EP1334510B1 - Lampe a decharge a barriere dielectrique - Google Patents

Lampe a decharge a barriere dielectrique Download PDF

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Publication number
EP1334510B1
EP1334510B1 EP01982134A EP01982134A EP1334510B1 EP 1334510 B1 EP1334510 B1 EP 1334510B1 EP 01982134 A EP01982134 A EP 01982134A EP 01982134 A EP01982134 A EP 01982134A EP 1334510 B1 EP1334510 B1 EP 1334510B1
Authority
EP
European Patent Office
Prior art keywords
contact
discharge lamp
cap
strip
lamp according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01982134A
Other languages
German (de)
English (en)
Other versions
EP1334510A1 (fr
Inventor
Rainer Kling
Reinhold Wittkötter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osram GmbH
Original Assignee
Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH filed Critical Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH
Publication of EP1334510A1 publication Critical patent/EP1334510A1/fr
Application granted granted Critical
Publication of EP1334510B1 publication Critical patent/EP1334510B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base

Definitions

  • the invention is based on a dielectric barrier discharge lamp.
  • dielectric barrier discharge lamp includes sources of electromagnetic radiation based on dielectrically impeded gas discharges.
  • the spectrum of the radiation may include both the visible range and the UV (ultraviolet) / VUV (vacuum ultraviolet) range and the IR (infrared) range.
  • UV ultraviolet
  • VUV vacuum ultraviolet
  • IR infrared
  • a dielectric barrier discharge lamp necessarily requires at least one so-called dielectrically impeded electrode.
  • a dielectrically impeded electrode is separated from the interior of the discharge vessel by means of a dielectric.
  • This dielectric can be embodied, for example, as a dielectric layer covering the electrode, or it is formed by the discharge vessel of the lamp itself, namely when the electrode is arranged on the outer wall of the discharge vessel. The latter is abbreviated hereafter as "outer electrode”.
  • the present invention relates to a dielectric barrier discharge lamp with an elongated or tubular discharge vessel closed on both sides, which encloses an ionizable filling.
  • the ionizable filling usually consists of a noble gas, for example xenon or a gas mixture.
  • a noble gas for example xenon or a gas mixture.
  • excimers are formed.
  • Excimers are excited molecules, such as Xe 2 *, which emit electromagnetic radiation when they return to the normally unbound ground state. In the case of Xe 2 *, the maximum of the molecular beam radiation is about 172 nm.
  • the lamp has at least one outer electrode of the aforementioned type, wherein the or each outer electrode is substantially strip-shaped.
  • a corresponding contact spring is provided for each strip-shaped outer electrode of the dielectric barrier discharge lamp. These contact springs are arranged in the interior of the base.
  • the pedestal also includes a pedestal sleeve which encloses one end of the discharge vessel such that the or each strip-shaped outer electrode is in electrically conductive contact with the or a corresponding contact spring.
  • strip-shaped outer electrode is to be understood in general to mean that a strip-shaped outer electrode does not necessarily have to be straight, but for example can also be curved or have a substructure.
  • the strip-shaped outer electrode may also be degenerate into a "line electrode” in the sense that the width of the electrode is very small compared to the length. It is only essential in the sense of the contacting according to the invention that at least the regions of the outer electrodes that are in contact with the contact springs are each designed as at least strip-like contact surfaces.
  • the discharge vessel end can be supplemented by means of an additional fastening means, e.g. Putty or glue, to be connected to the base sleeve to increase the mechanical stability ..
  • an additional fastening means e.g. Putty or glue
  • WO-A-98/11596 discloses - first electrically connect the ends of all outer electrodes of a polarity with each other, for example by means of a ring or strip-shaped band (there with the figure designation 52e), which surrounds the entire circumference of the discharge vessel at one end of the strip-shaped outer electrodes.
  • This common conductor is connected in the prior art with the associated base contact.
  • the dielectrically impeded discharge within the discharge vessel is affected and consequently the efficiency of the lamp is reduced.
  • the transverse extent of the individual contact springs is at least in the region of the contact input less than or equal to the width of the corresponding strip-shaped outer electrode.
  • the contact springs are designed as narrow leaf springs.
  • the aforementioned transverse extent here corresponds to the respective width of the leaf springs.
