TW477891B - Cryogenic gas separation system - Google Patents

Cryogenic gas separation system Download PDF

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Publication number
TW477891B
TW477891B TW089119550A TW89119550A TW477891B TW 477891 B TW477891 B TW 477891B TW 089119550 A TW089119550 A TW 089119550A TW 89119550 A TW89119550 A TW 89119550A TW 477891 B TW477891 B TW 477891B
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TW
Taiwan
Prior art keywords
ports
refrigerator
rotor
rotary valve
gas separation
Prior art date
Application number
TW089119550A
Other languages
Chinese (zh)
Inventor
Atsushi Miyamoto
Shingo Kunitani
Original Assignee
Air Water Inc
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Publication of TW477891B publication Critical patent/TW477891B/en

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04763Start-up or control of the process; Details of the apparatus used
    • F25J3/04866Construction and layout of air fractionation equipments, e.g. valves, machines
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F25B9/145Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04278Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using external refrigeration units, e.g. closed mechanical or regenerative refrigeration units
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/044Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a single pressure main column system only
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00Gas cycle refrigeration machines
    • F25B2309/14Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1408Pulse-tube cycles with pulse tube having U-turn or L-turn type geometrical arrangements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00Gas cycle refrigeration machines
    • F25B2309/14Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1418Pulse-tube cycles with valves in gas supply and return lines
    • F25B2309/14181Pulse-tube cycles with valves in gas supply and return lines the valves being of the rotary type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00Gas cycle refrigeration machines
    • F25B2309/14Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1424Pulse tubes with basic schematic including an orifice and a reservoir
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2240/00Processes or apparatus involving steps for expanding of process streams
    • F25J2240/40Expansion without extracting work, i.e. isenthalpic throttling, e.g. JT valve, regulating valve or venturi, or isentropic nozzle, e.g. Laval
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2270/00Refrigeration techniques used
    • F25J2270/90External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration
    • F25J2270/908External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration by regenerative chillers, i.e. oscillating or dynamic systems, e.g. Stirling refrigerator, thermoelectric ("Peltier") or magnetic refrigeration
    • F25J2270/91External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration by regenerative chillers, i.e. oscillating or dynamic systems, e.g. Stirling refrigerator, thermoelectric ("Peltier") or magnetic refrigeration using pulse tube refrigeration

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Multiple-Way Valves (AREA)

Abstract

A cryogenic gas separation system comprises a refrigerator and utilizes cold produced by the refrigerator as a cold source for separation of a gas. The refrigerator incorporates a rotary valve which comprises a rotary element rotatable about an axis thereof and having a circular cross section perpendicular to the axis, and a housing accommodating the rotary element in a rotatable manner. The rotary element has a plurality of ports provided in an outer peripheral portion thereof, the housing with a plurality of ports provided in a peripheral wall thereof in association with the ports of the rotary element, the rotary valve being operative to be switched between a position where predetermined ones of the ports of the rotary element are aligned with corresponding ones of the ports of the housing for communication therebetween and a position where the predetermined ones of the ports of the rotary element are displaced in non-alignment with the corresponding ones of the ports of the housing for non-communication therebetween by rotation of the rotary element. The valve incorporated in the refrigerator has a smaller size and an extended service, and the cryogenic gas separation system can obtain a sufficient amount of cold with the use of the refrigerator.

Description

4//891 五、發明說明(l) 【發明所屬技術領域】 本發明係有關於利用自該冷凍機所得到人 、 氣體分離裝置。 ~ 之低溫 【習知技術】 關於利用He冷凍機之低溫方式之空氣分 願平9-4839號、特願平9 —5429號、特願平9_54^號,=特 驅動以在這些使用之脈波管冷凍機為代表之小型=$ = 了 需要壓力振動源,視情況需要相位控制裝置。又了 ^、士, 壓力振動源、相位控制裝置,為了控制動作氣妒 ^些 ^機,有在壓力振動源上使用壓縮機91+兩㈣換 ,在相位控制裝置上使用兩個緩' 換闊⑽,的。在圖24,97係儲冷器,98係脈=兩個切 照嚴iiirm為了令高效率驅動冷束機,按 t,、某疋之循裱開閉,但是該循環一般係數〜 M —般使用電磁閥或圖25所示小型之平面密封型 η广平面密封型旋轉閥在構造上設置了兩個通口 通口 102、103以連通流路104連通)之轉子101 個通口 1〇6〜108之定子105面接觸,利用馬達109 n驅動轉子101轉動,切換各通口1〇2、⑴、 10R、查、s切換^成如圖25所示之將定子105之兩通口107、 之狀怨和如圖2 6所示之將定子丨〇 5之兩通口丨〇 6、4 // 891 V. Description of the invention (l) [Technical field to which the invention belongs] The present invention relates to the use of human and gas separation devices obtained from the refrigerator. ~ Low temperature [Knowledge technology] About the air temperature of He freezer using the low temperature method No. 9-4839, No. 9-5429, No. 9_54 ^, special drive in the pulse of these uses The wave tube freezer is represented by a small size = $ = a pressure vibration source is required, and a phase control device is required as appropriate. In addition, ^, Shi, pressure vibration source, phase control device, in order to control the movement of the air jealous ^ ^ ^ ^ ^ ^ machine, there are compressors 91+ on the pressure vibration source to use two exchange, on the phase control device using two slow 'change Broad and spacious. In Figure 24, 97 series coolers, 98 series pulses = two cuts according to strict iiirm In order to drive the cold beam machine with high efficiency, press t, a certain cycle to open and close, but the general coefficient of the cycle ~ M-general use Solenoid valve or small flat seal type η wide flat seal type rotary valve as shown in FIG. 25. The structure is provided with two ports (ports 102 and 103 communicating with the communication channel 104). 101 rotors 106 ~ The stator 105 of 108 is in surface contact, and the rotor 101 is driven by the motor 109 n to rotate, and the ports 10, 2, 10, 10R, and s are switched. As shown in FIG. 25, the two ports 107 and 105 of the stator 105 are switched. Resentment and the two ports of the stator as shown in Figure 26

