EP1169572A1 - Piston vacuum pump with a gas inlet and a gas outlet - Google Patents

Piston vacuum pump with a gas inlet and a gas outlet

Info

Publication number
EP1169572A1
EP1169572A1 EP00909301A EP00909301A EP1169572A1 EP 1169572 A1 EP1169572 A1 EP 1169572A1 EP 00909301 A EP00909301 A EP 00909301A EP 00909301 A EP00909301 A EP 00909301A EP 1169572 A1 EP1169572 A1 EP 1169572A1
Authority
EP
European Patent Office
Prior art keywords
gas inlet
valve
pump according
piston
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00909301A
Other languages
German (de)
French (fr)
Other versions
EP1169572B1 (en
Inventor
Thomas Dreifert
Lutz Arndt
Jürgen Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1169572A1 publication Critical patent/EP1169572A1/en
Application granted granted Critical
Publication of EP1169572B1 publication Critical patent/EP1169572B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F04B39/1053—Adaptations or arrangements of distribution members the members being Hoerbigen valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/0005—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 adaptations of pistons
    • F04B39/0016—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 adaptations of pistons with valve arranged in the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F04B39/102—Adaptations or arrangements of distribution members the members being disc valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F04B39/1046—Combination of in- and outlet valve

Definitions

  • Piston battery pump with gas inlet and gas outlet
  • the invention relates to a piston vacuum pump according to the preamble of patent claim 1.
  • Single-stage and multi-stage piston vacuum pumps of this type are known from EU-A-85 687. Compared to comparable rotary piston vacuum pumps, they have proven to be inexpensive and wear-resistant and are therefore successful on the market.
  • each of the cylinder / piston systems is equipped with a valve-controlled gas inlet and with a valve-controlled gas outlet.
  • a piston-controlled gas inlet valve the gas inlet line opens into an annular groove in the cylinder wall, which is closed or released by the piston itself
  • a pressure-controlled or piston-controlled gas outlet valve which are known about the entire valve face extending cylinder end.
  • the present invention is based on the object of improving a piston vacuum pump of the type concerned here with regard to the gas entry.
  • the gas inlet should be designed in such a way that no or only negligible negative pressures occur in the pumping chamber during the suction stroke of the piston.
  • the realization of the advantages of the pump known from DE-A-196 34 517 - large-area inlet slots for gas exchange at low intake pressures and large-area and low-exhaust valves - should not be impaired. According to the invention, these objects are achieved by the characterizing features of the claims.
  • a pressure-controlled inlet valve is provided in the piston vacuum pump according to the invention, which opens during the suction stroke, preferably in the first phase of the suction stroke.
  • the pressure-controlled gas inlet valve can be the only inlet valve. However, if large inlet openings are to be provided at low intake pressures in order to achieve as complete a filling of the scooping space as possible before the start of the pressure stroke, it is expedient if the gas inlet according to the invention is present in addition to a second gas inlet, e.g. a gas inlet with a piston-controlled gas inlet valve, as is known from DE-A-196 34 517.
  • FIGS. 1 to 11 Show it Figures 1 to 5 solutions in which a gas inlet valve is part of the cylinder head,
  • Figures 10 and 11 further exemplary embodiments.
  • All figures each show a partial section through a piston-cylinder system 1 of a piston vacuum pump which has one or more stages (be it that it has several piston-cylinder systems or that both piston ends have pump functions, cf., for example, FIG. 10 in DE- A-196 34 517) can be formed.
  • the piston is labeled 2, the cylinder wall 3, the cylinder head 4 and the scooping chamber (compression chamber) 5.
  • the outlet valve 7 is located in the region of the end face of the cylinder shown. It comprises the largest possible valve plate 8, which is attached to the cylinder head 4.
  • the front edge of the cylinder wall 3 (or a section thereof) serves as the valve seat 9.
  • the gas outlet chamber 11 to which a gas outlet (not shown) is connected.
  • the gas inlet valve according to the invention is designated 12 in each case.
  • the inlet valve 12 - like the outlet valve 7 - is in the region of the end face of the cylinder shown. linders arranged. In the cylinder head 4, in addition to the gas outlet chamber 11, there is a gas inlet chamber or line 14. The gas inlet valve 12 is located between the gas inlet chamber 14 and the scooping chamber 5. It is pressure-controlled and opens as soon as a sufficiently low pressure is created in the scooping chamber 5 during the suction stroke of the piston .
  • inlet valve 12 and outlet valve 7 are arranged side by side.
  • the valve plate 8 of the outlet valve 7 is fastened to the cylinder head 4 by means of the screw 15. It is actuated by the plunger 16 on the piston 2.
  • the closure piece of the inlet valve 12 is a spring tongue 18, which is part of a valve plate 19 fastened between the cylinder and cylinder head 4. When the inlet valve 12 is closed, the spring tongue 18 of the mouth 20 of the inlet chamber or line 14 rests.
  • FIGS. 2a to 2c show an inlet valve 12 fastened approximately centrally on the cylinder head 4, the closure piece 21 of which comprises a rotationally symmetrical valve tongue 22 which is connected to an edge 24 via annular spring sections 23 (FIG. 2b).
  • the spring tongue 22 of the mouth 20 of the gas inlet chamber 14 lies in the scooping chamber 5.
  • Either the sleeve 26 itself (eg from Viton) or an elastomer ring 29 form the valve seat.
  • the edge 24 of the closure piece 21 is clamped between the fastening nut 27 and an elastomer ring 31.
  • the fastening nut 27 has a hollow shaft which is equipped with cutouts 32 for the passage of the spring sections 23.
  • the valve plate 8 of the gas outlet valve 7 surrounds the inlet valve 12 and can be pressure-controlled or - via the tappet 16 - piston-controlled.
  • the closure piece 8 of the gas outlet valve 7 is fastened to the cylinder head 4 with the aid of an elastic bellows 35 (metal or elastomer material).
  • the interior of the bellows 35 forms the gas inlet chamber 14.
  • the gas enters the scoop chamber 5 via a bore 36 in the valve plate 8.
  • the plate 8 of the gas outlet valve 7 is equipped or coated with an elastomer membrane 37.
