EP1199476A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP1199476A2
EP1199476A2 EP01124519A EP01124519A EP1199476A2 EP 1199476 A2 EP1199476 A2 EP 1199476A2 EP 01124519 A EP01124519 A EP 01124519A EP 01124519 A EP01124519 A EP 01124519A EP 1199476 A2 EP1199476 A2 EP 1199476A2
Authority
EP
European Patent Office
Prior art keywords
valve body
slide contact
guide pipe
circumferential surface
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01124519A
Other languages
German (de)
English (en)
Other versions
EP1199476A3 (fr
Inventor
Yoshinari Suzuki
Hiroyuki Ishigure
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyota Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Industries Corp filed Critical Toyota Industries Corp
Publication of EP1199476A2 publication Critical patent/EP1199476A2/fr
Publication of EP1199476A3 publication Critical patent/EP1199476A3/fr
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06Silencing
    • F04C29/065Noise dampening volumes, e.g. muffler chambers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type

Definitions

  • the present invention relates to passage structure for a vacuum pump that drives a gas transferring assembly based on rotation of a rotary shaft, generates vacuum action by transferring gas due to motion of the gas transferring assembly, and a backflow preventing means is interposed in a gas passage.
  • Japanese Unexamined Patent Publication No. 2-157490 and No. 8-14172 disclose a roots pump, a kind of vacuum pump, having a pair of coadjacent rotors.
  • the rotors are engaged with each other and relatively rotate. Rotation motion of a pair of the rotors rotating in mesh with each other transfers gas as compresses the gas.
  • a first rotary shaft is driven by a motor, and a second rotary shaft is driven by the first rotary shaft through gear mechanism.
  • the gas discharged from a main body of the pump is led to an exhaust gas control device via a gas passage outside the main body of the pump.
  • 2-157490 discloses a device that has a muffler interposed in the gas passage outside the main body of the pump.
  • pulsation arises in the gas passage outside the main body of the pump, which causes to produce noise.
  • a muffler is provided for restraining such noise, and a check valve is employed as the muffler.
  • a valve body constituting the check valve opens and closes a valve hole. The valve body closes the valve hole when the amount of the gas exhausted from the pump is zero. The check valve restrains the above-mentioned pulsation.
  • Some kind of exhaust e.g. Perfluorocarbon (PFC), etc.
  • PFC Perfluorocarbon
  • the check valve may not function as a device that prevents the pulsation.
  • a vacuum pump has a rotary shaft, a gas transferring assembly and a backflow preventing means.
  • the gas transferring assembly is driven based on rotation of the rotary shaft. Vacuum action is generated by transferring gas due to motion of the gas transferring assembly.
  • the backflow preventing means is interposed in a gas passage.
  • the backflow preventing means is constituted of a guide pipe, a valve body, a valve hole forming portion and an urging means.
  • the guide pipe forms as a part of the gas passage.
  • the valve body is slidably guided in an axial direction of the guide pipe therein.
  • the valve hole forming portion forms a valve hole which is opened and closed by the valve body.
  • the urging means urges the valve body in a direction to close the valve hole.
  • a slide contact means provided with a plurality of slide contact portions keeps in slide contact with one of the guide pipe and the valve body.
  • the slide contact means is interposed between an inner circumferential surface of the guide pipe and the valve body.
  • a plurality of the slide contact portions is disposed so as to be distributed around the inner circumferential surface of the guide pipe.
  • a slide contact range where the guide pipe and a plurality of the slide contact portions slide with respect to each other and a slide contact range where the valve body and a plurality of the slide contact portions slide with respect to each other in a circumferential direction of the guide pipe are a part of entire circumference of the guide pipe.
  • Such constitution prevents the solidified exhaust from being caught into gaps between the slide contact portions and the valve body and between the slide contact portions and the guide pipe, and avoids the solidified exhaust from remaining in the gaps.
  • the present invention further includes a valve guide portion which slide guides the valve body along the inner circumferential surface of the guide pipe.
  • a plurality of the slide contact portions is disposed on one of the outer circumferential surface of the valve body and the inner circumferential surface of the valve guide portion, and the slide contact portions are distributed around the circumferential wall so as to keep in slide contact with the other.
  • the present invention has such a feature that the valve guide portion is provided with a basic inner circumferential surface and the valve body is provided with a basic outer circumferential surface which is similar to the basic inner circumferential surface.
