WO2006005332A2 - Dispositif pour determiner les proprietes d'un gaz - Google Patents

Dispositif pour determiner les proprietes d'un gaz Download PDF

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Publication number
WO2006005332A2
WO2006005332A2 PCT/DE2005/001241 DE2005001241W WO2006005332A2 WO 2006005332 A2 WO2006005332 A2 WO 2006005332A2 DE 2005001241 W DE2005001241 W DE 2005001241W WO 2006005332 A2 WO2006005332 A2 WO 2006005332A2
Authority
WO
WIPO (PCT)
Prior art keywords
conductor
carrier substrate
base plate
gas
heating element
Prior art date
Application number
PCT/DE2005/001241
Other languages
German (de)
English (en)
Other versions
WO2006005332A3 (fr
Inventor
Dirk Tuchtenhagen
Gunnar Jung
Original Assignee
Aceos Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE200410034295 external-priority patent/DE102004034295A1/de
Priority claimed from DE200410048979 external-priority patent/DE102004048979B4/de
Priority claimed from DE200420015400 external-priority patent/DE202004015400U1/de
Application filed by Aceos Gmbh filed Critical Aceos Gmbh
Publication of WO2006005332A2 publication Critical patent/WO2006005332A2/fr
Publication of WO2006005332A3 publication Critical patent/WO2006005332A3/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4077—Means for protecting the electrolyte or the electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/4067—Means for heating or controlling the temperature of the solid electrolyte
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure

Definitions

  • the invention relates to devices for determining the properties of a gas with a planar at least one heating element with a temperature greater than 290 ° C operated gas sensor on a support substrate for one and thus in a measuring chamber.
  • Solid electrolyte sensors use the property of certain ionic crystals, already discovered in 1899 by W. NERNST, to transport the electric current in the form of ions at elevated temperature.
  • Two basic arrangements are known as
  • Potentiometric (galvanic) solid electrolyte cells as known inter alia from EP 0 861 419 Bl (method and apparatus for the simultaneous measurement of a volumetric flow and gas partial pressures), known to operate according to the NERNST equation, wherein at a known temperature and known potential at the reference electrode the cell voltage is linearly dependent on the logarithm of the activity or the partial pressure of the component to be measured. Furthermore, the solid electrolyte is a pure ion conductor. The absolute size of the cell voltage depends on the difference between the measuring and reference potential. As possible errors increase with increasing difference of these potentials, the difference between measuring and reference gas pressure should not be too large. The ionic conductivity of the solid electrolyte cell is furthermore temperature-dependent.
  • the invention specified in claim 1 is based on the object, simply 2x1 realizing devices for determining the properties of gases with a combintem- perierbaren gas sensor with a high resolution to create.
  • the devices for determination of characteristics of a gas having a planar overschreibs ⁇ least one heating element having a temperature greater than 290 0 C operated gas sensor on a carrier substrate for a and in a measuring chamber are distinguished in particular by a very simple structure, so that this very are economically produced.
  • the gas sensor consists of a carrier substrate with thin layers for at least one heater, a solid electrolyte and electrodes.
  • the substrate substrate consists of known alumina, glass-ceramic or zirconia-Aluminiumoxyid- materials.
  • the devices are advantageously suitable for gas measurement, which require high operating temperatures.
  • the gas sensors are equipped with a heater that allows an operating temperature of more than 290 ° C.
  • the planar gas sensor is arranged on one surface of the carrier substrate and the heating element is arranged on another surface of the carrier substrate.
  • the heating element is an electrical resistance element with at least two supply lines. At least one conductor is connected as a potential tap to the heating element.
  • This heating element consists of tracks on the carrier substrate.
  • the planar gas sensor consists of at least one layer of a solid electrolyte and two applied tracks as electrodes for measuring either the applied electrical voltage or the current flowing through the electrodes electrical current, wherein the carrier substrate at least with the electrical resistance element and thus heated solid electrolyte in the measuring chamber of the Housing are located.
  • the heating element can serve by such an implementation for measuring the temperature and / or the temperature distribution and / or the power input.
  • the Temperatur ⁇ measurement on the device erfogt only the constant temperature range to be maintained, thereby improving the resolution of the temperature measurement at equally accurate measuring devices and errors of the Temperature measurement can be eliminated by heating supply and connection areas.
  • at least one conductor is connected as a potential tap to the electrical resistance element and / or to at least one of the supply lines.
  • the heater is used as an electrical resistance element directly for temperature determination. This reduces the inertia of the control process, whereby the measured variable and the manipulated variable are more directly related and control algorithms can be simplified and accelerated. Influencing the properties of heated components or devices with respect to the flow velocity and the temperature of the inflowing medium is reduced or eliminated. For constant properties, it is necessary to keep the temperature distribution of the electrical resistance element as constant as possible and to ensure only the smallest possible deviations from the setpoint temperature even in the event of disturbing influences. Due to the self-adjusting temperature gradient due to the heat conduction through the component, which can not be completely suppressed, to the component fastening, it is necessary to extend the heat input to the entire apparatus.
