EP1354135B1 - Mini-palier de precision pour mini ou microsystemes et procede de montage de tels systemes - Google Patents

Mini-palier de precision pour mini ou microsystemes et procede de montage de tels systemes Download PDF

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Publication number
EP1354135B1
EP1354135B1 EP02701261A EP02701261A EP1354135B1 EP 1354135 B1 EP1354135 B1 EP 1354135B1 EP 02701261 A EP02701261 A EP 02701261A EP 02701261 A EP02701261 A EP 02701261A EP 1354135 B1 EP1354135 B1 EP 1354135B1
Authority
EP
European Patent Office
Prior art keywords
bearing
stator
microsystem
sleeve
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP02701261A
Other languages
German (de)
English (en)
Other versions
EP1354135A2 (fr
Inventor
Gerald Voegele
Thomas Weisener
Helmut Christmann
Armin Reichardt
Harald Helget
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HNP Mikrosysteme GmbH
Original Assignee
HNP Mikrosysteme GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10146793A external-priority patent/DE10146793A1/de
Application filed by HNP Mikrosysteme GmbH filed Critical HNP Mikrosysteme GmbH
Publication of EP1354135A2 publication Critical patent/EP1354135A2/fr
Application granted granted Critical
Publication of EP1354135B1 publication Critical patent/EP1354135B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B27/00—Hand tools, specially adapted for fitting together or separating parts or objects whether or not involving some deformation, not otherwise provided for
    • B25B27/02—Hand tools, specially adapted for fitting together or separating parts or objects whether or not involving some deformation, not otherwise provided for for connecting objects by press fit or detaching same
    • B25B27/06—Hand tools, specially adapted for fitting together or separating parts or objects whether or not involving some deformation, not otherwise provided for for connecting objects by press fit or detaching same inserting or withdrawing sleeves or bearing races
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C13/00—Adaptations of machines or pumps for special use, e.g. for extremely high pressures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/082—Details specially related to intermeshing engagement type machines or pumps
    • F04C2/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/10—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of internal-axis type with the outer member having more teeth or tooth-equivalents, e.g. rollers, than the inner member
    • F04C2/102—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of internal-axis type with the outer member having more teeth or tooth-equivalents, e.g. rollers, than the inner member the two members rotating simultaneously around their respective axes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F04C2230/603—Centering; Aligning
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49009—Dynamoelectric machine
    • Y10T29/49012—Rotor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49229—Prime mover or fluid pump making
    • Y10T29/49236—Fluid pump or compressor making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/494—Fluidic or fluid actuated device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49462—Gear making
    • Y10T29/49465—Gear mounting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49636—Process for making bearing or component thereof
    • Y10T29/49643—Rotary bearing
    • Y10T29/49647—Plain bearing
    • Y10T29/49648—Self-adjusting or self-aligning, including ball and socket type, bearing and component making
    • Y10T29/49657—Socket making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49636—Process for making bearing or component thereof
    • Y10T29/49696—Mounting

Definitions

  • the invention relates to a microsystem and a method for manufacturing, adjusting or adjusting a bearing in a miniature to microsystem.
  • Such a microsystem is described in WO-A 97/12147 (Fraunhofer) as, for example, a micropump or micromotor.
  • a micropump or micromotor To promote a fluid or to be driven by a fluid is the operation of the pump or the motor. Bearings exist there and must be designed appropriately or become.
  • the object of the invention is accordingly to propose a cost-effective solution in order to provide a microsystem of the type shown in FIG. 1, for example, with bearings which have the required highest accuracy as well as a long-term strength, in particular when operating with non-lubricating fluids.
  • microsystem according to claim 1 or a manufacturing method, fitting method or setting method according to claim 7 for producing at least one bearing point of said microsystem.
  • a "hard” bearing material be compared with those of a "soft” stator material.
  • the terms should be understood to mean that the hard bearing material is, for example, ceramic or cemented carbide to ensure long term strength and long term accuracy of the at least one bearing. Compared to these hard materials, the easier to be machined to be machined softer stator materials meant that are cheaper to obtain and can be easily processed manufacturing technology. They accommodate the essentially small bearing components, which provide accuracy and abrasion resistance to solve the problem (claim 1).
