EP1732217A1 - Kompakter piezoelektrischer Resonator - Google Patents

Kompakter piezoelektrischer Resonator Download PDF

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Publication number
EP1732217A1
EP1732217A1 EP05105080A EP05105080A EP1732217A1 EP 1732217 A1 EP1732217 A1 EP 1732217A1 EP 05105080 A EP05105080 A EP 05105080A EP 05105080 A EP05105080 A EP 05105080A EP 1732217 A1 EP1732217 A1 EP 1732217A1
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EP
European Patent Office
Prior art keywords
resonator according
central arm
resonator
arm
vibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05105080A
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English (en)
French (fr)
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EP1732217B1 (de
Inventor
Silvio Dalla Piazza
Bruno Studer
Thomas LÜTHI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETA SA Manufacture Horlogere Suisse
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ETA SA Manufacture Horlogere Suisse
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by ETA SA Manufacture Horlogere Suisse filed Critical ETA SA Manufacture Horlogere Suisse
Priority to DE602005012488T priority Critical patent/DE602005012488D1/de
Priority to EP05105080A priority patent/EP1732217B1/de
Priority to AT05105080T priority patent/ATE421799T1/de
Priority to TW095118641A priority patent/TWI390843B/zh
Priority to JP2006156198A priority patent/JP5000201B2/ja
Priority to CN200610087989XA priority patent/CN1881792B/zh
Publication of EP1732217A1 publication Critical patent/EP1732217A1/de
Priority to HK07105108.1A priority patent/HK1098885A1/xx
Application granted granted Critical
Publication of EP1732217B1 publication Critical patent/EP1732217B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz

