EP1124745A4 - Systeme de transport avec transporteur et dispositifs d'orientation integres - Google Patents

Systeme de transport avec transporteur et dispositifs d'orientation integres

Info

Publication number
EP1124745A4
EP1124745A4 EP00950923A EP00950923A EP1124745A4 EP 1124745 A4 EP1124745 A4 EP 1124745A4 EP 00950923 A EP00950923 A EP 00950923A EP 00950923 A EP00950923 A EP 00950923A EP 1124745 A4 EP1124745 A4 EP 1124745A4
Authority
EP
European Patent Office
Prior art keywords
transport
carrier
directors
director
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00950923A
Other languages
German (de)
English (en)
Other versions
EP1124745B1 (fr
EP1124745A1 (fr
Inventor
Anthony C Bonora
Richard H Gould
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asyst Technologies Inc
Original Assignee
Asyst Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Technologies Inc filed Critical Asyst Technologies Inc
Publication of EP1124745A1 publication Critical patent/EP1124745A1/fr
Publication of EP1124745A4 publication Critical patent/EP1124745A4/fr
Application granted granted Critical
Publication of EP1124745B1 publication Critical patent/EP1124745B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G19/00—Conveyors comprising an impeller or a series of impellers carried by an endless traction element and arranged to move articles or materials over a supporting surface or underlying material, e.g. endless scraper conveyors
    • B65G19/02—Conveyors comprising an impeller or a series of impellers carried by an endless traction element and arranged to move articles or materials over a supporting surface or underlying material, e.g. endless scraper conveyors for articles, e.g. for containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
EP00950923A 1999-08-02 2000-08-01 Systeme de transport avec transporteur et dispositifs d'orientation integres Expired - Lifetime EP1124745B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/365,457 US6308818B1 (en) 1999-08-02 1999-08-02 Transport system with integrated transport carrier and directors
US365457 1999-08-02
PCT/US2000/020954 WO2001009016A1 (fr) 1999-08-02 2000-08-01 Systeme de transport avec transporteur et dispositifs d'orientation integres

Publications (3)

Publication Number Publication Date
EP1124745A1 EP1124745A1 (fr) 2001-08-22
EP1124745A4 true EP1124745A4 (fr) 2002-05-15
EP1124745B1 EP1124745B1 (fr) 2003-12-17

Family

ID=23438996

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00950923A Expired - Lifetime EP1124745B1 (fr) 1999-08-02 2000-08-01 Systeme de transport avec transporteur et dispositifs d'orientation integres

Country Status (12)

Country Link
US (1) US6308818B1 (fr)
EP (1) EP1124745B1 (fr)
JP (1) JP3749176B2 (fr)
KR (1) KR100443597B1 (fr)
AT (1) ATE256620T1 (fr)
AU (1) AU6395000A (fr)
CA (1) CA2339813A1 (fr)
DE (1) DE60007271D1 (fr)
HK (1) HK1039104B (fr)
IL (1) IL141386A0 (fr)
TW (1) TW477772B (fr)
WO (1) WO2001009016A1 (fr)