  • the stator has at least one section made of a material that is easier to machine with a cutting edge and that receives at least one bearing body made of the hard material.
  • the bearing body preferably a sleeve
  • the rotor is mounted either as a shaft or as an outer rotor or inner rotor.
  • An alternative variant for the production of the mechanically strong connection consists in the temporally proceeding curing of a filler material which is inserted into a gap which exists between the bearing component and the slightly larger inner dimension of the receiving portion of the stator (claim 5).
  • This gap can be in the range between 20 ⁇ m and 70 ⁇ m, in particular below 100 ⁇ m.
  • After curing there is a composite of materials that is mechanically stable, durable and durable.
  • the realization of the thus formed at least one bearing point is inexpensive.
  • a third variant lies in the combination of the two methods described above, when two axially spaced bearings are provided (claim 3). Then, for press-fitting in a mechanical pressing operation with direct mechanical fixed connection for holding the first bearing component, hardening of a filler material between the second bearing component and the stator can be used.
  • the first bearing is pressed mechanically displacing the soft material (claim 8).
  • the second bearing is first loosely inserted into the stator, supported by the already mechanically fixed bearing whose center is axially spaced.
  • a subsequent position positioning of the second bearing relative to the first bearing and thus also the absolute positioning of the second bearing relative to the stator follows and a hardening filler ensures after introduction between the second bearing and the stator for the temporally going to hardening and fixing (claim 9) ,
  • the adhesion action forms in a gap which is left between the second bearing and the stator, as described above.
  • the first bearing point which is mechanically positioned by displacement of a surface portion of the stator, that of a shaft, wherein the outer diameter of the bearing forming the sleeve has a smaller diameter than the sleeve which forms the subsequently defined second bearing point by curing a Filling material is accurately positioned (claim 4 or 11 or 12).
  • the displacement or filling with a hardening material is the area which is to be described as "non-conformity" (feature (a), claim 7).
  • the mismatch becomes a fit during the manufacturing process. Either the mismatch is achieved by a mechanical displacement of a part of the stator material (claim 5,6), or the mismatch becomes a mechanically strong connection by providing a hardening intermediate material which reaches the mechanically strong connection as filler material (claim 9).
  • the bearing body When pressing in, the bearing body is guided with high precision during the entire pressing process in order to ensure a positionally accurate recording in the stator.
  • the surface of the stator section which receives the bearing component is changed, in particular more than the surface, or a radial piece is displaced (claim 6).
  • the at least one bearing body which was a separate bearing body made of a different material before completion of the production, is machined by a mechanical fine machining of the inner surface, such as grinding, honing or lapping, that a suitable bearing surface for the shaft or the outer rotor arises.
  • a mechanical fine machining of the inner surface such as grinding, honing or lapping
  • Particularly rotationally symmetrical bearing body are suitable for grinding operations, such as centerless grinding, and comparatively inexpensive to produce the necessary precision.
  • the grinding also allows the machining of hard materials without restriction, whereby the choice of materials is not limited.
  • the mechanical connection is made with the stator, wherein the introduction of the bearing sleeves and their mutual alignment, in particular by gluing or pressing, done with a separate device, which Location and orientation of the one, preferably defined by two eccentric bearings (claim 2,14) and achieved the necessary tolerances with relatively little effort.
  • the adjustment carried out the sleeves can be made to each other, so that they initially move floating in the filled gap with curable material and align.
  • the layer is stabilized and secured during the progressive hardening of the solder or adhesive.
  • the manufacturing method advantageously restricts the variety of parts in a modular system with different rotor sizes of the gerotor pump, since with different gears - defined by an eccentricity and the toothing parameters - the same bearing body can be used.
  • stator When pressing is carried out with a slight interference fit, in which the manufacturing tolerance of a "not sufficiently precise", for example, machined (under chip formation) produced stator defines the excess of the fit. Since the tolerance of the position of the negative mold in the housing usually does not correspond to the predetermined position of the corresponding bearing body, the material is displaced during the pressing process (claim 8). This process is asymmetric in most cases and is made possible by the roughness or a defined low contact ratio of the surface of the negative mold. The roughness of the surface to be produced is adjusted so that tips of the surface carrying the bearing body to be pressed in can be displaced relatively easily. Alternatively, the surface is also made possible by a defined axial or radial structure (comparable to a wooden dowel). The radial offset to be compensated can amount to approximately 10 ⁇ m to 20 ⁇ m between the bearing body and the section of the stator receiving it.