第4頁 477891 五、發明說明(2) _ 107連通之狀態)。於是,因圖25所示平面密封型旋 將動作亂體切換為兩方向,在麼力振動源與相位 ΠΓΪ;1個即可。在圖25,110係將轉子⑻内以 令其自由轉動之外殼。 【發明要解決之課題】 為了冷;東機之大都化、其> φ 六曰儿 於 间效率化,需要將動作氣體大 :是及設置複雜之相位控= 換閥係::考!:;性可:望::那些要求而且所需之切 求,尚無法實現冷陳機二::闕:^令滿足上述之要 量心情;閱時、,伽咖大容 頻繁的高速動作之情況,壽 速動作。又’在令 控制裝置各.情況,為了將蜂*:耆降低。又,在設置相位 加閥數,冷凍機整體變大^立控制裝置複雜化,需要增 而,在切換閥上使用平游 動作氣體大容量化而増大通口;閱時,在為了將 雜之相位控制裝置而增加通口數:j:況,或為了採用複 1 01和定子105之接觸面積。 月况,需要增大轉子 因轉子m和定子m之接觸面積之壓力 之馬達109,閥整體變大。因、3 文大,需要扭力大 等級之比較小型之冷來機係實况只能開發冷柬性能數瓦Page 4 477891 V. Description of the invention (2) _ 107 connected state). Therefore, because the plane-sealed type of rotary screw shown in FIG. 25 switches the motion disorder into two directions, only one vibration source and phase ΠΓΪ can be used. In Fig. 25, 110 is a casing in which the rotor ⑻ is made to rotate freely. [Problems to be Solved by the Invention] For the sake of cooling; the capitalization of Dongji, and its efficiency of φ Liuyueer, the operating gas needs to be large: yes and complicated phase control = valve replacement system :: test! :; Sexuality: Hope :: Those requirements and needs cannot be achieved yet. Chen: 2: ^: ^ to meet the above-mentioned important mood; reading time, Gaga capacity frequent high-speed action Situation, life speed action. In order to reduce the number of bees *: 耆 in each case. In addition, when the number of phases and valves are set, the entire refrigerator becomes larger. The control device for the refrigerator is complicated, and it is necessary to increase the capacity. The use of the horizontal motion gas in the switching valve increases the capacity and enlarges the port. Phase control device to increase the number of ports: j: condition, or in order to use the contact area between the complex 01 and the stator 105. In the case of the moon, the motor 109 which increases the pressure of the rotor due to the contact area between the rotor m and the stator m increases the overall valve size. Due to the large size of 3 texts, a large torque is required. The relatively small grade of the cooler machine can only be developed with a performance of several watts.

477891477891

五、發明說明(3) 因而,在使用了習知之小型冷凍機之空 寒冷量不足,在別的冷熱源上,必須併用^ ^波置, 等,費用上漲。 貝併用例如膨脹渦輪機 目的在於提 、壽命長之 本發明係鑑於上述之情況而想出來的,其 供一種低溫氣體分離裝置,藉著使用具有小^ 切換閥之冷凍機,使得可得到充分之寒冷量。 【解決課題 為了達 低溫氣體分 閥由以軸心 子内設成可 面設置多個. 之多個通口 之通口和與 狀態,及脫 態,將自該 本發明之第 使用了旋轉 之水平截面 之外殼所構 之内周面設 動,使得切 對正而令該 之目的, ,具備使 而旋轉之 由轉動之 而且在外 該轉子轉 之該外殼 正的情況 所得到之 係係提供 /東機,該 轉子和將 該轉子之 凹部對應 轉子之凹 與其對應 之方式 成上述 離裝置 為中心 令其自 通口 , ,藉著 其對應 離該對 冷凍機 二要旨 閥之冷 圓形之 成,在 置和該 換為令 凹部和 本發明 用了旋 水平截 外殼所 殼之内 動,使 之通口 而將兩 冷熱作 一種低 旋轉閥 該轉子 外周面 之多個 部和與 之通口 之第一 轉閥之 面圓形 構成, 周面設 得切換 對正而 通口設 為氣體 溫氣體 由以軸 内設成 設置凹 通口 , 其對應 連通之 要旨係 冷凍機 之轉子 在該轉 置和該 為令轉 令兩通 為非連 分離之 分離裝 心為中 可令其 部’而 藉著該 之該外 狀態, 提供一種 ,該旋轉 和將該轉 子之外周 通口對應 子之既定 口連通之 通之狀 冷熱源; 置,具備 心而旋轉 自由轉動 且在外殼 轉子轉 殼之通口 及脫離該V. Description of the invention (3) Therefore, the amount of coldness in the air of the conventional small freezer is insufficient, and other cold and heat sources must be used together, and the cost increases. The present invention, which uses an expansion turbine for the purpose of improving the long life, was conceived in view of the above situation, and provides a low-temperature gas separation device. By using a refrigerator with a small switching valve, sufficient cold can be obtained. the amount. [Solving the problem In order to achieve a low temperature gas sub-valve, a plurality of ports, and states, and out-of-states are provided in the shaft center so that a plurality of surfaces can be provided on the surface. The inner peripheral surface of the shell with a horizontal cross section is set so that the purpose of tangential alignment is provided. The system is provided by the situation that the shell is rotated by the rotation and the outer shell is turned by the rotor. Dongji, the rotor and the concave part of the rotor correspond to the concave part of the rotor and the corresponding way to make the self-opening port as the center from the above device. In order to make the recess and the present invention use a rotating horizontal cut-out shell, the two parts of the outer peripheral surface of the rotor and the two openings of the rotor are made of cold and hot as a low-rotation valve. The surface of the first rotary valve is circular. The peripheral surface is set to switch the alignment and the port is set to gas temperature. The gas is set in the shaft to set a recessed port. The corresponding communication is the rotor of the refrigerator. The transposition and the separation to make the two links are non-continuously separated, and the center can make them part, and by the external state, a kind of rotation and the corresponding peripheral opening of the rotor are provided. The cooling and heating source is connected to the opening of the predetermined port; it is equipped with the center and rotates freely and rotates at the opening of the rotor rotor casing and away from the opening.

第6頁 4/7891 五、發明說明(4) =正的情死而將該凹部與其對應之通口設為非連通之狀 將自4冷凍機所得到之冷熱作為氣體分離之冷熱源。 機^ 2,本發明之第一種低溫氣體分離裝置係將自該冷凍 機,得到之冷熱作為氣體分離之冷熱源之裝置,在該冷凍 之使用在(以軸心為中心而旋轉之水平截面圓形之)轉子 周面及外殼之内周面各自設置了多個通口之旋轉閥。 門疋、,該冷凍機因使用多個通口在軸心方向獨立之旋轉 二通口直桉之擴大或通口數之增加所引起之轉子直徑之 =變成極小,旋轉闕可小型化、長壽命化。;=,該 ζ L機和習知之電磁閥或平面密封型旋轉閥相比,可容易 古=亍大口徑化·、多通口化,可實現大型化、大容量化以及 尚效率化。例如,若依據該冷凍機,可提供數上 =冷珠機。當然,也可應用於習知之數瓦等級之小型冷 乂機。而,.藉著將該冷凍機大型化、大容量化以及高效率 $二不使用別的裝置’本發明之第一種低溫氣體分離裝置 =轉,可降低費用。又,本發明之第二種低溫氣體分 分離裝置所使用之冷涞機一樣之作用·效果/因= 明之第二種低溫氣體分離裝置也和本發明之第一種低溫氣 體分離裝置一樣的降低費用。在這種本發明之第一與第二 種低μ氣體分離裝置使用之冷;東機上可列舉脈波管冷)東 機、GM(Gifford-McMahon)冷凍機、8〇1¥&7冷;東機 /但是 未限定為這些冷凍機,只要係需要藉著切換閥切換動作 體的冷凍機,不管其種類。此外,在本發明,「水平截面Page 6 4/7891 V. Explanation of the invention (4) = Positive affection and the recess and its corresponding port are made non-connected. The cold and heat obtained from the 4 freezer is used as a cold and heat source for gas separation. Machine ^ 2. The first low-temperature gas separation device of the present invention is a device that uses the cold and heat obtained from the refrigerator as a cold and heat source for gas separation. The freezing is used in a horizontal section that rotates with the axis as the center. Rotary valves with a plurality of ports are respectively provided on the rotor peripheral surface and the inner peripheral surface of the casing. The door diameter, the diameter of the rotor caused by the expansion of the two-port rotary shaft or the increase in the number of ports due to the use of multiple ports that are independent of the rotation in the axial direction of the freezer are extremely small, and the rotary tube can be miniaturized and long. Life span. ; = This ζ L machine can be easily compared with a conventional solenoid valve or a plane-sealed rotary valve. The large-diameter, multi-port, and large-scale, large-capacity, and efficiency can be achieved. For example, if this refrigerator is used, the number of cold bead machines can be provided. Of course, it can also be applied to small-scale cold heading machines of the conventional multi-watt class. However, by increasing the size, capacity, and efficiency of the refrigerator, the second type of cryogenic gas separation device according to the present invention can reduce costs. In addition, the same effect, effect / cause as the cold heading machine used in the second low-temperature gas separation device of the present invention is the same as that of the second low-temperature gas separation device of the present invention. cost. The cold used in the first and second low-μ gas separation devices of the present invention; pulse-tube cooling can be listed on the east machine; east machine, GM (Gifford-McMahon) refrigerator, 801 ¥ & 7 Cold; Tokiji / but not limited to these refrigerators, as long as the refrigerators need to be switched by the switching valve, regardless of the type. In addition, in the present invention, "the horizontal section