  • the contact springs are usually made of CuBe 2 .
  • the contact springs are usually made of CuBe 2 .
  • the base sleeve consists of an electrically conductive material, for example metal.
  • the contact springs are electrically connected to the base sleeve.
  • the base sleeve in addition to a mounting function still has the function of a socket contact with a first polarity.
  • all external electrodes of a first polarity can be connected by means of the contact springs via the electrically conductive base sleeve to a first pole of an electrical supply device.
  • the electrodes of the second polarity may in principle also be formed as external electrodes or else as internal electrodes, i. be arranged within the discharge vessel.
  • a preferred embodiment has, for example, a helical inner electrode, which is arranged axially oriented within the discharge vessel, as in the already cited WO-A-98/11596 disclosed.
  • the inner electrode is connected to a base contact with a second polarity.
  • This base contact may be formed in the simplest case as a pin.
  • the base sleeve can be further developed accordingly, for example as a flange, screw or bayonet base. In the specific case, the circumstances in the device or version, in which the discharge lamp is to be installed, decide here.
  • the discharge lamp can also be socketed on both sides, ie that the discharge vessel is provided at its two opposite ends, each with a base. Both bases can be plated through be, ie be equipped for an electrical connection function.
  • the contacting of the external electrodes may also be divided into both pedestals, for example by electrically contacting a first half of the external electrodes by means of one pedestal and the second half by means of the other pedestal.
  • FIGS. 1a and 1b show a schematic representation of a dielectric barrier discharge lamp according to the invention with a partially cut base or a sectional view along the line AA.
  • This lamp serves as UV (ultraviolet) / VUV (vacuum ultraviolet) emitters for ozone generation as well as irradiation, for example in photolithography, UV curing of wafers, photolysis or the like.
  • the lamp consists of a tubular discharge vessel 1 with electrodes and a base 2 with base contacts.
  • a helical electrode 3 (only in FIG. 1b recognizable) of metal wire arranged axially.
  • the inner electrode 3 is electrically conductively connected by means of a gas-tight current feedthrough (not shown) known per se to a contact pin 4 integrated in the socket 2. In this way, the contact pin 4 acts as a base contact for the inner electrode.
  • the base 2 has a base sleeve 6 made of aluminum, which is so far pushed over the current carrying the inner electrode 3 having the first end of the discharge vessel 1, that about 5 mm of the associated end of the outer electrodes 5a-5f are covered.
  • a base sleeve 6 made of aluminum, which is so far pushed over the current carrying the inner electrode 3 having the first end of the discharge vessel 1, that about 5 mm of the associated end of the outer electrodes 5a-5f are covered.
  • six contact springs 7a, 7d (the contact springs 7b, 7c, 7e and 7f are not visible) are fastened to the inner wall of the base sleeve 6.
  • the connection between the contact springs 7a, 7d and the base sleeve 6 is designed to be electrically conductive.
  • the contact springs 7a, 7d are arranged so as to be in spring contact with the corresponding outer electrodes 5a to 5f.
  • all contact springs 7a (7a to 7f in the contact springs in the 1a not visible) designed as leaf springs, which are bent against the mounting direction of the base to a kind of resilient loop.
  • the base sleeve 6 acts as a base contact for the outer electrode 3.
  • the base sleeve 6 is provided for electrical connection to ground potential.
  • the base pin 4 which is not accessible in the mounted state, is provided for connection to high-voltage potential.
  • the base pin 4 is sufficiently electrically insulated from the base sleeve 6 in a manner known per se, for example by the base pin 4 being embedded in a base stone made of insulating material (not shown).
  • the width of the strip-shaped outer electrodes 5a to 5f is in each case about 1 mm, that of the contact springs 7a is in each case 1 mm. In this way, an efficient operation of the discharge lamp is ensured.
  • the base sleeve 6 is further developed at its end remote from the discharge vessel 1 as a flange 8.
  • the flange 8 allows secure mounting on a support (not shown), which takes over both the electrical connection between the base 8 and the leads of an electrical supply source and the mechanical support of the lamp. Flange connections are common in many areas of vacuum technology. Therefore, this embodiment is particularly suitable for installation in evacuatable UV irradiation reactors.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)

