EP1185858A2 - Dispositif de couche chauffante pour capteur de gaz haute temperature - Google Patents

Dispositif de couche chauffante pour capteur de gaz haute temperature

Info

Publication number
EP1185858A2
EP1185858A2 EP00989885A EP00989885A EP1185858A2 EP 1185858 A2 EP1185858 A2 EP 1185858A2 EP 00989885 A EP00989885 A EP 00989885A EP 00989885 A EP00989885 A EP 00989885A EP 1185858 A2 EP1185858 A2 EP 1185858A2
Authority
EP
European Patent Office
Prior art keywords
heating
temperature
sensor
heating conductor
conductor track
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00989885A
Other languages
German (de)
English (en)
Inventor
Michael Bischof
Burkhard Kessler
Ralf Moos
Ralf MÜLLER
Willi Müller
Carsten Plog
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mercedes Benz Group AG
Original Assignee
DaimlerChrysler AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DaimlerChrysler AG filed Critical DaimlerChrysler AG
Publication of EP1185858A2 publication Critical patent/EP1185858A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/4067—Means for heating or controlling the temperature of the solid electrolyte

Definitions

  • the invention relates to an arrangement of a heating layer for a high-temperature gas sensor according to the preamble of claim 1.
  • Sensors that are used in the exhaust gas of an internal combustion engine not only have to be stable to high temperatures, but they also usually have to be regulated to a specific operating temperature, since both the temperature of the exhaust gas and the exhaust gas throughput are dependent on the operating state of the engine and vary widely.
  • Such sensors are usually operated at a few hundred degrees Celsius.
  • a typical example of this is the ⁇ probe, which can be operated at temperatures up to 1000 ° C.
  • FIGS. 1 a, 1 b and 1 c Novel, planar exhaust gas sensors, which are currently being built by different manufacturers, consist of a structure as shown in FIGS. 1 a, 1 b and 1 c in different perspectives.
  • FIG. 1a shows a top view of the top of the sensor
  • FIG. 1b shows a side view of the sensor at the interface marked with a broken line
  • FIG. 1c shows a bottom view of the bottom of the sensor.
  • a coordinate system with an x, y and z axis is shown for orientation.
  • the figures show an elongated, rectangular carrier 1, also called a transducer, which in general. consists of an electrically insulating substrate, and on the underside 5, as shown in Figure 1 b and 1 c, a heating layer 8 is applied.
  • This heating layer 8 has a heating conductor 6 and a supply part 2.
  • the heating conductor 6 is located on the underside of the sensor under the functional layer 4, which is arranged on the top of the sensor 7.
  • the Functional layer 4 determines the special properties of the sensor, such as, for example, the selectivity to a specific gas or the like.
  • an electrode structure 3 adapted to the special requirements is then applied under the functional layer 4.
  • a temperature that is constant over the location must prevail on the sensor top 7 in the area in which the functional layer 4 is applied. This is achieved with the help of heating layer 8 and a temperature sensor, which is not shown in this figure and is located on the underside of the sensor.
  • the functional layer 4 is regulated to a certain temperature, the so-called operating temperature.
  • Another function of the elongated-looking support is to ensure that the temperature on the side facing away from the sensor tip 10, the so-called sensor connection side 9, is so low that plastic-insulated cables are attached to the end of the supply part 2 of the heating layer 8 as a measuring line or as a power supply line can.
  • the heating conductor 6 is arranged as a heating meander.
  • the evenly zigzag-shaped meander band runs parallel to the y-axis.
  • the constant height A of the meander corresponds to the length L of the functional layer 4 lying above it.
  • the width b of the heating conductor track 6 is constant. The two ends of the heating conductor 6 are with the supply part 2 of the heating layer
  • the lead part 2 of the heating layer 8 is guided to the sensor connection side 9.
  • EP 0720018 A1 discloses a heating layer for an exhaust gas sensor, in which the heating conductor track 6 is arranged in a serpentine shape. The distance between the serpentines is always the same. This shape also corresponds to a uniformly modulating meander band that runs parallel to the y-axis of the sensor.
  • US Pat. No. 5,430,428, DE 43 24 659 C1 and DE 198 30 709 also disclose forms for the course of the heating conductor track in an exhaust gas sensor.
  • the heating conductor is arranged in a meandering manner.
  • the uniformly modulating meander band is arranged in a rectangular manner and also runs parallel to the y-axis of the sensor.
