EP1736731A2 - Système de mesure tridimensionel - Google Patents

Système de mesure tridimensionel Download PDF

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Publication number
EP1736731A2
EP1736731A2 EP05024134A EP05024134A EP1736731A2 EP 1736731 A2 EP1736731 A2 EP 1736731A2 EP 05024134 A EP05024134 A EP 05024134A EP 05024134 A EP05024134 A EP 05024134A EP 1736731 A2 EP1736731 A2 EP 1736731A2
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EP
European Patent Office
Prior art keywords
measurement
information
dimensional measuring
measurement object
measuring device
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EP05024134A
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German (de)
English (en)
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EP1736731B1 (fr
EP1736731A3 (fr
Inventor
Akira Kubo
Shinichi Horita
Yoshihisa Abe
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Konica Minolta Opto Inc
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Konica Minolta Opto Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points

Definitions

  • the present invention relates to a three-dimensional measuring system for measuring a three-dimensional shape of a measurement object in a noncontact manner.
  • noncontact three-dimensional measurement (three-dimensional measurement) is often used for measuring a three-dimensional shape of a measurement object.
  • the three-dimensional measurement includes a passive type such as a lens focus method or a stereo image method and an active type such as a light radar method or a light projection method.
  • the stereo image method the measurement object is shot from plural different positions by a camera, for example. Then, three-dimensional coordinates of each point on the measurement object are calculated from the plural obtained images by the principle of triangulation.
  • detection light is projected to the measurement object, and light reflected by the measurement object is received by an imaging element.
  • the method is called a slit light projection method (it is also called an optical cutting method).
  • the slit light projection method the slit light is deflected so that the measurement object is scanned optically, and three-dimensional coordinates of each point on the measurement object is calculated from deformation degree of the slit light based on a surface shape of the measurement object by the principle of triangulation.
  • a part of a measurement object cannot be measured by the three-dimensional measuring device depending on a surface shape of the measurement object.
  • a real three-dimensional measuring device has its predetermined specifics including a measurable angle of view, a resolution, measurement accuracy and a time period necessary for one measurement.
  • the entire surface shape of the measurement object cannot be measured depending on specifics of the three-dimensional measuring device. For example, if a surface shape of the measurement object is complicated or has a narrow hole, there is occurred a dead angle (occlusion) at which the measurement is disabled even if the measurement is performed from any direction.
  • occlusion dead angle
  • the current situation is that when a measurement object is measured by a three-dimensional measuring device the measurement ends up depending on the operator's know-how. For this reason, even a skilled operator consumes much time for determining an optimal position relationship for measurement by cut and try and for measuring one point many times by cut-and-try methods. If plural three-dimensional measuring devices are used, each of them may require the measurement of many times by cut-and-try methods. In addition, there is a case where the measurement fails at last after consuming much time for the measurement.
  • a system is a three-dimensional measuring system for measuring a three-dimensional shape of a measurement object in a noncontact manner, which includes means for obtaining arrangement information of the measurement object, means for obtaining design shape information of the measurement object, means for obtaining specifics information about one or more three-dimensional measuring devices, a determining portion for determining a measurable part that can be measured by the three-dimensional measuring device about a surface shape of the measurement object in accordance with the obtained arrangement information, the obtained design shape information and the obtained specifics information, and an output portion for outputting the determined measurable part.
  • the three-dimensional measuring system further includes means for obtaining characteristics information about a surface state or measurement accuracy of the measurement object, and the determining portion determines the measurable part by using the obtained characteristics information too.
  • the output portion displays the measurable part on a screen of a display device.
  • the determining portion determines an optimal measurement condition too for measuring the measurable part by the three-dimensional measuring device when the measurable part is determined, and the output portion outputs the determined optimal measurement condition.
  • system further includes a manipulator that is capable of moving the three-dimensional measuring device for positioning, and the manipulator is adapted to be controlled in accordance with the optimal measurement condition outputted from the output portion.
  • design shape information information obtained from CAD data of the measurement object or master measured shape data information obtained by measurement using the three-dimensional measuring device can be used.
  • characteristics information information obtained from CAD data of the measurement object or information entered by a user who operates an input portion can be used.
  • the system further includes means for obtaining a measurement allowable time or a measurement allowable number of times in measuring the measurement object by the three-dimensional measuring device, and that the measurable part is determined in accordance with the measurement allowable time or the measurement allowable number of times too.
