EP0922165B1 - Vakuumpumpe - Google Patents
Vakuumpumpe Download PDFInfo
- Publication number
- EP0922165B1 EP0922165B1 EP97944768A EP97944768A EP0922165B1 EP 0922165 B1 EP0922165 B1 EP 0922165B1 EP 97944768 A EP97944768 A EP 97944768A EP 97944768 A EP97944768 A EP 97944768A EP 0922165 B1 EP0922165 B1 EP 0922165B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- pump according
- inlet
- valve
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B25/00—Multi-stage pumps
- F04B25/02—Multi-stage pumps of stepped piston type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B25/00—Multi-stage pumps
Definitions
- the invention relates to a vacuum pump with the Features of the preamble of claim 1.
- vacuum pumps in one first pumping phase, starting from atmospheric pressure, relative large amounts of gas are generated. These are through the Pump pumped and compressed by the pump stage (s), what annoying, often harmful overpressures in the pump.
- a vacuum pump of this type is known from US-A-22 46 932 known. It has two compression levels, the at high suction pressures in parallel, at low suction pressures operated one after the other. A control mechanism automatically initiates the switchover. at high suction pressures flow through the relatively large ones Quantities of gas unhindered the inlet valves. At this Pump has the problem mentioned.
- a vacuum pump designed as a piston pump, in which the problem mentioned does not exist is from US-A-48 54 825 known.
- the technology consists of two cylindrical compression chambers on the inlet side of two of the four stepped cylinders in parallel switched and form a first pump stage.
- the cylindrical compression chamber of a third cylinder forms the second stage of the pump.
- the ring-shaped Compression chambers of the three cylinders, their cylindrical Compression chambers the first and the second pump stage form, are not equipped with inlets; she have no pump function.
- the cylindrical compression chamber the fourth cylinder forms a third Stage of the vacuum pump. Your outlet is immediately available the outlet of the pump in connection.
- the ring-shaped Compression chamber of this stepped cylinder has also pump function; however, it forms together with only a bypass to their inlet and outlet the exit from the third pump stage immediately inflowing gases, i.e. that only a part of the from the Gases escaping from the third pump stage this annular compression chamber to exit the Pump arrives.
- US 4 171 188 A discloses a compressor with a Inlet valve using an oil pressure cylinder is controlled to be adequate in the initial phase Ensure the oil supply to the compressor.
- US 4 396 345 A, GB 1 089 694 A and DE 44 32 263 A disclose machines with inlet valves that are also not pressure controlled. The other documents disclose pressure-controlled valves, the However, the object of the present invention purpose lie far away.
- the present invention is based on the object in a vacuum pump due to the accumulation of large amounts of gas resulting overpressures in a simple manner avoid.
- a differential pressure controlled inlet valve of the invention Art is simple and robust. constructional Measures in the vacuum pump and / or a second outlet valve are not required.
- the piston vacuum pump 1 shown in Figure 1 includes the housing 2, the inlet 3 and the outlet 4. Inside there are four cylinder-piston systems in the housing 11, 21, 31 and 41, which are essentially identical are trained. They are opposed to each other in pairs - preferably arranged in one plane - that their pistons have a common crankshaft 5 can be driven.
- the drive motor is 6 designated.
- the cylinder-piston system 11 has the cylinder 12 and the piston 13. Both are tiered so that they are in known a cylindrical compression chamber 14 and form an annular compression chamber 15.
- the cylindrical compression chamber 14 has the Inlet 16 and outlet 17, the annular compression chamber 15 the inlet 18 and the outlet 19 on.
- the Inlets 16 and 18 are ring grooves in the wall of the Cylinder 12 formed so that the movement of the piston 13 causes the inlets to open and close.
- the outlets 17 and 19 are not shown in detail Valves equipped.
- the cylinder-piston system 21, 31 and 41 are corresponding trained and with corresponding reference numerals Mistake.
- entry is 3 via line 51 - e.g. with the valve 52 - with the Inlets 16, 18, 26, 28 of the compression chambers 14, 15, 24 and 25, which components of the piston-cylinder systems 11 and 21 are connected.
- the above, in parallel switched compression chambers form a first pump stage the piston vacuum pump 1, indicated by the dash-dotted line 54.
