EP1733465A1 - Systeme d'entrainement alternatif pour le balayage d'une piece a usiner - Google Patents

Systeme d'entrainement alternatif pour le balayage d'une piece a usiner

Info

Publication number
EP1733465A1
EP1733465A1 EP05737133A EP05737133A EP1733465A1 EP 1733465 A1 EP1733465 A1 EP 1733465A1 EP 05737133 A EP05737133 A EP 05737133A EP 05737133 A EP05737133 A EP 05737133A EP 1733465 A1 EP1733465 A1 EP 1733465A1
Authority
EP
European Patent Office
Prior art keywords
workpiece
rotor
scan
stator
operable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05737133A
Other languages
German (de)
English (en)
Inventor
John Vanderpot
John Pollack
Donald Berrian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Axcelis Technologies Inc
Original Assignee
Axcelis Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Axcelis Technologies Inc filed Critical Axcelis Technologies Inc
Priority to EP10180405A priority Critical patent/EP2264739A3/fr
Publication of EP1733465A1 publication Critical patent/EP1733465A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H01L21/67213—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one ion or electron beam chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20221—Translation
    • H01J2237/20228—Mechanical X-Y scanning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation

Definitions

  • the present invention relates generally to translational scanning systems, and more specifically to a system, apparatus, and method for controlling reciprocating transport of a workpiece to provide precision scanning of the workpiece.
  • a workpiece e.g., a semiconductor wafer
  • Processes such as ion implantation can be performed in order to obtain a particular characteristic on or within the workpiece, such as limiting a diffusivity of a dielectric layer on the workpiece by implanting a specific type of ion.
  • ion implantation processes are performed in either a batch process, wherein multiple workpieces are processed concurrently, or in a serial process, wherein a single workpiece is individually processed.
  • Traditional high-energy or high-current batch ion implanters are operable to achieve an ion beam-line, wherein a large number of wafers may be placed on a wheel or disk, and the wheel is spun and radially translated through the ion beam, thus exposing all of the surface area of the workpieces to the beam at various times throughout the process. Processing batches of workpieces in such a manner, however, generally increases the cost of the system, makes the ion implanter substantially large in size, and reduces system flexibility.
  • an ion beam is either scanned two-dimensionally across a stationary wafer, or the wafer is translated in one direction with respect to a generally stationary fan-shaped ion beam.
  • the process of scanning or shaping a uniform ion beam generally requires a complex beam-line, which is generally undesirable at low energies.
  • This two-dimensional scanning apparatus utilizes direct drive actuators to linearly translate the wafer in the fast scan direction, wherein the transport velocity of the wafer in the fast scan direction is substantially limited due, at least in part, to significant inertial forces encountered during acceleration and deceleration of the wafer as the direction of fast scan transport is periodically reversed.
  • Large inertial forces in the conventional apparatus are accordingly associated with a large reaction force at the direct drive actuator, wherein the large reaction force can ultimately lead to significant vibration of the apparatus, thus having a deleterious impact on the ion implantation process. Vibration may also pose a problem for nearby equipment, such as lithography equipment that is typically vulnerable to vibration.
  • the present invention overcomes the limitations of the prior art by providing a system and apparatus that generally confines forces associated with reciprocally scanning a workpiece to various components aligned along a single axis, thus substantially limiting vibration to enable increased process speeds. Consequently, the following presents a simplified summary of the invention in order to provide a basic understanding of some aspects of the invention. This summary is not an extensive overview of the invention. It is intended to neither identify key or critical elements of the invention nor delineate the scope of the invention. Its purpose is to present some concepts of the invention in a simplified form as a prelude to the more detailed description that is presented later.
  • the present invention is directed generally toward a system, apparatus, and method for reciprocally scanning a workpiece.
  • a process chamber associated with the ion beam wherein a motor is operably coupled to the process chamber.
  • the motor comprises a rotor and a stator, wherein the rotor and the stator are each dynamically mounted relative to one another about a first axis such that the rotor and stator are operable to individually rotate and counter-rotate about the first axis.
  • an electromagnetic force between the rotor and the stator to generally determine a rotational position of the rotor about the first axis.
  • the stator is operable to act as a reaction mass responsive to the rotation of the rotor, particularly during periodic reversal of the direction of rotation of the rotor.
  • a shaft is fixedly coupled to the rotor, wherein the shaft extends along the first axis into the process chamber.
  • a scan arm generally residing within the process chamber is operably coupled to the shaft in a radial configuration, wherein the scan arm comprises an end effector or other workpiece support member for receiving and restraining the workpiece at a distal end of the scan arm.
  • rotation of the shaft causes the scan arm, being generally fixedly coupled thereto, to correspondingly rotate about the first axis.
  • Rotation of the shaft is selectively reversed to generate a swinging motion of the scan arm in a pendulum type manner, wherein the workpiece is reciprocatingly transported along a first, generally arcuate, scan path and the rotational position of the rotor generally determines a position of the workpiece with respect to the ion beam along the first scan path.
  • a controller is provided, wherein the controller is operable to control the position of the workpiece along the first scan path by controlling the electromagnetic force between the rotor and the stator.
  • a generally constant velocity of the end effector can be maintained in a predetermined range of motion along the first scan path, wherein a translational velocity of the end effector with respect to a generally stationary reference is controlled, and wherein acceleration and deceleration of the end effector occurs outside of the predetermined range of motion of the end effector.
  • an inertial mass is coupled to the stator, wherein the inertial mass rotates about the first axis and generally provides a reversal of direction of rotation of the scan arm, and thus, a reversal of direction of the workpiece along the first scan path.
  • the inertial mass is further balanced about the first axis, wherein a torque in relation to the first axis is generally minimized. Therefore, the electromagnetic force between the rotor and the stator is operable to rotate the stator in reaction to an acceleration or deceleration of the rotor, thus generally confining inertial forces to the first axis.
  • the rotor, stator, and scan arm are generally balanced about the first axis, wherein torque associated with the first axis is generally minimized.
  • One or more counterweights may be associated with the stator and scan arm, wherein the one or more counterweights generally balance the respective components about the first axis.
