EP1243795A1 - Pompe à vide à deux étages - Google Patents
Pompe à vide à deux étages Download PDFInfo
- Publication number
- EP1243795A1 EP1243795A1 EP02356050A EP02356050A EP1243795A1 EP 1243795 A1 EP1243795 A1 EP 1243795A1 EP 02356050 A EP02356050 A EP 02356050A EP 02356050 A EP02356050 A EP 02356050A EP 1243795 A1 EP1243795 A1 EP 1243795A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- gases
- vacuum
- pumped
- pumping system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
Definitions
- the present invention relates to pumping systems using multi-stage Roots type dry pump vacuum or type multi-lobe "claw", in which the inlet of the primary pump receives the gases to be pumped and the output of the primary pump discharges gases pumped to the atmosphere or to a recycling system pumped gases.
- the vacuum pumping system To create and maintain the vacuum in the vacuum vessel, the vacuum pumping system must first pump a relatively large gas flow to create the vacuum; in one second, the vacuum pumping system extracted from the enclosure to empties the residual gases or the treatment gases introduced voluntarily in the vacuum enclosure during the various stages of manufacturing processes in a controlled atmosphere. Gas flows to pumping by the vacuum pumping system are then lower.
- the treatment gases introduced voluntarily in the vacuum vessel are frequently gases expensive, and there is an advantage in recycling these gases at the outlet of the vacuum pumping system, by a gas recycling system pumped, to then reintroduce them in a controlled manner into the vacuum vessel. It is therefore necessary not to contaminate these gas as they pass through the vacuum pumping system, and that's a second reason why we have to use pumps Roots or claw dry primers, rather than pumps traditional oil seal primers.
- the inlet of the primary pump receives the gases to be pumped, either directly from the vacuum enclosure, either indirectly by a secondary pump which can be a pump turbomolecular.
- the primary pump delivers the pumped gases directly to the atmosphere or directly to a system of recycling of pumped gases.
- these very pure gases are used at low pressure in the vacuum vessel, and are evacuated by a multi-stage primary dry pump pumping system Roots type or multi-lobe claw type. So the document US 4 504 201 A describes a multi-stage pump of the Roots type and two claw floors. The top floor pushes the atmosphere.
- the gas to be evacuated is sucked by the first stage of the pump then compressed in the stages following until reaching a pressure slightly higher than the atmospheric pressure at the exit of the top floor and so be released to the atmosphere or returned to a recycling system for pumped gases.
- Rapid blocking and destruction of the pump is due blockage of the last stage of the pump, stage which drives the gas at a pressure close to atmospheric pressure.
- the structure of the dry primary pumps includes a stator in which rotate two mechanically coupled rotors and laterally offset from each other.
- the rotors are held by bearings, and are separated from the stator by the gas slide contained in the mechanical clearances between the rotor and the stator or pump body.
- the dissipation of calories in a stage of the pump is carried out, for a very small part, by conduction across the rotor axis towards the pump body, and for a preponderant part by conduction through the gas slide between the rotor and the stator.
- the problem proposed by the present invention is to design a new vacuum pumping system structure to avoid destruction of the dry primary pump in the case of pumping gas with low thermal conductivity, in using known multi-stage dry primary pumps without modify them, also keeping the same technique possible recycling, thus avoiding the development of a new pump.
- a system vacuum pump comprises a primary pump Roots or claw type multi-stage dryer, pump inlet primary receiving the gases to be pumped and the pump outlet primary pumping the pumped gases towards the atmosphere or towards a pumped gas recycling system.
- the system vacuum pumping system includes an additional pump whose inlet is connected to the output of the primary pump and whose output back to the atmosphere or to the gas recycling system pumps.
- a vacuum hose is connected in parallel on the additional pump, and includes a non-return valve allowing gas from the primary pump to pass.
- the pump additional is a dry pump of technology other than Roots or claw and adapted to safely support the elevation of temperature due to the final compression of the pumped gases.
- the pump additional is a diaphragm pump.
- the additional pump is a piston pump.
- the additional pump must be sized to be able to pump all of the gas flow through the system vacuum pumping during the vacuum pumping steps at low pressure, for example to pump the process gas flow during the low pressure manufacturing process steps in a vacuum enclosure.
- the additional pump can be sized to be just capable of pumping said flow of gas during the steps of pumping a vacuum at low pressure.
- the drain line must be dimensioned way to let through the important gas flow during the stages for vacuuming an empty enclosure.