Families Citing this family (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6533101B2 (en) * 1998-06-24 2003-03-18 Asyst Technologies, Inc. Integrated transport carrier and conveyor system
US6223886B1 (en) * 1998-06-24 2001-05-01 Asyst Technologies, Inc. Integrated roller transport pod and asynchronous conveyor
US6308818B1 (en) * 1999-08-02 2001-10-30 Asyst Technologies, Inc. Transport system with integrated transport carrier and directors
US6742978B1 (en) * 1999-12-07 2004-06-01 Btu International, Inc. Wafer indexing device
NL1014170C2 (nl) * 2000-01-25 2001-07-26 Vanderlande Ind Nederland Werkwijze en inrichting voor het transporteren van voorwerpen.
JP3508130B2 (ja) * 2000-09-21 2004-03-22 村田機械株式会社 搬送システム
JP2002289671A (ja) * 2001-03-28 2002-10-04 Toshiba Corp 半導体製造装置及び半導体装置の製造システム
DE10135591A1 (de) * 2001-07-20 2003-01-30 Bosch Gmbh Robert Staufähiges Kurvenelement für ein Transfersystem
DE10157161A1 (de) * 2001-11-22 2003-06-12 Knapp Logistik Automation Fördereinrichtung zum Fördern von Fördergut auf Paletten oder dergleichen mit Richtungswechsel
WO2003050022A1 (fr) * 2001-12-11 2003-06-19 Intrabay Automation, Inc. Systeme monorail de transport de cassettes de plaquettes a semi-conducteur
US6688453B2 (en) * 2001-12-27 2004-02-10 Texas Instruments Incorporated Railing for a boat conveyor system
US6726429B2 (en) 2002-02-19 2004-04-27 Vertical Solutions, Inc. Local store for a wafer processing station
FR2836463B1 (fr) * 2002-02-27 2005-09-09 Teleflex Gallet Procede de transfert de colis et installation de transport de colis
CN100520706C (zh) 2002-06-19 2009-07-29 布鲁克斯自动技术公司 半导体制造用竖直传送带与空中升降机组合式自动物料搬运系统
US20070092359A1 (en) * 2002-10-11 2007-04-26 Brooks Automation, Inc. Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position
KR101544699B1 (ko) * 2002-10-11 2015-08-18 무라다기카이가부시끼가이샤 오버헤드 호이스트를 탑재한 오버헤드 호이스트 수송 차량
US6990721B2 (en) * 2003-03-21 2006-01-31 Brooks Automation, Inc. Growth model automated material handling system
US7101138B2 (en) * 2003-12-03 2006-09-05 Brooks Automation, Inc. Extractor/buffer
WO2005087385A1 (fr) * 2004-03-15 2005-09-22 Esse Gi Di Scaunich Gianni Appareil pour deplacer des produits industriels
US20060168917A1 (en) * 2005-01-31 2006-08-03 Yizhak Ashkenazi System and machine for strapping articles
US7410340B2 (en) * 2005-02-24 2008-08-12 Asyst Technologies, Inc. Direct tool loading
KR100706543B1 (ko) * 2005-06-17 2007-04-13 현대자동차주식회사 컨넥팅 로드용 컨베이어
JP2009500267A (ja) * 2005-07-11 2009-01-08 アシスト テクノロジーズ インコーポレイテッド 半導体コンテナ用のベルトコンベア
DE102005033946B4 (de) * 2005-07-20 2018-06-28 Bosch Rexroth Aktiengesellschaft Fördersystem
FI20050908L (sv) * 2005-09-12 2007-03-13 Metso Paper Inc Förfarande och anordning för vändning av pappersrullar
JP2007217078A (ja) * 2006-02-14 2007-08-30 Asyst Shinko Inc 方向転換装置
US20070289843A1 (en) * 2006-04-18 2007-12-20 Barry Kitazumi Conveyor System Including Offset Section