  • the stator comprises an inertial mass coupled thereto, wherein the inertial mass is significantly greater than that of the scan arm, and wherein a force on the stator caused by the oscillation of the scan arm is generally absorbed by the rotation of the inertial mass and the stator.
  • a control of the rotation of the scan arm about the first axis by controlling the electromagnetic force between the rotor and the stator is operable to precisely control the rotation of the rotor.
  • the motor and associated scan arm are further operable to translate along a second scan path, generally referred to as a slow scan axis, wherein the second scan path, for example, is generally perpendicular to at least a portion of the first scan path.
  • Fig. 1 is a simplified perspective view of an exemplary reciprocating drive apparatus according to one aspect of the present invention.
  • Fig. 2 is a cross-sectional side view of an exemplary reciprocating drive system according to another aspect of the invention.
  • Fig. 3 is a partial side view of an exemplary scan arm according to another exemplary aspect of the invention.
  • Fig. 4 is a simplified perspective view of another reciprocating drive apparatus according to another aspect of the present invention
  • Fig. 5 is a block diagram of a method for reciprocating a workpiece according to another exemplary aspect of the invention.
  • Figs. 6-8 illustrate several views of an exemplary reciprocating drive apparatus according to yet another exemplary aspect of the invention.
  • the present invention is directed generally towards a reciprocating drive system, apparatus, and method for reciprocally translating a workpiece in one or more dimensions. More particularly, the reciprocating drive apparatus is operable to translate the workpiece in two generally orthogonal dimensions along respective first and second scan paths with respect to an ion beam, wherein the workpiece may be translated at a generally constant translational or linear velocity when being subjected to the ion beam.
  • the apparatus and method of the present invention provide a reciprocating and selectively reversible transport of the workpiece along the first scan path, and is advantageously operable to limit vibration and to optimize control of the reciprocating or oscillating transport motion of the workpiece along the first scan path.
  • the reciprocating drive apparatus of the present invention comprises a reaction mass, wherein the reaction mass generally confines forces exerted by the reciprocating drive apparatus to the apparatus itself by rotating about a single axis.
  • the reciprocating drive apparatus comprises a motor having a rotor and a stator, wherein each of the rotor and stator are dynamically mounted relative to one another about a single axis, and operable to rotate individually about the single axis.
  • This dynamic mounting configuration and relationship between the stator and rotor permits rapid acceleration and deceleration of the workpiece at opposite ends of the scan path, wherein a generally uniform translation (e.g., constant acceleration/deceleration or velocity) of the workpiece can be attained within a predetermined range, and wherein inertial forces associated with the translational motion, and particularly forces associated with reversal of the scan direction associated with the reciprocating motion of the apparatus, are substantially confined to the axis of rotation.
  • Fig. 1 illustrates a simplified perspective view of an exemplary reciprocating drive apparatus 100 operable to reciprocally translate or oscillate a workpiece 102 along a predetermined first scan path 104.
  • Fig. 1 the reciprocating drive apparatus 100 of Fig. 1 is illustrated to provide an upper-level understanding of the invention, and is not necessarily drawn to scale. Accordingly, various components may or may not be illustrated for clarity purposes. It shall be understood that the various features illustrated can be of various shapes and sizes, or excluded altogether, and that all such shapes, sizes, and exclusions are contemplated as falling within the scope of the present invention.
  • the drive apparatus of the present invention is operable to reciprocally translate or oscillate the workpiece 102 in a reversible motion along the first scan path 104, such that the workpiece translates altematingly back and forth with respect to a generally stationary ion beam 105, wherein the apparatus can be utilized in an ion implantation process, as will be discussed hereafter in greater detail.
  • the reciprocating drive apparatus 100 may be utilized in conjunction with various other processing systems, which may include other semiconductor manufacturing processes such as, for example, a step-and-repeat lithography system (not shown).
  • the apparatus 100 can be utilized in various processing systems not related to semiconductor manufacturing technology, and all such systems and implementations are contemplated as falling within the scope of the present invention.
  • the reciprocating drive apparatus 100 comprises a motor 106 operably coupled to a scan arm 108 wherein the scan arm is further operable to support the workpiece 102 thereon.
  • the motor 106 for example, comprises a rotor 110 and a stator 112, wherein the rotor and the stator are dynamically coupled and operable to individually rotate about a first axis 114.
  • the rotor 110 is further operably coupled to a shaft 116, wherein the shaft generally extends along the first axis 114 and is operably coupled to the scan arm 108.
  • the rotor 110, shaft 116, and scan arm 108 are generally fixedly coupled to one another, wherein rotation of the rotor about the first axis 114 generally drives rotation of the shaft and scan arm about the first axis, thus generally translating the workpiece 102 along the first scan path 104.
  • the rotor 110, shaft 116, and scan arm 108 may be otherwise coupled to one another, wherein the rotation of the rotor and/or shaft may drive a linear translation of the scan arm with respect to the first axis 114, as will be further discussed infra. Referring now to Figs.
  • an exemplary reciprocating drive system 200 is illustrated in cross-section comprising a reciprocating drive apparatus 201 , such as the reciprocating drive apparatus 100 of Fig. 1 , wherein the reciprocating drive apparatus may be further utilized in an ion implantation process.
  • a reciprocating drive apparatus 201 such as the reciprocating drive apparatus 100 of Fig. 1
  • the reciprocating drive apparatus may be further utilized in an ion implantation process.
  • the exemplary reciprocating drive system 200 of Fig. 2 is operable to scan a workpiece 202 through an ion beam 205 in two dimensions, as will be discussed in greater detail hereafter.
  • the reciprocating drive system 200 comprises a motor 206, such as the motor 106 of Fig. 1 , wherein the motor of Fig.
  • the ion beam 205 may comprise a group of ions traveling together along close, substantially parallel, trajectories taking the form of a spot or so-called "pencil beam", as may be formed by any suitable ion implantation system (not shown) known in the art, the details of which will not be discussed here.
  • the process chamber 208 may comprise a generally enclosed vacuum chamber 210, wherein an internal environment 212 within the process chamber is operable to be generally isolated from an external environment 214 outside the process chamber.
  • the vacuum chamber 210 can be configured and equipped so as to maintain the internal environment 212 at a substantially low pressure (e.g., a vacuum).
  • the process chamber 208 may be further coupled to one or more load lock chambers (not shown), wherein the workpiece may be transported between the internal environment 212 of the process chamber and the external environment 214 without substantial loss of vacuum within the process chamber.
