JP5250027B2 - 質量分析計の配置 - Google Patents
質量分析計の配置 Download PDFInfo
- Publication number
- JP5250027B2 JP5250027B2 JP2010511580A JP2010511580A JP5250027B2 JP 5250027 B2 JP5250027 B2 JP 5250027B2 JP 2010511580 A JP2010511580 A JP 2010511580A JP 2010511580 A JP2010511580 A JP 2010511580A JP 5250027 B2 JP5250027 B2 JP 5250027B2
- Authority
- JP
- Japan
- Prior art keywords
- mass spectrometer
- housing
- auxiliary vacuum
- vacuum
- auxiliary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007789 gas Substances 0.000 description 4
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Description
Claims (3)
- 質量分析計の配置において、
該質量分析計はハウジングを備えており、
該ハウジングは、
補助真空出口を有する補助真空真空室と、
少なくとも2つの高真空真空室と、
該高真空真空室と接続され、補助真空出口を有する一体化されたターボ分子ポンプとを含み、
前記2つの補助真空出口は、前記ハウジング内の共通の補助真空室に通じており、該補助真空室はハウジング出口に通じており、
前記ターボ分子ポンプは、入口ロータ段の末端部に吸込開口部を含み、該吸込開口部は、異なる前記高真空真空室と夫々接続され、分割された開口部分を少なくとも2つ含むことを特徴とする質量分析計の配置。 - 前記ターボ分子ポンプは、前記補助真空室と前記ハウジング出口との間に補助真空コンプレッサ段を含むことを特徴とする請求項1に記載の質量分析計の配置。
- 前記ターボ分子ポンプは、前記ハウジング内に配置され、ハウジングがないカートリッジとして設計されていることを特徴とする請求項1又は2に記載の質量分析計の配置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007027352.7 | 2007-06-11 | ||
DE102007027352A DE102007027352A1 (de) | 2007-06-11 | 2007-06-11 | Massenspektrometer-Anordnung |
PCT/EP2008/056848 WO2008151968A2 (de) | 2007-06-11 | 2008-06-03 | Massenspektrometer-anordnung |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010529629A JP2010529629A (ja) | 2010-08-26 |
JP5250027B2 true JP5250027B2 (ja) | 2013-07-31 |
Family
ID=39967134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010511580A Expired - Fee Related JP5250027B2 (ja) | 2007-06-11 | 2008-06-03 | 質量分析計の配置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8106354B2 (ja) |
EP (1) | EP2156462A2 (ja) |
JP (1) | JP5250027B2 (ja) |
CN (1) | CN101681787B (ja) |
DE (1) | DE102007027352A1 (ja) |
WO (1) | WO2008151968A2 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007010068B4 (de) * | 2007-02-28 | 2024-06-13 | Thermo Fisher Scientific (Bremen) Gmbh | Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe |
WO2009030048A1 (en) * | 2007-09-07 | 2009-03-12 | Ionics Mass Spectrometry Group, Inc. | Multi-pressure stage mass spectrometer and methods |
GB2472638B (en) * | 2009-08-14 | 2014-03-19 | Edwards Ltd | Vacuum system |
GB2473839B (en) * | 2009-09-24 | 2016-06-01 | Edwards Ltd | Mass spectrometer |
GB201314841D0 (en) | 2013-08-20 | 2013-10-02 | Thermo Fisher Scient Bremen | Multiple port vacuum pump system |
US9368335B1 (en) * | 2015-02-02 | 2016-06-14 | Thermo Finnigan Llc | Mass spectrometer |
EP3112688B2 (de) * | 2015-07-01 | 2022-05-11 | Pfeiffer Vacuum GmbH | Splitflow-vakuumpumpe sowie vakuum-system mit einer splitflow-vakuumpumpe |
GB2572958C (en) * | 2018-04-16 | 2021-06-23 | Edwards Ltd | A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers |
GB2578138A (en) * | 2018-10-18 | 2020-04-22 | Edwards Ltd | Non-mechanical vacuum pumping system and analytical instrument |
EP3564538B1 (de) * | 2019-02-20 | 2021-04-07 | Pfeiffer Vacuum Gmbh | Vakuumsystem und verfahren zur herstellung eines solchen |
US11519419B2 (en) | 2020-04-15 | 2022-12-06 | Kin-Chung Ray Chiu | Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface |
