EP1376650A4 - Abtast-atomsonde und analyseverfahren mit der abtastatomsonde - Google Patents

Abtast-atomsonde und analyseverfahren mit der abtastatomsonde

Info

Publication number
EP1376650A4
EP1376650A4 EP02705458A EP02705458A EP1376650A4 EP 1376650 A4 EP1376650 A4 EP 1376650A4 EP 02705458 A EP02705458 A EP 02705458A EP 02705458 A EP02705458 A EP 02705458A EP 1376650 A4 EP1376650 A4 EP 1376650A4
Authority
EP
European Patent Office
Prior art keywords
sample
atom probe
analysis region
scanning atom
analyzing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02705458A
Other languages
English (en)
French (fr)
Other versions
EP1376650A1 (de
Inventor
Osamu Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanazawa Institute of Technology (KIT)
Original Assignee
Kanazawa Institute of Technology (KIT)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanazawa Institute of Technology (KIT) filed Critical Kanazawa Institute of Technology (KIT)
Publication of EP1376650A1 publication Critical patent/EP1376650A1/de
Publication of EP1376650A4 publication Critical patent/EP1376650A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2818—Scanning tunnelling microscopes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
EP02705458A 2001-03-26 2002-03-22 Abtast-atomsonde und analyseverfahren mit der abtastatomsonde Withdrawn EP1376650A4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US27842301P 2001-03-26 2001-03-26
US278423P 2001-03-26
PCT/JP2002/002802 WO2002093615A1 (en) 2001-03-26 2002-03-22 Scanning atom probe and analysis method using scanning atom probe

Publications (2)

Publication Number Publication Date
EP1376650A1 EP1376650A1 (de) 2004-01-02
EP1376650A4 true EP1376650A4 (de) 2008-05-21

Family

ID=23064912

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02705458A Withdrawn EP1376650A4 (de) 2001-03-26 2002-03-22 Abtast-atomsonde und analyseverfahren mit der abtastatomsonde

Country Status (4)

Country Link
US (1) US6875981B2 (de)
EP (1) EP1376650A4 (de)
JP (1) JP4111501B2 (de)
WO (1) WO2002093615A1 (de)

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US7442922B2 (en) * 2002-07-24 2008-10-28 Jpk Instruments Ag Method for locally highly resolved, mass-spectroscopic characterization of surfaces using scanning probe technology
US7414243B2 (en) * 2005-06-07 2008-08-19 Alis Corporation Transmission ion microscope
US7557361B2 (en) * 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
US7504639B2 (en) * 2003-10-16 2009-03-17 Alis Corporation Ion sources, systems and methods
US7485873B2 (en) 2003-10-16 2009-02-03 Alis Corporation Ion sources, systems and methods
US7786452B2 (en) * 2003-10-16 2010-08-31 Alis Corporation Ion sources, systems and methods
US7368727B2 (en) * 2003-10-16 2008-05-06 Alis Technology Corporation Atomic level ion source and method of manufacture and operation
US7601953B2 (en) * 2006-03-20 2009-10-13 Alis Corporation Systems and methods for a gas field ion microscope
US8110814B2 (en) 2003-10-16 2012-02-07 Alis Corporation Ion sources, systems and methods
US7786451B2 (en) * 2003-10-16 2010-08-31 Alis Corporation Ion sources, systems and methods
US7488952B2 (en) * 2003-10-16 2009-02-10 Alis Corporation Ion sources, systems and methods
US7521693B2 (en) * 2003-10-16 2009-04-21 Alis Corporation Ion sources, systems and methods
US7557358B2 (en) 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
US7321118B2 (en) * 2005-06-07 2008-01-22 Alis Corporation Scanning transmission ion microscope
US7554096B2 (en) * 2003-10-16 2009-06-30 Alis Corporation Ion sources, systems and methods
US7518122B2 (en) 2003-10-16 2009-04-14 Alis Corporation Ion sources, systems and methods
US7511279B2 (en) * 2003-10-16 2009-03-31 Alis Corporation Ion sources, systems and methods
US9159527B2 (en) * 2003-10-16 2015-10-13 Carl Zeiss Microscopy, Llc Systems and methods for a gas field ionization source
US7511280B2 (en) * 2003-10-16 2009-03-31 Alis Corporation Ion sources, systems and methods
US7554097B2 (en) * 2003-10-16 2009-06-30 Alis Corporation Ion sources, systems and methods
US7557359B2 (en) * 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
US7557360B2 (en) * 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
US7495232B2 (en) * 2003-10-16 2009-02-24 Alis Corporation Ion sources, systems and methods
JP4393899B2 (ja) * 2004-03-17 2010-01-06 エスアイアイ・ナノテクノロジー株式会社 アトムプローブ装置用試料及びその加工方法
JP5127445B2 (ja) * 2004-03-24 2013-01-23 カメカ インスツルメンツ インコーポレイテッド レーザ原子プローブ
JP2008502104A (ja) * 2004-06-03 2008-01-24 イマゴ サイエンティフィック インストルメンツ コーポレーション レーザ原子プロービング方法
EP1842221A4 (de) * 2004-12-21 2010-11-24 Imago Scient Instr Corp Laseratomsonden
ATE344973T1 (de) 2005-03-10 2006-11-15 Huettinger Elektronik Gmbh Vakuumplasmagenerator
JP2006260780A (ja) * 2005-03-15 2006-09-28 Japan Atomic Energy Agency 超短パルスレーザー集光と高電圧印加の併用による針状サンプル表層のイオン化方法、及びこれを使用した針状サンプル表層の分析方法
JP2006260807A (ja) * 2005-03-15 2006-09-28 Fujitsu Ltd 元素測定装置及び方法
JP4628153B2 (ja) * 2005-03-18 2011-02-09 富士通株式会社 ナノレベル構造組成観察装置及びナノレベル構造組成観察方法
JP2006261006A (ja) * 2005-03-18 2006-09-28 Fujitsu Ltd ナノレベル構造組成観察装置
GB2426120A (en) * 2005-05-11 2006-11-15 Polaron Plc A reflectron for use in a three-dimensional atom probe
EP1913362A2 (de) * 2005-07-28 2008-04-23 Imago Scientific Instruments Corporation Atomsondenverdampfungsverfahren
US20070116373A1 (en) * 2005-11-23 2007-05-24 Sonosite, Inc. Multi-resolution adaptive filtering
JP4752548B2 (ja) * 2006-03-10 2011-08-17 富士通株式会社 元素検出方法及び元素検出装置
WO2007109666A2 (en) * 2006-03-20 2007-09-27 Alis Corporation Systems and methods for a helium ion pump
JP4528278B2 (ja) * 2006-03-31 2010-08-18 学校法人金沢工業大学 分析装置及び分析方法
US20080083882A1 (en) * 2006-10-06 2008-04-10 Jian Bai Laser desorption assisted field ionization device and method
US7804068B2 (en) 2006-11-15 2010-09-28 Alis Corporation Determining dopant information
JP4982161B2 (ja) * 2006-11-30 2012-07-25 株式会社日立ハイテクノロジーズ ガス電界電離イオン源、及び走査荷電粒子顕微鏡
WO2009032706A1 (en) * 2007-09-04 2009-03-12 Imago Scientific Instruments Corporation Methods and apparatuses to align energy beam to atom probe specimen
FR2938963B1 (fr) * 2008-11-21 2010-11-12 Cameca Sonde atomique tomographique comportant un generateur electro-optique d'impulsions electriques haute tension.
DE102011119164B4 (de) * 2011-11-23 2021-01-21 Westfälische Wilhelms-Universität Münster Verfahren und Vorrichung zur Durchführung der Präparation wenigstens einer Probe für die Atomsonden-Tomographie
GB2562990A (en) * 2017-01-26 2018-12-05 Micromass Ltd Ion detector assembly
SE1750924A1 (sv) * 2017-07-14 2018-10-02 A method for analyzing the 3d structure of biomolecules