  • the process chamber 208 may alternatively be comprised of a generally non-enclosed process space (not shown), wherein the process space is generally associated with the external environment 214.
  • the process chamber 208 serves as a generally stationary reference 216, wherein the process chamber is generally fixed with respect to the external environment 214.
  • a process medium 218, such as the ion beam 205 serves as the generally stationary reference 216, wherein the process chamber 208 is operable to move with respect to the process medium.
  • the process medium 218, for example, may be alternatively associated with other semiconductor processing technologies.
  • the process medium 218 may comprise a light source (not shown) associated with a lithography process. Accordingly, the present invention contemplates any process chamber 208 and process medium 218 operable to be utilized in processing the workpiece 202, whether the process chamber be enclosed, non- enclosed, fixed, or transitory, and all such process chambers and process mediums are contemplated as falling within the scope of the present invention.
  • the motor 206 comprises a rotor 220 and a stator 222, wherein the rotor and the stator are operable to individually rotate about a first axis 224, and wherein an electromagnetic force (not shown) between the rotor and the stator generally drives a rotation of the rotor about the first axis.
  • a control of the electromagnetic force between the rotor 220 and the stator 222 is operable to selectively drive the rotation of the rotor in a clockwise or counter-clockwise direction about the first axis 224, as will be discussed infra.
  • the motor 206 further comprises a motor housing 226, wherein the motor housing is generally stationary with respect to the first axis 224.
  • the motor housing 226 in the present example generally encases the rotor 220 and stator 222, and further generally serves as the generally stationary reference 216 for the rotation of the rotor and stator.
  • a least a portion of the rotor 220 and stator 222 generally reside within the motor housing 226, however, the motor housing need not enclose the rotor and the stator.
  • the rotor 220 and the stator 222 are operable to individually rotate with respect to the motor housing 226, wherein the motor housing is further operable to generally support the rotor and the stator therein.
  • the motor 206 in one example, comprises a brushless DC motor, such as a three-phase brushless DC servo motor.
  • the motor 206 may be sized such that a substantially large diameter of the motor (e.g., a respective diameter of the stator 222, and/or the rotor 220) provides a substantially large torque, while maintaining a moment of inertia operable to provide rapid control of the rotation of the rotor.
  • the reciprocating drive system 200 further comprises a shaft 228 operably coupled to the motor 206, wherein in one example, the shaft is fixedly coupled to the rotor 220 and generally extends along the first axis 224 into the process chamber 208.
  • the rotor 220 is directly coupled to the shaft 228, as opposed to being coupled via one or more gears (not shown), wherein such a direct coupling maintains a substantially low moment of inertia associated with the rotor, while further minimizing wear and/or vibration that may be associated with the one or more gears.
  • the process chamber 208 comprises an aperture 229 therethrough, wherein the shaft 228 generally extends through the aperture from the external environment 214 to the internal environment 212, and wherein the motor 206 generally resides in the external environment.
  • the shaft 228 is operable to rotate about first axis 224 in conjunction with the rotation of the rotor 220, wherein the shaft is generally rotatably driven by the rotor in alternating, opposite directions.
  • the shaft 228 may be substantially hollow, thereby providing a substantially low inertial mass.
  • the rotor 220 may be substantially hollow, further providing a substantially low rotational inertial mass.
  • One or more low-friction bearings 230 are further associated with the motor 206 and the shaft 228, wherein the one or more low-friction bearings rotatably couple one or more of the rotor 220, the stator 222, and the shaft to a generally stationary reference, such as the housing 226 or the process chamber 208.
  • the one or more low-friction bearings 230 for example, generally provide a low coefficient of friction between the respective rotor 220, stator 222, shaft 228, and motor housing 226.
  • at least one of the one or more low-friction bearings 230 may comprise an air bearing (not shown), a liquid field environment, or other bearing known in the art.
  • the reciprocating drive apparatus 201 is partitioned from the process chamber 208, such that minimum wear and contamination occurs within the internal environment 212.
  • the shaft 228 is generally sealed between the process chamber 208 and the external environment 214 by a rotary seal associated with the shaft and the process chamber, wherein the internal environment 212 within the process chamber is generally isolated from the external environment.
  • the reciprocating drive system 200 further comprises a scan arm 232 operably coupled to the shaft 228, wherein the scan arm is operable to support the workpiece 202 thereon.
  • the scan arm 232 comprises an elongate arm 234 extending radially from the first axis 224, wherein the elongate arm is generally fixedly coupled to the shaft 228, wherein the rotation of the shaft about the first axis generally translates the workpiece 202 with respect to the first axis.
  • the scan arm 232 is coupled to the shaft 228 at a center of gravity of the scan arm, wherein the scan arm is substantially rotationally balanced about the first axis 224.
  • the scan arm 232 is comprised of a light weight material, such as magnesium or aluminum.
  • the scan arm 232 may further comprise an end effector 236 operably coupled thereto, whereon the workpiece 202 is generally supported thereon.
  • the end effector 236, for example, comprises an electrostatic chuck (ESC) or other workpiece clamping device is operable to selectively clamp or maintain the workpiece 202 with respect to the end effector.
  • the end effector 236 may comprise various other devices for maintaining a grip of the workpiece 202, such as a mechanical clamp or various other retaining mechanisms (not shown) as may be known in the art, and all such devices are contemplated as falling within the scope of the present invention.
  • the scan arm 232 may further comprise a counterweight 238 operably coupled thereto, wherein the counterweight generally balances a mass of the scan arm, end effector 236, and the workpiece 202 about the first axis 224.
  • Such a counterweight 238 may advantageously assist in centering the mass moment of inertia of the scan arm 232 about the first axis 224, thus dynamically balancing the scan arm about the first axis.
  • the scan arm 232, shaft 228, rotor 220, and stator 222 are generally dynamically balanced about the first axis 224, thus generally eliminating side load forces, other than gravitational forces.
  • the counterweight 238, for example, may be comprised of heavier metal than the scan arm 232, such as steel.
  • the reciprocating drive apparatus 201 may further comprise a load lock chamber (not shown) associated with the process chamber 208, wherein scan arm 232 is further operable to rotate and/or translate the end effector 236 to the load lock chamber in order to insert or remove workpieces 202 to or from the process chamber.
  • a faraday cup 237 is provided within the process chamber 208 and positioned within a path of the ion beam 205, wherein the faraday cup is operable to generally sense a beam current associated with the ion beam. Accordingly, the sensed beam current can be utilized for subsequent process control.