  • a major problem in this case is that the electrical resistance of the leads falsifies the precise determination of the electrical resistance of the electrical resistance element and thus its temperature to be kept constant.
  • the ratio of the electrical resistance of the electrical resistance element to the electrical resistances of the supply lines must be as large as possible, so that even very small changes in either a cooling or heating can be detected.
  • a reduction in the electrical resistances of the supply lines is known to minimize their falsifying influences.
  • the electrical resistance of the leads can not be reduced arbitrarily. Borders are given by the space and the warmth of the entire facility.
  • the sensitive area and the supply area can thus be detected separately by measurement.
  • conductors as Potentialabgriffe the electrical resistance of the electrical resistance element and thus the average temperature can be determined accurately.
  • the influence of the supply lines is completely eliminated and the manipulated variable of the control process can be calculated so that the electrical resistance of the electrical Resistance element and not the electrical resistance of the electrical marss ⁇ element including the leads is kept constant.
  • the heating element is further characterized by a reduced dependence of the flow rate, since the supplied heating power is a direct measure of the flow parameters to be determined. There may be a measurement of both magnitude and direction by determining the temperature distribution on the device. Depending on the flow conditions, a characteristic temperature or resistance distribution is formed. The higher the flow velocity, the greater the temperature differences of the individual regions of the device compared to the state without flow. At a fluid temperature that is lower than the temperature of the device, areas that are more heavily flowed will cool more strongly than areas that are less affected. These effects can be used to determine the magnitude and the one- and multi-dimensional direction of a flow with the aid of a single electrical resistance element. A subdivision into additional areas enables the detection of further directional components of the flow.
  • the resistance element according to the embodiment of claim 2 has the shape of a meander, a polygon, a conic or at least a combination of two of these forms and a web-shaped conductor as potential tap is centrally located on the sheet-shaped resistor element and connected thereto. This makes it possible to determine the electrical resistance of both the one half and the other half of the device. Temperature differences between the halves can be demonstrated by the specific electrical resistance of the webs. Several web-shaped conductors as potential taps advantageously lead to an increase in the resolution of the temperature distribution over the electrical resistance element.
  • the temperature distribution can be determine via the device so that a two-dimensional direction detection of a flow is possible.
  • successive layers of the solid electrolyte, electrodes with connection tracks and an diffusion barrier covering an electrode up to its connection track are arranged as an oxygen sensor on a region of the carrier substrate.
  • the solid-state electrolyte consists of a doped and ion-conducting zirconium oxide, the chemical interaction between the gas component as oxygen and the solid electrolyte in conjunction with the electrodes causing an electrical charge transport.
  • the diffusion barrier is a printed layer of a glass, aluminum oxide or a combination thereof.
  • the oxygen measurement is based on an amperometric circuit based on the principle of the diffusion limit current probe. With the aid of a direct voltage applied to the two electrodes, an electric current flows through the solid electrolyte as a functional ceramic with the transported oxygen ions as a circuit. In this case, molecular oxygen is converted into ionic oxygen at the cathode, transported to the anode by the applied voltage and converted there back into molecular oxygen. If the solid electrolyte is a pure ion conductor, Faraday's laws apply. The first Faraday's law is used in the form of coulometric measurement methods, the mass of the electrochemically reacted substance being proportional to the amount of electricity flowed.
  • the electrical conductivity of a solid is determined primarily by its atomic lattice structure.
  • the charge transport in a ceramic solid electrolyte takes place above all through defects.
  • the cause of these defects may be thermal or contaminant-induced disordering of the lattice structure, as well as macroscopic lattice disturbances, for example, as dislocations or grain boundaries.
  • the charge transport can occur by changing the location of the atomic lattice defects (ion transport) or by the migration of electrons or holes between the charged lattice defects walk.
  • Every ceramic is basically a mixed conductor. If the density of the defects is low, such as in an undisturbed crystal, then there is an insulator. Ionically conductive ceramics are formed by increasing the number of ionic defect sites through the targeted introduction of impurities (dopants). An increase in the concentration of any kind of defects can be achieved by increasing the temperature.
  • the base material for the electrolyte is zirconium dioxide. This material has good mechanical and thermal properties. Pure zirconia is present at ambient temperature in a monoclinic lattice structure. From about 1150 ° C, this transforms into a tetragonal and from 2370 ° C in a cubic lattice structure.
  • pure zirconium dioxide is doped with diyttrium trioxide.
  • a stabilization of the highly conductive cubic phase is achieved, which is then also at room temperatures.
  • the ionic conductivity of this ceramic is comparable to liquid electrolytes at temperatures above 600 ° C.
  • Solid-state gas sensors convert the chemical interaction between gas component and sensor material (ion conduction) into an electrical signal.
  • the interaction between the gas component and the solid can only be converted into an electrical signal through the exchange and transport of electrons. This presupposes the presence of metallically conductive or semi-conductive surface areas and electrodes in the area of the gas-solid interaction, since the solid electrolyte itself has no or only a negligible electron conduction.
