EP1027988A1 - Hydrophile struktur, tintenstrahldruckkopf und verfahren zu dessen herstellung, tintenstrahldrucker und andere konstruktionselemente - Google Patents

Hydrophile struktur, tintenstrahldruckkopf und verfahren zu dessen herstellung, tintenstrahldrucker und andere konstruktionselemente Download PDF

Info

Publication number
EP1027988A1
EP1027988A1 EP99906481A EP99906481A EP1027988A1 EP 1027988 A1 EP1027988 A1 EP 1027988A1 EP 99906481 A EP99906481 A EP 99906481A EP 99906481 A EP99906481 A EP 99906481A EP 1027988 A1 EP1027988 A1 EP 1027988A1
Authority
EP
European Patent Office
Prior art keywords
hydrophilic structure
ink
hydrophilic
etching method
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99906481A
Other languages
English (en)
French (fr)
Other versions
EP1027988A4 (de
EP1027988B1 (de
Inventor
Yasushi Seiko Epson Corporation KARASAWA
Mitsuro Seiko Epson Corporation ATOBE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of EP1027988A1 publication Critical patent/EP1027988A1/de
Publication of EP1027988A4 publication Critical patent/EP1027988A4/de
Application granted granted Critical
Publication of EP1027988B1 publication Critical patent/EP1027988B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Definitions