  • the end effector 236 may be rotatably coupled to the scan arm 232 about a second axis 240, wherein the end effector is operable to rotate about the second axis.
  • An end effector actuator 242 may be operably coupled to the scan arm 232 and the end effector 236, wherein the end effector actuator is operable to rotate the end effector about the second axis 240.
  • the second axis 240 is generally parallel to the first axis 224, wherein the end effector actuator 242 may be operable to selectively rotate the workpiece relative to the ion beam to vary the so-called "twist angle" of implant, as will be understood by those of skill in the ion implantation art.
  • the rotatable coupling of the end effector 236 to the scan arm 232 may be utilized to maintain a rotational orientation (e.g., a rotational orientation 250 of Fig. 3) of the workpiece 202 with respect to the ion beam 205 by continuously controlling the rotation of the end effector 236 about the second axis 240.
  • the end effector actuator 242 may comprise a pivot mount (not shown) associated with the second axis 240, wherein inertial forces associated with the workpiece 202 are operable to maintain the rotational orientation of the workpiece 202 with respect to the ion beam 205.
  • Maintaining the rotational orientation of the workpiece 202 with respect to the ion beam 205 is advantageous when the ion beam impinges on the workpiece at a non- orthogonal angle (not shown), and/or when a crystalline or other structure associated with the workpiece (e.g., a semiconductor substrate, or a substrate having structures formed thereon) plays a role in the uniformity of the ion implantation.
  • a crystalline or other structure associated with the workpiece e.g., a semiconductor substrate, or a substrate having structures formed thereon
  • the workpiece 202 can be reciprocally translated along a first scan path 246 with respect to the ion beam 205 (e.g., via one or more cyclical counter-rotations of the shaft 228 about the first axis 224), wherein the ion beam of Fig. 2 is illustrated as going into the page of Fig. 3.
  • the rotation 244 (and counter- rotation) of the shaft 228 about the first axis 224 can be advantageously controlled in order to oscillate or reciprocate the end effector 236 along the first scan path 246 in a uniform manner, as will be discussed hereafter.
  • FIG 3 further illustrates a rotation 248 of the end effector 236 about the second axis 240 as discussed above, wherein the rotation of the end effector, and hence, the workpiece 202, about the second axis can be further controlled in order to maintain the rotational orientation 250 of the workpiece with respect to the first axis 224 or ion beam 205 (e.g., rotational orientation of the workpiece with respect to the ion beam is indicated by a triangle 252 that is fixed with respect to the workpiece).
  • a generally constant translational velocity of the end effector 236 when the workpiece is subject to the ion beam 205 while traveling along the first scan path 246. Maintaining a generally constant velocity of the end effector 236 while the workpiece passes 202 through the ion beam 205, for example, provides a generally uniform dose of ions to the workpiece, thus evenly processing the workpiece as it travels along the first scan path 246 in a pendulum-type motion. Therefore, in one embodiment, a generally constant velocity is desired for a predetermined scanning range 254 associated with the movement of the workpiece 202 through the ion beam 205.
  • the predetermined scanning range 254 is generally associated with the physical dimensions of the workpiece 202 (e.g., greater than a diameter D of the workpiece).
  • the predetermined scanning range 254 is generally defined by the workpiece 202 traveling a distance greater than a total of the diameter D of the workpiece plus a width of the ion beam 205, wherein the workpiece travels through the ion beam along the first scan path 246, and wherein the ion beam is relatively scanned between opposite ends 256 of the workpiece.
  • a desired velocity profile for the workpiece 202 within the predetermined scanning range 254 may be defined, wherein the desired velocity profile generally depends on a configuration of the reciprocating drive apparatus 201.
  • a respective generally constant velocity or a variable velocity of the rotation 244 of the scan arm (and thus, a respective generally constant or variable velocity of the workpiece along the first scan path 246) may be desired.
  • the rotational velocity of the scan arm about the first axis 224 may be varied when the ion beam 205 nears ends 255 of the predetermined scanning range 254 (e.g., an increase in velocity by about 10% near the ends of the predetermined scan range) in order to provide a generally uniform dose of ions to the workpiece along the curvilinear path.
  • properties of the ion beam 205 such as the ion beam current, can be varied in order to produce a generally uniform dosage of ions to the workpiece 202.
  • the workpiece 202 it is generally desirable for the workpiece 202 to maintain a substantially constant velocity within the predetermined scanning range 254 along the first scan path 246 in order to generally evenly expose the workpiece 202 to the ion beam 205.
  • acceleration and deceleration of the workpiece is inevitable, such as between clockwise and counter-clockwise rotations (e.g., counter-rotations) of the shaft 228 about the first axis 224.
  • a maximum scan distance 258 traveled by the opposite ends 256 of the workpiece 202 between maximum positions 260 and 262 along the first scan path 246 can be further defined, wherein the acceleration and deceleration can occur in overshoot regions 264, either when the ion beam 205 is not in contact with the workpiece, or when at least a portion of the ion beam is not in contact with the workpiece.
  • the stator 222 of Fig. 2 being operable to rotate about the first axis 224, is further operable to act as a reaction mass 266 to the rotation 244 of the scan arm 232 shown in Fig. 3.
  • inertial forces associated with the rotation and/or translation of the rotor, shaft, scan arm, end effector, and workpiece are generally translated into a rotation of the stator 222 about the first axis 224 by an electromagnetic force between the rotor and the stator, and wherein the inertial forces are generally balanced and confined to the first axis.
  • stator 222 acting as the reaction mass 266, is therefore operable to accelerate and decelerate the scan 232 arm in the overshoot region 264 of Fig. 3, wherein the electromagnetic force between the stator and the rotor 220 of the motor 206 generally determines a rotational position of the respective rotor and the stator about the first axis.
  • the rotational position of the rotor 220 about the first axis 224 generally determines the rotational position of the shaft 228, scan arm 232, end effector 236, and workpiece 202 about the first axis, wherein the rotational position of the rotor can be efficiently controlled by controlling the electromagnetic force between the rotor and the stator.
  • the stator 222 e.g., wherein the stator acts as the reaction mass 266
  • an inertial mass 268 (e.g., a "flywheel”) is further operably coupled to the stator 222, wherein the inertial mass is further operable to act as the reaction mass 266 in order to further limit the rotation of the stator in reaction to (e.g., to counteract) the rotation of the rotor 220, scan arm 232, end effector 236, and workpiece 202 about the first axis 224.
  • the inertial mass 268, for example, is generally greater than or equal to the total mass moments of inertia of one or more of the rotor 220, shaft 228, scan arm 232, end effector 236, and workpiece 202.
