EP1169572B1 - Piston vacuum pump with a gas inlet and a gas outlet - Google Patents

Piston vacuum pump with a gas inlet and a gas outlet Download PDF

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Publication number
EP1169572B1
EP1169572B1 EP00909301A EP00909301A EP1169572B1 EP 1169572 B1 EP1169572 B1 EP 1169572B1 EP 00909301 A EP00909301 A EP 00909301A EP 00909301 A EP00909301 A EP 00909301A EP 1169572 B1 EP1169572 B1 EP 1169572B1
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EP
European Patent Office
Prior art keywords
valve
piston
gas
pressure
controlled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00909301A
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German (de)
French (fr)
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EP1169572A1 (en
Inventor
Thomas Dreifert
Lutz Arndt
Jürgen Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
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Publication of EP1169572A1 publication Critical patent/EP1169572A1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F04B39/1053—Adaptations or arrangements of distribution members the members being Hoerbigen valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/0005—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 adaptations of pistons
    • F04B39/0016—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 adaptations of pistons with valve arranged in the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F04B39/102—Adaptations or arrangements of distribution members the members being disc valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F04B39/1046—Combination of in- and outlet valve

Definitions

  • the invention relates to a piston vacuum pump after Preamble of claim 1.
  • Single and multi-stage piston vacuum pumps are from EU-A-85 687 known. They have become comparable to one another Rotary piston vacuum pumps as cost-effective and wear-resistant and are therefore on successful in the market.
  • each of the cylinder / piston systems is with a valve-controlled gas inlet and with equipped with a valve-controlled gas outlet.
  • a valve-controlled gas inlet the gas inlet line opens into an annular groove in the cylinder wall, from the piston itself closed or released
  • a pressure or piston controlled gas outlet valve known the one over the entire cylinder front side having extending valve disc.
  • the outlet valve closes when the piston after the Reaching its dead center its enlarging the scoop space Movement phase (suction stroke) begins. To this Time is the pump chamber not yet with the gas connected, so that the pressure in the pump chamber decreases.
  • piston vacuum pumps u.a. the advantage have that they are built dead space and operated can arise during the described movement phase of the piston very low pressures affecting the piston movement complicate and load the piston drive.
  • the pump chamber via a line with a Non-return valve to connect to the gas outlet chamber. With decreasing pressure in the suction chamber this opens Check valve and prevents the emergence very low pressures.
  • a disadvantage of the previously known solution is that already pumped gases back into the pump chamber arrive and again or even repeatedly promoted Need to become.
  • a piston vacuum pump with the features of the preamble of claim 1 is known from US-A-43 70 103. Their only gas inlet is pressure controlled, so that even during the final pressure operation, ie at low suction pressures (10 -2 mbar and less), entering into the pump and pumped by the pump gases must overcome the pressure-controlled valve.
  • the state of the art also includes the content of DE 826 926 C and US-A-50 76 769.
  • the DE-document discloses the use of lamellar parts of a elastic material as valves in pumps or compressors.
  • the US patent discloses a double-piston pump with two pressure-controlled inlet valves, the side next to the pump chamber in the cylinder wall are arranged.
  • the present invention is based on the object a piston vacuum pump of the type concerned here in relation to improve the gas inlet.
  • the gas inlet should be designed so that during the suction stroke of Piston no or only negligible negative pressure arise in the scoop space.
  • a first pressure-controlled Intake valve provided during the Suction strokes, preferably in the first phase of the suction stroke, opens.
  • this solution has the advantage of having the drive stressful negative pressures do not arise. Also the Disadvantage that gas components have to be pumped several times, does not exist anymore.
  • a second piston-controlled Gas entry exists, e.g. a gas inlet with a gas inlet valve, as is known from DE-A-196 34 517 is known. Inlet openings of this type are large. The fullest possible filling the scoop space is reached before the start of the print stroke. This applies in particular during the final printing operation the vacuum pump, so at low suction pressures. A pressure-controlled valve that controls the flow of gases with these pressure ranges obstructed is unavailable.
  • inlet valve 12 As well as the outlet valve 7 - in the area of the illustrated end face of the cylinder arranged.
  • a gas inlet chamber or pipe 14 In the cylinder head 4 is out of the box the gas outlet chamber 11, a gas inlet chamber or pipe 14.
  • the gas inlet valve 12 is located between the gas inlet chamber 14 and the suction chamber 5. It is pressure controlled and opens as soon as during the suction stroke of the piston is sufficiently lower Pressure in the pump chamber 5 is created.
  • the valve plate 8 of the outlet valve 7 is by means of the screw 15 on the cylinder head. 4 attached. It is actuated via the plunger 16 on the piston 2.
  • the closure piece of the inlet valve 12 is a spring tongue 18, which is part of an intermediate cylinder and cylinder head 4 attached valve plate 19th is. When the inlet valve 12 is closed, the spring tongue is located 18 of the mouth 20 of the inlet chamber or line 14.
  • FIGs 2a to 2c show an approximately centrally on the cylinder head 4 fixed inlet valve 12, the closure piece 21 a rotationally symmetrical designed Valve tongue 22 includes, via annular spring sections 23 is connected to an edge 24 (FIG 2 B).
  • the attachment of trained as a valve plate Locking piece 21 on the cylinder head 4 serve a sleeve 25 with collar 26 and a fastening nut 27, which can be screwed into a threaded bore 28 in the cylinder head 4 is.
  • the spring tongue 22 is the Mouth 20 of the gas inlet chamber 14 in the pump chamber 5 on.
  • Either the sleeve 26 itself (e.g., Viton) or an elastomeric ring 29 form the valve seat.
  • the Edge 24 of the closure piece 21 is clamped between the fastening nut 27 and an elastomeric ring 31.
  • the fastening nut 27 has a hollow shaft, the with recesses 32 for the passage of the spring sections 23 is equipped.
  • the valve plate 8 of the gas outlet valve 7 surrounds the inlet valve 12 and can be pressure-controlled or - via the plunger 16 - be piston-controlled.
  • the diaphragm 37 is offset with respect to the bore 36 arranged openings 39 equipped at sufficient negative pressure in the pump chamber 5 the passage allow the gases (in Figure 3, left half, shown).
  • a spring tongue 40 - similar to the solution according to Figure 1 - assigned by means of the screw 41 is attached to the valve plate 8.
  • the holes 50 in the solutions according to the figures 6 to 9 are each in the immediate vicinity of the outlet valve 7 facing the end face of the cylinder wall 3, so that the valves 12 as early as possible at the beginning Open suction stroke pressure-controlled.
  • 2 controlled gas inlet 55 may be present (FIG. 8), formed as a circumferential groove 56 in the cylinder wall 3 is. In this groove 56 also opens the gas inlet line 14th
  • the solutions according to FIGS. 6 to 9 have the advantage that the cross section of the outlet valve. 7 not by the arrangement of a gas inlet valve 12 is impaired and that laterally next to the cylinder enough space to accommodate the gas inlet valve 12 is present. In addition, a damage free space is Easy to realize outlet valve. Essential with these solutions is that the gas enters 50 in the immediate vicinity of the end face of the cylinder bore located so that the gas inlet valve 12th is capable of pressure controlled at the beginning of the suction stroke to open.
  • the piston 2 is the front side with a collar 61 with an outer lip 62 equipped. Furthermore, the piston 2 with a axially extending groove 63 provided, which - if the piston 2 is in its top dead center - from the piston end face to the gas inlet 55 (annular groove 56 in the cylinder wall 3) extends.
  • the lip 62 which together with the Cylinder wall, the gas inlet valve 12 forms, of the Cylinder wall off, allowing the connection between gas inlet 55 and 5 suction chamber 5 made via the groove 63 is.
  • the function of the groove 63 may also be Meeting annular gap between piston skirt and cylinder wall.
  • the inlet 55 has the shape of a hole circle, so that the cuff over the inlet to bottom dead center can be moved.
  • the gas inlet valve 12 designed as a tongue valve ( Figures 1 and 6).
  • the Spring tongue 18 is by means of the screw 65 on the piston. 2 attached and is in the closed state of the mouth 20 of the gas inlet channel 14.
  • Other valve forms are also possible (e.g., ball valve).
  • the components the solutions described may be coated (Valve disc 8 in Figure 3, piston face in the Figures 4 and 10, piston skirt in Figure 5, cylinder wall in FIG. 6).
  • the closure elements and / or seats the inlet valves 12 can be equipped with a layer be.
  • the materials are chosen (e.g., elastomer or polytetrafluoroethylene).
  • the actuation of the outlet valve 7 may be pressure or piston controlled.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)