  • the slide contact portions are disposed on one of the basic inner circumferential surface and the basic outer circumferential surface so as to slide contact with the other. Accordingly, the guide pipe and the valve body keep in slide contact with each other via a plurality of the slide contact portions.
  • the present invention has such a feature that the valve body is provided with a shutter and an annular circumferential wall. A plurality of the slide contact portions is disposed on the circumferential wall of the valve body.
  • the valve body which slides in the guide pipe is provided with the slide contact portions, so that the valve guide portion on the guide pipe side and the slide contact portions smoothly slide relative to each other.
  • the present invention has such a feature that each shape of the slide contact portions is long in a direction in which the valve body moves. Accordingly, the slide contact portions are long in the direction in which the valve body moves, so that the valve body smoothly moves.
  • the present invention also includes a communication hole formed through the circumferential wall of the valve body so as to intercommunicate an outside of the circumferential wall and an inside of the circumferential wall. Accordingly, the communication hole is efficient in reducing flow resistance to the gas at the valve body.
  • a multi-stage roots pump 11 has a rotor housing 12, a front housing 13, an end plate 36, a rear housing 14, a cylinder block 15 and a plurality of partition walls 16.
  • the front housing 13 is coupled to the front end of the rotor housing 12.
  • the end plate 36 is coupled to the front housing 13.
  • the rear housing 14 is coupled to the rear end of the rotor housing 12.
  • the rotor housing 12 is constituted of the cylinder block 15 and a plurality of the partition walls 16.
  • the cylinder block 15 is constituted of a pair of block pieces 17, 18, and the partition walls 16 are constituted of a pair of wall pieces 161, 162.
  • a space between the front housing 13 and a frontmost partition wall 16 spaces between the partition walls 16 and a space between the rear housing 14 and a rearmost partition wall 16 are defined as pump chambers 51, 52, 53, 54, 55, respectively.
  • a rotary shaft 19 is rotatably supported by the front housing 13 and the rear housing 14 via radial bearings 21, 37.
  • a rotary shaft 20 is rotatably supported by the front housing 13 and the rear housing 14 via radial bearings 22, 38. Both the rotary shafts 19, 20 are disposed in parallel with each other in a horizontal direction.
  • the rotary shafts 19, 20 extend through the partition walls 16.
  • a plurality of rotors 23, 24, 25, 26, 27 is integrally formed with the rotary shaft 19 as gas transferring assemblies.
  • the same number of rotors 28, 29, 30, 31, 32 as the rotary shaft 19 is integrally formed with the rotary shaft 20.
  • the rotors 23 through 32 are congruously formed as seen in a direction of axes 191, 201 of the rotary shafts 19, 20. Thickness of the rotors 23, 24, 25, 26, 27 become thinner in this order. Also, thickness of the rotors 28, 29, 30, 31, 32 become thinner in this order.
  • a pair of the rotors 23, 28 is accommodated in the pump chamber 51 so as to engage with each other with a small gap.
  • a pair of the rotors 24, 29 is accommodated in the pump chamber 52 so as to engage with each other.
  • a pair of the rotors 25, 30, a pair of the rotors 26, 31 and a pair of the rotors 27, 32 are accommodated in the pump chambers 53, 54, 55, respectively.
  • a gear housing 33 is coupled to the rear housing 14.
  • the rotary shafts 19, 20 extend through the rear housing 14 and protrude their rear ends into the gear housing 33.
  • a pair of gears 34, 35 engaged with each other is secured to the respective rear ends of the rotary shafts 19, 20.
  • An electric motor M is installed to the gear housing 33.
  • Driving force of the electric motor M is transmitted to the rotary shaft 19 through a coupling 10, and the rotary shaft 19 is rotated by the electric motor M in a direction of an arrow R1 in Figs. 2a, 2b, 3a, 3b.
  • the rotary shaft 20 is driven by the electric motor through a pair of the gears 34, 35, and the rotary shaft 20 is rotated in a direction of an arrow R2 (a counter direction relative to the direction which the rotary shaft 19 rotates) as shown in Figs. 2a, 2b, 3a, 3b.
  • passages 163 are defined within the partition walls 16.
  • Fig. 1 and 2b passages 163 are defined within the partition walls 16.
  • inlets 164 and outlets 165 of the passages 163 are formed at the partition walls 16.
  • the coadjacent pump chambers 51, 52, 53, 54, 55 are intercommunicated via the passages 163, respectively.
  • an intake port 171 is formed through the block piece 17 so as to communicate with the pump chamber 51.
  • an exhaust port 181 is formed through the block piece 18 so as to communicate with the pump chamber 55. Gas introduced into the pump chamber 51 via the intake port 171 is transferred to the pump chamber 52 via the frontmost inlet 164, the frontmost passage 163 and the frontmost outlet 165 by rotation of the rotor 23, 28.
