EP1506567B1 - Lampe a decharge a barriere dielectrique comprenant un socle - Google Patents

Lampe a decharge a barriere dielectrique comprenant un socle Download PDF

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Publication number
EP1506567B1
EP1506567B1 EP03752699A EP03752699A EP1506567B1 EP 1506567 B1 EP1506567 B1 EP 1506567B1 EP 03752699 A EP03752699 A EP 03752699A EP 03752699 A EP03752699 A EP 03752699A EP 1506567 B1 EP1506567 B1 EP 1506567B1
Authority
EP
European Patent Office
Prior art keywords
dielectric barrier
discharge lamp
barrier discharge
lamp
base according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
EP03752699A
Other languages
German (de)
English (en)
Other versions
EP1506567A2 (fr
Inventor
Rainer Kling
Reinhold Wittkötter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osram GmbH
Original Assignee
Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH filed Critical Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH
Publication of EP1506567A2 publication Critical patent/EP1506567A2/fr
Application granted granted Critical
Publication of EP1506567B1 publication Critical patent/EP1506567B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
    • H01J5/56—Shape of the separate part
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel

Definitions

  • the invention is based on a dielectric barrier discharge lamp.
  • dielectric barrier discharge lamp includes sources of electromagnetic radiation based on dielectrically impeded gas discharges.
  • the spectrum of the radiation may include both the visible range and the UV (ultraviolet) / VUV (vacuum ultraviolet) range and the IR (infrared) range.
  • a phosphor layer for converting VUV radiation into longer wavelength radiation e.g. UVA or visible radiation (light) may be provided.
  • a dielectric barrier discharge lamp requires at least one so-called dielectrically impeded electrode.
  • a dielectrically impeded electrode is separated from the interior of the discharge vessel or the discharge gas by means of a dielectric.
  • This dielectric - the dielectric barrier - can be embodied, for example, as a dielectric layer covering the electrode, or it is formed by the discharge vessel of the lamp itself, namely when the electrode is arranged on the outside of the wall of the discharge vessel. The latter is abbreviated hereafter as "external electrode”.
  • the present invention relates to a dielectric barrier discharge lamp comprising at least one substantially strip-shaped outer electrode of the aforementioned type.
  • the lamp includes an oblong or tubular, sealed on both sides discharge vessel, which encloses an ionizable filling.
  • the ionizable filling usually consists of a noble gas, for example xenon or a gas mixture.
  • a noble gas for example xenon or a gas mixture.
  • excimers are formed.
  • Excimers are excited molecules, such as Xe 2 *, which emit electromagnetic radiation when they return to the normally unbound ground state. In the case of Xe 2 *, the maximum of the molecular beam radiation is about 172 nm.
  • such lamps are suitable as UV / VUV lamps in process technology, for example, surface cleaning, photolytics, ozone generation, metallization, and UV curing.
  • process technology for example, surface cleaning, photolytics, ozone generation, metallization, and UV curing.
  • suitable measures for the gas-tight installation of such radiators are to be made in a corresponding process chamber.
  • the EP-A 1 088 335 discloses a single-socket dielectric barrier discharge lamp suitable for UV irradiation.
  • the base has a flange which is connected by means of potting compound with the squeeze of the lamp and suitable for vacuum applications.
  • this concept is less suitable for high vacuum.
  • Another disadvantage is that a relatively large amount of potting compound is required if it covers the entire space to fill between the pinch and the circular cylindrical inner wall of the base sleeve. If, however, gaps are left free, negative pressure prevails in the area between the squeeze foot end and the following seal. Then there is the risk of parasitic gas discharges between the power supply lines.
  • the DE-A 100 48 986 also discloses a single barrier dielectric barrier discharge lamp suitable for UV radiation.
  • the lamp itself corresponds generically to the one already mentioned US Pat. No. 6,060,828 , Figures 5a to 5c, disclosed lamp.
  • the base has a base sleeve with contact springs.
  • the base sleeve surrounds the lamp base or the corresponding lamp end such that each contact spring is in electrically conductive contact with a corresponding strip-shaped outer electrode.
  • the base or the base sleeve in the region of the contact springs is not connected gas-tight to the lamp vessel, there is also the risk of parasitic gas discharges between the power supply lines for the outer electrodes, here in particular the contact springs of the base sleeve, and for the inner electrode.
  • the object of the present invention is to provide an improved dielectric barrier discharge lamp. Another aspect is that the dielectric barrier discharge lamp should be usable in a negative pressure environment.
  • a dielectric barrier discharge lamp with a pedestal comprising: an elongate discharge vessel closed on both sides, the wall of which encloses an ionizable filling, electrodes, wherein at least one of the electrodes is an inner electrode, ie arranged inside the discharge vessel and at least one of the electrodes is an outer electrode, that is, disposed on the outside of the wall of the discharge vessel, a power supply for the at least one inner electrode and a lamp base, through which the at least one inner electrode is gas-tightly connected to the power supply, characterized in that the base comprises a tube which is attached gas-tight at the lampenfuß solutionen end of the discharge vessel and surrounds the lamp base.
