EP1087195B1 - Refrigerator for cryogenic gas separation system - Google Patents

Refrigerator for cryogenic gas separation system Download PDF

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Publication number
EP1087195B1
EP1087195B1 EP00120673A EP00120673A EP1087195B1 EP 1087195 B1 EP1087195 B1 EP 1087195B1 EP 00120673 A EP00120673 A EP 00120673A EP 00120673 A EP00120673 A EP 00120673A EP 1087195 B1 EP1087195 B1 EP 1087195B1
Authority
EP
European Patent Office
Prior art keywords
refrigerator
rotary element
ports
rotary
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00120673A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1087195A3 (en
EP1087195A2 (en
Inventor
Atsushi Air Water Inc. Miyamoto
Shingo Air Water Inc. Kunitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Water Inc
Original Assignee
Air Water Inc
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Filing date
Publication date
Application filed by Air Water Inc filed Critical Air Water Inc
Publication of EP1087195A2 publication Critical patent/EP1087195A2/en
Publication of EP1087195A3 publication Critical patent/EP1087195A3/en
Application granted granted Critical
Publication of EP1087195B1 publication Critical patent/EP1087195B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04763—Start-up or control of the process; Details of the apparatus used
    • F25J3/04866—Construction and layout of air fractionation equipments, e.g. valves, machines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F25B9/145—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04278—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using external refrigeration units, e.g. closed mechanical or regenerative refrigeration units
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/044—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a single pressure main column system only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/14—Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1408—Pulse-tube cycles with pulse tube having U-turn or L-turn type geometrical arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/14—Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1418—Pulse-tube cycles with valves in gas supply and return lines
    • F25B2309/14181—Pulse-tube cycles with valves in gas supply and return lines the valves being of the rotary type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/14—Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1424—Pulse tubes with basic schematic including an orifice and a reservoir
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2240/00—Processes or apparatus involving steps for expanding of process streams
    • F25J2240/40—Expansion without extracting work, i.e. isenthalpic throttling, e.g. JT valve, regulating valve or venturi, or isentropic nozzle, e.g. Laval
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2270/00—Refrigeration techniques used
    • F25J2270/90—External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration
    • F25J2270/908—External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration by regenerative chillers, i.e. oscillating or dynamic systems, e.g. Stirling refrigerator, thermoelectric ("Peltier") or magnetic refrigeration
    • F25J2270/91—External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration by regenerative chillers, i.e. oscillating or dynamic systems, e.g. Stirling refrigerator, thermoelectric ("Peltier") or magnetic refrigeration using pulse tube refrigeration

