EP1169572B1 - Kolbenvakuumpumpe mit gaseinlass und gasauslass - Google Patents

Kolbenvakuumpumpe mit gaseinlass und gasauslass Download PDF

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Publication number
EP1169572B1
EP1169572B1 EP00909301A EP00909301A EP1169572B1 EP 1169572 B1 EP1169572 B1 EP 1169572B1 EP 00909301 A EP00909301 A EP 00909301A EP 00909301 A EP00909301 A EP 00909301A EP 1169572 B1 EP1169572 B1 EP 1169572B1
Authority
EP
European Patent Office
Prior art keywords
valve
piston
gas
pressure
controlled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00909301A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1169572A1 (de
Inventor
Thomas Dreifert
Lutz Arndt
Jürgen Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1169572A1 publication Critical patent/EP1169572A1/de
Application granted granted Critical
Publication of EP1169572B1 publication Critical patent/EP1169572B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F04B39/1053—Adaptations or arrangements of distribution members the members being Hoerbigen valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/0005—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 adaptations of pistons
    • F04B39/0016—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 adaptations of pistons with valve arranged in the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F04B39/102—Adaptations or arrangements of distribution members the members being disc valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F04B39/1046—Combination of in- and outlet valve

Definitions

  • the invention relates to a piston vacuum pump after Preamble of claim 1.
  • Single and multi-stage piston vacuum pumps are from EU-A-85 687 known. They have become comparable to one another Rotary piston vacuum pumps as cost-effective and wear-resistant and are therefore on successful in the market.
  • each of the cylinder / piston systems is with a valve-controlled gas inlet and with equipped with a valve-controlled gas outlet.
  • a valve-controlled gas inlet the gas inlet line opens into an annular groove in the cylinder wall, from the piston itself closed or released
  • a pressure or piston controlled gas outlet valve known the one over the entire cylinder front side having extending valve disc.
  • the outlet valve closes when the piston after the Reaching its dead center its enlarging the scoop space Movement phase (suction stroke) begins. To this Time is the pump chamber not yet with the gas connected, so that the pressure in the pump chamber decreases.
  • piston vacuum pumps u.a. the advantage have that they are built dead space and operated can arise during the described movement phase of the piston very low pressures affecting the piston movement complicate and load the piston drive.
  • the pump chamber via a line with a Non-return valve to connect to the gas outlet chamber. With decreasing pressure in the suction chamber this opens Check valve and prevents the emergence very low pressures.
  • a disadvantage of the previously known solution is that already pumped gases back into the pump chamber arrive and again or even repeatedly promoted Need to become.
  • a piston vacuum pump with the features of the preamble of claim 1 is known from US-A-43 70 103. Their only gas inlet is pressure controlled, so that even during the final pressure operation, ie at low suction pressures (10 -2 mbar and less), entering into the pump and pumped by the pump gases must overcome the pressure-controlled valve.
  • the state of the art also includes the content of DE 826 926 C and US-A-50 76 769.
  • the DE-document discloses the use of lamellar parts of a elastic material as valves in pumps or compressors.
  • the US patent discloses a double-piston pump with two pressure-controlled inlet valves, the side next to the pump chamber in the cylinder wall are arranged.
  • the present invention is based on the object a piston vacuum pump of the type concerned here in relation to improve the gas inlet.
  • the gas inlet should be designed so that during the suction stroke of Piston no or only negligible negative pressure arise in the scoop space.
  • a first pressure-controlled Intake valve provided during the Suction strokes, preferably in the first phase of the suction stroke, opens.
  • this solution has the advantage of having the drive stressful negative pressures do not arise. Also the Disadvantage that gas components have to be pumped several times, does not exist anymore.
  • a second piston-controlled Gas entry exists, e.g. a gas inlet with a gas inlet valve, as is known from DE-A-196 34 517 is known. Inlet openings of this type are large. The fullest possible filling the scoop space is reached before the start of the print stroke. This applies in particular during the final printing operation the vacuum pump, so at low suction pressures. A pressure-controlled valve that controls the flow of gases with these pressure ranges obstructed is unavailable.
  • inlet valve 12 As well as the outlet valve 7 - in the area of the illustrated end face of the cylinder arranged.