Description

Die Erfindung betrifft eine Kolbenvakuumpumpe nach dem Oberbegriff des Patentanspruchs 1.The invention relates to a piston vacuum pump after Preamble of claim 1.

Ein- und mehrstufige Kolbenvakuumpumpen sind aus der EU-A-85 687 bekannt. Sie haben sich gegenüber vergleichbaren Rotationskolbenvakuumpumpen als kostengünstig und verschleißfest erwiesen und sind deshalb auf dem Markt erfolgreich.Single and multi-stage piston vacuum pumps are from EU-A-85 687 known. They have become comparable to one another Rotary piston vacuum pumps as cost-effective and wear-resistant and are therefore on successful in the market.

Bei Kolbenvakuumpumpen ist jedes der Zylinder-/KolbenSysteme mit einem ventilgesteuerten Gaseintritt und mit einem ventilgesteuerten Gasaustritt ausgerüstet. So sind z. B. aus der DE-A-196 34 517 ein kolbengesteuertes Gaseintrittsventil (die Gaseinlassleitung mündet in einer Ringnut in der Zylinderwand, die vom Kolben selbst verschlossen bzw. freigegeben wird) sowie ein druck- oder kolbengesteuertes Gasaustrittsventil bekannt, das einen sich über die gesamte Zylinderstirnseite erstreckenden Ventilteller aufweist. Bei angehobenem Ventilteller gelangt das komprimierte Gas in eine im Zylinderkopf befindliche Kammer, an die die Gasauslassleitung angeschlossen ist. For piston vacuum pumps, each of the cylinder / piston systems is with a valve-controlled gas inlet and with equipped with a valve-controlled gas outlet. So are z. B. from DE-A-196 34 517 a piston-controlled Gas inlet valve (the gas inlet line opens into an annular groove in the cylinder wall, from the piston itself closed or released) as well as a pressure or piston controlled gas outlet valve known the one over the entire cylinder front side having extending valve disc. When raised Valve disc enters the compressed gas in one in the cylinder head chamber to which the gas outlet connected.