  • time and efforts necessary for the measurement can be reduced by determining a measurable part automatically in measuring a measurement object using a three-dimensional measuring device.
  • Fig. 1 is a block diagram showing a structure of a three-dimensional measuring system 1 according to the present invention.
  • the three-dimensional measuring system 1 is made up of a processing device 11, a display device 12, an input device 13 such as a keyboard 13a or a mouse 13b, a CAD system 14, a control device 15, a manipulator 16 and the like.
  • the processing device 11 includes a processing unit (CPU), a RAM, a ROM, a hard disk drive, various types of media drives, various types of network interfaces, a control interface and other interfaces.
  • Various storage areas necessary for processing are allotted to the hard disk drive, and there are installed a program, which is a feature of this embodiment, for a process of determining a measurable part of a measurement object Q that can be measured by three-dimensional measurement, a program for outputting a determination result to various equipment, other various programs and data. It is possible to store a part or a whole of the programs or the data in the ROM.
  • the programs and the data are loaded to the RAM as necessity so that the processing unit executes the programs. It is possible that the programs are transferred from various types of media or downloaded via a network NW.
  • the display device 12 displays various pictures HG that will be described later, various data, images and messages on a screen using a LCD, a PDP, a CRT or the like. Only one display device 12 may be used in some cases, and plural display devices 12 in other cases. In addition, the display device 12 is usually capable of displaying multiple windows.
  • the input device 13 is operated by an operator (user) so that arrangement information, design shape information or characteristics information of the measurement object that will be described later, and specifics information (characteristics information) of the three-dimensional measuring device VD can be entered.
  • the number of the three-dimensional measuring devices VD is not limited to one but plural three-dimensional measuring devices VD may be used.
  • the processing device 11 As the processing device 11, the display device 12 and the input device 13, a so-called personal computer can be used.
  • the CAD system 14 generates or accumulates CAD data of various mechanical devices, products, utilities and other article.
  • CAD data include design shape information such as design drawings and dimension data of the article as well as characteristics information such as material, quality of material, surface roughness and dimension tolerances of each part that constitutes the article.
  • the CAD system 14 is connected with the processing device 11 via the network NW, and it is capable of transmitting a whole or a part of the CAD data to the processing device 11 responding to a request from the processing device 11. Note that the CAD data can be also passed on a file base without using the network.
  • the control device 15 controls the manipulator 16 in accordance with an instruction from the processing device 11.
  • the processing device 11 determines a three-dimensional measurable part of the measurement object Q, it can also determine an optimal measurement condition for measuring the measurable part by the three-dimensional measuring device VD. If there are plural three-dimensional measuring devices VD, the determination of a measurable part and the determination of an optimal measurement condition are performed for each three-dimensional measuring device VD as necessity.
  • the control device 15 is capable of obtaining a signal indicating the optimal measurement condition from the processing device 11 and controlling the manipulator 16 in accordance with the signal.
  • the manipulator 16 is capable of moving and positioning the three-dimensional measuring device VD when the three-dimensional measuring device VD is attached to a predetermined position in the end portion of its arm.
  • the three-dimensional measuring device VD executes the three-dimensional measurement at the adjusted position in accordance with an instruction from the processing device 11.
  • control device 15 includes an input portion for entering arrangement information HJ or the like that indicates a position and a posture of the measurement object Q, and an arrangement information memory portion for setting the arrangement information HJ.
  • the measurement object Q is set to a predetermined position in a predetermined posture for the three-dimensional measurement.
  • the measurement object Q is set on a stage so that the bottom of the measurement object Q is at the lower side.
  • the arrangement information HJ of the measurement object Q can also be entered by the operator who has set the measurement object Q and uses the input device 13 or an input portion of the control device 15.
  • a positioning device is complete for setting the measurement object Q, it is possible to set the arrangement information HJ in the control device 15 beforehand in accordance with the positioning device.
  • the three-dimensional measuring device VD performs the three-dimensional measurement of the measurement object Q set as described above so as to obtain three-dimensional shape data SD of each part.
  • its position and posture are determined by the manipulator 16 that is controlled by the control device 15.
  • the measured three-dimensional shape data SD are entered into the processing device 11 via an appropriate interface or entered into another appropriate computer.
