TW468033B - Microscope inspection system - Google Patents

Microscope inspection system Download PDF

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Publication number
TW468033B
TW468033B TW89110322A TW89110322A TW468033B TW 468033 B TW468033 B TW 468033B TW 89110322 A TW89110322 A TW 89110322A TW 89110322 A TW89110322 A TW 89110322A TW 468033 B TW468033 B TW 468033B
Authority
TW
Taiwan
Prior art keywords
circuit
inspection system
lens
patent application
interest
Prior art date
Application number
TW89110322A
Other languages
Chinese (zh)
Inventor
Yigal Katzir
Demitry Gorlik
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US57097200A priority Critical
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Application granted granted Critical
Publication of TW468033B publication Critical patent/TW468033B/en

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/0016Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361Optical details, e.g. image relay to the camera or image sensor

Abstract

An electrical circuit inspection system including an eyepiece operative to collimate light received from a portion of interest in an electrical circuit, a zoom and/or automatic focus video camera assembly receiving collimated light from the eyepiece and a display operative to receive a video output from the zoom video camera and to display a magnified image of the portion of interest.

Description

4 6 8033 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 --------- B7__ V. Description of the invention (1) The field of invention is broad and simple: the present invention relates to a circuit inspection system and in particular to an autofocus system. And zoom function circuit inspection system. BACKGROUND OF THE INVENTION Various types of circuit viewing systems are known in the industry. Usually does not include auto focus and zoom functions. Magnified video camera systems with autofocus and zoom are known in the industry. It is known that these types of systems use a microscope with this function upstream of the eyepiece. Such microscopes are complex and extremely expensive. As manufacturing technology progresses, the line width of the circuit is gradually narrowing, and the importance of precise focusing in the viewing system is gradually increasing. SUMMARY OF THE INVENTION The present invention seeks to provide a circuit inspection system that has zoom and / or autofocus functions, uses standard optical components, and is substantially cheaper than prior art systems. Thus, a circuit inspection system according to a preferred embodiment of the present invention includes a lens that is preferably operable to substantially infinitely image light received from a portion of interest of the circuit; a zoom video camera assembly receives substantially no ' The imaging light obtained from the lens is limited; and a display is preferably operable to receive the video output from the zoom video camera assembly and display an enlarged image of the portion of interest. According to a preferred embodiment of the present invention, the circuit inspection system also includes a first-stage lens which is preferably operable to view the portion of interest and focus the light from the portion fe to the focal plane of the lens. In addition, according to a preferred embodiment of the present invention, the first-level lens is a -4- paper size 剌 Guan Jia Pi (CNS) A4 specification (210 X 297 public love) (Please read the precautions on the back before (Filling page)

V. Description of the invention (2 Printed by the Intellectual Property Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs 468033 Operable and provide interesting parts of the circuit-not magnified. The second-level lens provides the circuit with the objective lens for better operation. One of the images is enlarged. Root: Xinming (the preferred embodiment 'the circuit inspection system includes a certain ^ better operable and positioning circuit, so viewing the part of interest through the lens, and The output operation received by the automated optical inspection system is to identify an area in the automated optical inspection system that may be considered to contain defects. Another: '?. According to a preferred embodiment of the present invention, the circuit inspection system includes a bit Device, preferably operable and positioning circuit, viewed by the first-level lens, and can be used by the user to obtain the output from the automated photon $. Its identification may include defects. Circuit area operation. In addition, according to a preferred embodiment of the present invention, the circuit inspection system includes a foot positioner, which is preferably operable to locate the circuit, so the portion of interest can be passed through. Following lens viewing, and the preferred positioner can be operated from an automated optical viewing system (outputting circuit regions whose identification may include flaws). Thus, a circuit inspection system is provided according to a preferred embodiment of the present invention, including- The lens is preferably operable and substantially infinite imaging is connected to the light of interest; an autofocus video camera assembly is penetrated: substantially infinite imaging light; and a display is preferably operable to receive autofocus According to the preferred embodiment of the present invention, the circuit inspection system also covers the video output of the video camera and the auto-focus image of the electrical interest portion. The first-level lens is preferably operable while viewing the circuit. Copy and Focus 5- This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm (please read the precautions on the back before filling this page)