Definitions

  • the present invention concerns piezoelectric resonators and more particularly resonators of small dimensions which are most often used for making frequency generators in particular for portable electronic equipment, in numerous fields such as horology, information technology, telecommunications and the medical field.
  • Resonator 10 represented on Figure 13, which is intended to be mounted in a case, includes a tuning fork shaped part with two parallel arms 12, 14 connected to each other by a linking part 16 and carrying electrodes 20, 22 to make them vibrate, these electrodes being connected to connecting pads 28, 30 intended to be electrically connected to the exterior of the case.
  • Resonator 10 also includes a central arm 18 attached to linking part 16 and located between arms 12, 14 of the tuning fork shaped part, substantially equidistant from them, this central arm 18 having a greater mass than that of the arms of the tuning fork shaped part and connected pads 28, 30 are carried by this central arm.
  • This resonator is mounted in a case of parallelepiped shape by fixing its central arm 18 to at least one support secured to the bottom of the case.
  • the dimensional and functional features of the conventional tuning fork resonators are optimised for mounting them in metallic cases and not in ceramic cases.
  • the ratio between their length and their width is ill suited to the manufacture of such cases, in particular when the cases are of the SMD (Surface Mounting Device) type, i.e. meant to be automatically mounted on hole-free printed circuit boards. Because of this, a conventional tuning fork resonator and its connection to the case do not have very good resistance to shocks.
  • tuning fork resonators are liable to tip towards the bottom of the case when it is fixed onto a step of the case.
  • thermal expansion coefficients of ceramic material and quartz are different enough to create mechanical stresses in the resonator which can not only be felt in the arms of the tuning fork and disturb the working of the resonator when the temperature changes but can also break the solder or detach connection pads of the resonator from those of the case and alter or even cut the electric connection between the resonator electrodes and the external contact pads of the case.
  • the main goal of the invention is to provide a three arm resonator which enables to reduce consumption of energy by producing an excitation electrical field which is more homogeneous and locally more intense and for which vibration loss at the arms is low even when the size of the vibrating piece is miniaturized and the CI value (crystal impedance or equivalent series resistance) can also be suppressed at a low level.
  • a piezoelectric resonator including a tuning fork shaped part with two parallel vibrating arms, connected to each other by a linking part, from which protrude a central arm located between both vibrating arms of the tuning fork shaped part, wherein at least one groove is formed on at least one of a front side and a rear side of each vibrating arm.
  • the grooves extend in the linking part. Grooves extending in the linking part where mechanical stresses are maximum, allow retrieving the electrical field in this high stressed area.
  • two grooves are provided on each front and rear sides of each vibrating arms.
  • interior grooves which are located on the inside with respect to the central arm extend shorter within the linking part than the exterior grooves which are located on the outside with respect to the central arm.
  • the width of said central arm is greater or equal to one and a half the width of the vibrating arms and the free end of the central arm does not extend beyond the vibrating arms.
  • fixing holes or recesses are arranged in the central arm.
  • the width of the central arm is about the same as that of the vibrating arms and a base part is provided at the end of the central arm opposite to the linking part.
  • fixing holes or recesses are arranged in the base part.
  • the length of the central arm is less than that of the vibrating arms and the vibrating arms end in flippers extending beyond said central arm, the flipper width being larger than that of the vibrating arms.
  • a balancing reed attached to the central arm extends between both flippers, width of this balancing reed being smaller than that of the central arm.
  • either a decoupling hole or decoupling recesses or both are arranged through, respectively on the central arm.
  • a recess is arranged on the side of the linking part opposite to that of the central arm.
  • the resonator according to the invention designated by the reference numeral 10
  • the resonator according to the invention includes a tuning fork shaped part with two vibrating arms 12 and 14 joined by a linking part 16 to which a central arm 18, located between arms 12 and 14 and parallel thereto, is attached, the whole assembly being made in a single piece and of quartz.
  • vibrating arms 12 and 14 carry two groups of electrodes 20 and 22, which are connected to each other by conductive paths respectively 24 and 26, carried by linking part 16 of the tuning fork shaped part. As they are shown in the drawing, these electrodes and conductive paths are disposed to make arms 12 and 14 vibrate in flexure mode, but they could have a different configuration to make the arms vibrate in the same mode or another mode (torsion, shear, etc.).
  • Figure 1a shows that it carries on its back face two conductive connection pads 28 and 30 located on either side of the centre of gravity G of the resonator lengthways and preferably equidistant from it, these pads 28 and 30 being connected by conductive paths 32 and 34 respectively to conductive paths 26 and 24 which connect the electrodes of each group 20 and 22 to each other. These pads 28 and 30 may also be used for fixing the resonator inside its packaging (not shown).
  • the width of central arm 18 shall be at least slightly more than one and a half that of an arm 12 or 14 of tuning fork shaped part.
  • the length of central arm 18 is not necessarily equal to that of arms 12 and 14, as shown by Figures 1 a and 1 b. It could be for example shorter.
  • central arm 18 is substantially equidistant from arms 12 and 14, this distance being able to be equal to that which separates the arms of a conventional tuning fork resonator, and that, on the other hand, this central arm 18 has a much greater mass than that of arms 12 and 14 which have to vibrate.
  • At least one groove 36, 38 is formed on at least one of a front side and a rear side of each vibrating arm, respectively 12, 14.
  • each vibrating arm 12, 14 is preferably H-shaped, meaning that one groove 36a, 36b, respectively 38a, 38b is preferably provided on each the front and the rear side of each vibrating arm 12 respectively 14.
