EP1273046A2 - Dispositif semi-conducteur du type diode schottky - Google Patents
Dispositif semi-conducteur du type diode schottkyInfo
- Publication number
- EP1273046A2 EP1273046A2 EP01923789A EP01923789A EP1273046A2 EP 1273046 A2 EP1273046 A2 EP 1273046A2 EP 01923789 A EP01923789 A EP 01923789A EP 01923789 A EP01923789 A EP 01923789A EP 1273046 A2 EP1273046 A2 EP 1273046A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- islands
- layer
- type
- schottky
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 40
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 230000004888 barrier function Effects 0.000 claims abstract description 8
- 238000009826 distribution Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 238000000407 epitaxy Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910001092 metal group alloy Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- ZONODCCBXBRQEZ-UHFFFAOYSA-N platinum tungsten Chemical compound [W].[Pt] ZONODCCBXBRQEZ-UHFFFAOYSA-N 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
- H01L29/0623—Buried supplementary region, e.g. buried guard ring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
Definitions
- the present invention relates to a semiconductor device and it relates more particularly to improvements made to diodes, of the Schottky type, or of the "J35 rectifier" type. Junction Bar ⁇ er Schottky rectifier; .
- the Schottky dio ⁇ es feels basically made of a metal or a metal alloy placed on a semiconductor.
- the diode consists of an active region of type N or of type?, Placed on a region of the same type, that is to say or?, But much more heavily doped.
- the metal making the Schottky contact constitutes the anode, while the other face of the substrate which is metallized and which constitutes an ohmic contact, is called the cathode.
- the sustained voltage withstand in reverse depends on the doping of the N-type or P-type zone, and the lower this is, the higher the voltage withstand.
- the limit of the withstand voltage is around 100 volts.
- the voltage drop in the on state is in fact the sum of the voltage drop in the semiconductor layer charge associated with the Schottky barrier, and the ohmic voltage drop in the semiconductor.
- the voltage drop values commonly encountered for Schottky diodes operating in the on state are of the order of 0.5 volts.
- Schottky diodes of the "JBS rectifier" type In order to improve the operating characteristics both in the blocked state and in the on state of the Schottky diodes, it has been necessary to design Schottky diodes of the "JBS rectifier" type. These second generation diodes are globally structurally identical to the preceding Schottky diodes, but are nevertheless distinguished by the fact that they comprise semiconductor mserts of a type contrary to the type of the semiconductor layer associated with the Schottky barrier.
- This arrangement makes it possible to limit the reduction mechanism of the Schottky barrier under high applied voltage and to limit the reverse current of the diode.
- the capacity withstand voltage of these devices can reach approximately 200 volts and the voltage drop, in the on state, is of the order of 0.25 volts.
- the present invention therefore aims to overcome the drawbacks of the devices known from the prior art, by proposing improvements to these devices, which make it possible to obtain improved operating characteristics, both in blocked mode and in on mode.
- a semiconductor device of the Schottky diode type comprising a substrate consisting of first and second semiconductor layers of the same type of conduction superimposed in said substrate, the second layer being more heavily doped. that the first, said substrate having first and second main surfaces in contact with first and second electrodes, a Schottky barrier being formed between said first electrode and said first layer, a plurality of islands of opposite conduction type to that of said first layer being arranged in beds spaces in the thickness of said layer.
- FIG. 1 illustrates the structure of a Schottky diode
- FIG. 2 illustrates the structure of a diode of the JBS type rectifier
- FIG. 3 illustrates the distribution of the electric field in an example of a structure comprising a volume floating island
- FIG. 4 shows the evolution of the order of magnitude of doping as a function of the number of islets contained in a semiconductor device ob and of the invention
- FIG. 5 is a sectional view illustrating a semiconductor device of the Schottky diode type, according to the invention.
- FIG. 8 is a sectional view illustrating a semiconductor device, of the JBS diode type.
- the semiconductor device which is the subject of the invention (see FIGS. 1 and 5), it comprises a substrate i- conductor 1 having two main surfaces 4, 5 arranged in opposition to one another.
- the semiconductor substrate 1 is composed of a first semiconductor region 2, 3 of a first type of conduction having a first layer 2 doped with N type (first type or donor) or doped with P type (second type or acceptor), and a second layer 3 doped with type N (first type or donor) or doped with type P (second type acceptor).
- the first layer 2 of the first or second type is adjacent to the first main surface 4, while the second layer 3 of the first or second type is adjacent to the second main surface 5.
- the semiconductor substrate comprises a first layer 2 and a second layer 3 which are of identical types, that is to say both of the first type, or of the second type.
- the first main surface 4 is covered on the one hand with a peripheral film 7 based in particular on oxide and is arranged so as to be in ohmic contact with the first layer 2 at the level of a central electrode 8.