  • the heating conductor has the shape of a uniformly modulating meander band.
  • the height A of the meander band is constant throughout the course.
  • the heating conductor 6 forms a meandering band which, beginning with the supply part 2, first modulates uniformly on one side parallel to the x-axis and then straight along the sensor tip parallel to the y-axis and then again on the other side, evenly modulating, runs parallel to the x-axis back to supply part 2.
  • the width b of the heating conductor 6 is not changed.
  • the length L of the area in which the heating conductor 6 is arranged corresponds to the length L of the functional layer 4 lying above.
  • a disadvantage of all the arrangements described above is that, due to the good thermal conductivity of the commonly used A ⁇ 3 substrates, there is a temperature gradient along the longitudinal axis x of the sensor. This temperature gradient is subject to very large fluctuations. So it is usually at a target temperature of e.g. 600 ° C about 80 ° C over the length L of the functional layer 4, as shown in Figure 2b.
  • a target temperature e.g. 600 ° C about 80 ° C over the length L of the functional layer 4, as shown in Figure 2b.
  • EP 0477394 proposes to build up the heating conductor tracks at the sensor tip in the form of a conductor, the conductor pattern containing a multiplicity of individual conductors connected in parallel, which can be arranged in such a way that a homogeneous temperature distribution over the length can be adjusted. Both the width or the cross section of the different heating conductor tracks and the distance between two heating conductor tracks, which represent the rungs of the conductor structure, can vary.
  • High-temperature metal oxide sensor in which a substrate is provided, on which, in addition to the two supply parts of the heating layer, two measuring conductor tracks are attached, which are connected to the heating conductor track and in which one or more connecting cables are located at a location as far away from the heating conductor track as possible Supply part of the
  • the meandering heating conductor track has different partial heating resistors in different sections with respect to the x-axis.
  • the level of the partial heating resistor depends on the distance to the
  • the partial heating resistance decreases in the direction of the sensor tip. This is achieved in that the path length of the heating conductor track and thus of the meandering band, which results if the meandering band would be pulled apart like a thread which is intertwined, varies from section to section.
  • the width of the heating conductor track, alone or together with the path length, can also vary in different sections.
  • measurement supply lines are also applied, with which the exact temperature can be recorded, so that precise temperature control is made possible.
  • the heating resistance to be measured can be configured so that several sensors have an identical resistance / temperature characteristic.
  • the sensor in particular the functional surface of a high-temperature gas sensor, can be set to an exact temperature, which can then be placed anywhere on the
  • the heated surface then has a minimal temperature gradient.
  • the temperature measurement provides more accurate results and the entire high temperature gas sensor works with a higher accuracy.
  • the sensors can also be standardized with each other so that the same temperature can be assigned to different sensors with the same measured heating resistance.
  • Figure 1a shows the top of a high temperature gas sensor according to the prior art.
  • Figure 1 b shows the side view of a high temperature gas sensor according to the
  • Figure 1c the bottom of a high temperature gas sensor with a first heating layer according to the prior art.
  • Figure 2a shows the underside of a high temperature gas sensor with a second
  • FIG. 2b shows the temperature distribution for a high-temperature gas sensor with the heating layer shown in FIG. 2b.
  • Figure 3 shows the circuit for temperature measurement on a
  • FIG. 4a the first heating layer with a meandering heating conductor track and different partial resistances.
  • FIG. 4b shows the diagram of the temperature distribution for a high-temperature gas sensor with one shown in FIG. 4a
  • Heating conductor. 5a shows the second heating layer with a meandering heating conductor track and different partial resistances.
  • Figure 5b shows the diagram of the temperature distribution for one
  • Figure 6 shows the heating layer with a first additional arrangement for
  • Test leads for temperature determination. 7 shows the heating layer with a second additional arrangement for
  • Figure 8 shows the heating layer with a third additional arrangement for
  • Test leads for temperature determination. 9 shows the heating layer with a fourth additional arrangement for
