (54) zwischen der Leerdetektionsgaszufuhr (52) und der Gasmengenkontrolleinheit (56) zum Regeln des Drucks in der Gasmengenkontrolleinheit (56), wenn das Leerdetektionsgas in die Gasmengenkontrolleinheit (56) eingebracht wird; und Schließen des ersten Absperrventils (55), wenn die gemessene Leerdetektionsgasmenge in die Gasmengenkontrolleinheit (56) eingeführt wurde, auf Basis des Drucks in der Gasmengenkontrolleinheit (56).
  10. Verfahren nach Anspruch 7, das weiterhin Folgendes umfasst: Erfassen des Leerdetektionsgases, wenn die Flüssigkeit (12) aus dem inneren Behälter (20) abgelassen wurde; und Beenden des Abgebens der Flüssigkeit (12) in den Herstellungsvorgang (13), wenn das Leerdetektionsgas erfasst wird.
  11. Verfahren nach Anspruch 1, wobei der innere Behälter (20) und der äußere Behälter (22) einen Fluidbehälter (16) darstellen, wobei das Verfahren weiterhin Folgendes umfasst: Wiegen des Fluidbehälters (16), während die Flüssigkeit (12) in den Herstellungsvorgang (13) abgegeben wird; und Beenden des Abgebens der Flüssigkeit (12) in den Herstellungsvorgang (13), wenn der Fluidbehälter (16) ein Leergewicht erreicht.
  12. System zum Abgeben von Flüssigkeit in einen Herstellungsvorgang (13) aus einem Fluidbehälter (16), der einen äußeren Behälter (22) und einen zusammenfaltbaren inneren Behälter (20) enthält, wobei der innere Behälter (20) zunächst die Flüssigkeit (12) und ein Kopfraumgas (18) enthält, wobei das System Folgendes umfasst:
    ein Anschlusselement, das eine Sonde enthält, die in den inneren Behälter (20) eingeführt werden kann, wobei die Sonde einen Flüssigkeitsflussdurchlass (42) darin aufweist;
    einen Gasdurchlass (34), der sich durch das Anschlusselement erstreckt und dazu eingerichtet ist, eine Fluidverbindung zwischen dem Inneren des inneren Behälters (20) und einem Kopfraumgasablass (40) zu ermöglichen; und
    einen Flüssigkeitssensor (38), der dazu eingerichtet ist zu erfassen, wenn Flüssigkeit (12) in dem Gasdurchlass (34) zu fließen beginnt, indem das Vorliegen von Flüssigkeit (12) in dem Gasdurchlass (34) erkannt wird, um darauf hinzuweisen, dass Kopfraumgas (18) aus dem inneren Behälter (20) abgelassen wurde;
    wobei das Anschlusselement zum Anschluss an eine Quelle für druckbeaufschlagtes Fluid (30) in Fluidverbindung mit einem Kompressionsraum (31) zwischen dem inneren Behälter (20) und dem äußeren Behälter (22) eingerichtet ist, um das Kopfraumgas (18) aus dem inneren Behälter (20) über den Gasdurchlass (34) zu dem Kopfraumgasablass (40) zu treiben und Flüssigkeit (12) aus dem inneren Behälter (20) durch den Flüssigkeitsflussdurchlass (42) in der Sonde zu dem Herstellungsvorgang (13) zu treiben.
  13. System nach Anspruch 12, das weiterhin Folgendes umfasst: ein Ablassventil (36), das zwischen dem Kopfraumgasablass (40) und dem Gasdurchlass (34) angeschlossen ist, wobei das Ablassventil (36) eine geöffnete Stellung, die wählbar ist, um das Evakuieren des Kopfraumgases (18) zu dem Kopfraumgasablass (40) über den Gasdurchlass (34) zu ermöglichen; und eine geschlossene Stellung, die als Reaktion auf das Erkennen durch den Flüssigkeitssensor (38), wenn Flüssigkeit (12) in dem Gasdurchlass (34) zu fließen beginnt, wählbar ist, aufweist, als Hinweis darauf, dass das Kopfraumgas (18) aus dem Inneren des inneren Behälters (20) abgelassen wurde.