CN112483433B (zh) * | 2020-11-11 | 2022-07-05 | 上海裕达实业有限公司 | 一种内置真空传感器的便携式仪器分子泵 |
JP2022083523A (ja) * | 2020-11-25 | 2022-06-06 | 住友重機械工業株式会社 | クライオポンプシステムおよびその監視方法 |
CN114673670B (zh) * | 2020-12-24 | 2024-04-05 | 戴尔产品有限公司 | 具有纵列风扇封装的信息处理系统 |
EP4293232A1 (de) * | 2023-10-17 | 2023-12-20 | Pfeiffer Vacuum Technology AG | Pumpe |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4116592A (en) * | 1976-08-20 | 1978-09-26 | Viktor Yakovlevich Cherny | Turbomolecular high-vacuum pulp |
US5672868A (en) * | 1996-02-16 | 1997-09-30 | Varian Associates, Inc. | Mass spectrometer system and method for transporting and analyzing ions |
JP3876554B2 (ja) * | 1998-11-25 | 2007-01-31 | 株式会社日立製作所 | 化学物質のモニタ方法及びモニタ装置並びにそれを用いた燃焼炉 |
US6193461B1 (en) | 1999-02-02 | 2001-02-27 | Varian Inc. | Dual inlet vacuum pumps |
US6744045B2 (en) * | 2000-10-04 | 2004-06-01 | University Of South Florida | Portable underwater mass spectrometer |
JP3800422B2 (ja) * | 2003-03-31 | 2006-07-26 | 株式会社日立製作所 | 特定薬物の探知方法及び探知装置 |
GB0409139D0 (en) * | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
-
2007
- 2007-06-11 DE DE102007027352A patent/DE102007027352A1/de not_active Withdrawn
-
2008
- 2008-06-03 EP EP08760432A patent/EP2156462A2/de not_active Withdrawn
- 2008-06-03 CN CN2008800197756A patent/CN101681787B/zh not_active Expired - Fee Related
- 2008-06-03 JP JP2010511580A patent/JP5250027B2/ja not_active Expired - Fee Related
- 2008-06-03 WO PCT/EP2008/056848 patent/WO2008151968A2/de active Application Filing
- 2008-06-03 US US12/663,946 patent/US8106354B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20100176294A1 (en) | 2010-07-15 |
US8106354B2 (en) | 2012-01-31 |
WO2008151968A2 (de) | 2008-12-18 |
CN101681787B (zh) | 2012-03-21 |
DE102007027352A1 (de) | 2008-12-18 |
JP2010529629A (ja) | 2010-08-26 |
WO2008151968A3 (de) | 2009-05-07 |
EP2156462A2 (de) | 2010-02-24 |
CN101681787A (zh) | 2010-03-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5250027B2 (ja) | 質量分析計の配置 | |
JP5378432B2 (ja) | ポンピング装置 | |
JP5809218B2 (ja) | 真空ポンプ | |
CA2771200C (en) | Mass spectrometer system | |
JP4520636B2 (ja) | シャシ、ロータ及びケーシングを有する摩擦真空ポンプ並びにこの形式の摩擦真空ポンプを備えた装置 | |
US20080193303A1 (en) | Pumping Arrangement | |
JP5913109B2 (ja) | 真空ポンプ | |
JP5560263B2 (ja) | 多段真空ポンプ | |
JP2008518155A (ja) | 真空ポンプ | |
JP5069264B2 (ja) | シャシ、ロータ及びケーシングを有する摩擦真空ポンプ並びにこの形式の摩擦真空ポンプを備えた装置 | |
US6409477B1 (en) | Vacuum pump | |
JP6488898B2 (ja) | 真空ポンプおよび質量分析装置 | |
JP2018516338A (ja) | 真空ポンプ | |
JP2010529359A (ja) | ターボ分子ポンプ | |
US6676384B2 (en) | Gas friction pump | |
JP2001090690A (ja) | 真空ポンプ | |
GB2584603A (en) | Vacuum chamber module |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110413 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20121213 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121218 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130219 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130319 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130412 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160419 Year of fee payment: 3 |
|
LAPS | Cancellation because of no payment of annual fees |