- This central electrode 8 forms the anode of the device and is produced by means of a material forming a Schottky-type contact with the semiconductor.
- This material is chosen from in particular molybdenum, tungsten platinum, palladium or equivalent, it may also be a metallic alloy (silicide, etc.).
- This electrode 8 is arranged so as to be adjacent to the peripheral film 7 and forms a Schottky barrier with the first layer 2, at the level of the substantially central zone of the semiconductor substrate 1.
- the second main surface 5 also cooperates with a second electrode 6 which is arranged so as to be in ohmic contact with the second layer 3.
- This electrode 6 made of a metal constitutes the cathode of the semiconductor device which is the subject of the invention.
- the second layer 3 of the first type or of the second type exhibits a greater doping, in terms of quantity of impurities introduced into the layer, compared to the first layer of the first or second type.
- the impurities introduced into the first type layer will in particular be arsenic, phosphorus, while the impurities introduced into the second type layer will in particular be boron.
- the semiconductor device which is the subject of the invention (see FIGS. 2 and 8), it comprises a semiconductor substrate 1 identical in its constitution to the semiconductor device 1 as described in the first preferred embodiment, and differs from it in that it comprises, in the first layer 2 of first type (N) or of second type (P), a plurality of semiconductor regions 10 of opposite type of conduction to those surrounding it, the plurality of regions 10 extending from the first main surface 4 and from the electrode 8 to the interior of the first layer 2.
- N first type
- P second type
- the semiconductor device which is the subject of the invention, it comprises in a much more general manner a semiconductor substrate 1 comprising at least one layer 2 or 3 of first type or second type of conduction in which and according to an advantageous characteristic of the invention, there is incorporated or included within the layer 2 of the semiconductor substrate 1 of the first type or of the second type, a plurality of islands 9 of a type opposite to that of the semiconductor in which they are placed. So these islets 9 can be of the first type (N) or of the second type (P).
- These islands 9 are arranged in space beds, in the thickness of at least layer 2 by localized epitaxy techniques, epitaxy by successive layers, by high energy ion implantation, by MBE (Beam Epitaxy Molecule) in association with pnotolithography procedures by masking or conventional procedures (oxidation, thermal diffusion, ion implantation with energy breakage).
- MBE Beam Epitaxy Molecule
- these islands 9 can take various profiles (square, rectangle, triangle, circle, hexagon, octagon, or more generally polygon ”) or be arranged in the form of bands of homogeneous patterns or plumes, possibly overlapping each other according to the layers or being positioned randomly, thus being able, depending on the shape of the patterns, to have overlapping zones in the thickness of the superimposed layers.
- the islands 9 can be aligned or non-aligned, equid stants or non-equidistant, homogeneous or non-homogeneous, from the point of view of their characteristic directions (thickness, length and width).
- the islands 9, of the first type or of the second type may have a uniform doping or a non-uniform doping: there may thus be a doping gradient or this doping may be distributed according to a Gaussian law or another distribution.
- the islands 9 can have a geometric shape, when they have a polygonal section, which rounds in the corners.
- FIG. 7 illustrates different configurations and distributions of islands 9.
- the islands shown are hexagonal in a, in rhombus in b, squares in c and i, circular in d and g, octagonal in e and rectangular in f and triangular in h.
- an island 9 may have in one of its characteristic directions, a dimension comprised for example in the range of 2 to 100 ⁇ m, and in the other of its characteristic directions, a dimension comprised for example in a range of 2 to 10 ⁇ , or practically in a ratio of 1 to 10 between the two characteristic directions.
- each bed comprising between 1 and 500 islands 9, N varying from 1 to 50.
- the inclusion of a plurality of 9-doped islands within a layer 2 of the first type or second type semiconductor substrate 1 makes it possible to create, in reverse operating mode (blocked state), a reduction in the global electric field by a distribution mechanism thereof at each of the islands.
- the islands 9 are in the form of spaced networks (cf. FIG. 5).
- FIG. 5 which illustrates a section of a Schottky diode according to the invention, the layer 3 of semiconductor of first or second type is shown in ohmic contact with the cathode, the other first or second type semiconductor layer 2, forming a Schottky barrier with the anode and in which the plurality of islands 9 are included.
- These islands 9 are constituted in particular by semiconductor strips of the first type or of the second type; the choice of the type of islands 9 being however of the opposite type with respect to the type of the semiconductor layer in which they are included.
- the inclusion of the islands 9 in the semiconductor substrate is therefore not continuous and therefore has mter-island spaces through which the current can flow between the anode and the cathode.