  • depth of these grooves is preferably between 30% and 50% of the thickness of the corresponding vibrating arm in the depth direction (along axis D) and advantageously between 40% and 50%. It is to be noted that this ratio may be applicable to all forthcoming embodiments with grooves. Use of such grooves on the vibrating arms furnishes precise performances even when the device is miniaturized. Nevertheless, as an alternative only one groove may be provided either on the front or the rear side of each vibrating arm.
  • grooves 36, 38 extend in linking part 16. Portions 42, 44 of grooves 36, 38 extending in linking part 16, virtually delimited by dotted line 40, where mechanical stresses are maximums, allow retrieving the electrical field in this high stressed area.
  • the resonator differs from the first embodiment in that groove portions 42, 44 within linking part 16 are designed with non symmetric shapes with respect to the longitudinal axis (X 1 ,X 2 ) of vibrating arms 12, 14.
  • grooves 36, 38 are designed with a portion 422, 442 of narrowed width within linking part 16. Hollowed out portion 422, 442 of narrowed width of groove 36, 38 is located on the outside with respect to central arm 18.
  • the quantity of material in the high mechanical stressed areas which are illustrated by hatched zones 46 and 48 and mainly located in the linking part regions contiguous to vibrating arms 12, 14, is more important and therefore renders these areas more robust to mechanical constraints.
  • decoupling means 50, respectively 52 may be arranged on central arm 18 near linking part 16 in order to mechanically decouple central arm 18 used to fix resonator 10 in its package (not shown) from vibrating arms 12 and 14.
  • These decoupling means 50, respectively 52 have to be arranged between fixing elements of central arm 18, which are preferably conductive pads 28 and 30, and linking part 16 to which is attached vibrating arms 12 and 14.
  • the decoupling means are implemented in the form of notches 50 provided on both sides of central arm 18. These notches 50 may be rectangular-shaped, half-circle-shaped or V-shaped.
  • the decoupling means are implemented in the form of a hole 52 cut trough central arm 18. This hole may have different shapes such a rectangular, circle, or hexagonal shape. As for notches, the hole has to be hollowed out between fixing elements 28 and 30 and linking part 16. It will be appreciated that both decoupling means can be implemented together as well.
  • the resonator differs from the three variants of the second embodiment above described in that two grooves 362, 364 are arranged on each the front and the rear sides of each vibrating arm 12, 14.
  • grooves 362, 364, 382 and 384 advantageously extend within linking part 16 in order to maximize homogeneity of the electrical field.
  • the resonator differs from the one shown in Figure 3a in that in order to guarantee a better mechanical resistance of the resonator in the high stressed areas, exterior grooves 364, respectively 382 which are located on the inside with respect to central arm 18 extend shorter within linking part 16 than interior grooves 362, respectively 384 which are located on the outside with respect to central arm 18.
  • the quantity of material in the high mechanical stressed areas which are illustrated by hatched zones 46 and 48 and mainly located in the linking part regions contiguous to vibrating arms 12 and 14, is more important and therefore renders these areas more robust to mechanical constraints.
  • the resonator differs from the one shown in relation with Figure 4 in that fixing and positioning means are arranged on central arm 18.
  • fixing and positioning means are arranged on central arm 18.
  • a double goal has been sought; guarantee an accurate positioning and a robust fixing of resonator 10 inside its packaging.
  • fixing and positioning holes 54 and 56 have been cut through central arm 18, these holes being preferably used also to connect the group of electrodes 20 and 22 of resonator 10 to conductive elements inside the packaging (not shown). Since these holes 54 and 56 have been cut through central arm 18, one may accurately positioned resonator 10 inside the packaging (not shown) by looking to marks designed on the bottom of said packaging.
  • holes 54, 56 are filled in with conductive glue that allows on the one hand electrically connecting electrodes 20, 22 to conductive elements inside the packaging (not shown) and on the other hand solidly fixing resonator 10 inside its packaging.
  • conductive glue that allows on the one hand electrically connecting electrodes 20, 22 to conductive elements inside the packaging (not shown) and on the other hand solidly fixing resonator 10 inside its packaging.
  • fixing and positioning recesses 58 and 60 have been cut on both sides of central arm 18 facing both vibrating arms 12, 14 of the resonator.
  • these recesses 58, 60 have been cut through the whole depth of central arm 18 and thus allow accurate positioning in the packaging with respect to marks made on the bottom of it and robust fixing by adding conductive glue so that to fill in said recesses.
  • holes 54, 56 as well as recesses 58, 60 may have several shapes, such as square, circle or polygonal ones.
  • the resonator differs respectively from the second and fourth embodiments shown in Figure 2a and 4, in that central arm 18 has a narrowed width so that it is about the same to that of one vibrating arm. Though such a thin central arm 18 reduces the width of the overall resonator structure and may be packaged in a thinner packaging (not shown), it may not be used any longer as fixing part for resonator 10. Therefore, a base part 62 is provided at the end of the central arm opposite to linking part 16 and extends beyond vibrating arms 12 and 14.
  • This base part 62 is used both for fixing resonator 10 inside its packaging and for electrically connecting electrodes 20 and 22 of the resonator to conductive elements inside the packaging (not shown).
  • Figure 6a shows a first variant with a single groove 36, respectively 38 hollowed out on each the front (36a respectively 38a) and rear (36b, respectively 38b) sides of each vibrating arm 12, respectively 14.
  • Each groove 36, respectively 38 extends in linking part 16 and has a non symmetrical shape within said linking part so that to increase the mechanical resistance of the resonator structure in the high mechanical stressed areas.
  • Figure 6b shows a second variant with two grooves 362 and 364, respectively 382 and 384 hollowed out on each the front (362a, 364a, respectively 392a, 384a) and rear (362b, 364b, respectively 382b, 384b) sides of each vibrating arm 12, respectively 14.
  • Grooves 362, 364, 382 and 384 extend within linking part 16. Outside grooves 362, respectively 384 with respect to central arm 18 extend longer than inside ones 364, respectively 382 to reinforce the mechanical resistance in the high stressed areas.
