EP1481417A1 - Lampe au mercure a arc court dotee d'une cathode contenant de l'oxyde de lanthane - Google Patents

Lampe au mercure a arc court dotee d'une cathode contenant de l'oxyde de lanthane

Info

Publication number
EP1481417A1
EP1481417A1 EP03717130A EP03717130A EP1481417A1 EP 1481417 A1 EP1481417 A1 EP 1481417A1 EP 03717130 A EP03717130 A EP 03717130A EP 03717130 A EP03717130 A EP 03717130A EP 1481417 A1 EP1481417 A1 EP 1481417A1
Authority
EP
European Patent Office
Prior art keywords
cathode
mercury
mercury short
pressure discharge
filling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03717130A
Other languages
German (de)
English (en)
Inventor
Lars Menzel
Dietmar Ehrlichmann
Wolfgang Spielmann
Gerhard Leichtfried
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plansee SE
Osram GmbH
Original Assignee
Plansee SE
Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plansee SE, Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH filed Critical Plansee SE
Publication of EP1481417A1 publication Critical patent/EP1481417A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H01J61/0735—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode
    • H01J61/0737—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode characterised by the electron emissive material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
    • H01J61/822—High-pressure mercury lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection

Definitions

  • the invention relates to a mercury short-arc high-pressure discharge lamp for direct current operation with a discharge vessel which has two diametrically opposed necks into which an anode and a cathode made of tungsten are melted in a gas-tight manner and which contains a filling made of mercury and at least one noble gas ,
  • Such lamps are used in particular for microlithography in the semiconductor industry for the exposure of wafers.
  • the mercury short-arc high-pressure discharge lamps used for the exposure process have to deliver a high light intensity in the ultraviolet wavelength range - in some cases limited to a few nanometers - with the light generation being limited to a small space.
  • a direct current gas discharge with a short electrode spacing This creates a plasma with high light emission in front of the cathode. Due to the strong electrical energy coupling into the plasma, electrode temperatures are generated which lead to material damage, particularly in the cathode.
  • Such cathodes thus far preferably contain a doping of thorium oxide Th0 2 , which is reduced to thorium Th during lamp operation, occurs in this metallic form on the cathode surface and there leads to a reduction in the work function of the cathode.
  • the lowering of the work function is accompanied by a reduction in the operating temperature of the cathode, which leads to a longer service life of the cathode, since less cathode material evaporates at lower temperatures.
  • Th0 2 as a dopant is due to the fact that the evaporation of the dopant is relatively low and therefore leads to little disruptive precipitation in the lamp bulb (blackening, deposits).
  • the excellent suitability of Th0 2 correlates with a high melting point of the oxide (3323 K) and metal (2028 K).
  • Th0 2 The decisive disadvantage of using Th0 2 is its radioactivity, which makes protective measures necessary when handling primary materials and lamp production. Depending on the activity of the product, there are also requirements regarding storage, operation and disposal of the lamps.
  • the solution to the environmental problem is special for lamps with high operating currents greater than 20 A, as are used in microlithography urgently, because these lamps have a particularly high activity due to the electrode size.
  • the productivity of the imagesetter depends crucially on the amount of light that the lamp provides. Piston linings or electrode burn-back reduce the available useful light and lead to a loss of productivity of the very expensive systems due to increasing exposure times.
  • a mercury short-arc high-pressure discharge lamp with the features of the preamble of claim 1 in that at least the material of the cathode head additionally contains lanthanum oxide La 2 0 3 and the mercury content of the lamp filling is at most 6 mg / cm 3 , The mercury content should be at least 1 mg / cm 3 , since the plasma properties of pure noble gas lamps differ significantly from mercury arc lamps. In the absence of relatively easily ionizable mercury, an inert gas arc burns much more concentrated.
  • La 2 ⁇ 3 can show very favorable results with regard to deposit formation and electrode burn-back.
  • the burn-back is even less than with torized materials. This is an advantage that is particularly effective with short electrode spacings ( ⁇ 6 mm) and would even make a certain excess of deposit formation tolerable.
  • the doping of the head or the entire cathode consisting of shaft and head should be between 1.0 and 3.5% by weight of the cathode material, better between 1.5 and 3.0% by weight of the cathode material.
  • the cathode operating temperature essentially determines the evaporation rate of the emitter.
  • I is the current density in A / m 2
  • A is the constant 1.2 x 10 6 in A / m 2 K 2
  • k is the Boltzmann constant
  • T is the temperature in K
  • ⁇ the work function in eV
  • the arc attachment area and thus the electrode temperature are influenced by the type of fill gas, the fill gas pressure and the mercury concentration.
