EP1026532B1 - Baugruppe aus einem optischen Element und einer Fassung - Google Patents

Baugruppe aus einem optischen Element und einer Fassung Download PDF

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Publication number
EP1026532B1
EP1026532B1 EP00101031A EP00101031A EP1026532B1 EP 1026532 B1 EP1026532 B1 EP 1026532B1 EP 00101031 A EP00101031 A EP 00101031A EP 00101031 A EP00101031 A EP 00101031A EP 1026532 B1 EP1026532 B1 EP 1026532B1
Authority
EP
European Patent Office
Prior art keywords
assembly according
joining element
mount
optical element
joining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00101031A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1026532A1 (de
Inventor
Michael Trunz
Ralf Hilgers
Bernhard Gellrich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of EP1026532A1 publication Critical patent/EP1026532A1/de
Application granted granted Critical
Publication of EP1026532B1 publication Critical patent/EP1026532B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/026—Mountings, adjusting means, or light-tight connections, for optical elements for lenses using retaining rings or springs

Definitions

  • the invention relates to an assembly consisting of an optical element and a version according to the preamble of claim 1 Art.
  • US 5,428,482 relates to the decoupling of an optical Element from a frame by elastic beam-like Links between the optical element and the frame.
  • EP 0 230 277 A2 relates to a precision lens attachment, also elastic bending elements in the form of beams are provided between the optical element and the socket. Due to the elastic bending elements, radial flexibility should be achieved to compensate for thermal stresses.
  • EP 0 243 893 B1 in which a lens attachment is described for position lenses, a variety of bending devices that are designed like leaf springs are holding a lens as an optical element on a frame.
  • DE-B-1 262 041 shows a version in which an optical Element, here a lens, on a stiff and ring-shaped Contact surface as a lens seat and a locking ring is held.
  • the locking ring is supported axially acting spring elements against one in the axial direction the spring ring of the snap ring, so that the lens is pressed against the lens seat and in position is held.
  • the present invention has for its object a Connection technology between an optical element and a to create this holding frame, being the optical element thus connected to the socket via elastic connections is that there is at least largely no tension or Low tension and thus a reduction in surface deformation of the optical element in a geometrically simple Design is created.
  • this task is characterized by Part of claim 1 features solved.
  • the membrane-like joining element according to the invention Due to the membrane-like joining element according to the invention high elasticity and flexibility in the z direction during assembly, i.e. in the direction of the optical axis. On in this way, the optical element can be stress-free exactly align on the joining element. Then becomes a fixed one Connection between the joining element and the optical element manufactured and according to the invention a stiff, a moment transmitting connection, so practically the one that arises Bending angle between the joining element and the optical Element held, with which not easily one Adjust further bending if a load occurs can, i.e. Angle changes are no longer possible. Through the Establishing a firm connection will be at the junction the degrees of freedom are blocked. This is included occurring external forces and moments a buckling stress whose rigidity is much greater than that of pure bend, creating the required natural frequency and Stability is ensured.
  • a simple design to solve the problem Task can be that the joining element a membrane ring or several ring segments, which to a closed membrane ring. On this will result in a significant reduction in surface deformation of the optical element reached.
  • An annular socket 1 is on the inside with a Ring paragraph 2 provided, the one at least approximately the bending line of a joining element 4 correspondingly running support contour 3 has.
  • On the support contour 3 is used as a joining element a membrane ring 4 placed and positive and / or non-positive (e.g. by welding, soldering or gluing) firmly with the socket 1 connected.
  • a membrane ring 4 placed and positive and / or non-positive (e.g. by welding, soldering or gluing) firmly with the socket 1 connected.
  • From the membrane ring 4 protrude from its inner circumference Variety of tabs 6 inside.
  • the tabs 6 serve as Support for a lens 7 as an optical element.
  • the membrane ring 4 with the tabs 6 is made of a resilient material, e.g. one very thin sheet with a thickness of 0.3 to 0.5 mm.
  • a memory alloy which is also called a memory alloy be used.
  • an alloy with super elastic properties is intended for the Suitable purpose because these alloys have large deformations enable in a small space.
  • the joining element, i.e. the membrane ring 4 can also with the integration or application of a intelligent material (smart materials, e.g. shape memory - or piezoelectric elements), so that influencing the state of deformation by supplying energy of the optical element is possible, or detected can be.
  • the membrane ring can be produced by an etching technique be, which is particularly advantageous if he is provided with numerous contours, e.g. from FIG. 3 seen.
  • FIG. 3 shows a membrane ring 4 with tabs 6, wherein in the membrane ring 4 from the outer circumference and from the inner circumference alternately radial or tangential slots 8 are formed are.
  • the slots 8 are used to warp the membrane ring 4 to be avoided if e.g. by welding with the resulting tensions associated with version 1 becomes.
  • the membrane ring 4 also with relief pockets distributed over the circumference 9 be provided.