468033 Printed by A7 B7, Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (3 Light from it to the focal plane of the lens. In addition, according to the present invention jealousy # H 1. A grade lens is a relay lens: 'Jia can be operated to provide an unenlarged image of the circuit's interesting portion, and a grade lens is an objective lens, which is preferably operable to provide an enlarged image of the circuit's interesting portion. = J According to the present invention In a preferred embodiment, the circuit inspection system includes the following :: 益, it is better to operate and locate the circuit, so that the part of interest can be received by ^ 'Grasp Shangan ... The output of the inspection system is identified by Man Liang Ke A11, and τ Λ is regarded as an output operation that can include the defective area. In addition, 'Better according to the present invention and body sound + office rights ,, In the case of a real crime, the circuit inspection system includes a positioner 'better can be extremely expensive-factory A spit out bismuth and bit the circuit, so that the part of interest can be passed through the first-level lens De (man ,, v ^ + And better positioners can be received from the automatic optical inspection system It discriminates two zero, Japanese &,.: Circuits are considered to be possible to cover the output operation of the defective area. According to a preferred embodiment of the present invention, the circuit inspection system is more efficient, and is preferably operable for positioning. Circuit, so that the part of interest can be viewed through the relay lens, and a better locator can be received from the output of the automatic optical inspection system JL to avoid drinking φ J w /, the circuit is regarded as an operation that may include defective areas According to a preferred embodiment of the present invention, a circuit inspection system is provided including: a lens is preferably operable and substantially infinite imaging is received from the circuit of light of interest; a zoom and autofocus video camera assembly: since Lens's virtually infinite imaging g§ _ ^ ^ Wood •. Gong Baoyou, and a poorly operable display to receive a video and display output from a zoom and autofocus video camera --------- -----------!., Install ----- ί fjing first read the note on the back before filling out this page)

I · _

4 6 8033 A7 V. Description of the invention (-The magnified and auto-focused image of the part of interest. The preferred embodiment of the month, the circuit inspection system also includes an operable to view the part of interest and focus on it first. To the focal plane of the lens. Following =: 4: According to the preferred embodiment of the invention, the first-stage lens is an unenlarged image of the circuit's interesting part. For the objective lens, it is better to operate and provide electrical and magnified images. ^^ According to the preferred embodiment of the present invention, the circuit inspection includes a certain amount. Two or four yttrium can be used to locate the circuit so that the part of interest can be passed The lens viewing and the preferred positioner can be operated by receiving from an automatic optical inspection system, which can identify areas in the circuit that may be considered to contain defects. Also according to a preferred embodiment of the present invention The circuit inspection includes a locator which is better operable and a locating circuit, so that the part of interest can be viewed through the first lens, and the preferred locator can be operated by an output received from an automatic optical inspection system, the output can be identified Electricity It is considered that the road may contain sore areas. In addition, according to a preferred embodiment of the present invention, the circuit inspection includes a locator which is preferably operable to locate the circuit, so that the part of interest can be viewed through the relay lens. The video and the preferred locator can be operated from the output of the automatic optical inspection system, which can identify the area in the circuit that may be considered to include defects. Thus, an inspection system is provided according to a preferred embodiment of the present invention. The size of this paper is 1f 圏 _tsuka standard (CNS) A4 specification (21〇χ 297 mm) (Please read the precautions on the back before filling this page) " i --- ΓΙ1 Order ---- I --- record,