  • the present invention relates to a hydrophilic structure superior in hydrophilicity, an ink-jet recording head having an ink-jet surface superior in hydrophilicity, methods for manufacturing such a hydrophilic structure and such an ink-jet recording head, an ink-jet recording apparatus, and structural members for a micro-pump, frosted glass, a bearing, a bath tub, a bathroom tile, a wash stand, a pipe for a heat exchanger, a blood circuit for an artificial lung, etc.
  • hydrophilic treatment methods for the purpose of preventing fogging of window glass or the like in a building, a car or the like, for the purpose of preventing fouling of a solid surface, or for other purposes.
  • JP-B-61-83106 and Japanese Patent No. 2756474 disclose a hydrophilic treatment method using optically semiconducting metal oxide.
  • optically semiconducting metal oxide such as titanium oxide or the like is formed on a solid surface, and this solid surface is irradiated with surface.
  • the above-mentioned background-art hydrophilic treatment method using optically semiconducting metal oxide does not have such a function satisfactorily.
  • the hydrophilic treatment method is applied to an ink-jet recording head, it has a problem as follows.
  • the hydrophilic treatment method using optically semiconducting metal oxide required irradiating the optically semiconducting metal oxide with light including an ultra-violet component, but the structure of an ink-jet recording head was so complicated that its ink-jet surface could not be always irradiated with light including an ultra-violet component. As a result, any good hydrophilic state could not be obtained in a portion which was not irradiated with the light. Even if a hydrophilic state could be obtained temporarily, the hydrophilic state could not be kept over a long period of time.
  • PCT/WO96/29375 also proposes a method in which a surface of a minor lens, window glass, goggles, a bath tub, or other articles is coated with a photocatalyst semiconductor material and then irradiated with light so as to obtain hydrophilicity, anti-fogging properties, and easiness in cleansing by rinsing. Even in this method, however, irradiation with light having a comparatively short wavelength is necessary so that any good hydrophilic state cannot be obtained in a portion which is not irradiated with the light. In addition, since there is a problem in durability, even if a hydrophilic state can be obtained temporarily, the hydrophilic state cannot be kept over a long period of time.
  • JP-A-5-312153 proposes a method in which the surface of a channel of a micro-pump is subject to graft treatment for the purpose of preventing generation of bubbles in the channel and improving the constant flow rate property. Even in this method, however, there is a possibility that any hydrophilic state cannot be kept over a long period of time because there is a problem in durability.
  • JP-A-1-250265 also proposes a method in which a blood circuit of an artificial lung is coated with HEMA or the like in order to improve its wettability with blood and its gas exchangeability. Also in this method, however, there is a problem in adhesive properties of the coating polymer, and there is a disadvantage in durability.
  • the hydrophilic structure according to the present invention has a structure in which an artificial irregular shape is provided on a base to thereby obtain not only a stable super hydrophilic function but also high durability and high mar-proof property.
  • the ink-jet surface except the ink discharge holes in the ink-jet recording head is designed to have a hydrophilic structure so that the hydrophilic performance with respect to ink is improved. As a result, the printing quality becomes superior for a long term.
  • the hydrophilic structure according to the present invention is manufactured by a photolithography method and an etching method, it is possible to make the protrusion portions uniform in height with precision, and it is also possible to manufacture a reproducible hydrophilic structure.
  • a stable super hydrophilic function, high durability and high mar-proof property are obtained.
  • Fig. 1 is an explanatory view of a hydrophilic structure according to Embodiment 1 of the present invention.
  • a hydrophilic structure 100 in a hydrophilic structure 100, recess portions 17 and protrusion portions 18 are formed on the surface of a silicon substrate 11, and a hydrophilic film 20 is formed on the surfaces of the recess portions 17 and the protrusion portions 18.
  • fluid 21 permeates into the recess portions 17 by capillarity so that the hydrophilicity of the surface of the structure is improved. Therefore, these irregularities are adjusted to dimensions such that the fluid 21 can enter the recess portions 17 easily by capillarity.
  • the hydrophilic film 20 may be formed, for example, by graft polymerizing, silica coupling, silicon oxidizing, or the like.
  • the hydrophilic film 20 is formed by silicon oxidizing.
  • a base having a hydrophilic function for example, glass, or the like, may be used with irregularities formed thereon.
  • Fig. 2 is a view for explaining the dimensions of each recess portion 17 and each protrusion portion 18 in Fig. 1.
  • the symbol A designates a protrusion width (depending on the mask design); B, a groove width (depending on the mask design); C, a working quantity (depending on the depth and etching time); and D, a side wall angle (depending on the etching conditions).
  • the above-mentioned widths A and B are restricted by themselves in order to obtain stable hydrophilic performance near nozzle holes.
  • the above-mentioned quantity C needs to have a certain degree of depth enough to diffuse permeating ink droplets in the recess portion stably. Therefore, the above-mentioned widths A and B are restricted in a range of from 0.2 to 500 ⁇ m, preferably from 0.5 to 30 ⁇ m, more preferably from 1 to 10 ⁇ m.