- the vacuum pumping system according to the invention can be connected to a vacuum enclosure containing or in which are injected gases with low thermal conductivity.
- Low thermal conductivity gases may include argon or xenon.
- the pumped gases are discharged at the outlet of the vacuum pumping system in a gas recycling system pumps.
- the pumped gas recycling system extracts and recycles said gases with low thermal conductivity, to reinject them from controlled manner in the vacuum vessel.
- a vacuum pumping system in the embodiment illustrated schematically on Figure 1, includes a primary pump 1 dry multi-stage Roots type or claw, whose inlet 2 receives the gases to be pumped from a vacuum chamber 3, and the outlet 4 of which discharges the gases pumped to an output stage 5 comprising an additional pump 6 and a drain line 7.
- the additional pump 6 has an inlet 8 connected to the outlet 4 of the primary pump 1, and has an outlet 9 which back to the outside atmosphere or to a system of recycling of pumped gases 10.
- Pre-hose 7 is connected in parallel on additional pump 6, i.e. its input is connected to input 8 of additional pump 6 and to output 4 of the primary pump 1, and its output is connected to the output 9 of the additional pump 6 and to the atmosphere or to the recycling of pumped gases 10.
- the evacuation pipe 7 includes a non-return valve 11, which allows the gases of entry to exit while prohibiting their movement from the exit to the entrance. Thus, the non-return valve 11 allows passage gases from outlet 4 of the primary pump 1.
- the additional pump 6 is a dry pump of technology different from the Roots or claw technologies used for primary pump 1, and is adapted to support without damage the temperature rise due to the final compression of the gases pumped before being discharged to the atmosphere or to the pumped gas recycling system 10.
- a first example of an additional pump that can suitable is a diaphragm pump, as shown schematically in Figure 3. It is understood that such a pump to membranes is a dry pump, that is to say in which the joint sealing of the pump is not achieved by a liquid volume. It is also understood that the membrane pump structure does not does not have a rotor isolated from the stator by the blade of pumped gases.
- a second example of an additional pump that may be suitable is a piston pump, which is a well-known structure in the state of the art. In such a piston pump, there is also, no rotor isolated from the stator by a blade of pumped gases.
- the additional pump 6 must be dimensioned so as to be able to pump the entire process gas flow through the vacuum pumping system during the pumping stages from vacuum to low pressure. During these stages where the pumped gas is low pressure, the gas flow is relatively low. So it is enough that the additional pump be sized to be fair capable of pumping said gas flow, so that inlet 8 of the additional pump 6 is at a much lower pressure at atmospheric pressure, and the primary pump 1 must thus achieve a reduced compression ratio which consequently reduces the heating of the gases passing through it and the heating which results on its constituent parts.
- the additional pump 6 is capable of pumping the entire gaseous flow of the operating regime normal, the non-return valve 11 ensuring the maintenance of the pressure difference between inlet 8 and outlet 9 of the pump additional 6.
- Pre-hose 7 is required to allow pass the gas flow at a higher flow rate than the primary pump 1 must evacuate at the start of emptying of a vacuum chamber 3.
- the gases being pumped generally do not include low gas thermal conductivity, and the compression that the last stage of primary pump 1 is lower than that the vacuum pumping system must perform in operating mode normal, i.e. when the pressure in the vacuum vessel 3 is very low.
- the primary pump 1 is thus capable of ensuring that only the step of vacuuming the vacuum chamber 3, through the priming line 7, and the additional pump 6 has not significant effect on the functioning of the system.
- the pipeline 7 should be dimensioned so that the significant gas flow during the steps of feed-through the vacuum chamber 3.
- the pumped gas recycling system 10 generates a gas flow recycled.
- the flow of recycled gas is sent through a pipeline of recycling 110 to a piloted gas source 12 which is itself connected to the vacuum enclosure 3 by an injection pipe 13 to inject into the vacuum vessel 3 appropriate quantities of gas during programmed operating steps.
- the primary pump 1 is for example a multi-stage dry pump Roots type, as illustrated more clearly on Figure 2.
- the stator 14 defines a succession of compression chambers, for example the compression chambers 15, 16 and 17, in which rotate Roots type compression lobes carried by two rotors parallel such as the rotor 20 mechanically coupled, with gas passage pipes to let gases pass successively between the adjacent compression chambers.
