EP1315993A4 - Mikrospiegelelemente, gehäuse für die mikrospiegelelemente und zugehöriges schutzsystem - Google Patents
Mikrospiegelelemente, gehäuse für die mikrospiegelelemente und zugehöriges schutzsystemInfo
- Publication number
- EP1315993A4 EP1315993A4 EP01959466A EP01959466A EP1315993A4 EP 1315993 A4 EP1315993 A4 EP 1315993A4 EP 01959466 A EP01959466 A EP 01959466A EP 01959466 A EP01959466 A EP 01959466A EP 1315993 A4 EP1315993 A4 EP 1315993A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- micro
- mirror
- micromirror elements
- mirrors
- package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0067—Packages or encapsulation for controlling the passage of optical signals through the package
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/28—Reflectors in projection beam
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70283—Mask effects on the imaging process
- G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
- H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
- H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0369—Static structures characterized by their profile
- B81B2203/0384—Static structures characterized by their profile sloped profile
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Multimedia (AREA)
- Computer Hardware Design (AREA)
- Signal Processing (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Projection Apparatus (AREA)
- Micromachines (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Led Device Packages (AREA)
- Prostheses (AREA)
- Hybrid Cells (AREA)
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE20122614U DE20122614U1 (de) | 2000-08-03 | 2001-08-03 | Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem |
DE20122618U DE20122618U1 (de) | 2000-08-03 | 2001-08-03 | Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem |
DE20122615U DE20122615U1 (de) | 2000-08-03 | 2001-08-03 | Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem |
DE20122617U DE20122617U1 (de) | 2000-08-03 | 2001-08-03 | Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem |
EP05000598A EP1555562A3 (de) | 2000-08-03 | 2001-08-03 | Projektionsgerät |
EP05000604A EP1555564A3 (de) | 2000-08-03 | 2001-08-03 | Verpackte Mikrospiegelanordnung für Projektionsanzeigevorrichtung |
DE20122616U DE20122616U1 (de) | 2000-08-03 | 2001-08-03 | Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem |
EP05000603A EP1555563A3 (de) | 2000-08-03 | 2001-08-03 | Farbprojektionssystem |
EP05000599A EP1553437B1 (de) | 2000-08-03 | 2001-08-03 | Vereinzelte Die-Wafer mit Mikrospiegeln |
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US732445 | 1985-05-09 | ||
US09/631,536 US6529310B1 (en) | 1998-09-24 | 2000-08-03 | Deflectable spatial light modulator having superimposed hinge and deflectable element |
US631536 | 2000-08-03 | ||
US22924600P | 2000-08-30 | 2000-08-30 | |
US229246P | 2000-08-30 | ||
US09/732,445 US6523961B2 (en) | 2000-08-30 | 2000-12-07 | Projection system and mirror elements for improved contrast ratio in spatial light modulators |
PCT/US2001/024332 WO2002012925A2 (en) | 2000-08-03 | 2001-08-03 | Micromirror elements, package for the micromirror elements, and protection system therefor |
Related Child Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP05000603A Division EP1555563A3 (de) | 2000-08-03 | 2001-08-03 | Farbprojektionssystem |
EP05000598A Division EP1555562A3 (de) | 2000-08-03 | 2001-08-03 | Projektionsgerät |
EP05000599A Division EP1553437B1 (de) | 2000-08-03 | 2001-08-03 | Vereinzelte Die-Wafer mit Mikrospiegeln |
EP05000604A Division EP1555564A3 (de) | 2000-08-03 | 2001-08-03 | Verpackte Mikrospiegelanordnung für Projektionsanzeigevorrichtung |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1315993A2 EP1315993A2 (de) | 2003-06-04 |
EP1315993A4 true EP1315993A4 (de) | 2005-07-13 |
Family
ID=27397927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01959466A Ceased EP1315993A4 (de) | 2000-08-03 | 2001-08-03 | Mikrospiegelelemente, gehäuse für die mikrospiegelelemente und zugehöriges schutzsystem |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP1315993A4 (de) |