  • the principle of storage can be transferred to other mechanical systems with defined bearings, such as external gear pumps, etc., so that not necessarily only eccentric axes with two bearing points are affected by the invention (claim 2).
  • the rough specification of the position of the bearing body is inexpensively by cutting processes (turning, milling or the like) or urformend (eg by injection molding), deforming or predetermined in other manufacturing processes.
  • the recesses (the negative forms) have only limited accuracy, so they can have greater tolerances than directly introduced bearings.
  • already here shares of manufacturing costs are saved to then achieve the precise and accurate position of the bearing body to each other by means of the mounting device, the highly accurate placed the hard bearing body in the comparatively soft stator and sets micrometer accurate against each other in position and orientation.
  • a separately essential mounting device which is also described below, has a decisive influence on all assembly operations. It defines the eccentric position of the two sleeve axes to each other by their mikrometerexakte geometry and stabilizes this position during the assembly process, either during pressing, or during the holding time during curing of the joining material.
  • the execution of a storage corresponds to a so-called. Flying (one-sided) storage.
  • the one-sided bearing is closer to the drive, as the remote part of the storage, which is occupied by the microsystem.
  • the number of bearings requiring accuracy is reduced.
  • the bearing body serves for the formation of the shaft bearing as an axial support for the outer rotor of the microsystem.
  • the inner diameter of the bearing body for the shaft is smaller than the inner diameter of the bearing body for the outer rotor of the microsystem.
  • the outer rotor (and also the inner rotor) are thus on the axial end face of the smallest inner diameter having bearing member. It forms between the two bearing components, a strip which has no constant width in the circumferential direction due to the eccentricity.
  • the eccentric sleeves abut one another along their entire circumference (on at least one inner surface) and are in particular attached to an axial end section, that is to say on an end face of the stator.
  • a coupling device is provided which creates a connection to a motor device in the sense of a drive.
  • the limited spatial dimension of the bearings also allows the use of highly specific and expensive materials for the bearings without unduly increasing the cost of the overall system.
  • a further adjustment possibility is provided in the axial direction when it can already be assumed that the first bearing point is a finished first support point (claims 11 to 13).
  • the front play refers to the rotor used later, which is rotatably mounted in the second bearing. With the front play friction and fluidic storage can be specified.
  • the inner opening of the stator, in which the at least one bearing point, preferably two axially spaced bearing points are used, has two sections, which each form an inwardly facing surface.
  • the inner receptacle thus has two functional sections, for receiving two functionally different bearing points with respective bearing body.
  • a Compensation function by pressing or gluing then acts in a very small range, with an eccentricity is gear-dependent, for example, 180 microns, in which example, an adhesive gap has a magnitude of not more than 70 microns and a pressure then has about 10 microns oversize.
  • the microsystem of Figure 1 in its original size shows the requirements for miniaturization and the need to manufacture bearings provided in this system with high precision and to ensure their durability and abrasion resistance.
  • FIGS. 1a and 2 shall be described together in order to obtain an insight into the microsystem illustrated in FIG.
  • a drive system A which is coupled to the microcomponent via a flange area.
  • a shaft of the motor is coupled via a coupling 23 to the shaft 40 of the microcomponent torsionally rigid or rotationally fixed.
  • the designated interior 32 is bounded by a sleeve 21 which extends axially longer than the coupling 23 has in length.
  • a first hat-shaped seal 24 is provided with a collar-shaped projecting thin flange portion, which seal 24 has an opening for the passage of the shaft 40.
  • the seal is seated in an axial interior 31, in which also a first bearing sleeve 10 is placed, which also has an inner opening, in which the shaft 40 is suitably mounted for its rotation.
  • a second, from the outer diameter ago larger sleeve 11 which has a larger inner opening for receiving the rotor or the rotors 2, 3 of the microsystem M, one of which rotatably placed on the shaft 40 via a pin 40a is.