  • the membrane 37 is equipped with openings 39 which are arranged offset with respect to the bore 36 and which, with sufficient negative pressure in the scoop chamber 5, allow the gases to pass through (shown in FIG. 3, left half).
  • a spring tongue 40 - similar to the solution according to Figure 1 - assigned, which is fastened to the valve plate 8 by means of the screw 41.
  • FIG. 5 shows a valve seat 43 screwed tightly into a thread on the cylinder head 4 (elastomer ring 42) with passage bores 44.
  • the passage bores 44 arranged on a circle are assigned an annular closure piece 45 which is under the action of a compression spring 46.
  • the spring 46 is supported on a stroke limiter 47 and determines the pretension of the gas inlet valve 12.
  • part of the cross-sectional area of the cylinder bore is used for the arrangement of the gas inlet 12; the majority, however, is available for the large-area gas outlet 7.
  • the position of the gas inlet valve 12 is particularly advantageous since it can initiate its opening movement under pressure control immediately after the start of the suction stroke.
  • the gas entry takes place via an opening 50 (bore or slot) opening laterally into the scooping chamber 5.
  • the inlet valve 12 is located in a chamber 51 in the cylinder wall 3.
  • the gas inlet line 14 opens into the chamber 51.
  • the locking mechanisms of the solutions according to FIGS. 6 to 8 are similar to the locking mechanisms according to FIGS. 1, 2 and 5 (spring tongues 18, 21 or spring-loaded annular closure piece 45).
  • a per se known non-return valve with a under the action of the compression spring 52 ⁇ stationary ball 53 as a closure piece, which is associated with a conically shaped seat 54.
  • the bores 50 in the solutions according to FIGS. 6 to 9 are each located in the immediate vicinity of the end face of the cylinder wall 3 facing the outlet valve 7, so that the valves 12 open under pressure control as early as possible when the suction stroke begins.
  • a further gas inlet 55 controlled by the piston 2 (FIG. 8) which is designed as a circumferential groove 56 in the cylinder wall 3.
  • the gas inlet line 14 also opens into this groove 56.
  • the solutions according to FIGS. 6 to 9 have the advantage that the cross section of the outlet valve 7 is not impaired by the arrangement of a gas inlet valve 12 and that there is sufficient space on the side next to the cylinder for accommodating the gas inlet valve 12.
  • an exhaust valve that is free of damage is easy to implement. It is essential in these solutions that the gas inlet 50 is located in the immediate vicinity of the end face of the cylinder bore, so that the gas inlet valve 12 is able to open under pressure control when the suction stroke begins.
  • the piston 2 is equipped on the end face with a sleeve 61 with an outer lip 62. Furthermore, the piston 2 with one axially extending groove 63, which - when the piston 2 is at its top dead center - extends from the piston end to the gas inlet 55 (ring ⁇ groove 56 in the cylinder wall 3).
  • the lip 62 which forms the gas inlet valve 12 together with the cylinder wall, lifts off the cylinder wall, so that the connection between the gas inlet 55 and the scoop chamber 5 is established via the groove 63.
  • the function of the groove 63 can also fulfill an annular gap between the piston skirt and the cylinder wall.
  • the inlet 55 expediently has the form of a circle of holes so that the sleeve can be moved to the bottom dead center via the inlet.
  • the gas inlet can be located in the end face 66 of the piston 2.
  • the gas inlet valve 12 is designed as a tongue valve ( Figures 1 and 6).
  • the spring tongue 18 is fastened to the piston 2 by means of the screw 65 and lies in the closed state of the mouth 20 of the gas inlet channel 14.
  • Other valve shapes are also possible (e.g. ball valve).
  • NEN valve plate 8 in Figure 3, piston face in Figures 4 and 10, piston shirt in Figure 5, cylinder wall in Figure 6
  • the closure elements and / or seats of the inlet valves 12 can also be equipped with a layer.
  • the materials are selected (e.g. elastomer or polytetrafluoroethylene).
  • the actuation of the outlet valve 7 can be pressure- or piston-controlled.
  • Valves made of spring steel sheet, which combine the valve plate and spring tongues in one piece.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The invention relates to piston vacuum pump with a gas inlet, a gas outlet, at least one piston (2), at least one cylinder (3), a pump chamber (5) that is defined by said piston (2) and said cylinder (3), with a gas inlet, a gas inlet valve (12) and a gas outlet and a gas outlet valve (7) that is located on the face of the cross-sectional surface of the cylinder bore. The aim of the invention is to improve the gas inlet of such a pump. To this end, the gas inlet valve (12) is pressure-controlled and located in such a manner that it is opened during the intake stroke, preferably during the first phase of the intake stroke.

Description

Kolben akuumpumpe mit Gaseinlass und GasauslassPiston battery pump with gas inlet and gas outlet
Die Erfindung betrifft eine Kolbenvakuumpumpe nach dem Oberbegriff des Patentanspruchs 1.The invention relates to a piston vacuum pump according to the preamble of patent claim 1.
Ein- und mehrstufige Kolbenvakuumpumpen dieser Art sind aus der EU-A-85 687 bekannt. Sie haben sich gegenüber vergleichbaren Rotationskolbenvakuumpumpen als kostengünstig und verschleififest erwiesen und sind deshalb auf dem Markt erfolgreich.Single-stage and multi-stage piston vacuum pumps of this type are known from EU-A-85 687. Compared to comparable rotary piston vacuum pumps, they have proven to be inexpensive and wear-resistant and are therefore successful on the market.