Definitions

  • the present invention relates to a cryogenic gas separation system which utilizes cold produced by a refrigerator according to the preamble of claim 1.
  • a cryogenic gas separation system which utilizes cold produced by a refrigerator according to the preamble of claim 1.
  • Such a system is known from FR-A-2751060.
  • cryogenic air separation systems utilizing a compact helium (He) refrigerator are disclosed in Japanese Patent Unexamined Publications No. 10-206009 (1998) and No. 10-206010 (1998) and Japanese Patent No. 3007581.
  • a pressure pulsation source is required and, in some cases, a phase controller is required.
  • the pressure pulsation source and the phase controller each have valves for controlling the flow of an operating gas. Referring to Fig.
  • an active buffer pulse tube refrigerator for example, includes a pressure pulsation source having a compressor 91 and a pair of valves 93, 94, and a phase controller having two buffer tanks 92a, 92b and a pair of valves 95, 96.
  • reference numerals 97 and 98 denote a regenerator and a pulse tube, respectively.
  • the valves 93 to 96 are each opened and closed in a precisely predefined cycle.
  • the open-close cycle is relatively short, which typically provides pressure pulsation of several hertz to several tens hertz. Therefore, a solenoid valve or a compact flat seal rotary valve as shown in section in Fig. 2 is generally employed for the valves 93 to 96.
  • the flat seal rotary valve includes a rotary element 101 having two ports 102, 103 (which communicate with each other via a communication path 104), and a stationary element 105 having three ports 106 to 108 and kept in area contact with the rotary element 101.
  • the rotary element 101 is adapted to be rotated with respect to the stationary element 105 by rotation of a motor 109 so that the ports 102, 103 are selectively connected to the ports 106 to 108 (the port connection is switched between a position where the ports 107, 108 of the stationary element 105 communicate with each other as shown in Fig. 2 and a position where the ports 106, 107 of the stationary element 105 communicate with each other as shown in Fig. 3).
  • the flat seal rotary valve shown in Fig. 2 is capable of switching the flow path of the operating gas in two ways. Therefore, it is merely necessary to provide such rotary valves one for each of the pressure pulsation source and the phase controller.
  • reference numeral 110 denotes a housing which accommodates the rotary element 101 in a rotatable manner.
  • the valve tends to have a complicated construction and an increased size in an attempt to increase the volume of the operating gas, so that high speed operation of the valve is difficult. If the valve is frequently operated at a higher speed, the service life of the valve will drastically be reduced.
  • a phase controller is incorporated in the refrigerator, the number of valves should be increased for the complicated construction of the phase controller, so that the overall size of the refrigerator is increased.
  • said recesses of the rotary element provided in an outer peripheral portion of the rotary element are axially independently provided, each being formed in a different location along the axis of the rotary element.
  • Advantageously refrigerator is a pulse tube refrigerator and the pulse tube refrigerator is a refrigerator having a buffer tank.
  • a preferred embodiment of the present invention provides a cryogenic gas separation system which may be supplied with a sufficient amount of cold by employing a refrigerator incorporating a compact and longer-life selector valve.
  • the two recesses of the rotary valve incorporated in the refrigerator are axially independently provided, an increase in the diameter of the rotary element is minimised. This allows the rotary valve to have a reduced size and an extended service life.
  • the refrigerator may have a larger scale, a greater capacity and a higher efficiency.
  • the refrigerator can be embodied as a larger-scale refrigerator having a wattage of not smaller than several hundreds watts.
  • the refrigerator may be embodied as a smaller-scale refrigerator having a wattage of several watts as in the prior art.
  • the larger-scale, greater-capacity and higher-efficiency refrigerator makes it possible to operate the cryogenic gas separation system without the use of any auxiliary means such as an auxiliary cold source, thereby allowing for a cost reduction.
  • the refrigerator to be employed in the cryogenic gas separation system may be of pulse tube type G-M (Gifford-McMahon) type, or Solvay type, but is not limited thereto.
  • the refrigerator may be embodied as any type of refrigerator, as long as the refrigerator is designed so that flow paths of an operating gas are switched by switching a valve.
  • the rotary element has a circular cross-section perpendicular (or normal) to the rotary axis of the element. In other words, the horizontal cross-section of the rotary element is circular when the rotary element is placed vertically upright and the vertical cross-section of the rotary element is circular when the same rotary element is laid horizontally.
  • FIG 4 illustrates a pulse tube refrigerator 121 to be employed in the cryogenic gas separation system in accordance with one embodiment of the present invention.
  • the pulse tube refrigerator according to this embodiment has substantially the same construction as the pulse tube refrigerator shown in Figure 1, except that rotary valves D as shown in Figures 5, 6 and 7 are respectively employed instead of the pair of valves 93, 94 and the pair of valves 95, 96. Since the other components of the pulse tube refrigerator of Figure 4 are the same as those of the pulse tube refrigerator of Figure 1, like components are denoted by like reference numerals.
