DE112005001506A5 - Verfahren zum Abtasten einer Oberfläche - Google Patents

Verfahren zum Abtasten einer Oberfläche Download PDF

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Publication number
DE112005001506A5
DE112005001506A5 DE112005001506T DE112005001506T DE112005001506A5 DE 112005001506 A5 DE112005001506 A5 DE 112005001506A5 DE 112005001506 T DE112005001506 T DE 112005001506T DE 112005001506 T DE112005001506 T DE 112005001506T DE 112005001506 A5 DE112005001506 A5 DE 112005001506A5
Authority
DE
Germany
Prior art keywords
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112005001506T
Other languages
English (en)
Inventor
Franz Josef Giessibl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universitaet Augsburg
Original Assignee
Universitaet Augsburg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universitaet Augsburg filed Critical Universitaet Augsburg
Publication of DE112005001506A5 publication Critical patent/DE112005001506A5/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G01Q60/34—Tapping mode
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE112005001506T 2004-04-22 2005-04-14 Verfahren zum Abtasten einer Oberfläche Pending DE112005001506A5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102004019608.7 2004-04-22
DE102004019608A DE102004019608B3 (de) 2004-04-22 2004-04-22 Verfahren zum Abtasten einer Oberfläche
PCT/DE2005/000674 WO2005104137A1 (de) 2004-04-22 2005-04-14 Verfahren zum abtasten einer oberfläche

Publications (1)

Publication Number Publication Date
DE112005001506A5 true DE112005001506A5 (de) 2007-05-24

Family

ID=34967526

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102004019608A Expired - Lifetime DE102004019608B3 (de) 2004-04-22 2004-04-22 Verfahren zum Abtasten einer Oberfläche
DE112005001506T Pending DE112005001506A5 (de) 2004-04-22 2005-04-14 Verfahren zum Abtasten einer Oberfläche

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102004019608A Expired - Lifetime DE102004019608B3 (de) 2004-04-22 2004-04-22 Verfahren zum Abtasten einer Oberfläche

Country Status (3)

Country Link
US (1) US7665350B2 (de)
DE (2) DE102004019608B3 (de)
WO (1) WO2005104137A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4474556B2 (ja) * 2005-12-19 2010-06-09 国立大学法人金沢大学 走査型プローブ顕微鏡
US7928343B2 (en) * 2007-12-04 2011-04-19 The Board Of Trustees Of The University Of Illinois Microcantilever heater-thermometer with integrated temperature-compensated strain sensor
US8719960B2 (en) 2008-01-31 2014-05-06 The Board Of Trustees Of The University Of Illinois Temperature-dependent nanoscale contact potential measurement technique and device
US8931950B2 (en) 2008-08-20 2015-01-13 The Board Of Trustees Of The University Of Illinois Device for calorimetric measurement
US8650660B2 (en) 2008-11-13 2014-02-11 Bruker Nano, Inc. Method and apparatus of using peak force tapping mode to measure physical properties of a sample
US8955161B2 (en) 2008-11-13 2015-02-10 Bruker Nano, Inc. Peakforce photothermal-based detection of IR nanoabsorption
KR101697993B1 (ko) 2008-11-13 2017-01-19 브루커 나노, 인코퍼레이션. 탐침형 원자 현미경 작동 방법 및 장치
US20110041224A1 (en) * 2009-08-06 2011-02-17 Purdue Research Foundation Atomic force microscope including accelerometer
US8387443B2 (en) 2009-09-11 2013-03-05 The Board Of Trustees Of The University Of Illinois Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer
JP6203494B2 (ja) 2009-12-01 2017-09-27 ブルカー ナノ インコーポレイテッドＢｒｕｋｅｒ Ｎａｎｏ，Ｉｎｃ． 走査型プローブ顕微鏡を動作させる方法
DE102010052037B4 (de) * 2010-11-23 2013-04-18 Franz Josef Giessibl Sensor und Verfahren zum berührungslosen Abtasten einer Oberfläche
US8533861B2 (en) 2011-08-15 2013-09-10 The Board Of Trustees Of The University Of Illinois Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy
US8914911B2 (en) 2011-08-15 2014-12-16 The Board Of Trustees Of The University Of Illinois Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy
US9535088B2 (en) 2013-03-28 2017-01-03 National University Corporation Kanazawa University Signal detection circuit and scanning probe microscope
US9891246B2 (en) * 2015-08-06 2018-02-13 Fardad Michael Serry Harmonic feedback atomic force microscopy
US10845382B2 (en) 2016-08-22 2020-11-24 Bruker Nano, Inc. Infrared characterization of a sample using oscillating mode
FR3098918B1 (fr) 2019-07-16 2022-01-21 Paris Sciences Lettres Quartier Latin Microscope a force atomique
US12091313B2 (en) 2019-08-26 2024-09-17 The Research Foundation For The State University Of New York Electrodynamically levitated actuator
CN112487680B (zh) * 2020-11-27 2024-05-03 西安空间无线电技术研究所 一种用于评价和调控离子阱非谐性势的方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69522934T2 (de) * 1995-02-07 2002-04-04 International Business Machines Corp., Armonk Messung der AFM Hebelarmauslenkung mit Hochfrequenzstrahlung und Dotierungsprofilometer
AU4673101A (en) * 2000-04-20 2001-11-07 University Of Bristol, The Resonant probe driving arrangement and a scanning probe microscope including such an arrangement
US6779387B2 (en) * 2001-08-21 2004-08-24 Georgia Tech Research Corporation Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
JP3594927B2 (ja) * 2001-12-06 2004-12-02 合資会社京都インスツルメンツ 物性値の測定方法および走査型プローブ顕微鏡
US6935167B1 (en) * 2004-03-15 2005-08-30 The Board Of Trustees Of The Leland Stanford Junior University Harmonic cantilevers and imaging methods for atomic force microscopy

Also Published As

Publication number Publication date
WO2005104137A1 (de) 2005-11-03
DE102004019608B3 (de) 2005-10-20
US20080295583A1 (en) 2008-12-04
US7665350B2 (en) 2010-02-23

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