Bei Kolbenvakuumpumpen ist jedes der Zylinder-/Kolben- Systeme mit einem ventilgesteuerten Gaseintritt und mit einem ventilgesteuerten Gasaustritt ausgerüstet. So sind z.B. aus der DE-A-196 34 517 ein kolbengesteuertes Gaseintrittsventil (die Gaseinlassleitung mündet in einer Ringnut in der Zylinderwand, die vom Kolben selbst verschlossen bzw. freigegeben wird) sowie ein druck- oder kolbengesteuertes Gasaustrittsventil bekannt, das einen sich über die gesamte Zylinderstirnseite erstrek- kenden Ventilteller aufweist. Bei angehobenem Ventilteller gelangt das komprimierte Gas in eine im Zylinderkopf befindliche Kammer, an die die Gasauslassleitung angeschlossen ist. Das Austrittsventil schließt, wenn der Kolben nach dem Erreichen seines Totpunktes seine den Schöpfraum vergrößernde Bewegungsphase (Saughub) beginnt. Zu diesem Zeitpunkt ist der Schöpfraum noch nicht mit dem Gaseintritt verbunden, so dass der Druck im Schöpfraum abnimmt. Gerade weil Kolbenvakuumpumpen u.a. den Vorteil haben, dass sie totraumfrei gebaut und betrieben werden können, entstehen während der beschriebenen Bewegungsphase des Kolbens sehr niedrige Drücke, die die Kolbenbewegung erschweren und den Kolbenantrieb belasten. Um den Antrieb zu entlasten, ist es aus der DE-A-196 34 517 bekannt, den Schöpfraum über eine Leitung mit einem Rückschlagventil mit der Gasaustrittskammer zu verbinden. Bei abnehmendem Druck im Schöpfräum öffnet das Rückschlagventil und verhindert das Entstehen sehr niedriger Drücke. Nachteilig an der vorbekannten Lösung ist, dass bereits geförderte Gase wieder in den Schöpfraum gelangen und nochmals oder gar mehrfach gefördert werden müssen.In the case of piston vacuum pumps, each of the cylinder / piston systems is equipped with a valve-controlled gas inlet and with a valve-controlled gas outlet. For example, from DE-A-196 34 517 a piston-controlled gas inlet valve (the gas inlet line opens into an annular groove in the cylinder wall, which is closed or released by the piston itself) and a pressure-controlled or piston-controlled gas outlet valve, which are known about the entire valve face extending cylinder end. When the valve disc is raised, the compressed gas enters a chamber in the cylinder head to which the gas outlet line is connected. The outlet valve closes when the piston begins its movement phase (suction stroke) that increases the volume after reaching its dead center. At this time, the scoop is not yet connected to the gas inlet, so that the pressure in the scoop decreases. Precisely because piston vacuum pumps have the advantage, among other things, that they can be built and operated without dead space, very low pressures arise during the described movement phase of the piston, which make the piston movement more difficult and strain the piston drive. To relieve the drive, it is known from DE-A-196 34 517 to connect the scooping chamber to the gas outlet chamber via a line with a check valve. When the pressure in the pump chamber decreases, the check valve opens and prevents very low pressures from developing. A disadvantage of the previously known solution is that gases which have already been conveyed get back into the scooping chamber and have to be conveyed again or even several times.
Der vorliegenden Erfindung liegt zunächst die Aufgabe zugrunde, eine Kolbenvakuumpumpe der hier betroffenen Art in Bezug auf den Gaseintritt zu verbessern. Weiterhin soll der Gaseintritt so gestaltet sein, dass während des Saughubes des Kolbens keine oder lediglich vernachlässigbare Unterdrücke im Schöpfräum entstehen. Schließlich soll die Verwirklichung der Vorteile der aus der DE-A-196 34 517 bekannten Pumpe - großflächige Einlassschlitze für den Gaswechsel bei niedrigen Ansaugdrücken sowie großflächige und schadraumarme Auslassventile - nicht beeinträchtigt sein. Erfindungsgemäß werden diese Aufgaben durch die kenn¬ zeichnenden Merkmale der Patentansprüche gelöst.The present invention is based on the object of improving a piston vacuum pump of the type concerned here with regard to the gas entry. Furthermore, the gas inlet should be designed in such a way that no or only negligible negative pressures occur in the pumping chamber during the suction stroke of the piston. Finally, the realization of the advantages of the pump known from DE-A-196 34 517 - large-area inlet slots for gas exchange at low intake pressures and large-area and low-exhaust valves - should not be impaired. According to the invention, these objects are achieved by the characterizing features of the claims.
Anders als beim erwähnten Stand der Technik ist bei der erfindungsgemäßen Kolbenvakuumpumpe ein druckgesteuertes Eintrittsventil vorgesehen, das während des Saughubes, vorzugsweise in der ersten Phase des Saughubes, öffnet. Neben einer einfachen und kostengünstigen Konstruktion hat diese Lösung den Vorteil, dass den Antrieb belastende Unterdrücke nicht entstehen. Auch der Nachteil, das Gasanteile mehrfach gefördert werden müssen, besteht nicht mehr.In contrast to the prior art mentioned, a pressure-controlled inlet valve is provided in the piston vacuum pump according to the invention, which opens during the suction stroke, preferably in the first phase of the suction stroke. In addition to a simple and inexpensive construction, this solution has the advantage that the drive is not subjected to negative pressures. There is also no longer the disadvantage that gas components have to be pumped several times.
Das druckgesteuerte Gaseintrittsventil kann als einziges Eintrittsventil vorhanden sein. Wenn jedoch bei niedrigen Ansaugdrücken großflächige Einlassöffnungen vorhanden sein sollen, um eine möglichst vollständige Füllung des Schöpfraumes vor dem 3eginn des Druckhubes zu erreichen, ist es zweckmäßig, wenn der erfindungsgemäße Gaseintritt zusätzlich zu einem zweiten Gaseintritt vorhanden ist, z.B. ein Gaseintritt mit einem kolbengesteuerten Gaseintrittsventil, wie es aus der DE-A-196 34 517 bekannt ist.The pressure-controlled gas inlet valve can be the only inlet valve. However, if large inlet openings are to be provided at low intake pressures in order to achieve as complete a filling of the scooping space as possible before the start of the pressure stroke, it is expedient if the gas inlet according to the invention is present in addition to a second gas inlet, e.g. a gas inlet with a piston-controlled gas inlet valve, as is known from DE-A-196 34 517.