  • the influence of these parameters is of minor importance when using La 2 ⁇ 3 as an additive to the tungsten of the cathode material, since in addition to the current, mainly the lamp plasma properties are the shape of the Determine arc approach.
  • Fill gas type, fill gas pressure and mercury concentration are essential for the plasma properties.
  • the electrode temperature is 4.5 mg / cm 3 Hg, for example, is 2200 ° C, while at 40 mg / ccm, the same current is measured at 2600 ° C.
  • the addition of Zr0 2 and / or Hf0 2 in small amounts can further improve the properties with regard to emitter evaporation.
  • the amount of Zr0 2 and / or Hf02 should not exceed 1.0% by weight for Zr02 or 1.5% by weight for Hf02 in the cathode material, since the favorable influence on the luminous flux is always accompanied by increased burn-back of the cathode.
  • the filling gas pressure in the lamp has a similar influence as the mercury content. As the filling gas pressure increases, the arc attachment point is constricted at the cathode and leads to an increased cathode tip temperature. Tests have shown here that when using xenon Xe as the filling gas, a cold filling pressure of 3 bar or 16.3 mg / cm 3 Xe already leads to a noticeable emitter evaporation in the lamp type according to the invention.
  • a minimum cold filling pressure of 500 mbar or 2.7 mg / cm 3 is therefore necessary when using xenon in order to avoid excessive emitter evaporation.
  • the density range 2.7 mg / ccm - 15.2 mg / ccm (500 mbar - 2800 mbar for Xe) provides the best results and corresponds to a pressure range of 786 - 4425 mbar for Kr or 1648 - 9276 mbar for Ar.
  • the preferred density range for the gas pressure is between 2.7 and 15.2 mg / cm 3 and neither too low a back pressure nor too high an electrode temperature lead to excessive emitter evaporation.
  • FIG. 1 shows a mercury short-arc high-pressure discharge lamp according to the invention, in section
  • Figure 2 shows a detail of the cathode
  • Figure 1 shows in section an inventive mercury short-arc high-pressure discharge lamp 1 with an output of 1.75 kW. It has a piston 2 made of quartz glass, which is elliptically shaped. This is followed by two ends 3 on two opposite sides, which are designed as piston necks 4 and each contain holding parts 8.
  • the necks have a front conical part 4a, which contains a support roller 5 made of quartz glass as an essential component of the holding part, and a rear cylindrical part 4b, which forms the sealing seal.
  • the front part 4a has an indentation 6 of 5 mm in length. This is followed by a support roller 5 with a central bore, which is conically shaped.
  • a shaft 10 of a cathode 7 with an outer diameter of 6 mm is axially guided in the bore of the first support roller and extends into the discharge volume and carries an integral head part 25 there.
  • the shaft 10 is extended beyond the support roller 5 to the rear and ends at a plate 12, to which the sealing seal in the form of a cylindrical quartz blocks 13 connects.
  • a second plate 14 which holds an external power supply in the form of a molybdenum rod 15 in the middle.
  • On the outer surface of the quartz block 13, four foils 16 made of molybdenum are guided along in a manner known per se and melted gas-tight on the wall of the piston neck.
  • the anode 26, consisting of a separate head part 18 and shaft 19, is held in the bore of the second support roller 5.
  • the cathode 7 and the holding part 8 is shown in detail.
  • the cathode 7 is composed of a circular cylindrical shaft 10 of 36 mm in length and an integral head 25 of 20 mm in length, the head 25, like the shaft, having an outside diameter of 6 mm.
  • the end of the head 25 facing the A-node is designed as a tip 11 with a tip angle ⁇ of 60 ° and has a plateau-shaped end 27 with a diameter of 0.5 mm.
  • the holding part consists of support rollers 5 and several foils in its bore.
  • a film 24 is wrapped around the shaft several times (two to four layers).
  • the material of the tip 11 of the cathode 7 has a doping of 2.0% by weight of La 2 ⁇ 3.
  • the mercury short-arc high-pressure discharge lamp according to the invention has a discharge vessel with a volume of 134 cm 3 , which is filled with 603 mg of mercury and a noble gas mixture of xenon and argon in an amount of 720 mg.
  • the current density J in the cathode at a distance of 0.5 mm from the plateau tip is 66 A / mm 2 when the lamp is in operation.)

Landscapes

  • Discharge Lamp (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)

Abstract

Lampe (1) à décharge à haute pression au mercure à arc court destinée à fonctionner avec du courant continu, qui comporte un récipient de décharge (2) possédant deux cols (4) situés de manière diamétralement opposée dans lesquels sont fondues de manière étanche aux gaz une anode (26) et une cathode (7) constituées toutes deux de tungstène, ledit récipient étant rempli de mercure et d'au moins un gaz noble. Selon la présente invention, la matière de la pointe (11) de cathode contient, en plus du tungstène, de l'oxyde de lanthane La203, et la teneur en mercure de la matière remplissant le volume du récipient de décharge est de 1 mg/cm3 au moins et de 6 mg/cm3 au plus.
EP03717130A 2002-03-05 2003-03-05 Lampe au mercure a arc court dotee d'une cathode contenant de l'oxyde de lanthane Withdrawn EP1481417A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10209424 2002-03-05
DE10209424A DE10209424A1 (de) 2002-03-05 2002-03-05 Quecksilber-Kurzbogenlampe
PCT/DE2003/000709 WO2003075311A1 (fr) 2002-03-05 2003-03-05 Lampe au mercure a arc court dotee d'une cathode contenant de l'oxyde de lanthane