  14. System nach Anspruch 12, das weiterhin Folgendes umfasst: Leerdetektionsmittel zum Erkennen, wenn die Flüssigkeit (12) aus dem inneren Behälter (20) abgelassen wurde.
  15. System nach Anspruch 14, wobei das Leerdetektionsmittel einen Leerdetektionsgassensor (62) umfasst, der dazu eingerichtet ist, ein Leerdetektionsgas zu erfassen, das unmittelbar vor dem Abgeben der Flüssigkeit (12) in den Herstellungsvorgang (13) in ein Inneres des inneren Behälters (20) eingebracht wurde.
  16. System nach Anspruch 15, das weiterhin Folgendes umfasst: eine Gasmengenkontrolleinheit (56); ein erstes Absperrventil (55), das zwischen einer Leerdetektionsgaszufuhr (52) und der Gasmengenkontrolleinheit (56) angeschlossen ist, wobei das erste Absperrventil (55) eine geöffnete Stellung, die wählbar ist, um das Strömen des Leerdetektionsgases von der Leerdetektionsgaszufuhr (52) in die Gasmengenkontrolleinheit (56) zu ermöglichen, und eine geschlossene Stellung, die wählbar ist, wenn eine gemessene Leerdetektionsgasmenge in die Gasmengenkontrolleinheit (56) eingebracht wurde, aufweist; und ein zweites Absperrventil (58), das zwischen der Gasmengenkontrolleinheit (56) und einem Inneren des inneren Behälters (20) angeschlossen ist, wobei das zweite Absperrventil (58) eine geöffnete Stellung, die wählbar ist, um das Strömen des Leerdetektionsgases von der Gasmengenkontrolleinheit (56) zu dem Inneren des inneren Behälters (20) zu ermöglichen, und eine geschlossene Stellung, die wählbar ist, wenn das Leerdetektionsgas aus der Gasmengenkontrolleinheit (56) abgelassen wurde, aufweist.
  17. System nach Anspruch 16, das weiterhin Folgendes umfasst: ein Druckregelmessgerät (54), das zwischen der Leerdetektionsgaszufuhr (52) und der Gasmengenkontrolleinheit (56) angeschlossen ist, um den Druck in der Gasmengenkontrolleinheit (56) zu regeln, wenn das Leerdetektionsgas in die Gasmengenkontrolleinheit (56) eingebracht wird, so dass das erste Absperrventil (55) geschlossen wird, wenn die gemessene Leerdetektionsgasmenge in die Gasmengenkontrolleinheit (56) eingeführt wurde, auf Basis des Drucks in der Gasmengenkontrolleinheit (56).
  18. System nach Anspruch 16, das weiterhin Folgendes umfasst: ein Wahlventil (60) mit Anschlüssen (60a, 60b), die an mindestens eines bzw. einen des ersten und des zweiten Absperrventils (55, 58), des Kopfraumgasablasses (40) und des Inneren des inneren Behälters (20) angeschlossen sind, wobei das Wahlventil (60) eine wählbare Fluidverbindung von mindestens einem des ersten und des zweiten Absperrventils (55, 58) und des Kopfraumgasablasses (40) mit dem Inneren des inneren Behälters (20) ermöglicht.
  19. System nach Anspruch 14, wobei das Leerdetektionsmittel eine Waage (44) zum Wiegen des Fluidbehälters (16), während die Flüssigkeit (12) in den Herstellungsvorgang (13) abgegeben wird, enthält, so dass das Abgeben der Flüssigkeit (12) beendet wird, wenn der Fluidbehälter (16) ein vorher festgelegtes Gewicht, wie durch die Waage (44) gemessen, erreicht.