  • the operator may view the picture HG that is displayed on the screen of the display device 12 and indicates the measurable part so as to determine the position and the posture of the three-dimensional measuring device VD.
  • Fig. 2 is a block diagram showing a functional structure of the processing device 11.
  • the processing device 11 is provided with an arrangement information storing portion (first obtaining portion) 21, a design shape information storing portion (second obtaining portion) 22, a characteristics information storing portion (third obtaining portion) 23, an instrument specifics information storing portion (fourth obtaining portion) 24, a measurement allowable time storing portion (fifth obtaining portion) 25, a determining portion 26, a measurement allowance output portion 27 and a measurement condition output portion 28.
  • the arrangement information HJ of the measurement object Q is obtained and stored in the arrangement information storing portion 21.
  • the arrangement information HJ can be obtained from the input device 13, the control device 15 or the like.
  • the arrangement information storing portion 21 basically stores the arrangement information HJ of the measurement object Q that is currently set.
  • the design shape information KJ of the measurement object Q is obtained and stored in the design shape information storing portion 22.
  • the design shape information KJ can be obtained by transmitting predetermined data from the CAD system 14.
  • the design shape information KJ can also be obtained by performing the three-dimensional measurement of the measurement object Q using the three-dimensional measuring device VD.
  • the design shape information KJ can also be obtained by performing the three-dimensional measurement of the measurement object Q using another three-dimensional measuring device (not shown).
  • the master measured shape data information obtained by the three-dimensional measuring device can be used as the design shape information KJ.
  • the characteristics information TJ of the measurement object Q is obtained and stored in the characteristics information storing portion 23.
  • the characteristics information TJ includes material, quality of material, surface roughness, color, surface reflectance, transmittance, dimension tolerances and dimension accuracy as described above.
  • the characteristics information TJ can be obtained by transmitting predetermined data from the CAD system 14. In addition, it is also possible to enter the characteristics information TJ from the input device 13.
  • the instrument specifics information storing portion 24 stores the specifics information SJ of the three-dimensional measuring device VD, i.e., measurable angle of view of the three-dimensional measuring device VD, resolution, measurement accuracy, time necessary for measurement of one time, and dimensions and shapes of the three-dimensional measuring device VD.
  • the specifics information SJ can also be called instrument characteristics information.
  • the specifics information SJ can be obtained by transmitting data related to the three-dimensional measuring device VD therefrom.
  • the specifics information SJ can also be entered from the input device 13.
  • the measurement allowable time storing portion 25 stores measurement allowable time KT that is allowed for the measurement or measurement allowable number of times KK that is allowed for the measurement.
  • the measurement allowable time KT or the measurement allowable number of times KK can be entered and set by an operator from the input device 13.
  • the determining portion 26 determines a measurable part KB that can be measured by the three-dimensional measuring device VD about the surface shape of the measurement object Q in accordance with the arrangement information HJ, the design shape information KJ, the characteristics information TJ, the specifics information SJ and the measurement allowable time KT or the measurement allowable number of times KK. In other words, it is possible to indicate the measurable part KB and a non-measurable part HB of the measurement object Q. Along with determination of the measurable part KB, its optimal measurement condition SC is also determined, so that the optimal measurement condition SC of the measurable part KB can be indicated.
  • the measurement allowance output portion 27 outputs information about the measurable part KB and the non-measurable part HB determined by the determining portion 26 to the display device 12, the control device 15 and other equipment.
  • the measurement condition output portion 28 outputs information about the measurement condition SC to external equipment in the same manner.
  • Fig. 3 is a flowchart showing a process of determining a part that can be measured by three-dimensional measurement, which is performed by the processing device 11
  • Fig. 4 is a flowchart showing a determination parameter calculating process
  • Fig. 5 is a flowchart showing an interference avoiding process
  • Fig. 6 is a diagram showing a state of an interference avoiding process
  • Figs. 7(A) and 7(B) are diagrams showing an example of determining whether the measurement is possible or not.
  • each part of the measurement object Q means a primitive (element) of CAD data, for example.
  • the determination parameter calculating process is performed first so that the determination parameter is calculated (#11).
  • measurement direction of the three-dimensional measuring device VD toward the measurement object Q is set to the normal direction with respect to the surface of the measurement object Q (#12). It is determined whether or not the part to be measured on the measurement object Q is the bottom (#13). If the part to be measured is the bottom (Yes in #13), it is determined that the measurement is impossible (#21).
