EP1252445B1 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

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Publication number
EP1252445B1
EP1252445B1 EP01909681A EP01909681A EP1252445B1 EP 1252445 B1 EP1252445 B1 EP 1252445B1 EP 01909681 A EP01909681 A EP 01909681A EP 01909681 A EP01909681 A EP 01909681A EP 1252445 B1 EP1252445 B1 EP 1252445B1
Authority
EP
European Patent Office
Prior art keywords
pump
pump according
blades
radially
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01909681A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1252445A1 (de
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1252445A1 publication Critical patent/EP1252445A1/de
Application granted granted Critical
Publication of EP1252445B1 publication Critical patent/EP1252445B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Definitions

  • the invention relates to a turbomolecular pump having the features of the preamble of patent claim 1.
  • Turbomolekularvakuumpumpen are for example from the WO 94/00694 known. They are designed in the manner of a turbine with rotor and Statorschaufelschschsch. Stator and rotor extend substantially cylindrical and are arranged coaxially to the axis of rotation of the rotating component. The longitudinal axes of the alternately intermeshing stator and rotor blades extend radially, so that there is a substantially axially directed conveying direction. One or more pairs of a rotor blade row and a stator blade row form a pump stage. The adjustment of the conveying properties of a pumping stage (pumping speed, compression) via the formation of the blades, preferably on the angle of attack.
  • turbomolecular vacuum pumps of the type described, a minimum number of pumping stages can not be undercut. As a result, they build relatively long, especially since the drive motor still increases the axial length.
  • turbomolecular pump with the features of the preamble of claim 1 is known.
  • Your rotor and stator components are designed and arranged such that the gases are conveyed in the radial direction from outside to inside.
  • a turbomolecular pump of this type has the advantages that its axial length (without drive motor) does not significantly exceed the stator and rotor vanes and that the rotor and stator together with their respective vanes can be integrally formed because the intermeshing vanes are no longer radially but extend axially.
  • the present invention has for its object to further improve a turbomolecular pump with the features of the preamble of claim 1 in terms of their efficiency.
  • Vacuum pumps of the type concerned here are preferably operated so that the delivery chamber decreases in the conveying direction of the gases.
  • the decrease in the axial height of the delivery chamber is connected to a further, not only by the flow direction of the gases from the outside inward-related decrease in the delivery volume in the conveying direction, whereby the set goal of improving the efficiency of the pump is achieved.
  • blade disks described can be made by cutting and EDM machines. Both techniques are relatively inexpensive. With the achievable reduction in the variety of parts, the invention is a real alternative to meet today's price pressure.
  • FIG. 1 shows that in the embodiments of a friction pump 1 according to the invention, the longitudinal axes of the blades 2, 3 extend parallel to the axis of rotation 4 of the rotating component. They are arranged in concentric rows about the axis of rotation 4. The rows of rotor blades 2 and the rows of stator blades 3 alternate. They interlock and have in a conventional manner in the flow direction (arrow 16) changing angles of attack.
  • FIGS. 2 to 4 show that the blades 2, 3 are components of rotating or stationary carriers 6 and 7, respectively.
  • the rotating support 6 and the fixed support 7 have the shape of a disc.
  • the blade-side surface of the stator disk 7 is designed conically in such a way that the distance between the two disks 6, 7 decreases from outside to inside. The length of the blades 2, 3 decreases from outside to inside.
  • the fixed support 7 has the shape of a funnel, so that the distance between the supports 6 and 7 decreases from inside to outside.
  • the length of the blades 2, 3 is adapted to this change in distance.
  • FIG. 4 also shows that the stationary carrier 7 is part of a housing 8 of the pump 1. It consists of the carrier 7 with a connecting piece 9 and of a flat, cup-shaped housing part 11, which is flanged with its edge on the carrier 7.
  • the bottom 12 of the housing part 11 extends parallel to the rotor disk 6. It carries the drive motor 13, whose shaft 14 passes through an opening in the bottom 12 and is coupled to the rotor disk 6.
  • a further connection piece 15 is provided on the housing part 12.
  • Vacuum pumps are preferably operated so that the delivery chamber decreases in the conveying direction of the gases.
  • This property have friction pumps 1 according to the invention already when the gases are conveyed from the outside to the inside (compare the arrows 16 shown in FIGS.
  • the formation of the fixed support 7 according to FIG. 3 further enhances this property.
  • the width of the blades 2, 3 can also decrease from the outside to the inside (cf., in particular, FIG.
  • FIG. 4 An example of a friction pump 1 operated in this way is shown in FIG. 4 (arrows 18).
