EP1402975A1 - Method of manufacturing vacuum pump rotors, and rotors obtained thereby - Google Patents
Method of manufacturing vacuum pump rotors, and rotors obtained thereby Download PDFInfo
- Publication number
- EP1402975A1 EP1402975A1 EP20030017613 EP03017613A EP1402975A1 EP 1402975 A1 EP1402975 A1 EP 1402975A1 EP 20030017613 EP20030017613 EP 20030017613 EP 03017613 A EP03017613 A EP 03017613A EP 1402975 A1 EP1402975 A1 EP 1402975A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- billet
- forging
- rotors
- turbine pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21K—MAKING FORGED OR PRESSED METAL PRODUCTS, e.g. HORSE-SHOES, RIVETS, BOLTS OR WHEELS
- B21K1/00—Making machine elements
- B21K1/28—Making machine elements wheels; discs
- B21K1/36—Making machine elements wheels; discs with blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21K—MAKING FORGED OR PRESSED METAL PRODUCTS, e.g. HORSE-SHOES, RIVETS, BOLTS OR WHEELS
- B21K3/00—Making engine or like machine parts not covered by sub-groups of B21K1/00; Making propellers or the like
- B21K3/04—Making engine or like machine parts not covered by sub-groups of B21K1/00; Making propellers or the like blades, e.g. for turbines; Upsetting of blade roots
Definitions
- the present invention relates to turbine pumps and more particularly to a method of manufacturing vacuum pump rotors for a turbine pump, in particular a turbomolecular pump, as well as to the rotors obtained thereby.
- a turbine pump in particular a turbomolecular pump
- the invention will be disclosed with special reference to the manufacture of a rotor for a turbomolecular pump, but this is not to be intended as a limitation of the applications of the invention.
- the rotor of a turbomolecular pump comprises a group of impellers mounted onto a rotating shaft, each impeller comprising a disk equipped with a set of peripheral radial vanes.
- the rotor rotates at peripheral speeds that can be as high as several ten thousand turns per minute.
- the severe working conditions and the search for higher and higher performance for turbomolecular pumps, in terms of compression ratio and pumping speed, require that each impeller and the rotor in the whole be made as a structure that is robust and balanced at the same time.
- the impeller vanes must be so shaped as to optimise the pump performance.
- manufacturing starts from an extruded metal bar, from which cylinders are cut that are subsequently worked by different methods, such as turning, milling, electric discharge machining and so on.
- the impeller is made by forming the blades by milling, by using an apparatus allowing simultaneous working of several disks.
- each vane of the impeller by means of an electric discharge machining technique, as disclosed for instance in FR-A-2 570 970 and EP-A 0 426 233, the latter being in the name of the present Applicant.
- the known manufacturing methods have some drawbacks and limitations.
- the mechanical properties and the density of the material are not homogenous enough to ensure a long operating life of the rotors.
- the transversal mechanical properties are far worse than the longitudinal properties.
- the permanence time of the rotor at high temperature cannot be too long: it is of the order of a few hundred hours for a rotor made of aluminium alloy 2014 exposed in continuous manner to temperatures of the order of 130°C, with equivalent stresses (determined for instance according to the Von Mises criterion) of the order of 300 MPa.
- the method of the invention comprises preparing an intermediate semi-finished piece, which is obtained by forging and is then finished by a conventional mechanical working.
- the method of the invention is especially suitable for obtaining bell-shaped rotors or in general non-monolithic rotors with shaft driving into an axial bore, even if this is not to be intended in a limiting sense.
- the invention further concerns the rotors obtained by the method starting from a forged semi-finished piece.
- a cylindrical billet 1 is obtained by forging through an axial compression, schematised by forces P1, while preventing radial expansion through means not shown in Fig. 1, schematised by forces Pr.
- billet 11 In case the rotor is a so-called bell-shaped rotor, starting from a bar portion, billet 11 would be first shaped into a substantially cylindrical shape by axial compression, as schematically shown in Fig. 2A and indicated by forces Pl. Subsequently an axial cavity would be formed through a punch 12, which would be forced into billet 11, while preventing the billet radial expansion by retaining it in a mould (forces Pr), as shown in Fig. 2B.
