EP1392973A1 - Pompe a vide a piston a etages multiples et procede permettant de la faire fonctionner - Google Patents

Pompe a vide a piston a etages multiples et procede permettant de la faire fonctionner

Info

Publication number
EP1392973A1
EP1392973A1 EP02776503A EP02776503A EP1392973A1 EP 1392973 A1 EP1392973 A1 EP 1392973A1 EP 02776503 A EP02776503 A EP 02776503A EP 02776503 A EP02776503 A EP 02776503A EP 1392973 A1 EP1392973 A1 EP 1392973A1
Authority
EP
European Patent Office
Prior art keywords
piston
pump
stage
inlet
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02776503A
Other languages
German (de)
English (en)
Inventor
Rudolf Bahnen
Josef Hodapp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1392973A1 publication Critical patent/EP1392973A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/02—Multi-stage pumps of stepped piston type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F04B35/045—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric using solenoids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Definitions

  • the invention relates to a multi-stage piston vacuum pump with the features of the preamble of claim 1.
  • a piston vacuum pump of this type is known from WO : 00/63556.
  • a linear drive is assigned to each piston of the piston pairs.
  • the inlet valve opens near a - er.s en - dead center, controlled by the piston itself.
  • the piston opens at its point due to its geometry, an outlet valve arranged on the front.
  • the pressure difference can only in the last ⁇ -pressure side) compressors si'qnslose for opening the A ⁇ slassventiles: be used because sufficiently high only at this point 'pressure differences occur.
  • the linear operation of the pistons is designed so that: every piston swings around its central position.
  • the piston n carries a permanent magnet in its ni ,, t , lere area, are these laterally assigned to stator permanent magnets.
  • Periodically energized coils arranged symmetrically thereto generate electromagnetic forces which cause the piston to move.
  • the present invention is based on the object of designing a piston vacuum pump of the type concerned here in such a way that it relates to the load dependency Disadvantages are largely eliminated without having to increase the costs and / or the power consumption of one or more drives.
  • the inlet valve of the last pump stage in such a way that it also opens when the piston moves which have a reduced amplitude due to high loads or high pressure differences.
  • the inlet valve fulfills this requirement if the inlet opening designed as a radial slot in the piston wall is relatively large in the axial direction.
  • the axial height is expediently 10% to 20%, preferably 20%, of the piston stroke. This ensures that the piston still opens the inlet opening sufficiently, even with a reduced movement amplitude due to high loads.
  • the outlet valve initially only opens due to the high pressure differences present. If the load or the pressure difference decreases, the piston is again able to perform its full stroke movement. The admission cut is increasingly being released.
  • the piston itself opens the outlet valve.
  • the two compression stages of the pressure-side piston are connected in parallel and form the last pressure-side pump stage.
  • the faces of the piston "see” substantially equal pressures during operation.
  • the smooth swinging of the piston around its central position is not disturbed.
  • Both exhaust and intake valves open fully.
  • the performance data of the two compression stages are not reduced by the piston swinging unevenly.
  • This solution does indeed deviate from the operation of multi-stage vacuum pumps that is common in vacuum technology.
  • the last pump stage with two compression stages operated in parallel has a larger volume than the pumping chamber of the previous pump stage.
  • this disadvantage can easily be accepted due to the advantage that a uniform oscillation of the piston of the last pump stage is ensured.
  • the pump-effective sections of at least the pressure-side piston have different diameters. It is thereby achieved that the volume of the compression chamber of the piston section with the smaller diameter is smaller than the volume of the compression chamber of the piston section with the larger diameter.
  • the movement of the piston around its central position is essentially uniform when higher pressures occur in the smaller pumping chamber than in the larger pumping chamber. It is possible to arrange the two pressure-side scoops one behind the other - as is common in vacuum technology. The smooth piston movement is least disturbed when the product of the front piston face and the average pressure occurring in the associated scooping chamber is approximately the same on both sides. Further advantages and details of the invention will be explained on the basis of exemplary embodiments schematically illustrated in FIGS. 1 to 4. Show it
  • FIG. 1 shows a solution with an enlarged inlet opening on the pressure side
  • Figure 4 shows a solution in which the pump-effective piston sections of the piston on the pressure side have different diameters.
  • the figures each show a piston vacuum pump 1 with a pair of pistons (pistons 2 and 3).
  • Each piston has piston sections 4, 5 and 6, 7, the free end faces of which are each assigned a cylindrical scoop 11 to 14.
  • the pistons 2, 3 and the scoops 11 to 14 are located in a housing 15 with cylinder sections 16 to 19 for each of the piston sections 4 to 7.
  • the materials of the cylinder sliding surfaces and the associated piston surfaces are selected in a manner known per se so that the pump dry, ie can be operated without lubricants.
  • a linear drive is assigned to each of the pistons 2, 3. It comprises a permanent magnet ring 21, 22 on the piston side, which surrounds the piston 2, 3 in its central region.
  • the permanent magnet rings 21, 22 move each in an annular space 23, 24 surrounding the piston.
  • On the stator side each of the two permanent magnets 21, 22 on the piston side is assigned further permanent magnet rings 26 to 29, each of which forms the axial delimitation of the annular spaces 23, 24.
  • Components of the linear drive on the stator side are also coils 31 to 34 and yoke components 35 to 38 comprising these coils.