  • the connecting flange 9 forms the inlet, the connecting flange 15, the outlet of the pump.
  • a change in the delivery chamber in the direction of the required gases is influenced by the fact that the distance of the carrier 6, 7 and thus the length of the blades 2, 3 decreases from the inside to the outside.
  • FIGS. 5 and 6 show a dual-flow design of a friction pump 1.
  • An inner group of blade rows conveys the gases radially outwardly (arrows 21), an outer group of blade rows from outside to inside (arrows 22).
  • the connecting pieces 9 and 15 are inlet nozzles.
  • the stator 7 is equipped with a connecting piece 23 which has the function of an outlet.
  • By reversing the direction of rotation results in a further configuration (1 intake manifold, 2 outlet), as it can be used for leak detector with countercurrent principle.
  • a plurality of radially conveying pump stages are located axially one above the other in the housing 8.
  • the rotating system comprises two rotor disks 6, each of which carries rotor blades 2 on both sides.
  • the housing 8 and a housing-fixed carrier 25, which is located between the two rotor disks 6, carry corresponding stator blades 3.
  • Dotted arrows 27 show that the connecting piece 9 has the function of an inlet and that the subsequent, radially compressing stages (four in all) convey alternately from inside to outside and from outside to inside.
  • the outlet is designated 26. It lies inside and surrounds the drive shaft 14, so that in this area sealing means are not required.
  • Figure 8 shows one way in which a radially compressing friction pump 1 can be combined with an axially compressing friction pump 31 of the prior art.
  • the friction pump 31 consists of a suction side arranged Turbomolkularpumpencare 32 and a pressure side arranged Molekularpumptreatment 33, the Holweckpumpe (as shown) or may be designed as Gaede-, Siegbahn-, Engtractors- or side channel pump.
  • the friction pumps 1 and 31 are located in a common, approximately cylindrical housing 35 with lateral inlet 36.
  • a mounted on both ends (bearing 37, 38) shaft 39 carries the respective rotating components of the pump stages (rotor disk 6 of the radially compressing pump 1, rotor 41 of the turbomolecular pumping stage 32, cylinder 42 of the Holweckpumpch 33).
  • the lateral inlet 36 of the combined pump opens between the radially compressing pumping stage 1 and the axially compressing pump 31.
  • the outlet 44 of the combined pump is located on the pressure side of the molecular pumping stage 33.
  • the arrows 45 and 46 show that the radially compressing pumping stage 1 sucks the gases to be delivered in the region of their periphery and the axially compressing pump 31 - as usual - in the region of their high vacuum side.
  • the pumped from the pump stage 1 gases pass through a bypass 47 directly to the suction side of Holweckpumpch 33rd
  • the peculiarity of the solution according to FIG. 8 is that the drive motor 48 is located on the high-vacuum side of the axially conveying pump 31 (and not, as usual, on the pressure side of the Holweck pumping stage 33). Characterized in that the radially compressing pumping stage 1 is located between the inlet 36 and the drive motor 48, a relatively high pressure can be maintained in the engine compartment 49 (eg 1 x 10 -2 mbar). The usage high vacuum suitable materials in the engine compartment 49 is not required. In addition, the radially promoting pumping stage 1 supports the delivery rate of the turbomolecular pumping stage 32, without thereby significantly increasing the overall length of the pump 31.
  • FIGS. 9 to 11 show embodiments of combined friction pumps for use in multi-chamber systems, here two-chamber systems. These are e.g. analyzers with multiple chambers that need to be evacuated to different pressures. As a result, the distance of the intake is predetermined, which often leads in the prior art that relatively long, cantilevered rotor systems are required, requiring complex storage systems.
  • All embodiments according to FIGS. 9 to 11 have two lateral inlets 36, 36 '. They are separated from each other by at least one radially compressing pumping stage 1.
  • the inlet 36 "sees” respectively, as in the embodiment according to FIG. 8, the inlet regions of an axially conveying friction pump 31 and a friction pump 1 which conveys radially from the outside to the inside.
  • the outlet of the radially conveying pump 1 opens into the inlet region of a second turbomolecular pump stage 32 ', to which the second inlet 36' is connected.
  • the pump 1 causes the pressure at the inlet 36 to be lower than at the inlet 36 '.
  • On the pressure side of the turbomolecular pump stage 32 ' is the drive motor 48.
  • This pressure side is connected via the bypass 47 with the suction side of the molecular pumping stage 33.
  • a further axially compressing friction pump 1' can be provided to separate the inlets 36, 36 '(FIG. 10). It promotes a partial flow of the gases entering the inlet 36 '.
  • the outlets of the two friction pumps 1 and 1 ' communicate with the bypass 47.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP01909681A 2000-02-01 2001-01-24 Turbomolekularpumpe Expired - Lifetime EP1252445B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10004271A DE10004271A1 (de) 2000-02-01 2000-02-01 Reibungsvakuumpumpe
DE10004271 2000-02-01
PCT/EP2001/000726 WO2001057402A1 (de) 2000-02-01 2001-01-24 Reibungsvakuumpumpe