- Connected to the outlets 17, 19, 27 and 29 of the first stage compression chambers connecting lines all flow into the line 55, with the inlets 36, 38 of the compression chambers 34, 35 are connected. These are part of the piston-cylinder system 31.
- the also connected in parallel Compression chambers 34, 35 form the second pump stage the piston vacuum pump 1, indicated by the dash-dotted line 57.
- This compression chamber 44 forms the third pump stage the piston vacuum pump 1 (see dash-dotted line 61).
- the outlet 47 of the compression chamber 44 protrudes line 62 with inlet 48 of the annular compression chamber 45 in connection, which is also a component of the piston-cylinder system 41.
- the outlet 49 of the annular compression chamber 45 stands with the Outlet 4 of the piston vacuum pump 1 in connection.
- the Compression chamber 45 forms the fourth pumping stage Piston vacuum pump 1 (dashed line 63).
- a nozzle 64 is also indicated in FIG. 1, via which the compression space 45 with the inside of the housing 2 the pump 1 is connected.
- the size of the nozzle 64 is selected so that there is a vacuum of a few hundred milibars. The requirements for the sealing quality of the gap between the pistons and the cylinders in their neighbors to the inside of the housing This can further reduce areas.
- FIG 2 shows again the piston-cylinder system 11 with its compression chambers 14 and 15.
- the inlets 16 and 18 of these chambers (together with the inlets 26, 28 of the second piston-cylinder system 21) via the Valve 52 in connection with the inlet 3 of the vacuum pump.
- the valve 52 fulfills the function in a first Throttle the pumping phase, relatively large amounts of gas or temporarily withhold to such an extent, that pressures in pump 1 do not occur.
- To the valve 52 has a chamber 65 with an inlet opening 66, an outlet opening 67 and a passage opening 72 on. Is at the level of the passage opening 72 the chamber is conical.
- Located in chamber 65 a closure body 68 with a central Bore or opening 69.
- two axially arranged Springs preferably compression springs 70 and 71 the spherical closure body on the outlet side 68 guided against rotation. Hold without gas flow the compression springs hover the closure body.
- FIG. 3 shows a modification of the valve 52 according to FIG 2.
- the closure body 68 is designed as a disc. Its outer edge is one that surrounds the passage opening 72 Seal ring 73 assigned.
- high e.g. Atmospheric pressure
- the approximately hemispherical closure body 68 according to Figure 2 the conical section of the chamber 65 (upper illustration of valve 52 in FIG. 2).
- the disk 68 of the seal lies 73 on.
- the passage openings 72 are each - except for the hole or opening 69 - closed. Just gas passing through the bore or opening 69 gets into the pump 1. The pumping speed is reduced. The size and length of the bore or opening 69 are selected so that pressures in pump 1 do not occur.
- Figures 4 to 7 show further variants for a pressure-dependent inlet valve 52.
- a closure body elastic discs 74 to 77 are provided, which only are attached to the housing at one point.
- the disks 74, 76 and 77 have central openings 78, 79 and 80, respectively on.
- the Washer 75 assigned a constantly open bypass opening 81.
- the outer edges of the discs are 74 to 77 in each case surrounding the passage cross section 72 or 72 ' Seats 82 to 85 assigned.
- the elastic valve disks are curved in the direction of the inlet opening 66, that they are only in the area of their attachment point fit their seats. Give in their rest position the respective passage opening 72 or 72 ' essentially free.
- the disks lie 74 to 77 each their seats 82 to 85 completely on.
- the pumping speed is throttled. It will determined by the size of the openings 78, 79, 80 in the Disks 74, 76, 77 or through the bypass opening 81 (in the embodiment of Figure 5). Relieves the pressure on the inlet side, the disks 74 to 77 lift from their Sit 82 to 84 and each give their passage cross sections 72 or 72 'free. The full pumping speed is then available.
- valve systems 76, 84 and 77, 85 arranged one behind the other.
- the Opening 79 in the suction-side disk 76 is larger than the opening 80 in the outlet-side disk 77.
- FIG. 7 corresponds to the embodiment according to FIG. 5.
- a rigid disc 8 is provided instead of the elastic disk 75 .