  • the coils 31 to 34 are energized in such a way that the magnetic fields generated by them and guided by the yoke components 35 to 38 with the magnetic fields of the permanent magnet rings 21, 22 , 26, 27 interact in the desired manner.
  • the pistons 2, 3 should swing about a central position, so that the piston faces can perform their pumping functions during this movement.
  • the compression spaces 11 to 14 are each equipped with an inlet valve and an outlet valve.
  • Each of the inlet valves 41 to 44 includes an inlet opening 45 to 48, which is located between an outer inlet chamber 49 to 52 ' and the respective scoops 11 to 14.
  • the inlet openings 45 to 48 are designed as slot-shaped, radially extending openings in the respective cylinder wall.
  • the piston sections 4 to 7 each release the inlet opening when they assume one of their two dead center positions (in each case retracted position in the cylinder).
  • the outlet valves 54 to 57 are each arranged on the end face. Their locking elements separate the compression space from an outlet space (58 to 61) until they are opened by the respective piston section 4 to 7 - at high pressure differences also by the pressure generated.
  • the closure elements are designed as flexible plates 62 to 65, which extend over the entire cross-section of the cylinder sections, are fastened centrally to the housing 2 and are actuated peripherally by the pressure generated or by the end faces of the piston.
  • the piston faces are concave.
  • the end faces of the cylinder walls form the valve seats.
  • the gases emerging from the valves 54 to 57 first enter the outlet chambers 58 to 61, to which the outlets 66 to 69 are connected.
  • Other designs of the exhaust valves as are known for example from DE-A-196 34 518, can be implemented.
  • the inlet of the pump is denoted by 71. It communicates with the inlet chambers 49 and 50.
  • the two associated compression stages are connected in parallel. Together with the associated components, they form a first pump stage located on the suction side.
  • the outlets 66, 67 of the two outlet chambers 58, 59 are jointly connected to the inlet chamber 51 via the line 72.
  • the outlet 68 of this compression stage is connected via line 73 to the inlet chamber 52, which is part of the compression stage with the compression chamber 14 and forms the third pump stage located on the pressure side.
  • the outlet of this pump stage is labeled 69. It forms the outlet 70 of the multi-stage pump 1.
  • the inlet opening 48 belonging to the inlet valve 44 is made relatively large in the axial direction.
  • the height of the radial slot in the cylinder section 19 is approximately 20% of the piston stroke, so that the piston section 7 can at least partially release the inlet opening 48 even when the piston 3 does not oscillate symmetrically about its central position, caused by the pressure difference in the pumping chambers 13, 14.
  • the multi-stage vacuum pump - as in the embodiment according to FIG. 1 - also comprises four compression stages.
  • the inlet opening 48 of the inlet valve 44 has the same dimensions as the inlet openings of the other inlet valves 41, 42, 43.
  • the inlet of the pump is denoted by 71. It is connected to the inlet chamber 49 of the compression stage with the pump chamber 11.
  • the outlet chamber 58 (outlet 66) of these compression stages is connected via the line 57 to the inlet chamber 50 of the compression stage with the pump chamber 12, that is to say that the compression stages mentioned are in succession are switched.
  • the outlet 67 is connected via line 76 to both inlet chambers 51, 52 of the pressure-side piston 3.
  • the two outlet chambers 60, 61 of these compression stages are connected to the outlet 70 of the pump 1 via the line 77.
  • the inlet 71 of the pump 1 is connected via the line 81 with the check valve 82 to the inlet chambers 51 and 52 of the two compression stages arranged in parallel on the pressure side.
  • the closing direction of the check valve 82 is selected such that it is closed during normal operation of the pump 1. During this operation, the pressure in the inlet 71 of the pump 1 is less than the pressure in the inlet chambers 51, 52 of the pressure-side pump stage.
  • the pressure conditions can be reversed, since the pumping speed of the pumping stage on the pressure side, which consists of two compression stages arranged in parallel, is higher than the pumping speed of the previous pump stages (compression stages arranged one behind the other).
  • the check valve 82 opens (expediently at a pressure difference of approx. 100 mbar) and establishes a direct connection between the inlet 71 of the pump 1 and its pumping stage on the pressure side.
  • the higher pumping speed of this pump stage ensures that the connected chamber is evacuated quickly until the pressure conditions are reversed.
  • the valve 82 closes.
  • the pump 1 then operates in three stages and evacuates the connected chamber to the desired final pressure.
  • the check valve is only shown schematically. Many designs, such as those disclosed in DE 199 17 009 A1, are possible.
  • the embodiment according to FIG. 3 largely corresponds to the embodiment according to FIG. 2.
  • the diameter of its piston sections 6, 7, which are components of the pressure-side pump stage consisting of two compression stages connected in parallel, is smaller than that of the Execution according to Figure 2 (by approx. 30%).
  • the pumping speed of this pump stage is therefore no longer significantly higher than the pumping speed of the previous pump stages.
  • the pump 1 can have further suction-side pump stages, a pump stage 86 consisting of two compression stages 84, 85 connected in parallel is located upstream of the inlet 71.
  • the compression stages 84, 85 can be piston stages of the same type or stages that operate on a different pumping principle.
  • a high vacuum pump e.g. a turbomolecular vacuum pump
  • the devices described above can of course also be used in the embodiments according to FIGS. 1, 2 and 4.
  • the compression stages of the piston 1 on the suction side are connected in parallel.
  • the inlet 71 of the pump 1 is connected to the two inlet chambers 49, 50.
  • the compression stages of the piston 3 are connected in series.
  • the piston section 7 of the compression-side compression stage has a smaller diameter than the piston section 6.
  • the piston section 7 and the cylinder section 19 have different dimensions.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)