  • the gas is transferred in order of reducing volume, that is, in order of the pump chambers 52, 53, 54, 55.
  • the gas transferred into the pump chamber 55 is exhausted outside via the exhaust port 181.
  • the rotors 23 through 32 are the gas transferring assemblies in order to transfer the gas.
  • a flange 39 is coupled to the exhaust port 181.
  • a muffler 40 is coupled to the flange 39, and a cylindrical guide pipe 41 is coupled to the muffler 40.
  • an exhaust pipe 42 is coupled to the guide pipe 41.
  • the exhaust pipe 42 is coupled to an exhaust gas control device (not shown).
  • the flange 39, the muffler 40, the guide pipe 41 and the exhaust pipe 42 constitute passage structure for transferring exhaust discharged from the multi-stage roots pump 11 to the exhaust gas control device.
  • a valve body 43 and a return spring 44 are accommodated in the guide pipe 41.
  • a tapered valve hole 411 is formed in the guide pipe 41, and the valve body 43 opens and closes the valve hole 411 in accordance with a reciprocation thereof.
  • the valve body 43 is constituted of a shutter 45 closing the valve hole 411, a cylindrical circumferential wall 46, a plurality of protrusions 47 (four in the present embodiment) disposed on an outer circumferential surface 462 of the circumferential wall 46, and a seal ring 50 secured to an outer periphery of the shutter 45.
  • the guide pipe 41, the valve body 43 and the return spring 44 constitute a backflow preventing means.
  • the guide pipe 41 also functions as a valve hole forming portion forming the valve hole 411 which is opened and closed by the valve body 43.
  • the return spring 44 is an urging means for urging the valve body 43 in a direction to close the valve hole 411.
  • a plurality of the protrusions 47 is disposed on the outer circumferential surface 462 of the circumferential wall 46 of the valve body 43 in equiangular positions so as to be distributed around the circumferential wall.
  • the seal ring 50 contacts with and separates from a tapered surface of the valve hole 411. When the seal ring 50 is in contact with the tapered surface of the valve hole 411, the valve hole 411 is closed by the valve body 43.
  • Communication holes 461 are bored through the circumferential wall 46 between the coadjacent protrusions 47.
  • each shape of the protrusions 47 is long in a direction in which the valve body 43 moves, that is, a direction of an axis L2 of the valve body 43.
  • Protrusion ends 471 of the protrusions 47 keep in slide contact with an inner circumferential surface 412 as a valve guide portion of the guide pipe 41.
  • the inner circumferential surface 412 of the guide pipe 41 and the outer circumferential surface 462 of the circumferential wall 46 of the valve body 43 are cylindrical surfaces. As shown in Fig.
  • an axis L1 of the inner circumferential surface 412 and the axis L2 of the outer circumferential surface 462 are substantially correspondent with each other.
  • the inner circumferential surface 412 as a basic inner circumferential surface and the outer circumferential surface 462 as a basic outer circumferential surface are similar to each other, and the protrusions 47 disposed on the basic outer circumferential surface 462 of the valve body 43 keep in slide contact with the basic inner circumferential surface 412 of the guide pipe 41.
  • the protrusions 47 integrally formed on the valve body 43 are slide contact portions which keep in slide contact with the guide pipe 41, and a plurality of the protrusions constitutes a slide contact means which is interposed between the inner circumferential surface 412 of the guide pipe 41 and the valve body 43.
  • the exhaust is discharged from the smallest pump chamber 55 to the flange 39 via the exhaust port 181, and finally reaches the valve hole 411 via the muffler 40.
  • force acting on the shutter 45 of the valve body 43 based on pressure in the muffler 40 is higher than force acting on the shutter 45 based on resultant force of pressure in the guide pipe 41 and urging force of the return spring 44, the valve body 43 opens the valve hole 411.
  • the exhaust passed through the valve hole 411 passes by the circumferential wall 46 of the valve body 43, then passes through the communication holes 461, and finally flows into the exhaust pipe 42.
  • the same reference numerals denote the same components in Fig. 6 as compared with Figs. 1 through 5.
  • the communication holes 463 are open at an opposite end of the circumferential wall 46 relative to the shutter 45. In other words, a periphery of the circumferential wall 46 at the opposite end relative to the shutter 45 is separated by forming the communication holes 463. Such the communication holes 463 further reduce the flow resistance to the exhaust, and are more efficient than those of the first embodiment.
  • a third embodiment of the present invention will now be described with reference to Fig. 7.
  • the same reference numerals denote the same components in Fig. 7 as compared with Figs. 1 through 5.
  • a plurality of protrusions 47B is provided with a pair of tip portions 472, 473 in a direction in which the valve body 43 moves.