  • the relief pockets 9 can be arbitrarily designed with e.g. extending in the circumferential direction Grooves of different cross-section and with between the relief bores 10 lying in the grooves.
  • the assembly of the optical assembly can be done in a simple manner and done very precisely with regard to the positioning of the lens 7.
  • version 1 is based on a rigid flat counter flange 11 spanned.
  • the membrane ring 4 on the support contour 3 e.g. by welding attached.
  • the lens 7 is on the Lugs 6 placed and in a known directional joining process, aligned. Is the straightening process finished, due to the high elasticity of the membrane ring 4 or the tabs 6 a stress and deformation-free support of the lens 7 is achieved can be done e.g. about gluing or soldering to one Connection 12 a rigid connection between the lens 7 and the membrane ring 4 or its tabs 6.
  • connection 12 Through the connection 12 produced in this way, the so can also transmit moments, receives the membrane ring 4 with the Tabs 6 have a high rigidity due to the curved geometric shape after the fixed connection with the lens. It there is practically a fixed angle ⁇ in the area of the connection 12, who can no longer change. As a result of that the angle ⁇ can no longer change with one Occurrence of forces for the membrane ring 4 or the fins 6 only the possibility of a slight S-shaped bend or bulge. In this way it has been achieved that the Assembly a very large deformation possible, but after the joining process a high degree of rigidity is given, so that positioning the lens 7 with sufficient accuracy and Stability is achieved.
  • the geometric design of the joining element e.g. as a membrane ring 4 with tabs 6 can depend on the application be varied to a great extent.
  • the geometric Design of the membrane ring 4 can be defined once and then remain the same for a lens in its entirety. It is then only necessary to have the required diameter to adjust the lenses.
  • the number and shape of the tabs 6 depends on the lens mass and the sheet thickness and leaves also vary.
  • FIG. 4 shows that the membrane ring 4 is formed from 4 individual segments 15 can be.
  • the pins 16 are distributed over the circumference and with their Longitudinal axes arranged in the z direction Support ring 17 used.
  • the support ring 17 is in the outer region with version 1, e.g. connected by screws. At the same time, this type of connection can also be used to attach the Form membrane ring 4 with the socket.
  • the pins 16 have an L-shape, with its angled Part extends perpendicular to the z-axis and with the free end e.g. by gluing to the peripheral wall of the lens 7 connected is. As soon as the lens 7 is aligned in the z direction is, the pins 16 in the holes of the support ring 17th fixed in their positions, which e.g. can be done in that the holes adhesive is introduced.
  • the increase in stiffness shown in FIG. 5 in the z direction is intended for an assembly that is arranged vertically is.
  • FIG. 6 shows an arrangement, the lens 7 being vertical is arranged and the z-axis extends horizontally. Out this is in addition to the membrane ring 4 as a joining element a second membrane ring 4 'is provided on the Membrane ring 4 opposite side of the lens 7 also via a rigid, torque-transmitting connection 12 ' the lens is connected. Also in this embodiment are centering members in the form of pins 16 'provided attack distributed over the circumference on the outer circumference of the lens 7. In this case, the pins 16 'have an inverted T shape and are glued to the circumference of the lens 7 via the T-bars. The pins 16 'are in turn in bores of a support ring 17' used, which after the alignment of the lens 7 with a Adhesive to create a firm connection between the Pins 16 'and the support ring 17' are filled.
  • a retaining ring 18 through which the membrane ring 4 'simultaneously with the support ring 17' and Membrane ring 4 is firmly connected to the socket 1.
  • FIGS. 7 to 11 Various types are shown in FIGS. 7 to 11, for example of tabs 6 of the membrane ring 4 and 4 'shown.
  • Figure 7 shows a shape in which the tab in the longitudinal direction is provided with a structure 19.
  • FIG. 8 shows one in the area of the connection 12 with the lens 7 Comb structure or incisions 20. At the same time, the figure shows 8 also an embodiment of a tab 6 with an area of a reduced width between the membrane ring 4 and the connection 12 in the front area.
  • Figure 9 shows an even larger constriction of a tab 6 conical course to its front end, that as a connection 12 with the lens 7 is used.
  • tab 6 in the area of connection 12 with the lens 7 may be provided with an etched lattice structure 21 can.
  • the etched lattice structure 21 has the job of a better one To achieve adhesion to the connection 12 or so it is not necessary to dose the glue extremely precisely must, since this then evade into the lattice structure 21 can.
  • such a lattice structure 21 also possible with other tab shapes.
  • FIG. 10 shows a similar configuration of a tab 6 like FIG. 9, only the constricted area is not so strongly emphasized and the support area for Connection 12 has an approximate elliptical shape with a larger ellipse axis running in the radial direction.
  • Figure 11 shows a simple rectangular configuration (also in plan view) of a tab 6. While e.g. wide tabs, such as the tabs shown in Figures 7 and 11 6, with a thinner sheet thickness, e.g. 0.1 to 0.3 mm, will produce, you will narrow long tabs 6 with a larger sheet thickness, e.g. 0.3 to 0.5 mm.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Optics & Photonics (AREA)
  • Lens Barrels (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
EP00101031A 1999-02-03 2000-01-20 Baugruppe aus einem optischen Element und einer Fassung Expired - Lifetime EP1026532B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19904152 1999-02-03
DE19904152A DE19904152A1 (de) 1999-02-03 1999-02-03 Baugruppe aus einem optischen Element und einer Fassung