  • Test leads for temperature determination. 10 shows the heating layer with a fifth additional arrangement for measuring lines for temperature determination.
  • FIG. 4a shows a heating layer arrangement with a heating conductor track 6, the course of which forms a meandering band which, beginning at the supply part 2, first modulates on one side parallel to the x-axis and then straight along the sensor tip parallel to the y-axis and then again on the other
  • Modulating side runs parallel to the x-axis back to lead part 2.
  • the heating layer 8 was produced with a platinum thick-layer paste, which was applied to an aluminum oxide substrate by screen printing technology and then baked.
  • the partial heating resistance was varied in the x direction.
  • the partial heating resistance is proportional to the quotient of the path length I and the width of the heating conductor track b in relation to a distance in the x direction.
  • the path length I of the heating conductor 6 is increased from the section
  • Section shortened by the height of the meandering band 1 1 is constantly reduced. It would also be just as effective to reduce the modulation rate, that is, the frequency of the change of direction of the meandering band 1 1, based on a distance in the x direction. What is important is the relation between the path length of the heating conductor track 6 and the proportion of the distance covered in the x direction. This allows the partial heating resistance to be changed per unit length in the x direction. In this way, different amounts of energy can be supplied to the functional layer at different points.
  • the high resistance value per unit length in the x direction is due to the long winding path of the
  • FIG. 4b shows the temperature distribution curve along the x-axis for a high-temperature gas sensor with a heating conductor track shown in FIG. 4a. The temperature along the x-axis is measured across the entire sensor in
  • the temperature in the region L of the functional layer has only a very small temperature fluctuation ⁇ T in the x direction. Compared to the temperature distribution shown in FIG. 2b, the temperature fluctuation ⁇ T is lower by 60 ° C.
  • FIG. 5a shows a heating layer arrangement with a heating conductor track 6, the course of which forms a meandering band which, beginning at the supply part 2, first modulates on one side parallel to the x-axis and then straight along the sensor tip parallel to the y-axis and then again on the other side modulating parallel to the x-axis runs back to lead part 2.
  • the heating layer 8 was produced with a platinum thick-layer paste, which was applied to an aluminum oxide substrate by screen printing technology and then baked.
  • the partial heating resistance was varied in the x direction.
  • the partial heating resistance is proportional to the quotient of the path length I and the width of the heating conductor track b in relation to a distance in the x direction.
  • Embodiment shortens the path length I of the heating conductor track 6 from section to section by varying both the height A of the meandering band 11 and the modulation rate, i.e. the frequency of the change of direction of the meandering band 11 in the x direction and the width b of the heating conductor line, so that the partial heating resistance drops towards the sensor tip.
  • the path length of the heating conductor track 6 is important. This allows the partial heating resistance to be changed per unit length in the x direction. In this way, different amounts of energy can be supplied to the functional layer at different points.
  • the width b of the heating conductor path is also important. The shorter the path length of the heating conductor track and the greater its width in a partial section, the lower the partial heating resistance of the heating conductor track area and the less the heating in this area.
  • the heating conductor track has different widths b. At the two sections that run along the x-axis, the is
  • the meandering heating conductor track which is arranged between the end of the functional layer 4 lying above it and the supply part 2, is used to compensate and counter-heat flow to the sensor connection side 9.
  • most of the heating power i.e. the largest part of the path length of the heating conductor, is required.
  • the required resistance values can also be achieved by changing other parameters. You don't have to run exactly parallel either.
  • FIG. 5b shows a diagram of the temperature distribution for a high-temperature gas sensor with a heating conductor track shown in FIG. 5a. The temperature along the x-axis is recorded across the entire sensor depending on the distance to the sensor tip. It can be seen that the temperature fluctuation ⁇ T in the length L region of the functional layer was further reduced compared to FIG. 4b.