Weitere Vorteile und Einzelheiten der Erfindung sollen an Hand von in den Figuren 1 bis 11 schematisch dargestellten Ausführungsbeispielen erläutert werden. Es zeigen Figuren 1 bis 5 Lösungen, bei denen ein Gaseintrittsventil Bestandteil des Zylinderkopfes ist,Further advantages and details of the invention will be explained with reference to exemplary embodiments schematically shown in FIGS. 1 to 11. Show it Figures 1 to 5 solutions in which a gas inlet valve is part of the cylinder head,
Figuren 6 bis 9 Lösungen, bei denen ein Gaseintrittsventil in der Kolbenwand angeordnet ist undFigures 6 to 9 solutions in which a gas inlet valve is arranged in the piston wall and
Figuren 10 und 11 weitere Ausfαhrungsbeispiele .Figures 10 and 11 further exemplary embodiments.
Alle Figuren zeigen jeweils einen Teilschnitt durch ein Kolben-Zylinder-System 1 einer Kolbenvakuumpumpe, die ein- oder mehrstufig (sei es, dass sie mehrere Kolben- Zylinder-Systeme aufweist oder dass beide Kolbenstirnseiten Pumpfunktionen haben, vgl. z.B. Figur 10 in DE- A-196 34 517) ausgebildet sein kann. In allen Figuren sind der Kolben mit 2, die Zylinderwand mit 3, der Zylinderkopf mit 4 und der Schöpfraum (Kompressionsraum) mit 5 bezeichnet. Bei allen Ausführungsbeispielen befindet sich das Austrittsventil 7 im Bereich der dargestellten Stirnseite des Zylinders. Es umfasst einen möglichst großen Ventilteller 8, der am Zylinderkopf 4 befestigt ist. Als Ventilsitz 9 dient der stirnseitige Rand der Zylinderwand 3 (oder ein Abschnitt davon) . Im Zylinderkopf 4 befindet sich jeweils eine Gasaustrittskammer 11, an die ein nicht dargestellter Gasauslass angeschlossen ist. Das erfindungsgemäße Gaseintrittsventil ist jeweils mit 12 bezeichnet.All figures each show a partial section through a piston-cylinder system 1 of a piston vacuum pump which has one or more stages (be it that it has several piston-cylinder systems or that both piston ends have pump functions, cf., for example, FIG. 10 in DE- A-196 34 517) can be formed. In all figures, the piston is labeled 2, the cylinder wall 3, the cylinder head 4 and the scooping chamber (compression chamber) 5. In all exemplary embodiments, the outlet valve 7 is located in the region of the end face of the cylinder shown. It comprises the largest possible valve plate 8, which is attached to the cylinder head 4. The front edge of the cylinder wall 3 (or a section thereof) serves as the valve seat 9. In the cylinder head 4 there is a gas outlet chamber 11 to which a gas outlet (not shown) is connected. The gas inlet valve according to the invention is designated 12 in each case.
Bei den Ausführungsbeispielen nach den Figuren 1 bis 5 ist das Eintrittsventil 12 - wie auch das Austrittsventil 7 - im Bereich der dargestellten Stirnseite des Zy- linders angeordnet. Im Zylinderkopf 4 befindet sich außer der Gasaustrittskammer 11 eine Gaseintrittskammer oder -leitung 14. Das Gaseintrittsventil 12 befindet sich zwischen der Gaseintrittskammer 14 und dem Schöpfraum 5. Es ist druckgesteuert und öffnet, sobald während des Saughubs des Kolbens ein ausreichend niedriger Druck im Schöpfräum 5 entsteht.In the exemplary embodiments according to FIGS. 1 to 5, the inlet valve 12 - like the outlet valve 7 - is in the region of the end face of the cylinder shown. linders arranged. In the cylinder head 4, in addition to the gas outlet chamber 11, there is a gas inlet chamber or line 14. The gas inlet valve 12 is located between the gas inlet chamber 14 and the scooping chamber 5. It is pressure-controlled and opens as soon as a sufficiently low pressure is created in the scooping chamber 5 during the suction stroke of the piston .
Beim Ausführungsbeispiel nach den Figuren la und lb sind Eintrittsventil 12 und Austrittsventil 7 nebeneinander angeordnet. Der Ventilteller 8 des Austrittsventils 7 ist mit Hilfe der Schraube 15 am Zylinderkopf 4 befestigt. Er wird über den Stößel 16 am Kolben 2 betätigt. Das Verschlussstück des Eintrittsventils 12 ist eine Federzunge 18, die Bestandteil eines zwischen Zylinder und Zylinderkopf 4 befestigten Ventilblechs 19 ist. Bei geschlossenem Eintrittsventil 12 liegt die Federzunge 18 der Mündung 20 der Eintrittskammer bzw. -leitung 14 auf.In the embodiment of Figures la and lb inlet valve 12 and outlet valve 7 are arranged side by side. The valve plate 8 of the outlet valve 7 is fastened to the cylinder head 4 by means of the screw 15. It is actuated by the plunger 16 on the piston 2. The closure piece of the inlet valve 12 is a spring tongue 18, which is part of a valve plate 19 fastened between the cylinder and cylinder head 4. When the inlet valve 12 is closed, the spring tongue 18 of the mouth 20 of the inlet chamber or line 14 rests.
