WO2008151968A2 - Massenspektrometer-anordnung - Google Patents
Massenspektrometer-anordnung Download PDFInfo
- Publication number
- WO2008151968A2 WO2008151968A2 PCT/EP2008/056848 EP2008056848W WO2008151968A2 WO 2008151968 A2 WO2008151968 A2 WO 2008151968A2 EP 2008056848 W EP2008056848 W EP 2008056848W WO 2008151968 A2 WO2008151968 A2 WO 2008151968A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- vacuum
- mass spectrometer
- housing
- outlet
- turbomolecular pump
- Prior art date
Links
- 238000005086 pumping Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
Definitions
- the invention relates to a mass spectrometer arrangement comprising a mass spectrometer forevacuum chamber with a pre-vacuum outlet and at least two mass spectrometer high-vacuum chambers, and a turbo-vacuum pump connected to the high-vacuum chambers.
- a turbocharging pump In mass spectrometer arrangements of this type, a turbocharging pump, a backing pump for the turbomolecular pump and a further backing pump for the mass spectrometer are provided for supplying the mass spectrometer with corresponding negative pressures. Pre-vacuum chamber required. Such an arrangement is complicated and costly,
- the object of the invention is in contrast to provide a low-cost mass spectrometer arrangement.
- the mass spectrometer arrangement according to the invention has an integrated turbomolecular pump, which is inserted into the housing of the mass spectrometer.
- the mass spectrometer high-pressure chambers are directly connected to the turbomulsion pump through internal channels of the housing. It is further provided that the pre-vacuum outlet of the mass spectrometer Vorvakuumsch and the pre-vacuum outlet of the Turbomoiekularpumpe open within the mass spectrometer housing in a common pre-vacuum space.
- the forevacuum chamber finally opens into a single housing outlet, which optionally leads to an external backing pump.
- turbomolecular pump into the housing of the mass spectrometer realizes a very compact and relatively simple mass spectrometer arrangement.
- a further constructive simplification is generated.
- the turbomolecular pump in addition to the high-vacuum compressor stages, has a pre-vacuum compressor stage which opens between the fore-vacuum space into which the fore-vacuum outlets of the mass spectrometer and the turbomolecular pump flow Housing outlet is arranged.
- a compression of the fore-vacuum pressure of 1-5 mbar to 5-10 mbar or more is already carried out in the mass spectrometer housing.
- the forevacuum pump to be connected to the fore-vacuum housing outlet can be designed to be correspondingly small.
- the pre-vacuum compressor stage of the turbomolecular pump can theoretically also be designed so that it compresses to atmospheric pressure, so that an external backing pump is no longer required.
- the turbomolecular pump can be installed in the mass spectrometer housing by successive incorporation of its individual components. According to a preferred embodiment, however, the turbomolecular pump is designed as a caseless cartridge, which is inserted into the housing of the mass spectrometer. Since the turbomolecular pump is designed as a housing-less cartridge whose housing is formed by the mass spectrometer housing or their structures therein, a separate Turbomoiekularpumpen housing is saved. As a result, not only space and weight are saved, but also the flow resistance of the inlets and outlets of the turbomolecular pump are basically reduced accordingly.
- the turbomolecular pump distal to its input rotor stage on a suction opening with at least two separate opening cutouts, which are each connected to a mass spectrometer high vacuum chamber.
- the turbomolecular pump has at least two separate opening cut-outs in the plane of the intake opening.
- the relatively large suction opening which usually has an annular shape, and immediately adjacent to the input rotor stage is divided into two or possibly more opening cutouts.
- the division of the suction in two or more opening cutouts is technically associated with relatively little effort.
- a mass spectrometer assembly 10 having a mass spectrometer 92 with a mass spectrometer housing 86 and a turbomolecular pump 12.
- the turbomolecular pump 12 is designed as a caseless cartridge 13, which is inserted into the housing 86.
- the mass spectrometer 92 may be formed, for example, as a quadrupole mass spectrometer, but may be another type of mass spectrometer.
- the present mass spectrometer has four vacuum chambers 20, 21, 22, 23 through which flows an ion stream represented by dashed arrows.
- the highest pressure vacuum chamber 20 is a pre-vacuum vacuum chamber into which the ion stream flows through an ion stream housing inlet 94.
- the turbomolecular pump 12 is designed as a cartridge 13, that is, it does not have its own housing.
- the turbomolecular pump cartridge 13 is Housing without housing used in the housing 86
- the pump stators 19 of the high vacuum section of the turbomolecular pump 12 are thus held directly by the housing 86 and the inner structures of the housing 86.