Das Austrittsventil schließt, wenn der Kolben nach dem Erreichen seines Totpunktes seine den Schöpfraum vergrößernde Bewegungsphase (Saughub) beginnt. Zu diesem Zeitpunkt ist der Schöpfraum noch nicht mit dem Gaseintritt verbunden, so dass der Druck im Schöpfraum abnimmt. Gerade weil Kolbenvakuumpumpen u.a. den Vorteil haben, dass sie totraumfrei gebaut und betrieben werden können, entstehen während der beschriebenen Bewegungsphase des Kolbens sehr niedrige Drücke, die die Kolbenbewegung erschweren und den Kolbenantrieb belasten. Um den Antrieb zu entlasten, ist es aus der DE-A-196 34 517 bekannt, den Schöpfraum über eine Leitung mit einem Rückschlagventil mit der Gasaustrittskammer zu verbinden. Bei abnehmendem Druck im Schöpfraum öffnet das Rückschlagventil und verhindert das Entstehen sehr niedriger Drücke. Nachteilig an der vorbekannten Lösung ist, dass bereits geförderte Gase wieder in den Schöpfraum gelangen und nochmals oder gar mehrfach gefördert werden müssen.The outlet valve closes when the piston after the Reaching its dead center its enlarging the scoop space Movement phase (suction stroke) begins. To this Time is the pump chamber not yet with the gas connected, so that the pressure in the pump chamber decreases. Just because piston vacuum pumps u.a. the advantage have that they are built dead space and operated can arise during the described movement phase of the piston very low pressures affecting the piston movement complicate and load the piston drive. Around to relieve the drive, it is known from DE-A-196 34 517 known, the pump chamber via a line with a Non-return valve to connect to the gas outlet chamber. With decreasing pressure in the suction chamber this opens Check valve and prevents the emergence very low pressures. A disadvantage of the previously known solution is that already pumped gases back into the pump chamber arrive and again or even repeatedly promoted Need to become.

Eine Kolbenvakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1 ist aus der US-A-43 70 103 bekannt. Ihr einziger Gaseintritt ist druckgesteuert, so dass auch die während des Enddruckbetriebs, also bei niedrigen Ansaugdrücken (10-2 mbar und weniger), in die Pumpe eintretenden und von der Pumpe geförderten Gase das druckgesteuerte Ventil überwinden müssen.A piston vacuum pump with the features of the preamble of claim 1 is known from US-A-43 70 103. Their only gas inlet is pressure controlled, so that even during the final pressure operation, ie at low suction pressures (10 -2 mbar and less), entering into the pump and pumped by the pump gases must overcome the pressure-controlled valve.

Zum Stand der Technik gehören auch noch der Inhalt der DE 826 926 C sowie der US-A-50 76 769. Die DE-Schrift offenbart den Einsatz von lamellenartigen Teilen eines elastischen Werkstoffes als Ventile in Pumpen oder Verdichtern. Die US-Schrift offenbart eine Doppel-Kolbenpumpe mit zwei druckgesteuerten Eintrittsventilen, die seitlich neben dem Schöpfraum in der Zylinderwand angeordnet sind.The state of the art also includes the content of DE 826 926 C and US-A-50 76 769. The DE-document discloses the use of lamellar parts of a elastic material as valves in pumps or compressors. The US patent discloses a double-piston pump with two pressure-controlled inlet valves, the side next to the pump chamber in the cylinder wall are arranged.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Kolbenvakuumpumpe der hier betroffenen Art in Bezug auf den Gaseintritt zu verbessern. Der Gaseintritt soll so gestaltet sein, dass während des Saughubes des Kolbens keine oder lediglich vernachlässigbare Unterdrücke im Schöpfraum entstehen. Schließlich soll die Verwirklichung der Vorteile der aus der DE-A-196 34 517 bekannten Pumpe - großflächige Einlassschlitze für den Gaswechsel bei niedrigen Ansaugdrücken sowie großflächige und schadraumarme Auslassventile - nicht beeinträchtigt sein.The present invention is based on the object a piston vacuum pump of the type concerned here in relation to improve the gas inlet. The gas inlet should be designed so that during the suction stroke of Piston no or only negligible negative pressure arise in the scoop space. Finally, the Realization of the advantages of DE-A-196 34 517 known pump - large inlet slots for the Gas change at low intake pressures and large area and low-emission exhaust valves - not impaired be.

Erfindungsgemäß werden diese Aufgaben durch die kennzeichnenden Merkmale der Patentansprüche gelöst.According to the invention these objects are characterized by the characterizing Characteristics of the claims solved.

Anders als beim erwähnten Stand der Technik ist bei der erfindungsgemäßen Kolbenvakuumpumpe ein erstes druckgesteuertes Eintrittsventil vorgesehen, das während des Saughubes, vorzugsweise in der ersten Phase des Saughubes, öffnet. Neben einer einfachen und kostengünstigen Konstruktion hat diese Lösung den Vorteil, dass den Antrieb belastende Unterdrücke nicht entstehen. Auch der Nachteil, das Gasanteile mehrfach gefördert werden müssen, besteht nicht mehr. Weiterhin ist ein zweiter kolbengesteuerter Gaseintritt vorhanden, z.B. ein Gaseintritt mit einem Gaseintrittsventil, wie es aus der DE-A-196 34 517 bekannt ist. Einlassöffnungen dieser Art sind großflächig. Eine möglichst vollständige Füllung des Schöpfraumes vor dem Beginn des Druckhubes wird erreicht. Dieses gilt insbesondere während des Enddruckbetriebes der Vakuumpumpe, also bei niedrigen Ansaugdrücken. Ein druckgesteuertes Ventil, das die Strömung von Gasen mit diesen Druckbereichen behindert, ist nicht vorhanden.Unlike the mentioned prior art is in the piston vacuum pump according to the invention a first pressure-controlled Intake valve provided during the Suction strokes, preferably in the first phase of the suction stroke, opens. In addition to a simple and inexpensive Construction, this solution has the advantage of having the drive stressful negative pressures do not arise. Also the Disadvantage that gas components have to be pumped several times, does not exist anymore. Furthermore, a second piston-controlled Gas entry exists, e.g. a gas inlet with a gas inlet valve, as is known from DE-A-196 34 517 is known. Inlet openings of this type are large. The fullest possible filling the scoop space is reached before the start of the print stroke. This applies in particular during the final printing operation the vacuum pump, so at low suction pressures. A pressure-controlled valve that controls the flow of gases with these pressure ranges obstructed is unavailable.