JP (5) | JP3889705B2 (de) |
KR (1) | KR100724081B1 (de) |
CN (5) | CN100371763C (de) |
AT (1) | ATE354814T1 (de) |
AU (1) | AU2001281019A1 (de) |
DE (10) | DE20122370U1 (de) |
WO (1) | WO2002012925A2 (de) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7307775B2 (en) * | 2000-12-07 | 2007-12-11 | Texas Instruments Incorporated | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
SG111972A1 (en) * | 2002-10-17 | 2005-06-29 | Agency Science Tech & Res | Wafer-level package for micro-electro-mechanical systems |
US7397517B2 (en) | 2003-05-30 | 2008-07-08 | Kazuhiro Ohara | Display system and signal processing using diamond-shaped DMDs |
US7334902B2 (en) | 2003-08-18 | 2008-02-26 | Evans & Sutherland Computer Corporation | Wide angle scanner for panoramic display |
US6871958B2 (en) | 2003-08-18 | 2005-03-29 | Evans & Sutherland Computer Corporation | Wide angle scanner for panoramic display |
US7012669B2 (en) | 2003-08-18 | 2006-03-14 | Evans & Sutherland Computer Corporation | Reflection barrier for panoramic display |
US6861277B1 (en) | 2003-10-02 | 2005-03-01 | Hewlett-Packard Development Company, L.P. | Method of forming MEMS device |
US6995830B2 (en) * | 2003-12-22 | 2006-02-07 | Asml Netherlands B.V. | Lithographic projection apparatus and device manufacturing method |
US7057794B2 (en) * | 2004-05-19 | 2006-06-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Micromirror for MEMS device |
US7273693B2 (en) * | 2004-07-30 | 2007-09-25 | Hewlett-Packard Development Company, L.P. | Method for forming a planar mirror using a sacrificial oxide |
US7038831B2 (en) * | 2004-09-30 | 2006-05-02 | Lucent Technologies, Inc. | Micromirror apparatus with improved in-plane rotation tolerance |
KR100815358B1 (ko) * | 2004-10-08 | 2008-03-19 | 삼성전기주식회사 | 경사진 광투과성 덮개를 가진 광변조기 패키지 |
JP4568579B2 (ja) | 2004-10-29 | 2010-10-27 | 富士通株式会社 | 光スイッチ |
IL165212A (en) | 2004-11-15 | 2012-05-31 | Elbit Systems Electro Optics Elop Ltd | Device for scanning light |
US7372617B2 (en) * | 2005-07-06 | 2008-05-13 | Peter Enoksson | Hidden hinge MEMS device |
GB2453104B (en) | 2007-09-19 | 2012-04-25 | Wolfson Microelectronics Plc | Mems device and process |
US11157977B1 (en) | 2007-10-26 | 2021-10-26 | Zazzle Inc. | Sales system using apparel modeling system and method |
TWI418850B (zh) * | 2007-11-09 | 2013-12-11 | 尼康股份有限公司 | 微致動器、光學設備、顯示裝置、曝光裝置及設備製造方法 |
JP2009233836A (ja) * | 2008-03-28 | 2009-10-15 | Yamaha Corp | Memsおよびmems製造方法 |
US8537446B2 (en) * | 2008-04-08 | 2013-09-17 | Cornell University | Multi-axis, large tilt angle, wafer level micromirror array for large scale beam steering applications |
DE102008001038B4 (de) | 2008-04-08 | 2016-08-11 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit Schrägstruktur und entsprechendes Herstellungsverfahren |
US8096182B2 (en) * | 2008-05-29 | 2012-01-17 | Freescale Semiconductor, Inc. | Capacitive sensor with stress relief that compensates for package stress |
JP5151756B2 (ja) * | 2008-07-16 | 2013-02-27 | 株式会社豊田中央研究所 | 光学装置 |
US10719862B2 (en) | 2008-07-29 | 2020-07-21 | Zazzle Inc. | System and method for intake of manufacturing patterns and applying them to the automated production of interactive, customizable product |
CN102472974B (zh) * | 2009-07-17 | 2014-05-07 | 卡尔蔡司Smt有限责任公司 | 微光刻投射曝光设备以及测量有关包含在其中的光学表面的参数的方法 |
KR101912092B1 (ko) | 2010-10-05 | 2018-10-26 | 삼성전자 주식회사 | 액체 렌즈 |
KR101912093B1 (ko) | 2010-10-29 | 2018-10-26 | 삼성전자 주식회사 | 광학 장치 |
CN102087414B (zh) * | 2010-11-03 | 2012-12-26 | 凝辉(天津)科技有限责任公司 | 一种阵列式分区投影方法 |
CN102683474B (zh) * | 2011-03-18 | 2014-11-05 | 浙江大立科技股份有限公司 | 一种基于复合牺牲层的红外探测器制作方法 |
US9641826B1 (en) | 2011-10-06 | 2017-05-02 | Evans & Sutherland Computer Corporation | System and method for displaying distant 3-D stereo on a dome surface |