  • the rotary element 1 has recesses 32 and 33 respectively formed in an outer peripheral portion thereof on opposite sides thereof (on the left-hand side and the right-hand side thereof in Figure 5.
  • the housing 2 has three ports 34 to 36 formed in a circumferential wall thereof on one side thereof (on the left-hand side in Fig. 6), the ports 34, 35 being adapted to be brought into communication with the recess 32, the ports 35, 36 being adapted to be brought into communication with the recess 33.
  • the ports 34, 35 communicate with the recess 32 to permit an operating gas to flow therethrough.
  • the ports 35, 36 do not communicate with the recess 33, so that the operating gas is prevented from flowing therethrough.
  • the rotary element 1 is rotated from this position into a position as shown in Fig. 7, the ports 35, 36 are brought into communication with the recess 33 to permit the operating gas to flow therethrough.
  • the ports 34, 35 do not communicate with the recess 32, so that the operating gas is prevented from flowing therethrough.
  • two rotary valves D are employed in this embodiment, the arrangement of the rotary valves is not limited thereto.
  • rotary valve D may be employed instead of the pair of valves 93, 94 or the pair of valves 95,96 Since the rotary element 1 of the rotary valve D has a small diameter and hence a small cross-section, the influence of a pressure load exerted on the rotary element 1 can be minimised.
  • a seal (not shown) is provided between the rotary element 1 and the housing 2, torque generated by friction of the seal can be reduced, because the circumferential speed of the outer diameter of the rotary element 1 is reduced.
  • the reduction in the pressure load and the torque generated by the friction of the seal reduces the power required for the rotation of the motor provided to drive the valve.
  • a compact and high-speed motor can be employed as the motor.
  • the reduction in the circumferential speed of the rotary element 1 makes it possible to extend the service life of the seal (which is provided between the rotary element 1 and the housing 2) and to increase the rotational speed of the rotary element 1.
  • a cryogenic gas separation system as shown in Figure 8 is constructed such that the pulse tube refrigerator 121 shown in Figure 4 is incorporated in an air separation unit (nitrogen gas production unit of a single column type), and the pulse tube refrigerator 121 is used for cooling of feed air. More specifically, the feed air which is compressed up to a predetermined pressure at an increased temperature by a feed air compressor 122 is cooled close to an ordinary temperature (about 25°C) by a water-cooled heat exchanger 123.
  • the resulting feed air is supplied into a cold box 125.
  • the feed air flows through a main heat exchanger 126 and is cooled to a liquefying temperature thereof, and then flows through a cold extracting portion 127 of the pulse tube refrigerator 121 so that the amount of liquefied feed air is increased.
  • the resulting feed air is supplied to a lower portion of a rectification column 128.
  • the cooling capacity of the pulse tube refrigerator 121 is equivalent to the sum of the amount of heat introduced from ambient temperature to the cold box 125, the heat transfer loss of the main heat exchanger 126, and the liquefaction energy required for extraction of a liquefied product.
  • a liquid air portion of the feed air is accumulated in the bottom of the rectification column 128 and then is supplied as a coolant into a condenser 129 located above the rectification column 128.
  • the coolant liquefies N 2 gas in an upper portion of the rectification column 128 and then is returned as a reflux liquid into the upper portion of the rectification column 128.
  • the feed air is rectified by the reflux liquid and the ascending gas, and the N 2 gas is separated from the air and extracted from the upper portion of the rectification column 128. After cold is recovered by the main heat exchanger 126, a product N 2 gas is taken out.
  • reference numerals 130 and 131 denote an expansion valve and an exhaust gas outlet path, respectively.
  • the pulse tube refrigerator 121 shown in Fig. 4 is used for the cooling of the feed air (all or part of the feed air output from the main heat exchanger 126 is cooled by the pulse tube refrigerator 121), but as objects to be cooled are not limited thereto.
  • the product nitrogen gas, the exhaust gas, the gas within the rectification column 128, the liquefied air or the like may be cooled by the pulse tube refrigerator 121.
  • the pulse tube refrigerator 121 may cool and liquefy the feed air at an inlet of the main heat exchanger 126 or the product nitrogen gas or the exhaust gas at outlets of the main heat exchanger 126, and the liquefied gas may be supplied to a cryogenic portion of the cold box 125. Where the amount of cold produced by the pulse tube refrigerator 121 is insufficient, liquid nitrogen, liquid oxygen or the like may be supplied into the cold box to make up for any insufficient cold supply.
  • the air separation unit is embodied as a nitrogen gas production unit of a single column type, but also may be embodied as a common nitrogen gas production unit of a dual column type.
  • the cryogenic gas separation system shown in Fig. 8 is constructed such that the pulse tube refrigerator 121 shown in Fig. 4 is incorporated in the air separation unit, but may be utilised for separation of various gas mixtures as long as the gas mixture separation is achieved through a cryogenic gas separation process.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Multiple-Way Valves (AREA)
EP00120673A 1999-09-24 2000-09-21 Refrigerator for cryogenic gas separation system Expired - Lifetime EP1087195B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP27024599 1999-09-24
JP27024599A JP3584186B2 (ja) 1999-09-24 1999-09-24 深冷ガス分離装置