Weitere Vorteile und Einzelheiten der Erfindung sollen an Hand von in den Figuren 1 bis 11 schematisch dargestellten Ausführungsbeispielen erläutert werden. Es zeigen

  • Figuren 1 bis 5 Lösungen, bei denen ein Gaseintrittsventil Bestandteil des Zylinderkopfes ist,
  • Figuren 6 bis 9 Lösungen, bei denen ein Gaseintrittsventil in der Kolbenwand angeordnet ist und
  • Figuren 10 und 11 weitere Ausführungsbeispiele.
Further advantages and details of the invention will be explained with reference to embodiments schematically illustrated in Figures 1 to 11. Show it
  • FIGS. 1 to 5 solutions in which a gas inlet valve is part of the cylinder head,
  • Figures 6 to 9 solutions in which a gas inlet valve is arranged in the piston wall and
  • Figures 10 and 11 further embodiments.

Alle Figuren zeigen jeweils einen Teilschnitt durch ein Kolben-Zylinder-System 1 einer Kolbenvakuumpumpe, die ein- oder mehrstufig (sei es, dass sie mehrere Kolben-Zylinder-Systeme aufweist oder dass beide Kolbenstirnseiten Pumpfunktionen haben, vgl. z.B. Figur 10 in DE-A-196 34 517) ausgebildet sein kann. In allen Figuren sind der Kolben mit 2, die Zylinderwand mit 3, der Zylinderkopf mit 4 und der Schöpfraum (Kompressionsraum) mit 5 bezeichnet. Bei allen Ausführungsbeispielen befindet sich das Austrittsventil 7 im Bereich der dargestellten Stirnseite des Zylinders. Es umfasst einen möglichst großen Ventilteller 8, der am Zylinderkopf 4 befestigt ist. Als Ventilsitz 9 dient der stirnseitige Rand der Zylinderwand 3 (oder ein Abschnitt davon). Im Zylinderkopf 4 befindet sich jeweils eine Gasaustrittskammer 11, an die ein nicht dargestellter Gasauslass angeschlossen ist. Das erfindungsgemäße Gaseintrittsventil ist jeweils mit 12 bezeichnet.All figures show a partial section through a Piston-cylinder system 1 of a piston vacuum pump, the single or multi-stage (be it that they have multiple piston-cylinder systems or that both piston faces Have pumping functions, cf. e.g. FIG. 10 in DE-A-196 34 517) may be formed. In all figures are the piston with 2, the cylinder wall with 3, the cylinder head with 4 and the scoop space (compression space) denoted by 5. Located in all embodiments the outlet valve 7 in the area of the illustrated Front side of the cylinder. It includes one the largest possible valve plate 8, the cylinder head on the 4th is attached. As a valve seat 9 is the frontal Edge of the cylinder wall 3 (or a portion thereof). in the Cylinder head 4 is in each case a gas outlet chamber 11, to which an unillustrated gas outlet connected. The gas inlet valve according to the invention is denoted by 12 respectively.

Bei den Ausführungsbeispielen nach den Figuren 1 bis 5 ist das Eintrittsventil 12 - wie auch das Austrittsventil 7 - im Bereich der dargestellten Stirnseite des Zylinders angeordnet. Im Zylinderkopf 4 befindet sich außer der Gasaustrittskammer 11 eine Gaseintrittskammer oder -leitung 14. Das Gaseintrittsventil 12 befindet sich zwischen der Gaseintrittskammer 14 und dem Schöpfraum 5. Es ist druckgesteuert und öffnet, sobald während des Saughubs des Kolbens ein ausreichend niedriger Druck im Schöpfraum 5 entsteht.In the embodiments of Figures 1 to 5 is the inlet valve 12 - as well as the outlet valve 7 - in the area of the illustrated end face of the cylinder arranged. In the cylinder head 4 is out of the box the gas outlet chamber 11, a gas inlet chamber or pipe 14. The gas inlet valve 12 is located between the gas inlet chamber 14 and the suction chamber 5. It is pressure controlled and opens as soon as during the suction stroke of the piston is sufficiently lower Pressure in the pump chamber 5 is created.

