EP1311712A2 - Procede servant a augmenter la resistance a la compression ou a limiter la contrainte de traction interne d'une couche appliquee par cvd, pcvd ou pvd, et piece coupante d'usinage - Google Patents

Procede servant a augmenter la resistance a la compression ou a limiter la contrainte de traction interne d'une couche appliquee par cvd, pcvd ou pvd, et piece coupante d'usinage

Info

Publication number
EP1311712A2
EP1311712A2 EP01991711A EP01991711A EP1311712A2 EP 1311712 A2 EP1311712 A2 EP 1311712A2 EP 01991711 A EP01991711 A EP 01991711A EP 01991711 A EP01991711 A EP 01991711A EP 1311712 A2 EP1311712 A2 EP 1311712A2
Authority
EP
European Patent Office
Prior art keywords
layer
substrate body
cvd
cutting insert
pcvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01991711A
Other languages
German (de)
English (en)
Inventor
Hartmut Westphal
Volkmar Sottke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Widia GmbH
Original Assignee
Widia GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10123554A external-priority patent/DE10123554B4/de
Application filed by Widia GmbH filed Critical Widia GmbH
Publication of EP1311712A2 publication Critical patent/EP1311712A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5886—Mechanical treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Definitions

  • the invention relates to a method for increasing the residual compressive stress or for lowering the internal tensile stress of an outer or an outer hard material layer applied by means of CVD, PCVD or PVD to a hard metal, cermet or ceramic substrate body, in which the coated substrate body after coating is subjected to a dry blasting treatment Using a granular abrasive.
  • the invention further relates to a cutting insert for machining, which consists of a hard metal, cermet or ceramic substrate body with a single or multi-layer coating of carbides, nitrides, carbonitrides, oxicarbonitrides and / or borides of the elements of the IVa to Vla group of the periodic table, boron-containing hard material compounds and / or oxidic compounds of aluminum and / or zirconium, which have been applied by means of a PCVD or CVD process.
  • Hard metals have a binding phase consisting of cobalt and / or nickel as well as a hard material phase, which can have, for example, WC, TiC, TaC, NbC, VC and / or Cr 3 C 2 .
  • the cermets differ in that they have a large proportion of a TiCN phase, but other carbides and / or nitrides can also belong to them.
  • binder metals are the elements of the iron group, mostly Co and / or Ni. Ceramics, in particular for machining purposes, usually consist of A1 2 0 3 and / or Zr0 2 .
  • the wear resistance can be increased by single- or multi-layer coatings of the above composition.
  • the coating can be applied by means of a physical vapor deposition process (PVD) or a chemical vapor deposition process (CVD), whereby the CVD process or - in a further development - the so-called plasma-assisted CVD process (PCVD) has the advantage of a more uniform deposition, which the Avoid shading effects that occur with PVD processes.
  • PVD physical vapor deposition process
  • CVD chemical vapor deposition process
  • PCVD plasma-assisted CVD process
  • the outer layer (top layer) consists of a single or multi-phase layer of carbides, nitrides or carbonitrides based on Zr or Hf, which has been applied by means of CVD and which has internal compressive stresses, and the layer or layers underneath, also applied by means of CVD all have internal tensile stresses, at least one or the only underlying layer consisting of TiN, TiC and / or Ti (C, N).
  • the compressive stresses measured in the outer layers or the outer layer are between -500 and -2500 MPa (compressive stresses are defined by definition with negative values in contrast to tensile stresses for which positive values are used).
  • the blasting medium has a maximum diameter of 150 ⁇ m, preferably a maximum of 100 ⁇ m.
  • the internal tension of the layers lying under the cover layer also changes in a uniform manner to the extent that the edge zones of the substrate body near the surface are influenced.
  • a composite body with a multi-layer coating can thus be produced by dry mechanical blasting treatment, the layers of which, without exception, have internal compressive stresses, the top layer having undergone intensive consolidation and thus increased wear resistance.
  • the fine-grained powdery abrasives are also essentially not, but at least significantly less abrasive, than the coarser grains previously used in the prior art.
  • a further advantage of this dry blasting treatment is that the layer surface is smoothed considerably better than was previously possible with blasting treatment or brushing.
  • WO 99/23275 describes the use of a beam consisting of Al 2 0 3 particles with a size of 30 ⁇ m. proposed, but this should be used in the form of a suspension as a wet blasting agent, which should be used under a pressure of 2 to 6 bar (x 10 5 Pa), preferably 3 bar.
  • the wet jet treatment described there relates exclusively to the specific layer sequence with a lower ⁇ l 2 0 3 layer on which an outer layer has been applied, which consists of TiN or a multi-layer layer of TiN / TiC.
  • the CVD process used for coating apparently leads to (tensile) stresses, which should be minimized by means of wet blasting.
  • wet blasting with an Al 2 0 3 abrasive primarily serves to smooth the surface, whereas the achievable change in internal stresses compared to dry blasting treatment is significantly minimized.
  • the K-aluminum oxide present on the surface should finally be heat-treated at a temperature of 900 ° C to 1100 ° C for 0.3 to 10 hours in order to convert the wet-blasted K-aluminum oxide into ⁇ -aluminum oxide.
  • the blasting agent has at least essentially a rounded grain shape, the diameter of which is preferably between see 5 to 150 microns, further preferably between 10 to 100 microns.
  • the blasting agent has at least essentially a rounded grain shape, the diameter of which is preferably between see 5 to 150 microns, further preferably between 10 to 100 microns.
  • Pressure-atomized steel, cast iron granules, heavy metal powder or alloys or carbide granules and / or break-resistant ceramics produced therefrom are preferably used as blasting agents. These abrasives are characterized by a high breaking strength, so that the grains do not crack into smaller, sharp-edged grains, which can then damage the composite surface more severely.
  • the abrasive is or are directed onto the coated substrate body by means of compressed air under a pressure of at least 5 ⁇ 10 5 Pa to a maximum of 10 6 Pa, preferably between 6 ⁇ 10 5 Pa and 7 ⁇ 10 5 Pa.
  • the jet prints used are therefore considerably higher than the pressures usually used according to the prior art (when using a coarser-sized blasting agent).
  • blasting media it is possible that blasting media ; to be directed at the composite surface at any angle, but the effect increases if the abrasive is directed essentially perpendicular to the composite surface.
  • the blasting treatment is carried out until the one under an external one Layer or an outermost layer lying areas or layers, preferably up into the near-surface zones of the substrate body, have experienced a change in the internal stresses, ie either an increase in the compressive stresses or a minimization of the tensile stresses.
  • the jet pressure and duration of treatment the internal tensions of the layers lying under the cover layer can also be influenced in a targeted manner.
  • the substrate body can be a hard metal, a hard metal with an edge zone gradient, a cermet or an oxide or nitride ceramic.
  • the substrate body is preferably coated with a coating of carbides, nitrides, carbonitrides, oxicarbonitrides and / or borides of the elements of the IVa to Vla group of the periodic table, boron-containing hard material compounds and / or oxidic compounds of aluminum and / or zirconium.
  • the layer thickness of a single layer is between 0.1 ⁇ m and a maximum of 10 ⁇ m.
  • the total layer thickness of a multilayer coating should preferably be ⁇ 20 ⁇ m.
  • the residual compressive stresses are measured by X-ray analysis using the sin 2 ⁇ method.
  • the method is described, for example, in the publication HTM43 (1988) 4, pages 208 to 211, "Roentgenographic residual stress measurements on texture-based PVD layers made of titanium carbide" by B. Eigenmann, B. Scholtes and E. Macherauch.
  • the residual stress values measured according to the invention are achieved on at least one grid level.
  • the proposed beam treatment covers at least the entire cutting area of a cutting insert used for the respective machining operations.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