第7頁 477891 五、發明說明(5) 圓形之轉子」意指在垂直豎立轉子之情況將轉子之 面形狀成為圓形在令轉子水平的橫躺之情況轉子 之垂直截面形狀成為®形。 使用圖1所示旋轉閥A詳細說明在本發明之低溫氣 離裝置使用之冷凍機之旋轉閥之構造、作用、效果。本二 轉閥A具備以軸心為中心之圓柱形之轉子1、將該轉子丨内疋 設成可令其自由轉動之圓筒形之外殼2、將該轉子丨軸支成 自由轉動之軸承3、3以及令該轉子丨朝一方向轉動之馬達 4。又,在該轉子1之外周面形成8個通口 5~12(這8個通口 5〜12之中,兩通口5、6、兩通口7、8、兩通口9、1〇以及 兩通口 11、12用連通流路13〜16連通),而且在和該各通口 5〜12對應之該外殼2之部分鑽設6個通口丨7〜22 (這6個通口 | 17〜22之中,通口 17和通口 5、通口 18和兩通口6、9、通口 19和通口 10、通口 20和通口 7、通口 21和通口 11、通口 22 和雨通口 8。、1 2各自對應)°而’在圖1所示之狀態,兩通 口5、17、兩通口 6、18、雨通口 7、20以及兩通口 8、22各 自連通,其他的通口 9〜12、19、21處於非連通狀態。又, 轉子1轉動,變成圖2所示之狀怨時,兩通口 9、18、兩通 口 10、19、兩通口 11、21以及兩通口 12、22各自連通,其 他的通口 5〜8、17、20處於奍連通狀態。又,轉子1轉動, 變成圖3所示之狀態時,各通口 1 7〜2 2都變成非連通狀恶。 此外,轉子1係圓筒形(即中空形狀)或是圓柱形(即中 實形狀)都可,轉子1之轉動矸利用馬達4以外之各種裝 置。又,也可形成凹部(參照圖7 ),替代通口 5〜1 2,所連 第8胃 //891 五、發明說明(6) 接之通口 5〜12不必相鄰。又,在外殼2鑽設之通口 17〜22未 於外殼2之同一側面也可。又,將軸承3設置於轉子1之 $ ^ ’但是只設置於轉子1之一端也可,在軸承3上不限滾 。輛承’可使用滑動軸承等一般之軸承。又,在〇 〇 4上也 可使用自由反轉型。又,馬達4之轉動係均勻或是不連續 的變化也可。 圖4所示脈波管冷凍機121係在圖24所示之脈波管冷凍 、,使用一個旋轉閥B(構造和圖i所示旋轉閥A一樣)替代4 :切換閥93〜96的。但,旋轉_因需要具有和上述各切換 ^93〜96 —樣之作用,各通口5〜12、17〜22之形狀、個等 和旋轉閥A不同。 寺 在上述旋轉閥A、B,將轉子1之直徑小型化時’因 面積變小,可使作用於轉子i之壓力負載之影響變成極 門^ ^專子1之外徑之周速減少,在轉子1和外殼2之 圖卜圖3未示)之情況’可令該密封之摩捧 矩減少。而i’因壓力負載減少與密封之 :擦弓J起之產生扭矩減少’可令馬達4所需之 v。結果,可使用小型且高速之馬達4。又, 速減少’彳實現(設置於轉子i和外殼2之間 化與轉子1之高轉速化。 之封長哥命 載i;::用軸承3支撐ΐ用於轉子1之軸向與徑向之負 載,逖可使作用於馬達4之負載減之負 力變成極小。又,轉子!承受之,力备::馬達4所需之動 轴承3而更減少。這轉些有助於轉^力血負樓轉子1之 丁丄興馬達4小型化,可使Page 7 477891 V. Description of the invention (5) Round rotor "means that when the rotor is erected vertically, the surface shape of the rotor is round, and when the rotor is horizontally laid horizontally, the vertical cross-sectional shape of the rotor is ®. The structure, function, and effect of the rotary valve of the refrigerator used in the low-temperature gas separation device of the present invention will be described in detail using the rotary valve A shown in FIG. 1. The two rotary valve A is provided with a cylindrical rotor with a shaft center as the center 1. The rotor is provided with a cylindrical housing that can be rotated freely 2. The rotor is supported with a shaft that can rotate freely 3 and 3 and a motor 4 for rotating the rotor in one direction. In addition, eight ports 5 to 12 are formed on the outer peripheral surface of the rotor 1 (of the eight ports 5 to 12, two ports 5, 6, two ports 7, 8, and two ports 9, 1〇 And the two ports 11 and 12 communicate with each other through communication channels 13 to 16), and 6 ports are drilled in the part of the housing 2 corresponding to the ports 5 to 12 (the 6 ports Among 17 ~ 22, port 17 and port 5, port 18 and port 6, 9, port 19 and port 10, port 20 and port 7, port 21 and port 11, Port 22 corresponds to rain port 8., 1 and 2 respectively) ° and 'in the state shown in Figure 1, two ports 5, 17, two ports 6, 18, rain ports 7, 20, and two ports 8, 22 are connected, and the other ports 9 ~ 12, 19, 21 are in a non-connected state. In addition, when the rotor 1 rotates and becomes as shown in FIG. 2, the two ports 9, 18, two ports 10, 19, two ports 11, 21, and two ports 12, 22 communicate with each other, and the other ports 5 ~ 8, 17, 20 are in a state of 奍 communication. When the rotor 1 rotates to the state shown in Fig. 3, each of the ports 17 to 22 becomes non-connected. In addition, the rotor 1 may be cylindrical (i.e., a hollow shape) or cylindrical (i.e., a solid shape). The rotor 1 may be rotated by various means other than the motor 4. In addition, a recessed portion (refer to FIG. 7) may be formed, instead of the openings 5 to 12, and the connected 8th stomach // 891 5. Description of the invention (6) The openings 5 to 12 need not be adjacent. The openings 17 to 22 drilled in the casing 2 may not be on the same side as the casing 2. In addition, the bearing 3 may be provided on the rotor 1 but it may be provided only on one end of the rotor 1. Rolling on the bearing 3 is not limited. The bearing can be a general bearing such as a plain bearing. It is also possible to use a free-reversal type for 〇 4. The rotation of the motor 4 may be changed uniformly or discontinuously. The pulse tube refrigerator 121 shown in FIG. 4 is based on the pulse tube refrigerator shown in FIG. 24 and uses a rotary valve B (the structure is the same as that of the rotary valve A shown in FIG. I) instead of 4: switching valves 93 to 96. However, the rotary valve needs to have the same effect as the above-mentioned switching ^ 93 ~ 96, and the shape and number of each port 5 ~ 12, 17 ~ 22 are different from the rotary valve A. In the above-mentioned rotary valves A and B, when the diameter of the rotor 1 is miniaturized, the area becomes smaller, and the influence of the pressure load on the rotor i can be turned into a gate ^ ^ The peripheral speed of the outer diameter of the son 1 is reduced. In the case of the rotor 1 and the casing 2 (not shown in FIG. 3), the friction moment of the seal can be reduced. And i ′ is reduced due to the pressure load and sealed: the torque generated by wiping the bow J is reduced ′, which can make v required by the motor 4. As a result, a small and high-speed motor 4 can be used. In addition, the speed reduction is realized (it is installed between the rotor i and the housing 2 and the high speed of the rotor 1 is increased. The seal elder life load i; To the load, I can make the negative force of the load acting on the motor 4 extremely small. Also, the rotor! Withstand it, the force is prepared: The moving bearing 3 required by the motor 4 is further reduced. ^ Ding Xingxing Motor 4 of Rotor 1