  • the basic idea of the invention is to gas-tightly attach a pipe surrounding the lamp base to the end of the lamp base of the discharge vessel of the dielectric barrier discharge lamp. This is a gas-tight separation between the two power supply lines for the outer and inner electrode possible. In this way, the parasitic gas discharges mentioned above can be prevented between the power supply lines at negative pressure.
  • the tube comprises a cylindrical and a conical portion, wherein the conical portion connects the discharge vessel with the cylindrical portion.
  • the tube expediently additionally comprises a means for sealing.
  • this means for sealing is realized by a small flange seal which is inserted over the pipe.
  • a small flange seal which is inserted over the pipe.
  • the power supply for the outer electrodes is, as well as the outer electrodes themselves, designed as a track-like structure. The thickness of these structures is typically only a few microns. This allows a gas-tight passage of the arranged on the outside of the tube power supply of the outer electrodes by the vacuum usually used as a gasket O-ring.
  • a connection plug e.g. of the type BNC - HT, which is connected to the two power supply lines. Further details can be found in the embodiment.
  • either a metallic vacuum flange may be connected by means of transitional glasses or a glass flange by direct fusing to the free end of the tube.
  • the power supply for the outer electrode does not necessarily have to be arranged on the outside of the pipe like a track.
  • outer electrodes are preferably connected to ground potential, it may also be advantageous to connect the outer electrodes directly, for example by means of a suitable contact spring, to the metallic process chamber.
  • the attached pipe separates the air pressure-surrounded power supply of the inner electrode from that part of the power supply connected to the external electrodes, which is exposed to the process gas atmosphere or vacuum.
  • a top view of a dielectric barrier discharge lamp with socket according to the invention including socket adapter (sectional view).
  • a dielectric barrier discharge lamp 1 according to the invention with socket is shown schematically.
  • This is a UV / VUV radiator, e.g. for surface cleaning, photolytics, ozone generation, metallization or UV curing.
  • This spotlight is designed for an electrical power consumption of about 20 W.
  • the discharge lamp 1 has a circular cylindrical discharge vessel 2 made of 0.7 mm to 1.5 mm thick quartz glass.
  • the discharge vessel 2 has a Outside diameter of about 40 mm and a length of about 120 mm.
  • the inside of the discharge vessel 2 is filled with xenon at a pressure of 20 kPa.
  • the discharge vessel 2 is closed like a dome and has a pump tip 3 in the middle of the dome.
  • a quartz tube 4 is fused to the discharge vessel 2.
  • this quartz tube may also be attached by means of glass solder.
  • the quartz tube 4 has a conical section 5 and a circular cylindrical section 6.
  • the conical section 5 connects the tubular discharge vessel 2 with the circular-cylindrical section 6, the outer diameter of which is approximately 25 mm.
  • a connector 7 of the type BNC - HT is arranged at the lamp remote end of the quartz tube 4.
  • outer electrodes 8a-8f On the outside of the discharge vessel 2 are six outer electrodes 8a-8f (the outer electrodes 8d-8f are not visible in Fig. 1) in the form of 12 cm long, about 1 to 1.5 mm wide, thin platinum strips equidistant and parallel attached to the lamp's longitudinal axis.
  • the ends of the electrode strips 8a-8f are each connected to a peripheral Platinstteifen 9, 10 with each other.
  • the one platinum strip 9, which is mounted in the immediate vicinity of the connection between the discharge vessel 2 and the quartz tube 4, is connected to a further platinum strip 11.
  • This further platinum strip 11 extends on the outside of the quartz tube 4 and ends at the connector 7, with the first pole he is connected. In this way, this platinum strip 11 acts as a power supply for the outer electrodes 8a-8f.
  • a modified base adapter 12 ISO KF 40 is arranged (sectional view). It comprises a vacuum small flange 13 and an inner sleeve 14 screwed thereto.
  • the inner sleeve 14 presses an O-ring 16 against a bevel 17 of the small flange 13 via a metal ring 15.
  • O-ring 16 against the outside of the quartz tube 4.
  • Another O-ring 18 is inserted in an inner groove 19 at the unthreaded end of the inner sleeve 14.
  • An annular groove 20 on the sealing side of the small flange 13 serves to receive a known centering ring with O-ring (not shown) for installation in a (not shown) process chamber.
  • the discharge vessel 3 tapers and merges into a pinch seal 21.
  • the pinch seal 21 ensures by means of a sealing foil 22 made of molybdenum a gas-tight connection of the inner electrode 23 with an outer power supply 24.
  • This power supply 24 is connected to the second pole of the connector plug 7 (not shown).
  • the inner electrode 23 is a coiled inside the discharge vessel 2 coiled metal wire.
  • the pinch seal 21 opposite end of the coil electrode 23 is fixed in the pump tip 3.
  • the respective diameters of the metal wire and the helix are 1 mm and 8 mm, respectively.
  • the pitch - i. the distance within which the helix makes a full turn - is 12 mm.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)