- Rotors such as rotor 20 are mounted parts rotating on bearings, and a play is necessarily present between the compression lobes and the walls of the stator 14. A blade therefore exists between the compression lobes of the rotors and the stator mass 14. In the case of pumping gas at low heat conduction, the gas blade effectively insulates the lobes compression of the rotors relative to the stator, and therefore opposes at the passage of heat energy from the rotors to stator 14. It this results in the heating of rotors such as rotor 20.
- This heating is more accentuated in the last floor 17 of the primary pump, stage where the most compression occurs important gas.
- the vacuum pumping system as illustrated in the figure 1 according to the invention makes it possible to lower the pressure at outlet 4 of the primary pump 1, thereby reducing overheating of the top stage of the primary pump 1.
- This effect is particularly advantageous during pumping gas with low thermal conduction, and prevents destruction primary pump 1.
- the operation of the system according to the invention is the following: at the start of pumping of the gases present in an enclosure at vacuum 3, the primary pump 1 sucks the gases at its inlet 2 and the compresses to discharge them at its outlet 4 at pressure close to the atmospheric pressure.
- the gas flow is significant, and the pumped gas mixtures generally contain good gases coefficient of thermal conduction.
- Primary pump type 1 Multi-stage Roots is thus capable of ensuring the pumping of this gas flow, during a vacuuming step.
- the gas driven back to its outlet 4 mainly pass through the hose 7 to through the non-return valve 11, to escape towards the atmosphere.
- the additional pump 6 sees only a weak pass portion of the discharged gas flow, its pumping capacity being scaled down.
- the process steps can be carried out under vacuum, by example for the manufacture of semiconductors.
- process are injected into the vacuum enclosure 3 by the gas source 12 through the injection pipe 13.
- These process gases can be insulating gases such as argon or xenon, in the stages where these gases are used for example in sources of light emitting in the deep ultraviolet.
- the gas flows pumped being weak, the additional pump 6 is capable of ensuring the pumping of all the gas flow leaving the primary pump 1 by output 4, and no flow flows through the drain line 7.
- the additional pump 6 produces a pressure lowering at its inlet 8, i.e. at the outlet 4 of the primary pump 1.
- the primary pump 1 is thus capable of withstand the presence of gases with low thermal conductivity such than argon or xenon in the flow of pumped gases, without exaggerated heating of its elements.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Reciprocating Pumps (AREA)
- Compressor (AREA)
Abstract
Description
- la figure 1 est une vue générale schématique d'un système de pompage à vide selon un mode de réalisation de l'invention, connecté à une enceinte à vide ;
- la figure 2 est une vue de côté en coupe longitudinale illustrant une structure possible de pompe Roots multi-étagée ; et
- la figure 3 est une vue de côté en coupe longitudinale d'une structure possible de pompe à membranes.
Claims (9)
- Système de pompage à vide à pompe primaire sèche multi-étagée (1) de type Roots ou claw, dans lequel l'entrée (2) de la pompe primaire (1) reçoit les gaz à pomper et la sortie (4) de la pompe primaire (1) refoule les gaz pompés vers l'atmosphère ou vers un système de recyclage des gaz pompés (10), caractérisé en ce qu'il comprend :une pompe additionnelle (6) dont l'entrée (8) est raccordée à la sortie (4) de la pompe primaire (1) et dont la sortie (9) refoule vers l'atmosphère ou vers le système de recyclage des gaz pompés (10),une canalisation de prévidage (7) raccordée en parallèle sur la pompe additionnelle (6) et comportant un clapet anti-retour (11) laissant passer les gaz provenant de la pompe primaire (1),la pompe additionnelle (6) étant une pompe sèche de technologie autre que Roots ou claw et adaptée pour supporter sans dommage l'élévation de température due à la compression finale des gaz pompés.
- Système de pompage à vide selon la revendication 1, caractérisé en ce que la pompe additionnelle (6) est une pompe à membranes.
- Système de pompage à vide selon la revendication 1, caractérisé en ce que la pompe additionnelle (6) est une pompe à pistons.
- Système de pompage à vide selon l'une quelconque des revendications 1 à 3, caractérisé en ce que la pompe additionnelle est dimensionnée de façon à être capable de pomper tout le flux de gaz traversant le système de pompage à vide pendant les étapes de pompage d'un vide à basse pression.
- Système de pompage à vide selon la revendication 4, caractérisé en ce que la pompe additionnelle (6) est dimensionnée de façon à être juste capable de pomper ledit flux de gaz pendant les étapes de pompage d'un vide à basse pression.