Beim Ausführungsbeispiel nach den Figuren 1a und 1b sind Eintrittsventil 12 und Austrittsventil 7 nebeneinander angeordnet. Der Ventilteller 8 des Austrittsventils 7 ist mit Hilfe der Schraube 15 am Zylinderkopf 4 befestigt. Er wird über den Stößel 16 am Kolben 2 betätigt. Das Verschlussstück des Eintrittsventils 12 ist eine Federzunge 18, die Bestandteil eines zwischen Zylinder und Zylinderkopf 4 befestigten Ventilblechs 19 ist. Bei geschlossenem Eintrittsventil 12 liegt die Federzunge 18 der Mündung 20 der Eintrittskammer bzw. -leitung 14 auf.In the embodiment of Figures 1a and 1b are inlet valve 12 and outlet valve 7 side by side arranged. The valve plate 8 of the outlet valve 7 is by means of the screw 15 on the cylinder head. 4 attached. It is actuated via the plunger 16 on the piston 2. The closure piece of the inlet valve 12 is a spring tongue 18, which is part of an intermediate cylinder and cylinder head 4 attached valve plate 19th is. When the inlet valve 12 is closed, the spring tongue is located 18 of the mouth 20 of the inlet chamber or line 14.

Die Figuren 2a bis 2c zeigen ein etwa zentral am Zylinderkopf 4 befestigtes Eintrittsventil 12, dessen Verschlussstück 21 eine rotationssymmetrisch gestaltete Ventilzunge 22 umfasst, die über kreisringförmige Federabschnitte 23 mit einem Rand 24 verbunden ist (Figur 2b). Der Befestigung des als Ventilblech ausgebildeten Verschlussstückes 21 am Zylinderkopf 4 dienen eine Hülse 25 mit Kragen 26 sowie eine Befestigungsmutter 27, die in eine Gewindebohrung 28 im Zylinderkopf 4 einschraubbar ist. Figures 2a to 2c show an approximately centrally on the cylinder head 4 fixed inlet valve 12, the closure piece 21 a rotationally symmetrical designed Valve tongue 22 includes, via annular spring sections 23 is connected to an edge 24 (FIG 2 B). The attachment of trained as a valve plate Locking piece 21 on the cylinder head 4 serve a sleeve 25 with collar 26 and a fastening nut 27, which can be screwed into a threaded bore 28 in the cylinder head 4 is.

Bei geschlossenem Ventil 12 liegt die Federzunge 22 der Mündung 20 der Gaseintrittskammer 14 in den Schöpfraum 5 auf. Entweder die Hülse 26 selbst (z.B. aus Viton) oder ein Elastomerring 29 bilden den Ventilsitz. Der Rand 24 des Verschlussstückes 21 ist eingespannt zwischen der Befestigungsmutter 27 und einem Elastomerring 31. Die Befestigungsmutter 27 hat einen hohlen Schaft, der mit Aussparungen 32 für den Durchtritt der Federabschnitte 23 ausgerüstet ist. Es besteht die Möglichkeit, die Federzunge 22 vorzuspannen, wenn die Einspannebene für den Rand des Verschlussstückes gegenüber der Ebene der Federzunge 22 und einen Betrag a zurückgesetzt ist. Der Ventilteller 8 des Gasaustrittsventils 7 umgibt das Einlassventil 12 und kann druckgesteuert oder - über die Stößel 16 - kolbengesteuert sein.When the valve 12 is closed, the spring tongue 22 is the Mouth 20 of the gas inlet chamber 14 in the pump chamber 5 on. Either the sleeve 26 itself (e.g., Viton) or an elastomeric ring 29 form the valve seat. Of the Edge 24 of the closure piece 21 is clamped between the fastening nut 27 and an elastomeric ring 31. The fastening nut 27 has a hollow shaft, the with recesses 32 for the passage of the spring sections 23 is equipped. There is a possibility to bias the spring tongue 22 when the clamping plane for the edge of the closure piece opposite the level of the spring tongue 22 and an amount reset a is. The valve plate 8 of the gas outlet valve 7 surrounds the inlet valve 12 and can be pressure-controlled or - via the plunger 16 - be piston-controlled.

Bei den Ausführungsbeispielen nach den Figuren 3 und 4 ist das Verschlussstück 8 des Gasaustrittsventiles 7 mit Hilfe eines elastischen Balges 35 (Metall oder Elastomerwerkstoff) am Zylinderkopf 4 befestigt. Das Innere des Balges 35 bildet die Gaseintrittskammer 14. Der Gaseintritt in den Schöpfraum 5 erfolgt über eine Bohrung 36 im Ventilteller 8.In the embodiments of Figures 3 and 4 is the closure piece 8 of the gas outlet valve. 7 by means of an elastic bellows 35 (metal or elastomeric material) attached to the cylinder head 4. The inner of the bellows 35 forms the gas inlet chamber 14. The Gas entry into the pump chamber 5 via a hole 36 in the valve plate 8.

Bei der Lösung nach Figur 3 ist der Teller 8 des Gasaustrittsventiles 7, mit einer Elastomermembran 37 ausgerüstet bzw. beschichtet. Im Bereich der Bohrung 36 ist die Membran 37 mit gegenüber der Bohrung 36 versetzt angeordneten Öffnungen 39 ausgerüstet, die bei ausreichendem Unterdruck im Schöpfraum 5 den Durchtritt der Gase ermöglichen (in Figur 3, linke Hälfte, dargestellt). Beim Ausführungsbeispiel nach Figur 4 ist der Bohrung 36 eine Federzunge 40 - ähnlich wie bei der Lösung nach Figur 1 - zugeordnet, die mittels der Schraube 41 am Ventilteller 8 befestigt ist.In the solution of Figure 3, the plate 8 of the gas outlet valve 7, equipped with an elastomeric membrane 37 or coated. In the area of the bore 36 the diaphragm 37 is offset with respect to the bore 36 arranged openings 39 equipped at sufficient negative pressure in the pump chamber 5 the passage allow the gases (in Figure 3, left half, shown). In the embodiment of Figure 4 is the Bore 36 a spring tongue 40 - similar to the solution according to Figure 1 - assigned by means of the screw 41 is attached to the valve plate 8.