US7281623B1 (en) 2006-04-18 2007-10-16 Aquest Systems Corporation Transport system including vertical rollers
US8376130B2 (en) * 2006-07-10 2013-02-19 Muratec Automation Co., Ltd. Direct drive modular belt conveyor, cartridge, and quick connect-disconnect constant velocity drive shaft, for high speed FOUP transport
WO2008024520A2 (fr) * 2006-08-25 2008-02-28 Aquest Systems Corporation Système transporteur de transfert
US20080050208A1 (en) * 2006-08-25 2008-02-28 Barry Kitazumi High speed transporter including horizontal belt
US20080240900A1 (en) * 2007-03-29 2008-10-02 Eric Reisenauer System for storage and retrieval
US20080240894A1 (en) * 2007-03-29 2008-10-02 Eric Reisenauer Storage and retrieval system
US7434678B1 (en) * 2007-06-14 2008-10-14 Aquest Systems Corporation Systems and methods for transport through curved conveyance sections
US7441648B1 (en) * 2007-06-14 2008-10-28 Aquest Systems Corporation Systems and methods for transport through curves
CN101164846B (zh) * 2007-09-27 2012-01-25 宁波东港紧固件制造有限公司 轨道转盘装置
ATE447449T1 (de) * 2007-10-20 2009-11-15 Trumpf Sachsen Gmbh Maschinelle anordnung für die blechbearbeitung mit einer blechbearbeitungseinrichtung sowie mit einer transportvorrichtung
WO2010099610A1 (fr) * 2009-03-03 2010-09-10 Ats Automation Tooling Systems Inc. Système de convoyeur à came à spirale multimode
DE102010012976A1 (de) * 2010-03-22 2011-09-22 Schmid Technology Systems Gmbh Transportkassette und Transportmittel zum Transport solcher Transportkassetten
JP5310784B2 (ja) * 2011-05-16 2013-10-09 村田機械株式会社 有軌道台車システム
US9353485B2 (en) * 2011-08-31 2016-05-31 Mitsubishi Heavy Industries, Ltd. Vehicle pick-up and delivery device and track-based transportation system provided therewith
WO2013061511A1 (fr) 2011-10-27 2013-05-02 パナソニック株式会社 Dispositif électroluminescent
DE102012100929A1 (de) * 2012-02-06 2013-08-08 Roth & Rau Ag Substratbearbeitungsanlage
KR20130117143A (ko) * 2012-04-17 2013-10-25 삼성전자주식회사 호이스트 장치
DE102012104539B4 (de) 2012-05-25 2015-08-27 Askion Gmbh Modulares Zustellsystem
US8776983B2 (en) * 2012-06-26 2014-07-15 Shenzhen China Star Optoelectronics Technology Co., Ltd Turntable device for substrate and substrate transporting system
CN102826316B (zh) * 2012-08-31 2015-06-17 深圳市华星光电技术有限公司 一种玻璃基板的仓储系统以及玻璃基板仓储方法
CN103848195A (zh) * 2012-11-28 2014-06-11 江苏天工钛业科技有限公司 自动直角拐弯运输车
WO2014151171A1 (fr) 2013-03-15 2014-09-25 The Procter & Gamble Company Compositions de soin personnel
CN103466308B (zh) * 2013-08-16 2015-11-18 天津市华帅制药机械有限公司 料车90度换向器
JP6288103B2 (ja) * 2013-10-28 2018-03-07 村田機械株式会社 コンベヤ装置
DE102014208022A1 (de) * 2014-04-29 2015-10-29 Robert Bosch Gmbh Greifeinrichtung mit beweglichem Druckstück
DE102014009191A1 (de) 2014-06-20 2015-12-24 Servus Intralogistics Gmbh Transportroboter mit veränderbarer Fahrtrichtung