  • the noble metals used as electron conductors have no transport properties for oxygen or for ions. Therefore, in the gas-solid-state reaction toward electric charge transport, a chain of physicochemical phenomena at the gas / electrode / solid electrolyte interface, also known as the three-phase boundary, proceeds.
  • the reaction at the Fest redesignober ⁇ surface is preceded by the arrival and Abdiffusion the gaseous components in the gas space.
  • the primary step in the interaction between the solid surface and the gas component is adsorption / desorption.
  • the inflow of oxygen to the cathode is limited by a diffusion barrier, wherein Due to the physical properties of the diffusion, the measurable sensor current in the range of 0-100% oxygen is linearly dependent on the oxygen concentration.
  • the two-point calibration customary with potentiometric sensors is dispensed with and thus the use of reference gas (reference chamber) for calibrating the sensor becomes superfluous.
  • reference gas reference chamber
  • the materials of the electrodes perform two functions. On the one hand, these are the electrical conductors for the closure of the measuring circuit and on the other hand, in combination with the solid electrolyte, they influence the gas exchange with the environment.
  • the volume flow can be determined on the basis of the required heating power to ensure these temperatures.
  • the gas sensor is cooled and it is a larger heat output for a constant temperature necessary.
  • the volume flow is dependent on the difference between the heating power in the streamed state and the heating power in the non-streamed state.
  • the solid electrolyte is advantageously according to the embodiment of claim 5, a layer of a zirconium oxide doped with Diyttriumtrioxid with a layer thickness of the doped zirconia greater than or equal to 1 micron and less than or equal to 500 microns as Fest redesign ⁇ electrolyte.
  • the layers as a solid electrolyte, electrodes with connection tracks, diffusion barrier and heating element with connection tracks are advantageously applied according to the embodiment of claim 6 by means of the known screen printing technique.
  • the layer is pressed by a stencil which is on a sieve-like fabric or part of the sieve-like fabric of a printing frame by doctor blade on the plate-shaped support.
  • a wiring of the sensor according to the embodiment of claim 7 both the oxygen and the volume or the flow of a gas can be measured with a sensor.
  • layers of the solid-state electrolyte and electrodes as a measuring electrode and a reference electrode, each with a connecting path according to the embodiment of claim 8, are arranged successively as a carbon monoxide sensor.
  • the reference electrode consists of either platinum or a platinum-YSZ mixture and the measuring electrode is a metal or a metal mixture.
  • the solid electrolyte consists of an yttrium-stabilized zirconium oxide, wherein between the measuring electrode and the reference electrode, a voltage potential in dependence of the carbon monoxide partial pressure is applied.
  • Layers of the solid-state electrolyte, electrodes as a measuring electrode and a reference electrode, each with an attachment path and metal carbonate on the measuring electrode according to the embodiment of patent claim 9, are successively arranged as a carbon dioxide sensor on a region of the carrier substrate.
  • the reference electrode and the measuring electrode are made of either gold or a gold-sodium ion conductor mixture.
  • the solid electrolyte consists of a sodium ion conductor, wherein a voltage potential is applied between the measuring electrode and the reference electrode as a function of the carbon dioxide partial pressure.
  • the development of claim 10 leads to sensors, which are characterized in particular by a thermal insulation between the sensor element and the sensor holder / sensor attachment with simultaneous alignment and positioning relative to an easily fixable base plate.
  • the base plate is advantageously at the same time the Sensorbe ⁇ consolidation.
  • the base plate has an opening for receiving the end region with the gas sensor and the heating element opposite end region of the carrier substrate, so that the heated gas sensor is arranged at a distance from the base plate.
  • the opening is advantageously at the same time the fixation of the carrier substrate, so that predetermined positions of the gas sensors, for example, in the measuring space of the housing can be easily realized.
  • the dimensions can be chosen so that a clamping connection between Susun ⁇ substrate and base plate is given, so that a fixed position of the carrier substrate gegen ⁇ on the base plate is already present during the joining.
  • a very accurate alignment of the gas sensors and heating elements is easily possible, so that easily, for example, different angle of attack can be adjusted.
  • the opening is also an assembly aid. With the base plate easy handling and mounting option is available. The same applies to an exchange with the same measuring chambers, so that measuring chambers for a variety of tasks are easily feasible.
  • a low-cost gas sensor can also be made available as Secker.
  • the handling and mounting of the base plate is easily possible and automated, so that cost and therefore economical gas sensors are available.
  • the base plate can also be designed as a component carrier, resulting in the most diverse applications. This is
  • the connections of the tracks of the base plate with those of the carrier substrate are metallic wire, ribbon or solder bridges.
  • the conductor tracks of the base plate can also be used as contacts or as electrical connections to component connections, so that the base plate is at the same time a component carrier.
  • Components can also be connecting elements, so that electrical contacting is easily possible.
  • the carrier substrate and the base plate are connected according to the embodiment of claim 11 via a compound of a temperature-resistant and a poor thermal conductivity auf ⁇ facing adhesive, so that a large heat input into the base plate can be prevented.