  • the characteristic variables, the width b of the heating conductor track and the path length I of the heating conductor track are varied in order to obtain a homogeneous temperature distribution.
  • These characteristic quantities can be varied individually as well as in all possible combinations during the course of the heating conductor.
  • the path length can be varied both by the height A of the meander belt 11 and by the modulation rate, that is to say the frequency of the change of direction in the x-direction of the meander belt 11.
  • FIG. 6 shows a heating layer with a first additional arrangement for measuring lines for temperature determination. Here are parallel to the broad
  • Lead parts 2 of the heating layer two further tracks 12, which serve as voltage taps, attached. They are led from the two ends of the heating conductor track 6 to the sensor connection side 9.
  • the lead resistance that is to say the voltage drop across the lead parts 2 over the distance Z, is compensated for, the proportion of the resistance in
  • Area G which is used for counter heating, is also measured. Since, as described in the previous exemplary embodiments, however, the greatest temperature gradient lies in the region G, and since the greatest proportion of the total path length of the heating conductor 6 is present at G, the resistance is composed of the resistance components of the heating conductor of the sections G and L , Only the resistance component at L is measured at a constant temperature in the range of L. If the temperature gradient at G is the same under all conditions, the measurement result can be evaluated exactly. In the case of strongly fluctuating ambient temperatures, as is the case, for example, in an application in the exhaust gas of an automobile, the temperature gradient changes in the region of G. Then it makes sense to arrange the measuring lines as described in FIG. 7.
  • the voltage is tapped in an area where the temperature is constant. That is, the measuring conductor tracks 12 can be attached anywhere on the heating conductor track 6 anywhere in the region of L at any point.
  • the temperature can be measured by measuring the resistance and thus also regulated.
  • two asymmetrical measuring conductors 12 are attached for temperature determination.
  • the voltage is also tapped in an area where the temperature is constant. That is, they can be asymmetrically attached anywhere on the heating conductor 6 anywhere in the region of L at any point.
  • the temperature can be measured by measuring the resistance and thus also regulated.
  • FIG. 10 shows a heating layer with a variable arrangement for measuring conductor tracks 12 for temperature determination.
  • the individual voltage taps can be cut or trimmed using a laser process so that only one connection remains that offers exactly the desired resistance value. In this way, production spreads e.g. the
  • Layer thickness or the specific resistance of the heating conductor material can be compensated in order to obtain a constant relationship between the measured resistance value and temperature for all sensors.
  • the total resistance of the heating conductor 6 also remains unchanged. Sensors constructed in this way then all have a uniform resistance
  • measuring conductor tracks can be constructed not only in four-wire technology as shown, but also analogously in three-wire technology, as already described in FIG. 3.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Sur les capteurs de gaz haute température, la température de fonctionnement au niveau de la couche fonctionnelle du capteur ne pas être réglée, mesurée ou régulée précisément. Le dispositif selon l'invention vise à permettre un réglage exact de la température de fonctionnement de la couche fonctionnelle sur une zone de couverture importante. Pour le réglage d'une température de fonctionnement exacte sur l'ensemble de la couche fonctionnelle, la piste thermoconductrice disposée sous la couche fonctionnelle est conçue de manière à présenter des résistances thermiques partielles différant dans les diverses zones par modification de la longueur et/ou de la largeur de la piste thermoconductrice d'une section à l'autre. De tels dispositifs sont particulièrement utiles pour des capteurs de gaz haute température employés dans les gaz d'échappement d'un moteur à combustion interne.
EP00989885A 1999-12-02 2000-11-25 Dispositif de couche chauffante pour capteur de gaz haute temperature Withdrawn EP1185858A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19957991A DE19957991C2 (de) 1999-12-02 1999-12-02 Anordnung einer Heizschicht für einen Hochtemperaturgassensor
DE19957991 1999-12-02
PCT/EP2000/011754 WO2001040783A2 (fr) 1999-12-02 2000-11-25 Dispositif de couche chauffante pour capteur de gaz haute temperature