US10969743B2 (en) | 2011-12-29 | 2021-04-06 | Zazzle Inc. | System and method for the efficient recording of large aperture wave fronts of visible and near visible light |
US10018723B2 (en) | 2012-07-26 | 2018-07-10 | Apple Inc. | Dual-axis scanning mirror |
US9110354B2 (en) * | 2012-09-20 | 2015-08-18 | Palo Alto Research Center Incorporated | Steerable illumination source for a compact camera |
KR20150063540A (ko) * | 2012-10-23 | 2015-06-09 | 애플 인크. | 마이크로 기계 디바이스의 제조 |
DE102013213842A1 (de) * | 2013-07-16 | 2015-01-22 | Carl Zeiss Smt Gmbh | Optisches Bauelement |
DE102013217269A1 (de) * | 2013-08-29 | 2015-03-05 | Carl Zeiss Smt Gmbh | Mikrospiegel-Array |
CN103777450A (zh) * | 2014-01-06 | 2014-05-07 | 吴震 | 发光装置、投影显示装置和发光系统 |
CN103777445B (zh) * | 2014-01-06 | 2018-12-25 | 杨毅 | 投影显示装置 |
JP2016029430A (ja) * | 2014-07-25 | 2016-03-03 | セイコーエプソン株式会社 | 電気光学装置、電気光学装置の製造方法、及び電子機器 |
DE102015200626B3 (de) * | 2015-01-16 | 2016-07-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | MEMS Aktuator, System mit einer Mehrzahl vom MEMS Aktuatoren und Verfahren zum Herstellen eines MEMS Aktuators |
CN104835908A (zh) * | 2015-04-17 | 2015-08-12 | 上海华虹宏力半导体制造有限公司 | 用于3d amr的氮化钽刻蚀方法 |
US10589980B2 (en) * | 2017-04-07 | 2020-03-17 | Texas Instruments Incorporated | Isolated protrusion/recession features in a micro electro mechanical system |
DE102018207783B4 (de) * | 2018-05-17 | 2022-11-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | MEMS-Array aus MEMS mit jeweils einem beweglichen Strukturelement |
CN111246187B (zh) * | 2018-11-29 | 2022-07-29 | 青岛海信激光显示股份有限公司 | 光阀驱动控制方法及投影设备 |
KR102211618B1 (ko) * | 2019-07-26 | 2021-02-02 | 인하대학교 산학협력단 | 3차원 플로팅 이미지 구현 장치용 역반사 마이크로 미러 어레이 |
CN113675722A (zh) * | 2021-07-14 | 2021-11-19 | 威科赛乐微电子股份有限公司 | 一种Cap layer层蚀刻优化方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5659374A (en) * | 1992-10-23 | 1997-08-19 | Texas Instruments Incorporated | Method of repairing defective pixels |
US5696619A (en) * | 1995-02-27 | 1997-12-09 | Texas Instruments Incorporated | Micromechanical device having an improved beam |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4592628A (en) * | 1981-07-01 | 1986-06-03 | International Business Machines | Mirror array light valve |
JPH08304924A (ja) * | 1995-05-10 | 1996-11-22 | Nikon Corp | プロジェクター装置 |
JPH08304892A (ja) * | 1995-05-11 | 1996-11-22 | Asahi Optical Co Ltd | ストロボ付カメラ |
US6288828B1 (en) * | 1997-09-10 | 2001-09-11 | Light And Sound Design Ltd. | Programmable light beam shape altering device using programmable micromirrors |
KR100243190B1 (ko) * | 1996-06-10 | 2000-02-01 | 윤종용 | 가동미러장치 및 그 제조방법 |
EP0877272B1 (de) * | 1997-05-08 | 2002-07-31 | Texas Instruments Incorporated | Verbesserungen für räumliche Lichtmodulatoren |
KR100313851B1 (ko) * | 1998-04-10 | 2001-12-12 | 윤종용 | 화상표시장치용마이크로미러디바이스 |
US6123985A (en) * | 1998-10-28 | 2000-09-26 | Solus Micro Technologies, Inc. | Method of fabricating a membrane-actuated charge controlled mirror (CCM) |
US6222667B1 (en) * | 1999-02-09 | 2001-04-24 | Advanced Optics Electronics, Inc. | Electro-optic light valve array |
US6175443B1 (en) * | 1999-05-01 | 2001-01-16 | Lucent Technologies, Inc. | Article comprising a deformable segmented mirror |
-
2001
- 2001-08-03 DE DE20122370U patent/DE20122370U1/de not_active Expired - Lifetime
- 2001-08-03 CN CNB2004100546591A patent/CN100371763C/zh not_active Expired - Fee Related
- 2001-08-03 DE DE20122618U patent/DE20122618U1/de not_active Expired - Lifetime
- 2001-08-03 DE DE20122616U patent/DE20122616U1/de not_active Expired - Lifetime
- 2001-08-03 DE DE60126849T patent/DE60126849T2/de not_active Expired - Fee Related
- 2001-08-03 DE DE20122614U patent/DE20122614U1/de not_active Expired - Lifetime
- 2001-08-03 DE DE20122617U patent/DE20122617U1/de not_active Expired - Lifetime
- 2001-08-03 CN CNB2004100546572A patent/CN100412602C/zh not_active Expired - Fee Related
- 2001-08-03 DE DE20122372U patent/DE20122372U1/de not_active Expired - Lifetime
- 2001-08-03 CN CNB2004100546604A patent/CN100412604C/zh not_active Expired - Fee Related