  • both internally toothed rotors Upon rotation of the shaft, both internally toothed rotors also rotate, for which purpose the outer bearing of the outer toothed ring is provided on the second sleeve 11.
  • the second sleeve 11 has an axially much shorter extension, but a larger radial inner recess, while the first sleeve 10 has a suitable for the shaft small bore, but on an axially greater length.
  • microcomponent described is generally designated M, but consists of the two internally toothed rotors 2 and 3 shown in FIG. 1a.
  • a stator 30 which may be considered as a portion of the housing. He has a long-extending flange portion 30 b, which extends over the Distance sleeve 21 extends on the outside and the edge of the drive A for fixing engages, and a further upper portion 30a, in which the storage of the Mikrosytems M and the shaft 40 takes place.
  • the stator 30 is bolted directly to the engine. Electric small motors have a uniform thread or connection holes, which are usually attached to the engine transmission otherwise.
  • the inner opening of the second sleeve 11 for receiving the microsystem M is arranged in the stator at its end face.
  • the sleeve can be mounted flush with the end face of the stator 30.
  • a small projection can be provided to achieve a better sealing effect on the rotors when the overlying portion 29 29 ', which contains the fluid guide to the terminals F, with a greater pressure via a screw 28 to the stator 30 with intermediate Sealing ring 25 and a kidney plate 25 a is pressed.
  • a left-hand thread is preferably provided between the screw flange 28 and the stator 30, which is arranged on the outside. The screwing is done with a special claw key, which engages in a lateral bore.
  • the section 29 29 ' contains the fluidic control contours (inlet opening and outlet opening) and is aligned with its lower portion 29' via a cylindrical pin 22 for engagement in a fitting opening 22a in the stator 30 and possibly a collar on the stator 30 exactly (radially and circumferentially) ,
  • the described flush bearing of the lower portion 29 'of the fluid guide portion 29, 29' with its drive-oriented surface on the rotors of the fluid system M is improved when a balancing ring 27 is provided between the clamping assembly 28 and the fluid guide portion 29 annular.
  • This compensating ring 27 is made of a soft material, such as aluminum, copper or plastic and ensures that the portion 29 'is flush and flush with the likewise provided with an O-shaped seal 25 or an additional disc 25a with fluid-carrying kidney stator, in particular also on the outwardly facing end faces of the rotors in order to achieve a better sealing effect here. Due to the higher surface pressure (the richer concern) of the fluid guide portion 29 'against the second sleeve 11, the better sealing effect is achieved, which is favored by the soft balance ring 27.
  • the fluid guide section F with the likewise to be regarded as a stator components 28,29,29 '.
  • the drive area A adjoins this area.
  • stator 30 is constructed so that the storage is placed flush with the facing away from the drive A end face, so that a placement of the fluid guide portion 29,29 'immediately adjacent to the fluidic microcomponent and with a proposed fluid guide structure of kidneys and Holes a passage and the functional operation of the micro-component M ensures.
  • Figure 3 is a section through the axis of the system of Figure 2 showing two staggered axes 100 and 101.
  • the axle offset is denoted by dr.
  • the axis 100 is that axis of the first sleeve 10 which has a length L10.
  • the sleeve is made of a hard material, such as carbide or ceramic. It is initially not inserted into the stator 30, which has an elongated opening 31 for its receptacle, the lower portion has an inner surface 30i. This inner surface can be seen schematically in FIG. 3a (in the lower field). It has a large roughness, which can arise during a cutting process. It does not have to have any particular accuracy and can even be made larger, as can be seen from FIG.
  • another, axially above receiving portion in the stator 30 is provided as part of the opening 31, for receiving the second sleeve 11, which may also be made of a hard material such as ceramic or hard metal. She too is not used at first.
  • the Bearing sleeves are designed primarily as a hollow cylinder and have a respective interior, for receiving the respective "rotor".
  • the first sleeve 10 has an inner space with an inner surface 10i for receiving the shaft 40.
  • the inner space is designated W and has a longitudinal extent corresponding to the sleeve length L10.
  • the axially adjoining second sleeve 11 is provided for receiving and supporting the outer rotor 2. It has for this purpose a rotor mount R whose diameter d11i is greater than the diameter d10i of the shaft space W.
  • the inner surface 11i is designed so that a bearing of the rotor is possible.