Publications (1)

Publication Number Publication Date
EP1185858A2 true EP1185858A2 (fr) 2002-03-13

Family

ID=7931107

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00989885A Withdrawn EP1185858A2 (fr) 1999-12-02 2000-11-25 Dispositif de couche chauffante pour capteur de gaz haute temperature

Country Status (4)

Country Link
US (1) US6861939B1 (fr)
EP (1) EP1185858A2 (fr)
DE (1) DE19957991C2 (fr)
WO (1) WO2001040783A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114720509A (zh) * 2022-06-08 2022-07-08 苏州芯镁信电子科技有限公司 一种气体检测组件及其制备方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4009520B2 (ja) * 2002-11-05 2007-11-14 日東電工株式会社 温度測定用フレキシブル配線回路基板
WO2006005332A2 (fr) * 2004-07-06 2006-01-19 Aceos Gmbh Dispositif pour determiner les proprietes d'un gaz
US7069770B2 (en) 2004-08-02 2006-07-04 Delphi Technologies, Inc. Ammonia sensor element, heater, and method for making the same
DE102006014248A1 (de) * 2006-03-28 2007-10-04 Robert Bosch Gmbh Sensorelement zur Bestimmung eines Gasanteils mit verbesserten thermischen Eigenschaften
DE102008009206A1 (de) 2008-02-15 2009-09-24 Sensatronic Gmbh Messvorrichtung
DE202008002332U1 (de) 2008-02-20 2009-06-25 Sensatronic Gmbh Messvorrichtung
DE102009038097A1 (de) * 2009-08-19 2011-03-03 Beru Ag Gassensor
JP5745455B2 (ja) * 2012-04-19 2015-07-08 日本特殊陶業株式会社 マルチガスセンサおよびマルチガスセンサ装置
JP5939265B2 (ja) * 2014-02-11 2016-06-22 株式会社デンソー セラミックヒータ及びこれを用いたガスセンサ素子
JP6485364B2 (ja) * 2015-02-12 2019-03-20 株式会社デンソー ガスセンサ
US10578572B2 (en) 2016-01-19 2020-03-03 Invensense, Inc. CMOS integrated microheater for a gas sensor device
JP6734062B2 (ja) * 2016-01-29 2020-08-05 日本碍子株式会社 セラミックスヒータ，センサ素子及びガスセンサ
EP3546931B1 (fr) * 2018-03-28 2021-07-21 Siemens Aktiengesellschaft Capteur de gaz thermorésistif, detecteur d'écoulement et capteur de conductivité thermique
DE102021202202A1 (de) 2021-03-08 2022-04-21 Vitesco Technologies GmbH Vorrichtung und Verfahren zur Minimierung der Beschädigung eines Sensors Für ein Fahrzeug

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3907312A1 (de) * 1988-03-09 1989-09-21 Ngk Insulators Ltd Keramische widerstandsheizeinrichtung mit untereinander verbundenen waermeentwickelnden leitern und eine derartige heizeinrichtung verwendendes elektrochemisches element oder analysiergeraet
US5017340A (en) * 1988-09-16 1991-05-21 Thomson-Csf Temperature compensated resistive type sensor for the measurement of relative concentrations of fluid reactive species
DE4404456A1 (de) * 1993-02-18 1994-08-25 Murata Manufacturing Co Widerstands-Temperatursensor
EP0880026A1 (fr) * 1997-05-20 1998-11-25 Ngk Insulators, Ltd. Capteur de gaz

