DE602005022688D1 - Antriebssystem zum scannen eines arbeitsstücks mit einem ionenstrahl - Google Patents
Antriebssystem zum scannen eines arbeitsstücks mit einem ionenstrahlInfo
- Publication number
- DE602005022688D1 DE602005022688D1 DE602005022688T DE602005022688T DE602005022688D1 DE 602005022688 D1 DE602005022688 D1 DE 602005022688D1 DE 602005022688 T DE602005022688 T DE 602005022688T DE 602005022688 T DE602005022688 T DE 602005022688T DE 602005022688 D1 DE602005022688 D1 DE 602005022688D1
- Authority
- DE
- Germany
- Prior art keywords
- workpiece
- scanning
- drive system
- ion beam
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67213—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one ion or electron beam chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20221—Translation
- H01J2237/20228—Mechanical X-Y scanning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/31701—Ion implantation
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- ing And Chemical Polishing (AREA)
- Micromachines (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
- Brushless Motors (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US55967204P | 2004-04-05 | 2004-04-05 | |
PCT/US2005/011497 WO2005098909A2 (en) | 2004-04-05 | 2005-04-05 | Drive system for scanning a workpiece through an ion beam |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005022688D1 true DE602005022688D1 (de) | 2010-09-16 |
Family
ID=34964844
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005022688T Active DE602005022688D1 (de) | 2004-04-05 | 2005-04-05 | Antriebssystem zum scannen eines arbeitsstücks mit einem ionenstrahl |
Country Status (7)
Country | Link |
---|---|
EP (4) | EP1733465A1 (de) |
JP (2) | JP4877555B2 (de) |
KR (2) | KR101289504B1 (de) |
CN (3) | CN101006545B (de) |
DE (1) | DE602005022688D1 (de) |
TW (1) | TWI345548B (de) |
WO (2) | WO2005099072A1 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI435378B (zh) * | 2006-04-26 | 2014-04-21 | Axcelis Tech Inc | 劑量均勻性校正方法 |
JP2010501106A (ja) * | 2006-08-17 | 2010-01-14 | アクセリス テクノロジーズ, インコーポレイテッド | イオン注入システムに用いられる基材取り扱いスキャンアーム |
US7785060B2 (en) * | 2006-10-27 | 2010-08-31 | Applied Materials, Inc. | Multi-directional mechanical scanning in an ion implanter |
US7994488B2 (en) * | 2008-04-24 | 2011-08-09 | Axcelis Technologies, Inc. | Low contamination, low energy beamline architecture for high current ion implantation |
US9558980B2 (en) * | 2008-04-30 | 2017-01-31 | Axcelis Technologies, Inc. | Vapor compression refrigeration chuck for ion implanters |
US8481969B2 (en) | 2010-06-04 | 2013-07-09 | Axcelis Technologies, Inc. | Effective algorithm for warming a twist axis for cold ion implantations |
JP5763425B2 (ja) * | 2011-06-03 | 2015-08-12 | 株式会社 イマジナホールディングス | 振動発生装置 |
US8895944B2 (en) * | 2012-01-20 | 2014-11-25 | Advanced Ion Beam Technology, Inc. | Scan head and scan arm using the same |
WO2014182635A1 (en) | 2013-05-08 | 2014-11-13 | Baldwin Megan E | Biomarkers for age-related macular degeneration (amd) |
CN106409728B (zh) * | 2016-10-31 | 2019-02-19 | 北京北方华创微电子装备有限公司 | 一种密封结构及一种半导体设备 |
JP6374938B2 (ja) * | 2016-11-16 | 2018-08-15 | 株式会社ソディック | ガルバノスキャナ |
CN108987297B (zh) * | 2017-05-31 | 2021-10-26 | 上海微电子装备(集团)股份有限公司 | 回转装置、芯片键合装置及芯片的键合方法 |
CN107313659A (zh) * | 2017-06-27 | 2017-11-03 | 上海中克世电子科技有限公司 | 一种用于智能锁的电机直接驱动摆动臂拨动锁芯开关的机构 |
CN109524285B (zh) * | 2017-09-19 | 2021-06-11 | 中国电子科技集团公司第四十八研究所 | 一种离子束刻蚀设备 |
CN111383883B (zh) * | 2018-12-27 | 2021-09-21 | 中国科学院光电技术研究所 | 超大面积扫描式反应离子刻蚀机及刻蚀方法 |
EP3914401B1 (de) * | 2019-01-24 | 2023-12-20 | 3M Innovative Properties Company | Vorrichtung und verfahren zum drehen eines werkstücks |
CN110085500B (zh) * | 2019-05-15 | 2021-03-30 | 中国电子科技集团公司第二十四研究所 | 一种提高离子注入剂量控制精度的方法和系统 |
CN112670150B (zh) * | 2020-12-22 | 2023-11-17 | 马鞍山市胜康精密机电有限公司 | 一种光电元器件加工用离子注入装置 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6146890A (ja) * | 1984-08-10 | 1986-03-07 | トヨタ自動車株式会社 | 電気炉の運転制御方法 |
JPS6146890U (ja) * | 1984-08-28 | 1986-03-28 | 日本電気ホームエレクトロニクス株式会社 | リニア送り装置 |
JP2699170B2 (ja) * | 1986-04-09 | 1998-01-19 | イクリプス・イオン・テクノロジー・インコーポレイテッド | イオンビーム走査方法および装置 |
JP2559453B2 (ja) * | 1988-03-18 | 1996-12-04 | 株式会社日立製作所 | リニアアクセス機構 |