  • the mass moment of inertia associated with the reaction mass 266 is roughly ten times greater than a total of the mass moments of inertia of the rotor 220, shaft 228, scan arm 232 (and counterweight 238), end effector 236, and workpiece 202, wherein for every ten degrees of rotation of the rotor, the stator 222 need only rotate one degree about the first axis 224.
  • Providing a substantially large inertial mass 268, for example further advantageously reduces back-EMF associated with the velocity of the rotor 220 relative to the stator 222, thus reducing an amount of energy required to drive the motor 206.
  • the reciprocating drive apparatus 201 is operable to vary a rotational velocity of the shaft 228 (and hence, the translational velocity of the workpiece 202) in accordance with the rotational position of rotor 220 with respect to the stator 222.
  • the reciprocating drive apparatus 201 further comprises one or more sensing elements 270, wherein the rotational position 244 of the workpiece 202 along the first scan path 246 can be further determined.
  • the one or more sensing elements 270 may comprise one or more high resolution encoders operable to continuously or repeatedly provide feedback control of the respective rotational position(s) about the first axis.
  • the one or more sensing elements 270 comprise a first encoder 272 operable to sense a rotational orientation of the rotor 220 with respect to the stator 222, and a second encoder 274 operable to sense a rotational orientation of the rotor with respect to the stationary reference 216, such as the process chamber 208, motor housing 226, ion beam 205, or other stationary reference with respect to the rotor.
  • the reciprocating drive apparatus 201 further comprises one or more stops 276, wherein the one or more stops generally limit the rotation of the stator 222 with respect to the motor housing 226.
  • the one or more stops 276 generally provide a variable amount of rotation of the stator 222 to generally prevent a "runaway" incident, wherein the stator becomes uncontrollable.
  • the one or more stops 276, for example, comprises one or more adjustable mechanical or electrical limits (not shown) operably coupled to the motor housing 226, wherein the amount of rotation of the stator 222 is generally constrained between the stops.
  • the reciprocating drive apparatus 201 is further operable to translate the workpiece 202 along a second scan path 278, wherein the second scan path is substantially perpendicular to at least a portion of the first scan path 246 of Fig. 3.
  • the second scan path 278 is substantially perpendicular to the midpoint of the first scan path 246 illustrated in Fig. 3.
  • the second scan path 270 may be achieved by means of a slow scan actuator 280, which is further operably coupled to the motor 206, wherein the slow scan actuator is operable to translate one or more of the motor and process chamber 208 along a third axis 282 with respect to the stationary reference 216.
  • the third axis 282, for example, is generally perpendicular to the first axis 224, and is generally parallel to the second scan path 278 of the workpiece 202 with respect to the ion beam 205.
  • the first scan path 246 is associated with a "fast scan” of the workpiece 202
  • the second scan path 278 is associated a "slow scan” of the workpiece, wherein the workpiece may be continuously transported along the second scan path as the workpiece reciprocatingly travels along the first scan path.
  • the workpiece 202 may be serially indexed an increment of predetermined length along the second scan path 278 for every translation of the workpiece between maximum positions 260 and 262 along the first scan path 246 (e.g., as illustrated in Fig. 3).
  • the slow scan actuator 280 will translate the workpiece two increments of predetermined length along the second scan path 278.
  • a total translation of the motor 206 along the second scan path 278, for example, is approximately the diameter D of the workpiece 202 in Fig. 3 plus the height of the ion beam 205.
  • the slow scan actuator 280 of Fig. 2 may comprise a servo motor, a ball screw, or other system (not shown), wherein the motor housing 226 and associated motor 206, and hence, the workpiece 202, can be smoothly translated along the second scan path 278.
  • Such a slow scan actuator 280 is operable to permit the stationary ion beam 205 to "paint" the workpiece 202 residing on the end effector 236 by passing the workpiece through the ion beam 205 while the end effector also travels along an arcuate scan path in cyclical counter-rotations (e.g., oscillation), thus uniformly implanting ions across the entire workpiece.
  • the reciprocating drive apparatus 201 may further comprise a dynamic sliding seal 284 (e.g., a sliding bearing seal), wherein the sliding seal substantially seals the internal environment 212 of the process chamber 208 from the external environment 214 (e.g., atmosphere).
  • the process chamber 208 may define a slot-shaped aperture 286 therethrough and extending generally parallel with the third axis 282, wherein the shaft 228 generally extends through the slot.
  • One or more linear bearings 288, for example, may be utilized to slidingly couple the motor housing 226 to the process chamber 208. Accordingly, the shaft 228 is operable to translate within the slot 286 in conjunction with the translation of the motor 206 along the third axis 282.
  • the sliding seal 284 further surrounds the slot-shaped aperture 286 and further generally isolates the internal environment 212 within the process chamber 208 from the external environment 214.
  • Such a sliding seal 284 further generally isolates the scan arm 232 and end effector 236, and permits the translation of the end effector within the process chamber 208 along the second scan path 278, while limiting potential deleterious effects caused by moving components associated with the motor 206.
  • any or all of the reciprocating drive apparatus 201 may reside within the process chamber 208.
  • a frame 290 is provided, wherein the frame is generally fixed relative to the ion beam 205.
  • the frame 290 can be further considered a stationary reference 216.
  • the process chamber 208 may be pivotally coupled to the frame 290 about a fourth axis 292 that is generally perpendicular to the ion beam 205, wherein a rotational position of the process chamber about the fourth axis further generally defines a tilt angle (not shown) between the ion beam and a surface 294 of the workpiece 202.
  • the scan arm 232 is rotatably coupled to the shaft 228 via a hub 295, wherein the scan arm is further operable to rotate about a fifth axis 296.
  • the fifth axis 296 is further generally perpendicular to the first axis 224, wherein a rotation of the scan arm 232 about the fifth axis alternatively provides the tilt angle (not shown) discussed above.
  • the net effect of utilizing the fourth axis 292 to position the process chamber 208 in combination with the rotation of the workpiece 202 about the second axis 240 while the scan arm 232 rotates about first axis 224, is to generally sweep the workpiece through the ion beam 205 while maintaining a fixed tilt and twist angle of the workpiece relative to the ion beam.
  • a primary drive actuator (not shown) is operably coupled to the shaft 228, wherein the primary drive actuator is operable to provide a primary rotational force to the shaft.
  • the primary drive actuator for example, is operable to further vary the rotational velocity of the shaft 228, in conjunction with the motor 206, wherein the position of the workpiece along the first scan path 246 can be further controlled.