- the turbomolecular pump 12 has in its high-vacuum section an intermediate inlet 83 and two further high-vacuum Einiquaint forming opening cutouts 81, 82.
- the opening cutouts 81, 82 are formed by a corresponding division of the suction opening 16, which is arranged distally of the input rotor stage.
- the suction port 16 abuts directly on the input rotor stage 18 and is formed by the housing 86.
- the circular suction opening 16 is divided by conduit walls of the housing 86 into the two opening cutouts 81, 82.
- the opening cutouts 81, 82 are circular in plan view, but may be formed in a sector shape, as concentric annuli or otherwise shaped.
- the turbomolecular pump 12 has at its Vorvakuum Ausiass 89, which limits the high-vacuum section of the turbomolecular pump to the outlet side, a rotor and stator-free Vorvakuumraum 98, in which on the one hand from the high vacuum section of the Turbomoiekularpumpe 12 coming gas and on the other the pre-vacuum Ausiass 30 from the fore-vacuum chamber 20 gas flows together.
- the turbomicular pump 12 then has, in the direction of flow to the fore-vacuum chamber 98, a pre-vacuum compressor stage 96 in which the gas from the fore-vacuum chamber 98 is compressed to a pressure of 5-10 mbar or more. Subsequently, the gas exits the housing 86 through a housing outlet 88 and is supplied from there through a conduit to an external backing pump 90.
- a rotor shaft 14 of the turbomolecular pump 12 supports the rotor stages of the high vacuum section and the pre-vacuum compressor stage 96.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/663,946 US8106354B2 (en) | 2007-06-11 | 2008-06-03 | Mass spectrometer arrangement |
JP2010511580A JP5250027B2 (ja) | 2007-06-11 | 2008-06-03 | 質量分析計の配置 |
CN2008800197756A CN101681787B (zh) | 2007-06-11 | 2008-06-03 | 质谱仪装置 |
EP08760432A EP2156462A2 (de) | 2007-06-11 | 2008-06-03 | Massenspektrometer-anordnung |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007027352A DE102007027352A1 (de) | 2007-06-11 | 2007-06-11 | Massenspektrometer-Anordnung |
DE102007027352.7 | 2007-06-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008151968A2 true WO2008151968A2 (de) | 2008-12-18 |
WO2008151968A3 WO2008151968A3 (de) | 2009-05-07 |
Family
ID=39967134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2008/056848 WO2008151968A2 (de) | 2007-06-11 | 2008-06-03 | Massenspektrometer-anordnung |
Country Status (6)
Country | Link |
---|---|
US (1) | US8106354B2 (de) |
EP (1) | EP2156462A2 (de) |
JP (1) | JP5250027B2 (de) |
CN (1) | CN101681787B (de) |
DE (1) | DE102007027352A1 (de) |
WO (1) | WO2008151968A2 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2473839A (en) * | 2009-09-24 | 2011-03-30 | Edwards Ltd | Differentially pumped mass spectrometer systems |
GB2489623A (en) * | 2007-09-07 | 2012-10-03 | Ionics Mass Spectrometry Group | Multi-pressure stage mass spectrometer |
JP2013501886A (ja) * | 2009-08-14 | 2013-01-17 | エドワーズ リミテッド | 真空システム |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007010068B4 (de) * | 2007-02-28 | 2024-06-13 | Thermo Fisher Scientific (Bremen) Gmbh | Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe |
GB201314841D0 (en) * | 2013-08-20 | 2013-10-02 | Thermo Fisher Scient Bremen | Multiple port vacuum pump system |
US9368335B1 (en) * | 2015-02-02 | 2016-06-14 | Thermo Finnigan Llc | Mass spectrometer |
EP3112688B2 (de) * | 2015-07-01 | 2022-05-11 | Pfeiffer Vacuum GmbH | Splitflow-vakuumpumpe sowie vakuum-system mit einer splitflow-vakuumpumpe |
GB2572958C (en) * | 2018-04-16 | 2021-06-23 | Edwards Ltd | A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers |
GB2578138A (en) * | 2018-10-18 | 2020-04-22 | Edwards Ltd | Non-mechanical vacuum pumping system and analytical instrument |