  • Such sharp tip shape of the protrusions 47B is efficient in avoiding the solidified exhaust from being caught into the gaps between the protrusion end 471 of the protrusions 47B and the inner circumferential surface 412.
  • a fourth embodiment of the present invention will now be described with reference to Fig. 8.
  • the same reference numerals denote the same components in Fig. 8 as compared with Figs. 1 through 5.
  • a pair of chamfered surfaces 464, 465 is formed on the communication hole 461. Providing with a pair of the chamfered surfaces 464, 465 makes the gas flow smoothly, so that the flow resistance to the exhaust at the valve body 43 reduces.
  • a fifth embodiment of the present invention will now be described with reference to Fig. 9.
  • the same reference numerals denote the same components in Fig. 9 as compared with Figs. 1 through 5.
  • a pair of protrusions 47C, 47D is disposed at a predetermined interval so as to wrap over each other as seen in a direction in which the valve body 43 moves, and a plurality of a pair of the protrusions 47C, 47D is disposed on the circumferential wall 46 so as to be distributed around the circumferential wall 46. Disposed at a distant interval, a pair of the protrusions 47C, 47D further contributes to stabilizing a posture while the valve body 43 moves.
  • a sixth embodiment of the present invention will now be described with reference to Fig. 10.
  • the same reference numerals denote the same components in Fig. 10 as compared with Figs. 1 through 5.
  • a plurality of protrusions 47E is disposed between the coadjacent communication holes 461, and a plurality of protrusions 47F is disposed at a lower reaches of the communication holes 461.
  • a plurality of the protrusions 47E, which is disposed on the circumferential wall 46 so as to be distributed around the circumferential wall 46, and a plurality of the protrusions 47F, which is disposed on the circumferential wall 46 so as to be distributed around the circumferential wall 46, are not wrapped over each other as seen in a direction in which the valve body 43 moves.
  • the protrusions 47F make the exhaust flow smoothly into the communication holes 461.
  • a seventh embodiment of the present invention will now be described with reference to Figs. 11a and 11b.
  • the same reference numerals denote the same components in Figs. 11a and 11b as compared with Figs. 1 through 5.
  • a plurality of protrusions 48 (four in the present embodiment) is disposed on a basic inner circumferential surface 413 of the guide pipe 41 and is disposed in equiangular positions so as to be distributed in a direction of a circumference of the basic inner circumferential surface 413.
  • the protrusions 48 are long in a direction in which a valve body 49 moves.
  • Protrusion ends 481 of the protrusions 48 keep in slide contact with a basic outer circumferential surface 466 of the valve body 49.
  • the basic outer circumferential surface 466 is similar to the basic inner circumferential surface 413.
  • a slide contact means provided with a plurality of the slide contact portions which keeps in slide contact with one of the guide pipe and the valve body is interposed between the circumferential surface of the guide pipe and the valve body, and a plurality of the slide contact portions is disposed on the circumferential surface of the guide pipe so as to be distributed around the circumferential wall.
  • Passage structure for a vacuum pump has a rotary shaft, a gas transferring assembly and a backflow preventing means.
  • the gas transferring assembly is driven based on rotation of the rotary shaft. Vacuum action is generated by transferring gas due to motion of the gas transferring assembly.
  • the backflow preventing means is constituted of a guide pipe, a valve hole forming portion, a valve body and a return spring, and is interposed in a gas passage.
  • the guide pipe accommodates the valve body and the return spring, and forms a tapered valve hole.
  • the valve body is constituted of a shutter closing the valve hole, a cylindrical circumferential wall, a plurality of slide contact portions disposed on an outer circumferential surface of the circumferential wall so as to be distributed around the inner circumferential surface of the guide pipe, and a seal ring fitted to a periphery of the shutter.
  • the valve body opens and closes the valve hole.
  • the return spring urges the valve body in a direction to close the valve hole.
  • a plurality of the slide contact portions keeps in slide contact with one of the guide pipe and the valve body, and is interposed between an inner circumferential surface of the guide pipe and the valve body.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Check Valves (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressor (AREA)
  • Lift Valve (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP01124519A 2000-10-16 2001-10-12 Pompe à vide Withdrawn EP1199476A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000314966 2000-10-16
JP2000314966A JP2002122088A (ja) 2000-10-16 2000-10-16 真空ポンプにおける流路構造