EP05734931A 2004-04-13 2005-04-13 Flüssigkeitsabgabeverfahren und system mit entfernung von gas aus dem gasraum Active EP1737758B1 (de)

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US10/823,127 US20050224523A1 (en) 2004-04-13 2004-04-13 Liquid dispensing method and system with headspace gas removal
PCT/US2005/012593 WO2005100203A2 (en) 2004-04-13 2005-04-13 Liquid dispensing method and system with headspace gas removal

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Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050279207A1 (en) * 2004-06-16 2005-12-22 Advanced Technology Materials, Inc. Liquid delivery system
US7172096B2 (en) * 2004-11-15 2007-02-06 Advanced Technology Materials, Inc. Liquid dispensing system
KR101309367B1 (ko) 2005-04-25 2013-09-17 도쿄엘렉트론가부시키가이샤 비어 있음 검출 능력을 갖는 라이너 기반의 액체 저장 및 분배 시스템
WO2006133026A2 (en) 2005-06-06 2006-12-14 Advanced Technology Materials, Inc. Fluid storage and dispensing systems and processes
WO2007101248A2 (en) * 2006-02-28 2007-09-07 Levtech, Inc. Disposable pumping apparatus based on flexible vessels in pressurized containers
WO2007146892A2 (en) 2006-06-13 2007-12-21 Advanced Technology Materials, Inc. Liquid dispensing systems encompassing gas removal
US7750173B2 (en) 2007-01-18 2010-07-06 Advanced Technology Materials, Inc. Tantalum amido-complexes with chelate ligands useful for CVD and ALD of TaN and Ta205 thin films
KR101470051B1 (ko) 2007-08-28 2014-12-05 엔테그리스, 아이엔씨. 유체 분배용 방법 및 장치
US8733592B2 (en) * 2009-06-03 2014-05-27 Asahi Breweries, Ltd. Liquid delivery system, liquid-delivery switching device, and liquid-flowpath regulating device
SG10201405659QA (en) 2009-07-09 2014-11-27 Advanced Tech Materials Substantially rigid collapsible liner and flexible gusseted or non-gusseted liners and methods of manufacturing the same and methods for limiting choke-off in liners
US8733598B2 (en) 2009-12-30 2014-05-27 Advanced Technology Materials, Inc. Closure/connector for liner-based dispense containers
KR20120101173A (ko) 2010-01-06 2012-09-12 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 가스 제거 및 검출 기능을 갖는 액체 분배 시스템
WO2012051496A2 (en) 2010-10-15 2012-04-19 Advanced Technology Materials, Inc. Connector for liner-based dispense containers
JP6087833B2 (ja) 2010-11-23 2017-03-01 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド ライナーベースの分注器
WO2012118527A1 (en) 2011-03-01 2012-09-07 Advanced Technology Materials, Inc. Nested blow molded liner and overpack and methods of making same
KR20140064894A (ko) 2011-08-22 2014-05-28 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 절첩 패턴을 갖는 실질적으로 단단한 접이식 용기
US20130056504A1 (en) 2011-09-02 2013-03-07 Ottocom, Llc System and Method for Interfacing with, and Controlling, Beverage Dispensing Containers
US10870565B2 (en) * 2011-09-02 2020-12-22 Bevolution Systems, Llc Scalable modular system and method for storing, preserving, managing, and selectively dispensing beverages
JP2014533995A (ja) * 2011-10-13 2014-12-18 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド 材料の実質的滅菌保管、出荷、および分注のためのライナベースの出荷および分注容器
SG11201402260PA (en) * 2011-11-18 2014-09-26 Advanced Tech Materials Closure/connectors for liner-based shipping and dispensing containers and methods for filling liner-based shipping and dispensing containers
JP2013112379A (ja) * 2011-11-29 2013-06-10 Shibuya Kogyo Co Ltd 液体充填装置
USD702128S1 (en) 2012-04-12 2014-04-08 Advanced Technology Materials, Inc. Packaging
JP2015523903A (ja) * 2012-04-20 2015-08-20 ノードソン コーポレーションＮｏｒｄｓｏｎ Ｃｏｒｐｏｒａｔｉｏｎ 流体噴射システム内のノズルの構成又は運用履歴を追跡するデバイス、システム及び方法
US20140263433A1 (en) * 2013-03-15 2014-09-18 Heineken Uk Limited Beverage Dispense System and Method