  • the reflectance HR is higher than the reference value SV1
  • a determination parameter HP of each part is calculated in the determination parameter calculating process as shown in Fig. 4.
  • the determination parameter HP is, for example, a normal vector of the shape, reflectance HR of the surface, quantity of specular reflection, and a measurement limit angle with respect to the normal vector in a part of the measurement object Q to be measured.
  • it is supposed to calculate the normal vector, the measurement limit angle, the reflectance and the specular reflection.
  • the normal vector (n) is calculated from shape data of the measurement object Q based on the design shape information KJ (#31).
  • base line length information of the three-dimensional measuring device VD, the angle of view and a measurement distance, the measurement limit angle in the normal direction of the measurement object Q is calculated (#32).
  • the surface reflectance of the part is calculated from color of the measurement object Q based on the characteristics information TJ (#33).
  • it is also possible to calculate the reflectance or the quantity of received light by using a conversion equation of color and reflectance.
  • the quantity of received light may be determined from spectral intensity of a project light source (laser beam or slit light) of the three-dimensional measuring device VD, spectral reflectance of the measurement object Q, diffusion characteristic, and position relationship of distance and direction between the measurement object Q and the three-dimensional measuring device VD. If the determined quantity of received light is larger than a predetermined value that depends on the specifics information SJ of the three-dimensional measuring device VD, it is determined that the measurement is possible.
  • a project light source laser beam or slit light
  • the measurement part BU of the measurement object Q is set to be a sample, and diffusion reflection characteristic on the surface of the sample is represented by f( ⁇ , ⁇ ).
  • ⁇ is an incident angle of incident light (project light) to the sample surface
  • ⁇ is reflection angle of reflection light on the sample surface.
  • the angles ⁇ and ⁇ are shown in Fig. 22.
  • the spectral reflectance characteristic of the sample surface is represented by ⁇ ( ⁇ ).
  • ⁇ ( ⁇ ) the spectral reflectance characteristic depends on a material of the sample as simplification.
  • a distance between the light receiving portion and the sample is represented by d. If the light source of the light projecting portion is a laser, attenuation due to a distance d between the light source and the sample can be neglected. Considering only distance attenuation of the reflection light, the quantity of received light A( ⁇ , ⁇ ) is expressed by the equation (1) below.
  • a ⁇ , ⁇ k d 2 ⁇ ⁇ ⁇ ⁇ ⁇ s ⁇ ⁇ f ⁇ , ⁇ ⁇ ⁇ ⁇ d ⁇ ⁇
  • k is a constant.
  • Arrangement relationship between the sample and the three-dimensional measuring device VD is shown in Fig. 23.
  • the quantity of received light A( ⁇ , ⁇ ) can be calculated from these relationships.
  • P, s( ⁇ ) and D( ⁇ ) are determined as functions of the device. Therefore, f( ⁇ , ⁇ ) and p( ⁇ ) are measured for obtaining data about various types of samples (materials and surface states), and a database may be generated.
  • ⁇ , ⁇ and d are determined by the position relationship between the arrangement (distance) of the light projecting portion and the light receiving portion of the three-dimensional measuring device VD and the measurement part BU of the measurement object Q in the position relationship between the three-dimensional measuring device VD to be evaluated and the measurement object Q. Therefore, the quantity of received light A( ⁇ , ⁇ ) can be estimated by using data of ⁇ ( ⁇ ) that are determined in advance in accordance with a material of the sample.
  • quantity of specular reflection of the measurement object Q is determined by equalizing the incident angle to the reflection angle in the equation (1). Therefore, the quantity of specular reflection is calculated based on this (#34).
  • the quantity of specular reflection can be calculated in accordance with surface roughness of the measurement object Q.
  • the surface roughness can be expressed by various parameter values defined by JIS, a triangle mark or other parameters.
  • the diffusion characteristic of the surface may be affected responding to the surface roughness.
  • the dead angle of the three-dimensional measuring device VD indicates that there is an interference part in the measurement direction although the three-dimensional measuring device VD can be arranged.
  • a method for determining the dead angle it is possible to calculate a laser vector (a projection light vector) and a line of sight vector (direction in which the reception light element sees the position) from optical information of the three-dimensional measuring device VD, e.g., ejection position of the laser beam that is the measurement light source, a center of lens, a position of the reception light element and the like. If there is a part other than the part to be measured on these two vectors, it is determined to be the dead angle.