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995001646A1 (en) * 1993-07-01 1995-01-12 Midwest Research Institute Method for imaging an atomic-level of semiconductor
WO1999014793A1 (en) * 1997-09-16 1999-03-25 Isis Innovation Limited Atom probe

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JPS60211756A (ja) * 1984-04-03 1985-10-24 Tadashi Sekiguchi イオン顕微鏡
JP3266995B2 (ja) * 1993-07-30 2002-03-18 株式会社日立製作所 導電性部材の観察・計測方法及びその装置
US5440124A (en) * 1994-07-08 1995-08-08 Wisconsin Alumni Research Foundation High mass resolution local-electrode atom probe
JPH0894646A (ja) 1994-09-22 1996-04-12 Shimadzu Corp 表面分析装置
JPH09189680A (ja) 1996-01-08 1997-07-22 Hitachi Ltd 微小部質量分析装置
JP2000283909A (ja) 1999-03-30 2000-10-13 Jeol Ltd 表面観察装置
JP3945561B2 (ja) * 2000-06-30 2007-07-18 日本電子株式会社 引出電極の作製方法
JP2002042715A (ja) * 2000-07-25 2002-02-08 Kanazawa Inst Of Technology 組成分布立体表示アトムプローブおよび走査型組成分布立体表示アトムプローブ
JP3902925B2 (ja) * 2001-07-31 2007-04-11 エスアイアイ・ナノテクノロジー株式会社 走査型アトムプローブ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995001646A1 (en) * 1993-07-01 1995-01-12 Midwest Research Institute Method for imaging an atomic-level of semiconductor
WO1999014793A1 (en) * 1997-09-16 1999-03-25 Isis Innovation Limited Atom probe

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
NISHIKAWA O ET AL: "Development of a scanning atom probe and atom-by-atom mass analysis of diamonds", APPLIED PHYSICS A (MATERIALS SCIENCE PROCESSING) SPRINGER-VERLAG GERMANY, vol. 66, March 1998 (1998-03-01), pages S11 - S16, XP002475324, ISSN: 0947-8396 *
See also references of WO02093615A1 *

Also Published As

Publication number Publication date
US20030154773A1 (en) 2003-08-21
EP1376650A1 (de) 2004-01-02
WO2002093615A1 (en) 2002-11-21
US6875981B2 (en) 2005-04-05
JPWO2002093615A1 (ja) 2004-09-02
JP4111501B2 (ja) 2008-07-02

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