V Printed by the Consumers 'Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 46 B033 Patent Application No. 89110322 Patent Document Correction Sheet (November 89) A7 V. Description of the Invention (5 Revision: Supplement Ά Β Include a lens' preferable operation The actual μ. ^ ΓΊΓΤΤ ^, 々 is above, .'Limit imaging to receive light from the area of interest '-zoom and / or autofocus video camera assembly receives substantially infinite imaging light, and-the display is more It can be operated by connecting the video output from the zoom and / or autofocus video camera and displaying the enlarged image of the area of interest. ~ 简单 Brief description of the drawings The detailed description will be described later together with the accompanying drawings to better understand the present invention. In the drawings: FIG. 1 is a simplified diagram of a circuit inspection system structured and operated according to a preferred embodiment of the present invention; FIGS. 2A and 2B are simplified explanatory diagrams of the second embodiment of the system of FIG. 1; 3A and 3B are simplified optical illustrations of the specific embodiments of Figs. 2A and 2B, respectively. Representative symbols of main components / 10 Automatic optical inspection station 12 Positioner 14 Printed circuit board 16 Microscope 17 Print Part of the circuit board 14/18 Camera assembly 19 Viewing optical device 20 Display 8-This paper size applies to Chinese National Standard (CNS) A4 specification (2! 0X297 mm) f Please read the precautions on the back before filling in this Page] Order printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 46 8033 A7 ------- B7___ 5. Description of the invention (6) '--The lens forming part of the microscope 16 receives light from the printed circuit ㈣ ㈣, The operator's attention is directed to the part through the output from the automatic optical inspection station 10, and the automatic optical inspection station appropriately positions the part in the field of view of the microscope 16. According to the present invention, it is better and more convenient In the embodiment, a zoom and Q autofocus video camera assembly ^ forming a microscope component is arranged downstream of the lens to receive light from the lens, and the light is substantially infinitely imaged and thus substantially parallel. A display 20 receives the output from the camera assembly 18 Video, as well as the display of the printed circuit board, which is believed to be defective, and the part is enlarged. Therefore, the operator can decide whether the defect is an actual defect or a false alarm. According to a preferred embodiment of the present invention, the camera assembly 18 is preferably a new force model FCB-1X47P which provides zoom and auto-air function. The display 20 may be any suitable resolution display such as model pVM-14M4E 14 & quot Xinli color video monitor. Now refer to FIGS. 2A and 2B, which are simplified explanatory diagrams of the specific embodiment of the system of FIG. 1. As shown in FIG. 2A, the printed circuit board 1 4 of interest 1 7 The 'view through lens' lens is preferably a first stage lens or relay objective lens 22, and then viewed through the eyepiece 24. The light from the eyepiece 24 is received by the camera assembly 18. The camera typically includes its own viewing optics 19 which includes output to a display 20. The preferred relay objective 22 is Carl Zeiss S-plane 74 mm f / 4 lens and the preferred eyepiece is Leitz Wetzlar Periplan GW 6.3 X 3 9 · 7 mm lens. Figure 2B illustrates an alternative embodiment of the present invention, which can be waived * 9-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 2 mm) (谞 Please read the notes on the back before filling This page) \ Install! Τ'Order -------- Therefore-Printed A7 B7 468033 Patent Application No. 8911〇322 by the Consumer Cooperatives of the Ministry of Economy Intellectual Property Co., Ltd. Revised Chinese Manual (November 89) V. Description of Invention (7 ) Turn to "2" and follow the objective lens 2 2 and use the infinite correction objective lens 3 4. The printed circuit board 14 is substantially placed on the focal plane of the infinity-corrected objective lens 34 to form a substantially infinite image ^ The image formed by the infinity-corrected objective lens 34 can be viewed directly by the camera assembly 18, but viewing optics must be used 1 9. In the specific embodiment of FIG. 2B, since there is no relay objective lens 22, the microscope 16 needs to be placed far closer to the printed circuit board 14 than the specific embodiment of FIG. 2A. Reference is now made to Figs. 3A and 3B 'which are simplified optical illustrations of the specific embodiment of Figs. 2A and 2B, respectively. Referring to FIG. 3A, it can be seen that the focal point of the relay objective lens 2 2 is F 1, and it is preferably separated from the printed circuit board 4 by a distance of about 148 mm. The eyepiece 24 is preferably spaced 187.7 mm from the relay objective lens 22, and its focus indication is F2. Note that the relay objective 2 2 is located at a distance of 2 X FI from the viewing plane 2 of the printed circuit board. 4 The focus F 2 of the eyepiece 2 4 adjacent to the relay objective 2 2 is located at 22 2 XF from the relay objective. i distance. It should be understood that the relay objective lens 22 may be replaced with any suitable objective lens ‘the objective lens is operable to form an intermediate image near the focal plane f 2 of the eyepiece 24’ and whether such intermediate image may be magnified. Figure 3A also illustrates the viewing optics 19 and the CCD focal plane 28 of the camera assembly 18 (Figure 2A). The focal length of the viewing optical device 19 is denoted as F3. The focal length ratio of the viewing optics 19 and the eyepiece 24 is preferably 2-3 times larger than the focal plane 28. Referring to FIG. 3B, it can be seen that the infinity-corrected objective lens 3 4 has its focus shown at ρ · 4, and is preferably separated from the printed circuit board 1 4 by the focal length f 4 distance = FIG. 3 B also illustrates the viewing optics 3 of the camera assembly 丨 8 as an example. 6 and CCD focal plane 3 8. It is preferable that the focal distance ratio between the viewing optical device 36 and the objective lens 34 is 2 to 3 times the magnification at the focal plane 38. -10- This paper size applies to China National Standard (CNS) A4 (210X297). ≪ Please read the precautions on the back before filling this page)