  • the measurement limit angle ⁇ is obtained from the determination parameter HP first (#41). According to the measurement limit angle ⁇ , a measurement limit direction that is slanted from the normal direction by the measurement limit angle ⁇ is obtained. The number of looping times N is determined from the measurement allowable number of times KK or the measurement allowable time KT (#42).
  • a search direction vector (Vs) that indicates a difference between the normal vector (n) and the measurement limit direction (LIMIT) is divided by N, which makes a vector vs (#43).
  • the vector vs is a differential vector of one search for avoiding interference. Every time when the differential vector vs is added to the normal vector (n), the measurement direction vector to be checked is obtained.
  • a variable i is set to "1" initially (#44), and the following loop is repeated until the variable i becomes N or more or the interference object disappears (#45-49). In other words, it is determined whether or not an interference object or an interfering part exists in the measurement direction vector (n+i x vs) (#45). If the interference object exists, the variable i is incremented (#46), which is repeated until the variable i reaches N (#47). If it is not the dead angle of the three-dimensional measuring device VD and if the position of the three-dimensional measuring device VD have no interfering part, the loop is stopped, and the measurement direction vector (n+i x vs) at that time is fixed as the measurement direction.
  • the measurement direction is determined if the three-dimensional measurement is possible. Since the determined measurement direction is closest to the normal direction, it is also an optimal measurement direction, i.e., an optimal measurement condition.
  • Figs. 7(A) and 7(B) it is supposed that there are two three-dimensional measuring devices VD1 and VD2 having different base line lengths. If the three-dimensional measuring device VD1 having a long base line is used for measurement as shown in Fig. 7(A), a hole AN cannot be measured because of interference by another part. In contrast, if the three-dimensional measuring device VD2 having a short base line is used for measurement as shown in Fig. 7(B), the hole AN can be measured to its bottom.
  • the part (area) that was determined to be a part that could be measured by the second three-dimensional measuring device VD2 is already determined to be a part that can be measured by the first three-dimensional measuring device VD1
  • measurable areas of them for one measurement time are compared so that a three-dimensional measuring device having a larger measurable area is selected to be used. If the measurable areas are the same, a three-dimensional measuring device VD having higher measurement accuracy is selected to be used.
  • the measurable area can be calculated from an angle of view or depth of field that are obtained from the specifics information SJ.
  • the measurement condition SC includes a measurement position of the three-dimensional measuring device VD and a posture of the three-dimensional measuring device VD.
  • Fig. 8 is a diagram showing a shape of a measurement object Q1 that is used in a first example
  • Fig. 9 is a diagram showing normal vectors of the measurement object Q1
  • Fig. 10 is a diagram showing a state of determining whether or not a measurement part BU2 that is a hole can be measured
  • Fig. 11 is a diagram showing a state of determining whether or not a measurement part BU3 that is a hole can be measured
  • Fig. 12 is a diagram showing a measurement allowance determining picture HG1 in which a measurement allowance determination result about the measurement object Q1 is displayed.
  • the shape of the measurement object Q1 is displayed in a two-dimensional manner. It is the same for other examples.
  • measurement parts BU1, BU2, BU3 ... are shown on the measurement object Q1.
  • the measurement parts BU2 and BU3 are holes AN.
  • One three-dimensional measuring device VD1 is used for the measurement.
  • Concerning the three-dimensional measuring device VD1 that is used, obtained specifics information SJ is as follows.
  • the resolution is 0.1 mm, the accuracy is 0.1 mm, and the measurement distance is 600 mm. If the specular reflection is 80% or more, the measurement is impossible. If the reflectance is 10% or more with respect to the measurement light source, the measurement is possible. Dimensions of the three-dimensional measuring device VD1. As the optical information, the base line length: 250 mm, the center of the lens, the light source position, the angle of view: 32 mm x 240 mm. Color of the projection light source is red.
  • the design shape information KJ of the measurement object Q1 is obtained from the three-dimensional CAD data, for example or from master shape data obtained by the measurement using the three-dimensional measuring device.
  • characteristics information TJ of the measurement object Q1 is as follows.
  • Color is white with reflectance of 80%. Surface finishing that is considered to cause diffusion reflection by surface roughness. Tolerance is 0.2 mm in all parts.