  • the above-mentioned quantity C is restricted to a depth of 1 ⁇ m or more, preferably 3 ⁇ m or more, more preferably 5 ⁇ m or more.
  • the evenness of the height of the protrusion portions is restricted within 0.5 times as large as the value of the widths A and B, preferably within 0.3 times, more preferably within 0.1 times, from the point of view of the mar-proof property.
  • Fig. 3 is a plan view of the hydrophilic structure 100 in Fig. 1.
  • Fig. 3(A) shows an example in which the protrusion portions 18 are distributed regularly.
  • Fig. 3(B) shows an example in which the protrusion portions 18 are arranged in the form of lines.
  • Fig. 3(C) shows an example in which the protrusion portions 18 are arranged in the form of a lattice.
  • Fig. 3(A) shows an example in which the protrusion portions 18 are square prisms, they may be various pillars such as triangular prisms, pentagonal prisms, hexagonal prisms, circular columns, etc., or cones.
  • Fig. 4 is an exploded perspective view of an ink-jet recording head according to Embodiment 2 of the present invention.
  • the ink-jet recording head has a configuration in which a first plate 1 and a second plate 2 are laminated on each other so that an ink supply portion 3, pressure chambers 4 for jetting ink, and channels 5 for passing the ink therethrough are formed.
  • the pressure chambers 4 jet ink by using vibration of a diaphragm such as an electrostatic diaphragm vibrated by static electricity, a piezoelectric vibrator such as an PZT, or the like, or by heating of a heating element.
  • nozzle holes 6 are formed perpendicularly to the channels 5.
  • the hydrophilic structure 100 in Fig. 1 is formed on the surface of the second plate 2, and the hydrophilic film 20 is formed on the surface of the hydrophilic structure 100.
  • Fig. 5 is a sectional view showing a manufacturing process for forming the hydrophilic structure on the surface of the second plate 2.
  • Fig. 6 is a top view of the second plate 2 in which the hydrophilic structure has been formed on the surface.
  • description will be made about the case where the surface of a silicon substrate is worked by a photolithography method and a trench dry etching method so that a hydrophilic structure is formed.
  • Example 1 of the present invention examples shown in Table 1 were attempted in the above-mentioned Embodiment 2.
  • base materials of samples 1 to 7 were prepared for the substrate 11 of the second plate.
  • the protrusion-portion-expected areas 13 were formed by patterning squares each in a range of from 0.2 ⁇ m to 1,000 ⁇ m.
  • the hydrophilic film to be formed on the second plate 2 was formed by depositing silicon oxide.
  • Fig. 7 is a sectional view showing a manufacturing process as a Comparative Example in which hydrophilic treatment is applied to a second plate of stainless steel in an ink-jet recording head configured in the same manner as in Embodiment 2.
  • the ink-jet recording head in this Comparative Example has the same configuration as that shown in Fig. 4.
  • Table 2 shows contact angles of the second plates against ink and water in this Example and Comparative Example. Further, data of Comparative Example were obtained immediately after irradiation with ultra-violet rays. Number Water contact angle (degrees) Ink contact angle (degrees) Example Sample 1 6 2 Sample 2 20 12 Sample 3 4 2 Sample 4 30 14 Sample 5 4 4 Sample 6 30 16 Sample 7 20 10 Sample 8 20 10 Comparative Example 10 4
  • Each ink-jet recording head in Embodiment 1 was mounted on a recording apparatus, and subjected to a printing test in initial conditions and in accelerated conditions corresponding to 2 years in the darkness. Thus, the results were obtained as shown in Table 3.
  • Table 3 shows the results of judgement upon printing quality, in which the mark o ⁇ designates superior printing quality without ink mist adhering to the second plate surface; the mark ⁇ , superior printing quality though ink mist adhered to the second plate surface; and the mark X, defective due to bending in flying of ink.
  • Example 2 of the present invention examination was made about the contact angles between water/ink and the protrusion shapes of hydrophilic structures which were arranged in tetragonal prisms, in lines and in the form of a lattice (see Figs. 3(A), (B) and (C)). Table 4 shows data of those angles. It is understood that each of the hydrophilic structures according to the present invention had a contact angle of ink of 10 degrees or less so as to obtain superior hydrophilic performance without irradiation with ultra-violet rays. No.
  • Example 1 or 2 By use of resin as the raw material, molding was performed with the structure of Example 1 or 2 as a mold. The surface of a molded product obtained thus had a pattern of irregularities which was transferred from the surface of the mold. It was confirmed that such a structure subjected to hydrophilic treatment also had superior properties similar to those in Examples 1 and 2.
  • Fig. 8 is a sectional view showing a process for manufacturing an ink-jet recording head according to Embodiment 3 of the present invention.
  • Fig. 8 shows a manufacturing process for forming a hydrophilic structure on the surface of a second plate 2.
  • description will be made about the case where the surface of a silicon substrate is worked by a photolithography method and an anodic electrolysis method so that a hydrophilic structure is formed.
  • Fig. 9 is a sectional view showing a process for manufacturing an ink-jet recording head according to Embodiment 4 of the present invention.
  • Fig. 9 shows a manufacturing process for forming a hydrophilic structure on the surface of a second plate 2.
  • description will be made about the case where the surface of a silicon substrate is worked by a photolithography method and an anisotropic wet etching method so that a hydrophilic structure is formed.