  • the motor 206 can generally act as an accelerator and decelerator for the rotation of the shaft 228, while not substantially acting to control the translation of the workpiece 202 within the predetermined scanning range 254 of Fig. 3.
  • a controller 298 is provided, wherein the controller is operable to control the position of the workpiece 202 along the first scan path 246 by controlling the electromagnetic force between the rotor 220 and the stator 222.
  • the controller 298, for example, is further operable to control the rotation of the workpiece 202 about the second axis 240 by controlling the end effector actuator 242.
  • the controller 298 is operable to control the position of the motor 206 along the third axis 282 by controlling the slow scan actuator 280.
  • the controller 298, is operable to control the rotational and/or translation position of the workpiece 202 along the first scan path and second scan path, wherein the control is based, at least in part on the feedback from the one or more sensing elements 270.
  • the controller 298 e.g., a motion controller
  • the controller 298 is operably coupled to one or more power supplies, drivers and/or amplifiers (not shown) associated with the reciprocating scan apparatus 201 , such as the motor 201 , one or more sensing elements 270, end effector actuator 242, and slow scan actuator 280, wherein the controller efficiently controls the reciprocating scan apparatus.
  • the general scheme of motion control disclosed in the invention generally provides a smoothness of motion of the end effector 236 (e.g., a constant velocity within the predetermined scanning range 254 of Fig. 3), and can minimize velocity errors associated therewith.
  • the controller 298 of Fig. 2 comprises a proportional integral derivative (PID) control device that can be utilized by the controller, wherein the one or more sensing elements 270 provide feedback control. While the structure and system disclosed in Figs. 1-3 relate to a pendulum type motion, the present invention also contemplates a linear motion system, wherein a workpiece translates linearly along a first scan path. For example, Fig.
  • FIG. 4 illustrates simplified view of another reciprocating drive apparatus 300 operable to reciprocally translate or oscillate a workpiece 302 along a linear first scan path 304.
  • the reciprocating drive apparatus 300 in one example, is operable to reciprocally translate or oscillate the workpiece 302 along the linear first scan path 304 with respect to a generally stationary ion beam 305, wherein the apparatus can be utilized in an ion implantation process.
  • the reciprocating drive apparatus 300 may be utilized in conjunction with various other semiconductor processing systems, such as a step-and-repeat lithography system (not shown).
  • the apparatus 300 can be utilized in processing systems not related to semiconductor technology, and all such systems and implementations are contemplated as falling within the scope of the present invention.
  • the reciprocating drive apparatus 300 comprises a motor 306 operably coupled to a scan arm 308 wherein the scan arm is further operable to support the workpiece 302 thereon.
  • the motor 306, for example, comprises a rotor 310 and a stator 312, wherein the rotor and the stator are operable to individually rotate about a first axis 314, in a manner similar to that described above.
  • the rotor 310 is further operably coupled to a shaft 316, wherein the shaft generally extends along the first axis 314 and is operably coupled to the scan arm 308.
  • the rotor 310 and shaft 316 are generally fixedly coupled to one another, and wherein the shaft and scan arm 308 are in mating engagement with one another, wherein the rotation of the shaft is operable to drive a linear translation of the scan arm, wherein the first scan path 304 is substantially linear.
  • the scan arm 308 comprises an engagement portion 320, and wherein the shaft 316 comprises a driver portion 322, and wherein the engagement portion of the scan arm is operably coupled to the driver portion of the shaft.
  • the engagement portion 320 comprises a rack 324 and the driver portion 322 comprises a pinion 326.
  • the engagement portion 320 may comprise a substantially flat surface (not shown), wherein the driver portion comprises a roller (not shown) operable to engage the engagement portion. It will be understood that any engagement portion 320 and driver portion 322 operable to linearly translate the scan arm 308 may be utilized, and all such engagement and driver portions are contemplated as falling within the scope of the present invention.
  • the reciprocating drive apparatus 300 further comprises a counterbalance arm 328, wherein the shaft 316 and counterbalance arm are further in mating engagement with one another.
  • the counterbalance arm 328 may be diametrically opposed to the scan arm 308 about the shaft 316, wherein the rotation of the shaft is further operable to drive a linear translation of the counterbalance arm in a direction generally opposite that of the scan arm.
  • a counterbalance arm 328 may further comprise an inertial mass 330, and further confines inertial forces to the first axis 314.
  • the reciprocating drive apparatus further comprises one or more linear translation bearings (not shown), wherein the one or more linear translation bearings generally confine the translation of the scan arm 308 and the counterbalance arm 328 to a linear path.
  • FIG. 5 is a schematic block diagram of an exemplary method 400 illustrating the integration and operation of the exemplary reciprocating drive apparatus of Figs. 1-4. While exemplary methods are illustrated and described herein as a series of acts or events, it will be appreciated that the present invention is not limited by the illustrated ordering of such acts or events, as some steps may occur in different orders and/or concurrently with other steps apart from that shown and described herein, in accordance with the invention. In addition, not all illustrated steps may be required to implement a methodology in accordance with the present invention. Moreover, it will be appreciated that the methods may be implemented in association with the systems illustrated and described herein as well as in association with other systems not illustrated. As illustrated in Fig.
  • the method 400 begins with providing a workpiece on a scan arm in act 305, such as the scan arm 232 of Fig. 2.
  • the scan arm is operably coupled to a motor comprising a rotor and a stator, and wherein the rotor and stator are operable to individually rotate and counter-rotate about a first axis.
  • an electromagnetic force is applied between the rotor and stator, therein translating the workpiece through an ion beam along a first scan path.
  • a position of the workpiece is sensed, such as sensing a rotational position of one or more of the shaft, rotor, and stator about the first axis.
  • the electromagnetic force between the rotor and stator is controlled or selectively varied along the first scan path, and wherein the stator rotates and counter-rotates about the first axis in reaction to the reciprocation of the workpiece.
  • the control in act 320 is based, at least in part, on the sensed position of the workpiece.
  • the reciprocating drive apparatus can be further utilized in a process chamber (not shown) that is in a state of high vacuum, wherein no mechanical components such as lubricated bearings or actuators are directly exposed to the environment.
  • the joints of the apparatus for example, are further provided with vacuum seals, such as Ferro-fluidic seals.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Drying Of Semiconductors (AREA)
  • Brushless Motors (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • ing And Chemical Polishing (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