Claims (10)

  1. Lampe à décharge rendue incomplète par voie diélectrique comprenant
    • une enceinte (1) de décharge oblongue fermée des deux côtés et renfermant un remplissage ionisable,
    • une ou plusieurs électrodes (5a-5f) extérieures en forme de bande, qui est ou sont disposées sur la paroi extérieure de l'enceinte de décharge,
    • un culot (2) ayant une douille (6) de culot,
    • un ou plusieurs ressorts (7a-7f) de contact qui est ou sont disposés à l'intérieur du culot (2), le nombre des ressorts (7a-7f) de contact étant égal au nombre des électrodes (5a-5f) extérieure en forme de bande,
    • et dans laquelle la douille (6) de culot entoure une extrémité de l'enceinte (1) de décharge de façon à ce que la ou chaque électrode (5a-5f) extérieure en forme de bande soit en contact conducteur de l'électricité avec le ou un ressort (7a-7f) de contact correspondant.
  2. Lampe à décharge suivant la revendication 1, dans laquelle le ou chaque ressort (7a-7f) de contact est constitué sous la forme d'un ressort à lame.
  3. Lampe à décharge suivant la revendication 2, dans laquelle le ou chaque ressort à lame est courbé en une boucle (7a) élastique pour faciliter l'emmanchement du culot (2) et assurer un contact sûr.
  4. Lampe à décharge suivant la revendication 1, 2 ou 3, dans laquelle l'étendue transversale du ou de chaque ressort (7a-7f) de contact est, au moins dans la partie de la mise en contact, inférieure ou égale à la largeur de l'électrode (5a-5f) extérieure en forme de bande correspondante.
  5. Lampe à décharge suivant l'une des revendications précédentes, dans laquelle la douille (6) de culot est en un matériau conducteur de l'électricité et les ressorts (7a-7f) de contact sont reliés de manière conductrice de l'électricité à la douille (6) de culot de sorte que la douille (6) de culot agit en tant que contact de culot ayant une première polarité.
  6. Lampe à décharge suivant la revendication 5, dans laquelle la douille (6) de culot est conformée en bride.
  7. Lampe à décharge suivant l'une des revendications précédentes dans laquelle au moins une électrode (3) intérieure est disposée à l'intérieur de l'enceinte (1) de décharge.
  8. Lampe à décharge suivant la revendication 7, dans laquelle l'électrode (3) intérieure est hélicoïdale et est orientée axialement.
  9. Lampe à décharge suivant les revendications 7 ou 8, dans laquelle l'électrode (3) intérieure est reliée à un contact (4) de culot d'une deuxième polarité.
  10. Lampe à décharge suivant l'une des revendications précédentes dans laquelle l'enceinte de décharge a un culot des deux côtés.
EP01982134A 2000-09-27 2001-09-24 Lampe a decharge a barriere dielectrique Expired - Lifetime EP1334510B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10048986A DE10048986A1 (de) 2000-09-27 2000-09-27 Dielektrische Barrieren-Entladungslampe
DE10048986 2000-09-27
PCT/DE2001/003679 WO2002027762A1 (fr) 2000-09-27 2001-09-24 Lampe a decharge a barriere dielectrique

Publications (2)

Publication Number Publication Date
EP1334510A1 EP1334510A1 (fr) 2003-08-13
EP1334510B1 true EP1334510B1 (fr) 2009-01-07

Family

ID=7658560

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01982134A Expired - Lifetime EP1334510B1 (fr) 2000-09-27 2001-09-24 Lampe a decharge a barriere dielectrique

Country Status (9)