  • Fig. 10 is a sectional view showing a process for manufacturing an ink-jet recording head according to Embodiment 5 of the present invention.
  • Fig. 10 shows a manufacturing process for forming a porous structure on the surface of a second plate 2.
  • description will be made about the case where the surface of a silicon substrate is worked by a photolithography method and an isotropic wet etching method so that a porous structure is formed.
  • Fig. 11 is a sectional view showing a process for manufacturing an ink-jet recording head according to Embodiment 6 of the present invention.
  • Fig. 11 shows a manufacturing process for forming a porous structure on the surface of a second plate 2.
  • description will be made about the case where the surface of a silicon substrate is worked by a photolithography method and an isotropic dry etching method so that a porous structure is formed.
  • a hydrophilic structure is produced by a photolithography method and an etching method, and the surface of the base of the hydrophilic structure can be replaced by the tops of protrusion portions. Accordingly, the protrusion portions inevitably become even in height with high precision.
  • the material of the second plate 2 is not limited to those materials in the present invention. Similar functions can be shown even in metal material such as stainless steel or organic polymeric material.
  • Fig. 12 is an explanatory view showing an example of a mechanism near an ink-jet head manufactured through any one of the manufacturing processes of Embodiments 2 to 6.
  • An ink-jet head 50 is attached to a carriage 51, and this carriage 51 is movably attached to guide rails 52. Then, the position of the carriage 51 is controlled in the width direction of paper 54 fed by a roller 53.
  • This mechanism in Fig. 12 is mounted on an ink-jet recording apparatus 55 shown in Fig. 13. It has been confirmed that high-quality printing can be obtained in printing with this ink-jet recording apparatus 55. Particularly, with respect to rubbing in cleaning, it has been confirmed that a hydrophilic function is obtained by the structure of the base material of the ink-jet head so that the ink-jet head has abrasion resistance enough to be proof against long-term use.
  • Fig. 14 is a sectional view of a micro-pump according to Embodiment 8 of the present invention.
  • a piezoelectric element 69 when a piezoelectric element 69 is driven to vibrate a diaphragm 70, fluid sucked from an inlet 65 is discharged from an outlet 66 through a closed space 71.
  • the hydrophilic structure according to the above-mentioned Embodiments is formed on the surface of a channel including the closed space 71.
  • a micro-pump having an extremely constant flow rate without producing any bubble in the channel when the micro-pump was actually driven to flow pure water into the channel could be realized because the above-mentioned hydrophilic structure was formed in the micro-pump as mentioned above.
  • Figs. 15(A) and (B) are explanatory views showing a mechanism for manufacturing a tube 73 communicating with the inlet 65 or the outlet 66 in Fig. 14.
  • Fig. 15(A) is a front sectional view
  • Fig. 15(B) is an enlarged sectional view taken on line B-B in Fig. 15(A).
  • this mechanism for example, polyvinyl chloride accommodated in a vessel 75 is discharged in the state where a die 76 on which protrusion and recess portions have been formed is passed through a discharge portion of the vessel 75, so that irregularities are formed on the inner wall of each tube 73.
  • Figs. 16(A) and (B) are sectional views of frosted glass according to Embodiment 9 of the present invention. As shown in Figs. 16(A) and (B), a hydrophilic structure 82 is formed on the surface of each frosted glass 80, 81. Accordingly, it is difficult for dirt to adhere to the surface, and even if dirt adheres to the surface, it is possible to remove the dirt easily.
  • Fig. 17 is a sectional view showing a mechanism for a watch according to Embodiment 10 of the present invention.
  • a hydrophilic structure is formed on the inner wall of each of bearing portions 85 to 90.
  • this hydrophilic structure is requested to have lipophilicity as well as hydrophilicity. It is therefore necessary to perform such a hydrophilic treatment that hydrophilic and lipophilic properties can be obtained after the treatment (hydrophilic/lipophilic treatment). Since the surface of a structure subjected to such a hydrophilic/lipophilic treatment is superior in hydrophilicity and lipophilicity, lubricating oil is retained for a long term. For example, even if the watch is driven without oiling equivalently to 10 years, the watch works normally.
  • Figs. 18(A) and (B) are perspective views of a bathroom and a wash stand according to Embodiment 11 of the present invention.
  • Hydrophilic structures 100 according to the above-mentioned Embodiments are formed on the surfaces of a bath tub 91, bathroom files 92 and a wash stand 93. It is therefore difficult for dirt to adhere to the surfaces, and even if dirt adheres thereto, it is possible to remove the dirt easily.
  • the hydrophilic structure according to the present invention is usable in various applications.
  • the hydrophilic structure may be formed on the inner wall of a pipe of a heat exchanger so as to improve its thermal efficiency.
  • the hydrophilic structure may be formed on the inner wall of a blood circuit of an artificial lung so as to improve its gas exchangeability or the like.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
  • Materials For Medical Uses (AREA)
EP99906481A 1998-08-27 1999-02-25 Hydrophile struktur Expired - Lifetime EP1027988B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP24235598 1998-08-27
JP24235598 1998-08-27
PCT/JP1999/000870 WO2000012313A1 (fr) 1998-08-27 1999-02-25 Structure hydrophile, tete d'impression a jet d'encre, procede de production de celles-ci, imprimante a jet d'encre et autres elements structurels