Abstract

L'invention concerne une pompe à vide à piston (1) à étages multiples (1) comportant une admission (71), une sortie (70), au moins une paire de pistons (2, 3) et plusieurs étages de compression associés aux faces avant des pistons, lesdits étages de compression comprenant dans chaque cas une section de piston (4 à 7), une section de cylindre (16 à 19), une chambre d'aspiration (11 à 14), ainsi qu'une soupape d'admission (41 à 44) et une soupe de sortie (54 à 57). Afin de réduire l'absorption de puissance, il est prévu d'augmenter la hauteur de la fente radiale qui forme l'ouverture d'admission de la soupape d'admission, d'actionner en parallèle deux étages de pompe côté pression ou de sélectionner le diamètre de la section de piston du dernier étage de la pompe, de sorte qu'il soit inférieur à celui de la section de piston de l'avant-dernier étage de la pompe.
EP02776503A 2001-06-02 2002-05-10 Pompe a vide a piston a etages multiples et procede permettant de la faire fonctionner Withdrawn EP1392973A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2001127082 DE10127082A1 (de) 2001-06-02 2001-06-02 Mehrstufige Kolbenvakuumpumpe und Verfahren zum Betrieb dieser Pumpe
DE10127082 2001-06-02
PCT/EP2002/005126 WO2002099280A1 (fr) 2001-06-02 2002-05-10 Pompe a vide a piston a etages multiples et procede permettant de la faire fonctionner