US4965862A (en) * | 1988-05-18 | 1990-10-23 | Varian Associates, Inc. | Disk scanning apparatus for batch ion implanters |
US4867652A (en) * | 1988-12-08 | 1989-09-19 | Carrier Corporation | Balanced rolling rotor motor compressor |
JPH07123034B2 (ja) * | 1990-02-22 | 1995-12-25 | 日新電機株式会社 | イオン注入装置 |
CN1033933C (zh) * | 1992-05-08 | 1997-01-29 | 陈南斗 | 扫描器 |
JPH0973873A (ja) * | 1995-09-05 | 1997-03-18 | Nissin Electric Co Ltd | ホルダ駆動装置 |
US5751078A (en) * | 1996-10-03 | 1998-05-12 | Lockheed Martin Corp. Missiles & Space | Reactionless, momentum compensated payload positioner |
JPH10326590A (ja) * | 1997-05-27 | 1998-12-08 | Oki Electric Ind Co Ltd | イオン注入用ウエハスキャン装置 |
JP3729604B2 (ja) * | 1997-06-16 | 2005-12-21 | 住友イートンノバ株式会社 | イオン注入装置 |
JP2001516129A (ja) * | 1997-08-13 | 2001-09-25 | バリアン・セミコンダクター・イクイップメント・アソシエーツ・インコーポレーテッド | リニア気体軸受け及びアクティブカウンターバランスオプションを有するスキャニングシステム |
GB2382716B (en) * | 1998-07-21 | 2003-09-03 | Applied Materials Inc | Ion Implantation Beam Monitor |
JP2000068226A (ja) * | 1998-08-24 | 2000-03-03 | Nissin Electric Co Ltd | イオン注入装置 |
US6350991B1 (en) * | 1999-04-19 | 2002-02-26 | Applied Materials, Inc. | Ion implanter with vacuum piston counterbalance |
US6207959B1 (en) * | 1999-04-19 | 2001-03-27 | Applied Materials, Inc. | Ion implanter |
EP1056114A3 (de) * | 1999-05-24 | 2007-05-09 | Applied Materials, Inc. | Ionenimplantierungsgerät |
US6515288B1 (en) * | 2000-03-16 | 2003-02-04 | Applied Materials, Inc. | Vacuum bearing structure and a method of supporting a movable member |
US6600163B2 (en) * | 2000-12-22 | 2003-07-29 | Alfred M. Halling | In-process wafer charge monitor and control system for ion implanter |
US6956223B2 (en) * | 2002-04-10 | 2005-10-18 | Applied Materials, Inc. | Multi-directional scanning of movable member and ion beam monitoring arrangement therefor |
US6908836B2 (en) * | 2002-09-23 | 2005-06-21 | Applied Materials, Inc. | Method of implanting a substrate and an ion implanter for performing the method |
-
2005
- 2005-04-05 JP JP2007507433A patent/JP4877555B2/ja not_active Expired - Fee Related
- 2005-04-05 WO PCT/US2005/011600 patent/WO2005099072A1/en active Application Filing
- 2005-04-05 CN CN2005800119363A patent/CN101006545B/zh not_active Expired - Fee Related
- 2005-04-05 KR KR1020067020285A patent/KR101289504B1/ko active IP Right Grant
- 2005-04-05 EP EP05737133A patent/EP1733465A1/de not_active Withdrawn
- 2005-04-05 WO PCT/US2005/011497 patent/WO2005098909A2/en active Application Filing
- 2005-04-05 KR KR1020067023079A patent/KR101126884B1/ko not_active IP Right Cessation
- 2005-04-05 CN CN2005800121310A patent/CN1947326B/zh not_active Expired - Fee Related
- 2005-04-05 EP EP10166704A patent/EP2230681B1/de not_active Expired - Fee Related
- 2005-04-05 EP EP10180405A patent/EP2264739A3/de not_active Withdrawn
- 2005-04-05 CN CN2005800174375A patent/CN1961401B/zh not_active Expired - Fee Related
- 2005-04-05 JP JP2007507456A patent/JP4784872B2/ja not_active Expired - Fee Related
- 2005-04-05 EP EP05731158A patent/EP1738393B1/de not_active Expired - Fee Related
- 2005-04-05 DE DE602005022688T patent/DE602005022688D1/de active Active
- 2005-04-06 TW TW94110853A patent/TWI345548B/zh active
Also Published As
Publication number | Publication date |
---|---|
KR101126884B1 (ko) | 2012-03-19 |
TWI345548B (en) | 2011-07-21 |
TW200606095A (en) | 2006-02-16 |
EP2264739A3 (de) | 2011-03-02 |
CN1947326A (zh) | 2007-04-11 |
EP2230681B1 (de) | 2011-12-07 |
CN1961401A (zh) | 2007-05-09 |
WO2005099072A1 (en) | 2005-10-20 |
CN101006545B (zh) | 2010-09-08 |
EP2230681A1 (de) | 2010-09-22 |
CN1961401B (zh) | 2010-12-08 |
KR101289504B1 (ko) | 2013-07-24 |
WO2005098909A2 (en) | 2005-10-20 |
JP4784872B2 (ja) | 2011-10-05 |
EP1733465A1 (de) | 2006-12-20 |
WO2005098909A3 (en) | 2005-12-01 |
JP4877555B2 (ja) | 2012-02-15 |
EP1738393B1 (de) | 2010-08-04 |
KR20060135936A (ko) | 2006-12-29 |
CN101006545A (zh) | 2007-07-25 |
EP2264739A2 (de) | 2010-12-22 |
JP2007532090A (ja) | 2007-11-08 |
KR20070011348A (ko) | 2007-01-24 |
CN1947326B (zh) | 2010-06-16 |
JP2007532008A (ja) | 2007-11-08 |
EP1738393A2 (de) | 2007-01-03 |
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