  • the resonator differs from the sixth one in that fixing and positioning holes or recesses are arranged in the base part in order to guarantee an accurate positioning and solid fixing of the resonator inside its packaging.
  • Figure 7a shows a first variant wherein holes 64 and 66 have been cut through base part 62.
  • holes 64 and 66 have been cut through base part 62.
  • Figure 7b shows a second variant wherein recesses 68 and 70 have been cut through on the opposite side of base part 62 with respect to central arm 18 to which it is attached.
  • Recesses 68 and 70 present similar advantages as holes 64 and 66.
  • Use of conductive glue for fixing base part 62 to the packaging allows connecting electrodes 20 and 22 to conductive elements inside the packaging (not shown).
  • the resonator differs from the first one in that, on the one hand, the length of central arm 18 is less than that of vibrating arms 12 and 14 and, on the other hand, each vibrating arm 12, respectively 14, ends in a flipper 72, respectively 74, which extends beyond central arm 18.
  • these flippers 72 and 74 have a symmetrical rectangular shape with respect to the longitudinal axis (X 1 , X 2 ) of corresponding vibrating arm 12, 14, the flipper width being approximately twice as that of vibrating arm.
  • the flipper length can be deduced from the overall length of the vibrating arm without modifying the resonator properties and therefore the resonator length may be reduced accordingly.
  • a balancing reed 76 has been attached to the central arm end opposite to linking part 16.
  • This balancing reed 76 is located between both flippers 72, 74 of vibrating arms 12, 14 and has a thinner width than that of central arm 18 to let both vibrating arms 12, 14 vibrate without any risk of collisions with them.
  • reed 76 does not extend beyond flippers 72, 74 along the longitudinal axis of the resonator structure in order to keep the whole resonator length as short as possible. With such a reed 76, better stabilization of the resonator structure is obtained when vibrating and thus fewer mechanical stresses are constrained on fixing parts 28, 30.
  • the resonator differs from the eighth one in that two grooves 362, 364, 382 and 384 are provided on both the front and rear sides of each vibrating arm 12, 14.
  • Figure 9a shows a first variant wherein the central arm length is shorter than that of the vibrating arms and wherein flippers 72, 74 extending beyond central arm 18 are arranged at the end of vibrating arms 12, 14 for reducing overall length of resonator 10 without altering its properties.
  • Figure 9b shows a second variant wherein resonator 10 further comprises a balancing reed 76 protruding from central arm 18 and extending between both vibrating arms 12, 14.
  • FIG. 9c shows a third variant wherein notches 50 are arranged on central arm 18 between fixing elements 28, 30 and linking part 16 in order to mechanically decouple said central arm by which resonator 10 is fixed to its packaging, from vibrating arms 12, 14.
  • Figure 9d shows a fourth variant which is an alternative to the third one, wherein instead of providing central arm 18 with notches, a hole 52 has been cut through central arm 18 between fixing elements 28, 30 and linking part 16.
  • the resonator differs from the fourth embodiment in that one notch 78 is provided within linking part 16 on the opposite side to the one on which central arm 18 is protruding from.
  • This recess 78 has the advantage of mechanically decoupling central arm 18 from both vibrating arms 12, 14 without weakening the resonator structure.
  • the resonator differs from the first embodiment of Figure 1a in that a slot 80 is provided within linking part 16 on the opposite side to the one on which central arm 18 is protruding from and preferably along the longitudinal axis X of the resonator.
  • This slot 80 has for effect to virtually lengthen vibrating arms 12, 14 to the corresponding half of linking part 16.
  • additional electrodes 82, 84 are arranged along slot 80.
  • Advantageously grooves have been hollowed out under electrodes 82, 84 to produce an excitation electrical field which is more homogeneous and locally more intense.
  • use of these electrodes 82, 84, preferably grooved allows the overall length of the resonator to be reduced.
  • the resonator differs from the second variant above described in that flippers 72, 74 have been arranged as described in relation with Figure 8a in order to further reduce the overall length of the resonator.
  • Figure 11 is a top view of a suitable package without its cover for receiving a piezoelectric resonator according to the invention. It is understood that the size of the packaging is adjusted in function of the general shape of the resonator structure which may vary according to the embodiment considered.
  • Case 100 of parallelepiped shape includes a main part formed by a flat bottom 102 and four sides 104 and a cover with an edge (not shown) via which the cover is vacuum soldered, on sides 104 of the main part, by heating and pressure, by means of a soldering frame (also not shown), after the resonator has been mounted in case 100.
  • a central rib 106 has been arranged on bottom 102 of case 100, which rib 106 extends along the longitudinal axis X in order to support fixing parts of the resonator.
  • the rib width is chosen so that vibrating arms of the resonator may vibrate freely inside case 100.
  • two conductive elements such as thin conductive layers, studs or bumps 108 and 110, are arranged for contacting the corresponding conductive pads of the resonator. It will be appreciated that rib 106 shall not extend from one side 104 to the opposite one.
  • Figures 12a, 12b and 12c are different opened top views of a piezoelectric resonator 10 according respectively to the fourth and fifth embodiments mounted in a suitable package 100.
  • Figure 12a shows a top view with a resonator according to the fourth embodiment in which central arm 18 supports conductive pads 28 and 30 to be connected to the corresponding conductive elements arranged on rib 106.
  • the mounting of the resonator is achieved by soldering or gluing with a conductive adhesive its connection pads 28 and 30 onto respective thin layers, studs or bumps.
  • Figures 12b and 12c show top views with resonators according to both variants of the fifth embodiment.
  • conductive elements 108 and 110 may be seen through holes 54, 56 or recesses 58, 60 cut through central arm 18.
  • the cut out portions where vibrating arms are linked to the linking part are advantageously chosen to minimize visualisation of the crystalline planes of the resonator.
  • the cut out portions form angles of approximately 60° or 120°.