CN104192519B (zh) * 2014-09-29 2016-01-13 四川成焊宝玛焊接装备工程有限公司 用于积放式输送的小车转运装置
JP6278341B2 (ja) * 2015-04-06 2018-02-14 株式会社ダイフク 物品搬送設備
TWI554464B (zh) * 2015-06-22 2016-10-21 盟立自動化股份有限公司 運輸裝置及使用該運輸裝置之運輸系統
DE102016225485B4 (de) * 2016-12-19 2022-08-25 Carl Zeiss Vision International Gmbh Sicheres Fördersystem
DE102017109839A1 (de) * 2017-05-08 2018-12-20 Kewazo Gmbh Gerüsttransportsystem, Verfahren zur Steuerung eines Gerüsttransportsystems sowie Verwendung eines Gerüsttransportsystems
US10578521B1 (en) 2017-05-10 2020-03-03 American Air Filter Company, Inc. Sealed automatic filter scanning system
JP6825532B2 (ja) * 2017-10-12 2021-02-03 株式会社ダイフク 搬送システム
CN107622966B (zh) * 2017-11-02 2023-09-22 湖南艾博特机器人技术有限公司 一种光伏硅晶电池片花篮智能传输系统
US10564632B2 (en) * 2017-11-29 2020-02-18 Taiwan Semiconductor Manufacturing Co., Ltd. Systems and methods for sensory automated material handing
US10919705B2 (en) 2018-05-29 2021-02-16 The Procter And Gamble Company Apparatus that controls motion of independent movers along a path
US10696488B2 (en) 2018-05-29 2020-06-30 The Procter And Gamble Company Apparatus that controls motion of proximate independent movers along a path
US10717606B2 (en) 2018-05-29 2020-07-21 The Procter And Gamble Company Method of independently controlling motion of movers along a path
US10689202B2 (en) * 2018-05-29 2020-06-23 The Procter And Gamble Company Apparatus for controlled transport of articles along a path
US11439921B2 (en) 2018-06-25 2022-09-13 Universal City Studios Llc Multi-dimensional bogie and track system
CN112673214B (zh) 2018-09-07 2023-05-12 美国空气过滤器股份有限公司 过滤器测试设备和方法
US11305202B2 (en) 2018-10-22 2022-04-19 Universal City Studios Llc Track rail acquisition, carrying, and transfer systems and methods
US10814236B1 (en) 2019-04-29 2020-10-27 Universal City Studios Llc Coaster transportation system
KR102185264B1 (ko) * 2019-07-29 2020-12-01 세메스 주식회사 이송 장치
CN114258584A (zh) * 2019-08-14 2022-03-29 应用材料公司 路径切换组件、具有该路径切换组件的腔室和基板处理系统及其方法
CN111452014A (zh) * 2020-04-16 2020-07-28 佛山职业技术学院 一种光伏电站运维通道和光伏电站
CN111725119B (zh) * 2020-07-01 2023-01-31 湖南艾科威智能装备有限公司 一种适用于硅片电池片料盒的万向传输装置
KR20220060261A (ko) * 2020-11-04 2022-05-11 세메스 주식회사 인터페이스 장치 및 이를 구비하는 컨테이너 이송 시스템
NO346443B1 (en) * 2020-11-25 2022-08-22 Autostore Tech As Vehicle rotation device and system
US11964832B2 (en) * 2021-02-26 2024-04-23 Ats Corporation System and method for moving element transport in a conveyor system
CN113697389A (zh) * 2021-09-10 2021-11-26 南通科瑞恩智能装备有限公司 移动运输装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4540326A (en) * 1982-09-17 1985-09-10 Nacom Industries, Inc. Semiconductor wafer transport system
US4718349A (en) * 1985-05-29 1988-01-12 Wahren Per E Conveyor line for heavy goods conveying
WO1999067158A2 (fr) * 1998-06-24 1999-12-29 Asyst Technologies, Inc. Conteneur de transport a rouleau integre et convoyeur asynchrone