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4286377A (en) * 1978-07-03 1981-09-01 General Electric Company Method of manufacture for a resistance heater and temperature sensor
DE2919433A1 (de) * 1979-05-15 1980-12-04 Bosch Gmbh Robert Messonde zur messung der masse und/oder temperatur eines stroemenden mediums und verfahren zu ihrer herstellung
US4375056A (en) * 1980-02-29 1983-02-22 Leeds & Northrup Company Thin film resistance thermometer device with a predetermined temperature coefficent of resistance and its method of manufacture
DE3029446A1 (de) * 1980-08-02 1982-03-11 Robert Bosch Gmbh, 7000 Stuttgart Duennschichtanordnung
US4825693A (en) * 1982-09-30 1989-05-02 Honeywell Inc. Slotted diaphragm semiconductor device
JPS60108745A (ja) * 1983-11-18 1985-06-14 Ngk Insulators Ltd 電気化学的装置
JPS60173461A (ja) * 1984-02-20 1985-09-06 Nissan Motor Co Ltd 酸素センサ
DE3504498A1 (de) * 1985-02-09 1986-08-14 Drägerwerk AG, 2400 Lübeck Gassensor mit mehreren sensorelementen
EP0193015A3 (fr) * 1985-02-26 1990-05-09 Novasina AG Capteur pour la mesure de la conductivité électrique
DE3811713A1 (de) * 1988-04-08 1989-10-19 Bosch Gmbh Robert Planare polarographische sonde zur bestimmung des (lambda)-wertes von gasgemischen
DE4036109C2 (de) * 1989-11-17 1997-01-09 Murata Manufacturing Co Widerstandstemperaturfühler
EP0477394A1 (fr) * 1990-09-24 1992-04-01 Siemens Aktiengesellschaft Dispositif de chauffage électrique avec un distributeur de la température prédéterminée, notamment pour détecteurs de gaz d'échappement
US5264681A (en) * 1991-02-14 1993-11-23 Ngk Spark Plug Co., Ltd. Ceramic heater
DE59209347D1 (de) * 1991-02-15 1998-07-02 Siemens Ag Hochtemperatur-platinmetall-temperatursensor
DE4324659C1 (de) * 1993-07-22 1995-04-06 Siemens Ag Sensor mit einem in einem Gehäuse angeordneten Sensorelement
US5605612A (en) * 1993-11-11 1997-02-25 Goldstar Electron Co., Ltd. Gas sensor and manufacturing method of the same
JP3175890B2 (ja) * 1993-12-27 2001-06-11 日本碍子株式会社 温度センサ
US5895591A (en) * 1994-07-06 1999-04-20 Ngk Spark Plug Co., Ltd. Ceramic heater and oxygen sensor
EP0720018A1 (fr) * 1994-12-27 1996-07-03 General Motors Corporation Elément chauffant à couche épaisse avec plusieurs compositions pour le serpentin et les conducteurs
JPH08219900A (ja) * 1995-02-15 1996-08-30 Murata Mfg Co Ltd 白金温度センサ
DE19523301A1 (de) * 1995-06-27 1997-01-09 Siemens Ag Heizvorrichtung für einen Hochtemperaturmetalloxidsensor
US5777207A (en) * 1995-11-27 1998-07-07 Lg Electronics Inc. Gas sensor and method for fabricating the same
US5726624A (en) * 1996-07-01 1998-03-10 Honeywell Inc. Temperature sensor with internal rigid substrate
DE19731900A1 (de) * 1997-07-24 1999-02-11 Heraeus Electro Nite Int Leitfähige Schicht mit veränderlichem elektrischen Widerstand, Verfahren zu ihrer Herstellung und Verwendung
KR100269211B1 (ko) * 1997-10-22 2000-10-16 이형도 촉매열화 감지센서
DE19830709C2 (de) * 1998-07-09 2002-10-31 Daimler Chrysler Ag Meßwandler zur Detektion von Kohlenwasserstoffen in Gasen
US6437981B1 (en) * 2000-11-30 2002-08-20 Harris Corporation Thermally enhanced microcircuit package and method of forming same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3907312A1 (de) * 1988-03-09 1989-09-21 Ngk Insulators Ltd Keramische widerstandsheizeinrichtung mit untereinander verbundenen waermeentwickelnden leitern und eine derartige heizeinrichtung verwendendes elektrochemisches element oder analysiergeraet
US5017340A (en) * 1988-09-16 1991-05-21 Thomson-Csf Temperature compensated resistive type sensor for the measurement of relative concentrations of fluid reactive species
DE4404456A1 (de) * 1993-02-18 1994-08-25 Murata Manufacturing Co Widerstands-Temperatursensor
EP0880026A1 (fr) * 1997-05-20 1998-11-25 Ngk Insulators, Ltd. Capteur de gaz