  • the inner surface 10i of the first sleeve part 10 is also designed so that a bearing of the shaft 40 is possible
  • Both surfaces are highly accurate and designed for their respective bearing function by grinding, eroding, honing or lapping.
  • both placeholders 52, 53 are spatially fixed relative to a support plate 51.
  • the placeholder 52 for the outer rotor takes on the second sleeve 11, wherein the placeholder fills the rotor geometry of the rotor space R.
  • the second placeholder 53 for the shaft 40 is axially longer. He takes over the filling of the shaft space W and places the first sleeve 10 spatially geometrically so that the two spaced axes 100,101 is obtained for the eccentric mounting of the existing of two rotors microsystem M.
  • An unillustrated pin on the support plate 51 allows its absolute location fixation relative to the stator 30, for engagement in the recess 22a.
  • the inserter 50 After the sleeves 10,11 are placed on the inserter 50 and its two radially displaced placeholders 52,53 "dr", the inserter with a mechanical arrangement (not shown) is geometrically and massively precise, even highly precise the intended opening 31 of the stator 30 is inserted axially.
  • the thrust path s or thrust direction s produced in this case is shown in FIGS. 5 and 3a. Due to the dimensioning and the Surface structure of the two sleeves 10,11 and the inner surfaces 30i 'and 30i of the stator, a change takes place at least the inner surfaces of the stator 30, which can be seen from Figure 3a before insertion and after insertion of the sleeve part 10.
  • the rough surface of the non-high-precision manufactured inner surfaces is leveled or even removed or displaced, wherein the soft material is changed on the surface, but at the same time applies mechanical forces for the spatial geometric fixation of the indented sleeves 10,11, which serve as bearing pieces.
  • the inner surfaces 11i, 10i of the two sleeves are high-precision, by insertion then also geometrically determined to meet their bearing function.
  • the outer surfaces 10a and 11a of the two sleeves make a mechanical connection with the inner surfaces 30i 'and 30i of the stator when the inserter 50 is pushed axially by pressure.
  • the insertion device then assumes the assignment of the eccentrically offset axes 100,101 of the two sleeves and placed them so long in the interior 31 with the two eccentric portions 30i, 30i 'of the stator 30 until an introduced hardening substance 12 fills the gap 13 fixing and the sleeves mechanically determined.
  • a hardening substance a solder or an adhesive can be used; the first hardens by lowering the temperature, the second by a chemical reaction.
  • the second sleeve 11 is axially shorter and has an axial length L11.
  • the entire stator length is L.
  • the sum of the two sleeve lengths L11 and L10 is still shorter than the stator length.
  • dL represents an axial offset, but with the end faces of the two sleeves 10,11 abut each other. This system of the two end faces will be explained with reference to FIG.
  • Figure 7 illustrates a top view in the axial direction 100,101 from above (seen from Figure 3 or Figure 6), the interiors R and W for the outer rotor and shaft are still open, so no wave 40 and no rotor 2 or 3 of the microsystem M used is.
  • an end-face bearing surface 10b can be seen, which is also shown in FIG. 3 and in FIG. It has a width b, which is not constant circumferentially, which is due to the offset dr or ⁇ r of the two axes 100,101, and also by the choice of the two diameters of the sleeves, here the outer diameter d10a of the longer sleeve 10 and the inner diameter d11i the shorter Sleeve 11.
  • the diameter or the associated radii as respective half-diameter, as well as the radial offset (eccentricity) are chosen so that one of the hard bearing components 10,11 forms a lying outside the surface 10b annular axial support surface 10c, which also circumferentially entirely is continuous and on the other hard bearing component 11 rests.
  • the outer diameter d10a of the sleeve 10 is greater than the inner diameter d11i of the sleeve 11, that at no circumferential point of the soft material of the stator 30 as part of the support surface 10b for the rotor 2 of Figure 1a and possibly also the inner rotor 3 of Figure 1a - viewed in the axial direction - comes to light or carrying.
  • the rotor or rotors are then axially securely supported, inserted axially into the rotor space R, and have a good seal on the surface 10b, while the ring portion 10c, which supports the sleeves 10 and 11 to each other and aligns orthogonally, no longer visible from the outside.