Publications (3)

Publication Number Publication Date
EP1027988A1 true EP1027988A1 (de) 2000-08-16
EP1027988A4 EP1027988A4 (de) 2002-07-03
EP1027988B1 EP1027988B1 (de) 2007-04-11

Family

ID=17087967

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99906481A Expired - Lifetime EP1027988B1 (de) 1998-08-27 1999-02-25 Hydrophile struktur

Country Status (5)

Country Link
EP (1) EP1027988B1 (de)
AT (1) ATE359177T1 (de)
AU (1) AU2640199A (de)
DE (1) DE69935777T2 (de)
WO (1) WO2000012313A1 (de)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1038675A3 (de) * 1999-03-26 2001-04-04 Nec Corporation Tintenstrahlaufzeichnungskopf und Verfahren zur Herstellung
US20110204367A1 (en) * 2007-08-07 2011-08-25 Panasonic Corporation Semiconductor device, method for manufacturing the same and image display
US9603257B2 (en) 2010-10-22 2017-03-21 Sony Corporation Pattern substrate, method of producing the same, information input apparatus, and display apparatus
USRE46432E1 (en) 2003-09-24 2017-06-13 Stryker European Holdings I, Llc System and method for spinal implant placement
US9700357B2 (en) 2003-09-24 2017-07-11 Stryker European Holdings I, Llc Methods and devices for improving percutaneous access in minimally invasive surgeries
US9744050B1 (en) 2013-12-06 2017-08-29 Stryker European Holdings I, Llc Compression and distraction system for percutaneous posterior spinal fusion
US9827020B2 (en) 2013-03-14 2017-11-28 Stryker European Holdings I, Llc Percutaneous spinal cross link system and method
US10159579B1 (en) 2013-12-06 2018-12-25 Stryker European Holdings I, Llc Tubular instruments for percutaneous posterior spinal fusion systems and methods
US10568669B2 (en) 2013-03-14 2020-02-25 Stryker European Holdings I, Llc Systems and methods for percutaneous spinal fusion

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007105801A1 (ja) * 2006-03-10 2007-09-20 Canon Kabushiki Kaisha 液体吐出ヘッド基体、その基体を用いた液体吐出ヘッドおよびそれらの製造方法
US9408716B1 (en) 2013-12-06 2016-08-09 Stryker European Holdings I, Llc Percutaneous posterior spinal fusion implant construction and method
JP7008270B2 (ja) * 2017-04-24 2022-01-25 ブラザー工業株式会社 液体吐出装置及びインクジェットプリンタ
CN107339597B (zh) * 2017-07-18 2023-03-31 佛山科学技术学院 一种亲水结构

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01123752A (ja) * 1987-11-09 1989-05-16 Nec Corp ドロップオンデマンド型インクジェットヘッド
JPH06210859A (ja) * 1992-10-19 1994-08-02 Canon Inc 改善されたインク吐出口面を備えたインクジェットヘッド、該インクジェットヘッドを備えたインクジェット装置
JPH0858096A (ja) * 1994-08-24 1996-03-05 Canon Inc インクジェットヘッドとその製造方法
JPH08230185A (ja) * 1995-03-01 1996-09-10 Brother Ind Ltd インクジェット装置
JPH09127302A (ja) * 1995-10-30 1997-05-16 Seiko Epson Corp 反射防止性能を有する防曇性物品及びその製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS594897A (ja) * 1982-06-29 1984-01-11 Matsushita Electric Ind Co Ltd 熱交換器
JP2826115B2 (ja) 1987-12-28 1998-11-18 テルモ株式会社 医療用器具
JPH05312153A (ja) 1992-05-13 1993-11-22 Seiko Epson Corp マイクロポンプ及びその製造方法
DE19655363B4 (de) 1995-03-20 2007-05-24 Toto Ltd., Kitakyushu Verwendung eines Verbundstoffes um ein Beschlagen der Oberflächen zu verhindern
JP3147710B2 (ja) * 1995-03-30 2001-03-19 東陶機器株式会社 防汚性部材
JPH08318628A (ja) * 1995-05-25 1996-12-03 Citizen Watch Co Ltd インクジェット記録ヘッドの製造方法
JPH09278431A (ja) * 1996-04-18 1997-10-28 Central Glass Co Ltd 親水性膜およびその製造方法
JP3586044B2 (ja) * 1996-06-10 2004-11-10 東京パーツ工業株式会社 モータ用軸受装置
JPH10157141A (ja) * 1996-12-05 1998-06-16 Canon Inc インクジェットヘッドおよび製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01123752A (ja) * 1987-11-09 1989-05-16 Nec Corp ドロップオンデマンド型インクジェットヘッド
JPH06210859A (ja) * 1992-10-19 1994-08-02 Canon Inc 改善されたインク吐出口面を備えたインクジェットヘッド、該インクジェットヘッドを備えたインクジェット装置
JPH0858096A (ja) * 1994-08-24 1996-03-05 Canon Inc インクジェットヘッドとその製造方法
JPH08230185A (ja) * 1995-03-01 1996-09-10 Brother Ind Ltd インクジェット装置
JPH09127302A (ja) * 1995-10-30 1997-05-16 Seiko Epson Corp 反射防止性能を有する防曇性物品及びその製造方法