  • Pieces of characteristics information TJ are obtained from the three-dimensional CAD data or entered by the operator manually in advance.
  • the determination parameter HP is calculated.
  • a normal vector is determined.
  • the normal vector is shown by an arrow.
  • the measurement limit angle ⁇ is calculated in accordance with the specifics information SJ of the three-dimensional measuring device VD1.
  • the measurement limit angle ⁇ is calculated to be 45 degrees from the resolution, the angle of view, the base line length and the measurement distance. Since color of the measurement object Q1 is white with 80% and color of the projection light source is red color, the reflectance is calculated to be 80%. From surface roughness of the measurement object Q1, it is calculated to be diffusion reflection.
  • the measurement part BU1 shown in Fig. 8 is determined to be the measurable part KB by the reasons described below.
  • a part other than the measurement parts BU2 and BU3 that are holes can be determined to be measurable parts KB by a similar determination.
  • measurement allowance determination for the measurement parts BU2 and BU3 that are holes will be described.
  • both the side surface and the bottom are the non-measurable part HB because they become dead angles of the three-dimensional measuring device VD1 in any arrangement of the three-dimensional measuring device VD1.
  • the measurement allowance determination is performed for the measurement part BU3 that is a hole.
  • the measurement part BU3 is determined to be the measurable part KB because of the following reasons.
  • the three-dimensional measuring device VD1 in an ideal arrangement of the three-dimensional measuring device VD1, the three-dimensional measuring device VD1 is interfered with another part of the measurement object Q1. Therefore, the allowance or refusal of measurement is determined by the interference avoiding process.
  • a position of the three-dimensional measuring device VD1 is searched within 45 degrees from the normal direction (n) to the measurement limit direction (LIMIT). As a result, it is found that there is no interference part and the measurement can be performed, so it is decided that the side surface can also measured.
  • the determination result and the like are outputted from the measurement allowance output portion 27 and the measurement condition output portion 28.
  • the measurable part KB and the non-measurable part HB of the measurement object Q1 are displayed on the screen of the display device 12 in accordance with the outputted determination result.
  • the measurable part KB and the non-measurable part HB are displayed with different colors in the measurement allowance determining picture HG1.
  • the measurable part KB is displayed with blue color while the non-measurable part HB is displayed with red color, for example.
  • the operator can easily discriminate a part that can be measured by the three-dimensional measuring device VD1 from a part that cannot be measured by the same when viewing the measurement allowance determining picture HG1, so that measurement time can be shortened.
  • Fig. 13 is a diagram showing another measurement allowance determining picture HG2 about the measurement object Q1.
  • the specifics information SJ of the three-dimensional measuring device VD2 is as follows.
  • the resolution is 0.1 mm.
  • the accuracy is 0.15 mm.
  • the measurement distance is 600 mm. If the specular reflectance is 80% or more, the measurement is impossible. If the reflectance for the measurement light source is 10% or more, the measurement is possible.
  • the bottom of the measurement object Q1 is determined to be not measurable.
  • the measurement parts BU1 and BU3 of the measurement object Q1 are measured by the three-dimensional measuring device VD1 in the same method as the first example.
  • Concerning the three-dimensional measuring device VD2 it is determined to be the measurable part KB by similar determination. Therefore, higher priority is put on the measurement by the three-dimensional measuring device VD1 that has larger angle of view in accordance with the above-described "method of determining priority".
  • both the side surface and the bottom become dead angles when the three-dimensional measuring device VD1 is used in any arrangement of the three-dimensional measuring device VD1 similarly to the first example. Therefore, it is determined to be impossible to measure them.
  • the base line length thereof is short. Therefore, the hole part does not become a dead angle as shown in Fig. 7(B) and can be measured.
  • the entire surface of the measurement object Q1 except the bottom can be measured.
  • the measurable part KB and the non-measurable part HB of the measurement object Q1 are displayed on the screen of the display device 12.
  • measurement allowance determining picture HG2 displays the measurable part KB1 that can be measured by the three-dimensional measuring device VD1, the measurable part KB2 that can be measured by the three-dimensional measuring device VD2 and the non-measurable part HB in different colors.
  • the measurable part KB1 is displayed in blue color
  • the measurable part KB2 in green color
  • the non-measurable part HB in red color, for example.