Publications (2)

Publication Number Publication Date
EP1026532A1 EP1026532A1 (de) 2000-08-09
EP1026532B1 true EP1026532B1 (de) 2003-09-17

Family

ID=7896182

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00101031A Expired - Lifetime EP1026532B1 (de) 1999-02-03 2000-01-20 Baugruppe aus einem optischen Element und einer Fassung

Country Status (6)

Country Link
US (1) US6392825B1 (ko)
EP (1) EP1026532B1 (ko)
JP (1) JP2000227533A (ko)
KR (1) KR100641772B1 (ko)
DE (2) DE19904152A1 (ko)
TW (1) TW438985B (ko)

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US6239924B1 (en) * 1999-08-31 2001-05-29 Nikon Corporation Kinematic lens mounting with distributed support and radial flexure
US6643076B2 (en) * 2000-06-02 2003-11-04 Affymetrix, Inc. Attachment device
US6400516B1 (en) * 2000-08-10 2002-06-04 Nikon Corporation Kinematic optical mounting
DE10042844C1 (de) * 2000-08-17 2002-04-04 Jenoptik Jena Gmbh Radial justierbare Linsenfassung
DE10115914A1 (de) * 2001-03-30 2002-10-02 Zeiss Carl Vorrichtung zur Lagerung eines optischen Elementes in einer Optik
NL1018362C2 (nl) * 2001-06-22 2002-12-30 Bihca Prec B V Houder voor een optisch element.
DE10136387A1 (de) * 2001-07-26 2003-02-13 Zeiss Carl Objektiv, insbesondere Objektiv für die Halbleiter-Lithographie
DE10140608A1 (de) * 2001-08-18 2003-03-06 Zeiss Carl Vorrichtung zur Justage eines optischen Elements
DE10146863A1 (de) * 2001-09-22 2003-04-10 Zeiss Carl Fassung für ein optisches Element in einer optischen Abbildungseinrichtung
EP1310829B1 (en) * 2001-11-07 2007-05-02 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
JP2003241049A (ja) * 2002-02-22 2003-08-27 Nikon Corp 光学素子保持方法、光学素子研磨加工方法及び光学素子成膜方法
DE10219514A1 (de) * 2002-04-30 2003-11-13 Zeiss Carl Smt Ag Beleuchtungssystem, insbesondere für die EUV-Lithographie
DE10228053B4 (de) * 2002-06-19 2006-06-14 Carl Zeiss Jena Gmbh Element und Verfahren zu seiner Herstellung, bei dem zwei in Bezug zu mindestens einer Justierachse positionierte Körper stoffschlüssig miteinander verbunden sind
US20030234916A1 (en) * 2002-06-21 2003-12-25 Nikon Corporation Soft supports to reduce deformation of vertically mounted lens or mirror
JP4565261B2 (ja) * 2002-06-24 2010-10-20 株式会社ニコン 光学素子保持機構、光学系鏡筒及び露光装置
JP3891567B2 (ja) * 2002-12-03 2007-03-14 フジノン株式会社 フレアストッパ
JP3905844B2 (ja) * 2003-01-07 2007-04-18 ペンタックス株式会社 レンズの熱かしめ構造、熱かしめ方法及び熱かしめ工具
DE10339362A1 (de) 2003-08-27 2005-03-24 Carl Zeiss Smt Ag Vorrichtung zur Verhinderung des Kriechens eines optischen Elementes
WO2005057917A1 (en) * 2003-12-11 2005-06-23 Lg Electronics, Inc. Actuator for improvement of resolution