  • an adhesive with a low heat conductance is advantageously used.
  • this is a temperature-resistant and advantageously a gas-tight adhesive, so that a mechanical impairment of the adhesive layer is largely avoided.
  • a ceramic adhesive or an epoxy resin adhesive is used.
  • the further developments of claim 12 enable an automated production of the metallic solder bridges between the conductor tracks of the carrier substrate and those of the base plate.
  • the bulges between adjacent tracks of the base plate advantageously prevent bridging between adjacent tracks.
  • a housing for a device for determining the property of a gas with oxygen with a gas sensor on a plate-shaped carrier is characterized in particular by a simple structure. At the same time, there is little heating of both the environment and the gas to be analyzed.
  • a first tube is arranged at a distance in a second tube, the gas sensor is located in the first tube, there is a spatial connection between both the intermediate space and the space in the first tube and the tubes in the housing are connected and disconnected ⁇ tions provided for the gas to be analyzed and bushings of the electrical lines for the gas sensor, wherein between the wall of the second tube and the corresonding thereto arranged housing a distance and thus an interior is present.
  • the two tubes and the housing advantageously function as a heat exchanger, wherein supplied cold gas to be analyzed is heated by the hot gas to be analyzed at the sensor. At the same time, the gas to be analyzed at the sensor is cooled by the inflowing gas to be analyzed. This simultaneously reduces the required Heating power, a reduction in the outside temperature of the housing and a reduction in the temperature of the discharged gas to be analyzed. As a result, a compact construction of the housing is available.
  • the gas sensor is located in the space of a tubular body as a housing. An opening and thus an end is the gas inlet, so that with the gas sensor both for oxygen measurement and for volume flow and / or flow measurement can be used.
  • connection fittings for the supply and discharge of the gas to be analyzed so that this housing can be easily integrated with the gas sensor in measuring systems.
  • hose lines can be connected, so that connections to suction devices can be easily established.
  • the end region of the tubes are fixed according to the embodiment of claim 16 at least in the base plate of the housing. This results in a simple realization of the housing. This is available for gas sensors.
  • the second tube is according to the embodiment of claim 18 advantageously a bushing with a ⁇ f ⁇ hung for receiving a portion of the first tube, so that there is a simple structure and a simple fixation of the tubes to each other.
  • the second tube has a pointing in the direction of the interior opening for the gas to be analyzed and both the base plate and the housing each have at least one opening to the interior of the housing and on the base plate of the housing, a fan for generating an air flow is arranged in the interior, advantageously leads to an air flow in the housing.
  • This air flow causes a negative pressure at the opening of the second tube, so that the gas to be analyzed from the first tube is sucked through the gap and passes with the air flow through the opening in the housing to the outside.
  • 1 shows a gas sensor both for oxygen measurement and for volume flow and / or
  • Fig. 2 shows a gas sensor both for oxygen measurement and for volume flow and / or
  • FIG. 3 shows a measuring circuit with a sensor for both oxygen measurement and for the purpose of measuring oxygen in an exploded view
  • Volume flow and / or flow measurement shows a device with web-shaped supply lines respectively applied on a support, resistance element in a meandering form and conductor as potential tap, FIG.
  • FIG. 5 shows a device with web-shaped supply lines respectively applied on a support, resistance element in a meandering form and two conductors as potential tap, FIG.
  • FIG. 7 shows a device with web-shaped supply lines respectively applied on a carrier, resistive element in a meandering form, and twelve conductors as potential tap, FIG.
  • FIG. 16 shows the connection of the illustration in FIG. 15 in a plan view
  • Fig. 18 shows a first housing with a gas sensor
  • 19 shows a second housing with the gas sensor in two views.
  • a sensor for oxygen measurement as well as for volumetric flow and / or Anströmmes ⁇ solution consists essentially of a support substrate in the form of a plate-shaped support 1 with a sensor and a heating element 6, each arranged on opposing Ober ⁇ surfaces of the plate-shaped support 1 are.
  • 1 shows in principle a sensor for both the oxygen measurement and the volume flow and / or flow measurement in a sectional view.
  • the plate-shaped carrier 1 is an electrical insulator made of aluminum oxide.
  • the sensor element consists of successively applied layers of a solid electrolyte 2, of electrodes 3, 4 with connection tracks and a layer 3 covering an electrode 3 up to its connecting track as diffusion barrier 5.
  • the solid electrolyte 2 is a Diyttriumtrioxide-doped and ion-conducting zirconium oxide with a layer thickness greater / equal to 1 micron and less / equal to 500 microns applied. This causes the chemical interaction between the gas component as oxygen and the solid electrolyte 2 in conjunction with the electrodes 3, 4 and an electric charge transport.
  • the elec trodes 3, 4 including their connection tracks are made of platinum and are applied as comb-like structures, wherein the teeth of the comb-like structures are each arranged alternately spaced parallel to each other (representation in FIG. 2).
  • the layer as a diffusion barrier 5 made of glass and / or aluminum oxide completely covers a cathode 3 representing the cathode except for the connecting track.