- Système de pompage à vide selon l'une quelconque des revendications 1 à 5, caractérisé en ce que la canalisation de prévidage (7) est dimensionnée de façon à laisser passer le flux gazeux important au cours des étapes de prévidage d'une enceinte à vide (3).
- Système de pompage à vide selon l'une quelconque des revendications 1 à 6, caractérisé en ce qu'il est raccordé à une enceinte à vide (3) contenant ou dans laquelle sont injectés des gaz à faible conductivité thermique.
- Système de pompage à vide selon la revendication 7, dans lequel les gaz à faible conductivité thermique comprennent l'argon ou le xénon.
- Système de pompage à vide selon l'une des revendications 7 ou 8, caractérisé en ce que les gaz pompés sont refoulés dans un système de recyclage des gaz pompés (10) qui extrait et recycle lesdits gaz à faible conductivité thermique.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0103678 | 2001-03-19 | ||
FR0103678A FR2822200B1 (fr) | 2001-03-19 | 2001-03-19 | Systeme de pompage pour gaz a faible conductivite thermique |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1243795A1 true EP1243795A1 (fr) | 2002-09-25 |
EP1243795B1 EP1243795B1 (fr) | 2004-05-19 |
Family
ID=8861270
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02356050A Expired - Lifetime EP1243795B1 (fr) | 2001-03-19 | 2002-03-13 | Pompe à vide à deux étages |
Country Status (6)
Country | Link |
---|---|
US (1) | US6644931B2 (fr) |
EP (1) | EP1243795B1 (fr) |
JP (1) | JP4166491B2 (fr) |
AT (1) | ATE267345T1 (fr) |
DE (1) | DE60200493T2 (fr) |
FR (1) | FR2822200B1 (fr) |
Cited By (7)
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DE202009003980U1 (de) | 2009-03-24 | 2010-08-19 | Vacuubrand Gmbh + Co Kg | Vakuumpumpe |
WO2014111471A1 (fr) * | 2013-01-21 | 2014-07-24 | Sterling Industry Consult Gmbh | Agencement de pompe et procédé permettant de mettre sous vide une chambre remplie de vapeur |
WO2015197138A1 (fr) * | 2014-06-27 | 2015-12-30 | Ateliers Busch Sa | Méthode de pompage dans un système de pompes à vide et système de pompes à vide |
WO2016045753A1 (fr) * | 2014-09-26 | 2016-03-31 | Ateliers Busch Sa | Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage |
WO2016050313A1 (fr) * | 2014-10-02 | 2016-04-07 | Ateliers Busch Sa | Systeme de pompage pour generer un vide et procede de pompage au moyen de ce systeme de pompage |
CN105889072A (zh) * | 2016-06-25 | 2016-08-24 | 余林岚 | 一种应用于厌氧胶加工的抽真空机组 |
EP3842642A1 (fr) * | 2010-04-19 | 2021-06-30 | Ebara Corporation | Appareil de pompe à vide sèche |
Families Citing this family (38)
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JP2008008302A (ja) * | 2001-09-06 | 2008-01-17 | Ulvac Japan Ltd | 多段式容積移送型ドライ真空ポンプの省エネ方法 |
WO2003023229A1 (fr) * | 2001-09-06 | 2003-03-20 | Ulvac, Inc. | Systeme de pompe a vide et procede de fonctionnement d'un systeme de pompe a vide |
JP2003343469A (ja) * | 2002-03-20 | 2003-12-03 | Toyota Industries Corp | 真空ポンプ |
GB0229353D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping system and method of operating a vacuum pumping arrangement |
JP2004263686A (ja) * | 2003-01-06 | 2004-09-24 | Toyota Industries Corp | 往復動型ポンプ及び真空ポンプ |
WO2004083643A1 (fr) * | 2003-03-19 | 2004-09-30 | Ebara Corporation | Pompe volumetrique a vide |
FR2854933B1 (fr) * | 2003-05-13 | 2005-08-05 | Cit Alcatel | Pompe moleculaire, turbomoleculaire ou hybride a vanne integree |
