DE102004019608B3 - Verfahren zum Abtasten einer Oberfläche - Google Patents

Verfahren zum Abtasten einer Oberfläche Download PDF

Info

Publication number
DE102004019608B3
DE102004019608B3 DE102004019608A DE102004019608A DE102004019608B3 DE 102004019608 B3 DE102004019608 B3 DE 102004019608B3 DE 102004019608 A DE102004019608 A DE 102004019608A DE 102004019608 A DE102004019608 A DE 102004019608A DE 102004019608 B3 DE102004019608 B3 DE 102004019608B3
Authority
DE
Germany
Prior art keywords
probe
force
higher harmonic
scanning
harmonic oscillation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE102004019608A
Other languages
English (en)
Inventor
Franz Josef Giesibl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Giessibl Franz Josef De
Original Assignee
Universitaet Augsburg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universitaet Augsburg filed Critical Universitaet Augsburg
Priority to DE102004019608A priority Critical patent/DE102004019608B3/de
Priority to DE112005001506T priority patent/DE112005001506A5/de
Priority to US11/568,199 priority patent/US7665350B2/en
Priority to PCT/DE2005/000674 priority patent/WO2005104137A1/de
Application granted granted Critical
Publication of DE102004019608B3 publication Critical patent/DE102004019608B3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G01Q60/34—Tapping mode
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures

Abstract

Die Erfindung betrifft Verfahren zum Abtasten einer Oberfläche (12) im dynamischen Modus, wobei ein mit einer Sonde (18) versehener Federbalken (10) in Kraftkopplung mit der Oberfläche gebracht wird und durch positive Rückkopplung in resonante Schwingung versetzt wird, wobei die resonante Schwingung mindestens eine höhere harmonische Schwingung enthält, deren Frequenz ein ganzzahliges Vielfaches der Grundresonanzfrequenz des in Kraftkopplung mit der Oberfläche befindlichen Federbalkens beträgt. Erfindungsgemäß wird die Amplitude oder die Phase der mindestens einen höheren harmonischen Schwingung als Regelgröße ermittelt, um den Abstand zwischen der Sonde (18) und der Oberfläche (14) zu regeln.
DE102004019608A 2004-04-22 2004-04-22 Verfahren zum Abtasten einer Oberfläche Expired - Lifetime DE102004019608B3 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE102004019608A DE102004019608B3 (de) 2004-04-22 2004-04-22 Verfahren zum Abtasten einer Oberfläche
DE112005001506T DE112005001506A5 (de) 2004-04-22 2005-04-14 Verfahren zum Abtasten einer Oberfläche
US11/568,199 US7665350B2 (en) 2004-04-22 2005-04-14 Surface scanning method
PCT/DE2005/000674 WO2005104137A1 (de) 2004-04-22 2005-04-14 Verfahren zum abtasten einer oberfläche

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004019608A DE102004019608B3 (de) 2004-04-22 2004-04-22 Verfahren zum Abtasten einer Oberfläche

Publications (1)

Publication Number Publication Date
DE102004019608B3 true DE102004019608B3 (de) 2005-10-20

Family

ID=34967526

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102004019608A Expired - Lifetime DE102004019608B3 (de) 2004-04-22 2004-04-22 Verfahren zum Abtasten einer Oberfläche
DE112005001506T Pending DE112005001506A5 (de) 2004-04-22 2005-04-14 Verfahren zum Abtasten einer Oberfläche

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE112005001506T Pending DE112005001506A5 (de) 2004-04-22 2005-04-14 Verfahren zum Abtasten einer Oberfläche

Country Status (3)