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
EP05105080A 2005-06-09 2005-06-09 Kompakter piezoelektrischer Resonator Active EP1732217B1 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE602005012488T DE602005012488D1 (de) 2005-06-09 2005-06-09 Kompakter piezoelektrischer Resonator
EP05105080A EP1732217B1 (de) 2005-06-09 2005-06-09 Kompakter piezoelektrischer Resonator
AT05105080T ATE421799T1 (de) 2005-06-09 2005-06-09 Kompakter piezoelektrischer resonator
TW095118641A TWI390843B (zh) 2005-06-09 2006-05-25 小尺寸壓電共振器
JP2006156198A JP5000201B2 (ja) 2005-06-09 2006-06-05 小型のピエゾ電子共振器
CN200610087989XA CN1881792B (zh) 2005-06-09 2006-06-09 小型压电谐振器
HK07105108.1A HK1098885A1 (en) 2005-06-09 2007-05-15 Small-sized piezoelectric resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05105080A EP1732217B1 (de) 2005-06-09 2005-06-09 Kompakter piezoelektrischer Resonator

Publications (2)

Publication Number Publication Date
EP1732217A1 true EP1732217A1 (de) 2006-12-13
EP1732217B1 EP1732217B1 (de) 2009-01-21

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EP05105080A Active EP1732217B1 (de) 2005-06-09 2005-06-09 Kompakter piezoelektrischer Resonator

Country Status (7)

Country Link
EP (1) EP1732217B1 (de)
JP (1) JP5000201B2 (de)
CN (1) CN1881792B (de)
AT (1) ATE421799T1 (de)
DE (1) DE602005012488D1 (de)
HK (1) HK1098885A1 (de)
TW (1) TWI390843B (de)

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US20140254328A1 (en) * 2013-03-11 2014-09-11 Sii Crystal Technology Inc. Piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic apparatus and radio controlled timepiece
JP2014179901A (ja) * 2013-03-15 2014-09-25 Sii Crystal Technology Inc 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計
US8928422B2 (en) 2012-07-19 2015-01-06 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic apparatus
US9231555B2 (en) 2013-06-24 2016-01-05 Seiko Epson Corporation Quartz resonator with cut sections formed on the support arm
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EP2395661A1 (de) * 2010-06-10 2011-12-14 The Swatch Group Research and Development Ltd. Temperaturkompensierter Resonator mit reduzierten Temperaturkoeffizienten erster und zweiter Ordnung
JP2012039226A (ja) * 2010-08-04 2012-02-23 Nippon Dempa Kogyo Co Ltd 音叉型の圧電振動片および圧電デバイス
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EP1732217B1 (de) 2009-01-21
TW200711299A (en) 2007-03-16
CN1881792B (zh) 2012-04-25
JP2006345519A (ja) 2006-12-21
DE602005012488D1 (de) 2009-03-12
ATE421799T1 (de) 2009-02-15
CN1881792A (zh) 2006-12-20
TWI390843B (zh) 2013-03-21
HK1098885A1 (en) 2007-07-27

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