EP3564538B1 (de) * | 2019-02-20 | 2021-04-07 | Pfeiffer Vacuum Gmbh | Vakuumsystem und verfahren zur herstellung eines solchen |
US11519419B2 (en) | 2020-04-15 | 2022-12-06 | Kin-Chung Ray Chiu | Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface |
CN112483433B (zh) * | 2020-11-11 | 2022-07-05 | 上海裕达实业有限公司 | 一种内置真空传感器的便携式仪器分子泵 |
JP2022083523A (ja) * | 2020-11-25 | 2022-06-06 | 住友重機械工業株式会社 | クライオポンプシステムおよびその監視方法 |
CN114673670B (zh) * | 2020-12-24 | 2024-04-05 | 戴尔产品有限公司 | 具有纵列风扇封装的信息处理系统 |
EP4293232A1 (de) * | 2023-10-17 | 2023-12-20 | Pfeiffer Vacuum Technology AG | Pumpe |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5818041A (en) * | 1996-02-16 | 1998-10-06 | Varian Associates, Inc. | Mass spectrometer system and method for transporting and analyzing ions |
US20040169139A1 (en) * | 1998-11-25 | 2004-09-02 | Hitachi, Ltd. | Chemical monitoring method and apparatus, and incinerator |
EP1464943A2 (de) * | 2003-03-31 | 2004-10-06 | Hitachi, Ltd. | Detektionsverfahren und Detekionseinrichtung zum Nachweis von Drogen |
WO2005033520A1 (en) * | 2003-09-30 | 2005-04-14 | The Boc Group Plc | Vacuum pump |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4116592A (en) * | 1976-08-20 | 1978-09-26 | Viktor Yakovlevich Cherny | Turbomolecular high-vacuum pulp |
US6193461B1 (en) | 1999-02-02 | 2001-02-27 | Varian Inc. | Dual inlet vacuum pumps |
US6727498B2 (en) * | 2000-10-04 | 2004-04-27 | University Of South Florida | Portable underwater mass spectrometer |
-
2007
- 2007-06-11 DE DE102007027352A patent/DE102007027352A1/de not_active Withdrawn
-
2008
- 2008-06-03 JP JP2010511580A patent/JP5250027B2/ja not_active Expired - Fee Related
- 2008-06-03 EP EP08760432A patent/EP2156462A2/de not_active Withdrawn
- 2008-06-03 WO PCT/EP2008/056848 patent/WO2008151968A2/de active Application Filing
- 2008-06-03 US US12/663,946 patent/US8106354B2/en not_active Expired - Fee Related
- 2008-06-03 CN CN2008800197756A patent/CN101681787B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5818041A (en) * | 1996-02-16 | 1998-10-06 | Varian Associates, Inc. | Mass spectrometer system and method for transporting and analyzing ions |
US20040169139A1 (en) * | 1998-11-25 | 2004-09-02 | Hitachi, Ltd. | Chemical monitoring method and apparatus, and incinerator |
EP1464943A2 (de) * | 2003-03-31 | 2004-10-06 | Hitachi, Ltd. | Detektionsverfahren und Detekionseinrichtung zum Nachweis von Drogen |
WO2005033520A1 (en) * | 2003-09-30 | 2005-04-14 | The Boc Group Plc | Vacuum pump |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2489623A (en) * | 2007-09-07 | 2012-10-03 | Ionics Mass Spectrometry Group | Multi-pressure stage mass spectrometer |
GB2489623B (en) * | 2007-09-07 | 2013-03-06 | Ionics Mass Spectrometry Group | Multi-pressure stage mass spectrometer and methods |
US9343280B2 (en) | 2007-09-07 | 2016-05-17 | Perkinelmer Health Sciences Canada, Inc. | Multi-pressure stage mass spectrometer and methods |
JP2013501886A (ja) * | 2009-08-14 | 2013-01-17 | エドワーズ リミテッド | 真空システム |
GB2473839A (en) * | 2009-09-24 | 2011-03-30 | Edwards Ltd | Differentially pumped mass spectrometer systems |
US8716658B2 (en) | 2009-09-24 | 2014-05-06 | Edwards Limited | Mass spectrometer system |
GB2473839B (en) * | 2009-09-24 | 2016-06-01 | Edwards Ltd | Mass spectrometer |
Also Published As
Publication number | Publication date |
---|---|
US8106354B2 (en) | 2012-01-31 |
WO2008151968A3 (de) | 2009-05-07 |
DE102007027352A1 (de) | 2008-12-18 |
JP2010529629A (ja) | 2010-08-26 |
US20100176294A1 (en) | 2010-07-15 |
CN101681787A (zh) | 2010-03-24 |
JP5250027B2 (ja) | 2013-07-31 |
CN101681787B (zh) | 2012-03-21 |
EP2156462A2 (de) | 2010-02-24 |
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