- forces Pr forces
- billet 11 is mechanically worked by known techniques to form the vanes, for instance by milling, turning, etc.
- axial cavity 13 is preferably only partly formed by means of the punch by forging, the remaining part being finished by mechanical working.
- the axial size of the cavity obtained by means of the punch is usually half the total height of the billet after forging.
- the aluminium alloys commonly used to manufacture turbomolecular pump rotors are alloys 2014 (Al-Cu alloy) and 7075 (Al-Zn alloy) in the form of extruded bars that are then submitted to tempering and ageing.
- alloys 2014 Al-Cu alloy
- 7075 Al-Zn alloy
- Forming a central bore on the bottom of the bell obtained by forging allows a further homogenisation of the mechanical properties obtained through the subsequent thermal treatment.
- Figs. 3 and 4 show two rotors obtained by the method of the invention.
- the solid lines show the profile of the bell-shaped billet 11 (intermediate piece) that is subsequently refined by mechanical working.
- the dashed lines show the profile of the rotor that can be obtained by turning the forged billet.
- the prior art rotors are obtained from extruded bars, in which the above mentioned strength parameters considerably change when passing from the centre to the periphery of the bar, and depending on whether the corresponding cylindrical tensile test specimens are obtained with their axes in the extrusion direction (axis parallel with the bar axis) or perpendicular to such direction (in radial or tangential direction in the bar).
- the Applicant has established that, by manufacturing the billets by forging, the values of R, A and R0.2 become considerably constant, both in the different points of the piece and in the different directions in which the test specimens for measuring said parameters are obtained.
- the rotors obtained by the method of the invention exhibit a homogenisation of the material density.
- This feature is of particular interest in parts that have to rotate at high speed (with tangential speeds of the order of 300-400 m/sec), as is the case for rotors of turbomolecular pumps.
- the non-uniform density would lead to a rotor mass that is not distributed in axially symmetrical manner, with negative effects on the balancing.
- a further advantage of the method of the invention is that, by means of the forging, a rotor is obtained that is much closer to the final shape, so that a smaller turning or other mechanical working is required to obtain the finished product.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Forging (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITTO20020770 | 2002-09-06 | ||
IT000770A ITTO20020770A1 (it) | 2002-09-06 | 2002-09-06 | Metod0 per fabbricare rotori di pompe da vuoto e prodotti |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1402975A1 true EP1402975A1 (en) | 2004-03-31 |
Family
ID=31972229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP20030017613 Withdrawn EP1402975A1 (en) | 2002-09-06 | 2003-08-11 | Method of manufacturing vacuum pump rotors, and rotors obtained thereby |
Country Status (4)
Country | Link |
---|---|
US (1) | US20040175261A1 (ja) |
EP (1) | EP1402975A1 (ja) |
JP (1) | JP2004263687A (ja) |
IT (1) | ITTO20020770A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2013483B1 (de) * | 2006-04-29 | 2010-03-03 | Oerlikon Leybold Vacuum GmbH | Verfahren zur herstellung von rotoren oder statoren einer turbomolekularpumpe |
DE102012222230A1 (de) * | 2012-12-04 | 2014-06-05 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