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO0140783A3 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114720509A (zh) * 2022-06-08 2022-07-08 苏州芯镁信电子科技有限公司 一种气体检测组件及其制备方法

Also Published As

Publication number Publication date
US6861939B1 (en) 2005-03-01
WO2001040783A2 (fr) 2001-06-07
DE19957991C2 (de) 2002-01-31
DE19957991A1 (de) 2001-06-07
WO2001040783A3 (fr) 2001-12-13

Similar Documents

Publication Publication Date Title
EP0271660B1 (fr) Dispositif pour la détermination du débit massique d'une substance coulante
DE4445243C2 (de) Temperaturfühler
DE19957991C2 (de) Anordnung einer Heizschicht für einen Hochtemperaturgassensor
DE2728060C2 (fr)
DE19810519C2 (de) Kombination aus Heizelement und Meßfühler
DE2815879C2 (fr)
EP0021291A1 (fr) Débitmètre
EP0184011B1 (fr) Dispositif de débitmètre d'air
EP0235360B1 (fr) Palpeur de mesure
EP0271659A2 (fr) Dispositif pour déterminer le débit massique d'une substance coulante
DE2948742C2 (fr)
DE19753642A1 (de) Elektrischer Widerstand mit wenigstens zwei Anschlußkontaktfeldern auf einem Keramik-Substrat sowie Verfahren zu dessen Herstellung
DE4433693A1 (de) Chipwiderstand, Schaltung und Verfahren zur Stromerfassung, die diesen Chipwiderstand verwenden, sowie Verfahren zum Einstellen des Wertes dieses Chipwiderstandes
DE3502440A1 (de) Anordnung zur messung der waermeleitfaehigkeit von gasen
DE4314364C2 (de) Thermischer Flußsensor
DE4207188C2 (de) Strömungsmengenfühler thermischer Bauart
DE10254222B4 (de) Fluidum-Durchsatz-Messanordnung
WO1995023338A1 (fr) Resistance serie pour anenometre a pellicule chauffante
EP0995110A1 (fr) Dispositif pour determiner l'humidite atmospherique relative
DE4320881A1 (de) Kombination von Lambda-Sonden
DE1807643B2 (de) Verfahren zur Herstellung einer elektrisch beheizbaren Glasscheibe, insbesondere für Kraftfahrzeuge
DE4434646A1 (de) Vorrichtung zum Messen des Flüssigkeitsstandes in einem Behälter
DE2923799C2 (de) Diffundierter Halbleiterwiderstand
EP0076951A1 (fr) Débitmètre
DE19736824C1 (de) Sensoreinheit, insbesondere zur Luftgütemessung

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20010718

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: CONTI TEMIC MICROELECTRONIC GMBH

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: CONTI TEMIC MICROELECTRONIC GMBH

Owner name: DAIMLERCHRYSLER AG

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: DAIMLERCHRYSLER AG

RBV Designated contracting states (corrected)

Designated state(s): DE FR GB IT

17Q First examination report despatched

Effective date: 20061123

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: DAIMLERCHRYSLER AG

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: DAIMLER AG

RIC1 Information provided on ipc code assigned before grant

Ipc: G01N 27/406 20060101AFI20080205BHEP

RTI1 Title (correction)

Free format text: HEATING LAYER STRUCTURE IN A HIGH-TEMPERATURE GAS SENSOR

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20080820