- 2001-08-03 CN CNB018136087A patent/CN100392467C/zh not_active Expired - Fee Related
- 2001-08-03 DE DE20122615U patent/DE20122615U1/de not_active Expired - Lifetime
- 2001-08-03 EP EP01959466A patent/EP1315993A4/de not_active Ceased
- 2001-08-03 DE DE20122371U patent/DE20122371U1/de not_active Expired - Lifetime
- 2001-08-03 DE DE20122373U patent/DE20122373U1/de not_active Expired - Lifetime
- 2001-08-03 AU AU2001281019A patent/AU2001281019A1/en not_active Abandoned
- 2001-08-03 WO PCT/US2001/024332 patent/WO2002012925A2/en active Application Filing
- 2001-08-03 CN CNB2004100546587A patent/CN100412603C/zh not_active Expired - Fee Related
- 2001-08-03 JP JP2002517555A patent/JP3889705B2/ja not_active Expired - Fee Related
- 2001-08-03 AT AT05000599T patent/ATE354814T1/de not_active IP Right Cessation
-
2003
- 2003-02-03 KR KR1020037001542A patent/KR100724081B1/ko not_active IP Right Cessation
-
2004
- 2004-09-03 JP JP2004257715A patent/JP3889757B2/ja not_active Expired - Fee Related
- 2004-09-17 JP JP2004272333A patent/JP3889759B2/ja not_active Expired - Fee Related
- 2004-09-17 JP JP2004272332A patent/JP3768514B2/ja not_active Expired - Fee Related
-
2005
- 2005-12-07 JP JP2005353848A patent/JP2006178447A/ja not_active Abandoned
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5659374A (en) * | 1992-10-23 | 1997-08-19 | Texas Instruments Incorporated | Method of repairing defective pixels |
US5696619A (en) * | 1995-02-27 | 1997-12-09 | Texas Instruments Incorporated | Micromechanical device having an improved beam |
Also Published As
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1315993A4 (de) | Mikrospiegelelemente, gehäuse für die mikrospiegelelemente und zugehöriges schutzsystem | |
US6961194B2 (en) | Integrated TIR prism and lens element | |
US6959990B2 (en) | Prism for high contrast projection | |
US7665850B2 (en) | Prism for high contrast projection | |
EP1090320B1 (de) | Projektionssystem | |
US6643069B2 (en) | SLM-base color projection display having multiple SLM's and multiple projection lenses | |
US7011415B2 (en) | Yokeless hidden hinge digital micromirror device | |
Hagelin et al. | Optical raster-scanning displays based on surface-micromachined polysilicon mirrors | |
JPH11505334A (ja) | 投影装置 | |
KR980003671A (ko) | Slm에 기초한 이미지 디스플레이 시스템용 자동 초점 시스템 | |
EP1784811A1 (de) | Zweidimensionales bildprojektionssystem | |
JPH08304706A (ja) | 空間光変調器のためのイルミネーション光学 | |
KR960038363A (ko) | 마이크로 미러를 갖는 간섭계 및 빔 필터링 방법 | |
AU683542B2 (en) | Optical projection system | |
JP2002196173A (ja) | マイクロミラー波長等化器 | |
JP2003043384A5 (de) | ||
WO2008030846A3 (en) | Spatial light modulator mirror metal having enhanced reflectivity | |
US5564811A (en) | Optical projection system with a varifocal projection lens | |
JP2003114392A5 (de) | ||
KR100201829B1 (ko) | 광학적 투사 시스템 | |
KR19980034584A (ko) | 광학적 투사 시스템 | |
KR19990000641A (ko) | 반사형 프로젝트 장치 | |
KR19980057556U (ko) | 액정 디스플레이 장치용 광학계 | |
KR20060081610A (ko) | 프로젝션 시스템의 광학엔진 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20030303 |
|
AK | Designated contracting states |
Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
|
AX | Request for extension of the european patent |
Extension state: AL LT LV MK RO SI |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: STOCKTON, JOHN Inventor name: RICHARDS, PETER, W. Inventor name: PATEL, SATYADEV Inventor name: ILKOV, FEDOR Inventor name: HUIBERS, ANDREW, G. |
|
R17D | Deferred search report published (corrected) |
Effective date: 20020906 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: 7B 81B 3/00 B Ipc: 7G 02B 26/08 A |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20050527 |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: TEXAS INSTRUMENTS INCORPORATED |
|
17Q | First examination report despatched |
Effective date: 20051115 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN REFUSED |
|
18R | Application refused |
Effective date: 20090403 |