Claims (13)

  1. Lampe (1) à décharge à barrière diélectrique ayant un culot, la lampe (1) à décharge comportant ce qui suit :
    - une enceinte (2) de décharge oblongue, fermée des deux côtés et dont la paroi enferme une charge ionisable,
    - des électrodes (8a à 8f, 23), au moins l'une des électrodes étant une électrode (23) intérieure, c'est-à-dire est disposée à l'intérieur de l'enceinte (2) de décharge, et au moins l'une des électrodes étant une électrode (8a à 8f) extérieure, c'est-à-dire est disposée sur la face extérieure de la paroi de l'enceinte (2) de décharge,
    - une entrée (24) de courant pour la au moins une électrode (23) intérieure et un pied (21) de lampe, à travers lequel la au moins une électrode (23) intérieure est reliée d'une manière étanche au gaz à l'entrée (24) de courant,
    caractérisée en ce que le culot comprend
    • un tube (4) qui est mis de manière étanche au gaz sur l'extrémité côté pied de lampe de l'enceinte (2) de décharge et qui entoure le pied (21) de lampe.
  2. Lampe à décharge à barrière diélectrique à culot suivant la revendication 1, dans laquelle le tube (4) a, en outre, un moyen d'étanchéité (12).
  3. Lampe à décharge à barrière diélectrique à culot suivant la revendication 2, dans laquelle le moyen d'étanchéité (12) comprend une bride (13) à vide.
  4. Lampe à décharge à barrière diélectrique à culot suivant la revendication 3, dans laquelle la bride (13) à vide est emmanchée sur le tube.
  5. Lampe à décharge à barrière diélectrique à culot suivant l'une des revendications précédentes, dans laquelle une entrée (11) de courant pour la au moins une électrode (8a à 8f) extérieure est disposée sur la face extérieure du tube et passe à travers le moyen d'étanchéité (12).
  6. Lampe à décharge à barrière diélectrique à culot suivant l'une des revendications précédentes, comprenant un connecteur (7) à l'extrémité du tube (4) qui est éloignée de la lampe, connecteur auquel au moins l'entrée (24) de courant pour l'électrode (23) intérieure est reliée.
  7. Lampe à décharge à barrière diélectrique à culot suivant la revendication 6, dans laquelle le connecteur (7) est du type BNC-HT.
  8. Lampe à décharge à barrière diélectrique à culot suivant l'une des revendications précédentes, dans laquelle la ou les électrodes extérieures (8a à 8f) et l'entrée (11) de courant pour la ou les électrodes extérieures sont constituées de structures analogues à des pistes conductrices.
  9. Lampe à décharge à barrière diélectrique à culot suivant la revendication 8, dans laquelle les structures analogues à des pistes conductrices comprennent plusieurs bandes (8a à 8f, 11) qui sont déposées en direction axiale et à distance mutuelle sur la face extérieure de l'enceinte (2) de décharge.
  10. Lampe à décharge à barrière diélectrique à culot suivant la revendication 3, dans laquelle la bride (13) à vide est en le même matériau que le tube et est scellée à l'extrémité libre du tube.
  11. Lampe à décharge à barrière diélectrique à culot suivant la revendication 3, dans laquelle la bride (13) à vide est en métal et est scellée à l'extrémité libre du tube au moyen de verre de transition.
  12. Lampe à décharge à barrière diélectrique à culot suivant l'une des revendications précédentes, dans laquelle l'électrode (23) intérieure est boudinée et est orientée axialement par rapport à l'enceinte (2) de décharge.
  13. Lampe à décharge à barrière diélectrique à culot suivant l'une des revendications précédentes, dans laquelle le tube (4) a un tronçon (6) cylindrique ainsi qu'un tronçon (5) conique, et le tronçon (5) conique relie l'enceinte (2) de décharge au tronçon (6) cylindrique.
EP03752699A 2002-05-17 2003-05-14 Lampe a decharge a barriere dielectrique comprenant un socle Expired - Fee Related EP1506567B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10222100 2002-05-17
DE10222100A DE10222100A1 (de) 2002-05-17 2002-05-17 Dielektrische Barriere-Entladungslampe mit Sockel
PCT/DE2003/001554 WO2003098653A2 (fr) 2002-05-17 2003-05-14 Lampe a decharge a barriere dielectrique comprenant un socle