Country Link
US (1) US6847157B2 (fr)
EP (1) EP1334510B1 (fr)
JP (1) JP4610850B2 (fr)
KR (1) KR100834186B1 (fr)
AT (1) ATE420456T1 (fr)
CA (1) CA2392373C (fr)
DE (2) DE10048986A1 (fr)
TW (1) TW507248B (fr)
WO (1) WO2002027762A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10222100A1 (de) * 2002-05-17 2003-11-27 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Dielektrische Barriere-Entladungslampe mit Sockel
TWI288945B (en) * 2003-03-12 2007-10-21 Harison Toshiba Lighting Corp Dielectric barrier discharge lamp tube and UV illumination device
US7863816B2 (en) 2003-10-23 2011-01-04 General Electric Company Dielectric barrier discharge lamp
DE102004038346A1 (de) * 2004-08-06 2006-03-16 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Lötfreie Kontaktierung dielektrisch behinderter Entladungslampen
DE102004047373A1 (de) * 2004-09-29 2006-04-06 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Beleuchtungssystem mit dielektrisch behinderter Entladungslampe und zugehörigem Vorschaltgerät
DE102004047375A1 (de) * 2004-09-29 2006-04-06 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Dielektrische behinderte Entladungslampe mit Manschette
DE102004047374A1 (de) * 2004-09-29 2006-04-06 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Dielektrisch behinderte Entladungslampe mit elektrischer Abschirmung
DE102004047376A1 (de) * 2004-09-29 2006-04-06 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Dielektrisch behinderte Entladungslampe mit steckbaren Elektroden
DE202007004236U1 (de) * 2007-03-22 2007-06-14 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Dielektrische Barriere-Entladungslampe mit Zündhilfe
WO2010066298A1 (fr) * 2008-12-11 2010-06-17 Osram Gesellschaft mit beschränkter Haftung Éclairage uv avec une pluralité de lampes uv, notamment pour traitement technique de produits
TWI569301B (zh) 2010-06-04 2017-02-01 通路實業集團國際公司 感應耦合介電質屏障放電燈

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE433916C (de) * 1926-01-23 1926-09-10 Wilhelm Schlimgen Laufrad fuer Transportfahrzeuge
US4342940A (en) * 1980-02-04 1982-08-03 Xerox Corporation Triggering device for a flash lamp
DE3412461A1 (de) * 1984-04-03 1985-10-10 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH, 8000 München Fassung fuer eine einseitig gesockelte hochdruckentladungslampe
JPH025291U (fr) * 1988-06-22 1990-01-12
DE3934348A1 (de) * 1989-10-14 1991-04-25 Heraeus Instr Gmbh Elektrische entladungslampe
JPH0711949B2 (ja) 1989-12-20 1995-02-08 東芝ライテック株式会社 けい光ランプおよびこれを用いたランプ装置
JPH0414784A (ja) * 1990-05-08 1992-01-20 Masao Iwanaga 放電素子、その製造方法および応用装置
US5272414A (en) * 1990-05-08 1993-12-21 I.T.M. Corporation Discharge element, method of producing the same and apparatus comprising the same
JP2775699B2 (ja) * 1994-09-20 1998-07-16 ウシオ電機株式会社 誘電体バリア放電ランプ
DE19636965B4 (de) * 1996-09-11 2004-07-01 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Elektrische Strahlungsquelle und Bestrahlungssystem mit dieser Strahlungsquelle
EP0927080A1 (fr) * 1996-09-18 1999-07-07 Kenneth Bibby Procede et appareil servant a poser un motif granulaire
DE19718395C1 (de) * 1997-04-30 1998-10-29 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Leuchtstofflampe und Verfahren zu ihrem Betrieb
JP3439679B2 (ja) * 1999-02-01 2003-08-25 株式会社オーク製作所 高輝度光照射装置

Also Published As

Publication number Publication date
DE10048986A1 (de) 2002-04-11
JP2004510310A (ja) 2004-04-02
DE50114646D1 (de) 2009-02-26
JP4610850B2 (ja) 2011-01-12
KR20020053878A (ko) 2002-07-05
US20020163312A1 (en) 2002-11-07
CA2392373A1 (fr) 2002-04-04
EP1334510A1 (fr) 2003-08-13
CA2392373C (fr) 2010-11-09
ATE420456T1 (de) 2009-01-15
US6847157B2 (en) 2005-01-25
KR100834186B1 (ko) 2008-05-30
WO2002027762A1 (fr) 2002-04-04
TW507248B (en) 2002-10-21

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