Die Lösung nach Figur 5 zeigt einen in ein Gewinde am Zylinderkopf 4 dicht (Elastomerring 42) eingeschraubten Ventilsitz 43 mit Druchtrittsbohrungen 44. Den auf einem Kreis angeordneten Durchtrittsbohrungen 44 ist ein ringförmiges Verschlussstück 45 zugeordnet, das unter der Wirkung einer Druckfeder 46 steht. Die Feder 46 stützt sich auf einem Hubbegrenzer 47 ab und bestimmt die Vorspannung des Gaseintrittsventils 12.The solution of Figure 5 shows one in a thread on Cylinder head 4 tight (elastomer ring 42) screwed Valve seat 43 with Druchtrittsbohrungen 44. Den on a Circular arranged through holes 44 is a associated annular closure piece 45, the lower the action of a compression spring 46 is. The spring 46 is based on a stroke limiter 47 and determines the bias of the gas inlet valve 12th

Bei den Lösungen nach den Figuren 1 bis 5 wird zwar ein Teil der Querschnittsfläche der Zylinderbohrung für die Anordnung des Gaseintritts 12 verwendet; der überwiegende Teil steht jedoch für den großflächig ausgebildeten Gasaustritt 7 zur Verfügung. Die Position des Gaseintrittsventiles 12 ist von besonderem Vorteil, das es unmittelbar nach dem Beginn des Saughubes druckgesteuert seine Öffnungsbewegung einleiten kann.In the solutions according to Figures 1 to 5, although a Part of the cross-sectional area of the cylinder bore for the Arrangement of the gas inlet 12 used; the predominant Part, however, stands for the large-scale trained Gas outlet 7 available. The position of the gas inlet valve 12 is of particular advantage that it pressure controlled immediately after the beginning of the suction stroke can initiate its opening movement.

Bei den Ausführungen nach den Figuren 6 bis 9 erfolgt der Gaseintritt über eine seitlich in den Schöpfraum 5 mündende Öffnung 50 (Bohrung oder Schlitz). Das Eintrittsventil 12 befindet sich jeweils in einer Kammer 51 in der Zylinderwand 3. In die Kammer 51 mündet die Gaseintrittsleitung 14. Die Verschlussmechanismen der Lösungen nach den Figuren 6 bis 8 sind den Verschlussmechanismen nach den Figuren 1, 2 und 5 ähnlich (Federzungen 18, 21 bzw. federbelastetes ringförmiges Verschlussstück 45). Bei der Ausführung nach Figur 9 befindet sich in der Kammer 51 ein an sich bekanntes Rückschlagventil mit einer unter der Wirkung der Druckfeder 52 stehenden Kugel 53 als Verschlussstück, dem ein konisch ausgebildeter Sitz 54 zugeordnet ist.In the embodiments according to the figures 6 to 9 takes place the gas inlet via a side into the suction chamber. 5 opening 50 (bore or slot). The inlet valve 12 is each located in a chamber 51 in the cylinder wall 3. In the chamber 51 opens the Gas inlet duct 14. The locking mechanisms of the Solutions according to FIGS. 6 to 8 are the closure mechanisms similar to the figures 1, 2 and 5 (spring tongues 18, 21 or spring-loaded annular closure piece 45). In the embodiment of Figure 9 is located itself in the chamber 51 a known Check valve with a under the action of the compression spring 52 standing ball 53 as a closure piece, the a conically shaped seat 54 is assigned.

Die Bohrungen 50 bei den Lösungen nach den Figuren 6 bis 9 befinden sich jeweils in unmittelbarer Nähe der dem Austrittsventil 7 zugewandten Stirnseite der Zylinderwand 3, damit die Ventile 12 möglichst früh bei beginnendem Saughub druckgesteuert öffnen. In an sich bekannter Weise ist zweckmäßig ein weiterer, vom Kolben 2 gesteuerter Gaseintritt 55 vorhanden sein (Figur 8), der als umlaufende Nut 56 in der Zylinderwand 3 ausgebildet ist. In diese Nut 56 mündet ebenfalls die Gaseintrittsleitung 14.The holes 50 in the solutions according to the figures 6 to 9 are each in the immediate vicinity of the outlet valve 7 facing the end face of the cylinder wall 3, so that the valves 12 as early as possible at the beginning Open suction stroke pressure-controlled. In known per se Way is appropriate another, from the piston. 2 controlled gas inlet 55 may be present (FIG. 8), formed as a circumferential groove 56 in the cylinder wall 3 is. In this groove 56 also opens the gas inlet line 14th

Die Lösungen nach den Figuren 6 bis 9 haben den Vorteil, dass der Querschnitt des Austrittsventiles 7 durch die Anordnung eines Gaseintrittsventils 12 nicht beeinträchtigt ist und dass seitlich neben dem Zylinder ausreichend Platz für die Unterbringung des Gaseintrittsventils 12 vorhanden ist. Außerdem ist ein schadraumfreies Austritts-Ventil einfach zu realisieren. Wesentlich bei diesen Lösungen ist, dass sich der Gaseintritt 50 in unmittelbarer Nähe der Stirnseite der Zylinderbohrung befindet, damit das Gaseintrittsventil 12 in der Lage ist, bei beginnendem Saughub druckgesteuert zu öffnen.The solutions according to FIGS. 6 to 9 have the advantage that the cross section of the outlet valve. 7 not by the arrangement of a gas inlet valve 12 is impaired and that laterally next to the cylinder enough space to accommodate the gas inlet valve 12 is present. In addition, a damage free space is Easy to realize outlet valve. Essential with these solutions is that the gas enters 50 in the immediate vicinity of the end face of the cylinder bore located so that the gas inlet valve 12th is capable of pressure controlled at the beginning of the suction stroke to open.