  • the inner surfaces 11i and 10i form bearing surfaces for the shaft 40 and the outer rotor of the fluidic microcomponent M to serve as sliding bearings.
  • the annular surfaces 10c and 10b together form the axially facing end face of the entire bearing component 10, which is provided for the shaft.
  • the inner portion 10b is for supporting and aligning the microsystem, and the outer portion 10c lying around it on the same plane serves to align and support the second bearing member 11.
  • the plan view in FIG. 7 also illustrates the gap 13 from FIG. 6, which is already filled with an adhesive or a solder 12, around the gap Sleeve 11 set against the softer material of the stator 30.
  • the sleeve 11 has been aligned with the outer annular surface 10c of the lower sleeve 10 by abutment, so that its axis 101 is aligned exactly parallel to the axis 100.
  • the exact alignment results from a highly accurate production of the end faces, which run exactly perpendicular to the axes and thus can indirectly influence the positioning and positional accuracy.
  • the sleeve 10 was made to have an outer diameter of 5mm and an inner diameter of 1.2mm.
  • the outer rotor 2 had an outer dimension of 3.8 mm and is thus - even taking into account the selected eccentricity of the two axes 100,101 within the outer dimension of 5.0 mm of him axially for providing a pivot bearing supporting sleeve 10. From this measure is also the inner dimension d11i see the second sleeve 11, according to the external dimension of the rotor to support him radially with a ring bearing in this respect. Both perpendicular to each other bearing, the inner wall surface 11i and the axially facing support surface of the sleeve 10 ensure accurate alignment and precise storage of the rotor component. 2
  • FIG. 5 shows a perspective view when inserting the two bearing sleeves 10, 11, used in the case of an assembly and adjustment of the sleeves provided with an adhesive substance.
  • the adhesive substance 12 is introduced into the gap 13, which is between 20 ⁇ m and 70 ⁇ m, based on the respective inner diameter of the stator 30 on the surfaces 30i and 30i '.
  • the interior 31 for receiving the first sleeve 10 is longer than the bearing sleeve 10.
  • the corresponding difference is - as shown in Figure 2 - from the radial shaft seal 24, which is set against the motor A through the spacer sleeve 21, taken.
  • a Einsetzweg s of the two bearing sleeves 10,11, supported by the insertion device 50 of Figure 4 leads to the exact placement.
  • the spatial geometric assignment and absolute placement of the sleeves 10,11 at least for a duration of curing the adhesive substance or the solder until the mechanical solidification occurs.
  • the receptacle 22a in which the positioning pin 22 of Figure 2 when placing the fluid guide portion 28,29,29 'engages.
  • the bore 22b has a minimum depth L10 + L11.
  • the stepped bore 22b which can also be seen in FIG.
  • the spatially geometrically highly accurate storage takes place only on one side, with respect to the shaft W but also a second bearing may be provided in the fluid guide member 29, but need not have such precision as the first storage in the sleeve 10, the also effective on an axially longer length L10.
  • the bearing parts can be made rotationally symmetrical simple as sleeves. You may also have a different outer diameter in the geometry, only its inner diameter and its inner surface must be aligned so that the rotors 40,2 (shafts and outer rotor of the microsystem) can be geometrically accurate and resistant to abrasion.
  • the combined type of insertion can also take place in succession.
  • the first receptacle with the inner surface 30i in the first section of the opening 31 of the stator can be connected to a mechanical press-in operation, in which the sleeve 10 is positioned exactly in position, as shown in FIG. 3a.
  • the second bearing point (here with the sleeve 11) can be positioned in the section L11 with the arrangement according to FIG. 4, wherein a gap 13 shown in FIG Circumference between the outer surface 11a and the inner surface 30i 'filled with an adhesive substance 12.
  • the second sleeve With a tight fit of the first sleeve 10, the second sleeve can be positioned and glued relative thereto and thus also relative to the stator. As an alternative to gluing, a pressing process can also take place during the second process, which corresponds to the variant described above, only in succession.
  • the device according to FIG. 4 can be used for all these variants.
  • the first sleeve 10 is pressed into the stator 30, wherein the two opening portions 30i, 30i 'are provided as two eccentrically arranged portions of the overall recess 31.