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3746148A (en) 1972-03-08 1973-07-17 Logan Co Shuttle car mechanism for transferring loads between two stations
US3840110A (en) 1972-07-24 1974-10-08 Ermanco Inc Conveyor apparatus
US4014428A (en) 1973-05-04 1977-03-29 Ossbahr C Modular article conveyor
US3927620A (en) 1973-12-03 1975-12-23 Thomas J Clapham Magnetic propulsion system
DE2440682C3 (de) 1974-08-24 1978-08-24 Karl L. Dipl.-Ing. 7967 Bad Waldsee Ringer Umschlagsystem für Container und Paletten
US3976330A (en) 1975-10-01 1976-08-24 International Business Machines Corporation Transport system for semiconductor wafer multiprocessing station system
NL173732C (nl) 1978-05-16 1984-03-01 Nederlanden Staat Transportsysteem voor het vervoeren van rolcontainers.
US4453627A (en) 1980-02-08 1984-06-12 The E. W. Buschman Co. Accumulator conveyor
EP0115357B1 (fr) * 1980-10-14 1987-02-25 Maurice Prodel Installation pour l'assemblage et/ou l'usinage de pièces portées par des palettes circulantes et immobilisables
US4389941A (en) * 1980-11-21 1983-06-28 Si Handling Systems Inc. Driverless vehicle conveyor system
US4572358A (en) 1981-03-10 1986-02-25 Rexnord Inc. Powered transmission assembly for an accumulating conveyor
US4461382A (en) 1981-11-16 1984-07-24 Pentek Corporation Motion detector and control system for an accumulating live conveyor
US4534462A (en) 1981-11-16 1985-08-13 Pentek Corporation Motion detector and control system for an accumulating live conveyor
AT382808B (de) 1982-03-05 1987-04-10 Sticht Fertigungstech Stiwa Einrichtung zum montieren bzw. bearbeiten von werkstuecken
FR2522566B2 (fr) 1982-03-05 1986-06-13 Prodel Maurice Dispositif d'entrainement a courroie pour palettes d'une machine pour l'assemblage ou l'usinage de pieces
AT390044B (de) 1982-03-05 1990-03-12 Sticht Fertigungstech Stiwa Foerdereinrichtung fuer werkstuecke bzw. werkstuecktraeger
AT393819B (de) 1983-03-29 1991-12-27 Sticht Fertigungstech Stiwa Foerdereinrichtung fuer werkstuecke bzw. werkstuecktraeger, insbesondere fuer eine montagemaschine
FR2580262B1 (fr) 1985-04-12 1987-05-22 Efcis Installation de manutention d'objets fragiles en atmosphere a empoussierement controle
FR2585008A1 (fr) 1985-07-17 1987-01-23 Sysmo Sa Dispositif de transfert automatique de supports
US4826360A (en) 1986-03-10 1989-05-02 Shimizu Construction Co., Ltd. Transfer system in a clean room
US4926753A (en) 1986-04-29 1990-05-22 Programmation, Inc. Flexible material transport system
US4793262A (en) 1987-10-03 1988-12-27 Middlesex General Industries, Inc. Transport system for computer integrated manufacturing/storage and drive component therefor
US4938334A (en) * 1988-06-15 1990-07-03 Ps Group, Inc. Workpiece transport system
FR2638694B1 (fr) 1988-11-10 1991-08-02 Ism Equipements Indls Montage Installation de transfert comportant un circuit ferme de rails
US5009306A (en) * 1989-06-19 1991-04-23 Simplimatic Engineering Company Printed circuit board conveyor and method
MY105440A (en) 1990-03-08 1994-10-31 Daifuku Kk Roller conveyor.
US5086910A (en) 1990-08-13 1992-02-11 Giddings & Lewis, Inc. Zone controlled conveyance system
DE4200985C2 (de) 1991-01-31 1994-05-05 Bavaria Cargo Tech Elektronische Steueranordnung für Antriebsrolleneinheiten
US5285887A (en) 1992-11-23 1994-02-15 Interroll Holding A. G. Accumulating conveyor and control system
US5318167A (en) 1993-03-12 1994-06-07 Newcor, Inc. Control system for power driven conveyor line
DE4409829C2 (de) 1994-03-22 1996-08-22 Manfred Kobler Vorrichtung und Verfahren zur Herstellung von Bauwerken unter Verwendung von aus Mauerstein und/oder Schalungen bestehenden Bauteilen
US5452801A (en) 1994-07-13 1995-09-26 Middlesex General Industries, Inc. Conveyor cassette for wafers
US5533844A (en) 1994-11-15 1996-07-09 Ekleberry; Donald A. Travelling platen with extended axis
US5521563A (en) 1995-06-05 1996-05-28 Emc Technology, Inc. Microwave hybrid coupler
US5673804A (en) 1996-12-20 1997-10-07 Pri Automation, Inc. Hoist system having triangular tension members
JPH1159829A (ja) * 1997-08-08 1999-03-02 Mitsubishi Electric Corp 半導体ウェハカセット搬送装置、半導体ウェハカセット搬送装置で用いられるストッカ、ならびに半導体ウェハカセット搬送装置で用いられるストッカ入庫作業制御方法、ストッカ出庫作業制御方法、自動搬送車制御方法、およびストッカ在庫照合方法
US6308818B1 (en) * 1999-08-02 2001-10-30 Asyst Technologies, Inc. Transport system with integrated transport carrier and directors

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4540326A (en) * 1982-09-17 1985-09-10 Nacom Industries, Inc. Semiconductor wafer transport system
US4718349A (en) * 1985-05-29 1988-01-12 Wahren Per E Conveyor line for heavy goods conveying
WO1999067158A2 (fr) * 1998-06-24 1999-12-29 Asyst Technologies, Inc. Conteneur de transport a rouleau integre et convoyeur asynchrone

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HK1039104A1 (en) 2002-04-12
KR100443597B1 (ko) 2004-08-09
HK1039104B (zh) 2004-04-16
TW477772B (en) 2002-03-01
EP1124745B1 (fr) 2003-12-17
EP1124745A1 (fr) 2001-08-22
US6308818B1 (en) 2001-10-30
KR20010075558A (ko) 2001-08-09
ATE256620T1 (de) 2004-01-15
AU6395000A (en) 2001-02-19
IL141386A0 (en) 2002-03-10
WO2001009016A1 (fr) 2001-02-08
CA2339813A1 (fr) 2001-02-08
JP3749176B2 (ja) 2006-02-22
JP2003506289A (ja) 2003-02-18
DE60007271D1 (de) 2004-01-29

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