-— ^ 1 ^^^ 1 ——-, r HI n ^ i ^^^ 1 Hi '^^^ 1 1--I ir ------ 1 ^ 1. Consumption by Male Workers, Central Bureau of Standards, Ministry of Economic Affairs Printed by a cooperative

d68〇33 V. Description of the invention (8) It should be understood that although the present invention has been described specifically with regard to the contents of the circuit inspection device, the present invention is equally applicable to any other types of video microscope uses, systems, and methods. Those skilled in the art understand that the present invention is not limited to the foregoing special display and description. Instead, the scope of the present invention includes the combinations and sub-combinations of the aforementioned various features, and apparently "a variety of modifications and changes that are not part of the prior art." Please read the precautions on the back before filling out this page). ----.--- Order ----- Online, printed by the Consumers' Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs, this paper is printed in accordance with National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

  1. A8B8C8D8 4 6 8 〇3 3 6. Scope of patent application1. A circuit inspection system, including: a lens operable to substantially A, ',, and limit imaging received from the interesting part of a circuit J01; ^- The zoom video camera assembly can receive light from the lens for imaging; and, the display VS can work to receive one of the videos and displays output by the zoom video camera assembly—a large image of the part of interest. 2. If the circuit inspection system of item i of the patent application scope also includes-the first-level transparent operation is available to view the part of interest and focus the light from that part to the focal plane of the lens. 3. The circuit inspection system of item 2 of the patent scope of Rushen #qing, wherein the _ stage lens is an relay lens operable to provide an unmagnified image of an interesting part of the circuit. 4. The circuit inspection system according to item 2 of the patent application, wherein the first stage lens is operable to provide an enlarged image of an interesting part of the circuit. 5 ‘The circuit inspection system of item 丨 of the scope of patent application also includes a locator " T known operation, and the circuit is positioned so that the part of interest can be viewed through the lens. 6. If the circuit inspection system of item 5 of the patent application scope, wherein the positioner can be recognized by an automatic optical inspection system, it is considered that the output operation of the circuit area may include defects. 7. If the circuit inspection system of the second item of the scope of the patent application also contains ~ the positioner can be operated to locate the circuit, so the part of interest can be passed through the first -12 paper rule of the country of wealth (21〇_χ · 297 public love) (Please read the precautions on the back before filling out this page), ^ ------ ΓII .. Order --------- line, printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs System 46Θ033 B8 Cfi I --------- 6. Scope of patent application --- Class lens viewing. 8_ If the application is called the circuit inspection system of item 7 of the patent scope, which can be received by the automatic optical inspection system to identify the output operation of the circuit area that is considered to be defective. Included flaws 9. If applied: The circuit inspection system of item 3 of the patent scope also includes a locator that can be positioned for 4 results ^ ζτ v *, the heart u side circuit, so the part of interest can be viewed through the relay lens See. '10. The circuit inspection system of claim 9 in the patent scope, wherein the positioner can be operated by the output of the circuit area identified by an automatic optical inspection system as being likely to include defects. 11. A circuit inspection system comprising: a lens operable for substantially infinite imaging receiving light from a portion of interest of a circuit; an autofocus video camera assembly capable of receiving substantially infinite imaging light from a lens; and a display It is operable to receive the video output by the autofocus video camera and the autofocus image of a portion of interest of the display circuit. 12. For example, the circuit inspection system for patent application No. 1 丨 also includes a first-level lens that can be operated to view the interested part of the circuit and focus the light from the Shao Fen to the focal plane of the lens. 13. For the circuit inspection system according to item 12 of the patent application scope, wherein the first-level lens is a relay lens operable to provide a reference magnified image of an interesting portion of the circuit. 14. If you apply for the circuit inspection system of item 12 in the scope of patent application, where the level-13-this paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) I〆.- '- ---. 1 ---- Order ------- ---. F Jing first read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Α8 Β8 C8 D8 VI. Application The patent range lens is an objective lens that can be operated to provide a magnified image of an interesting portion of a circuit. 