EP1290484A2 - Mikroskopisches prüfsystem - Google Patents
Mikroskopisches prüfsystemInfo
- Publication number
- EP1290484A2 EP1290484A2 EP01929949A EP01929949A EP1290484A2 EP 1290484 A2 EP1290484 A2 EP 1290484A2 EP 01929949 A EP01929949 A EP 01929949A EP 01929949 A EP01929949 A EP 01929949A EP 1290484 A2 EP1290484 A2 EP 1290484A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- electrical circuit
- inspection system
- lens
- interest
- operative
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
Definitions
- the present invention relates to electrical circuit inspection systems generally and more particularly to electrical circuit inspection systems having automatic focus and zoom functionality.
- Magnifying video camera systems having automatic focus and zoom functionality are known in the art.
- systems of this type employ microscopes having such functionality upstream of the eyepiece. Such microscopes are complicated and very expensive.
- the present invention seeks to provide an electrical circuit inspection system which provides zoom and/or automatic focus functionality and employs standard optical components and which is substantially less expensive than prior art systems.
- an electrical circuit inspection system comprising a lens preferably operative to image substantially at infinity light received from a portion of interest in an electrical circuit; a zoom video camera assembly receiving light imaged substantially at infinity from the lens; and a display preferably operative to receive a video output from the zoom video camera assembly and to display a magnified image of the portion of interest.
- the electrical circuit inspection system also includes a first stage lens preferably operative to view the portion of interest and to focus light therefrom onto a focal plane of the lens.
- the first stage lens is a relay lens preferably operative to provide a non-magnified image of a portion of interest in an electrical circuit.
- the first stage lens is an objective lens preferably operative to provide a magnified image of a portion of interest in an electrical circuit..
- the electrical circuit inspection system includes a positioner preferably operative to position the electrical circuit such that a portion of interest is viewed through the lens and preferably the positioner is operated by an output received from an automated optical inspection system which identifies regions of the electrical circuit thought possibly to include defects.
- the electrical circuit inspection system includes a positioner preferably operative to position the electrical circuit such that a portion of interest is viewed through the first stage lens and preferably the positioner is operated by an output received from an automated optical inspection system which identifies regions of the electrical circuit thought possibly to include defects.
- the electrical circuit inspection includes a positioner preferably operative to position the electrical circuit such that a portion of interest is viewed through the relay lens and preferably the positioner is operated by an output received from an automated optical inspection system which identifies regions of the electrical circuit thought possibly to include defects.
- an electrical circuit inspection system including a lens preferably operative to substantially image at infinity light received from a portion of interest in an electrical circuit; an auto-focus video camera assembly receiving light imaged substantially at infinity from the lens; and a display preferably operative to receive a video output from the auto-focus video camera and to display an automatically focused image of the portion of interest in an electrical circuit.
- the electrical circuit inspection system also includes a first stage lens preferably operative to view the portion of interest in the electrical circuit and to focus light therefrom onto a focal plane of the lens.
- the first stage lens is a relay lens preferably operative to provide a non-magnified image of a portion of interest in an electrical circuit.
- the first stage lens is an objective lens preferably operative to provide a magnified image of a portion of interest in an electrical circuit.
- the electrical circuit inspection system includes a positioner preferably operative to position the electrical circuit such that a portion of interest is viewed through the lens and preferably the positioner is operated by an output received from an automated optical inspection system which identifies regions of the electrical circuit thought possibly to include defects.
- the electrical circuit inspection system includes a positioner preferably operative to position the electrical circuit such that a portion of interest is viewed through the first stage lens and preferably the positioner is operated by an output received from an automated optical inspection system which identifies regions of the electrical circuit thought possibly to include defects.
- the electrical circuit inspection system includes a positioner preferably operative to position the electrical circuit such that a portion of interest is viewed through the relay lens and preferably the positioner is operated by an output received from an automated optical inspection system which identifies regions of the electrical circuit thought possibly to include defects.
- an electrical circuit inspection system including a lens preferably operative to substantially image at infinity light received from a portion of interest in an electrical circuit; a zoom and automatic focus video camera assembly receiving light imaged substantially at infinity from the lens; and a display preferably operative to receive a video output from the zoom and automatic focus video camera and to display a magnified and automatically focused image of the portion of interest.
- the electrical circuit inspection system also includes a first stage lens preferably operative to view the portion of interest and to focus light therefrom onto a focal plane of the lens.
- the first stage lens is a relay lens preferably operative to provide a non-magnified image of a portion of interest in an electrical circuit.