Bei der Lösung nach Figur 10 ist der Kolben 2 stirnseitig mit einer Manschette 61 mit einer äußeren Lippe 62 ausgerüstet. Weiterhin ist der Kolben 2 mit einer sich axial erstreckenden Nut 63 versehen, die sich - wenn sich der Kolben 2 in seinem oberen Totpunkt befindet - von der Kolbenstirnseite bis zum Gaseintritt 55 (Ringnut 56 in der Zylinderwand 3) erstreckt. Bei beginnendem Saughub und ausreichendem Unterdruck im Schöpfraum 5 hebt die Lippe 62, die zusammen mit der Zylinderwand das Gaseintrittsventil 12 bildet, von der Zylinderwand ab, so dass die Verbindung zwischen Gaseintritt 55 und Schöpfraum 5 über die Nut 63 hergestellt ist. Die Funktion der Nut 63 kann auch ein Ringspalt zwischen Kolbenhemd und Zylinderwand erfüllen. Zweckmäßig hat der Einlass 55 die Form eines Bohrungskreises, damit die Manschette über den Einlass zum unteren Totpunkt bewegt werden kann.In the solution of Figure 10, the piston 2 is the front side with a collar 61 with an outer lip 62 equipped. Furthermore, the piston 2 with a axially extending groove 63 provided, which - if the piston 2 is in its top dead center - from the piston end face to the gas inlet 55 (annular groove 56 in the cylinder wall 3) extends. At the beginning Suction stroke and sufficient negative pressure in the Creation room 5 raises the lip 62, which together with the Cylinder wall, the gas inlet valve 12 forms, of the Cylinder wall off, allowing the connection between gas inlet 55 and 5 suction chamber 5 made via the groove 63 is. The function of the groove 63 may also be Meeting annular gap between piston skirt and cylinder wall. Suitably, the inlet 55 has the shape of a hole circle, so that the cuff over the inlet to bottom dead center can be moved.

Schließlich kann sich der Gaseintritt in der Stirnseite 66 des Kolbens 2 befinden. Bei dem in Figur 11 dargestellten Ausführungsbeispiel ist das Gaseintrittsventil 12 als Zungenventil (Figuren 1 und 6) ausgebildet. Die Federzunge 18 ist mit Hilfe der Schraube 65 am Kolben 2 befestigt und liegt im geschlossenen Zustand der Mündung 20 des Gaseintrittskanals 14 auf. Andere Ventilformen sind ebenfalls möglich (z.B. Kugelventil). Diese Lösung setzt voraus, dass die Stufe durch das Kurbelgehäuse ansaugen darf. Dazu muss das Kurbelgehäuse gedichtet sein und die angesaugten Gase dürfen die Bauteile im Kurbelgehäuse nicht schädigen. Vorteilhaft ist an dieser Konstruktion, dass sie sehr einfach und preiswert ist.Finally, the gas can enter the front 66 of the piston 2 are located. In the illustrated in Figure 11 Embodiment is the gas inlet valve 12 designed as a tongue valve (Figures 1 and 6). The Spring tongue 18 is by means of the screw 65 on the piston. 2 attached and is in the closed state of the mouth 20 of the gas inlet channel 14. Other valve forms are also possible (e.g., ball valve). These Solution requires that the step through the crankcase may suck. For this, the crankcase must be sealed be and the gases sucked in the components Do not damage in the crankcase. Is advantageous at this construction, that they are very simple and is inexpensive.

In einigen der Figuren ist dargestellt, dass die Bauteile der beschriebenen Lösungen beschichtet sein können (Ventilteller 8 in Figur 3, Kolbenstirnseite in den Figuren 4 und 10, Kolbenhemd in Figur 5, Zylinderwand in Figur 6). Auch die Verschlusselemente und/oder Sitze der Eintrittsventile 12 können mit einer Schicht ausgerüstet sein. Je nach dem, welche Funktion die Beschichtung haben soll (Abdichtung, Dämpfung, Verschleißschutz) sind die Werkstoffe gewählt (z.B. Elastomer bzw. Polytetrafluoräthylen). Die Betätigung des Austrittsventiles 7 kann druck- oder kolbengesteuert sein.In some of the figures it is shown that the components the solutions described may be coated (Valve disc 8 in Figure 3, piston face in the Figures 4 and 10, piston skirt in Figure 5, cylinder wall in FIG. 6). Also the closure elements and / or seats the inlet valves 12 can be equipped with a layer be. Depending on what function the coating should have (sealing, damping, wear protection) the materials are chosen (e.g., elastomer or polytetrafluoroethylene). The actuation of the outlet valve 7 may be pressure or piston controlled.