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 013, no. 369 (M-860), 16 August 1989 (1989-08-16) & JP 01 123752 A (NEC CORP), 16 May 1989 (1989-05-16) *
PATENT ABSTRACTS OF JAPAN vol. 018, no. 576 (M-1697), 4 November 1994 (1994-11-04) & JP 06 210859 A (CANON INC), 2 August 1994 (1994-08-02) *
PATENT ABSTRACTS OF JAPAN vol. 1996, no. 07, 31 July 1996 (1996-07-31) & JP 08 058096 A (CANON INC), 5 March 1996 (1996-03-05) *
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 01, 31 January 1997 (1997-01-31) & JP 08 230185 A (BROTHER IND LTD), 10 September 1996 (1996-09-10) *
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 09, 30 September 1997 (1997-09-30) & JP 09 127302 A (SEIKO EPSON CORP), 16 May 1997 (1997-05-16) *
See also references of WO0012313A1 *

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1038675A3 (de) * 1999-03-26 2001-04-04 Nec Corporation Tintenstrahlaufzeichnungskopf und Verfahren zur Herstellung
USRE46432E1 (en) 2003-09-24 2017-06-13 Stryker European Holdings I, Llc System and method for spinal implant placement
US9700357B2 (en) 2003-09-24 2017-07-11 Stryker European Holdings I, Llc Methods and devices for improving percutaneous access in minimally invasive surgeries
US10143502B2 (en) 2003-11-08 2018-12-04 Stryker European Holdings I, Llc Methods and devices for improving percutaneous access in minimally invasive surgeries
USRE47348E1 (en) 2003-11-08 2019-04-16 Stryker European Holdings I, Llc System and method for spinal implant placement
USRE48376E1 (en) 2003-11-08 2021-01-05 Stryker European Operations Holdings Llc System and method for spinal implant placement
US10993747B2 (en) 2003-11-08 2021-05-04 Stryker European Operations Holdings Llc Methods and devices for improving percutaneous access in minimally invasive surgeries
US8193526B2 (en) * 2007-08-07 2012-06-05 Panasonic Corporation Transistor having an organic semiconductor with a hollow space
US20110204367A1 (en) * 2007-08-07 2011-08-25 Panasonic Corporation Semiconductor device, method for manufacturing the same and image display
US9603257B2 (en) 2010-10-22 2017-03-21 Sony Corporation Pattern substrate, method of producing the same, information input apparatus, and display apparatus
US9827020B2 (en) 2013-03-14 2017-11-28 Stryker European Holdings I, Llc Percutaneous spinal cross link system and method
US10568669B2 (en) 2013-03-14 2020-02-25 Stryker European Holdings I, Llc Systems and methods for percutaneous spinal fusion
US10912590B2 (en) 2013-03-14 2021-02-09 Stryker European Operations Holdings Llc Percutaneous spinal cross link system and method
US11779377B2 (en) 2013-03-14 2023-10-10 Stryker European Operations Holdings Llc Systems and methods for percutaneous spinal fusion
US9744050B1 (en) 2013-12-06 2017-08-29 Stryker European Holdings I, Llc Compression and distraction system for percutaneous posterior spinal fusion
US10159579B1 (en) 2013-12-06 2018-12-25 Stryker European Holdings I, Llc Tubular instruments for percutaneous posterior spinal fusion systems and methods