US7094036B2 (en) * | 2003-09-24 | 2006-08-22 | The Boc Group Plc | Vacuum pumping system |
GB2407132A (en) * | 2003-10-14 | 2005-04-20 | Boc Group Plc | Multiple vacuum pump system with additional pump for exhaust flow |
US7021888B2 (en) * | 2003-12-16 | 2006-04-04 | Universities Research Association, Inc. | Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump |
JP4633370B2 (ja) * | 2004-02-17 | 2011-02-16 | 財団法人国際科学振興財団 | 真空装置 |
TWI234801B (en) * | 2004-05-13 | 2005-06-21 | Powerchip Semiconductor Corp | Equipment and method for improving remain gas to pollute wafer |
US7189066B2 (en) * | 2004-05-14 | 2007-03-13 | Varian, Inc. | Light gas vacuum pumping system |
GB0418771D0 (en) * | 2004-08-20 | 2004-09-22 | Boc Group Plc | Evacuation of a load lock enclosure |
US20070020115A1 (en) * | 2005-07-01 | 2007-01-25 | The Boc Group, Inc. | Integrated pump apparatus for semiconductor processing |
JP4709016B2 (ja) * | 2006-01-12 | 2011-06-22 | アネスト岩田株式会社 | 複合圧縮機 |
TWI467092B (zh) * | 2008-09-10 | 2015-01-01 | Ulvac Inc | 真空排氣裝置 |
FR2952683B1 (fr) * | 2009-11-18 | 2011-11-04 | Alcatel Lucent | Procede et dispositif de pompage a consommation d'energie reduite |
CA2795793A1 (fr) | 2010-04-20 | 2011-10-27 | Sandvik Intellectual Property Ab | Systeme de compresseur d'air et procede de fonctionnement |
CN102654117B (zh) * | 2011-03-04 | 2014-10-22 | 中国科学院沈阳科学仪器研制中心有限公司 | 一种真空泵用排气装置 |
US10428807B2 (en) * | 2011-12-09 | 2019-10-01 | Applied Materials, Inc. | Pump power consumption enhancement |
JP6138144B2 (ja) * | 2011-12-14 | 2017-05-31 | ステアリング・インダストリー・コンサルト・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツングSterling Industry Consult GmbH | チャンバを空にして該チャンバから取り出されたガスを浄化するための装置及び方法 |
FR2993614B1 (fr) * | 2012-07-19 | 2018-06-15 | Pfeiffer Vacuum | Procede et dispositif de pompage d'une chambre de procedes |
DE102012220442A1 (de) * | 2012-11-09 | 2014-05-15 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems |
DE102013108090A1 (de) * | 2013-07-29 | 2015-01-29 | Hella Kgaa Hueck & Co. | Pumpenanordnung |
DE202013104111U1 (de) | 2013-09-10 | 2013-12-03 | Ilmvac Gmbh | Trockenlaufender Vakuumpumpstand |
US20150139817A1 (en) * | 2013-11-19 | 2015-05-21 | Gardner Denver Thomas, Inc. | Ramp-up optimizing vacuum system |
CA2943315C (fr) * | 2014-03-24 | 2021-09-21 | Ateliers Busch Sa | Methode de pompage dans un systeme de pompes a vide et systeme de pompes a vide |
CN104019017B (zh) * | 2014-06-18 | 2016-08-17 | 宝钢工程技术集团有限公司 | 一种抽真空工艺设备 |
DE202014005279U1 (de) * | 2014-06-26 | 2015-10-05 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpen-System |
JP6418838B2 (ja) * | 2014-07-31 | 2018-11-07 | エドワーズ株式会社 | ドライポンプ及び排ガス処理方法 |
CN105464932A (zh) * | 2014-08-15 | 2016-04-06 | 北京和华腾真空泵压缩机有限公司 | 一种抽真空排气装置 |
CN104806487A (zh) * | 2015-05-16 | 2015-07-29 | 肥西县三星玻璃有限公司 | 除尘器用一开一备真空泵组 |
US9982666B2 (en) * | 2015-05-29 | 2018-05-29 | Agilient Technologies, Inc. | Vacuum pump system including scroll pump and secondary pumping mechanism |
US10094381B2 (en) * | 2015-06-05 | 2018-10-09 | Agilent Technologies, Inc. | Vacuum pump system with light gas pumping and leak detection apparatus comprising the same |
CN107942918B (zh) * | 2017-12-22 | 2023-04-18 | 大连华锐重工集团股份有限公司 | 自适应式干式真空机械泵电控系统及控制方法 |
FR3098869B1 (fr) * | 2019-07-17 | 2021-07-16 | Pfeiffer Vacuum | Groupe de pompage |