五、發明說明(7) 旋轉閥A、B整體變小。 由^^ it 匕 lj*、 置使用之旋造上之優點’在本發明之低溫氣體分離裝 容易進行動容易的進行通口直徑之大徑化,隨著可 現使用旋轉==之大 •運轉頻率之高速化,可實 體分離裝置你田、凍機之大型化。又,在本發明之低溫氣 容易的變成福Μ之旋轉閥,因可容易的令通口數增加,可 來機之高if目位控!1穿:置’可實現使用旋轉闕之冷 的裝置,办^。而且,藉著將冷凍機大型化,不使用別 圖5戶C置就可運#° 入空氣分離與-^體分離裝置係將圖4所示冷凍機1 2 1裝 機121用於原式分餾塔之氮氣產生裝置)的,該冷凍 溫至既定壓、六、f氣之冷卻。即,用原料空氣壓縮機1 22升 卻至常溫附^ ί t之原料空氣用水冷式熱交換器123等冷 去空氣中之Η /、rn \用M ·⑶2除去裝置1 24等大致完全除 屌料* «2 、〇2後’供給冷盒125。在該冷盒125内, 之熱Λ換器126,在此冷卻至液化溫度,再 旦辦I Z 之冷熱取出部127,在此令原料空氣之液化 =館塔128之下部。該冷柬機m之冷卻性能 献二:皿2 5接受來自大氣之侵入熱與主熱交換器1 2 6之傳 熱抽失以及在以液體取出產品時之液化能量。 ^ i、。亥为館i合1 2 8之下部之原料空氣之中,氣體狀之 工氣在分館塔128内上升,液體空氣儲存於分餾塔128之底 部後’作為位於分鶴塔丨2 8之上方之凝結器丨2 9之冷媒供 給。在該凝結器129 ’令分餾塔128之上部之氮氣液化後,V. Description of the invention (7) Rotary valves A and B become smaller as a whole. The advantages of ^^ it dagger lj *, the use of the spinner 'in the low-temperature gas separation device of the present invention is easy to move, and the diameter of the port can be increased. With the use of the current rotation == large • The high-speed operation frequency can be used to physically separate your field and refrigerator. In addition, in the present invention, the low-temperature gas can easily be turned into a rotary valve for FuM. Because the number of ports can be easily increased, the machine can be controlled if the position is high! Device, do ^. In addition, by increasing the size of the refrigerator, it is possible to transport it without using the C unit in Figure 5 #. The air separation and separation system is equipped with the refrigerator 1 2 1 installed 121 shown in FIG. 4 for the original fractionation. Tower nitrogen gas generating device), the freezing temperature is cooled to a predetermined pressure, six, f gas. That is, the raw material air compressor 1, 22 liters is cooled to room temperature, and the raw material air is cooled with water-cooled heat exchanger 123, etc. /, rn \ M \ CD2 removal device 1 24, etc. are almost completely removed Material * «2, 〇2 'is supplied to the cold box 125. In the cold box 125, the heat converter 126 is cooled to the liquefaction temperature, and the cold and hot extraction section 127 of I Z is set, where the liquefaction of the raw material air is equal to the lower part of the hall tower 128. The cooling performance of the cold cooling machine m is presented as follows: the dish 25 receives the invasion heat from the atmosphere and the heat transfer loss of the main heat exchanger 12 26 and the liquefaction energy when the product is taken out as a liquid. ^ i ,. In the raw material air in the lower part of the hall, the gaseous working gas rises in the branch tower 128, and the liquid air is stored at the bottom of the fractionation tower 128, and is located above the branch crane tower. Refrigerant supply for condenser 丨 29. After the condenser 129 'liquefies the nitrogen in the upper part of the fractionation column 128,

477891 五、發明說明(8) 作為回流液回到分餾塔1 2 8之上部。| ^ 氣體令分餾後,令氮氣自空氣分利用该回流液和上升 部取出,用主熱交換器126回收由分餘塔128之上 取出。在圖上,130係膨脹閥,ηι孫姑 > 甘于產口口虱氣 丄J丄係排軋取出流路。 在空氣分離裝置,將圖4所示冷涑機121用於 之冷卻(用脈波管冷東機121冷卻自主熱交換器126出 孔 原料空氣之全部或一部分),但是未限定如此,冷卻產品 氮氣、排氣、分餾塔1 28内部之氣體或液體空氣也可。扣 又’冷卻主熱交換器126入口之原料空氣、主熱交換器126 出口之產品氮氣或排氣冷卻並液化後,將該液化氣體1供給 冷盒125内之低溫部也可。又,在脈波管冷凍機丨21之^ 量不足之情況,自裝置外部供給液態氮或液態氧等,^ ^ 補充冷熱不足量也可。 ' 又’在圖5所示低溫氣體分離裝置,空氣分離裝置係 單式分餾塔之氮氣產生裝置,但是係一般之複式分^塔之 氮氣產生裝置也可。又,圖5所示低溫氣體分離裝置係將 圖4所示脈波管冷凍機1 2 1裝入空氣分離裝置的,但是除了 空氣分離以外,也只要混合氣體之分離方法係低溫氣體分 離,也可用於各種混合氣體之分離。 【發明之實施例】 其次依照圖面詳細說明本發明之實施例。 圖6表示在本發明之低溫氣體分離裝置使用之脈波管 冷凍機之一實施例。在本實施例,在圖24所示脈波管冷束477891 V. Description of the invention (8) Return to the upper part of fractionation column 1 2 8 as reflux liquid. ^ After the gas is fractionated, nitrogen is taken out of the air by using the reflux liquid and the ascending portion, and recovered by the main heat exchanger 126 and taken out from the residue column 128. In the figure, the 130 series expansion valve, 姑 Sun Gu > is willing to produce mouth lice 丄 J 丄 series discharge and take out the flow path. In the air separation device, the cold heading machine 121 shown in FIG. 4 is used for cooling (the pulse tube cold machine 121 is used to cool all or part of the raw material air in the outlet of the main heat exchanger 126), but it is not limited to this. Nitrogen, exhaust, gas or liquid air inside the fractionation tower 1 28 may also be used. After cooling the raw air at the inlet of the main heat exchanger 126 and the nitrogen or exhaust gas at the outlet of the main heat exchanger 126 and liquefying it, the liquefied gas 1 may be supplied to the low-temperature portion in the cold box 125. In addition, in the case where the amount of the pulse tube freezer 21 is insufficient, liquid nitrogen or liquid oxygen is supplied from the outside of the device, and it is also possible to supplement the insufficient amount of cold and heat. Also, as shown in FIG. 5, the low-temperature gas separation device and the air separation device are nitrogen generation devices of a single-type fractionation column, but they may be nitrogen generation devices of a general double-type fractionation column. The low-temperature gas separation device shown in FIG. 5 is a pulse wave tube refrigerator 1 2 1 shown in FIG. 4 installed in the air separation device. However, in addition to air separation, as long as the separation method of the mixed gas is low-temperature gas separation, Can be used for the separation of various mixed gases. [Embodiment of the Invention] Next, an embodiment of the present invention will be described in detail with reference to the drawings. Fig. 6 shows an embodiment of a pulse tube refrigerator used in the cryogenic gas separation device of the present invention. In this embodiment, the cold beam of the pulse tube shown in FIG. 24