TWI621571B (zh) * 2013-07-11 2018-04-21 恩特葛瑞斯股份有限公司 用於塡充及分配液體之裝置與方法
US10414643B2 (en) * 2015-11-17 2019-09-17 Coravin, Inc. Beverage extractor for sparkling beverages
JP6487574B2 (ja) * 2015-12-18 2019-03-20 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 貯留装置、気化器、基板処理装置および半導体装置の製造方法
CN106082094A (zh) * 2016-06-17 2016-11-09 胡江 液体取用装置及其方法
FR3053262A1 (fr) * 2016-07-04 2018-01-05 Adrien Plecis Systeme de preparation d’une composition personnalisee par pression
GB201703549D0 (en) * 2017-03-06 2017-04-19 Hodges & Drake Design Ltd Apparatus for dispensing a flowable product
TWI732605B (zh) * 2020-06-22 2021-07-01 研能科技股份有限公司 微量液體檢測器
TWI780625B (zh) * 2021-03-16 2022-10-11 力晶積成電子製造股份有限公司 液體供應系統及液量輔助判斷方法

Family Cites Families (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE26006E (en) * 1959-12-23 1966-04-26 Transfusion set
US3802470A (en) * 1966-12-05 1974-04-09 C Coleman Composite container and method of handling fluent materials
US3756367A (en) * 1972-01-10 1973-09-04 Ammco Tools Inc Hydraulic brake system bleeder
US4138036A (en) * 1977-08-29 1979-02-06 Liqui-Box Corporation Helical coil tube-form insert for flexible bags
DE2951667A1 (de) * 1979-12-21 1981-07-02 Merck Patent Gmbh, 6100 Darmstadt Transport- und entnahmevorrichtung
US4313419A (en) * 1980-04-21 1982-02-02 Halm Instrument Co., Inc. Solar heating system
FR2599496B1 (fr) * 1986-05-28 1992-02-14 Mms Detecteur de bulles dans un circuit de liquide
US5102010A (en) * 1988-02-16 1992-04-07 Now Technologies, Inc. Container and dispensing system for liquid chemicals
JPH02133471A (ja) * 1988-11-15 1990-05-22 Ube Ind Ltd 塗料用組成物
US5014208A (en) * 1989-01-23 1991-05-07 Siemens Corporate Research, Inc. Workcell controller employing entity-server model for physical objects and logical abstractions
JPH0622464Y2 (ja) * 1989-04-04 1994-06-15 大日本スクリーン製造株式会社 薬液吐出装置
JPH0369700U (de) * 1989-11-07 1991-07-11
NO174942C (no) * 1990-12-03 1994-08-03 Corrocean As Anordning for montering, hhv. demontering av sonder i prosessrör, tanker e.l.
US5277336A (en) * 1990-12-31 1994-01-11 L'oreal Device for the pressurized dispensing of a product, especially a foaming product, and processes for filling a container for a device of this kind
US5693017A (en) * 1991-02-14 1997-12-02 Wayne State University Apparatus and method of delivery of gas-supersaturated solutions to a delivery site
US5223796A (en) * 1991-05-28 1993-06-29 Axiomatics Corporation Apparatus and methods for measuring the dielectric and geometric properties of materials
US5248069A (en) * 1992-05-29 1993-09-28 International Business Machines Corporation Viscous fluid pressurizing apparatus
US5335821A (en) * 1992-09-11 1994-08-09 Now Technologies, Inc. Liquid chemical container and dispensing system
US5526956A (en) * 1992-09-11 1996-06-18 Now Technologies, Inc. Liquid chemical dispensing and recirculating system
JP3362878B2 (ja) * 1992-10-29 2003-01-07 日本板硝子株式会社 液状流体搬送装置
US5558083A (en) * 1993-11-22 1996-09-24 Ohmeda Inc. Nitric oxide delivery system
US5638285A (en) * 1993-12-22 1997-06-10 Ingersoll-Dresser Pump Company System for dispensing dry agricultural chemicals
US5507192A (en) * 1994-09-13 1996-04-16 Beaudin; Allen B. Automated gas measurement system
US5764522A (en) * 1995-02-28 1998-06-09 Shalev; Matti Programmable system for controlling, regulating, and adjusting flow of animal-feed material from a material storage vessel
US5663488A (en) * 1995-05-31 1997-09-02 Hewlett-Packard Co. Thermal isolation system in an analytical instrument
US5594162A (en) * 1995-06-06 1997-01-14 Dolan; James P. Valve stem gas leak detector