L'invention concerne un système d'entraînement alternatif, un procédé, et un appareil permettant de balayer une pièce à usiner, selon lesquels un moteur comprenant un rotor et un stator conçus pour tourner individuellement autour d'un premier axe est destiné à déplacer de manière alternative la pièce à usiner par rapport à une référence stationnaire. Un arbre entraîné de manière rotative par le rotor s'étend le long du premier axe, et un bras de balayage est fonctionnellement couplé à l'arbre, ce bras de balayage étant conçu pour porter ladite pièce à usiner. Des rotations contre-cycliques du bras effectuées par le moteur sont destinées à faire tourner ledit bras de balayage, ce qui permet d'assurer le balayage de la pièce à usiner dans le faisceau ionique le long d'un premier chemin de balayage, le stator faisant office de masse de réaction lors de la rotation du rotor. Un contrôleur est en outre conçu pour commander une force électromagnétique entre le rotor et le stator, ce qui permet en général de déterminer une position de rotation du rotor et du stator.
EP05737133A 2004-04-05 2005-04-05 Systeme d'entrainement alternatif pour le balayage d'une piece a usiner Withdrawn EP1733465A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP10180405A EP2264739A3 (fr) 2004-04-05 2005-04-05 Un system d'actionnement pour balayer un ouvrage avec un rayonnement d'ions