Publications (1)

Publication Number Publication Date
EP1481417A1 true EP1481417A1 (fr) 2004-12-01

Family

ID=27762647

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03717130A Withdrawn EP1481417A1 (fr) 2002-03-05 2003-03-05 Lampe au mercure a arc court dotee d'une cathode contenant de l'oxyde de lanthane

Country Status (8)

Country Link
US (1) US20040169476A1 (fr)
EP (1) EP1481417A1 (fr)
JP (1) JP2005519436A (fr)
KR (1) KR20040086728A (fr)
CN (1) CN1524284A (fr)
DE (1) DE10209424A1 (fr)
TW (1) TWI275119B (fr)
WO (1) WO2003075311A1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2423862A (en) * 2005-03-04 2006-09-06 Heraeus Noblelight Ltd High-pressure discharge lamp having constructional details for reducing devitrification of glass
US7633226B2 (en) * 2005-11-30 2009-12-15 General Electric Company Electrode materials for electric lamps and methods of manufacture thereof
WO2007104241A1 (fr) * 2006-03-10 2007-09-20 Huawei Technologies Co., Ltd. Dispositif et système de réalisation de service de tonalité de rappel multimédia et procédé correspondant
DE102006026940A1 (de) * 2006-06-09 2007-12-13 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Hochdruckentladungslampe
US8138662B2 (en) 2006-12-18 2012-03-20 Osram Ag Electrode for a discharge lamp
DE102006061375B4 (de) * 2006-12-22 2019-01-03 Osram Gmbh Quecksilber-Hochdruckentladungslampe mit einer Wolfram und Kalium enthaltenden Anode, die eine Kornzahl größer 200 Körner pro mm2 und eine Dichte größer 19,05g/cm3 aufweist
US20100102699A1 (en) * 2007-03-12 2010-04-29 Osram Gesellschaft Mit Beschrankter Haftung Discharge Lamp and Method for Producing a Discharge Lamp
JP5293172B2 (ja) * 2008-12-26 2013-09-18 ウシオ電機株式会社 放電ランプ
CN101882556B (zh) * 2010-08-05 2012-01-11 上海大愚光源科技有限公司 一种连续氪灯用金属阴极
JP5126332B2 (ja) * 2010-10-01 2013-01-23 ウシオ電機株式会社 ショートアーク型放電ランプ
DE102015218878A1 (de) * 2015-09-30 2017-03-30 Osram Gmbh Gleichstrom-Gasentladungslampe mit einer thoriumfreien Kathode
US11923185B2 (en) * 2021-06-16 2024-03-05 Kla Corporation Method of fabricating a high-pressure laser-sustained-plasma lamp

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6450359A (en) * 1987-08-21 1989-02-27 Hitachi Ltd Extra-high pressure mercury lamp
JPH01161653A (ja) * 1987-12-18 1989-06-26 Toshiba Corp ショートアーク放電灯
US5791767A (en) * 1992-09-09 1998-08-11 Nikon Corporation Semiconductor exposure device
BE1007595A3 (nl) * 1993-10-07 1995-08-16 Philips Electronics Nv Hogedruk-metaalhalogenide-ontladingslamp.
JP2915362B2 (ja) * 1996-09-27 1999-07-05 ウシオ電機株式会社 ショートアーク型水銀ランプ
EP0962026A1 (fr) * 1997-12-22 1999-12-08 Koninklijke Philips Electronics N.V. Lampe a decharge a halogenure de metal et a haute pression
DE29823366U1 (de) * 1998-08-06 1999-07-08 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Elektrode für eine Hochdruckentladungslampe mit langer Lebensdauer
JP2000057996A (ja) * 1998-08-10 2000-02-25 Orc Mfg Co Ltd ショートアーク型放電灯
JP3687582B2 (ja) * 2001-09-12 2005-08-24 ウシオ電機株式会社 放電ランプ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO03075311A1 *

Also Published As

Publication number Publication date
WO2003075311A1 (fr) 2003-09-12
US20040169476A1 (en) 2004-09-02
JP2005519436A (ja) 2005-06-30
DE10209424A1 (de) 2003-09-18
TWI275119B (en) 2007-03-01
TW200304164A (en) 2003-09-16
KR20040086728A (ko) 2004-10-12
CN1524284A (zh) 2004-08-25

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