US5699940A (en) * 1996-07-08 1997-12-23 C.H. & I. Technologies, Inc. Device for removing fluid from a container with pressurized air and thereafter placing the container under vacuum
US5891096A (en) * 1996-08-20 1999-04-06 Critical Device Corporation Medicament infusion device
US5802859A (en) * 1996-12-16 1998-09-08 Hudson Technologies, Inc. Apparatus for recovering and analyzing volatile refrigerants
US5875921A (en) * 1997-03-12 1999-03-02 Now Technologies, Inc. Liquid chemical dispensing system with sensor
US6067844A (en) * 1997-08-15 2000-05-30 Shell Oil Company Nondestructive method for detection of defects and the condition of liners in polymer-lined pipes and equipment
US6019250A (en) * 1997-10-14 2000-02-01 The Boc Group, Inc. Liquid dispensing apparatus and method
US5942980A (en) * 1997-11-20 1999-08-24 Innovative Measurement Methods, Inc. Multi-sensor hydrostatic gauge for fuel storage tanks
US6085576A (en) * 1998-03-20 2000-07-11 Cyrano Sciences, Inc. Handheld sensing apparatus
JP3929000B2 (ja) * 1998-05-08 2007-06-13 アイセロ化学株式会社 高純度薬品液用容器
US6065638A (en) * 1998-05-29 2000-05-23 Gilbarco Inc. Real time blending apparatus and method
US6206240B1 (en) * 1999-03-23 2001-03-27 Now Technologies, Inc. Liquid chemical dispensing system with pressurization
US6165347A (en) * 1999-05-12 2000-12-26 Industrial Scientific Corporation Method of identifying a gas
US6556949B1 (en) * 1999-05-18 2003-04-29 Applied Materials, Inc. Semiconductor processing techniques
US6446644B1 (en) * 1999-07-06 2002-09-10 Semitool, Inc. Chemical solutions system for processing semiconductor materials
JP2002090965A (ja) * 2000-09-14 2002-03-27 Chugai Photo Chemical Co Ltd 溶液供給方法及び装置
US6264064B1 (en) * 1999-10-14 2001-07-24 Air Products And Chemicals, Inc. Chemical delivery system with ultrasonic fluid sensors
US6405745B1 (en) * 2000-03-22 2002-06-18 Delphi Technologies, Inc. Ultra accurate gas injection system
US6542848B1 (en) * 2000-07-31 2003-04-01 Chart Inc. Differential pressure gauge for cryogenic fluids
US6516249B1 (en) * 2000-09-05 2003-02-04 Lockheed Martin Corporation Fluid control system with autonomously controlled pump
US6843414B2 (en) * 2001-04-02 2005-01-18 Honeywell International Inc. Smart container for bulk delivery
US6649829B2 (en) * 2001-05-21 2003-11-18 Colder Products Company Connector apparatus and method for connecting the same for controlling fluid dispensing
US6879876B2 (en) * 2001-06-13 2005-04-12 Advanced Technology Materials, Inc. Liquid handling system with electronic information storage
JP2003192100A (ja) * 2001-12-26 2003-07-09 Sony Corp 薬液供給装置
US6698619B2 (en) * 2002-05-03 2004-03-02 Advanced Technology Materials, Inc. Returnable and reusable, bag-in-drum fluid storage and dispensing container system
US7188644B2 (en) * 2002-05-03 2007-03-13 Advanced Technology Materials, Inc. Apparatus and method for minimizing the generation of particles in ultrapure liquids
JP2004089810A (ja) * 2002-08-30 2004-03-25 Mitsubishi Heavy Ind Ltd スラリ高圧搬送装置
US20050279207A1 (en) * 2004-06-16 2005-12-22 Advanced Technology Materials, Inc. Liquid delivery system

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Publication number Publication date
EP1737758A4 (de) 2010-11-10
US20050224523A1 (en) 2005-10-13
TW200533858A (en) 2005-10-16
JP5186583B2 (ja) 2013-04-17
JP2007532433A (ja) 2007-11-15
WO2005100203A2 (en) 2005-10-27
MY147252A (en) 2012-11-14
KR20060135943A (ko) 2006-12-29
EP1737758A2 (de) 2007-01-03
CN101010241A (zh) 2007-08-01
JP2011157136A (ja) 2011-08-18
KR101174928B1 (ko) 2012-08-17
WO2005100203A3 (en) 2007-03-22
ATE546409T1 (de) 2012-03-15
TWI356141B (en) 2012-01-11

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