  • a layer of an electrical conductor made of platinum is arranged as at least one heating element 6.
  • a conductor track 7 as potential tap is connected at a distance from the connecting tracks to the heating element 6 (illustration in FIG. 2).
  • the components of the sensor are successively applied as a layer on the plate-shaped carrier 1 by means of screen printing.
  • the plate-shaped support 1 is located with the sensor element and the heating element in the measuring chamber with the gas to be measured.
  • a reference chamber with a reference gas is not necessary.
  • the electrode 3 covered by the diffusion barrier 5 is connected to the cathode of a first electrical energy source 8 and the other electrode 4 is connected to the anode of the first electrical energy source 8 via an ammeter and the connections of the electrical heating element 6 to a second electrical energy source 9 ,
  • For simultaneously possible volume or flow measurement are a connection of the electric heating element 6 and the conductor 7 with a first voltmeter and the other terminal of the electric heating element 6 and the conductor 7 with a Connected second voltmeter. The voltage drop of the regions of the electrical heating element 6 is thereby measured via the voltmeter.
  • FIG. 3 shows a measuring circuit with a sensor for oxygen measurement as well as for volume flow and / or flow measurement.
  • the plate-shaped carrier 1 is preferably a plate in particular of an Al 2 ⁇ 3 ceramic, a glass or quartz.
  • the layers as resistive and / or conductive track pastes are applied using known thin-film or thick-film technology.
  • the thick-film technique as an additive technique, for example, the screen, stencil or pad printing method is used.
  • the resistive and conductive track pastes consist of hardened pasty mixtures of an organic and / or inorganic binder with pulverulent metals and metal oxides.
  • subtractive techniques can be used, wherein a layer is removed in regions.
  • the sheet-shaped resistance element 10 is applied in a meandering shape and a sheet-shaped conductor 7 as Potential tap is centered on the sheet-shaped resistance element 10 and connected thereto (shown in FIG. 4).
  • a plurality of sheet-shaped conductors 7a, 7b,... 7n are connected as potential taps to the sheet-like resistance element 10 applied in a meandering form (illustrations in FIGS. 5 and 7).
  • the leads are the resistors Rl and R3, the resistors of the strip-shaped leads I Ia, Ib and the resistance R2 is the resistance of the sheet-shaped resistive element 10.
  • the exact determination of the introduced electrical power is the basis, for example, for use as a temperature-constant anemometer, since the power supplied is a direct measure of the flow parameters to be determined.
  • RN for three or more conductors as potential taps) in comparison to the state without incident flow.
  • a temperature of the flowing medium that is lower than the temperature of the device, For example, areas of the device that are more heavily flowed will cool more strongly than areas that are less affected.
  • the sheet-shaped resistance element 10 of two spaced apart and connected together in series connected sheet resistance elements I Ia, Ib in Guran ⁇ derformen, wherein a web-shaped conductor 7c as a potential tap center of a meandering shape and in each case a further web-shaped conductor 7a, 7b are arranged as a potential tap at the connection points of the meandering forms and connected thereto (representation in FIG. 8). If this device is flown, the temperature distribution over the device can be determined so that a two-dimensional directional detection of a flow is possible.
  • FIG. 9 shows a carbon monoxide sensor in a sectional view.
  • the electrode 4 as a reference electrode consists of either platinum or a platinum-YSZ mixture and the electrode 3 as a measuring electrode is a metal or a metal mixture.
  • the layer of the solid electrolyte 2 consists of an yttrium-stabilized zirconium oxide, wherein between the measuring electrode and the reference electrode aists ⁇ potential as a function of the Kohlenmonoxidpartial horres at an operating temperature between 35O 0 C and 800 ° C is applied.
  • This voltage potential is connected to the voltmeter Electrodes 3, 4 measured (shown in Fig. 12).
  • the reference electrode acts oxidizing on the gas mixture, while the measuring electrode acts less or not oxidizing.
  • the electrodes 3, 4 can be applied both in a plate form (illustration in FIG. 10) and in a meandering form (illustration in FIG. 11).
  • the realization of the heating element corresponds to those of the second exemplary embodiment.
  • a circuit of a carbon monoxide sensor with a heating element 6 corresponding to that shown in Fig. 5 shows in principle the Fig. 12.
  • the temperature is determined by the electrical resistance R2 of the electrical resistance element 10 without resistors of the web-shaped leads 11, which also partially Schuetzlwideriron can affect the measurement result.
  • the plate-shaped carrier 1 is located with the layer of Festkör ⁇ perelektrolyten 2, the measuring electrode and the reference electrode on one side and the heating element 6 on the other side in the measuring chamber, so that a reference chamber with a reference gas is not necessary.
  • a solid electrolyte 2 As a carbon dioxide sensor, layers of a solid electrolyte 2, electrodes 3, 4 as a measuring electrode and a reference electrode, each with a connecting track and a layer of a metal carbonate 12 on the measuring electrode, are arranged successively on a region of a carrier substrate as a plate-shaped carrier 1 ( Representation in FIG. 13 as a sectional view).
