IL152640A0 - Microscope inspection system - Google Patents

Microscope inspection system

Info

Publication number
IL152640A0
IL152640A0 IL15264001A IL15264001A IL152640A0 IL 152640 A0 IL152640 A0 IL 152640A0 IL 15264001 A IL15264001 A IL 15264001A IL 15264001 A IL15264001 A IL 15264001A IL 152640 A0 IL152640 A0 IL 152640A0
Authority
IL
Israel
Prior art keywords
inspection system
microscope inspection
microscope
inspection
Prior art date
Application number
IL15264001A
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Publication of IL152640A0 publication Critical patent/IL152640A0/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361—Optical details, e.g. image relay to the camera or image sensor
IL15264001A 2000-05-15 2001-05-10 Microscope inspection system IL152640A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US57097200A 2000-05-15 2000-05-15
PCT/IL2001/000410 WO2001088592A2 (en) 2000-05-15 2001-05-10 Microscope inspection system

Publications (1)

Publication Number Publication Date
IL152640A0 true IL152640A0 (en) 2004-02-19

Family

ID=24281811

Family Applications (1)

Application Number Title Priority Date Filing Date
IL15264001A IL152640A0 (en) 2000-05-15 2001-05-10 Microscope inspection system

Country Status (6)

Country Link
EP (1) EP1290484A2 (en)
JP (1) JP2003533731A (en)
AU (1) AU2001256624A1 (en)
IL (1) IL152640A0 (en)
TW (1) TW468033B (en)
WO (1) WO2001088592A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6781687B2 (en) 2002-09-26 2004-08-24 Orbotech Ltd. Illumination and image acquisition system
US7203355B2 (en) 2002-12-24 2007-04-10 Orbotech Ltd. Automatic optical inspection system and method
US7355692B2 (en) 2004-03-05 2008-04-08 Orbotech Ltd System and method for inspecting electrical circuits utilizing reflective and fluorescent imagery
DE102009012707A1 (en) 2009-03-11 2010-09-16 Carl Zeiss Microlmaging Gmbh Microscope with several optical systems in the imaging beam path

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4845558A (en) * 1987-12-03 1989-07-04 Kla Instruments Corporation Method and apparatus for detecting defects in repeated microminiature patterns
JPH05196568A (en) * 1992-01-17 1993-08-06 Japan Ii M Kk Plated metal inspection device
US5741171A (en) * 1996-08-19 1998-04-21 Sagitta Engineering Solutions, Ltd. Precision polishing system
US5966677A (en) * 1997-02-28 1999-10-12 Fiekowsky; Peter J. High accuracy particle dimension measurement system
US5912735A (en) * 1997-07-29 1999-06-15 Kla-Tencor Corporation Laser/white light viewing laser imaging system
US6292306B1 (en) * 1999-05-19 2001-09-18 Optical Gaging Products, Inc. Telecentric zoom lens system for video based inspection system

Also Published As

Publication number Publication date
JP2003533731A (en) 2003-11-11
AU2001256624A1 (en) 2001-11-26
WO2001088592A3 (en) 2002-08-15
EP1290484A2 (en) 2003-03-12
TW468033B (en) 2001-12-11
WO2001088592A2 (en) 2001-11-22

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