JP3889705B2 - マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム - Google Patents

マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム Download PDF

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Publication number
JP3889705B2
JP3889705B2 JP2002517555A JP2002517555A JP3889705B2 JP 3889705 B2 JP3889705 B2 JP 3889705B2 JP 2002517555 A JP2002517555 A JP 2002517555A JP 2002517555 A JP2002517555 A JP 2002517555A JP 3889705 B2 JP3889705 B2 JP 3889705B2
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JP
Japan
Prior art keywords
micromirror
light
projection system
array
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002517555A
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English (en)
Japanese (ja)
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JP2004506230A (ja
JP2004506230A5 (de
Inventor
アンドリュー， ジー． ヒュイバース，
フェドール イルコフ，
サティアデフ パテル，
ピーター， ダブリュー． リチャーズ，
ジョン ストックトン，
Original Assignee
リフレクティヴィティー， インク．
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/631,536 external-priority patent/US6529310B1/en
Priority claimed from US09/732,445 external-priority patent/US6523961B2/en
Application filed by リフレクティヴィティー， インク． filed Critical リフレクティヴィティー， インク．
Publication of JP2004506230A publication Critical patent/JP2004506230A/ja
Publication of JP2004506230A5 publication Critical patent/JP2004506230A5/ja
Application granted granted Critical
Publication of JP3889705B2 publication Critical patent/JP3889705B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0067—Packages or encapsulation for controlling the passage of optical signals through the package
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/28—Reflectors in projection beam
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0369—Static structures characterized by their profile
    • B81B2203/0384—Static structures characterized by their profile sloped profile

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Multimedia (AREA)
  • Computer Hardware Design (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Projection Apparatus (AREA)
  • Micromachines (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Led Device Packages (AREA)
  • Prostheses (AREA)
  • Hybrid Cells (AREA)
JP2002517555A 2000-08-03 2001-08-03 マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム Expired - Fee Related JP3889705B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US09/631,536 US6529310B1 (en) 1998-09-24 2000-08-03 Deflectable spatial light modulator having superimposed hinge and deflectable element
US22924600P 2000-08-30 2000-08-30
US09/732,445 US6523961B2 (en) 2000-08-30 2000-12-07 Projection system and mirror elements for improved contrast ratio in spatial light modulators
PCT/US2001/024332 WO2002012925A2 (en) 2000-08-03 2001-08-03 Micromirror elements, package for the micromirror elements, and protection system therefor

Related Child Applications (4)

Application Number Title Priority Date Filing Date
JP2004257715A Division JP3889757B2 (ja) 2000-08-03 2004-09-03 マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム
JP2004272333A Division JP3889759B2 (ja) 2000-08-03 2004-09-17 マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム
JP2004272332A Division JP3768514B2 (ja) 2000-08-03 2004-09-17 マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム
JP2005353848A Division JP2006178447A (ja) 2000-08-03 2005-12-07 マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム

Publications (3)

Publication Number Publication Date
JP2004506230A JP2004506230A (ja) 2004-02-26
JP2004506230A5 JP2004506230A5 (de) 2006-02-02
JP3889705B2 true JP3889705B2 (ja) 2007-03-07

Family

ID=27397927

Family Applications (5)

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JP2002517555A Expired - Fee Related JP3889705B2 (ja) 2000-08-03 2001-08-03 マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム
JP2004257715A Expired - Fee Related JP3889757B2 (ja) 2000-08-03 2004-09-03 マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム
JP2004272332A Expired - Fee Related JP3768514B2 (ja) 2000-08-03 2004-09-17 マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム
JP2004272333A Expired - Fee Related JP3889759B2 (ja) 2000-08-03 2004-09-17 マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム
JP2005353848A Abandoned JP2006178447A (ja) 2000-08-03 2005-12-07 マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム

Family Applications After (4)

Application Number Title Priority Date Filing Date
JP2004257715A Expired - Fee Related JP3889757B2 (ja) 2000-08-03 2004-09-03 マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム
JP2004272332A Expired - Fee Related JP3768514B2 (ja) 2000-08-03 2004-09-17 マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム
JP2004272333A Expired - Fee Related JP3889759B2 (ja) 2000-08-03 2004-09-17 マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム
JP2005353848A Abandoned JP2006178447A (ja) 2000-08-03 2005-12-07 マイクロミラー素子、マイクロミラー素子用のパッケージ、およびそのための投射システム

Country Status (8)

Country Link
EP (1) EP1315993A4 (de)
JP (5) JP3889705B2 (de)
KR (1) KR100724081B1 (de)
CN (5) CN100371763C (de)
AT (1) ATE354814T1 (de)
AU (1) AU2001281019A1 (de)
DE (10) DE20122371U1 (de)
WO (1) WO2002012925A2 (de)

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Also Published As

Publication number Publication date
DE20122618U1 (de) 2006-11-23
WO2002012925A3 (en) 2002-09-06
JP2005122145A (ja) 2005-05-12
DE20122614U1 (de) 2006-09-14
DE20122615U1 (de) 2006-09-14
CN1567020A (zh) 2005-01-19
CN100412602C (zh) 2008-08-20
DE60126849D1 (de) 2007-04-05
KR100724081B1 (ko) 2007-06-04
ATE354814T1 (de) 2007-03-15
DE60126849T2 (de) 2007-11-08
DE20122617U1 (de) 2006-09-14
JP2005122146A (ja) 2005-05-12
DE20122371U1 (de) 2005-05-19
DE20122372U1 (de) 2005-05-19
CN100412603C (zh) 2008-08-20
DE20122370U1 (de) 2005-05-19
JP2006178447A (ja) 2006-07-06
CN1444738A (zh) 2003-09-24
AU2001281019A1 (en) 2002-02-18
CN1567018A (zh) 2005-01-19
DE20122616U1 (de) 2006-09-14
KR20030036665A (ko) 2003-05-09
CN100371763C (zh) 2008-02-27
JP3889759B2 (ja) 2007-03-07
JP3768514B2 (ja) 2006-04-19
CN100392467C (zh) 2008-06-04
EP1315993A4 (de) 2005-07-13
JP2004506230A (ja) 2004-02-26
CN1567019A (zh) 2005-01-19
CN1567021A (zh) 2005-01-19
WO2002012925A2 (en) 2002-02-14
DE20122373U1 (de) 2005-05-19
JP2005099793A (ja) 2005-04-14
EP1315993A2 (de) 2003-06-04
CN100412604C (zh) 2008-08-20
JP3889757B2 (ja) 2007-03-07

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