- the first stage lens is an objective lens preferably operative to provide a magnified image of a portion of interest in an electrical circuit.
- the electrical circuit inspection includes a positioner preferably operative to position the electrical circuit such that a portion of interest is viewed tlirough the lens and preferably the positioner is operated by an output received from an automated optical inspection system which identifies regions of the electrical circuit thought possibly to include defects.
- the electrical circuit inspection system includes a positioner preferably operative to position the electrical circuit such that a portion of interest is viewed tlirough the first stage lens and preferably the positioner is operated by an output received from an automated optical inspection system which identifies regions of the electrical circuit thought possibly to include defects.
- the electrical circuit inspection system includes a positioner preferably operative to position the electrical circuit such that a portion of interest is viewed through the relay lens and preferably the positioner is operated by an output received from an automated optical inspection system which identifies regions of the electrical circuit thought possibly to include defects.
- an inspection system including a lens preferably operative to image substantially at infinity light received from a region of interest, a zoom and/or automatic focus video camera assembly receiving light from the lens imaged substantially at infinity and a display preferably operative to receive a video output from the zoom and/or automatic focus video camera and to display a magnified image of the region of interest.
- Fig. 1 is a simplified pictorial illustration of an electrical circuit inspection system constructed and operative in accordance with a preferred embodiment of the present invention
- FIGs. 2A & 2B are simplified illustrations of two embodiments of the system of Fig. 1 ;
- Figs. 3 A & 3B are simplified optical illustrations of the embodiments of Figs. 2 A & 2B respectively.
- FIG. 1 is a simplified pictorial illustration of an electrical circuit inspection system constructed and operative in accordance with a preferred embodiment of the present invention.
- an output from an automatic optical inspection station 10 is received by a positioner 12 which suitably positions an electrical circuit, such as a printed circuit board 14, under a microscope 16.
- the automatic optical inspection station 10 may be any suitable automatic optical inspection station and is preferably a Model PC Micro II commercially available from
- the positioner 12 may be any suitable positioner and is preferably a positioner such as that incorporated in a Model VRS 4M, commercially available from Orbotech, Ltd. of Yavne, Israel.
- a lens forming part of microscope 16 receives light from a portion 17 of the printed circuit board 14, to which an operator's attention is directed by the output from the automatic optical inspection station 10 which suitably positions that portion in the field of view of the microscope 16.
- a zoom and/or automatic focus video camera assembly 18 forming part of the microscope 16 is disposed downstream of the lens to receive light from the lens that is substantially imaged at infinity so as to be substantially collimated.
- a display 20 receives a video output from the camera assembly 18 and displays a magnified image of the portion 17 of the printed circuit board 14 in which a defect is believed to possibly exist so that the operator may decide whether the defect is a real defect or a false alarm.
- the camera assembly 18 is preferably a Sony Model FCB-1X47P which provides both zoom and automatic focus functionality.
- the display 20 may be any suitable high resolution display, such as a Model PVM-14M4E 14" Sony color video monitor.
- Figs. 2A & 2B are simplified illustrations of two embodiments of the system of Fig. 1.
- a lens which is preferably a first stage lens such as a relay objective lens 22, and subsequently via an eyepiece 24.
- Light from the eyepiece 24 is received by camera assembly 18, typically including its own viewing optics 19, which provides an output to display 20.
- a preferred relay objective lens 22 is a Carl Zeiss S-Planar 74mm f/4 lens and a preferred eyepiece is a Leitz Wetzlar Periplan GW 6.3x 39.7 mm lens.
- Fig. 2B illustrates an alternative embodiment of the invention, wherein the relay objective lens 22 is obviated and an infinity corrected objective lens 34 is employed.
- the printed circuit board 14 is placed substantially in the focal plane of infinity corrected objective lens 34 to form an image substantially at infinity.
- the image formed by infinity corrected objective lens 34 can be viewed directly by camera assembly 18 provided that viewing optics 19 are employed.
- microscope 16 In the embodiment of Fig. 2B, due to the absence of relay objective lens 22, microscope 16 must be placed much closer to the printed circuit board 14 as compared to the embodiment of Fig. 2A.
- relay objective lens 22 whose focal point is indicated as FI, is preferably separated from the printed circuit board 14 by a distance of about 148 mm.
- the eyepiece 24 is preferably separated from the relay objective lens 22 by 187.7 mm and its focal point is indicated as F2.