Publications (2)

Publication Number Publication Date
EP1199476A2 true EP1199476A2 (fr) 2002-04-24
EP1199476A3 EP1199476A3 (fr) 2003-03-05

Family

ID=18794137

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01124519A Withdrawn EP1199476A3 (fr) 2000-10-16 2001-10-12 Pompe à vide

Country Status (2)

Country Link
EP (1) EP1199476A3 (fr)
JP (1) JP2002122088A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1548270A1 (fr) * 2003-11-28 2005-06-29 Tokai Rubber Industries, Ltd. Connecteur avec une vanne encastrée
CN102168761A (zh) * 2011-04-29 2011-08-31 武汉肤尔医用科技有限公司 带有锁定机构的双向气阀
US11111920B2 (en) * 2019-06-25 2021-09-07 Lg Electronics Inc. Suction valve assembly for a compressor and a compressor having a suction valve assembly

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4490306B2 (ja) * 2005-02-23 2010-06-23 トヨタ自動車株式会社 逆止弁
JP4698371B2 (ja) * 2005-10-04 2011-06-08 株式会社ショーワ 油圧式動力舵取装置
JP4915427B2 (ja) * 2009-03-30 2012-04-11 ブラザー工業株式会社 液体供給ジョイント、これを使用した液体吐出ヘッド及び記録装置
JP5615538B2 (ja) * 2009-12-07 2014-10-29 川崎重工業株式会社 排気通路制御弁
JP5981562B2 (ja) * 2012-11-21 2016-08-31 株式会社コガネイ 逆止弁

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02157490A (ja) 1988-11-07 1990-06-18 Alcatel Cit 多段式ルーツ型真空ポンプ
JPH0814172A (ja) 1994-06-24 1996-01-16 Anlet Co Ltd 回転式気体圧送装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2653792A (en) * 1949-11-05 1953-09-29 Marquette Metal Products Co Check valve with plug mating a flanged nonmetallic sealing element
US4368756A (en) * 1978-12-13 1983-01-18 Mark Controls Corporation Check valve
JPS5862397A (ja) * 1981-10-12 1983-04-13 Sanden Corp スクロ−ル型圧縮機
TW400919U (en) * 1996-03-12 2000-08-01 Toyoda Automatic Loom Works Variable volume capacity typed compressor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02157490A (ja) 1988-11-07 1990-06-18 Alcatel Cit 多段式ルーツ型真空ポンプ
JPH0814172A (ja) 1994-06-24 1996-01-16 Anlet Co Ltd 回転式気体圧送装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1548270A1 (fr) * 2003-11-28 2005-06-29 Tokai Rubber Industries, Ltd. Connecteur avec une vanne encastrée
CN102168761A (zh) * 2011-04-29 2011-08-31 武汉肤尔医用科技有限公司 带有锁定机构的双向气阀
CN102168761B (zh) * 2011-04-29 2013-06-19 武汉肤尔医用科技有限公司 带有锁定机构的双向气阀
US11111920B2 (en) * 2019-06-25 2021-09-07 Lg Electronics Inc. Suction valve assembly for a compressor and a compressor having a suction valve assembly

Also Published As

Publication number Publication date
JP2002122088A (ja) 2002-04-26
EP1199476A3 (fr) 2003-03-05

Similar Documents

Publication Publication Date Title
CN108691765B (zh) 外旋轮线真空泵
US20200208629A1 (en) Pump assembly having two pumps provided in a single housing
EP1347176B1 (fr) Pompe à vide
EP0648932B1 (fr) Compresseur à spirales
EP0401968B1 (fr) Compresseur rotatif
EP1199476A2 (fr) Pompe à vide
US6554594B2 (en) Shaft seal structure for vacuum pump
EP1199475A2 (fr) Pompe à vide
US4925378A (en) Rotary vane compressor with valve controlled pressure biased sealing means
CN111963434B (zh) 泵体组件、压缩机和空调器
JP3752098B2 (ja) 気体圧縮機
JPS61118583A (ja) ベ−ン型回転圧縮機
CN103362810B (zh) 级联型叶片压缩机
JP4071976B2 (ja) 気体圧縮機
JPS6354148B2 (fr)
CN110857690A (zh) 螺旋式压缩机
JP2001241388A (ja) ロータリ型ポンプ
JPH01208589A (ja) 圧縮機
JPH0570000B2 (fr)
JPH04314980A (ja) オルダム コンプレッサー
JPS5941601A (ja) 旋回円筒ピストン型容積式流体装置
JPH01130085A (ja) ベーン型の回転式圧縮機
MXPA00001111A (en) Grooved rotor for an internal gear pump
JPS5820986A (ja) 回転式圧縮機

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20011012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

17Q First examination report despatched

Effective date: 20030716

AKX Designation fees paid

Designated state(s): DE FR GB

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20040127