- the attachment points the disc 88 are under the action of springs 89 and 90, such that one of the springs (spring 89) in the closing direction, the other (spring 90) in the opening direction acts.
- Figure 8 shows the course of the pumping speed S in dependence to the pressure p for the solutions according to FIGS. 2 to 5 (solid curve 86) and for the solution according to FIG 6 (dash-dotted curve 87), in which two valve systems 76, 83 and 77, 84 arranged one behind the other are.
- the pumping speed is low at high pressures (greater than p 1 ).
- the closure bodies or disks 68, 74, 75 each release their passage openings 72.
- the pumping speed increases up to its maximum value.
- the valve disk 76 first releases its associated passage opening 72 at p 2 .
- the pumping speed increases to a value which is determined by the opening 80 in the disk 77 still resting on its seat 85. If the pressure continues to decrease to p3, the disk 76 also opens its passage opening 72 ', so that the pumping speed assumes its maximum value.
Description
- Figur 1 ein Ausführungsbeispiel für eine als Kolbenpumpe ausgebildete Vakuumpumpe nach der Erfindung,
- Figur 2 eines der eintrittsseitig gelegenen Zylinder-Kolben-Systeme mit einem differenzdruckgesteuerten Eintrittsventil,
- Figuren 3 bis 7 weitere Ausführungsbeispiele für differenzdruckgesteuerte Ventile und
- Figur 8 ein Diagramm, in dem das Saugvermögen in Abhängigkeit vom Einlassdruck dargestellt ist.
Claims (14)
- Vakuumpumpe mit Eintritt (3), Austritt (4) und einem differenzdruckgesteuerten Eintrittsventil (52), dadurch gekennzeichnet, daß das Eintrittsventil (52) derart ausgebildet ist, dass es das Saugvermögen der Vakuumpumpe bei hohem Einlassdruck drosselt, in dem Bestandteil des Einlassventils (52) ein Ventilsystem mit einem Sitz und einem Verschlussstück ist, das bei hohem Einlaßdruck seine Schließstellung einnimmt, wobei das Ventilsystem mit einer Öffnung (69, 78, 79, 80, 81) ausgerüstet ist, die auch in Schließstellung des Verschlussstückes offen ist.
- Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Öffnung (69, 78, 79, 80) im Verschlussstück (68, 74, 76, 77) vorgesehen ist.
- Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Öffnung (81) eine Bypass-Öffnung ist.
- Vakuumpumpe nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass das Verschlussstück (68) zwischen zwei Federn (70, 71) angeordnet ist.
- Vakuumpumpe nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass das Verschlussstück (68) etwa halbkugelförmig ausgebildet ist und dass sein die Durchtrittsöffnung (72) umgebender Sitz etwa kugelförmige Gestalt hat.
- Vakuumpumpe nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass das Verschlussstück die Form einer Scheibe (68, 74, 75, 76, 77, 88) hat.
- Vakuumpumpe nach Anspruch 6, dadurch gekennzeichnet, dass die Scheibe (74, 75, 76, 77) aus elastischem werkstoff besteht, in Richtung Einlass gekrümmt sind und an nur einer Stelle am Sitz befestigt sind.
- Vakuumpumpe nach Anspruch 6, dadurch gekennzeichnet, dass die Scheibe (88) starr ist und an zwei im wesentlichen einander gegenüberliegenden Stellen ihres Randes über Federn (89, 90) am Ventilsitz befestigt ist, und zwar derart, dass eine Feder in Öffnungsrichtung, die andere in Schließrichtung wirkt.
- Vakuumpumpe nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass zwei Ventilsysteme (76, 84; 77, 85) hintereinander angeordnet sind.
- Vakuumpumpe nach einem der Ansprüche 1 bis 10, dadurch gekennzeichnet, dass sie eine mehrstufige Kolbenvakuumpumpe ist.
- Vakuumpumpe nach Anspruch 10, dadurch gekennzeichnet, dass sie mit einem Eintritt (3), mit einem Austritt (4) und mit vier gestuften Zylindern (12, 22, 32, 42)ausgerüstet ist, welche zusammen mit jeweils einem gestuften Kolben (13, 23, 33, 43) jeweils eine zylindrische Kompressionskammer (14, 24, 34, 44) und eine ringförmige Kompressionskammer ((15, 25, 35, 45) bilden, daß sie während ihres Normalbetriebs vier hintereinander geschaltete Pumpstufen (54, 57, 61, 63) aufweist und daß vier parallel geschaltete Kompressionskammern (14, 15, 24, 25) die erste Stufe bilden.