  • a gas inlet chamber or pipe 14 In the cylinder head 4 is out of the box the gas outlet chamber 11, a gas inlet chamber or pipe 14.
  • the gas inlet valve 12 is located between the gas inlet chamber 14 and the suction chamber 5. It is pressure controlled and opens as soon as during the suction stroke of the piston is sufficiently lower Pressure in the pump chamber 5 is created.
  • the valve plate 8 of the outlet valve 7 is by means of the screw 15 on the cylinder head. 4 attached. It is actuated via the plunger 16 on the piston 2.
  • the closure piece of the inlet valve 12 is a spring tongue 18, which is part of an intermediate cylinder and cylinder head 4 attached valve plate 19th is. When the inlet valve 12 is closed, the spring tongue is located 18 of the mouth 20 of the inlet chamber or line 14.
  • FIGs 2a to 2c show an approximately centrally on the cylinder head 4 fixed inlet valve 12, the closure piece 21 a rotationally symmetrical designed Valve tongue 22 includes, via annular spring sections 23 is connected to an edge 24 (FIG 2 B).
  • the attachment of trained as a valve plate Locking piece 21 on the cylinder head 4 serve a sleeve 25 with collar 26 and a fastening nut 27, which can be screwed into a threaded bore 28 in the cylinder head 4 is.
  • the spring tongue 22 is the Mouth 20 of the gas inlet chamber 14 in the pump chamber 5 on.
  • Either the sleeve 26 itself (e.g., Viton) or an elastomeric ring 29 form the valve seat.
  • the Edge 24 of the closure piece 21 is clamped between the fastening nut 27 and an elastomeric ring 31.
  • the fastening nut 27 has a hollow shaft, the with recesses 32 for the passage of the spring sections 23 is equipped.
  • the valve plate 8 of the gas outlet valve 7 surrounds the inlet valve 12 and can be pressure-controlled or - via the plunger 16 - be piston-controlled.
  • the diaphragm 37 is offset with respect to the bore 36 arranged openings 39 equipped at sufficient negative pressure in the pump chamber 5 the passage allow the gases (in Figure 3, left half, shown).
  • a spring tongue 40 - similar to the solution according to Figure 1 - assigned by means of the screw 41 is attached to the valve plate 8.
  • the holes 50 in the solutions according to the figures 6 to 9 are each in the immediate vicinity of the outlet valve 7 facing the end face of the cylinder wall 3, so that the valves 12 as early as possible at the beginning Open suction stroke pressure-controlled.
  • 2 controlled gas inlet 55 may be present (FIG. 8), formed as a circumferential groove 56 in the cylinder wall 3 is. In this groove 56 also opens the gas inlet line 14th
  • the solutions according to FIGS. 6 to 9 have the advantage that the cross section of the outlet valve. 7 not by the arrangement of a gas inlet valve 12 is impaired and that laterally next to the cylinder enough space to accommodate the gas inlet valve 12 is present. In addition, a damage free space is Easy to realize outlet valve. Essential with these solutions is that the gas enters 50 in the immediate vicinity of the end face of the cylinder bore located so that the gas inlet valve 12th is capable of pressure controlled at the beginning of the suction stroke to open.
  • the piston 2 is the front side with a collar 61 with an outer lip 62 equipped. Furthermore, the piston 2 with a axially extending groove 63 provided, which - if the piston 2 is in its top dead center - from the piston end face to the gas inlet 55 (annular groove 56 in the cylinder wall 3) extends.
  • the lip 62 which together with the Cylinder wall, the gas inlet valve 12 forms, of the Cylinder wall off, allowing the connection between gas inlet 55 and 5 suction chamber 5 made via the groove 63 is.
  • the function of the groove 63 may also be Meeting annular gap between piston skirt and cylinder wall.
  • the inlet 55 has the shape of a hole circle, so that the cuff over the inlet to bottom dead center can be moved.
  • the gas inlet valve 12 designed as a tongue valve ( Figures 1 and 6).
  • the Spring tongue 18 is by means of the screw 65 on the piston. 2 attached and is in the closed state of the mouth 20 of the gas inlet channel 14.
  • Other valve forms are also possible (e.g., ball valve).
  • the components the solutions described may be coated (Valve disc 8 in Figure 3, piston face in the Figures 4 and 10, piston skirt in Figure 5, cylinder wall in FIG. 6).
  • the closure elements and / or seats the inlet valves 12 can be equipped with a layer be.
  • the materials are chosen (e.g., elastomer or polytetrafluoroethylene).
  • the actuation of the outlet valve 7 may be pressure or piston controlled.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)
EP00909301A 1999-04-15 2000-03-03 Kolbenvakuumpumpe mit gaseinlass und gasauslass Expired - Lifetime EP1169572B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19917009A DE19917009A1 (de) 1999-04-15 1999-04-15 Kolbenvakuumpumpe mit Gaseinlass und Gasauslass
DE19917009 1999-04-15
PCT/EP2000/001845 WO2000063557A1 (de) 1999-04-15 2000-03-03 Kolbenvakuumpumpe mit gaseinlass und gasauslass