  • a third example will be described as a case where one three-dimensional measuring device VD1 is used and a type of its lens is exchanged so as to change its specification.
  • a case will be described, in which an angle of view and accuracy are changed by exchanging lenses.
  • a lens having a wide angle of view is referred to as a "wide angle lens”
  • a lens having a narrow angle of view is referred to as a "telephoto lens” in the following description.
  • the resolution and the accuracy are respectively 0.2 mm and 0.2 mm for the wide angle lens, while they are respectively 0.05 mm and 0 mm for the telephoto lens.
  • Other specifics information SJ is the same as the first example.
  • Fig. 14 is a diagram showing a measurement object Q2 that is used for a third example
  • Fig. 15 is a diagram showing another measurement allowance determining picture HG3 about the measurement object Q2.
  • the measurement object Q2 has a small rib RB protruding from one side of the rectangular section.
  • the characteristics information TJ of the measurement object Q2 includes tolerance values of the measurement parts BU, which are 0.5 mm without designation and 0.1 mm at the part of the rib RB. Other characteristics are the same as the first example.
  • the angle of view is 400 x 320 mm for the wide angle lens and is 100 x 80 mm for the telephoto lens.
  • the bottom of the measurement object Q2 is determined to be a non-measurable part.
  • it is determined to be measurable in determination of interference and a surface state by determining a shape of the measurement object Q2.
  • tolerance that is set for the measurement object Q2 is 0.1 mm, while accuracy and resolution of the measurement device are 0.2 mm for the wide angle lens. Since the accuracy and the resolution are not sufficient, it is determined that the measurement by the wide angle lens is not possible. If the telephoto lens is used, accuracy and resolution are 0.05 mm with respect to tolerance of 0.1 mm. Therefore, it is determined that the measurement is possible.
  • the wide angle lens having a larger area per measurement will be used for the measurement in accordance with the "method for determining priority"
  • the telephoto lens is used only for the part of the rib RB, and the wide angle lens is used for other parts.
  • a measurement result that can stand up for the tolerance determination can be obtained.
  • the measurable part KB3 using the wide angle lens is shown in blue color and measurable part KB4 using the telephoto lens is shown in green color in the measurement allowance determining picture HG3 for the measurement object Q2.
  • Fig. 16 is a diagram showing a measurement object Q3 that is used for a fourth example
  • Fig. 17 is a diagram showing a measurement allowance determining picture HG4 about the measurement object Q3.
  • the specifics information SJ of the three-dimensional measuring device VD1 is the same as the first example.
  • the characteristics information TJ of the measurement object Q3 is basically the same as the first example but is different in the following point.
  • the measurement part BU4 has the specular reflection (with specular reflectance 95%), and the measurement part BU5 has surface color of black (with reflectance 5%).
  • the bottom is determined to be non-measurable part.
  • Concerning the measurement part BU4 it is determined that the measurement is not possible in the determination of the specular reflection. In other words, the three-dimensional measuring device VD1 cannot make measurements if the specular reflectance is 80% or more.
  • Concerning the measurement part BU5 it is determined that the measurement is not possible in the reflectance determination. It is because the reflectance is 5% although the three-dimensional measuring device VD1 can make measurements when the reflectance is 10% or more.
  • Concerning other measurement part BU it is determined that the measurement is possible because all conditions are satisfied, which includes reflectance, specular reflection quantity, no interference and accuracy.
  • the measurable part KB is shown in blue color and the non-measurable part HB in red color, for example, in the measurement allowance determining picture HG4 for the measurement object Q3.
  • Fig. 18 is a diagram showing a measurement object Q4 that is used for a fifth example
  • Fig. 19 is a diagram showing another measurement allowance determining picture HG5 about the measurement object Q4.
  • the specifics information SJ of the three-dimensional measuring device VD1 is the same as the first example.
  • a shape of the measurement object Q3 is a cylindrical column shape as shown in Fig. 18, and the characteristics information TJ is basically the same as the first example.
  • the measurement allowable number of times KK designates seven times as the measurement allowable number of times KK. If the measurement allowable number of times KK is designated as seven times, an arrangement of the three-dimensional measuring device VD1 is calculated so that an overall surface shape except the bottom of the measurement object Q4 can be obtained to a certain extent by the measurement of seven times, and thereby a measurable area is outputted. More specifically, the process is performed in the following procedure.