第11頁 / 〇y l 五、發明說明(9)Page 11 / 〇y l 5. Description of the invention (9)

Ϊ : Ϊ ΐ切換闕上使用旋轉閥C。除此以外之部分和圖24 脈波管冷來機一樣,對於相同之部分賦二T 該:轉閥C係在該旋轉閥A之圓柱形之轉子 =成—個凹部25(參照圖7),而且在圓筒形之外殼2之= 27(^=左側面)鑽設和該凹部25連通之兩個通口 26、 凹邻。*,轉子1旋轉,變成圖8所示之狀態時, Λ 26、27連通,動作氣體就流動。又,轉子 ==轉動,變成圖9所示之狀態時,凹部25和兩= m文ΐ ί連通狀_ ’動作氣體就不流動。Λ外,在本 Λ & ij二在全部之切換閥使用旋轉閥c ,但是未限定如 此,使得只在一個旋轉閥使用旋轉閥◦也可。 “ii實施例,旋轉閥c之凹部25在軸心方向之長度擴 2:;之增加所引起之轉子1之直徑之擴大變成極小:、 旋轉閥可小型化、長壽命化。因@,機 容量化以及高效率化。 主化大 圖10係表示在該旋轉閥c使用之轉子丄之變形例。在本 例,轉子1之外周面之中,在和該外殼2之兩通口26、 應之部分形成兩個通口28、29,兩通口28、29以連通流路 30連通(麥照圖11)。在本例,也具有和上述 作用·效果。 、 像 圖1 2係表示纟本發明之低溫氣體分離裝置使用之脈波 管冷束機之別的實施例之說明圖。在本實施例,係在圖“ 所不之脈波官冷凍機,使用旋轉閥D替代切換閥93、“及Ϊ: Rotary valve C is used for Ϊ ΐ switching 阙. The other parts are the same as the pulse tube cooler in Fig. 24, and two T are assigned to the same parts. The rotary valve C is a cylindrical rotor of the rotary valve A = a recess 25 (refer to Figure 7). In addition, two through holes 26, which are in communication with the concave portion 25, are drilled in the cylindrical casing 2 = 27 (^ = left side surface), and are adjacent to each other. *, When the rotor 1 rotates to the state shown in FIG. 8, Λ 26 and 27 communicate with each other, and the operating gas flows. In addition, when the rotor == rotates and becomes the state shown in FIG. 9, the recessed portion 25 and the two portions are connected to each other and the working gas does not flow. In addition to Λ, in this Λ & ij, the rotary valve c is used in all the switching valves, but it is not limited to this, so that the rotary valve may be used in only one rotary valve. "Ii embodiment, the length of the recessed portion 25 of the rotary valve c in the axial direction is increased by 2 :; the increase in the diameter of the rotor 1 caused by the increase becomes extremely small :, the rotary valve can be miniaturized and extended in life. Because @ , 机The capacity is increased and the efficiency is increased. FIG. 10 shows a modified example of the rotor 丄 used in the rotary valve c. In this example, the outer peripheral surface of the rotor 1 is connected to the two ports 26 and 26 of the outer casing 2. Two ports 28 and 29 are formed in the corresponding part, and the two ports 28 and 29 communicate with each other through the communication flow path 30 (Mai Zhao FIG. 11). In this example, it also has the same functions and effects as above.说明 An illustration of another embodiment of the pulse wave tube cold beam machine used in the cryogenic gas separation device of the present invention. In this embodiment, it is shown in the diagram "pulse wave official refrigerator", using a rotary valve D instead of a switching valve 93, "and

477891 五 、發明說明(ίο) 切換閥95、96。除此以外之部分和圖24所示脈波管冷凍機 一樣’對於相同之部分賦與相同之符號。 该旋轉閥D係在該旋轉閥a之轉子1之外周面之一側面 (在圖面為左侧面)形成一個凹部3 2,在另一侧面(在圖面 為右側面)形成一個凹部33(參照圖13)。又,在外殼2之一 側面(在圖面為左側面·)鑽設和該凹部32連通之兩個通口 34、35 ’而且鑽設和該凹部32連通之兩個通口 35、36(參 照圖14)、。而,轉子1旋轉,變成圖14所示之狀態時,凹部 3 2彳兩通口 3 4、3 5連通,動作氣體就流動。此時,凹部3 3 和兩^ π 3 5、3 6變成非連通狀態,動作氣體就不流動。 ^ 子1自此狀態轉動,變成圖1 5所示之狀態時,凹部 和:通口35、36連動,動作氣體就流動"匕時,凹部32 外兩5 It35變成非連通狀態,動作氣體就不流動。此 :用I二:Γ列使用2個旋轉,,但是未限定如此,使得 :用:二轉閥D替代切換闊93、94及切換闕95、96也 當it:;二和該旋轉闕A—樣之作用·效果。 Η 16係表不在旋轉閥£使用之轉子i。 周面之-側面(在圖面為左# > I轉子1在其外 側面(在圖面為右侧面)形:一面個):卜 轉閥E之外殼2之一侧面(在圖面 9。又」在構成該旋 連通之兩個通口 4 〇、4 1 (參照圖1 7 ), 鑽设和該凹部3 8 連通之兩個通口42、43(參^二18):=且鑽設和該凹部39 情況’也有和使用該旋轉閥D 一樣之在使用本旋轉閥E之 圖1 9係表示在本發明之低溫氣體分離·壯效果。 刀離裝置使用之脈波477891 V. Description of the invention (ίο) Switching valves 95, 96. The other parts are the same as those of the pulse tube refrigerator shown in Fig. 24 ', and the same parts are assigned the same symbols. The rotary valve D is formed with a recessed portion 32 on one side surface (left side in the drawing) of the outer peripheral surface of the rotor 1 of the rotary valve a, and a recessed portion 33 is formed on the other side (right side in the drawing). (Refer to Figure 13). Also, two through holes 34 and 35 ′ communicating with the recessed portion 32 are drilled on one side surface (left side in the drawing) of the housing 2 and two through holes 35 and 36 communicated with the recessed portion 32 are drilled ( (See Figure 14). On the other hand, when the rotor 1 rotates to the state shown in FIG. 14, the recessed portions 32, 2 and the two ports 3 4, 3, 5 communicate with each other, and the operating gas flows. At this time, the recessed portions 3 3 and the two π π 3 5 and 36 are in a non-connected state, and the action gas does not flow. ^ When the child 1 rotates from this state to the state shown in Fig. 1, the recessed part is connected with: the openings 35 and 36, and the action gas flows. "Dagger, the two 5 It35 outside the recessed part 32 become disconnected, and the action gas It doesn't flow. This: I uses two rotations for the two rows: Γ, but it is not limited to this, so that: two switching valves D are used instead of switching widths 93 and 94 and switching 阙 95 and 96 as it :; two and the rotation 阙 A —The effect and effect of the same. Η The 16-series watch is not the rotor i used for the rotary valve. Circumferential surface-side (left in the drawing) I rotor 1 on its outer side (right side in the drawing) shape: one side): One side of the housing 2 of the rotary valve E (in the drawing 9. Also "In the two ports 4 0, 4 1 (refer to Fig. 17) constituting the screw connection, two ports 42 and 43 connected to the recess 3 8 are drilled (see ^ 2:18): = In addition, as shown in the case of the recess 39, the use of the rotary valve E is similar to the use of the rotary valve D. Fig. 19 shows the effect of separating and strengthening the low-temperature gas in the present invention.