Publications (1)

Publication Number Publication Date
EP1392973A1 true EP1392973A1 (fr) 2004-03-03

Family

ID=7687135

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02776503A Withdrawn EP1392973A1 (fr) 2001-06-02 2002-05-10 Pompe a vide a piston a etages multiples et procede permettant de la faire fonctionner

Country Status (4)

Country Link
EP (1) EP1392973A1 (fr)
JP (1) JP2004527692A (fr)
DE (1) DE10127082A1 (fr)
WO (1) WO2002099280A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20307327U1 (de) * 2003-05-10 2004-09-23 Leybold Vakuum Gmbh Kolbenvakuumpumpenserie

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4854825A (en) * 1987-02-27 1989-08-08 Commonwealth Scientific And Industrial Research Organization Multi-stage vacuum pump
US5482443A (en) * 1992-12-21 1996-01-09 Commonwealth Scientific And Industrial Research Organization Multistage vacuum pump
DE19634519A1 (de) * 1996-08-27 1998-03-05 Leybold Vakuum Gmbh Kolbenvakuumpumpe mit Eintritt und Austritt
DE19709206A1 (de) * 1997-03-06 1998-09-10 Leybold Vakuum Gmbh Vakuumpumpe
DE19749729A1 (de) * 1997-11-11 1999-05-12 Leybold Vakuum Gmbh Kolbenvakuumpumpe
EP1171711B1 (fr) * 1999-04-19 2004-10-13 LEYBOLD VACUUM GmbH Organe de commande a piston oscillant
WO2000063555A1 (fr) * 1999-04-19 2000-10-26 Leybold, Vakuum Gmbh Dispositif de commande a piston oscillant
DE19921711A1 (de) * 1999-05-12 2000-11-16 Leybold Vakuum Gmbh Kolbenvakuumpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO02099280A1 *

Also Published As

Publication number Publication date
WO2002099280A1 (fr) 2002-12-12
DE10127082A1 (de) 2002-12-05
JP2004527692A (ja) 2004-09-09

Similar Documents

Publication Publication Date Title
EP0626516B1 (fr) Dispositif de pompe à vide sans lubrifiant
DE60126346T2 (de) Federstützkonstruktion für hubkolbenverdichter
DE3147824C2 (de) Mehrstufige Drehkolben-Vakuumpumpe
EP1252445B1 (fr) Pompe turbo-moléculaire
DE3728154C2 (de) Mehrstufige Molekularpumpe
EP2295812B1 (fr) Récipient repliable
EP3523537B1 (fr) Compresseur frigorifique semi-hermétique
EP1434896B1 (fr) Installation multichambre pour le traitement d'objets sous vide, procede permettant de faire le vide de cette installation et systeme utilise a cet effet
DE4331589C2 (de) Vakuumpumpsystem
DE102012003680A1 (de) Vakuumpumpe
EP0363503B1 (fr) Etage de pompage pour une pompe à vide élevé
EP2039941B1 (fr) Pompe à vide
EP1392973A1 (fr) Pompe a vide a piston a etages multiples et procede permettant de la faire fonctionner
EP0541989B1 (fr) Système de pompe à vide multi-étage
DE10009673A1 (de) Spiralkompressor
DE10114585A1 (de) Vakuumpumpe
WO2001079695A1 (fr) Pompe a piston oscillant
EP0922165B1 (fr) Pompe a faire le vide
WO2000063555A1 (fr) Dispositif de commande a piston oscillant
EP0373229B1 (fr) Pompe à vide mécanique avec une soupape anti-retour chargée par ressort
DE102017102645A1 (de) Kältemittel-Scrollverdichter für die Verwendung innerhalb einer Wärmepumpe
DE102021110042A1 (de) Hydrauliksystem und Verfahren zum Betreiben eines Hydrauliksystems
DE102018119747B3 (de) Turbomolekularpumpe für massenspektrometer
WO2003031823A1 (fr) Pompe a vide rotative a refoulement axial
WO2004106739A1 (fr) Pompe a piston a vide

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20030828

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: LEYBOLD VACUUM GMBH

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20051201