Die Figuren 2a bis 2c zeigen ein etwa zentral am Zylinderkopf 4 befestigtes Eintrittsventil 12, dessen Verschlussstück 21 eine rotationssymmetrisch gestaltete Ventilzunge 22 umfasst, die über kreisringförmige Federabschnitte 23 mit einem Rand 24 verbunden ist (Figur 2b) . Der Befestigung des als Ventilblech ausgebildeten Verschlussstückes 21 am Zylinderkopf 4 dienen eine Hülse 25 mit Kragen 26 sowie eine Befestigungsmutter 27, die in eine Gewindebohrung 28 im Zylinderkopf 4 einschraubbar ist. Bei geschlossenem Ventil 12 liegt die Federzunge 22 der Mündung 20 der Gaseintrittskammer 14 in den Schöpfraum 5 auf. Entweder die Hülse 26 selbst (z.B. aus Viton) oder ein Elastomerring 29 bilden den Ventilsitz. Der Rand 24 des Verschlussstückes 21 ist eingespannt zwischen der Befestigungsmutter 27 und einem Elastomerring 31. Die Befestigungsmutter 27 hat einen hohlen Schaft, der mit Aussparungen 32 für den Durchtritt der Federabschnitte 23 ausgerüstet ist. Es besteht die Möglichkeit, die Federzunge 22 vorzuspannen, wenn die Einspannebene für den Rand des Verschlussstückes gegenüber der Ebene der Federzunge 22 und einen Betrag a zurückgesetzt ist. Der Ventilteller 8 des Gasaustrittsventils 7 umgibt das Einlassventil 12 und kann druckgesteuert oder - über die Stößel 16 - kolbengesteuert sein.FIGS. 2a to 2c show an inlet valve 12 fastened approximately centrally on the cylinder head 4, the closure piece 21 of which comprises a rotationally symmetrical valve tongue 22 which is connected to an edge 24 via annular spring sections 23 (FIG. 2b). A sleeve 25 with a collar 26 and a fastening nut 27, which can be screwed into a threaded bore 28 in the cylinder head 4, serve to fasten the closure piece 21 designed as a valve plate to the cylinder head 4. When the valve 12 is closed, the spring tongue 22 of the mouth 20 of the gas inlet chamber 14 lies in the scooping chamber 5. Either the sleeve 26 itself (eg from Viton) or an elastomer ring 29 form the valve seat. The edge 24 of the closure piece 21 is clamped between the fastening nut 27 and an elastomer ring 31. The fastening nut 27 has a hollow shaft which is equipped with cutouts 32 for the passage of the spring sections 23. There is the possibility of prestressing the spring tongue 22 when the clamping plane for the edge of the closure piece is set back from the plane of the spring tongue 22 and by an amount a. The valve plate 8 of the gas outlet valve 7 surrounds the inlet valve 12 and can be pressure-controlled or - via the tappet 16 - piston-controlled.
Bei den Ausführungsbeispielen nach den Figuren 3 und 4 ist das Verschlussstück 8 des Gasaustrittsventiles 7 mit Hilfe eines elastischen Balges 35 (Metall oder Elastomerwerkstoff) am Zylinderkopf 4 befestigt. Das Innere des Balges 35 bildet die Gaseintrittskammer 14. Der Gaseintritt in den Schöpfraum 5 erfolgt über eine Bohrung 36 im Ventilteller 8.In the exemplary embodiments according to FIGS. 3 and 4, the closure piece 8 of the gas outlet valve 7 is fastened to the cylinder head 4 with the aid of an elastic bellows 35 (metal or elastomer material). The interior of the bellows 35 forms the gas inlet chamber 14. The gas enters the scoop chamber 5 via a bore 36 in the valve plate 8.
Bei der Lösung nach Figur 3 ist der Teller 8 des Gasaustrittsventiles 7, mit einer Elastomermembran 37 ausgerüstet bzw. beschichtet. Im Bereich der Bohrung 36 ist die Membran 37 mit gegenüber der Bohrung 36 versetzt angeordneten Öffnungen 39 ausgerüstet, die bei ausreichendem Unterdruck im Schöpfraum 5 den Durchtritt der Gase ermöglichen (in Figur 3, linke Hälfte, dargestellt). Beim Ausführungsbeispiel nach Figur 4 ist der Bohrung 36 eine Federzunge 40 - ähnlich wie bei der Lösung nach Figur 1 - zugeordnet, die mittels der Schraube 41 am Ventilteller 8 befestigt ist.In the solution according to FIG. 3, the plate 8 of the gas outlet valve 7 is equipped or coated with an elastomer membrane 37. In the area of the bore 36, the membrane 37 is equipped with openings 39 which are arranged offset with respect to the bore 36 and which, with sufficient negative pressure in the scoop chamber 5, allow the gases to pass through (shown in FIG. 3, left half). In the embodiment of Figure 4 is Bore 36 a spring tongue 40 - similar to the solution according to Figure 1 - assigned, which is fastened to the valve plate 8 by means of the screw 41.
Die Lösung nach Figur 5 zeigt einen in ein Gewinde am Zylinderkopf 4 dicht (Elastomerring 42) eingeschraubten Ventilsitz 43 mit Druchtrittsbohrungen 44. Den auf einem Kreis angeordneten Durchtrittsbohrungen 44 ist ein ringförmiges Verschlussstück 45 zugeordnet, das unter der Wirkung einer Druckfeder 46 steht. Die Feder 46 stützt sich auf einem Hubbegrenzer 47 ab und bestimmt die Vorspannung des Gaseintrittsventils 12.The solution according to FIG. 5 shows a valve seat 43 screwed tightly into a thread on the cylinder head 4 (elastomer ring 42) with passage bores 44. The passage bores 44 arranged on a circle are assigned an annular closure piece 45 which is under the action of a compression spring 46. The spring 46 is supported on a stroke limiter 47 and determines the pretension of the gas inlet valve 12.
Bei den Lösungen nach den Figuren 1 bis 5 wird zwar ein Teil der Querschnittsfläche der Zylinderbohrung für die Anordnung des Gaseintritts 12 verwendet; der überwiegende Teil steht jedoch für den großflächig ausgebildeten Gasaustritt 7 zur Verfügung. Die Position des Gas- eintrittsventiles 12 ist von besonderem Vorteil, das es unmittelbar nach dem Beginn des Saughubes druckgesteuert seine Öffnungsbewegung einleiten kann.In the solutions according to FIGS. 1 to 5, part of the cross-sectional area of the cylinder bore is used for the arrangement of the gas inlet 12; the majority, however, is available for the large-area gas outlet 7. The position of the gas inlet valve 12 is particularly advantageous since it can initiate its opening movement under pressure control immediately after the start of the suction stroke.