477891 五、發明說明(11) 管冷凍機之另外的實施例之說明圖。在本實施例,係在圖 24所示之脈波管冷凍機,使用一個旋轉閥F替代4個切換閥 9 3〜9 6 (即,具有和圖4所示脈波管冷凍機一樣之構造)。^ 圖1 9 ’ 5 1係壓縮機,5 2係儲冷器,5 3係脈波管,5 4係高厨 、、爰衝槽,5 5係低壓側缓衝槽。又,5 6係將壓縮機5 1 ^低 壓侧和旋轉閥F之通口_75連通之管,57係將壓縮機51之高一 壓側和旋轉閥F之通口 77連通之管,58係將高壓側緩衝槽 54和旋轉閥F之通口78連通之管,59係將低壓側緩衝槽^ 和旋轉閥F之通口 8 〇連通之管。 該旋轉閥F如圖20所示,具備轉子(閥體)61,利用馬 達(圖上未示)向一方向旋轉,及外殼62,將該轉子η内 成可令其自由轉動。在圖20,6la係在轉子61形成之連結% 轴部6 1 a。6 3係將轉子6 1支撐成自由轉動之軸承,6 4係〇 環,6 5、6 6係蓋部。 在該轉子61在其外周面形成4個凹部71〜74。又,在今 外殼62在其外周面沿著該外殼62之縱向鑽設排成一列之^ 個通口 75〜80,這些各通口 75〜80和轉子61之各凹部71〜74 對應。即,轉子61之凹部71和外殼62之兩通口 76、77、凹 部72和兩通口 75、76、凹部73和兩通口 78、79、凹部74和 兩通口 7 9、8 0分別對應。又,該外殼6 2之通口 7 6和儲冷哭 52連通,通口 79和脈波管53連通。 說明這種脈波管冷凍機之動作之概略。首先,利用馬 達之轉動’將該外殼6 2之各通口 7 5〜7 7設為非連通狀維,… 將兩通口 7 9、8 0設為非連通狀態。此時,脈波管5 3内之壓477891 V. Description of the invention (11) An illustration of another embodiment of the tube refrigerator. In this embodiment, the pulse tube freezer shown in FIG. 24 uses one rotary valve F instead of the four switching valves 9 3 to 9 6 (that is, it has the same structure as the pulse tube freezer shown in FIG. 4. ). ^ Figure 1 9 ′ 5 1 series compressors, 5 2 series coolers, 5 3 series pulse wave tubes, 5 4 series Gao Chu, 爰 flushing tanks, 5 5 series low pressure side buffer tanks. In addition, 5 6 is a pipe connecting the low pressure side of the compressor 5 1 ^ to the port _75 of the rotary valve F, 57 is a pipe connecting the high pressure side of the compressor 51 to the port 77 of the rotary valve F, 58 It is a pipe that connects the high-pressure side buffer groove 54 and the port 78 of the rotary valve F, and 59 is a pipe that connects the low-pressure side buffer groove ^ and the port 80 of the rotary valve F. As shown in FIG. 20, the rotary valve F is provided with a rotor (valve body) 61, which is rotated in one direction by a motor (not shown), and a housing 62, and the rotor η is formed so that it can rotate freely. In FIG. 20, 6la is a coupling% shaft portion 6a formed in the rotor 61. The 6 3 series supports the rotor 6 1 as a freely rotating bearing, the 6 4 series 0 ring, and the 6 5 and 6 6 cover parts. The rotor 61 has four recessed portions 71 to 74 formed on its outer peripheral surface. In addition, the casing 62 is drilled in the outer peripheral surface thereof along the longitudinal direction of the casing 62 in a row of through holes 75 to 80, and these through holes 75 to 80 correspond to the recesses 71 to 74 of the rotor 61, respectively. That is, the recesses 71 of the rotor 61 and the two ports 76 and 77 of the housing 62, the recesses 72 and the two ports 75 and 76, the recesses 73 and the two ports 78 and 79, the recesses 74 and the two ports 7 9, 80, respectively correspond. In addition, the port 76 of the casing 62 is connected to the storage cold cry 52, and the port 79 is connected to the pulse tube 53. The outline of the operation of such a pulse tube refrigerator will be described. First, by using the rotation of the motor, the ports 7 5 to 7 7 of the casing 62 are set to a non-connected dimension, and the two ports 7 9 and 80 are set to a non-connected state. At this time, the pressure in the pulse wave tube 5 3

第14頁 477891 五、#明說明(12) -- 力變成和壓·縮機51之低壓側相同。接著,經由轉子61之凹 部73令兩通口78、79連通時(參照圖21),高壓側緩衝槽54 内之南壓冷媒氣體流入脈波管5 3之熱端後,脈波管5 3内之 氣體壓力上升至接近高壓側緩衝槽54之壓力附近為止。 其次,經由轉子61之凹部71令兩通口76、77連通時 (參照圖2 0 ),自壓縮機5 1之高壓侧供給高壓冷媒氣體,流 入脈波管53之冷端。此時,高壓冷媒氣體之流入壓力(壓"· 縮機5 1之高壓側之壓力)設為比高壓側緩衝槽5 4之壓力稍Page 14 477891 V. # 明 说明 (12)-The force becomes the same as the low-pressure side of the compression / reduction machine 51. Next, when the two ports 78 and 79 are communicated through the recessed portion 73 of the rotor 61 (see FIG. 21), the south pressure refrigerant gas in the high-pressure side buffer groove 54 flows into the hot end of the pulse tube 5 3, and then the pulse tube 5 3 The pressure of the internal gas rises until it approaches the pressure of the high-pressure-side buffer tank 54. Next, when the two ports 76 and 77 are communicated via the recessed portion 71 of the rotor 61 (see Fig. 20), a high-pressure refrigerant gas is supplied from the high-pressure side of the compressor 51 and flows into the cold end of the pulse tube 53. At this time, the inflow pressure of the high-pressure refrigerant gas (the pressure on the high-pressure side of the compressor 51) is set to be slightly higher than the pressure on the high-side buffer tank 54.