- Vakuumpumpe nach Anspruch 11, dadurch gekennzeichnet, daß jede der acht Kompressionskammern mit einem Einlaß und mit einem Auslaß ausgerüstet ist, daß der Eintritt (3) der Pumpe (1) mit den Einlässen (16, 18, 26, 28) der vier Kompressionskammern (14, 15, 24, 25) von zwei Zylindern (12, 22) in Verbindung steht, daß die Auslässe (17, 19, 27, 29) dieser vier Kompressionskammern mit den beiden Einlässen (36, 38) der beiden Kompressionskammern (34, 35) eines dritten Zylinders (32) verbunden sind, daß die Auslässe (37, 39) dieser beiden Kompressionskammern (34, 35) mit dem Einlaß der zylindrischen Kompressionskammer (44) des vierten Zylinders (41) verbunden sind und daß der Auslaß (47) dieser zylindrischen Kompressionskammer (44) mit dem Einlaß (48) der ringförmigen Kompressionskammer (45) des vierten Zylinders (42) verbunden ist.
- Vakuumpumpe nach Anspruch 11 oder 12, dadurch gekennzeichnet, daß die Zylinder-Kolben-Systeme (11, 21, 31, 41) derart paarweise einander gegenüberliegend angeordnet sind, daß ihre Kolben (13, 23, 33, 43) über eine gemeinsame Kurbelwelle (5) antreibbar sind.
- Vakuumpumpe nach Anspruch 11, 12 oder 13, dadurch gekennzeichnet, daß die Pumpe (1) mit einem dichten Gehäuse (2) ausgerüstet ist, das über eine Düse (64) mit einer der Kompressionskammern, vorzugsweise mit der austrittseitig gelegenen ringförmigen Kompressionskammer (45), verbunden ist.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19634519 | 1996-08-27 | ||
DE19634519A DE19634519A1 (de) | 1996-08-27 | 1996-08-27 | Kolbenvakuumpumpe mit Eintritt und Austritt |
PCT/EP1997/004509 WO1998009079A1 (de) | 1996-08-27 | 1997-08-19 | Eintrittsventil mit drosseleffekt und mehrstufige kolbenvakuumpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0922165A1 EP0922165A1 (de) | 1999-06-16 |
EP0922165B1 true EP0922165B1 (de) | 2004-11-03 |
Family
ID=7803766
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP97936688A Expired - Lifetime EP0922163B1 (de) | 1996-08-27 | 1997-08-06 | Kolbenvakuumpumpe mit eintritt und austritt |
EP97944768A Expired - Lifetime EP0922165B1 (de) | 1996-08-27 | 1997-08-19 | Vakuumpumpe |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP97936688A Expired - Lifetime EP0922163B1 (de) | 1996-08-27 | 1997-08-06 | Kolbenvakuumpumpe mit eintritt und austritt |
Country Status (3)
Country | Link |
---|---|
EP (2) | EP0922163B1 (de) |
DE (3) | DE19634519A1 (de) |
WO (2) | WO1998009077A1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19831123A1 (de) * | 1998-07-11 | 2000-01-13 | Pfeiffer Vacuum Gmbh | Gasballasteinrichtung für mehrstufige Verdrängerpumpen |
DE19921711A1 (de) | 1999-05-12 | 2000-11-16 | Leybold Vakuum Gmbh | Kolbenvakuumpumpe |
DE19926186A1 (de) * | 1999-06-09 | 2000-12-14 | Leybold Vakuum Gmbh | Kolbenvakuumpumpe mit Auslassventil |
DE19955688A1 (de) | 1999-11-19 | 2001-05-23 | Leybold Vakuum Gmbh | Kolben-Vakuumpumpe |
DE19962445A1 (de) | 1999-12-22 | 2001-06-28 | Leybold Vakuum Gmbh | Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung |
DE10048210B4 (de) * | 2000-09-28 | 2007-02-15 | Singulus Technologies Ag | Vorrichtung und Verfahren zum Einschleusen eines Werkstücks über eine Vorvakuumkammer in eine Hochvakuumkammer und deren Verwendung |
DE10127082A1 (de) * | 2001-06-02 | 2002-12-05 | Leybold Vakuum Gmbh | Mehrstufige Kolbenvakuumpumpe und Verfahren zum Betrieb dieser Pumpe |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2032429A (en) * | 1934-07-26 | 1936-03-03 | Ingersoll Rand Co | Load controlling apparatus for compressors |
US2246932A (en) * | 1939-09-21 | 1941-06-24 | Chicago Pneumatic Tool Co | Combination single and two stage vacuum pump |
US2269620A (en) * | 1940-06-15 | 1942-01-13 | Chicago Pneumatic Tool Co | Compressor regulator |
US2765976A (en) * | 1952-03-14 | 1956-10-09 | Pennsylvania Pump & Compressor | Two stage compressor |
US3122162A (en) * | 1963-06-20 | 1964-02-25 | Asa D Sands | Flow control device |
DE1403963A1 (de) * | 1963-07-02 | 1968-11-21 | Kurt Braetsch | Kompressor mit wenigstens drei Stufen |
GB1089694A (en) * | 1964-02-24 | 1967-11-01 | J & E Hall Ltd | Improvements in or relating to gas and vapour compressors |
DE1910848A1 (de) * | 1969-03-04 | 1970-09-17 | Kurt Braetsch | Kompressor |
GB1258333A (de) * | 1968-04-08 | 1971-12-30 | ||
US4171188A (en) * | 1976-08-03 | 1979-10-16 | Chicago Pneumatic Tool Company | Rotary air compressors with intake valve control and lubrication system |
US4396345A (en) * | 1981-05-07 | 1983-08-02 | Ingersoll-Rand Company | Unloader valve having bypass valving means |
JPS58501474A (ja) * | 1981-08-13 | 1983-09-01 | コモンウエルス サイエンテイフイツク アンド インダストリアルリサ−チ オ−ガニゼイシヨン | 往復動ピストン−シリンダ装置 |
JPS6085280A (ja) * | 1983-10-18 | 1985-05-14 | Shinku Kiko Kk | ダイヤフラム形真空ポンプの逆流防止装置 |
US4854825A (en) * | 1987-02-27 | 1989-08-08 | Commonwealth Scientific And Industrial Research Organization | Multi-stage vacuum pump |
JPH02102385A (ja) * | 1988-10-08 | 1990-04-13 | Toyo Eng Corp | 排気装置 |
US5482443A (en) * | 1992-12-21 | 1996-01-09 | Commonwealth Scientific And Industrial Research Organization | Multistage vacuum pump |
JP3505233B2 (ja) * | 1994-09-06 | 2004-03-08 | サンデン株式会社 | 圧縮機 |
DE4432263C2 (de) * | 1994-09-10 | 1996-07-11 | Walterscheid Gmbh Gkn | Kombinationsventil für sauggedrosselte Hydraulikpumpen |
-
1996
- 1996-08-27 DE DE19634519A patent/DE19634519A1/de not_active Withdrawn
-
1997
- 1997-08-06 WO PCT/EP1997/004282 patent/WO1998009077A1/de active IP Right Grant
- 1997-08-06 DE DE59705578T patent/DE59705578D1/de not_active Expired - Lifetime
- 1997-08-06 EP EP97936688A patent/EP0922163B1/de not_active Expired - Lifetime
- 1997-08-19 EP EP97944768A patent/EP0922165B1/de not_active Expired - Lifetime
- 1997-08-19 DE DE59712067T patent/DE59712067D1/de not_active Expired - Lifetime
- 1997-08-19 WO PCT/EP1997/004509 patent/WO1998009079A1/de active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
WO1998009079A1 (de) | 1998-03-05 |
WO1998009077A1 (de) | 1998-03-05 |
DE59705578D1 (de) | 2002-01-10 |
EP0922163A1 (de) | 1999-06-16 |
DE59712067D1 (de) | 2004-12-09 |
EP0922165A1 (de) | 1999-06-16 |
DE19634519A1 (de) | 1998-03-05 |
EP0922163B1 (de) | 2001-11-28 |
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