Publications (3)

Publication Number Publication Date
EP1087195A2 EP1087195A2 (en) 2001-03-28
EP1087195A3 EP1087195A3 (en) 2002-10-02
EP1087195B1 true EP1087195B1 (en) 2006-11-22

Family

ID=17483579

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00120673A Expired - Lifetime EP1087195B1 (en) 1999-09-24 2000-09-21 Refrigerator for cryogenic gas separation system

Country Status (8)

Country Link
EP (1) EP1087195B1 (ja)
JP (1) JP3584186B2 (ja)
KR (1) KR100647965B1 (ja)
CN (1) CN1158514C (ja)
AT (1) ATE346271T1 (ja)
DE (1) DE60031931T2 (ja)
ES (1) ES2273642T3 (ja)
TW (1) TW477891B (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5609925A (en) * 1995-12-04 1997-03-11 Dow Corning Corporation Curing hydrogen silsesquioxane resin with an electron beam
US6269658B1 (en) * 2000-06-28 2001-08-07 Praxair Technology, Inc. Cryogenic rectification system with pulse tube refrigeration
JP4601215B2 (ja) * 2001-07-16 2010-12-22 三洋電機株式会社 極低温冷凍装置
GB2383117B (en) * 2001-12-11 2005-06-15 Oxford Magnet Tech Pulse tube refrigerator
JP6767291B2 (ja) * 2017-03-13 2020-10-14 住友重機械工業株式会社 極低温冷凍機

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2155925B1 (ja) * 1971-10-15 1974-05-31 Bertin & Cie
JPS5986871A (ja) * 1982-11-10 1984-05-19 株式会社日立製作所 冷凍装置用膨脹機
JPH0668422B2 (ja) * 1986-02-25 1994-08-31 岩谷産業株式会社 冷凍機
JPH0933124A (ja) * 1995-05-12 1997-02-07 Aisin Seiki Co Ltd 多段型パルス管冷凍機
JPH08303887A (ja) * 1995-05-12 1996-11-22 Aisin Seiki Co Ltd パルス管冷凍機の高低圧切替え機構
US5901737A (en) * 1996-06-24 1999-05-11 Yaron; Ran Rotary valve having a fluid bearing
FR2751060B1 (fr) * 1996-07-09 1998-09-25 Air Liquide Procede et installation de distillation cryogenique d'un melange gazeux
JP2877094B2 (ja) * 1996-09-13 1999-03-31 ダイキン工業株式会社 極低温冷凍機及びその制御方法
JP3163024B2 (ja) * 1997-01-14 2001-05-08 エア・ウォーター株式会社 空気分離装置
US6269658B1 (en) * 2000-06-28 2001-08-07 Praxair Technology, Inc. Cryogenic rectification system with pulse tube refrigeration

Also Published As

Publication number Publication date
ES2273642T3 (es) 2007-05-16
JP3584186B2 (ja) 2004-11-04
EP1087195A3 (en) 2002-10-02
JP2001091079A (ja) 2001-04-06
KR20010067201A (ko) 2001-07-12
KR100647965B1 (ko) 2006-11-17
CN1290845A (zh) 2001-04-11
DE60031931D1 (de) 2007-01-04
EP1087195A2 (en) 2001-03-28
TW477891B (en) 2002-03-01
ATE346271T1 (de) 2006-12-15
CN1158514C (zh) 2004-07-21
DE60031931T2 (de) 2007-03-15

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