高,流入了脈波管53之熱端之高壓冷媒氣體馬上回到高壓 側緩衝槽5 4内。 其次,將兩通口 76、77及兩通口 78、79設為非連通相 態後,經由轉子61之凹部74令兩通口79、8〇連通時(參昭 圖22),因脈波管53之熱端之冷媒氣體流入(回到)低壓側 缓衝槽55,脈波管53内之壓力降低至低壓側緩衝槽“之厚 力為止。即,脈波管53内之高壓冷媒氣體膨脹至低壓側与 衝槽55之壓力為止,溫度降低,冷卻脈波管”之冷端側: 其次,經由轉子61之凹部72令兩通口75、76連通 (參照圖23),在脈波管53内膨脹之冷媒氣體向壓縮機51 $ 排出,而且低壓侧緩衝槽55之低壓冷媒氣體 波官5 3内。 照這樣完成一個循環,接 這樣循環工作,高壓冷媒氣體 此外,.在上述各實施例使 閉系也可,係開放系也可。又 著了個猶環重新開始。因照 不斷的膨脹而變成低壓。 用之脈波管冷凍機上,係密 ’係具有儲冷件的也可,係 477891 五、發明說明(13)High, the high-pressure refrigerant gas flowing into the hot end of the pulse wave tube 53 immediately returns to the high-pressure side buffer tank 54. Next, when the two-ports 76 and 77 and the two-ports 78 and 79 are in a non-connected phase state, when the two-ports 79 and 80 are connected through the recess 74 of the rotor 61 (see Fig. 22), the pulse wave The refrigerant gas at the hot end of the tube 53 flows into (returns to) the low-pressure side buffer tank 55, and the pressure in the pulse tube 53 decreases to the thickness of the low-pressure side buffer tank. That is, the high-pressure refrigerant gas in the pulse tube 53 It expands until the pressure on the low pressure side and the pressure in the groove 55, the temperature decreases, and the cold end side of the pulse wave tube is cooled: Next, the two ports 75 and 76 are communicated through the recessed portion 72 of the rotor 61 (see FIG. 23). The expanded refrigerant gas in the pipe 53 is discharged to the compressor 51 $, and the low-pressure refrigerant gas in the low-pressure side buffer tank 55 is inside the wave element 53. In this way, a cycle is completed, and a high-pressure refrigerant gas is used in this cycle. In addition, in the above embodiments, a closed system may be used, and an open system may be used. Once again, I started again. It becomes low pressure due to continuous expansion. In the pulse wave tube freezer used, it can be dense ’can be equipped with cold storage, 477891 V. Description of the invention (13)

未具儲冷件的也可。又,係間接冷卻方式也可,係直接冷 卻方式也可。 V 【發明之效果】 如上述所示,本發明之第一種低溫氣體分離裝置係將 自该冷凍機所得到之冷熱作為氣體分離之冷熱源之裝置, 在忒冷凍機’使用在(以軸心為中心而旋轉之水平截面圓 形轉子之外周面及外殼之内周面各自設置了多個通口 之旋轉閥。於是,該冷凍機因使用多個通口在軸心方向獨 立之旋轉閥,通口直徑之擴大或通口數之增加所引起之 子直徑f擴大變成極小,旋轉閥可小型化、長壽命化。其 結果,该冷凍機和習知之電磁閥或平面密封型旋轉、 =旦可容易,行大口徑化、多通口化,可實現大型化、大 ΐ及馬效率丨。例如,若依據該冷錢,可提供數 級之小型:H令凍機。當㉟,也可應用於習知之數瓦等 以及高效率:钱二❿’藉著將該冷來機大型化、大容量化 體分離裝置就可;;用別的裝置’本發明之第-種低溫氣 低溫氣體分離驴置η。χ ’本發明之第二種 種低溫氣體分二/斤使用之;'凍機也具有和本發明之第- 因而,本發明ίΐ置所使用之冷柬機一樣之作用·效果。 一種低溫氣I*八二種低溫氣體分離裝置也和本發明之第 /、版刀離裝置一樣的降低費用。It can also be used without cold storage. It is also possible to use an indirect cooling method or a direct cooling method. V [Effects of the invention] As shown above, the first type of low-temperature gas separation device of the present invention is a device that uses cold and heat obtained from the refrigerator as a cold and heat source for gas separation. Rotary valves with a plurality of ports are provided on the outer peripheral surface of the horizontal-section circular rotor that rotates with the center as the center and the inner peripheral surface of the casing. Therefore, the refrigerator uses a plurality of ports to independently rotate the valve in the axial direction. The expansion of the diameter of the port or the increase in the diameter of the sub-portion caused by the increase in the number of ports becomes extremely small, and the rotary valve can be miniaturized and prolonged in life. As a result, the refrigerator and the conventional solenoid valve or the flat seal type rotation, = denier It can be easily carried out with large-caliber and multi-portalization, which can realize large-scale, large-scale, and horse efficiency. For example, if the cold money is provided, it can provide several grades of small-scale: H order freezer. When it is, you can also Application of several watts and other high efficiency and high efficiency: Qian Er'an 'can be achieved by increasing the size and capacity of the chiller; using another device', the first kind of low-temperature gas and low-temperature gas of the present invention Separation of donkey η.χ The second kind of low-temperature gas of the present invention is divided into two / jin; the freezer also has the same function and effect as the cold-thumb machine used in the present invention. Therefore, a low-temperature gas I * VIII The two low-temperature gas separation devices have the same reduction in cost as the first and second plate cutter separation devices of the present invention.