Country Link
US (1) US7665350B2 (de)
DE (2) DE102004019608B3 (de)
WO (1) WO2005104137A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007072621A1 (ja) * 2005-12-19 2007-06-28 National University Corporation Kanazawa University 走査型プローブ顕微鏡
US7928343B2 (en) * 2007-12-04 2011-04-19 The Board Of Trustees Of The University Of Illinois Microcantilever heater-thermometer with integrated temperature-compensated strain sensor
US8719960B2 (en) 2008-01-31 2014-05-06 The Board Of Trustees Of The University Of Illinois Temperature-dependent nanoscale contact potential measurement technique and device
WO2010022285A1 (en) 2008-08-20 2010-02-25 The Board Of Trustees Of The University Of Illinois Device for calorimetric measurement
KR101920606B1 (ko) 2008-11-13 2019-02-13 브루커 나노, 인코퍼레이션. 탐침형 원자 현미경 작동 방법 및 장치
US8955161B2 (en) 2008-11-13 2015-02-10 Bruker Nano, Inc. Peakforce photothermal-based detection of IR nanoabsorption
US8650660B2 (en) 2008-11-13 2014-02-11 Bruker Nano, Inc. Method and apparatus of using peak force tapping mode to measure physical properties of a sample
US20110041224A1 (en) * 2009-08-06 2011-02-17 Purdue Research Foundation Atomic force microscope including accelerometer
US8387443B2 (en) 2009-09-11 2013-03-05 The Board Of Trustees Of The University Of Illinois Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer
JP6203494B2 (ja) 2009-12-01 2017-09-27 ブルカー ナノ インコーポレイテッドＢｒｕｋｅｒ Ｎａｎｏ，Ｉｎｃ． 走査型プローブ顕微鏡を動作させる方法
DE102010052037B4 (de) * 2010-11-23 2013-04-18 Franz Josef Giessibl Sensor und Verfahren zum berührungslosen Abtasten einer Oberfläche
US8533861B2 (en) 2011-08-15 2013-09-10 The Board Of Trustees Of The University Of Illinois Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy
US8914911B2 (en) 2011-08-15 2014-12-16 The Board Of Trustees Of The University Of Illinois Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy
US9535088B2 (en) 2013-03-28 2017-01-03 National University Corporation Kanazawa University Signal detection circuit and scanning probe microscope
US9891246B2 (en) * 2015-08-06 2018-02-13 Fardad Michael Serry Harmonic feedback atomic force microscopy
KR20190060769A (ko) 2016-08-22 2019-06-03 브루커 나노, 아이엔씨. 피크 포스 탭핑을 이용한 샘플의 적외선 특성
FR3098918B1 (fr) 2019-07-16 2022-01-21 Paris Sciences Lettres Quartier Latin Microscope a force atomique
CN112487680A (zh) * 2020-11-27 2021-03-12 西安空间无线电技术研究所 一种用于评价和调控离子阱非谐性势的方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040020279A1 (en) * 2001-08-21 2004-02-05 Georgia Tech Research Corporation Method and apparatus for the actuation of the cantilever of a probe-based instrument

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69522934T2 (de) * 1995-02-07 2002-04-04 Ibm Messung der AFM Hebelarmauslenkung mit Hochfrequenzstrahlung und Dotierungsprofilometer
EP1274966B1 (de) * 2000-04-20 2005-04-06 The University of Bristol Antrieb einer resonanzprobe und rasterkraftmikroskop
JP3594927B2 (ja) * 2001-12-06 2004-12-02 合資会社京都インスツルメンツ 物性値の測定方法および走査型プローブ顕微鏡
US6935167B1 (en) * 2004-03-15 2005-08-30 The Board Of Trustees Of The Leland Stanford Junior University Harmonic cantilevers and imaging methods for atomic force microscopy

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040020279A1 (en) * 2001-08-21 2004-02-05 Georgia Tech Research Corporation Method and apparatus for the actuation of the cantilever of a probe-based instrument

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
Kazushi Yamanaka and Shizuka Nakano:" Ultrasonic Atomic Force Microscope with Overtone Excitation of Cantilever", Jpn.J. Appl. Phys. 35, pp.3787- 3792 (1996) *
R.Hillenbrand,M. Stark, and R. Guckenberger: "Higher-harmonics generation in tapping-mode atomic-force microscopy: Insights into the tip sample interation", Appl. Phys. Lett. 76, pp.3478-3480 (2000) *
R.W. Stark:" Spectroscopy of higher harmonics in dynamic atomic force microscopy", Nanotechnology 15, pp. 347-351 (March 2004) *
R.W.Stark and W.M. Heckl: "Higher harmonics ima- ging in tapping-mode atomic-force microscopy",Rev.Sci. Instrum. 74, pp.5111-5114 (2003) *
S.J.T. van Noort, O.H. Willemsen, K.O. van der Werf, B.G. de Grooth, and J.Greve: "Mapping Elec- trostatic Forces Using Higher Harmonics Tapping Mode Atomic Force Microscopy in Liquid", Langmuir 1999, 15, pp. 7101-7107 (1999) *