- FIG. 6 shows the evolution of the value of the series resistance created in the layer within which the islands are incorporated, as a function of the reverse voltage withstand of the dipole; in this example, the dipole is a Schottky diode. From this FIG.
- the operating mechanisms previously studied for a dipole, in particular of the Schottky diode type comprising a plurality of floating islands, are identical when these islands are included in a dipole structure of type, for example JBS diode, and the operating values, both in blocked mode and in passing mode, for such a dipole (cf. FIG. 8;, are identical to those found for equivalent devices of the prior art, but for a value of reverse voltage withstand which is of the order of 600 volts (100 to 200 volts approximately for the devices of the prior art), and which can go up to 1000 volts.
- the main applications envisaged using this new semiconductor component substrate structure are in particular in the field of current rectification.
- This component can find in particular developments in the field of lighting (electronic ballast).
- This electronic component can also be used at the level of engine control, automotive electronics (rectifier component for alternator, or component integrated in integrated power circuits.
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0004583 | 2000-04-10 | ||
FR0004583A FR2807569B1 (fr) | 2000-04-10 | 2000-04-10 | Perfectionnement apportes aux diodes schottky |
PCT/FR2001/001101 WO2001078152A2 (fr) | 2000-04-10 | 2001-04-10 | Dispositif semi-conducteur du type diode schottky |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1273046A2 true EP1273046A2 (fr) | 2003-01-08 |
Family
ID=8849086
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01923789A Withdrawn EP1273046A2 (fr) | 2000-04-10 | 2001-04-10 | Dispositif semi-conducteur du type diode schottky |
Country Status (7)
Country | Link |
---|---|
US (1) | US20040046224A1 (fr) |
EP (1) | EP1273046A2 (fr) |
JP (1) | JP2003530700A (fr) |
KR (1) | KR20030011820A (fr) |
AU (1) | AU2001250477A1 (fr) |
FR (1) | FR2807569B1 (fr) |
WO (1) | WO2001078152A2 (fr) |
Families Citing this family (36)
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EP1396030B1 (fr) * | 2001-04-11 | 2011-06-29 | Silicon Semiconductor Corporation | Dispositif semi-conducteur de puissance vertical et sa méthode de fabrication |
US7442629B2 (en) | 2004-09-24 | 2008-10-28 | President & Fellows Of Harvard College | Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate |
US7057256B2 (en) | 2001-05-25 | 2006-06-06 | President & Fellows Of Harvard College | Silicon-based visible and near-infrared optoelectric devices |
US7238976B1 (en) * | 2004-06-15 | 2007-07-03 | Qspeed Semiconductor Inc. | Schottky barrier rectifier and method of manufacturing the same |
JP4990140B2 (ja) | 2004-08-31 | 2012-08-01 | フリースケール セミコンダクター インコーポレイテッド | パワー半導体デバイス |
US7671439B2 (en) * | 2005-02-11 | 2010-03-02 | Alpha & Omega Semiconductor, Ltd. | Junction barrier Schottky (JBS) with floating islands |
US7737522B2 (en) * | 2005-02-11 | 2010-06-15 | Alpha & Omega Semiconductor, Ltd. | Trench junction barrier controlled Schottky device with top and bottom doped regions for enhancing forward current in a vertical direction |
DE102005046706B4 (de) | 2005-09-29 | 2007-07-05 | Siced Electronics Development Gmbh & Co. Kg | JBS-SiC-Halbleiterbauelement |
JP5351519B2 (ja) * | 2005-12-27 | 2013-11-27 | パワー・インテグレーションズ・インコーポレーテッド | 高速回復整流器構造体の装置および方法 |
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US7560355B2 (en) * | 2006-10-24 | 2009-07-14 | Vishay General Semiconductor Llc | Semiconductor wafer suitable for forming a semiconductor junction diode device and method of forming same |
DE102007009227B4 (de) * | 2007-02-26 | 2009-01-02 | Infineon Technologies Ag | Halbleiterbauelement mit gleichrichtenden Übergängen sowie Herstellungsverfahren zur Herstellung desselben |
US7750426B2 (en) | 2007-05-30 | 2010-07-06 | Intersil Americas, Inc. | Junction barrier Schottky diode with dual silicides |
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US8368166B2 (en) * | 2007-05-30 | 2013-02-05 | Intersil Americas Inc. | Junction barrier Schottky diode |