第16頁 477891 圖式簡單說明 圖1係在本發明之低溫氣體分離裝置使用之旋轉閥之 構造說明圖。 圖2係該旋轉閥之作用之說明圖。 圖3係該旋轉閥之作用之說明圖。 圖4係使用了旋轉閥之脈波管冷凍機之說明圖。 圖5係該低溫氣體分離裝置之說明圖。 圖6係表示在本發明之低溫氣體分離裝置使用之冷凍 機之一實施例之說明圖。 圖7係在旋轉閥使用之轉子之立體圖。 圖8係表示該旋轉閥之作用之說明圖。 圖9係表示該旋轉閥之作用之說明圖。 圖1 0係表示該轉子之變形例之立體圖。 圖11係使用了該轉子之旋轉闊之構造說明圖。 圖1 2係表示在本發明之低溫氣體分離裝置使用之冷凍 機之別的實施例之說明圖。 圖1 3係在旋轉閥使用之轉子之立體圖。 圖1 4係表示該旋轉閥之作用之說明圖。 圖1 5係表示該旋轉閥之作用之說明圖。 圖1 6係表示該轉子之變形例之立體圖。 圖1 7係使用了該轉子之旋轉閥之構造說明圖。 圖1 8係使用了該轉子之旋轉閥之構造說明圖。 圖1 9係表示在本發明之低溫氣體分離裝置使用之冷凍 機之另外的實施例之說明圖。 圖2 0係旋轉閥之剖面圖。Page 16 477891 Brief description of the drawing Figure 1 is a structural explanatory diagram of a rotary valve used in the cryogenic gas separation device of the present invention. Fig. 2 is an explanatory diagram of the function of the rotary valve. Fig. 3 is an explanatory diagram of the function of the rotary valve. Fig. 4 is an explanatory diagram of a pulse tube refrigerator using a rotary valve. Fig. 5 is an explanatory diagram of the cryogenic gas separation device. Fig. 6 is an explanatory diagram showing an embodiment of a refrigerator used in the cryogenic gas separation device of the present invention. Figure 7 is a perspective view of a rotor used in a rotary valve. FIG. 8 is an explanatory diagram showing the operation of the rotary valve. FIG. 9 is an explanatory diagram showing the operation of the rotary valve. FIG. 10 is a perspective view showing a modified example of the rotor. FIG. 11 is an explanatory diagram of a structure in which the rotor is rotated. Fig. 12 is an explanatory view showing another embodiment of the refrigerator used in the cryogenic gas separation device of the present invention. Figure 13 is a perspective view of a rotor used in a rotary valve. Fig. 14 is an explanatory diagram showing the function of the rotary valve. Fig. 15 is an explanatory diagram showing the function of the rotary valve. FIG. 16 is a perspective view showing a modified example of the rotor. Fig. 17 is a structural explanatory diagram of a rotary valve using the rotor. Fig. 18 is a structural explanatory diagram of a rotary valve using the rotor. Fig. 19 is an explanatory view showing another embodiment of the refrigerator used in the cryogenic gas separation device of the present invention. Figure 2 is a sectional view of the 0-series rotary valve.

第17頁 477891 圖式簡單說明 圖2 1係表示該旋轉閥之作用之說明圖。 '圖2 2係表示該旋轉閥之作用之說明圖。 圖2 3係表示該旋轉閥之作用之說明圖。 圖24係·表示習知例之脈波管冷凍機之說明圖。 圖2 5係表示平面密封型旋轉閥之說明圖。 圖2 6係表示該平面密封型旋轉閥之作用之說明圖 【符號說明】 1 2 1 冷束機 B旋轉閥Page 17 477891 Brief description of drawings Figure 21 is an explanatory diagram showing the function of the rotary valve. 'FIG. 22 is an explanatory view showing the operation of the rotary valve. Fig. 23 is an explanatory view showing the operation of the rotary valve. Fig. 24 is an explanatory diagram showing a pulse tube refrigerator in a conventional example. Fig. 25 is an explanatory view showing a flat seal type rotary valve. Figure 2 6 is an explanatory diagram showing the function of the plane sealed rotary valve [Symbol Description] 1 2 1 Cold beam machine B rotary valve

第18頁Page 18

Claims (1)

477891 _案號89119550_年月日__ 六、申請專利範圍 中,該H e冷凍機係脈波管冷凍機。 6. 如申請專利範圍第4項之低溫氣體分離裝置,其 中,該He冷凍機係GM冷凍機。 7. 如申請專利範圍第4項之低溫氣體分離裝置,其 中,該H e冷束機係S ο 1 v a y冷束機。 8. 如申請專利範圍第3項之低溫氣體分離裝置,其 中 ,該冷 凍 機. 係H e冷康機 ο 9. 如申請專利範圍第8項之低溫氣體分離裝置, 其 中 ,該He 冷 凍 機係脈波管 冷凍機。 10. 如 中 請專利範圍 第8項之低溫氣體分離裝置 ,其 中 ,該H e 冷 凍 機係GM冷凍 機。 11. 如 中 請專利範圍 第8項之低溫氣體分離裝置 ,其 中 ,該Η e 冷 凍 機係S ο 1 v a y 冷凍機。477891 _ Case No. 89119550_year month__ VI. In the scope of patent application, the He refrigerator is a pulse tube refrigerator. 6. The cryogenic gas separation device according to item 4 of the patent application, wherein the He refrigerator is a GM refrigerator. 7. The cryogenic gas separation device according to item 4 of the patent application scope, wherein the He cold beam machine is an S ο 1 v a y cold beam machine. 8. If the low-temperature gas separation device of the scope of patent application item 3, in which the refrigerator is a cold cooling machine ο 9. If the low-temperature gas separation device of the scope of patent application application in item 8, the He refrigerator is Pulse tube freezer. 10. For example, please apply for the cryogenic gas separation device in the scope of patent No. 8 in which the He refrigerator is a GM refrigerator. 11. For example, please apply for the cryogenic gas separation device in the scope of patent No. 8 in which the Η e refrigerator is a S ο 1 v a y refrigerator. 第20頁Page 20
TW089119550A 1999-09-24 2000-09-21 Cryogenic gas separation system TW477891B (en)

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US5609925A (en) * 1995-12-04 1997-03-11 Dow Corning Corporation Curing hydrogen silsesquioxane resin with an electron beam
US6269658B1 (en) * 2000-06-28 2001-08-07 Praxair Technology, Inc. Cryogenic rectification system with pulse tube refrigeration
JP4601215B2 (en) * 2001-07-16 2010-12-22 三洋電機株式会社 Cryogenic refrigerator
GB2383117B (en) * 2001-12-11 2005-06-15 Oxford Magnet Tech Pulse tube refrigerator
JP6767291B2 (en) * 2017-03-13 2020-10-14 住友重機械工業株式会社 Cryogenic freezer

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FR2155925B1 (en) * 1971-10-15 1974-05-31 Bertin & Cie
JPS5986871A (en) * 1982-11-10 1984-05-19 株式会社日立製作所 Expander for refrigerator
JPH0668422B2 (en) * 1986-02-25 1994-08-31 岩谷産業株式会社 refrigerator
JPH0933124A (en) * 1995-05-12 1997-02-07 Aisin Seiki Co Ltd Multistage type pulse pipe refrigerator
JPH08303887A (en) * 1995-05-12 1996-11-22 Aisin Seiki Co Ltd High/low pressure switching mechanism of pulse tube refrigerating machine
US5901737A (en) * 1996-06-24 1999-05-11 Yaron; Ran Rotary valve having a fluid bearing
FR2751060B1 (en) * 1996-07-09 1998-09-25 Air Liquide PROCESS AND PLANT FOR CRYOGENIC DISTILLATION OF A GASEOUS MIXTURE
JP2877094B2 (en) * 1996-09-13 1999-03-31 ダイキン工業株式会社 Cryogenic refrigerator and control method thereof
JP3163024B2 (en) * 1997-01-14 2001-05-08 エア・ウォーター株式会社 Air separation equipment
US6269658B1 (en) * 2000-06-28 2001-08-07 Praxair Technology, Inc. Cryogenic rectification system with pulse tube refrigeration

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DE60031931T2 (en) 2007-03-15

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