  • the second bearing 11 is then formed, in which the highly accurately manufactured bearing sleeve is inserted into the housing, wherein it rests flat on the first sleeve, on the end face portion 10c.
  • the position of the second sleeve relative to the first sleeve is defined, for which purpose the device according to FIG. 4 can be used.
  • an adhesive 12 is allowed to enter the gap 13 on the outer surface 11a of the second sleeve and hardened to define this bearing point, that is to be firmly connected to the stator 30.
  • the two sleeves 10 and 11 can also be reversed in the order of attachment. First, the larger diameter sleeve 11, then - axially supported on the support surface portion 10c - the longer sleeve 10 for the shaft 40. The second sleeve 10 is then inserted from the clutch chamber 32 ago in the lower receiving portion of the recess 31.
  • the mechanically accurate positioning in terms of spatial geometric definition relates to two significant dimensions. Once the amount of the eccentricity vector "dr" as a radial offset.
  • This pin is not shown in Figure 4, but it opens up from the context and the spatial / geometric arrangement of the receptacle 22a of Figure 2, in which the final assembly accepting pin 22 is located. It takes over the peripheral determination of the fluid guide portion 28,29,29 'relative to the housing 30, which is referred to as a stator.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Sliding-Contact Bearings (AREA)
  • Manufacture Of Motors, Generators (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Paper (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)

Claims (14)

  1. Microsystème affecté à un débit de fluide, lequel microsystème comprend un premier tronçon d'admission ou de sortie de fluide (F), et un second tronçon doté d'au moins une zone de portée (10, 11),
    dans lequel
    un rotor (40, 2) est monté à rotation vis-à-vis d'un stator (30) par l'intermédiaire d'au moins un ou deux corps de portée (10, 11), lesquels corps de portée sont préfabriqués en un matériau dur ; caractérisé par le fait que
    le stator (30), constitué d'un matériau plus tendre par rapport à l'un des corps de portée, ou aux deux, comporte un ou deux tronçon(s) superficiel(s) intérieur(s) (30i, 30i') recevant le ou les corps de portée (10, 11).
  2. Microsystème selon la revendication 1, dans lequel les deux corps de portée occupent, dans le stator, des positions offrant, dans le sens radial, un décalage mutuel tel que les axes médians (100, 101) desdits corps de portée (10, 11) présentent un espacement radial mutuel (dr).
  3. Microsystème selon la revendication 1, comprenant deux zones de portée décalées axialement (dL), mais étroitement voisines, matérialisant des corps de portée distincts (10, 11) dans le stator (30).
  4. Microsystème selon la revendication 1, dans lequel le stator (30) comporte, en tant que tronçon intérieur, un logement (30i', 30i) ne s'adaptant pas, dans un premier temps, au corps de portée (10, 11) prévu au minimum.
  5. Microsystème selon la revendication 4, dans lequel le tronçon intérieur tout d'abord inadapté, et le corps de portée (10, 11) prévu au minimum, forment un interstice d'une épaisseur supérieure à zéro lors d'une insertion dudit corps de portée dans ledit tronçon inadapté ; et un matériau durcissable de comblement est déposé dans l'interstice (13) en vue d'une consignation à demeure du corps de portée, vis-à-vis du stator, après un durcissement complet dudit matériau de comblement (12) revêtant, en particulier, la forme d'une brasure ou d'une substance adhésive.
  6. Microsystème selon la revendication 4, dans lequel le tronçon intérieur tout d'abord inadapté constitue un sous-dimensionnement du logement (30i', 30i) du stator
    dans lequel un corps de portée (10, 11), d'un plus grand dimensionnement radial que ledit logement, est enchâssé mécaniquement, sachant que le corps de portée, dont le matériau est plus dur, refoule une partie du tronçon récepteur du stator (30) ou provoque, pour le moins, une modification de sa structure en surface.