Also Published As

Publication number Publication date
WO2005104137A1 (de) 2005-11-03
DE112005001506A5 (de) 2007-05-24
US20080295583A1 (en) 2008-12-04
US7665350B2 (en) 2010-02-23

Similar Documents

Publication Publication Date Title
DE102004019608B3 (de) Verfahren zum Abtasten einer Oberfläche
Arnold et al. Control of nuclear dynamics through conical intersections and electronic coherences
US9535087B2 (en) Band excitation method applicable to scanning probe microscopy
Barth et al. Quantum versus classical phase-locking transition in a frequency-chirped nonlinear oscillator
EP3012612B1 (de) Verfahren und vorrichtung zur ermittlung der dichte eines fluids
Stock et al. Model studies on the time-resolved measurement of excited-state vibrational dynamics and vibronic coupling
Mankowsky et al. Dynamical stability limit for the charge density wave in K 0.3 MoO 3
McMorrow et al. Femtosecond Raman-induced Kerr effect. Temporal evolution of the vibrational normal modes in halogenated methanes
Legare et al. Laser pulse control of Raman processes by chirped non‐adiabatic passage
Chandrashekar et al. Mode coupling in dynamic atomic force microscopy
DE3820518C1 (de)
Merat et al. Linear optimal control of continuous time chaotic systems
CN203112893U (zh) 超声波高频冲击消除应力系统
WO2013020539A1 (de) Verfahren zum ultraschallbonden mit mindestens einem ersten und zweiten harmonischen schwingungsteile erzeugenden ultraschalltransducern
EP0895489B1 (de) Verfahren und vorrichtung zum reinigen von faden- oder von bandförmigen erzeugnissen, insbesondere von draht
Belhaq et al. Hysteresis suppression for primary and subharmonic 3: 1 resonances using fast excitation
Friedland et al. Emergence and control of multiphase nonlinear waves by synchronization
Gulaczyk et al. The C–N stretching band of methylamine
Vorobeichik et al. Tunneling control by high-frequency driving
DE102012011932A1 (de) Verfahren zum Betreiben eines Resonanzmesssystems und diesbezügliches Resonanzmesssystem
Lifshitz et al. Collective dynamics in arrays of coupled nonlinear resonators
Khomeriki et al. Pattern formation and localization in the forced-damped Fermi-Pasta-Ulam lattice
Watanabe et al. Experiment on soliton-impurity interaction in nonlinear lattice using LC circuit
DE823666C (de) Dickenschwinger
CN203144489U (zh) 超声波冲击消除应力系统

Legal Events

Date Code Title Description
8100 Publication of the examined application without publication of unexamined application
8364 No opposition during term of opposition
R082 Change of representative

Representative=s name: SCHWAN SCHWAN SCHORER, DE

Representative=s name: SCHWAN SCHWAN SCHORER, 80796 MUENCHEN, DE

R079 Amendment of ipc main class

Free format text: PREVIOUS MAIN CLASS: G01N0013160000

Ipc: G01Q0060320000

R079 Amendment of ipc main class

Free format text: PREVIOUS MAIN CLASS: G01N0013160000

Ipc: G01Q0060320000

Effective date: 20120605

R081 Change of applicant/patentee

Owner name: GIESSIBL, FRANZ JOSEF, DE

Free format text: FORMER OWNER: UNIVERSITAET AUGSBURG, 86159 AUGSBURG, DE

Effective date: 20120507

R082 Change of representative

Representative=s name: SCHWAN SCHORER UND PARTNER PATENTANWAELTE MBB, DE

Effective date: 20120507