15. If the circuit inspection system of item 11 of the patent application scope also includes a certain position, the circuit can be positioned so that the part of interest can be viewed through the lens. 16. The circuit inspection system according to item 15 of the patent application scope, wherein the positioner can be operated by an output of the circuit area identified by an automatic optical inspection system as being likely to include a defect. 17. For example, the circuit inspection system for item 2 of the patent application scope also includes a certain positioner that can be operated to locate the circuit, so the part of interest can be viewed through the first-level lens. The circuit inspection system of the patent application No. 17 in which the positioner can be operated by the output of the circuit area identified by an automatic optical inspection system that may be considered to include defects. 19. For example, the circuit inspection system of Item 3 of the patent application park also contains a certain bit that can be operated to position the circuit, so the interested part can be viewed through the relay lens. 20. = Circuit inspection system of the scope of application for patent No. 19, wherein the positioner can be operated by the output of the circuit area recognized by the automatic optical inspection system as being likely to include defects. 21. —A circuit inspection system comprising: a lens operable for virtually infinite imaging to receive light from a portion of interest of a circuit; a zoom and autofocus video camera assembly capable of receiving -14 from the lens (please (Please read the notes on the back before filling this page) Take _ 丨 -------- '• Order ---- I! Line T Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs Consumer Cooperatives M Public 7 9 2 X ο ΙΑ f \ T r: yΊ, J \ 丁 II [468033 A8 B8 C8 ___ D8 VI. Patent application scope Intellectual Property Bureau of the Ministry of Economic Affairs employee consumer cooperative prints virtually unlimited imaging light; and a display is operable to receive the light from the The zoom and autofocus video camera outputs a superb video and displays an enlarged image of the part of interest and moves the focused image. < and the circuit inspection system of item 21 of the scope of patent application, which also includes a first-order lens operable to view the portion of interest and focus the light from the portion to the focal plane of the lens. 23. The circuit inspection system according to item 22 of the patent application scope, wherein the first-stage lens is a relay lens operable to provide an unmagnified image of an interesting portion of the circuit. 24. For example, the circuit inspection system of the 22nd patent application scope, wherein the first-level lens is an objective lens operable to provide an enlarged image of an interesting part of the circuit. 25. If the circuit inspection system of item 2 i of the patent application park also includes a certain positioner that can be operated to locate the circuit so that the part of interest can be viewed through the lens. Shen Ru's patent application for the circuit inspection system of the Fanyuan Item 25, wherein the positioner can be recognized by an automatic optical inspection system that the output operation of the circuit area that may include flaws 5 27. Such as the patent application Fanyuan The circuit inspection system of item 22 also includes-the fixer can be operated to locate the circuit, so the part of interest can be viewed through the first stage lens. Patent application · Scope 27 circuit inspection system, in which the positioner can be recognized by the identification received from an automatic optical inspection system and may include -15-
    (Please read the precautions on the back before filling this page) '-^ --------- ^ Order · 4' 4 6 8033 A8B8C8D8 VI. Patent Application Scope The output operation of this circuit area. 29. For example, the circuit inspection system of the scope of application for patent No. 23 also includes-the positioner can be operated to locate the circuit, so the interested part can be viewed through the relay lens. 30. For example, the circuit inspection system of the patent application No. 29, wherein the positioner can be recognized by the automatic optical inspection system that it may include the output operation of fetching the line of #HI circuit area. 31.-Specimen inspection includes-lens operable with substantial ± infinity imaging received from-zoom and / or autofocus video camera assembly of the region of interest receiving substantially infinite imaging light from the lens' and a display Operated to receive a video output from the zoom and / or autofocus video camera and display an enlarged image of a region of interest. (Please read the precautions on the back before filling out this page): ._. ', Clothing -------- order --------- Green Ji_ Intellectual Property Office of the Ministry of Economic Affairs, Consumer Consumption Du Yin -16- The meaning of this paper is applicable to China Store Standard (CNS) A4 (210 X 297 mm)
TW89110322A 2000-05-15 2000-05-29 Microscope inspection system TW468033B (en)