CN115210468A (zh) * | 2019-12-04 | 2022-10-18 | 阿特利耶博世股份有限公司 | 冗余泵送系统和利用此泵送系统的泵送方法 |
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Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010009083A1 (de) | 2009-03-24 | 2011-05-12 | Vacuubrand Gmbh + Co Kg | Vakuumpumpe |
DE102010009083B4 (de) * | 2009-03-24 | 2013-09-26 | Vacuubrand Gmbh + Co Kg | Vakuumpumpe |
DE202009003980U1 (de) | 2009-03-24 | 2010-08-19 | Vacuubrand Gmbh + Co Kg | Vakuumpumpe |
EP3842642A1 (fr) * | 2010-04-19 | 2021-06-30 | Ebara Corporation | Appareil de pompe à vide sèche |
WO2014111471A1 (fr) * | 2013-01-21 | 2014-07-24 | Sterling Industry Consult Gmbh | Agencement de pompe et procédé permettant de mettre sous vide une chambre remplie de vapeur |
CN105026758A (zh) * | 2013-01-21 | 2015-11-04 | 施特林工业咨询公司 | 泵组件和用于将充满蒸汽的腔室抽空的方法 |
RU2666720C2 (ru) * | 2014-06-27 | 2018-09-11 | Ателье Буш Са | Способ откачивания в системе вакуумных насосов и система вакуумных насосов |
WO2015197138A1 (fr) * | 2014-06-27 | 2015-12-30 | Ateliers Busch Sa | Méthode de pompage dans un système de pompes à vide et système de pompes à vide |
US11725662B2 (en) | 2014-06-27 | 2023-08-15 | Ateliers Busch Sa | Method of pumping in a system of vacuum pumps and system of vacuum pumps |
US10760573B2 (en) | 2014-06-27 | 2020-09-01 | Ateliers Busch Sa | Method of pumping in a system of vacuum pumps and system of vacuum pumps |
CN106662108A (zh) * | 2014-06-27 | 2017-05-10 | 阿特利耶博世股份有限公司 | 真空泵系统中的泵送方法以及真空泵系统 |
AU2014406724B2 (en) * | 2014-09-26 | 2019-09-19 | Ateliers Busch Sa | Vacuum-generating pumping system and pumping method using this pumping system |
RU2670640C1 (ru) * | 2014-09-26 | 2018-10-24 | Ателье Буш Са | Насосная система для создания вакуума и способ откачивания с использованием данной насосной системы |
RU2670640C9 (ru) * | 2014-09-26 | 2018-12-04 | Ателье Буш Са | Насосная система для создания вакуума и способ откачивания с использованием данной насосной системы |
WO2016045753A1 (fr) * | 2014-09-26 | 2016-03-31 | Ateliers Busch Sa | Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage |
RU2674297C2 (ru) * | 2014-10-02 | 2018-12-06 | Ателье Буш Са | Система откачки для создания вакуума и способ откачки при помощи этой системы откачки |
CN107002681A (zh) * | 2014-10-02 | 2017-08-01 | 阿特利耶博世股份有限公司 | 用于产生真空的泵送系统及利用此泵送系统的泵送方法 |
AU2014407987B2 (en) * | 2014-10-02 | 2019-10-31 | Ateliers Busch Sa | Pumping system for generating a vacuum and method for pumping by means of this pumping system |
US10808730B2 (en) | 2014-10-02 | 2020-10-20 | Ateliers Busch Sa | Pumping system for generating a vacuum and method for pumping by means of this pumping system |
WO2016050313A1 (fr) * | 2014-10-02 | 2016-04-07 | Ateliers Busch Sa | Systeme de pompage pour generer un vide et procede de pompage au moyen de ce systeme de pompage |
CN105889072A (zh) * | 2016-06-25 | 2016-08-24 | 余林岚 | 一种应用于厌氧胶加工的抽真空机组 |
Also Published As
Publication number | Publication date |
---|---|
JP2002339864A (ja) | 2002-11-27 |
US6644931B2 (en) | 2003-11-11 |
FR2822200A1 (fr) | 2002-09-20 |
DE60200493D1 (de) | 2004-06-24 |
JP4166491B2 (ja) | 2008-10-15 |
DE60200493T2 (de) | 2005-08-04 |
FR2822200B1 (fr) | 2003-09-26 |
US20020131870A1 (en) | 2002-09-19 |
EP1243795B1 (fr) | 2004-05-19 |
ATE267345T1 (de) | 2004-06-15 |
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