Bei den Ausführungen nach den Figuren 6 bis 9 erfolgt der Gaseintritt über eine seitlich in den Schöpfraum 5 mündende Öffnung 50 (Bohrung oder Schlitz). Das Eintrittsventil 12 befindet sich jeweils in einer Kammer 51 in der Zylinderwand 3. In die Kammer 51 mündet die Gaseintrittsleitung 14. Die Verschlussmechanismen der Lösungen nach den Figuren 6 bis 8 sind den Verschlussmechanismen nach den Figuren 1, 2 und 5 ähnlich (Federzungen 18, 21 bzw. federbelastetes ringförmiges Verschlussstück 45). Bei der Ausführung nach Figur 9 be- findet sich in der Kammer 51 ein an sich bekanntes Rückschlagventil mit einer unter der Wirkung der Druck¬ feder 52 stehenden Kugel 53 als Verschlussstück, dem ein konisch ausgebildeter Sitz 54 zugeordnet ist.In the embodiments according to FIGS. 6 to 9, the gas entry takes place via an opening 50 (bore or slot) opening laterally into the scooping chamber 5. The inlet valve 12 is located in a chamber 51 in the cylinder wall 3. The gas inlet line 14 opens into the chamber 51. The locking mechanisms of the solutions according to FIGS. 6 to 8 are similar to the locking mechanisms according to FIGS. 1, 2 and 5 (spring tongues 18, 21 or spring-loaded annular closure piece 45). In the embodiment according to FIG. is found in the chamber 51 a per se known non-return valve with a under the action of the compression spring 52 ¬ stationary ball 53 as a closure piece, which is associated with a conically shaped seat 54.
Die Bohrungen 50 bei den Lösungen nach den Figuren 6 bis 9 befinden sich jeweils in unmittelbarer Nähe der dem Austrittsventil 7 zugewandten Stirnseite der Zylinderwand 3, damit die Ventile 12 möglichst früh bei beginnendem Saughub druckgesteuert öffnen. In an sich bekannter Weise ist zweckmäßig ein weiterer, vom Kolben 2 gesteuerter Gaseintritt 55 vorhanden sein (Figur 8), der als umlaufende Nut 56 in der Zylinderwand 3 ausgebildet ist. In diese Nut 56 mündet ebenfalls die Gaseintrittsleitung 14.The bores 50 in the solutions according to FIGS. 6 to 9 are each located in the immediate vicinity of the end face of the cylinder wall 3 facing the outlet valve 7, so that the valves 12 open under pressure control as early as possible when the suction stroke begins. In a manner known per se, there is advantageously a further gas inlet 55 controlled by the piston 2 (FIG. 8), which is designed as a circumferential groove 56 in the cylinder wall 3. The gas inlet line 14 also opens into this groove 56.
Die Lösungen nach den Figuren 6 bis 9 haben den Vorteil, dass der Querschnitt des Austrittsventiles 7 durch die Anordnung eines Gaseintrittsventils 12 nicht beeinträchtigt ist und dass seitlich neben dem Zylinder ausreichend Platz für die Unterbringung des Gaseintrittsventils 12 vorhanden ist. Außerdem ist ein schad- raumfreies Austritts-Ventil einfach zu realisieren. Wesentlich bei diesen Lösungen ist, dass sich der Gaseintritt 50 in unmittelbarer Nähe der Stirnseite der Zylinderbohrung befindet, damit das Gaseintrittsventil 12 in der Lage ist, bei beginnendem Saughub druckgesteuert zu öffnen.The solutions according to FIGS. 6 to 9 have the advantage that the cross section of the outlet valve 7 is not impaired by the arrangement of a gas inlet valve 12 and that there is sufficient space on the side next to the cylinder for accommodating the gas inlet valve 12. In addition, an exhaust valve that is free of damage is easy to implement. It is essential in these solutions that the gas inlet 50 is located in the immediate vicinity of the end face of the cylinder bore, so that the gas inlet valve 12 is able to open under pressure control when the suction stroke begins.
Bei der Lösung nach Figur 10 ist der Kolben 2 stirnseitig mit einer Manschette 61 mit einer äußeren Lippe 62 ausgerüstet. Weiterhin ist der Kolben 2 mit einer sich axial erstreckenden Nut 63 versehen, die sich - wenn sich der Kolben 2 in seinem oberen Totpunkt befindet - von der Kolbenstirnseite bis zum Gaseintritt 55 (Ring¬ nut 56 in der Zylinderwand 3) erstreckt. Bei beginnendem Saughub und ausreichendem Unterdruck im Schöpfräum 5 hebt die Lippe 62, die zusammen mit der Zylinderwand das Gaseintrittsventil 12 bildet, von der Zylinderwand ab, so dass die Verbindung zwischen Gaseintritt 55 und Schöpfraum 5 über die Nut 63 hergestellt ist. Die Funktion der Nut 63 kann auch ein Ringspalt zwischen Kolbenhemd und Zylinderwand erfüllen. Zweckmäßig hat der Einlass 55 die Form eines Bohrungskreises, damit die Manschette über den Einlass zum unteren Totpunkt bewegt werden kann.In the solution according to FIG. 10, the piston 2 is equipped on the end face with a sleeve 61 with an outer lip 62. Furthermore, the piston 2 with one axially extending groove 63, which - when the piston 2 is at its top dead center - extends from the piston end to the gas inlet 55 (ring ¬ groove 56 in the cylinder wall 3). At the beginning of the suction stroke and sufficient negative pressure in the scoop chamber 5, the lip 62, which forms the gas inlet valve 12 together with the cylinder wall, lifts off the cylinder wall, so that the connection between the gas inlet 55 and the scoop chamber 5 is established via the groove 63. The function of the groove 63 can also fulfill an annular gap between the piston skirt and the cylinder wall. The inlet 55 expediently has the form of a circle of holes so that the sleeve can be moved to the bottom dead center via the inlet.
Schließlich kann sich der Gaseintritt in der Stirnseite 66 des Kolbens 2 befinden. Bei dem in Figur 11 dargestellten Ausführungsbeispiel ist das Gaseintrittsventil 12 als Zungenventil (Figuren 1 und 6) ausgebildet. Die Federzunge 18 ist mit Hilfe der Schraube 65 am Kolben 2 befestigt und liegt im geschlossenen Zustand der Mündung 20 des Gaseintrittskanals 14 auf. Andere Ventilformen sind ebenfalls möglich (z.B. Kugelventil). Diese Lösung setzt voraus, dass die Stufe durch das Kurbelgehäuse ansaugen darf. Dazu muss das Kurbelgehäuse gedichtet sein und die angesaugten Gase dürfen die Bauteile im Kurbelgehäuse nicht schädigen. Vorteilhaft ist an dieser Konstruktion, dass sie sehr einfach und preiswert ist.Finally, the gas inlet can be located in the end face 66 of the piston 2. In the embodiment shown in Figure 11, the gas inlet valve 12 is designed as a tongue valve (Figures 1 and 6). The spring tongue 18 is fastened to the piston 2 by means of the screw 65 and lies in the closed state of the mouth 20 of the gas inlet channel 14. Other valve shapes are also possible (e.g. ball valve). This solution requires that the step is allowed to suck through the crankcase. To do this, the crankcase must be sealed and the gases drawn in must not damage the components in the crankcase. The advantage of this construction is that it is very simple and inexpensive.