  • the reference electrode and the measuring electrode are made of either gold or a gold-sodium ion conductor mixture.
  • the layer of the solid electrolyte 2 is a sodium ion conductor, wherein between the measuring electrode and the reference electrode, a voltage potential depending on the carbon dioxide partial pressure at an operating temperature between 350 0 C and 800 0 C is applied.
  • the design of the electrodes 3, 4 correspond to those of the third exemplary embodiment.
  • the Ausure ⁇ tion of the heating element 6 and its wiring correspond to those of the secondieres ⁇ example.
  • the plate-shaped carrier 1 is located with the layer of Festkör ⁇ perelektrolyten 2, the measuring electrode, the reference electrode and the layer of a metal carbonate 12 on one side and the heating element 6 on the other side in the Measuring chamber, so that a reference chamber with a reference gas is not necessary.
  • An attachment for a gas sensor according to the first, third or fourth embodiment on a plate-shaped support 1 essentially consists of this plate-shaped support 1 and a base plate 13 with at least one opening 16 for receiving the end region with the sensor element and heating element 6 opposite end region (illustration in FIG. 14).
  • the dimensions of the opening 16 are greater than at least the dimensions of the cross section of the end region with the sensor element and heating element 6 opposite end portion of the plate-shaped support 1, so that the opening 16 in addition to the positive reception of the end portion and the positioning tion of the plate-shaped support 1 serves.
  • the opening 16 determines the orientation and position of the plate-shaped carrier 1 and thus of the sensor element and the heating element 6 in the measuring chamber and thus in the medium to be measured.
  • the base plate 13 is made of aluminum oxide, a glass ceramic, a polymer or be ⁇ known printed circuit board material of a glass fiber reinforced epoxy resin, so that certain properties such as heat conduction, strength, temperature resistance and thermal Aus ⁇ expansion coefficient are application specific.
  • the opening 16 is introduced by the known methods such as erosion, laser cutting, water jet cutting, drilling or milling, so that a very accurate and close tolerance opening 16 can be achieved. The accuracy of the orientation of the plate-shaped carrier 1 is thus dependent on the shape of the opening 16 and the tolerances that arise during insertion of the opening 16.
  • the plate-shaped carrier 1 and the base plate 13 have strip conductors 15, 17.
  • the printed conductors 17 of the plate-shaped carrier 1 are the supply lines of the electrodes 3, 4 and of the electrical heating element 6.
  • the printed conductors 15, 17 are applied, for example, by the known technologies of thick-film technology using screen or stencil printing and then hardened.
  • the contacting of the conductor tracks 15, 17 via solder bridges 18 (representations in FIGS. 15 and 16).
  • the conductor tracks 15 of the base plate 13 terminate at the opening 16 or, in a second variant, are also continued on wall regions of the opening 16.
  • the solder bridges 18 are easy to implement.
  • solder also advantageously flows through capillary In order to improve the handling and simplification are located between adjacent tracks 15 of the base plate 13 bulges in the base plate 13. This prevents that Lot also accumulates between the tracks 15 and shorting bridges arise.
  • the base plate 13 On the base plate 13 is still in accordance with introduced recordings a connector 19 (shown in Fig. 17), so that a slight contact of the existing sensor plug is given.
  • the base plate 13 has a plurality of openings 14 for fastening elements, for example, as screws.
  • electronic components can also be fastened to the base plate 13, contacted and connected via the printed conductors 15 in addition to the plug connector 19.
  • the base plate simultaneously represents a component carrier.
  • a first housing with a measuring chamber for gas sensors on a plate-shaped support 1 consists essentially of a first tube 21 and a second tube 22 in a cuboid housing with inlets and outlets for the gas to be analyzed (illustration in Fig. 18).
  • the housing is a cuboid with a base plate 25, a cover plate 26 and four side walls 23.
  • the end regions of the tubes 21, 22 are secured in blind bores of the base plate 26.
  • the outer diameter of the first tube 21 is smaller than the inner diameter of the second tube 22.
  • the first tube 21 is spaced apart in the second tube 22, so that a gap between the outer wall of the first tube 21 and inner wall of the second tube 22 is present.
  • the second tube 22 terminates at the cover plate 26 and the first tube 21 ends spaced from the cover plate 26, so that a gap is provided as a spatial connection between the gap and the interior of the first tube 21 with the gas sensor on the plate-shaped support 1.
  • the plate-shaped support 1 is located in the first tube 21 and its attachment 20 is part of the cover plate 26 or connected thereto.
  • the embodiment may advantageously correspond to that of the fifth exemplary embodiment.
  • the base plate 25 bores as inlets and outlets of the gas to be analyzed in the direction of both the interspace of the two tubes 21, 22 and the first tube 21 are introduced.
  • the tubes 21, 22 are thus arranged in the housing with inlets and outlets for the gas to be analyzed and bushings of the electrical lines for the gas sensor with the sensor elements and the heating elements 6, that between the outer wall of the second tube 22 and inner wall of the side walls 23 of the housing a distance and thus an interior is present.