La présente invention concerne un procédé servant à augmenter la résistance à la compression ou à limiter la contrainte de traction interne d'une couche à résistance mécanique élevée, externe ou la plus externe, appliqué par CVD, PCVD ou PVD sur un corps substrat en métal dur, en cermet ou en céramique. Selon ledit procédé, le corps substrat revêtu, après application du revêtement, est exposé à un traitement de grenaillage à sec par utilisation d'un agent de grenaillage granuleux dont le diamètre maximal de grain vaut 150 νm selon l'invention.
EP01991711A 2001-03-27 2001-12-22 Procede servant a augmenter la resistance a la compression ou a limiter la contrainte de traction interne d'une couche appliquee par cvd, pcvd ou pvd, et piece coupante d'usinage Withdrawn EP1311712A2 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE10115201 2001-03-27
DE10115201 2001-03-27
DE10123554 2001-05-15
DE10123554A DE10123554B4 (de) 2001-03-27 2001-05-15 Verfahren zur Erhöhung der Druckspannung oder zur Erniedrigung der Zugeigenspannung einer CVD-, PCVD- oder PVD-Schicht und Schneideinsatz zum Zerspanen
PCT/DE2001/004952 WO2002077312A2 (fr) 2001-03-27 2001-12-22 Procede servant a augmenter la resistance a la compression ou a limiter la contrainte de traction interne d'une couche appliquee par cvd, pcvd ou pvd, et piece coupante d'usinage

Publications (1)

Publication Number Publication Date
EP1311712A2 true EP1311712A2 (fr) 2003-05-21

Family

ID=26008930

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01991711A Withdrawn EP1311712A2 (fr) 2001-03-27 2001-12-22 Procede servant a augmenter la resistance a la compression ou a limiter la contrainte de traction interne d'une couche appliquee par cvd, pcvd ou pvd, et piece coupante d'usinage

Country Status (3)

Country Link
US (1) US6884496B2 (fr)
EP (1) EP1311712A2 (fr)
WO (1) WO2002077312A2 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1696051A1 (fr) 2005-02-25 2006-08-30 Sandvik Intellectual Property AB Plaquette pour outil de coupe à revêtement
EP1867755A2 (fr) 2006-06-16 2007-12-19 Sandvik Intellectual Property AB Outil de coupe revêtu
WO2008031768A1 (fr) 2006-09-15 2008-03-20 Sandvik Intellectual Property Ab Outil de découpe revêtu
EP2287359A1 (fr) 2009-07-03 2011-02-23 Sandvik Intellectual Property AB Plaquette de coupe enrobée

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EP1696051A1 (fr) 2005-02-25 2006-08-30 Sandvik Intellectual Property AB Plaquette pour outil de coupe à revêtement
EP1867755A2 (fr) 2006-06-16 2007-12-19 Sandvik Intellectual Property AB Outil de coupe revêtu
WO2008031768A1 (fr) 2006-09-15 2008-03-20 Sandvik Intellectual Property Ab Outil de découpe revêtu
EP2287359A1 (fr) 2009-07-03 2011-02-23 Sandvik Intellectual Property AB Plaquette de coupe enrobée

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WO2002077312A2 (fr) 2002-10-03
US20030104254A1 (en) 2003-06-05
US6884496B2 (en) 2005-04-26

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