Publications (2)

Publication Number Publication Date
EP1169572A1 EP1169572A1 (de) 2002-01-09
EP1169572B1 true EP1169572B1 (de) 2005-08-17

Family

ID=7904655

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00909301A Expired - Lifetime EP1169572B1 (de) 1999-04-15 2000-03-03 Kolbenvakuumpumpe mit gaseinlass und gasauslass

Country Status (5)

Country Link
EP (1) EP1169572B1 (zh)
AU (1) AU3163600A (zh)
DE (2) DE19917009A1 (zh)
TW (1) TW571025B (zh)
WO (1) WO2000063557A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102384070A (zh) * 2010-08-30 2012-03-21 梁嘉麟 活塞往复式压缩机的全无余隙型式的设计方案

Families Citing this family (19)

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Publication number Priority date Publication date Assignee Title
US6540492B2 (en) * 2001-04-09 2003-04-01 Carrier Corporation Compressor piston with reduced discharge clearance
DE10233302B4 (de) * 2002-07-22 2006-06-14 Knf Neuberger Gmbh Pumpe
DE10247336A1 (de) † 2002-10-10 2004-04-22 Pfeiffer Vacuum Gmbh Kolbenmaschine zur Förderung von Gasen
DE10308421A1 (de) * 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Kolbenpumpe, vorzugsweise Kolbenvakuumpumpe, mit Auslassventil
DE102004047159B4 (de) * 2004-09-29 2006-09-07 Danfoss Compressors Gmbh Kolbenverdichter, insbesondere hermetischer Kältemittelverdichter
DE102005044904B4 (de) * 2005-09-14 2009-12-03 Hirschmann, Karl-Heinz, Prof.Dr. Elektromagnetisch betreibbare Dosierpumpe
GB2452954B (en) * 2007-09-20 2010-01-27 Scion Sprays Ltd A reed valve for a fuel injection system and a fuel injection system having such a reed valve
EP2198149B1 (en) 2007-09-20 2011-11-02 Scion-Sprays Limited A fluid injector having a reed valve
DE102008031450A1 (de) * 2008-07-04 2010-01-07 Gardner Denver Thomas Gmbh Pumpe
GB2469078B (en) 2009-03-31 2012-04-11 Scion Sprays Ltd A fluid injector having a novel inlet valve arrangement
DE202010002145U1 (de) 2010-02-09 2011-09-07 Vacuubrand Gmbh + Co Kg Membranvakuumpumpe
JP6111697B2 (ja) * 2013-01-30 2017-04-12 スズキ株式会社 エンジンの負圧供給装置
DE102014216282A1 (de) * 2014-08-15 2016-02-18 Robert Bosch Gmbh Kolbenpumpe mit mechanischen Hubanschlag für Membranfeder
CN105570097A (zh) * 2016-01-15 2016-05-11 王颖 对称螺旋线形阀压电泵
DE102016002071A1 (de) 2016-01-31 2017-08-03 Schwarzer Precision GmbH & Co. KG Ventilsegment und Ventilanordnung
DE202016001148U1 (de) 2016-01-31 2017-05-04 Schwarzer Precision GmbH & Co. KG Ventilsegment und Ventilanordnung
DE102019120730A1 (de) * 2019-07-31 2021-02-04 Amk Holding Gmbh & Co. Kg Zylinderkolben für einen Luftkompressor
DE102021201112A1 (de) 2021-02-05 2022-08-11 Thyssenkrupp Ag Kolben für eine Kolbenpumpe, Verfahren zur Herstellung eines Kolbens, sowie Kolbenpumpe
CN114278556A (zh) * 2021-12-31 2022-04-05 上海飞科电器股份有限公司 一种泵水装置及冲牙器

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102384070A (zh) * 2010-08-30 2012-03-21 梁嘉麟 活塞往复式压缩机的全无余隙型式的设计方案

Also Published As

Publication number Publication date
DE50010975D1 (de) 2005-09-22
DE19917009A1 (de) 2000-10-19
AU3163600A (en) 2000-11-02
EP1169572A1 (de) 2002-01-09
TW571025B (en) 2004-01-11
WO2000063557A1 (de) 2000-10-26

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