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US55967204P 2004-04-05 2004-04-05
PCT/US2005/011600 WO2005099072A1 (fr) 2004-04-05 2005-04-05 Systeme d'entrainement alternatif pour le balayage d'une piece a usiner

Publications (1)

Publication Number Publication Date
EP1733465A1 true EP1733465A1 (fr) 2006-12-20

Family

ID=34964844

Family Applications (4)

Application Number Title Priority Date Filing Date
EP05731158A Not-in-force EP1738393B1 (fr) 2004-04-05 2005-04-05 Entrainement alternatif pour exploration de piece de travail par faisceau electronique
EP10180405A Withdrawn EP2264739A3 (fr) 2004-04-05 2005-04-05 Un system d'actionnement pour balayer un ouvrage avec un rayonnement d'ions
EP05737133A Withdrawn EP1733465A1 (fr) 2004-04-05 2005-04-05 Systeme d'entrainement alternatif pour le balayage d'une piece a usiner
EP10166704A Not-in-force EP2230681B1 (fr) 2004-04-05 2005-04-05 Système d'actionnement pour balayer un ouvrage avec un rayonnement d'ion

Family Applications Before (2)

Application Number Title Priority Date Filing Date
EP05731158A Not-in-force EP1738393B1 (fr) 2004-04-05 2005-04-05 Entrainement alternatif pour exploration de piece de travail par faisceau electronique
EP10180405A Withdrawn EP2264739A3 (fr) 2004-04-05 2005-04-05 Un system d'actionnement pour balayer un ouvrage avec un rayonnement d'ions

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EP10166704A Not-in-force EP2230681B1 (fr) 2004-04-05 2005-04-05 Système d'actionnement pour balayer un ouvrage avec un rayonnement d'ion

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EP (4) EP1738393B1 (fr)
JP (2) JP4784872B2 (fr)
KR (2) KR101289504B1 (fr)
CN (3) CN1961401B (fr)
DE (1) DE602005022688D1 (fr)
TW (1) TWI345548B (fr)
WO (2) WO2005099072A1 (fr)

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EP2994758B1 (fr) 2013-05-08 2017-12-20 Opthea Limited Marqueurs biologiques de la dégénérescence maculaire liée à l'âge (dmla)
CN106409728B (zh) * 2016-10-31 2019-02-19 北京北方华创微电子装备有限公司 一种密封结构及一种半导体设备
JP6374938B2 (ja) * 2016-11-16 2018-08-15 株式会社ソディック ガルバノスキャナ
CN108987297B (zh) * 2017-05-31 2021-10-26 上海微电子装备（集团）股份有限公司 回转装置、芯片键合装置及芯片的键合方法
CN107313659A (zh) * 2017-06-27 2017-11-03 上海中克世电子科技有限公司 一种用于智能锁的电机直接驱动摆动臂拨动锁芯开关的机构
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CN111383883B (zh) * 2018-12-27 2021-09-21 中国科学院光电技术研究所 超大面积扫描式反应离子刻蚀机及刻蚀方法
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Also Published As

Publication number Publication date
KR20060135936A (ko) 2006-12-29
KR101289504B1 (ko) 2013-07-24
TWI345548B (en) 2011-07-21
WO2005098909A2 (fr) 2005-10-20
CN101006545B (zh) 2010-09-08
DE602005022688D1 (de) 2010-09-16
CN1947326A (zh) 2007-04-11
TW200606095A (en) 2006-02-16
CN1961401A (zh) 2007-05-09
EP1738393A2 (fr) 2007-01-03
EP2230681B1 (fr) 2011-12-07
JP4877555B2 (ja) 2012-02-15
JP2007532008A (ja) 2007-11-08
CN1961401B (zh) 2010-12-08
CN1947326B (zh) 2010-06-16
CN101006545A (zh) 2007-07-25
EP1738393B1 (fr) 2010-08-04
EP2230681A1 (fr) 2010-09-22
EP2264739A2 (fr) 2010-12-22
JP4784872B2 (ja) 2011-10-05
EP2264739A3 (fr) 2011-03-02
WO2005099072A1 (fr) 2005-10-20
JP2007532090A (ja) 2007-11-08
KR101126884B1 (ko) 2012-03-19
WO2005098909A3 (fr) 2005-12-01
KR20070011348A (ko) 2007-01-24

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