  7. Procédé de production, d'adaptation et/ou de réglage d'au moins une zone de portée dans une structure de type minisystème à microsystème (M) parcourue par un fluide, lequel système comprend un stator (30) et au moins un rotor (40, 2), ledit rotor étant monté à rotation vis-à-vis dudit stator dans la zone de portée (L10, L11) prévue au minimum,
    caractérisé par le fait
    que, préalablement à l'insertion d'au moins un corps de portée distinct, le stator présente un tronçon (30i, 30i') inapproprié au montage et consistant en un matériau plus tendre par rapport au corps de portée (10, 11);
    et que ledit tronçon inapproprié est transformé en un montage mécanique et en une zone d'ajustement par insertion, notamment par enfoncement ou par intégration collée du corps de portée en un matériau plus dur par rapport au matériau du stator, de telle sorte que la surface intérieure (11i, 10i) définie par ledit corps de portée soit fermement établie, avec une haute précision spatiale-géométrique, en tant que surface de portée affectée au montage rotatif du rotor (40, 2).
  8. Procédé selon la revendication 7, dans lequel l'enfoncement a lieu avec refoulement, pour le moins avec déformation d'une surface intérieure (30i) du tronçon inapproprié.
  9. Procédé selon la revendication 7 ou 8, dans lequel un matériau durcissable (12) est intégré dans un interstice ou, dans l'enchaînement direct du refoulement mécanique, dans des espaces interstitiels subsistants, de manière à obtenir une consignation à demeure mécanique et un positionnement spatial/géométrique du corps de portée, en tant que zone de portée, après le durcissement complet du matériau de comblement (12).
  10. Procédé selon l'une des revendications 7 à 9, dans lequel la pièce structurelle de portée (10, 11) présente un diamètre extérieur inférieur à 15 mm, notamment inférieur à 10 mm, et/ou un diamètre intérieur inférieur à 5 mm, notamment inférieur à 2 mm, en vue du montage du rotor extérieur (2), en particulier d'un arbre (40).
  11. Procédé selon la revendication 7, dans lequel deux zones de portée (L10, L11) sont fermement établies avec succession dans le temps, l'une par enchâssement (10a, 10i), et une autre par brasage, intégration collée (11a, 11i) ou enchâssement.
  12. Procédé selon la revendication 11, dans lequel s'opère tout d'abord un enchâssement, puis une intégration collée.
  13. Procédé selon la revendication 11 ou 12, dans lequel la première zone de portée enchâssée est utilisée en tant que zone de portée auxiliaire fermement établie vis-à-vis du stator (30), afin d'assurer un positionnement spatial/géométrique de la seconde zone de portée (L11) avant qu'elle soit fermement établie par le matériau durcissable (12).
  14. Procédé selon la revendication 11 ou 13, dans lequel le positionnement de la seconde zone de portée (11 ; 11a, 11i) a lieu dans la (les) direction(s) axiale (10b) et/ou radiale (10i, 11i), avec soutien conféré à partir de la première zone de portée (10).
EP02701261A 2001-01-22 2002-01-21 Mini-palier de precision pour mini ou microsystemes et procede de montage de tels systemes Expired - Lifetime EP1354135B1 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE10102717 2001-01-22
DE10102717 2001-01-22
DE10146793A DE10146793A1 (de) 2001-01-22 2001-09-22 Präzise Kleinstlagerung bei Mini- bis Mikrosystemen und Montageverfahren für solche Systeme
DE10146793 2001-09-22
PCT/EP2002/000549 WO2002057631A2 (fr) 2001-01-22 2002-01-21 Mini-palier de precision pour mini ou microsystemes et procede de montage de tels systemes

Publications (2)

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EP1354135A2 EP1354135A2 (fr) 2003-10-22
EP1354135B1 true EP1354135B1 (fr) 2006-12-20

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US (1) US7698818B2 (fr)
EP (1) EP1354135B1 (fr)
AT (1) ATE348956T1 (fr)
DE (1) DE50209005D1 (fr)
WO (1) WO2002057631A2 (fr)

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US9156674B2 (en) * 2006-06-02 2015-10-13 MicroZeus, LLC Micro transport machine and methods for using same
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Also Published As

Publication number Publication date
DE50209005D1 (de) 2007-02-01
WO2002057631A2 (fr) 2002-07-25
US7698818B2 (en) 2010-04-20
EP1354135A2 (fr) 2003-10-22
ATE348956T1 (de) 2007-01-15
WO2002057631A3 (fr) 2002-12-12
US20050081366A1 (en) 2005-04-21

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