In einigen der Figuren ist dargestellt, dass die Bauteile der beschriebenen Lösungen beschichtet sein kön- nen (Ventilteller 8 in Figur 3, Kolbenstirnseite in den Figuren 4 und 10, Kolbenhemd in Figur 5, Zylinderwand in Figur 6) . Auch die Verschlusselemente und/oder Sitze der Eintrittsventile 12 können mit einer Schicht ausgerüstet sein. Je nach dem, welche Funktion die Beschichtung haben soll (Abdichtung, Dämpfung, Verschleißschutz) sind die Werkstoffe gewählt (z.B. Elastomer bzw. Polytetrafluoräthylen) . Die Betätigung des Aus- trittsventiles 7 kann druck- oder kolbengesteuert sein.Some of the figures show that the components of the solutions described can be coated. NEN (valve plate 8 in Figure 3, piston face in Figures 4 and 10, piston shirt in Figure 5, cylinder wall in Figure 6). The closure elements and / or seats of the inlet valves 12 can also be equipped with a layer. Depending on the function of the coating (sealing, damping, wear protection), the materials are selected (e.g. elastomer or polytetrafluoroethylene). The actuation of the outlet valve 7 can be pressure- or piston-controlled.
Wie im Zusammenhang mit den Ausführungsbeispielen beschrieben, kommen für die druckgesteuerten Eintrittsventile verschiedene Bauformen in Frage:As described in connection with the exemplary embodiments, various designs are possible for the pressure-controlled inlet valves:
a) Zungenventile mit metallischer Dichtung und solche mit Elastomerdichtung.a) tongue valves with metallic seal and those with elastomer seal.
b) Federbelastete Ventilteller ggf. mit zentraler Führung.b) Spring-loaded valve plate with a central guide if necessary.
c) Ventile aus Federstahlblech, die Ventilteller und Federzungen einteilig kombinieren.c) Valves made of spring steel sheet, which combine the valve plate and spring tongues in one piece.
d) Federbelastete Kugelventile.d) spring-loaded ball valves.
e) Elastomermembranen, die über einen Ventilkörper gespannt sind.e) elastomeric membranes that are stretched over a valve body.
f) Manschetten am Kolbenkopf, die unter Druckbeaufschlagung in Richtung des Arbeitsraumes undicht werden und so einen Druckausgleich ermöglichen. Diese Ventilform ist für die Ansaugung durch das Kurbelgehäuse oder für die Ansaugung über das Kolbenhemd geeignet.f) Cuffs on the piston head, which leak under pressure in the direction of the working area and thus enable pressure equalization. This valve shape is for suction through the Crankcase or suitable for suction via the piston skirt.
Durch die erfindungsgemäßen Vorschläge wird erreicht, dass die damit ausgerüstete Kolbenvakuumpumpe die folgenden vorteilhaften Eigenschaften hat:The proposals according to the invention ensure that the piston vacuum pump equipped with it has the following advantageous properties:
• preiswert,• inexpensive,
• robust, betriebssicher, unempfindlich gegenüber Verschmutzung,• robust, reliable, insensitive to dirt,
• hohe Dichtheit,• high tightness,
• geringer Totraum,• small dead space,
• geräuscharm,• low noise,
• geringer Eingriff in die Anschlusskonstruktion, platzsparend,• little intervention in the adjacent construction, space-saving,
• einfach zu fertigen und zu montieren,• easy to manufacture and assemble,
• ausreichende Querschnitte und Steuerzeiten. • sufficient cross sections and timing.

Claims

PATENTANSPRÜCHE PATENT CLAIMS
1. Kolbenvakuumpumpe mit einem Gaseinlass, mit einem Gasauslass, mit mindestens einem Kolben (2), mit mindestens einem Zylinder (3) , mit einem von Kolben (2) und Zylinder (3) gebildeten Schöpfraum1. Piston vacuum pump with a gas inlet, with a gas outlet, with at least one piston (2), with at least one cylinder (3), with a scooping space formed by piston (2) and cylinder (3)
(5), mit einem Gaseintritt, mit einem Gaseintrittsventil (12) sowie mit einem Gasaustritt und einem stirnseitig in der Querschnittsfläche der Zylinderbohrung angeordneten Gasaustrittsventil (7), dadurch gekennzeichnet, dass das Gaseintrittsventil (12) druckgesteuert und derart angeordnet ist, dass es während des Saughubes, vorzugsweise in der ersten Phase des Saughubes, öffnet .(5), with a gas inlet, with a gas inlet valve (12) as well as with a gas outlet and a gas outlet valve (7) arranged on the end face in the cross-sectional area of the cylinder bore, characterized in that the gas inlet valve (12) is pressure-controlled and arranged in such a way that it is during of the suction stroke, preferably in the first phase of the suction stroke.
2. Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass das Gaseintrittsventil (12) ebenfalls stirnseitig in der Querschnittsfläche der Zylinderbohrung befindet. 2. Pump according to claim 1, characterized in that the gas inlet valve (12) is also located on the end face in the cross-sectional area of the cylinder bore.
3. Pumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass das Gaseintrittsventil (12) und das Gasaustrittsventil (7) Bestandteile eines Zylinderkopfes (4) sind.3. Pump according to claim 1 or 2, characterized in that the gas inlet valve (12) and the gas outlet valve (7) are components of a cylinder head (4).
4. Pumpe nach Anspruch 1, 2 oder 3, dadurch gekennzeichnet, dass Gaseintrittsventil (12) und Gasaustrittsventil (7) nebeneinander in der Querschnittsfläche der Zylinderbohrung angeordnet sind.4. Pump according to claim 1, 2 or 3, characterized in that gas inlet valve (12) and gas outlet valve (7) are arranged side by side in the cross-sectional area of the cylinder bore.