  • the outwardly facing end portions of the holes are used to connect pipes or hoses for conducting the gas to be analyzed.
  • a second housing with a measuring chamber for gas sensors consists essentially of a first tube 21 and a second tube 22 in a cuboid housing with inlets and outlets for the gas to be analyzed.
  • FIG. 19 shows a housing with a gas sensor on a plate-shaped carrier 1 in two views.
  • the housing is a cuboid with a base plate 25, a cover plate 26 and four see ⁇ walls 23.
  • the first tube 21 and the second tube 22, which are each thin-walled tubes.
  • the first tube 21 with a plurality of apertures in the wall thereof is arranged at a distance in the second tube 22, so that a gap is present vor ⁇ .
  • the outer diameter of the first tube 21 is smaller than the réelle emb ⁇ diameter of the second tube 22.
  • the openings are spatial connections of insects ⁇ space and the space of the first tube 21 with the gas sensor on the plate-shaped support 1.
  • the second tube 22 provides a Socket with an opening for receiving and fixing a portion of the first tube 21.
  • the plate-shaped carrier 1 is located at its attachment 20 in the first tube 21.
  • the first tube 21 is connected to the base plate 25 and the cover plate 26 and the second tube 22 is connected to the base plate 25 of the housing.
  • the base plate 25 bores as inlets and outlets of the gas to be analyzed in the direction of the intermediate space of the two tubes 21, 22 and the first tube 21 are introduced.
  • the tubes 21, 22 are so arranged in the housing with inlets and outlets for the gas to be analyzed and fürschwungen the electrical lines for the gas sensor that between the outer wall of the second tube 22 and inner walls of the side walls 23 of the housing a distance and thus an interior is present.
  • the bore connected to the interspace of the tubes 21, 22, the gap, the openings, the space with the plate-shaped carrier 1 in the first tube 21 and the at least one bore connected to the space as a measuring chamber with the gas sensor in the first tube 21 are flow channels for the gas to be analyzed.
  • connection fittings 24 for fastening hoses for the gas to be analyzed have connection fittings 24 for fastening hoses for the gas to be analyzed.
  • the Grund ⁇ plate 25 and at least one side wall 23 of the housing may each have at least one fürgeh ⁇ end and pointing in the direction of the interior of each opening.
  • a fan may be arranged on the base plate 25 of the housing such that an air flow for cooling the housing in the interior can be generated.
  • the second tube 22 can each have a breakthrough in the direction of the interior for the gas to be analyzed.
  • the base plate 25 and a wall of the housing have at least one opening to the interior and on the base plate 25, a fan for generating an air flow in the interior is arranged.
  • a fan for generating an air flow in the interior is arranged.
  • At least one temperature sensor can be arranged at least either on the outer wall of the second tube 22 and / or on an inner wall of the housing and thus in the inner space, whereby passages of the electrical lines for the temperature sensor are located in the housing.
  • the housing with the measuring chamber of the embodiments six and seven may also have other geometric body shapes.
  • the base plate 25 and the cover plate 26 may have a circular shape or a further polygonal shape.

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)

Abstract

L'invention concerne des dispositifs servant à déterminer les propriétés d'un gaz au moyen d'un capteur de gaz à structure plane actionné par au moins un élément chauffant présentant une température supérieure à 290 °C sur un substrat support pour et dans une chambre de mesure. Ces dispositifs sont caractérisés en particulier par une grande simplicité de conception leur permettant d'être produits à très faible coût. A cet effet, le capteur de gaz susmentionné est constitué d'un substrat support à couches minces pour au moins un dispositif chauffant, un électrolyte solide et des électrodes. Le substrat support est constitué de matériaux connus à base d'oxyde d'aluminium, de vitrocéramique ou d'oxyde de zirconium et d'oxyde d'aluminium. Le capteur de gaz à structure plane est disposé sur une surface du substrat support et l'élément chauffant est disposé sur une autre surface dudit substrat support. L'élément chauffant est un élément de résistance électrique présentant au moins deux alimentations. Au moins un conducteur servant de prise de potentiel est relié à l'élément chauffant. Cet élément chauffant est constitué de pistes disposées sur le substrat support.