US7265917B2 (en) 2003-12-23 2007-09-04 Carl Zeiss Smt Ag Replacement apparatus for an optical element
DE102004014641B4 (de) * 2004-03-09 2007-09-13 Carl Zeiss Smt Ag Anordnung zur Lagerung eines optischen Bauelements
US7604359B2 (en) * 2004-05-04 2009-10-20 Carl Zeiss Smt Ag High positioning reproducible low torque mirror-actuator interface
KR101428817B1 (ko) 2005-07-14 2014-08-08 칼 짜이스 에스엠테 게엠베하 광학 요소 진동 감쇄 장치, 대물렌즈, 투사 노출 기계 및 이들을 사용하는 방법
WO2007010011A2 (en) * 2005-07-19 2007-01-25 Carl Zeiss Smt Ag Optical element module
DE102006038634A1 (de) * 2006-08-17 2008-02-21 Carl Zeiss Smt Ag Halteeinrichtung für ein optisches Element mit Stützkraftausgleich
EP2444829A1 (en) * 2006-09-14 2012-04-25 Carl Zeiss SMT GmbH Optical element unit and method of supporting an optical element
DE102006050653A1 (de) 2006-10-24 2008-04-30 Carl Zeiss Smt Ag Verfahren und Vorrichtung zum stoffschlüssigen Verbinden eines optischen Elementes mit einer Fassung
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US8792163B2 (en) * 2008-03-26 2014-07-29 Raytheon Company Low order adaptive optics by translating secondary mirror of off-aperture telescope
DE102008000967B4 (de) * 2008-04-03 2015-04-09 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die EUV-Mikrolithographie
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KR101639229B1 (ko) * 2008-07-21 2016-07-13 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치용 광학 요소 마운트
DE102009005954B4 (de) * 2009-01-20 2010-10-21 Carl Zeiss Smt Ag Dämpfungsvorrichtung
JP5610827B2 (ja) * 2010-04-21 2014-10-22 キヤノン株式会社 保持装置、光学装置及び天体望遠鏡
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CN103869629B (zh) * 2012-12-13 2016-03-16 中芯国际集成电路制造(上海)有限公司 光刻系统以及光刻方法
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CN105739248B (zh) * 2016-04-01 2018-01-09 中国科学院长春光学精密机械与物理研究所 光学元件支撑结构、单元镜组、曝光光学系统及光刻机
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DE102016215540A1 (de) * 2016-08-18 2018-02-22 Carl Zeiss Smt Gmbh Optisches system, lithographieanlage sowie verfahren
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CN111198465A (zh) * 2018-11-16 2020-05-26 三营超精密光电(晋城)有限公司 挡环及采用该挡环的镜头
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Also Published As

Publication number Publication date
DE19904152A1 (de) 2000-08-10
EP1026532A1 (de) 2000-08-09
US6392825B1 (en) 2002-05-21
JP2000227533A (ja) 2000-08-15
TW438985B (en) 2001-06-07
DE50003682D1 (de) 2003-10-23
KR20010014455A (ko) 2001-02-26
KR100641772B1 (ko) 2006-11-13

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