Publications (2)

Publication Number Publication Date
EP1506567A2 EP1506567A2 (fr) 2005-02-16
EP1506567B1 true EP1506567B1 (fr) 2007-07-18

Family

ID=29285538

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03752699A Expired - Fee Related EP1506567B1 (fr) 2002-05-17 2003-05-14 Lampe a decharge a barriere dielectrique comprenant un socle

Country Status (8)

Country Link
US (1) US7224111B2 (fr)
EP (1) EP1506567B1 (fr)
JP (1) JP4330527B2 (fr)
KR (1) KR100697452B1 (fr)
CA (1) CA2486200A1 (fr)
DE (2) DE10222100A1 (fr)
TW (1) TWI287820B (fr)
WO (1) WO2003098653A2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009030310A1 (de) 2009-06-24 2010-12-30 Osram Gesellschaft mit beschränkter Haftung Dielektrische Barriere-Entladungslampe mit Entladungsräumen
DE102010043215A1 (de) 2010-11-02 2012-05-03 Osram Ag Strahler mit Sockel für die Bestrahlung von Oberflächen
DE102010043208A1 (de) 2010-11-02 2012-05-03 Osram Ag Vorrichtung zum Bestrahlen von Oberflächen

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DE102004006439A1 (de) * 2004-02-09 2005-08-25 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Fahrzeugschweinwerferlampe
CN1893202A (zh) * 2005-07-05 2007-01-10 电灯专利信托有限公司 荧光灯的管座结构
JP4396752B2 (ja) * 2007-09-28 2010-01-13 ウシオ電機株式会社 放電ランプ装置
WO2009146744A1 (fr) * 2008-06-05 2009-12-10 Osram Gesellschaft mit beschränkter Haftung Procédé pour traiter des surfaces, émetteur de rayonnement pour ce procédé ainsi que système d'irradiation avec cet émetteur de rayonnement
JP5564880B2 (ja) * 2009-10-02 2014-08-06 ウシオ電機株式会社 紫外線照射装置
WO2011080679A2 (fr) * 2010-01-04 2011-07-07 Koninklijke Philips Electronics N.V. Lampe à décharge à barrière diélectrique
JP5218877B6 (ja) * 2010-03-18 2018-06-27 株式会社Ｇｓユアサ 誘電体バリア放電ランプおよびランプユニット
TWI483285B (zh) 2012-11-05 2015-05-01 Ind Tech Res Inst 介電質屏障放電燈及其製作方法
DE102015013050A1 (de) 2015-10-08 2016-05-25 Daimler Ag Befestigungsschiene zum Befestigen eines Abgaskrümmers an einer Verbrennungskraftmaschine
JP7139808B2 (ja) * 2018-09-13 2022-09-21 東芝ライテック株式会社 バリア放電ランプ
JP2021051936A (ja) * 2019-09-25 2021-04-01 東芝ライテック株式会社 バリア放電ランプおよび紫外線照射ユニット

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009030310A1 (de) 2009-06-24 2010-12-30 Osram Gesellschaft mit beschränkter Haftung Dielektrische Barriere-Entladungslampe mit Entladungsräumen
DE102010043215A1 (de) 2010-11-02 2012-05-03 Osram Ag Strahler mit Sockel für die Bestrahlung von Oberflächen
DE102010043208A1 (de) 2010-11-02 2012-05-03 Osram Ag Vorrichtung zum Bestrahlen von Oberflächen
WO2012059382A1 (fr) 2010-11-02 2012-05-10 Osram Ag Émetteur de rayonnement doté d'un socle pour exposer des surfaces à un rayonnement
WO2012059383A1 (fr) 2010-11-02 2012-05-10 Osram Ag Dispositif pour exposer des surfaces à des rayonnements
US8796640B2 (en) 2010-11-02 2014-08-05 Osram Ag Radiating element for irradiating surfaces, having a socket
US8940229B2 (en) 2010-11-02 2015-01-27 Osram Ag Device for irradiating surfaces

Also Published As

Publication number Publication date
JP4330527B2 (ja) 2009-09-16
US20050218775A1 (en) 2005-10-06
EP1506567A2 (fr) 2005-02-16
KR20050000547A (ko) 2005-01-05
US7224111B2 (en) 2007-05-29
DE50307709D1 (de) 2007-08-30
WO2003098653A3 (fr) 2004-12-23
CA2486200A1 (fr) 2003-11-27
TW200307309A (en) 2003-12-01
KR100697452B1 (ko) 2007-03-20
JP2005526361A (ja) 2005-09-02
DE10222100A1 (de) 2003-11-27
TWI287820B (en) 2007-10-01
WO2003098653A2 (fr) 2003-11-27

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