JP2007311822A (ja) * | 2007-07-23 | 2007-11-29 | Toshiba Corp | ショットキーバリヤダイオード |
JP2009076866A (ja) * | 2007-08-31 | 2009-04-09 | Sumitomo Electric Ind Ltd | ショットキーバリアダイオード |
US9102962B2 (en) * | 2007-10-16 | 2015-08-11 | Shiu Nan Chen | Production method for solid cultured active mushroom mycelium and fruit-body metabolites (AMFM) products thereof |
US8212327B2 (en) * | 2008-03-06 | 2012-07-03 | Sionyx, Inc. | High fill-factor laser-treated semiconductor device on bulk material with single side contact scheme |
US7851881B1 (en) * | 2008-03-21 | 2010-12-14 | Microsemi Corporation | Schottky barrier diode (SBD) and its off-shoot merged PN/Schottky diode or junction barrier Schottky (JBS) diode |
US8106487B2 (en) * | 2008-12-23 | 2012-01-31 | Pratt & Whitney Rocketdyne, Inc. | Semiconductor device having an inorganic coating layer applied over a junction termination extension |
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JP6466346B2 (ja) | 2013-02-15 | 2019-02-06 | サイオニクス、エルエルシー | アンチブルーミング特性を有するハイダイナミックレンジcmos画像センサおよび関連づけられた方法 |
US9939251B2 (en) | 2013-03-15 | 2018-04-10 | Sionyx, Llc | Three dimensional imaging utilizing stacked imager devices and associated methods |
JP2014236171A (ja) * | 2013-06-05 | 2014-12-15 | ローム株式会社 | 半導体装置およびその製造方法 |
WO2014209421A1 (fr) | 2013-06-29 | 2014-12-31 | Sionyx, Inc. | Régions texturées formées de tranchées peu profondes et procédés associés. |
US9070790B2 (en) * | 2013-08-29 | 2015-06-30 | Infineon Technologies Ag | Vertical semiconductor device and method of manufacturing thereof |
US9704949B1 (en) * | 2016-06-30 | 2017-07-11 | General Electric Company | Active area designs for charge-balanced diodes |
CN116093164B (zh) * | 2023-04-07 | 2023-07-11 | 深圳市晶扬电子有限公司 | 一种带有浮岛型保护环的高压肖特基二极管 |
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JPS4837227B1 (fr) * | 1968-12-20 | 1973-11-09 | ||
GB1558506A (en) * | 1976-08-09 | 1980-01-03 | Mullard Ltd | Semiconductor devices having a rectifying metalto-semicondductor junction |
JPH06275816A (ja) * | 1993-03-18 | 1994-09-30 | Shindengen Electric Mfg Co Ltd | ショットキバリヤダイオ−ド |
JP3983285B2 (ja) * | 1994-12-20 | 2007-09-26 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴイ | 供給電圧により負荷を動作させる回路 |
US6037632A (en) * | 1995-11-06 | 2000-03-14 | Kabushiki Kaisha Toshiba | Semiconductor device |
JPH10117003A (ja) * | 1996-10-14 | 1998-05-06 | Hitachi Ltd | 定電圧ダイオード及びその製造方法 |
WO1999053550A1 (fr) * | 1998-04-08 | 1999-10-21 | Siemens Aktiengesellschaft | Element de terminaison marginal haute tension pour structures de type planar |
DE19943143B4 (de) * | 1999-09-09 | 2008-04-24 | Infineon Technologies Ag | Halbleiterbauelement für hohe Sperrspannungen bei gleichzeitig niedrigem Einschaltwiderstand und Verfahren zu dessen Herstellung |
DE10061528C1 (de) * | 2000-12-11 | 2002-07-25 | Infineon Technologies Ag | Mittels Feldeffekt steuerbares Halbleiterbauelement |
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2000
- 2000-04-10 FR FR0004583A patent/FR2807569B1/fr not_active Expired - Fee Related
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2001
- 2001-04-10 EP EP01923789A patent/EP1273046A2/fr not_active Withdrawn
- 2001-04-10 US US10/239,629 patent/US20040046224A1/en not_active Abandoned
- 2001-04-10 KR KR1020027013518A patent/KR20030011820A/ko not_active Application Discontinuation
- 2001-04-10 WO PCT/FR2001/001101 patent/WO2001078152A2/fr not_active Application Discontinuation
- 2001-04-10 JP JP2001574907A patent/JP2003530700A/ja active Pending
- 2001-04-10 AU AU2001250477A patent/AU2001250477A1/en not_active Abandoned
Non-Patent Citations (1)
Title |
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See references of WO0178152A2 * |
Also Published As
Publication number | Publication date |
---|---|
FR2807569A1 (fr) | 2001-10-12 |
FR2807569B1 (fr) | 2004-08-27 |
WO2001078152A3 (fr) | 2002-02-07 |
JP2003530700A (ja) | 2003-10-14 |
WO2001078152A2 (fr) | 2001-10-18 |
AU2001250477A1 (en) | 2001-10-23 |
KR20030011820A (ko) | 2003-02-11 |
US20040046224A1 (en) | 2004-03-11 |
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