5. Pumpe nach Anspruch 4, dadurch gekennzeichnet, dass sich im Zylinderkopf (4) eine Gaseintrittskammer oder -leitung (14) befindet und dass der Mündung (20) der Gaseintrittskammer (14) in den Schöpfräum (5) das Gaseintrittsventil zugeordnet ist .5. Pump according to claim 4, characterized in that there is a gas inlet chamber or line (14) in the cylinder head (4) and that the mouth (20) of the gas inlet chamber (14) in the pump chamber (5) is associated with the gas inlet valve.
6. Pumpe nach Anspruch 4 oder 5, dadurch gekennzeichnet, dass das Gaseintrittsventil (12) Bestandteil des Ventiltellers (8) des Gasaustrittsventiles (7) ist.6. Pump according to claim 4 or 5, characterized in that the gas inlet valve (12) is part of the valve plate (8) of the gas outlet valve (7).
7. Pumpe nach Anspruch 6, dadurch gekennzeichnet, dass der Ventilteller (8) an einem elastischen Balg (35) befestigt ist und dass der Innenraum des Balges die Gaseintrittskammer (14) bildet.7. Pump according to claim 6, characterized in that the valve plate (8) is attached to an elastic bellows (35) and that the interior of the bellows forms the gas inlet chamber (14).
8. Pumpe nach Anspruch 7, dadurch gekennzeichnet, dass der Ventilteller (8) mit einer Elastomermem- bran (37) ausgerüstet ist und dass ein Teil der Elastomermembran Ventilfunktion hat.8. Pump according to claim 7, characterized in that the valve plate (8) with an elastomeric bran (37) and that part of the elastomer membrane has a valve function.
9. Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass das druckgesteuerte Gaseintrittsventil (12) seitlich neben dem Schöpfräum (5) in der Zylinderwand (3) angeordnet ist.9. Pump according to claim 1, characterized in that the pressure-controlled gas inlet valve (12) is arranged laterally next to the pump chamber (5) in the cylinder wall (3).
10. Pumpe nach Anspruch 9, dadurch gekennzeichnet, dass der Gaseintritt über eine seitlich in den Schöpfraum (5) mündende Öffnung (50) (Bohrung oder Schlitz) erfolgt.10. Pump according to claim 9, characterized in that the gas entry takes place via an opening (50) (bore or slot) opening laterally into the scooping space (5).
11. Pumpe nach Anspruch 9 oder 10, dadurch gekennzeichnet, dass sich das Gaseintrittsventil innerhalb einer in der Zylinderwand (3) ausgebildeten Kammer (51) befindet, die mit der Gaseintrittsleitung (14) in Verbindung steht.11. Pump according to claim 9 or 10, characterized in that the gas inlet valve is located in a chamber (51) formed in the cylinder wall (3), which is connected to the gas inlet line (14).
12. Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass sich das druckgesteuerte Gaseintrittsventil12. Pump according to claim 1, characterized in that the pressure-controlled gas inlet valve
(12) in der Kolbenstirnwand (66) befindet.(12) in the piston end wall (66).
13. Pumpe nach einem der Ansprüche 1 bis 12, dadurch gekennzeichnet, dass ein weiterer kolbengesteuerter Gaseintritt (55) vorhanden ist.13. Pump according to one of claims 1 to 12, characterized in that a further piston-controlled gas inlet (55) is present.
14. Pumpe nach einem der Ansprüche 1 bis 13, dadurch gekennzeichnet, dass das druckgesteuerte Eintrittsventil (12) als Zungenventil, federbelastetes Ventil, Kugelventil oder dergleichen ausgebildet ist. 14. Pump according to one of claims 1 to 13, characterized in that the pressure-controlled inlet valve (12) is designed as a tongue valve, spring-loaded valve, ball valve or the like.
15. Pumpe nach einem der Ansprüche 1 bis 14, dadurch gekennzeichnet, dass ein oder mehrere ihrer Bauteile beschichtet sind, und zwar mit einer der Abdichtung, der Geräusch- oder Vibrationsdämpfung oder dem Verschleißschutz dienenden Schicht.15. Pump according to one of claims 1 to 14, characterized in that one or more of its components are coated, with a sealing, noise or vibration damping or wear protection layer.
16. Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass ein kolbengesteuerter Gaseintritt (55) vorhanden ist, dass der Kolben (2) stirnseitig mit einer Manschette (61) ausgerüstet ist, dass eine Verbindung (63) vorhanden ist, die sich von der Manschette (61) bis zum Gaseintritt (55) erstreckt, und dass die Manschette (61) zusammen mit der Zylinderwand (3) das druckgesteuerte Gaseintrittsventil (12) bildet. 16. Pump according to claim 1, characterized in that a piston-controlled gas inlet (55) is present, that the piston (2) is equipped on the end face with a sleeve (61), that a connection (63) is present, which extends from the sleeve (61) extends to the gas inlet (55), and that the sleeve (61) together with the cylinder wall (3) forms the pressure-controlled gas inlet valve (12).
EP00909301A 1999-04-15 2000-03-03 Piston vacuum pump with a gas inlet and a gas outlet Expired - Lifetime EP1169572B1 (en)

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DE19917009 1999-04-15
DE19917009A DE19917009A1 (en) 1999-04-15 1999-04-15 Vacuum piston pump has gas inlet valve which is pressure controlled and installed so that it opens during suction stroke, and preferably during first phase of it
PCT/EP2000/001845 WO2000063557A1 (en) 1999-04-15 2000-03-03 Piston vacuum pump with a gas inlet and a gas outlet

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EP1169572B1 EP1169572B1 (en) 2005-08-17

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DE (2) DE19917009A1 (en)
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TW571025B (en) 2004-01-11
AU3163600A (en) 2000-11-02
EP1169572B1 (en) 2005-08-17
DE19917009A1 (en) 2000-10-19
WO2000063557A1 (en) 2000-10-26
DE50010975D1 (en) 2005-09-22

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