Publications (2)

Publication Number Publication Date
EP1252445A1 EP1252445A1 (de) 2002-10-30
EP1252445B1 true EP1252445B1 (de) 2008-01-23

Family

ID=7629403

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01909681A Expired - Lifetime EP1252445B1 (de) 2000-02-01 2001-01-24 Turbomolekularpumpe

Country Status (5)

Country Link
US (1) US7011491B2 (ja)
EP (1) EP1252445B1 (ja)
JP (1) JP4819277B2 (ja)
DE (2) DE10004271A1 (ja)
WO (1) WO2001057402A1 (ja)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
GB0322889D0 (en) 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
DE102005003091A1 (de) * 2005-01-22 2006-07-27 Leybold Vacuum Gmbh Vakuum-Seitenkanalverdichter
US7632060B2 (en) * 2005-01-24 2009-12-15 Ford Global Technologies, Llc Fuel pump having dual flow channel
US7165932B2 (en) * 2005-01-24 2007-01-23 Visteon Global Technologies, Inc. Fuel pump having dual single sided impeller
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
US20090081022A1 (en) * 2007-09-21 2009-03-26 Honeywell International Inc. Radially Staged Microscale Turbomolecular Pump
US20120014779A1 (en) * 2010-07-16 2012-01-19 Charles David Gilliam Disc pump
US20140020556A1 (en) * 2011-11-04 2014-01-23 Honeywell International Inc. Mass separation via a turbomolecular pump
EP2620649B1 (en) 2012-01-27 2019-03-13 Edwards Limited Gas transfer vacuum pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
US9677990B2 (en) 2014-04-30 2017-06-13 Particles Plus, Inc. Particle counter with advanced features
US10983040B2 (en) 2013-03-15 2021-04-20 Particles Plus, Inc. Particle counter with integrated bootloader
US10352844B2 (en) 2013-03-15 2019-07-16 Particles Plus, Inc. Multiple particle sensors in a particle counter
US11579072B2 (en) 2013-03-15 2023-02-14 Particles Plus, Inc. Personal air quality monitoring system
US20150063982A1 (en) * 2013-09-01 2015-03-05 Particles Plus, Inc. Multi-stage inflow turbine pump for particle counters
CN104600081A (zh) * 2014-12-31 2015-05-06 京东方科技集团股份有限公司 阵列基板及其制作方法、显示面板、显示装置
DE102016210701A1 (de) 2016-06-15 2017-12-21 Inficon Gmbh Massenspektrometrischer Lecksucher mit Turbomolekularpumpe und Boosterpumpe auf gemeinsamer Welle
DE102018119747B3 (de) 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer
EP3767110A1 (en) * 2019-07-15 2021-01-20 Pfeiffer Vacuum Gmbh Vacuum system
US11519419B2 (en) * 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface
US11988591B2 (en) 2020-07-01 2024-05-21 Particles Plus, Inc. Modular optical particle counter sensor and apparatus
CN112160919A (zh) * 2020-09-28 2021-01-01 东北大学 涡轮分子泵和包括该分子泵的复合分子泵

Family Cites Families (18)

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Publication number Priority date Publication date Assignee Title
DE107118C (ja)
DE605902C (de) * 1932-01-08 1934-11-20 Hugo Seemann Dr Turbohochvakuumpumpe
GB479427A (en) 1935-05-31 1938-01-31 Gyoergy Jendrassik Improvements in rotary compressors
CH235102A (fr) * 1941-06-24 1944-11-15 Dupont Emile Machine pour la transformation de la pression d'un fluide en travail ou inversement.
DE845883C (de) 1950-02-21 1952-08-07 Heraeus Gmbh W C Verfahren zur Herstellung von Spinnduesen
DE1845883U (de) * 1961-10-19 1962-02-01 Akad Wissenschaften Ddr Molekularpumpe.
FR2224009A5 (ja) * 1973-03-30 1974-10-25 Cit Alcatel
DD107118A1 (ja) * 1973-10-03 1974-07-12
SU1252552A1 (ru) 1984-06-01 1986-08-23 Научно-исследовательский институт прикладной математики и кибернетики при Горьковском государственном университете им.Н.И.Лобачевского Ротор радиального турбомолекул рного вакуумного насоса
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DE10004263A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung

Also Published As

Publication number Publication date
EP1252445A1 (de) 2002-10-30
JP2003525379A (ja) 2003-08-26
JP4819277B2 (ja) 2011-11-24
US7011491B2 (en) 2006-03-14
DE10004271A1 (de) 2001-08-02
US20040013514A1 (en) 2004-01-22
WO2001057402A1 (de) 2001-08-09
DE50113533D1 (de) 2008-03-13

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