PCT/DE2005/001241 2004-07-06 2005-07-04 Dispositif pour determiner les proprietes d'un gaz WO2006005332A2 (fr)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
DE200410034295 DE102004034295A1 (de) 2004-07-06 2004-07-06 Einrichtung und Verfahren zur Messung der Temperatur, der Temperaturverteilung und/oder des Leistungseintrages
DE102004034295.4 2004-07-06
DE102004048979.3 2004-10-01
DE200410048979 DE102004048979B4 (de) 2004-10-01 2004-10-01 Sensor mit wenigstens einem beheizten Sensorelement
DE200420015400 DE202004015400U1 (de) 2004-10-04 2004-10-04 Sensor sowohl zur Sauerstoffmessung als auch zur Volumenstrom- und/oder Anströmmessung
DE202004015400.5 2004-10-04
DE102005021449 2005-05-02
DE102005021449.5 2005-05-02

Publications (2)

Publication Number Publication Date
WO2006005332A2 true WO2006005332A2 (fr) 2006-01-19
WO2006005332A3 WO2006005332A3 (fr) 2006-03-02

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008002332U1 (de) 2008-02-20 2009-06-25 Sensatronic Gmbh Messvorrichtung
DE102008009206A1 (de) 2008-02-15 2009-09-24 Sensatronic Gmbh Messvorrichtung
CN102685939A (zh) * 2012-06-12 2012-09-19 陈兴举 用于气体传感器的均匀温度加热器
FR3011331A1 (fr) * 2013-10-01 2015-04-03 Univ Aix Marseille Capteur a gaz a couche sensible chauffee
DE102015215935A1 (de) * 2015-08-20 2017-02-23 Robert Bosch Gmbh Sensorelement zur Erfassung mindestens einer Eigenschaft eines Messgases in einem Messgasraum
DE102016210936A1 (de) * 2016-06-20 2017-12-21 Siemens Aktiengesellschaft Gassensor
EP3550295A1 (fr) * 2018-04-05 2019-10-09 Alpha M.O.S. Détecteur de gaz comprenant un élément de chauffage configurable et procédés exploitant la configurabilité
RU2767005C1 (ru) * 2021-07-09 2022-03-16 Акционерное Общество "Экон" Высокотемпературная электрохимическая ячейка

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DE19957991A1 (de) * 1999-12-02 2001-06-07 Daimler Chrysler Ag Anordnung einer Heizschicht für einen Hochtemperaturgassensor
EP1111703A2 (fr) * 1999-12-23 2001-06-27 Ballard Power Systems Inc. Assemblage de piles à combustible avec détecteur électrochimique de gaz et procédé de fabrication dudit détecteur
EP1239282A2 (fr) * 2001-03-09 2002-09-11 Ngk Insulators, Ltd. Capteur de gaz et méthode pour le chauffer

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Publication number Priority date Publication date Assignee Title
DE19957991A1 (de) * 1999-12-02 2001-06-07 Daimler Chrysler Ag Anordnung einer Heizschicht für einen Hochtemperaturgassensor
EP1111703A2 (fr) * 1999-12-23 2001-06-27 Ballard Power Systems Inc. Assemblage de piles à combustible avec détecteur électrochimique de gaz et procédé de fabrication dudit détecteur
EP1239282A2 (fr) * 2001-03-09 2002-09-11 Ngk Insulators, Ltd. Capteur de gaz et méthode pour le chauffer

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008009206A1 (de) 2008-02-15 2009-09-24 Sensatronic Gmbh Messvorrichtung
DE202008002332U1 (de) 2008-02-20 2009-06-25 Sensatronic Gmbh Messvorrichtung
CN102685939A (zh) * 2012-06-12 2012-09-19 陈兴举 用于气体传感器的均匀温度加热器
EP3816617A3 (fr) * 2013-10-01 2021-08-04 Université d'Aix Marseille Capteur à gaz à couche sensible chauffée
FR3011331A1 (fr) * 2013-10-01 2015-04-03 Univ Aix Marseille Capteur a gaz a couche sensible chauffee
CN105659076A (zh) * 2013-10-01 2016-06-08 埃克斯-马赛大学 热敏感层气体传感器
JP2016534326A (ja) * 2013-10-01 2016-11-04 ユニバーシティ ド エクス‐マルセイユ 加熱式感応層ガスセンサ
WO2015049445A1 (fr) * 2013-10-01 2015-04-09 Université D'aix-Marseille Capteur a gaz a couche sensible chauffee
US10753897B2 (en) 2013-10-01 2020-08-25 Universite D'aix-Marseille Heated sensitive layer gas sensor
DE102015215935A1 (de) * 2015-08-20 2017-02-23 Robert Bosch Gmbh Sensorelement zur Erfassung mindestens einer Eigenschaft eines Messgases in einem Messgasraum
DE102015215935B4 (de) 2015-08-20 2022-03-17 Robert Bosch Gmbh Sensorelement zur Erfassung mindestens einer Eigenschaft eines Messgases in einem Messgasraum
DE102016210936A1 (de) * 2016-06-20 2017-12-21 Siemens Aktiengesellschaft Gassensor
CN110346419A (zh) * 2018-04-05 2019-10-18 阿尔法莫斯公司 具有可配置加热元件的气体传感器和利用该配置的方法
EP3550295A1 (fr) * 2018-04-05 2019-10-09 Alpha M.O.S. Détecteur de gaz comprenant un élément de chauffage configurable et procédés exploitant la configurabilité
US11402347B2 (en) 2018-04-05 2022-08-02 Alpha M.O.S. Gas sensor with a configurable heating element, and methods exploiting the configurability
CN110346419B (zh) * 2018-04-05 2024-02-23 阿尔法莫斯公司 具有可配置加热元件的气体传感器和利用该配置的方法
RU2767005C1 (ru) * 2021-07-09 2022-03-16 Акционерное Общество "Экон" Высокотемпературная электрохимическая ячейка

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