Wie im Zusammenhang mit den Ausführungsbeispielen beschrieben, kommen für die druckgesteuerten Eintrittsventile verschiedene Bauformen in Frage:

  • a) Zungenventile mit metallischer Dichtung und solche mit Elastomerdichtung.
  • b) Federbelastete Ventilteller ggf. mit zentraler Führung.
  • c) Ventile aus Federstahlblech, die Ventilteller und Federzungen einteilig kombinieren.
  • d) Federbelastete Kugelventile.
  • e) Elastomermembranen, die über einen Ventilkörper gespannt sind.
  • f) Manschetten am Kolbenkopf, die unter Druckbeaufschlagung in Richtung des Arbeitsraumes undicht werden und so einen Druckausgleich ermöglichen. Diese Ventilform ist für die Ansaugung durch das Kurbelgehäuse oder für die Ansaugung über das Kolbenhemd geeignet.
    • As described in connection with the exemplary embodiments, different designs are suitable for the pressure-controlled inlet valves:
  • a) Tongue valves with metallic gasket and those with elastomeric gasket.
  • b) Spring-loaded valve plate, if necessary with central guide.
  • c) Valves made of spring steel sheet, which combine the valve plate and spring tongues in one piece.
  • d) Spring-loaded ball valves.
  • e) elastomeric membranes stretched over a valve body.
  • f) Cuffs on the piston head, which are leaking under pressure in the direction of the working space and thus allow pressure equalization. This valve form is suitable for intake through the crankcase or for intake via the piston skirt.

    • Durch die erfindungsgemäßen Vorschläge wird erreicht, dass die damit ausgerüstete Kolbenvakuumpumpe die folgenden vorteilhaften Eigenschaften hat:

    • preiswert,
    • robust, betriebssicher, unempfindlich gegenüber Verschmutzung,
    • hohe Dichtheit,
    • geringer Totraum,
    • geräuscharm,
    • geringer Eingriff in die Anschlusskonstruktion, platzsparend,
    • einfach zu fertigen und zu montieren,
    • ausreichende Querschnitte und Steuerzeiten.
    By means of the proposals according to the invention it is achieved that the piston vacuum pump equipped therewith has the following advantageous properties:
    • inexpensive,
    • robust, reliable, insensitive to pollution,
    • high tightness,
    • small dead space,
    • low noise,
    • little interference with the adjacent construction, saving space,
    • easy to manufacture and assemble,
    • sufficient cross sections and control times.

    Claims (6)

    1. A piston vacuum pump with a gas inlet (14), with a gas outlet (11), with at least one piston (2), with at least one cylinder (3), with a pumping chamber (5) formed of piston (2) and cylinder (3), with gas intake, with a gas intake valve (12), with gas discharge and a gas discharge valve (7) arranged at the end in the cross-sectional area of the cylinder bore, the gas intake valve (12) being pressure-controlled and arranged in such a way that it opens during the intake stroke, preferably in the first phase of the intake stroke, characterised in that a further, piston-controlled gas intake (55) is present and in that the pressure-controlled intake valve (12) takes the form of a tongue valve, spring-loaded valve, ball valve or the like.
    2. A pump according to claim 1, characterised in that the pressure-controlled gas intake valve (12) is arranged to the side of the pumping chamber (5) in the cylinder wall (3).
    3. A pump according to claim 2, characterised in that gas intake takes place via an opening (50) (drill hole or slit) opening at the side into the pumping chamber (5).
    4. A pump according to claim 2 or claim 3, characterised in that the pressure-controlled gas intake valve (12) is located inside a chamber (51) formed in the cylinder wall (3), which chamber (51) is connected to the gas intake line (14).
    5. A pump according to claim 1, characterised in that the pressure-controlled gas intake valve (12) is located in the piston end wall (66).
    6. A pump according to any one of claims 1 to 6, characterised in that one or more of its components are coated, specifically with a layer serving in sealing, noise- and vibration-damping or wear protection.
    EP00909301A 1999-04-15 2000-03-03 Piston vacuum pump with a gas inlet and a gas outlet Expired - Lifetime EP1169572B1 (en)

    Applications Claiming Priority (3)

    Application Number Priority Date Filing Date Title
    DE19917009A DE19917009A1 (en) 1999-04-15 1999-04-15 Vacuum piston pump has gas inlet valve which is pressure controlled and installed so that it opens during suction stroke, and preferably during first phase of it
    DE19917009 1999-04-15
    PCT/EP2000/001845 WO2000063557A1 (en) 1999-04-15 2000-03-03 Piston vacuum pump with a gas inlet and a gas outlet

    Publications (2)

    Publication Number Publication Date
    EP1169572A1 EP1169572A1 (en) 2002-01-09
    EP1169572B1 true EP1169572B1 (en) 2005-08-17

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    Family Applications (1)

    Application Number Title Priority Date Filing Date
    EP00909301A Expired - Lifetime EP1169572B1 (en) 1999-04-15 2000-03-03 Piston vacuum pump with a gas inlet and a gas outlet

    Country Status (5)

    Country Link
    EP (1) EP1169572B1 (en)
    AU (1) AU3163600A (en)
    DE (2) DE19917009A1 (en)
    TW (1) TW571025B (en)
    WO (1) WO2000063557A1 (en)

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    Also Published As

    Publication number Publication date
    DE50010975D1 (en) 2005-09-22
    AU3163600A (en) 2000-11-02
    EP1169572A1 (en) 2002-01-09
    DE19917009A1 (en) 2000-10-19
    WO2000063557A1 (en) 2000-10-26
    TW571025B (en) 2004-01-11

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