- relay objective lens 22 preferably is located a distance of 2xFl from the surface being viewed of printed circuit board 14, and that the focal point F2 of eyepiece 24 adjacent the relay objective lens 22 is located at a distance of 2xFl from the relay objective lens 22.
- relay objective lens 22 may be substituted by any suitable objective lens operative to form an intermediate image in the vicinity of focal plane f2 of eyepiece 24, and that such intermediate image may be with or without magnification.
- Fig. 3 A also illustrates viewing optics 19 and a CCD focal plane 28 of camera assembly 18 (Fig. 2A).
- the focal length of viewing optics 19 is indicated as F3.
- the focal length ratio between viewing optics 19 and eyepiece 24 is such that a 2 - 3 times magnification is produced at the focal plane 28.
- infinity corrected objective lens 34 whose focal point is indicated as F4, is preferably separated from the printed circuit board 14 by the focal length f4.
- Fig. 3B also illustrates viewing optics 36 and a CCD focal plane 38 of camera assembly 18.
- the focal length ration between viewing optics 36 and objective lens 34 is such that 2 - 3 times magnification is produced at the focal plane 38.
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US57097200A | 2000-05-15 | 2000-05-15 | |
US570972 | 2000-05-15 | ||
PCT/IL2001/000410 WO2001088592A2 (en) | 2000-05-15 | 2001-05-10 | Microscope inspection system |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1290484A2 true EP1290484A2 (de) | 2003-03-12 |
Family
ID=24281811
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01929949A Withdrawn EP1290484A2 (de) | 2000-05-15 | 2001-05-10 | Mikroskopisches prüfsystem |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1290484A2 (de) |
JP (1) | JP2003533731A (de) |
AU (1) | AU2001256624A1 (de) |
IL (1) | IL152640A0 (de) |
TW (1) | TW468033B (de) |
WO (1) | WO2001088592A2 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6781687B2 (en) | 2002-09-26 | 2004-08-24 | Orbotech Ltd. | Illumination and image acquisition system |
US7203355B2 (en) | 2002-12-24 | 2007-04-10 | Orbotech Ltd. | Automatic optical inspection system and method |
US7355692B2 (en) | 2004-03-05 | 2008-04-08 | Orbotech Ltd | System and method for inspecting electrical circuits utilizing reflective and fluorescent imagery |
DE102009012707A1 (de) | 2009-03-11 | 2010-09-16 | Carl Zeiss Microlmaging Gmbh | Mikroskop mit mehreren optischen Systemen im Abbildungsstrahlengang |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4845558A (en) * | 1987-12-03 | 1989-07-04 | Kla Instruments Corporation | Method and apparatus for detecting defects in repeated microminiature patterns |
JPH05196568A (ja) * | 1992-01-17 | 1993-08-06 | Japan Ii M Kk | 鍍金検査装置 |
US5741171A (en) * | 1996-08-19 | 1998-04-21 | Sagitta Engineering Solutions, Ltd. | Precision polishing system |
US5966677A (en) * | 1997-02-28 | 1999-10-12 | Fiekowsky; Peter J. | High accuracy particle dimension measurement system |
US5912735A (en) * | 1997-07-29 | 1999-06-15 | Kla-Tencor Corporation | Laser/white light viewing laser imaging system |
US6292306B1 (en) * | 1999-05-19 | 2001-09-18 | Optical Gaging Products, Inc. | Telecentric zoom lens system for video based inspection system |
-
2000
- 2000-05-29 TW TW089110322A patent/TW468033B/zh not_active IP Right Cessation
-
2001
- 2001-05-10 WO PCT/IL2001/000410 patent/WO2001088592A2/en not_active Application Discontinuation
- 2001-05-10 JP JP2001584927A patent/JP2003533731A/ja active Pending
- 2001-05-10 IL IL15264001A patent/IL152640A0/xx unknown
- 2001-05-10 EP EP01929949A patent/EP1290484A2/de not_active Withdrawn
- 2001-05-10 AU AU2001256624A patent/AU2001256624A1/en not_active Abandoned
Non-Patent Citations (1)
Title |
---|
See references of WO0188592A3 * |
Also Published As
Publication number | Publication date |
---|---|
WO2001088592A2 (en) | 2001-11-22 |
JP2003533731A (ja) | 2003-11-11 |
WO2001088592A3 (en) | 2002-08-15 |
TW468033B (en) | 2001-12-11 |
AU2001256624A1 (en) | 2001-11-26 |
IL152640A0 (en) | 2004-02-19 |
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Legal Events
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
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18W | Application withdrawn |
Effective date: 20030313 |