Priority Applications (1)

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US57097200A true 2000-05-15 2000-05-15

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TW468033B true TW468033B (en) 2001-12-11

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EP (1) EP1290484A2 (en)
JP (1) JP2003533731A (en)
AU (1) AU5662401A (en)
IL (1) IL152640D0 (en)
TW (1) TW468033B (en)
WO (1) WO2001088592A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6781687B2 (en) 2002-09-26 2004-08-24 Orbotech Ltd. Illumination and image acquisition system
US7203355B2 (en) 2002-12-24 2007-04-10 Orbotech Ltd. Automatic optical inspection system and method
US7355692B2 (en) 2004-03-05 2008-04-08 Orbotech Ltd System and method for inspecting electrical circuits utilizing reflective and fluorescent imagery
DE102009012707A1 (en) 2009-03-11 2010-09-16 Carl Zeiss Microlmaging Gmbh Microscope with several optical systems in the imaging beam path

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4845558A (en) * 1987-12-03 1989-07-04 Kla Instruments Corporation Method and apparatus for detecting defects in repeated microminiature patterns
JPH05196568A (en) * 1992-01-17 1993-08-06 Japan Ii M Kk Plated metal inspection device
US5741171A (en) * 1996-08-19 1998-04-21 Sagitta Engineering Solutions, Ltd. Precision polishing system
US5966677A (en) * 1997-02-28 1999-10-12 Fiekowsky; Peter J. High accuracy particle dimension measurement system
US5912735A (en) * 1997-07-29 1999-06-15 Kla-Tencor Corporation Laser/white light viewing laser imaging system
US6292306B1 (en) * 1999-05-19 2001-09-18 Optical Gaging Products, Inc. Telecentric zoom lens system for video based inspection system

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WO2001088592A2 (en) 2001-11-22
IL152640D0 (en) 2004-02-19
AU5662401A (en) 2001-11-26
WO2001088592A3 (en) 2002-08-15
EP1290484A2 (en) 2003-03-12
JP2003533731A (en) 2003-11-11

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