Also Published As

Publication number Publication date
DE69935777T2 (de) 2007-12-27
WO2000012313A1 (fr) 2000-03-09
ATE359177T1 (de) 2007-05-15
EP1027988A4 (de) 2002-07-03
EP1027988B1 (de) 2007-04-11
AU2640199A (en) 2000-03-21
DE69935777D1 (de) 2007-05-24

Similar Documents

Publication Publication Date Title
EP1027988B1 (de) Hydrophile struktur
EP0829360B1 (de) Verfahren und Vorrichtung zum Herstellen eines Tintenstrahldruckkopfes
KR100714256B1 (ko) 칼라 필터의 형성 방법
CN102582262B (zh) 打印头喷嘴形成
EP0915760B1 (de) Dreidimensionales drucken und herstellen von strukturen
JP5855825B2 (ja) テクスチャを持たせた超疎油性表面を有するインクジェットプリントヘッド前面を準備するためのプロセス
US8708458B2 (en) Superoleophobic glass devices and their methods
US8835195B2 (en) Corrugated membrane MEMS actuator fabrication method
US6821716B2 (en) Porous structure, ink jet recording head, methods of their production, and ink jet recorder
US20050150107A1 (en) Process for manufacturing a monolithic printhead with truncated cone shape nozzles
US6523762B1 (en) Micromechanically produced nozzle for producing reproducible droplets
CN102729629A (zh) 用于形成具有曲面特征的薄膜的方法和包括该薄膜的器件
JP2012000984A (ja) インクジェット印刷用の自浄能力付きインクジェット印刷ヘッド
JP2009113351A (ja) シリコン製ノズル基板、シリコン製ノズル基板を備えた液滴吐出ヘッド、液滴吐出ヘッドを搭載した液滴吐出装置、及びシリコン製ノズル基板の製造方法
JP2001212966A (ja) 親水性構造及びインクジェット記録ヘッド
EP0799700A2 (de) Tintenstrahlaufzeichnungskopf, sein Herstellungsverfahren und Tintenstrahlaufzeichnungsapparat
JP2000229410A (ja) 撥水性構造体、その製造方法、インクジェット記録ヘッド及びインクジェット記録装置
US6378995B1 (en) Manufacturing method of nozzle plate using silicon process and ink jet printer head applying the nozzle plate
US20120268524A1 (en) Ink jet print head front face having a textured superoleophobic surface and methods for making the same
US6627264B1 (en) Method of manufacturing an ink-jet print head coated with a water repellent thin film
JP2000226570A (ja) 撥水性構造体、その製造方法、インクジェット記録ヘッド及びインクジェット記録装置
US20120270344A1 (en) Ink jet print head front face having a textured superoleophobic surface and methods for making the same
JP2004045055A (ja) マイクロピペット
JP4462777B2 (ja) インクジェットヘッド
KR100366651B1 (ko) 실리콘 프로세스를 이용한 노즐 플레이트의 제조방법 및그 노즐 플레이트를 적용한 잉크젯 프린터 헤드

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20000427

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

RIC1 Information provided on ipc code assigned before grant

Free format text: 7B 41J 2/045 A, 7B 41J 2/05 B, 7B 41J 2/14 B, 7B 41J 2/16 B

A4 Supplementary search report drawn up and despatched

Effective date: 20020515

AK Designated contracting states

Kind code of ref document: A4

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

17Q First examination report despatched

Effective date: 20050503

RTI1 Title (correction)

Free format text: HYDROPHILIC STRUCTURE

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070411

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070411

Ref country code: CH

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070411

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REF Corresponds to:

Ref document number: 69935777

Country of ref document: DE

Date of ref document: 20070524

Kind code of ref document: P

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070711

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070722

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070911

ET Fr: translation filed
NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070411

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070411

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070411

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070411

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20080114

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070411

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070712

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20080220

Year of fee payment: 10

Ref country code: DE

Payment date: 20080226

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20080212

Year of fee payment: 10

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20080228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20080225

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070411

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20090225

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20091030

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090901

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090225

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090302

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20080225