  • the measurement allowable time KT is set instead of the measurement allowable number of times KK
  • the measurement allowable number of times KK may be determined at a rough estimate in accordance with time necessary for one measurement by the three-dimensional measuring device VD1, and then a process similar to the above-described process may be performed.
  • a part of the bottom and the side surface is displayed as the non-measurable part HB in the measurement allowance determining picture HG5 for the measurement object Q4, and other parts are displayed as the measurable part KB.
  • the measurement allowable number of times KK is set to seven times, data deficit may be generated in a part of the side surface.
  • Fig. 20 is a diagram showing a measurement procedure picture HG6 that is displayed in a sixth example
  • Fig. 21 is a diagram showing three-dimensional shape data SD obtained and integrated by automatic measurement.
  • the specifics information SJ and the measurement object Q1 of the three-dimensional measuring device VD1 are the same as the first example. Therefore, the bottom of the measurement object Q1 and the measurement part BU2 that is a hole are the non-measurable part HB.
  • the measurement condition is calculated in accordance with the method of determining the measurement condition SC described above.
  • the measurement orders for measurement parts BU of the measurement object Q1 are determined so that a movement distance of the three-dimensional measuring device VD1 becomes small for shortening the measurement time in accordance with the obtained measurement condition.
  • circled numerals indicate the measurement orders, and the arrow indicates the measurement direction.
  • the measurement is performed except for the non-measurable part HB from the measurement part BU1 in the clockwise direction. Although it is not shown in Fig. 20, the measurement position of the three-dimensional measuring device VD1 is also displayed in the measurement procedure picture HG6.
  • the surface of the measurement object Q1 is measured except for the measurement part BU2 that is a hole and the bottom.
  • an appropriate manipulator may be used for lifting up the measurement object Q1, or a posture of the measurement object Q1 may be changed by setting the measurement object Q1 upside down or tilting it horizontally or in a slanting manner.
  • the present invention can be used for a three-dimensional measuring system that measures three-dimensional shapes of various measurement objects in a noncontact manner.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
EP05024134A 2005-06-22 2005-11-04 Système de mesure tridimensionel Expired - Fee Related EP1736731B1 (fr)

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JP2005182185A JP4052323B2 (ja) 2005-06-22 2005-06-22 ３次元測定システム

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US7912320B1 (en) * 2007-01-16 2011-03-22 Paul Minor Method and apparatus for photographic measurement
JP5286699B2 (ja) * 2007-06-21 2013-09-11 日本精工株式会社 物品の形状測定方法及び測定装置
JP2009069069A (ja) * 2007-09-14 2009-04-02 Mitsui Zosen System Research Inc 測定領域確認装置および測定領域確認方法
JP2009192332A (ja) * 2008-02-13 2009-08-27 Konica Minolta Sensing Inc ３次元処理装置における３次元データの表示制御方法および３次元処理装置
WO2013054814A1 (fr) * 2011-10-11 2013-04-18 株式会社ニコン Dispositif et procédé de mesure de formes, système et procédé pour fabriquer des structures et programme de mesure de formes
JP5638578B2 (ja) * 2012-08-09 2014-12-10 株式会社東芝 観測支援装置、観測支援方法およびプログラム
JP6338369B2 (ja) * 2013-12-26 2018-06-06 キヤノン株式会社 情報処理装置および情報処理方法
JP6357622B2 (ja) * 2014-03-28 2018-07-18 石川県 作業支援装置、作業支援システム、作業支援方法およびプログラム
JP6821326B2 (ja) * 2016-05-12 2021-01-27 キヤノン株式会社 情報処理装置、計測システム、情報処理方法およびプログラム
JP6797556B2 (ja) * 2016-05-13 2020-12-09 株式会社トプコン 管理装置、管理方法および管理用プログラム
EP3985347B1 (fr) * 2019-06-17 2024-04-03 OMRON Corporation Dispositif, procédé et programme de mesure de nuages de points
JP7378310B2 (ja) 2020-02-10 2023-11-13 三菱電機株式会社 形状測定システム、形状測定方法およびプログラム
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US20060290945A1 (en) 2006-12-28
US7495776B2 (en) 2009-02-24
DE602005027188D1 (de) 2011-05-12
EP1736731B1 (fr) 2011-03-30
EP1736731A3 (fr) 2009-11-25
JP4052323B2 (ja) 2008-02-27

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