KR102270864B1 (ko) * | 2017-04-19 | 2021-07-01 | 주식회사 엘지에너지솔루션 | 리튬 이차전지용 음극, 이를 포함하는 리튬 이차전지, 및 이의 제조 방법 |
CN112719813B (zh) * | 2020-12-31 | 2024-06-18 | 宝鼎重工有限公司 | 一种轴套类产品转子中心的精加工方法 |
JP7390408B2 (ja) * | 2022-01-13 | 2023-12-01 | エドワーズ株式会社 | 真空ポンプ、真空ポンプ用回転体、及び真空ポンプの製造方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2080641A (en) * | 1934-06-22 | 1937-05-18 | Aluminum Co Of America | Method of producing locomotive connecting rods |
JPS584323A (ja) * | 1981-06-26 | 1983-01-11 | Osaka Shinku Kiki Seisakusho:Kk | 動翼付ロ−タ−の成形法 |
JPH02136595A (ja) * | 1988-11-16 | 1990-05-25 | Anelva Corp | 真空ポンプ |
EP0818548A1 (en) * | 1996-07-10 | 1998-01-14 | Mitsubishi Heavy Industries, Ltd. | Aluminum alloy impeller and manufacturing method of the same |
JP2000197943A (ja) * | 1998-12-28 | 2000-07-18 | Furukawa Electric Co Ltd:The | 鍛造品回転体及びその製造方法 |
JP2000254754A (ja) * | 1999-03-08 | 2000-09-19 | Showa Denko Kk | アルミニウム合金製ローター素材の製造方法およびアルミニウム合金製ローター素材 |
JP2002285306A (ja) * | 2001-03-27 | 2002-10-03 | Kobe Steel Ltd | アルミニウム合金製ロータ材の製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2102679C2 (de) * | 1971-01-21 | 1982-12-30 | Papst-Motoren GmbH & Co KG, 7742 St Georgen | Elektro-Kleinmotor für einen Lüfter |
US4789410A (en) * | 1987-03-03 | 1988-12-06 | United Technologies Corporation | Method for heat treating and quenching complex metal components using salt baths |
US4860567A (en) * | 1987-12-21 | 1989-08-29 | United Technologies Corporation | Ring forging process |
IT1238201B (it) * | 1989-11-03 | 1993-07-09 | Varian Spa | Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti. |
US5507617A (en) * | 1993-08-04 | 1996-04-16 | General Signal Corporation | Regenerative turbine pump having low horsepower requirements under variable flow continuous operation |
JP4003147B2 (ja) * | 1998-02-16 | 2007-11-07 | 株式会社ヴァレオサーマルシステムズ | ロータの製造方法 |
-
2002
- 2002-09-06 IT IT000770A patent/ITTO20020770A1/it unknown
-
2003
- 2003-08-11 EP EP20030017613 patent/EP1402975A1/en not_active Withdrawn
- 2003-09-04 US US10/655,235 patent/US20040175261A1/en not_active Abandoned
- 2003-09-08 JP JP2003315745A patent/JP2004263687A/ja active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2080641A (en) * | 1934-06-22 | 1937-05-18 | Aluminum Co Of America | Method of producing locomotive connecting rods |
JPS584323A (ja) * | 1981-06-26 | 1983-01-11 | Osaka Shinku Kiki Seisakusho:Kk | 動翼付ロ−タ−の成形法 |
JPH02136595A (ja) * | 1988-11-16 | 1990-05-25 | Anelva Corp | 真空ポンプ |
EP0818548A1 (en) * | 1996-07-10 | 1998-01-14 | Mitsubishi Heavy Industries, Ltd. | Aluminum alloy impeller and manufacturing method of the same |
JP2000197943A (ja) * | 1998-12-28 | 2000-07-18 | Furukawa Electric Co Ltd:The | 鍛造品回転体及びその製造方法 |
JP2000254754A (ja) * | 1999-03-08 | 2000-09-19 | Showa Denko Kk | アルミニウム合金製ローター素材の製造方法およびアルミニウム合金製ローター素材 |
JP2002285306A (ja) * | 2001-03-27 | 2002-10-03 | Kobe Steel Ltd | アルミニウム合金製ロータ材の製造方法 |
Non-Patent Citations (5)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 0070, no. 79 (M - 204) 31 March 1983 (1983-03-31) * |
PATENT ABSTRACTS OF JAPAN vol. 0143, no. 75 (M - 1010) 14 August 1990 (1990-08-14) * |
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 10 17 November 2000 (2000-11-17) * |
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 12 3 January 2001 (2001-01-03) * |
PATENT ABSTRACTS OF JAPAN vol. 2003, no. 02 5 February 2003 (2003-02-05) * |
Also Published As
Publication number | Publication date |
---|---|
JP2004263687A (ja) | 2004-09-24 |
US20040175261A1 (en) | 2004-09-09 |
ITTO20020770A1 (it) | 2004-03-07 |
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Effective date: 20081217 |